CN106814463B - Automatic adjusument spatial filter and high-power RF CO slab2Laser - Google Patents
Automatic adjusument spatial filter and high-power RF CO slab2Laser Download PDFInfo
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- CN106814463B CN106814463B CN201611249963.0A CN201611249963A CN106814463B CN 106814463 B CN106814463 B CN 106814463B CN 201611249963 A CN201611249963 A CN 201611249963A CN 106814463 B CN106814463 B CN 106814463B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
Abstract
The invention discloses one kind to be applied to high-power RF CO slab2The automatic adjusument spatial filter of laser, belongs to beam shaping field；In the prior art since filter parameter is not adjustable, the beam quality degradation when light beam changes；Automatic adjusument filter provided by the invention includes control unit and machine assembly；Control unit receives the signal of temperature sensor and four-quadrant optical detector, judges the state and beam quality of optical path, controls precision stepper motor and two high-resolution linear motor movements in machine assembly, changes slit size, position and the posture of filter；The light beam secondary lobe in non-steady direction is filtered out, obtain that all directions angle of divergence is approximately equal and distribution of light intensity is in the round light beam of basic mode Gaussian Profile, radio frequency strip laser filter can be adjusted quickly to optimum position, the stability for improving Optical Maser System reduces Laser Output Beam quality to the sensibility of filter status.
Description
Technical field
The invention belongs to high power laser beam shaping fields, are applied to high-power RF plate more particularly, to one kind
CO2The automatic adjusument spatial filter of laser.
Background technique
The gain region of radio frequency strip laser is strip, and traditional spherical mirror resonator can not extract enough power and height
The laser of beam quality exports.High-power RF CO slab2Laser is coupled using negative Zhi Feiwen-waveguide mixing chamber using side
Output form.Due to its good mode distinguishing ability, unsteady cavity is suitable for high power, large gain, big Fresnel number and big
The laser of model volume.It is designed in lateral large scale gain section using asymmetric unsteady cavity, is obtained in side close to diffraction pole
The collimation laser of limit exports, and the narrow gap direction between two-plate design for waveguide cavity, realization interacvity gain medium volume and
The matched well of the lowest-order mould of waveguide cavity, to obtain the laser generation of high efficiency, high light beam quality.
Radio frequency strip laser is using non-steady-waveguide mixing chamber, so that laser near field output facula is being parallel to electrode
The direction of plane is approximately the distribution of multimodal shape.And in far field, light beam will dissipate very big, far field in the direction perpendicular to electrode plane
Hot spot growth strip.Before beam shaping, the whole simple astigmatism light beam for strip distribution of output beam, incipient beam of light is non-steady
Beam radius on direction is greater than the beam radius in wave guide direction, and non-steady direction beam divergence angle is much smaller than wave guide direction light beam
The angle of divergence, and the light distribution on non-steady direction is vibrated with a large amount of high spatial frequency.Such output beam is can not
It is direct applied, it is necessary to carry out beam shaping.
Orthopedic systems basic structure is for optical cavity side output beam through the diamond window on box body wall after 90 ° of turnovers
Mouthful, then transfer and be mapped to a spherical surface tail mirror progress first time convergence.After the focusing of spherical surface tail mirror, light beam passes through a space filtering
Device, the secondary lobe that will affect beam quality filter out, and then project cylindrical mirror and carry out second of convergence, finally by a piece of spherical mirror
Reflection output obtains the laser facula of approximate basic mode light beam.
Spatial filter generallys use the filter of fixed position, fixed size and fixed pose at present, due to filter
The position of slit must make waveguide light beam and non-steady light beam main lobe pass through completely；And the size of slit must accurately correspond to it is non-steady
Lobe reflections are gone out optical path by the main lobe width of light beam, and slit direction keeps the light beam of wave guide direction complete the wave guide direction of collimated light beam
Full by.But since the assembly of other original parts in optical path is there are error, the optical axis of actual light beam not necessarily passes through space filtering
Device or focal beam spot size change even wave guide direction and slit direction it is inconsistent, when beam center deviation slit can lead
It causes without going out light, hot spot is greater than slit width, and then light extraction efficiency is too low, and hot spot is less than slit width then without filter effect, waveguide
Slit is deviateed in direction may cause new secondary lobe generation.
Summary of the invention
The present invention solves the technical problem of overcome lacking in high-power RF slab laser beam shaping system
It falls into, the device that a kind of automatic filter removes secondary lobe is provided, obtain that all directions angle of divergence is approximately equal and distribution of light intensity is high in basic mode
The round light beam of this distribution.
