CN206022877U - A kind of novel carbon dioxide radio frequency metal laser instrument - Google Patents
A kind of novel carbon dioxide radio frequency metal laser instrument Download PDFInfo
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- CN206022877U CN206022877U CN201620767457.XU CN201620767457U CN206022877U CN 206022877 U CN206022877 U CN 206022877U CN 201620767457 U CN201620767457 U CN 201620767457U CN 206022877 U CN206022877 U CN 206022877U
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Abstract
The utility model discloses a kind of novel carbon dioxide radio frequency metal laser instrument, including laser cavity, shaping cavity, is provided with baffle plate on the left of Top electrode, bottom electrode, region of discharge, region of discharge right-hand apron in laser chamber body；Top electrode is located in the upper groove in laser chamber body, and bottom electrode is located in the low groove in laser chamber body, Top electrode and the longitudinally parallel placement of bottom electrode；On the left of region of discharge, baffle plate, region of discharge right-hand apron and laser cavity are structure as a whole, monolithic extruded molding；Top electrode, bottom electrode are fixed in laser chamber body by jackscrew；Place kick fixed insulation is used on the left of Top electrode, bottom electrode and region of discharge between baffle plate, region of discharge right-hand apron, and forms rectangle radio-frequency discharge passage.The laser instrument that this utility model is provided have the advantages that simple and compact for structure, machining accuracy high, without light beam secondary lobe, and the position between electrode is adjustable so that the distance between electrode is easy to professional operator to be adjusted.
Description
Technical field
This utility model is related to the technical field of laser instrument, more particularly to a kind of novel carbon dioxide radio frequency metal laser
Device.
Background technology
Carbon dioxide radio frequency metal laser instrument, is one of technology with the fastest developing speed on industrial laserses market in recent years,
It is considered as the best substitute of glass tubing sealed-off carbon dioxide laser.
It adopts all-metal structure, with small volume, compact totally-enclosed, device, sealed-off operating, non-maintaining, low cost,
Modulating characteristic is excellent, output beam quality high (finer than glass tubing more than 3 times), injecting power density is high, running voltage is low, output
Power facilitates the features such as adjustable, power stability is excellent, operational reliability is high, it is even more important that carbon dioxide radio frequency metal
Laser instrument also has that long service life (typically more than 20000 hours), maintenance cost be low, also reusable after inflation, and
Without the need for advantages such as replacings；In all kinds of commodity lasers, per watt of output cost of carbon dioxide radio frequency metal laser instrument is minimum, inserts
Head efficiency is higher, and between 10%-12%, its application includes flexible material, the high-speed cutting of nonmetallic thermoset material sum, carving
Carve, weld etc..These advantages so that carbon dioxide radio frequency metal laser instrument, are especially suitable for industrialization and work continuously production.
But, in prior art, after carbon dioxide radio frequency laser electrode carries out polish installation in electrode, electrode it
Between distance cannot adjust, when electrode needs to optimize and revise, then need to dismount again laser cavity, change related device
Dimensional parameters, as laser cavity is vacuum cavity, belong to precise part, and above-mentioned adjustment mode needs professional apparatus and people
Member so that there may be the problem of the relevant parameter for affecting laser cavity during adjustment；Furthermore, in prior art,
Carbon dioxide laser light path system also has that light beam secondary lobe, machining accuracy be not high.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of machining accuracy height, the new titanium dioxide without light beam secondary lobe
Carbon radio frequency metal laser instrument, to overcome when electrode needs to optimize and revise, needs to dismount again laser cavity, changes correlator
The dimensional parameters of part, as laser cavity is vacuum cavity, belong to precise part, above-mentioned adjustment mode need professional apparatus and
Personnel so that there may be the problem of the relevant parameter for affecting laser cavity during adjustment.