The present invention provides one kind to be applied to high-power RF CO slab2The automatic adjusument spatial filter of laser,
Including control unit and machine assembly, machine assembly includes: the first high-resolution linear motor, the second high-resolution straight-line electric
Machine, precision stepper motor, worm screw, worm gear, the first nut, first baffle, the first shift fork, swingle, translator slider, swivel plate,
Stop screw, wing plate synchronize forward and reverse thread spindle, the first guide rail, swivel adaptors, the second shift fork, second baffle, the second nut
With the second guide rail；The first baffle is connected by first shift fork with first nut, and the second baffle passes through institute
It states the second shift fork to be connected with second nut, first nut is arranged with second nut in synchronous forward and reverse spiral shell
Line axis two sides, the worm gear be fixed on it is described synchronize forward and reverse screw thread axis center, the worm screw is located at the side of the worm gear, institute
The shaft for stating precision stepper motor is connected by the swivel adaptors with the worm screw, and the precision stepper motor is fixed on institute
It states in translator slider, the translator slider is socketed on first guide rail and second guide rail, second high-resolution
The mandril of linear motor is connected by the aperture of the swivel plate with the translator slider, and the stop screw is mounted on the rotation
It is connect in the limiting slot of rotating plate with the wing plate, the first high-resolution linear motor passes through aperture and institute on the wing plate
Swingle is stated to be connected.
Further, the machine assembly further include: first back-moving spring, second back-moving spring and third reset bullet
Spring；The first back-moving spring is arranged between the swingle and the wing plate；The second back-moving spring is mounted on described
On second guide rail and make the translator slider between the second back-moving spring and the second high-resolution linear motor；Institute
Third reset spring is stated to be mounted on first guide rail and make the translator slider in the third reset spring and described
Between two high-resolution linear motors.
Further, described control unit includes: central processing unit, and power module, signal acquisition module and signal are put
Big module, signal amplification module, signal acquisition module and central processing unit are sequentially connected, the first input end of signal amplification module
For connecting the output end of temperature sensor, the second input terminal of signal amplification module is for connecting four-quadrant photo detector
The output end of output end, central processing unit connects machine assembly；One end of power module connects alternating current, and the other end is respectively connected to
The power end of signal amplification module, signal acquisition module and central processing unit.
Further, it is rotated by precision stepper motor shaft and drives worm screw rotation, the rotation of worm screw every revolution worm gear
One screw thread, worm gear rotation, which drives, synchronizes the rotation of forward and reverse thread spindle, synchronizes on forward and reverse thread spindle two oppositely oriented the
One nut and the second nut drive the wedge shaped baffle on the first shift fork and the second shift fork to move on transverse axis simultaneously, Jin Ergai
The size of stenosis seam；The entirety of baffle is controlled by the compression of the first high-resolution linear motor of control or release reset spring simultaneously
Position changes the position of slit；Push swingle that slit direction is revolved by the first high-resolution linear motor of control simultaneously
Turn.
The present invention also provides a kind of RF board bar CO including above-mentioned automatic adjusument spatial filter2Laser,
It include: the first bar shaped reflecting mirror, the second bar shaped reflecting mirror, laser output mirror, output window mouth mirror, turning mirror focuses spherical mirror, from
It adapts to adjust spatial filter, temperature sensor, cylindrical mirror collimates spherical mirror, four-quadrant photo detector and a pair of of parallel-plate
Electrode；The first bar shaped reflecting mirror and the second confocal placement of bar shaped reflecting mirror, a pair of of parallel-plate electrode are placed on described first
Between bar shaped reflecting mirror and the second bar shaped reflecting mirror, the laser output mirror normal and the first bar shaped reflecting mirror and Article 2
The symmetry axis of shape reflecting mirror angle at 45 ° is placed, the normal angle at 45 ° of the output window mouth mirror normal and the laser output mirror,
The turning mirror is placed in parallel with the laser output mirror, and the output window mouth mirror is located at the laser output mirror and the turnover
Between mirror, the central axes and the laser output mirror normal angle at 45 ° for focusing spherical mirror, the automatic adjusument space filter
Wave device is between the focusing spherical mirror and the cylindrical mirror, and automatic adjusument spatial filter setting is described poly-
On the focal plane of burnt spherical mirror, the temperature sensor is tightly attached to automatic adjusument spatial filter baffle surface, the cylindrical mirror
Central axes and the central axes for focusing spherical mirror at a small angle, the axis and the cylindrical mirror of the collimation spherical mirror
Central axes about it is described focus spherical mirror central axes it is symmetrical, the normal of institute's four-quadrant photo detector is perpendicular to collimated ball
The central axes of face mirror.
Further, the first bar shaped reflecting mirror and the second bar shaped reflecting mirror are concave mirror.
Further, the size of the four-quadrant photo detector is greater than the hot spot ruler that light beam is formed in detector surface
It is very little.
Processor rotates worm and gear and then drives baffle simultaneously by control precision stepper motor rotation in the present invention
It moves synchronously, changes the size of slit；The compression of the second high-resolution linear motor and release reset spring control gear are controlled simultaneously
The integral position of plate changes the position of slit；Swingle is pushed to make by the first high-resolution linear motor of control simultaneously narrow
Seam direction rotates.
Temperature sensor should select small in size in the present invention, and being subject to does not influence wedge shaped baffle temperature；And installation site is not
It can hinder laser irradiation baffle.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, have it is following beneficial to effect
Fruit:
(1) present invention uses adaptive spatial filter, automatically adjusts size, position and the posture of filter, improves
The stability of Optical Maser System reduces Laser Output Beam quality to the sensibility of filter status.
(2) wedge shaped baffle is driven using precision stepper motor and worm gear structure and high-resolution linear motor, so that
Wedge shaped baffle is mobile rapidly, and registration, dimming process the degree of automation improves, and reduces error caused by manual assembly to light
Beam quality bring influences.
(3) this automatic adjusument spatial filter is using the wedge shaped baffle of spacing, position and controlled attitude as main work
Make original part, improves filter to the adaptability of the laser of different parameters.
Detailed description of the invention
Fig. 1 is the system schematic with high-power RF slab laser of the invention.
Fig. 2 is the space schematic diagram and axis explanation of filter.
Fig. 3 is the different imbalance situation schematic diagram of filter, and (a) is the case where slit is greater than main lobe width, (b) is slit
The case where width is less than the case where main lobe width, (c) deviates for slit to a direction (d) is slit axis and wave guide direction
The case where there are angles.
Fig. 4 is the structure chart of automatic adjusument spatial filter of the present invention and adjusts schematic diagram, and (a) is automatic adjusument filter
The overall structure of wave device and the schematic diagram of beam direction, (b) to adjust key structure moving direction schematic diagram when slit size,
(c) (d) mobile for key structure when adjusting slit posture to adjust key structure moving direction schematic diagram when slit location
Direction schematic diagram.
Fig. 5 is influence of the different spaces filter width to shaping light beam light distribution, and (a) is that slit width is 0.9mm
When light distribution, the light intensity point that (b) light distribution (c) when be slit width being 1.2mm is slit width when being 1.4mm
Cloth, (d) for no diaphragm when light distribution.
Fig. 6 is light distribution when shaping beam Propagation distance is 2000mm after spatial filter is laterally lacked of proper care.It (a) is mistake
Light distribution when 0.1mm is adjusted, is (b) light distribution when 0.2mm of lacking of proper care, is (c) light distribution when 0.3mm of lacking of proper care, (d)
For light distribution when 0.4mm of lacking of proper care.
The imbalance of Fig. 7 lateral displacement leads to excess loss power percentage curve.
There are when angle, light intensity of the shaping light beam at 2000mm is divided for Fig. 8 spatial filter slit axis and wave guide direction
Cloth, the light distribution that (a) is angle when being 3 °, (b) light distribution when be angle being 3 °, (c) light intensity when be angle being 5 °
Distribution, (d) light distribution when be angle being 7 °.
There are when angle, wave guide direction light beam power is lost for Fig. 9 spatial filter slit axis and wave guide direction.
The control unit schematic diagram of Figure 10 automatic adjusument spatial filter.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
The spatial filter of automatic adjusument in the present invention refers to control unit according to temperature sensor and four-quadrant
The feedback signal of photodetector judges the case where output beam quality and baffle are illuminated by the light, and control machine assembly moves, automatically
Adjust the spatial filter of slit location, size and posture.
High-power RF CO slab of the present invention2Laser automatic adjusument spatial filter, refers in unsteady cavity output beam
A slit is first passed through before by cylindrical mirror, the wedge shaped baffle of slit two sides blocks the secondary lobe in non-steady direction, improves light beam and exists
Quality after cylindrical mirror.For entire laser, size, position and the posture of slit determine the effect of beam shaping
Fruit, slit off-beams center, which will lead to, does not go out light, and the too small then light extraction efficiency of slit is too low, and slit is too big then without filtering effect
Fruit, slit direction, which deviates wave guide direction, may generate new secondary lobe.The purpose of the present invention is clear, exactly solve slit size,
The problem of automatic adjusument of position and posture.
The present invention provides a kind of spatial filter of automatic adjusument, feature for high-power RF slab laser
When being that the bar shaped light beam with secondary lobe is irradiated to filter, light beam heats the wedge shaped baffle of filter, above-mentioned wedge shaped baffle it
Between there are slit and the slit it is vertical with the non-steady direction of bar shaped light beam, it is parallel with wave guide direction, utilize temperature sensor and four
Quadrant photodetector converts optical signals into electric signal, and processor handles the electric signal and passes through the position of the above-mentioned wedge shaped baffle of control
It sets, so that filter reaches optimum Working.