In order to solve above-mentioned technical problem, the technical solution of the utility model is：
A kind of novel carbon dioxide radio frequency metal laser instrument, including laser cavity, shaping cavity, sets in laser chamber body
It is equipped with baffle plate on the left of Top electrode, bottom electrode, region of discharge, region of discharge right-hand apron；
Top electrode is located in the upper groove in laser chamber body, and bottom electrode is located in the low groove in laser chamber body, on
The parallel longitudinal placement of electrode and bottom electrode along laser cavity；Baffle plate, region of discharge right-hand apron and laser instrument on the left of region of discharge
Cavity is structure as a whole, and monolithic extruded molding, Top electrode, bottom electrode are fixed in laser chamber body by jackscrew；
Baffle plate on the left of Top electrode, bottom electrode, region of discharge, region of discharge right-hand apron vertical section in T shape；
Place kick fixed insulation is used on the left of Top electrode, bottom electrode and region of discharge between baffle plate, region of discharge right-hand apron, is positioned
Ball material be aluminium oxide ceramics, a diameter of 2mm；Formed on the right side of baffle plate, region of discharge on the left of Top electrode, bottom electrode, region of discharge rectangular
Shape radio-frequency discharge passage.
Used as further technical scheme, laser cavity is in integrally cuboid；On the left of Top electrode, bottom electrode, region of discharge
Baffle plate, the region of region of discharge right-hand apron composition form closed air storage chamber, are CO in gas storage room2、N2, He and Xe gaseous mixture
Body, and the optimal total gas pressure of mixed gas is controlled between 10～12kPa, optimal gas mixing ratio is CO2：N2：He：Xe=16:
16:63:5.
Used as further technical scheme, Top electrode, bottom electrode carry out height by the jackscrew arranged on Top electrode, bottom electrode
The adjustment of degree.
Used as further technical scheme, shaping cavity includes plane mirror, spherical surface focusing mirror, spatial filter, post
Face mirror and sphere collimating mirror are constituted；
The laser beam that Top electrode in laser chamber body, bottom electrode are produced passes sequentially through the resonator cavity output arranged in which
Mirror, window mirror enter shaping cavity, and laser beam enters shaping cavity and passes sequentially through plane mirror, spherical surface focusing mirror, space filter
Ripple device, cylindrical mirror and sphere collimating mirror carry out shaping.
Used as further technical scheme, the correspondence position of Top electrode, bottom electrode side along its length is evenly arranged with
Multiple inductance location holes, the coupling inductance between Top electrode, bottom electrode by arranging in the inductance location hole that is correspondingly arranged per group
Connection；Between the inductance location hole of the jackscrew of Top electrode and Top electrode, the inductance location hole of the jackscrew of bottom electrode and bottom electrode it
Between be provided with groove.
As further technical scheme, fan above laser cavity, is provided with, fan is by laser cavity
Multiple screws are screwed connection.
As further technical scheme, on the lateral wall of left and right two of laser cavity, heat-dissipating fin is provided with；Dissipate
Hot fin is structure as a whole with laser cavity, monolithic extruded molding.
Used as further technical scheme, on the left of laser cavity, Top electrode, bottom electrode, region of discharge, baffle plate, region of discharge are right
Side shield material is aluminium alloy, is pressing drawing and forms.
As further technical scheme, a step above laser cavity, is provided with, on step, is provided with circuit installation
Groove, is equipped with control board, radio frequency power board and electrode inside circuit mounting groove.
Using above-mentioned technical proposal, as Top electrode is located in the upper groove in laser chamber body, bottom electrode is located at laser
In low groove in device cavity, Top electrode, bottom electrode are fixed in laser chamber body by jackscrew；Top electrode, bottom electrode with swash
Light device cavity is Split type structure, and position is adjustable, and on the left of region of discharge, baffle plate, region of discharge right-hand apron and laser cavity are integrated knot
The distance between structure so that overall structure is simply compact, Top electrode, bottom electrode are easy to professional operator to be adjusted.
Place kick fixed insulation, upper electricity is used on the left of Top electrode, bottom electrode and region of discharge between baffle plate, region of discharge right-hand apron
Pole, bottom electrode, rectangle radio-frequency discharge passage on the right side of baffle plate, region of discharge, is formed on the left of region of discharge, it is ensured that in radio-frequency discharge,
It does not interfere with each other between electrode and side shield.
Additionally, Top electrode and bottom electrode spacing can be adjusted by jackscrew.Top electrode jackscrew and Top electrode inductance location hole
Between, be provided with groove between bottom electrode jackscrew and bottom electrode inductance location hole.The electrode structure not only facilitates laser cavity
With Top electrode, the installation of bottom electrode, and the fine setting of distance between Top electrode, bottom electrode is achieved.