Since the change of the difference of other original part manufacture crafts of laser, original part rigging error or environment temperature causes light
Offset of the axis at spatial filter can seriously affect the quality of output beam, and high-power RF slab laser is mainly by bar shaped
Reflecting mirror, parallel-plate electrode, outgoing mirror, optical window, spatial filter and cylindrical mirror composition.
It is as shown in Figure 1 the system schematic of radio frequency strip laser, radio frequency strip laser includes: the first bar shaped reflection
Mirror 1, the second bar shaped reflecting mirror 2, laser output mirror 3, output window mouth mirror 4 (can select Diamond window), turning mirror 5, focus
Spherical mirror 6, automatic adjusument spatial filter 7, temperature sensor 8, cylindrical mirror 9 collimate spherical mirror 10, four-quadrant photodetection
Device 11 and a pair of of parallel-plate electrode 12；First bar shaped reflecting mirror 1 and the confocal placement of the second bar shaped reflecting mirror 2, a pair of of parallel-plate electricity
Pole 12 is placed between above-mentioned two bar shapeds reflecting mirror, and 3 normal of laser output mirror and the symmetry axis angle at 45 ° of above-mentioned two reflecting mirror are put
It sets, the normal angle at 45 ° of 4 normal of output window mouth mirror and laser output mirror 3, turning mirror 5 is placed in parallel with laser output mirror, output
For window mirror 4 between laser output mirror 3 and turning mirror, central axes and the laser output mirror normal for focusing spherical mirror 6 are at 45 °
Angle, automatic adjusument spatial filter 7 are placed on the focal plane for focusing spherical mirror 6, and temperature sensor 8 is tightly attached to automatic adjusument sky
Between 7 baffle surface of filter, the central axes of cylindrical mirror 9 and focus the central axes of spherical mirror 6 into a small angle, automatic adjusument
Spatial filter 7, which is located at, to be focused between spherical mirror 6 and cylindrical mirror 9, and the central axes of the axis and cylindrical mirror 9 that collimate spherical mirror 10 are closed
Symmetrical in the central axes for focusing spherical mirror 6, the normal of four-quadrant photo detector 11 is perpendicular to the central axes for collimating spherical mirror 10.
In embodiments of the present invention, the first bar shaped reflecting mirror 1 confocal placement parallel with 2 axis of the second bar shaped reflecting mirror, figure
Show that two reflecting mirrors are concave mirror, forms the negative confocal non-stable resonant cavity of branch, the size and radius of two reflecting mirrors and design
Resonant cavity Fresnel number is related with magnifying power, and a pair of of parallel-plate electrode is placed in two bar shaped reflecting mirror two sides, parallel-plate electrode
Between for electric discharge gain region, laser output mirror is usually located on the first bar shaped reflecting mirror, changes the outbound course of light beam, laser is defeated
The size of appearance is identical as the size of hot spot on mirror surface, and above structure is typically encapsulated within intracavitary a, Buddha's warrior attendant in practical applications
Stone output window mouth mirror separates inside and outside of cavity as the outgoing mirror of the chamber, and the direction of propagation that turning mirror mainly changes light beam makes
Light beam is irradiated to focusing spherical mirror, and the size of turning mirror is identical as the size of hot spot on mirror surface, focuses the focal length of spherical mirror and is somebody's turn to do
Mirror center is equidistant to filter center, i.e., filter center is located on the focal plane for focusing spherical mirror, the slit of filter
Length is slightly larger than light beam in the length of wave guide direction, and temperature sensor is attached to filter surface, does not influence the propagation of light beam, column
There are a small angles with beam center axis for face mirror axis, so that light beam designs cylindrical mirror with the incident angles of very little
Parameter selects position of the cylindrical mirror in optical path, so that output light so that the angle of divergence of output beam in two directions is equal
Beamwidth of the beam in wave guide direction and non-steady direction is equal, and light beam is output to outside laser by collimation spherical mirror, by adjusting the mirror
Radius can obtain the light beam of the different angles of divergence and waist radius, the size of four-quadrant photo detector is greater than light beam and is detecting
The spot size that device surface is formed, since output beam is approximately to have after the directional light detector can be placed on collimation spherical mirror
Range line is from place.To prevent deformation, circulating water surface temperature should be added at the fever of above-mentioned device.
As shown in Fig. 2, light beam is generated out of resonant cavity after the edge diffraction of the first bar shaped reflecting mirror, light beam is divided into wave
Direction and non-steady direction are led, diagram light beam is non-steady direction light beam, and light beam is irradiated to the direction of propagation on laser output mirror and changes 90
Degree focuses spherical mirror and is focused to light beam, and the main lobe in non-steady direction and secondary lobe is separated on focal plane, space filtering
Device is located on the focal plane, makes only secondary lobe be irradiated to temperature sensing by the size of adjust automatically slit, position and posture
Optical path is scattered on device, filtered light beam is shaped as the symmetrical beam that the both direction angle of divergence is equal and width is equal by cylindrical mirror
Beam is finally exported laser by collimation spherical mirror.
Above situation is that spatial filter slit is in optimum position and precision stepper motor and high-resolution straight-line electric
The target position that machine drives wedge shaped baffle to reach, the i.e. axis of slit are by the focus for focusing spherical mirror and slit center is in optical axis
Upper and slit axis is parallel with wave guide direction.But since the precision of motor and other mechanical structures limits, wedge shaped baffle is often
Optimum position cannot be reached, this will lead to output beam quality decline.It is illustrated in figure 3 the different error feelings being likely to occur
Condition: (a) slit location is correct, but width is excessive；(b) slit location is correct, but width is too small；(c) slit center is not in optical axis
On；(d) there are angles with wave guide direction for slit direction.
System major parameter is as shown in Table 1:
Table one
When using the above parameters, the M of both direction when the slit width of spatial filter is 0.9mm2Factor difference is exhausted
Minimum to value, power loss only has 9.5%, and the width of light beam difference of both direction is 0.05m when transmitting 1000mm.When slit is wide
It spends power loss when being less than 0.9mm to increase, for example loss is 10% when 0.8mm, this is lost not for high power laser
It can receive；As shown in Figure 5 when slit location is correct, the beam divergence angle increase that slit width increases non-steady direction leads to light beam matter
Amount decline, when width increases to 1.2mm, both direction light beam difference increases to 0.2mm；If Fig. 6 is when slit center is not in light
On axis, hot spot becomes ellipse by circle when there is offset to side, when offset is that the direction 0.2mm Shi Feiwen light beam is no longer
There is secondary lobe when offset is 0.3mm in Gaussian beam, and when offset is 0.2mm, increased loss is as shown in Figure 7
1.2%, increased loss is 9.6% when offset is 0.3mm；As shown in Figure 8 when there are angles with slit direction for wave guide direction
When beam quality decline, and light beam starts to generate secondary lobe, the as shown in Figure 9 power loss when angle is 5 ° when angle is greater than 5 °
Power loss is 25% when for 2% angle being 10 °, and angle generates secondary lobe when being greater than 5 °.
In embodiments of the present invention, automatic adjusument spatial filter includes: control unit and machine assembly.Such as Figure 10 institute
Show, wherein control unit includes: central processing unit, power module, signal acquisition module and signal amplification module, and signal amplifies mould
Block, signal acquisition module and central processing unit are sequentially connected, and the first input end of signal amplification module is for connecting temperature sensing
The output end of device, the second input terminal of signal amplification module are used to connect the output end of four-quadrant photo detector, central processing
The output end of device connects machine assembly；One end of power module connects alternating current, and the other end is respectively connected to signal amplification module, letter
The power end of number acquisition module and central processing unit.
Collected signal is converted into electric signal by temperature sensor and four-quadrant photo detector, and signal amplification module will
Amplified analog signal is converted into digital signal and is sent to central processing unit by faint electric signal amplification, signal acquisition module
Serial ports, processor judge beam quality and optical path states by two paths of signals, then issue control signal to mechanical single
The precision stepper motor and high-resolution linear motor of member, adjust filter.
The High Level AC Voltage of alternating current is converted into the low-voltage DC that modules use by energy supply control module, while to protect
The safety and stability of control unit is demonstrate,proved, power module should have the function of overload protection and Ripple Suppression etc..If there is needing
It wants, the voltage of control unit can be provided by lithium battery, and energy supply control module is only responsible for transformation.
It is illustrated in figure 4 the mechanical construction drawing of adaptive spatial filter and adjusts schematic diagram, Fig. 4 (a) is adaptive adjusts
Save the overall structure figure of spatial filter, Fig. 4 (b) is the big minor adjustment schematic diagram of filter slit, scheme in all structures be known as the
One benchmark；Fig. 4 (c) is that filter slit location adjusts schematic diagram, schemes interior all structures and is known as the second benchmark；Fig. 4 (d) is filtering
Device slit attitude regulation schematic diagram schemes interior all structures and is known as third benchmark.