Laser of the present utility model enters the shaping cavity on top after producing, light beam passes sequentially through plane mirror, sphere
Focus lamp, spatial filter, cylindrical mirror and sphere collimating mirror, can meet the light beam after shaping in 7000 millimeters of distances, two sides
Beamwidth upwards is basically identical, and light beam half-breadth difference is in 0.15 millimeter.Completely it is considered that the light beam after shaping is in 7000 millis
It is collimated beam in the range of rice, it is ensured that the needs of most laser-processing systems can be met.
Description of the drawings
Fig. 1 is a kind of system structure diagram of novel carbon dioxide radio frequency metal laser instrument of this utility model；
Fig. 2 is a kind of laser cavity structure schematic diagram of novel carbon dioxide radio frequency metal laser instrument of this utility model；
In figure, 1- laser cavities, 2- shaping cavitys, 3- Top electrodes, 4- bottom electrodes, baffle plate on the left of 5- region of discharges, 6- are put
Electric area's right-hand apron, 7- jackscrews, 8- place kick, 9- air storage chambers, 10- inductance location holes, 11- coupling inductance, 12- heat-dissipating fins,
13- resonator outgoing mirrors, 14- window mirrors, 15- circuit mounting grooves, 16- plane mirrors, 17- spherical surface focusing mirrors, 18- spaces are filtered
Ripple device, 19- cylindrical mirrors, 20- sphere collimating mirrors.
Specific embodiment
Below in conjunction with the accompanying drawings specific embodiment of the present utility model is described further.Here it should be noted that
For the explanation of these embodiments is used to help understand this utility model, but do not constitute to restriction of the present utility model.This
Outward, as long as involved technical characteristic in this utility model disclosed below each embodiment does not constitute conflict each other
Can just be mutually combined.
As shown in Figure 1 to Figure 2, a kind of novel carbon dioxide radio frequency metal laser instrument of the present utility model, including laser instrument
Cavity 1, shaping cavity 2, laser cavity 1 are bilateral symmetry, are inside provided with the left of Top electrode 3, bottom electrode 4, region of discharge
Baffle plate 5, region of discharge right-hand apron 6.
Top electrode 3 is located in the upper groove in laser cavity 1, and bottom electrode 4 is located at the low groove in laser cavity 1
In, the parallel longitudinal placement of Top electrode 3 and bottom electrode 4 along laser cavity；Baffle plate 5, region of discharge right-hand apron 6 on the left of region of discharge
It is structure as a whole with laser cavity 1, monolithic extruded molding, Top electrode 3, bottom electrode 4 are fixed on laser cavity by jackscrew 7
In 1；Top electrode 3, bottom electrode 4 carry out the adjustment of height by the jackscrew 7 arranged on Top electrode 3, bottom electrode 4.
Fixed absolutely with place kick 8 between baffle plate 5, region of discharge right-hand apron 6 on the left of Top electrode 3, bottom electrode 4 and region of discharge
Edge, 8 material of place kick are preferably aluminium oxide ceramics, a diameter of 2mm；Baffle plate 5, electric discharge on the left of Top electrode 3, bottom electrode 4, region of discharge
Rectangle radio-frequency discharge passage is formed on the right side of area；By bar type law understand on the left of Top electrode 3 and region of discharge baffle plate 5, Top electrode 3 with
Do not discharge between baffle plate 5, bottom electrode 4 and region of discharge right-hand apron 6 on the left of region of discharge right-hand apron 6, bottom electrode 4 and region of discharge
Occur, effectively the interval of gas discharge can be limited between the Top electrode 3 of regulation and bottom electrode 4.
It is in cuboid that laser cavity 1 is overall；Keep off on the right side of baffle plate 5, region of discharge on the left of Top electrode 3, bottom electrode 4, region of discharge
The vertical section of plate 6 is in T shape, and its region for constituting forms closed air storage chamber 9, sends laser for discharging in air storage chamber 9
Gas, the gas in air storage chamber of the present utility model 9 be CO2、N2, He and Xe mixed gas, and control mixed gas most
Good total gas pressure controls optimal gas mixing ratio for CO between 10～12kPa2：N2：He：Xe=16:16:63:5.