In embodiments of the present invention, machine assembly includes: the first high-resolution linear motor 13, the second high-resolution straight line
Motor 14, precision stepper motor 15, worm screw 16, worm gear 17, the first nut 18, first baffle 19, the first shift fork 20, swingle
23, translator slider 24, swivel plate 25, stop screw 26, wing plate 27, synchronize forward and reverse thread spindle 28, the first guide rail 29, and rotation turns
Connect device 30, the second shift fork 32, second baffle 33, the second nut 34 and the second guide rail 35；Wherein, first baffle 19 passes through first
Shift fork 20 is connected with the first nut 18, and second baffle 33 is connected by the second shift fork 32 with the second nut 34, above-mentioned two nut
It is spun on and synchronizes forward and reverse 28 two sides of thread spindle, worm gear 17, which is fixed on, synchronizes forward and reverse 28 center of thread spindle, and worm screw 16 is located at worm gear
The shaft of 17 side, precision stepper motor 15 is connected by swivel adaptors 30 with worm screw 16, and precision stepper motor 15 is fixed
In translator slider 24, above-mentioned translator slider is socketed on the first guide rail 29 and the second guide rail 35, the second high-resolution straight-line electric
The mandril of machine 14 is connected by the aperture of swivel plate 25 with translator slider 24, and stop screw 26 is mounted on the limiting slot of swivel plate 25
In connect with wing plate 27, the first high-resolution linear motor 13 is connected by the aperture on wing plate 27 with swingle 23.
In embodiments of the present invention, machine assembly further include: first back-moving spring 21, second back-moving spring 22 and third are multiple
Position spring 31, wherein first back-moving spring 21 is mounted between swingle 23 and wing plate 27, second back-moving spring 22 and is mounted on
On second guide rail 35, make translator slider 24 between second back-moving spring 22 and the second high-resolution linear motor, third resets
Spring 31 is mounted on the first guide rail 29, make translator slider 24 third reset spring 31 and the second high-resolution linear motor it
Between.
Specifically, as shown in Fig. 4 (a), due to first baffle 19 and second baffle 33 respectively with one end of corresponding shift fork
Being fastenedly connected becomes an entirety, and the length of shift fork makes baffle center be located at the center of optical path, and the other end of the shift fork is distinguished
A nut is connected, the thread rotary orientation of two nuts synchronizes forward and reverse 28 two sides of thread spindle, the thread spindle on the contrary, nut is spun on
The thread rotary orientation of outer surface two sides matches with corresponding nut, and the length of the thread spindle is decided by that automatic adjusument filter is narrow
The disruption range of size is stitched, the screw thread junction of the thread spindle is fastenedly connected a worm gear 17, and the axis of the thread spindle passes through snail
The center of circle of wheel cross section, this synchronizes forward and reverse helical axis and the worm gear and rotates in the same direction with angular speed, and matched snail is installed in worm gear side
Bar 16,16 upper end of worm screw are connected by swivel adaptors 30 with the shaft of precision stepper motor 15, and the shell two sides of the motor have
Fixation hole is fixed by screws in translator slider 24, when translator slider 24 moves left and right, drives the part in the first benchmark
Whole translation；Translator slider is socketed on the first guide rail 29 and the second guide rail 35, and above-mentioned two guide rail two sides are fixed on swivel plate 25
Between the parallel surface of the left and right sides, is installed on the first guide rail 29 between translator slider 24 and a side of swivel plate 25
Three reset springs 31 install second back-moving spring 22, above-mentioned two both ends of the spring and translator slider 24 and rotation on second guide rail 35
Plate 25 connects, and has a through hole on another side of swivel plate 25, and the mandril of the first high-resolution linear motor 13 is logical
The hole is crossed to be in contact with translator slider 24, mandril length meet in adjustment process mandril endpoint always with 24 phase of translator slider
Contact, when mandril is reduced to most, translator slider 24 is located at the leftmost side of the first guide rail 29 and the second guide rail 35, the second reset 22 in short-term
It is in the state of most diastole with 31 spring of third reset spring, is most pressed when mandril is elongated to above-mentioned two spring in longest position and is in
The compression zone of the state of contracting, the moving range of translator slider 24 and above-mentioned two spring is decided by that automatic adjusument filter is lateral
Disruption range；There is an arc limit slot at the middle part of swivel plate 25, and the center of circle of arc is located on the central axes of optical path, arc
Subtended angle is decided by the disruption range of automatic adjusument filter direction of rotation, stop screw 26 by the limiting slot by swivel plate and
Wing plate 27 on the outside of light bucket connects, and prevents swivel plate 25 from existing in the normal direction of wing plate 27 and moves, in swivel plate 25
A prominent swingle 23 on the upside of portion, the swingle 23 are located between the 27 two parallel plane protrusions in upside of wing plate, swingle 23
It is connected between a planar projection with first back-moving spring 21, there is a through hole in the middle part of another planar projection, the
The mandril of one high-resolution linear motor 13 is in contact by the hole with swivel plate, the length of the mandril and the limit of swivel plate 25
The subtended angle of slot matches, and is able to satisfy the adjustable range of sef-adapting filter.