Shaping cavity 2 includes plane mirror 16, spherical surface focusing mirror 17, spatial filter 18, cylindrical mirror 19 and sphere
Collimating mirror 20 is constituted；The laser beam that Top electrode 3 in laser cavity 1, bottom electrode 4 are produced passes sequentially through the resonance arranged in which
Chamber outgoing mirror 13, window mirror 14 enter shaping cavity 2, and laser beam enters shaping cavity 2 and passes sequentially through plane mirror 16, sphere
Focus lamp 17, spatial filter 18, cylindrical mirror 19 and sphere collimating mirror 20 carry out shaping.
Window mirror 14 is made from Diamond window, and the heat conductivity of diamond window mouth mirror 14 is good, and heat conductivity means well
There is less heat effect while arriving higher output；Plane mirror 16 be a turning mirror, its Main Function
It is the transmission direction for changing light beam, spherical surface focusing mirror 17 represents a coquille, for carrying out to the non-steady direction of output beam
Focus on, and the effect of coquille is exactly that the non-steady direction of non-shaping light beam is focused, and is focused in coquille focal plane
The far-field distribution of light beam, realizes that light beam low frequency is separated with HFS on focal plane, is easy to the elimination of follow-up secondary lobe；Filter in space
Ripple device 18 eliminates the secondary lobe in output beam, improves the beam quality in the non-steady direction of output beam；Cylindrical mirror 19 is used for controlling
The angle of divergence in the non-steady direction of output beam processed, the beamwidth of controlled output light beam both direction；By adjusting sphere collimating mirror 20
Radius of curvature and placement location, can be adjusted to the beam waist position of shaping light beam.
The correspondence position of Top electrode 3, bottom electrode 4 side along its length is evenly arranged with multiple inductance location holes 10, on
The 10 interior coupling inductance 11 for arranging of inductance location hole between electrode 3, bottom electrode 4 by being correspondingly arranged per group connects；This practicality
Two resonant inductances in parallel between new Top electrode 3 and bottom electrode 4, the resonance circuit and radio-frequency power supply for forming the high Q of LC vibrate
Frequency is mated, it is ensured that radio-frequency voltage discharge channel is uniformly distributed, it is achieved that the maximum conversion efficiency of radio-frequency power；Top electrode 3
Jackscrew 7 and the inductance location hole 10 of Top electrode 3 between, between the jackscrew 7 of bottom electrode 4 and the inductance location hole 10 of bottom electrode 4
Groove is provided with, and the electrode structure not only facilitates laser cavity 1 and Top electrode 3, the installation of bottom electrode 4, and achieves
The fine setting of distance between electrode 3, bottom electrode 4.
Fan is provided with above laser cavity 1, and fan is screwed company by the multiple screws in laser cavity 1
Connect；Laser cavity 1 is radiated using the fan of the outside for being arranged at laser cavity 1 so that the body of laser cavity 1
Product is less, and substituted for water-cooled with air-cooled, and overcoming the radiator leak that exists during water-cooled always, cooling water fluidity difference causes to radiate
The critical failures such as deficiency, improve the reliability of system.
Heat-dissipating fin 12 is provided with the lateral wall of left and right two of laser cavity 1；Heat-dissipating fin 12 and laser chamber
Body 1 is structure as a whole, monolithic extruded molding, it is achieved that good thermal diffusion effect；Laser cavity 1, Top electrode 3, bottom electrode
4th, on the left of region of discharge, baffle plate 5,6 material of region of discharge right-hand apron are aluminium alloy, are pressing drawing and form.
A step is provided with above laser cavity 1, is provided with circuit mounting groove 15, inside circuit mounting groove 15 on step
Control board, radio frequency power board and electrode are housed；The design of step causes circuit mounting groove 15 to take off with laser cavity 1
From, it is ensured that the radiating of cavity does not affect the real work effect of circuit.
Embodiment of the present utility model is explained in detail above in association with accompanying drawing, but this utility model is not limited to be retouched
The embodiment that states.For a person skilled in the art, in the case of without departing from this utility model principle and spirit, right
These embodiments carry out multiple changes, modification, replacement and modification, still fall within protection domain of the present utility model.
Claims (9)
1. a kind of novel carbon dioxide radio frequency metal laser instrument, it is characterised in that including laser cavity, shaping cavity, described
Baffle plate on the left of Top electrode, bottom electrode, region of discharge, region of discharge right-hand apron is provided with laser chamber body；
The Top electrode is located in the upper groove in the laser chamber body, and the bottom electrode is located in the laser chamber body
In low groove, the parallel longitudinal placement of the Top electrode and the bottom electrode along the laser cavity；On the left of the region of discharge
Baffle plate, the region of discharge right-hand apron are structure as a whole with the laser cavity, monolithic extruded molding, the Top electrode, institute
State bottom electrode to be fixed in the laser chamber body by jackscrew；
On the left of the Top electrode, the bottom electrode, the region of discharge, baffle plate, the vertical section of the region of discharge right-hand apron are in T
Font；
Place kick is used between baffle plate, the region of discharge right-hand apron on the left of the Top electrode, the bottom electrode and the region of discharge
Fixed insulation, forms rectangle and penetrates on the right side of baffle plate, the region of discharge on the left of the Top electrode, the bottom electrode, the region of discharge
Frequency discharge channel.
2. novel carbon dioxide radio frequency metal laser instrument according to claim 1, it is characterised in that the laser cavity
Overall is in cuboid；Baffle plate, region of discharge right-hand apron composition on the left of the Top electrode, the bottom electrode, the region of discharge
Region form closed air storage chamber.
3. novel carbon dioxide radio frequency metal laser instrument according to claim 2, it is characterised in that the Top electrode, institute
State bottom electrode carries out the adjustment of height by the jackscrew arranged on the Top electrode, the bottom electrode.
4. novel carbon dioxide radio frequency metal laser instrument according to claim 1, it is characterised in that the shaping cavity bag
Include plane mirror, spherical surface focusing mirror, spatial filter, cylindrical mirror and sphere collimating mirror to constitute；
The laser beam that the Top electrode in the laser chamber body, the bottom electrode are produced passes sequentially through the resonance arranged in which
Chamber outgoing mirror, window mirror enter the shaping cavity, laser beam enter the shaping cavity pass sequentially through the plane mirror,
The spherical surface focusing mirror, the spatial filter, the cylindrical mirror and the sphere collimating mirror carry out shaping.
5. novel carbon dioxide radio frequency metal laser instrument according to claim 1, it is characterised in that the Top electrode, institute
The correspondence position for stating bottom electrode side along its length is evenly arranged with multiple inductance location holes, the Top electrode, the lower electricity
Coupling inductance connection between pole by arranging in the inductance location hole that is correspondingly arranged per group；The top of the Top electrode
Between silk and the inductance location hole of the Top electrode, the inductance of the jackscrew of the bottom electrode and the bottom electrode
Groove is provided between location hole.
6. novel carbon dioxide radio frequency metal laser instrument according to claim 1, it is characterised in that the laser cavity
Top is provided with fan, and the fan is screwed connection by the multiple screws in the laser cavity.
7. novel carbon dioxide radio frequency metal laser instrument according to claim 1, it is characterised in that the laser cavity
Left and right lateral wall on be provided with heat-dissipating fin, the heat-dissipating fin is structure as a whole with the laser cavity, overall is squeezed
Molded.
8. novel carbon dioxide radio frequency metal laser instrument according to claim 1, it is characterised in that the laser chamber
On the left of body, the Top electrode, the bottom electrode, the region of discharge, on the right side of baffle plate, the region of discharge, gear material is aluminium alloy, is
Pressing drawing is formed.
9. novel carbon dioxide radio frequency metal laser instrument according to claim 1, it is characterised in that the laser cavity
Top be provided with a step, be provided with circuit mounting groove on the step, inside the circuit mounting groove equipped with control board,
Radio frequency power board and electrode.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620767457.XU CN206022877U (en) | 2016-07-19 | 2016-07-19 | A kind of novel carbon dioxide radio frequency metal laser instrument |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620767457.XU CN206022877U (en) | 2016-07-19 | 2016-07-19 | A kind of novel carbon dioxide radio frequency metal laser instrument |
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| CN206022877U true CN206022877U (en) | 2017-03-15 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106129784A (en) * | 2016-07-19 | 2016-11-16 | 北京康迪光电子股份有限公司 | A kind of Novel carbon dioxide radio frequency metal laser instrument |
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2016
- 2016-07-19 CN CN201620767457.XU patent/CN206022877U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106129784A (en) * | 2016-07-19 | 2016-11-16 | 北京康迪光电子股份有限公司 | A kind of Novel carbon dioxide radio frequency metal laser instrument |
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