As shown in Fig. 4 (b), the rotation of precision stepper motor shaft drives worm screw rotation, worm screw every revolution worm gear rotation one
A screw thread, worm gear rotation, which drives, synchronizes forward and reverse thread spindle rotation, two oppositely oriented nuts while band on above-mentioned thread spindle
Wedge shaped baffle on dynamic shift fork moves on transverse axis, and then changes the size of slit, and the axis explanation of spatial filter is such as
Shown in Fig. 2.Translator slider fastening as shown in Fig. 4 (c), on the screw and guide rail that the first benchmark passes through precision stepper motor two sides
Connection, the second high-resolution linear motor 14 increase or shorten mandril expose length push translator slider on guide rail to the right or
It is translatable to the left, while translator slider compression or release second back-moving spring and third reset spring, translator slider drive the first base
Entire infrastructure in standard be translatable and then changes the position of slit.As shown in Fig. 4 (d), the entire infrastructure in the second benchmark is logical
It crosses stop screw to be fixed in wing plate plane, stop screw can only slide in the plane along limiting slot, when the first high-resolution
Swingle compresses first back-moving spring to the left or discharges the to the right when linear motor 13 increases or shorten the length that mandril exposes
One reset spring is rotated around light bucket center by the entire infrastructure in the second benchmark of effect of swingle, and then changes filter
Posture.
In order to make adjustment process definitely, automatic adjusument space of the invention is sketched in case where a kind of possibility
The course of work of filter.Assuming that original state are as follows: two baffles are in any position, laser irradiation to a baffle, slit width
Arbitrarily, there are low-angle deviations for baffle posture.Then filter status adjusting sequence is as follows:
(1) adjusting of position: two temperature sensors on baffle a and baffle b generate two temperature signals, the first high score
Resolution linear motor 13, which shrinks mandril, keeps slit mobile to the direction of baffle a, when the temperature signal that two baffles generate is equal
Stop movement.
(2) adjusting of posture: the first high-resolution linear motor 13 is released or shrinks mandril, so that four-quadrant photodetection
Four electric signal summations that device generates are maximum, this should keep slit location constant in the process, so needing precision stepper motor same
Step is moved, and moving distance is determined by control algolithm.
(3) adjusting of size: precision stepper motor rotates in the forward direction, so that slit width becomes smaller, increases laser irradiation and is keeping off
Power on plate, when temperature ramp-up rate reaches given threshold, two motors replace direction counter motion, until temperature control one
Secondary stop motion when dropping to minimum.
The wave guide direction of light beam is in the position of the first minimum along slit central axes direction, two baffle edges at this time
It sets, main lobe all passes through, and the four tunnel signal variances that secondary lobe is irradiated to 4 quadrant detector on baffle are minimum, the weight when variance becomes larger
It is new to execute above-mentioned steps.
If the temperature signal that temperature sensor when any on baffle receives is greater than maximum temperature threshold value, two gears
Plate moves out reduction irradiation power immediately, prevents from burning out filter and sensor.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (4)
1. one kind is applied to high-power RF CO slab2The automatic adjusument spatial filter of laser, including control unit and machine
Tool unit, which is characterized in that the machine assembly includes: the first high-resolution linear motor (13), the second high-resolution straight line
Motor (14), precision stepper motor (15), worm screw (16), worm gear (17), the first nut (18), first baffle (19), first group
(20), swingle (23), translator slider (24), swivel plate (25), stop screw (26), wing plate (27) are pitched, forward and reverse spiral shell is synchronized
Line axis (28), the first guide rail (29), swivel adaptors (30), the second shift fork (32), second baffle (33), the second nut (34) and
Second guide rail (35)；
The first baffle (19) is connected by first shift fork (20) with first nut (18), the second baffle
(33) it is connected by second shift fork (32) with second nut (34), first nut (18) and second nut
(34) setting synchronizes forward and reverse thread spindle (28) two sides described, and the worm gear (17), which is fixed on, described synchronizes forward and reverse thread spindle
(28) center, the worm screw (16) are located at the side of the worm gear (17), and the shaft of the precision stepper motor (15) passes through institute
It states swivel adaptors (30) to be connected with the worm screw (16), the precision stepper motor (15) is fixed on the translator slider (24)
On, the translator slider (24) is socketed on first guide rail (29) and second guide rail (35), second high-resolution
The mandril of rate linear motor (14) is connected by the aperture of the swivel plate (25) with the translator slider (24), the limit spiral shell
Nail (26) is mounted in the limiting slot of the swivel plate (25) to be connect with the wing plate (27), the first high-resolution straight-line electric
Machine (13) is connected by the aperture on the wing plate (27) with the swingle (23)；
The machine assembly further include: first back-moving spring (21), second back-moving spring (22) and third reset spring (31)；
The first back-moving spring (21) is arranged between the swingle (23) and the wing plate (27)；Described second resets bullet
Spring (22) is mounted on second guide rail (35) and makes the translator slider (24) in the second back-moving spring (22) and institute
It states between the second high-resolution linear motor (14)；The third reset spring (31) is mounted on first guide rail (29) simultaneously
Make the translator slider (24) between the third reset spring (31) and the second high-resolution linear motor (14)；
Described control unit includes: central processing unit, power module, signal acquisition module and signal amplification module, signal amplification
Module, signal acquisition module and central processing unit are sequentially connected, and the first input end of signal amplification module is for connecting temperature biography
The output end of sensor, the second input terminal of signal amplification module are used to connect the output end of four-quadrant photo detector, centre
The output end for managing device connects machine assembly；One end of power module connects alternating current, the other end be respectively connected to signal amplification module,
The power end of signal acquisition module and central processing unit；
It is rotated by precision stepper motor (15) shaft and drives worm screw (16) rotation, worm screw (16) every revolution worm gear (17) rotation
One screw thread, worm gear (17) rotation, which drives, synchronizes forward and reverse thread spindle (28) rotation, synchronizes forward and reverse thread spindle (28) upper two
Oppositely oriented the first nut (18) and the second nut (34) drives the wedge on the first shift fork (20) and the second shift fork (32) simultaneously
Shape baffle moves on transverse axis, and then changes the size of slit；Pass through the second high-resolution linear motor pressure of control simultaneously
The integral position of contracting or release second back-moving spring (22) and third reset spring (31) control baffle, changes the position of slit；
Push swingle that slit direction is rotated by the first high-resolution linear motor of control simultaneously.
2. a kind of RF board bar CO including automatic adjusument spatial filter described in claim 12Laser, feature exist
In, comprising: the first bar shaped reflecting mirror (1), the second bar shaped reflecting mirror (2), laser output mirror (3), output window mouth mirror (4), turnover
Mirror (5) focuses spherical mirror (6), automatic adjusument spatial filter (7), temperature sensor (8), cylindrical mirror (9), collimates spherical surface
Mirror (10), four-quadrant photo detector (11) and a pair of of parallel-plate electrode (12)；
The first bar shaped reflecting mirror (1) and second bar shaped reflecting mirror (2) confocal placement, a pair of of parallel-plate electrode (12) are placed on
Between the first bar shaped reflecting mirror (1) and the second bar shaped reflecting mirror (2), laser output mirror (3) normal and described first
The symmetry axis of bar shaped reflecting mirror (1) and the second bar shaped reflecting mirror (2) angle at 45 ° is placed, output window mouth mirror (4) normal and institute
The normal angle at 45 ° of laser output mirror (3) is stated, the turning mirror (5) is placed in parallel with the laser output mirror (3), described defeated
Window mirror (4) is between the laser output mirror (3) and the turning mirror (5) out, the central axes for focusing spherical mirror (6)
With the laser output mirror normal angle at 45 °, the automatic adjusument spatial filter (7) is located at the focusing spherical mirror (6)
Between the cylindrical mirror (9), and the automatic adjusument spatial filter (7) setting is in the coke for focusing spherical mirror (6)
On face, the temperature sensor (8) is tightly attached to automatic adjusument spatial filter (7) baffle surface, in the cylindrical mirror (9)
Axis and the central axes for focusing spherical mirror (6) are at a small angle, the axis and the column of collimation spherical mirror (10)
The central axes of face mirror (9) are symmetrical about the central axes for focusing spherical mirror (6), the normal of institute's four-quadrant photo detector (11)
Perpendicular to the central axes of collimated spherical mirror (10).
3. RF board bar CO as claimed in claim 22Laser, which is characterized in that the first bar shaped reflecting mirror (1) and institute
Stating the second bar shaped reflecting mirror (2) is concave mirror.
4. RF board bar CO as claimed in claim 2 or claim 32Laser, which is characterized in that the four-quadrant photo detector
Size is greater than the spot size that light beam is formed in detector surface.
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| CN201611249963.0A CN106814463B (en) | 2016-12-29 | 2016-12-29 | Automatic adjusument spatial filter and high-power RF CO slab2Laser |
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| CN201611249963.0A CN106814463B (en) | 2016-12-29 | 2016-12-29 | Automatic adjusument spatial filter and high-power RF CO slab2Laser |
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| CN109244817B (en) * | 2018-10-08 | 2019-11-12 | 华中科技大学 | A kind of CO2 laser output system based on the distribution of output beam circular power |
| CN110376748B (en) * | 2019-06-05 | 2021-06-29 | 佛山根固激光科技有限公司 | High-power laser Donut mode shaping device and shaping mirror |
| CN110221441A (en) * | 2019-06-17 | 2019-09-10 | 佛山根固激光科技有限公司 | RF board bar CO2The Adaptable System of laser stripes shaped light beam cylindrical mirror shaping |
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