CN105161970A - CO2 radio frequency laser - Google Patents
CO2 radio frequency laser Download PDFInfo
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- CN105161970A CN105161970A CN201510525785.9A CN201510525785A CN105161970A CN 105161970 A CN105161970 A CN 105161970A CN 201510525785 A CN201510525785 A CN 201510525785A CN 105161970 A CN105161970 A CN 105161970A
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Abstract
The invention discloses a CO2 radio frequency laser which comprises a laser cavity and a shaping cavity, wherein the laser cavity is provided with an upper electrode and a lower electrode, the upper electrode and the lower electrode are connected via a matching inductor, end covers are symmetrically and fixedly arranged at the two sides of the laser cavity, the lower electrode is fixed with the inner wall of the bottom of the laser cavity via a base plate, installation racks are symmetrically arranged at the two sides of a base plate for fixing the lower electrode and are used for fixing a resonant cavity output mirror, a window lens is arranged at one side of the upper end of the laser cavity, and the upper electrode is provided with a height adjustment device. With the electrode structure disclosed by the invention, the installation of the cavities and the electrodes is facilitated greatly; and moreover, the distance between the electrodes can be adjusted outside the cavities, the defect of a light path system of the CO2 radio frequency laser in the current market is overcome, a light path is shaped, sidelobe of a light beam can be eliminated favorably, and thus, the processing accuracy is improved.
Description
Technical field
The present invention relates to CO
2radio frequency laser equipment technical field, is specifically related to a kind of CO
2radio frequency laser.
Background technology
RF excited diffusion coldplate Luciola substriata CO
2laser is called as forth generation gas laser, with the advantage of uniqueness as: volume is little, lightweight, compact conformation, easy for installationly (can be directly installed on the arm of industrial machine, on the crossbeam of flame planer), sealed-off runs, non-maintaining, low cost, modulating characteristic are excellent, photoelectric conversion efficiency is done, output beam quality is high, power stability is excellent, operational reliability is high and long service life etc. is subject to the favor of people gradually, market is for high-power strip CO
2the demand of laser is also increasing, therefore about plate waveguide CO
2the research of laser will become the important innovations direction of gas laser development.
Current lath electrode CO
2the associated core technology of radio frequency laser is main or monopolized by external associated mechanisms, at present can administration measure CO
2the company of radio frequency laser only has four in the world, i.e. relevant, new master, Luo Fen, Zeus.At CO
2in the production process of laser, there is following drawback;
One, the design of electrode is most important, is the core of laser, and its performance of relevant parameter to last laser is most important, so the design of electrode can be described as CO
2a most important link in laser design process.Traditional C O
2radio frequency laser electrode is after electrode carries out fine finishining installation, distance between electrode just cannot adjust again, and the distance between electrode directly concerns the generation of laser, distance according to actual needs between electrode may need to be optimized adjustment, this just needs dismounting laser cavity again, even sometimes, the dimensional parameters of related device in laser to be revised, use very inconvenient;
Two, tradition adopts bicylindrical mirror orthopedic systems to align a chamber radio-frequency (RF) board bar CO
2laser carries out shaping.Two cylindrical mirrors carry out beam-expanding collimation to the light beam of wave guide direction, the light beam half-breadth in the light beam both direction after shaping and the angle of divergence basically identical.This orthopedic systems structure is simple, be easy to install, until be also used in widely in gas and solid batten laser now.But its far-field distribution is not nearly basic mode Gaussian Profile, and non-steady direction exists Pang Office.This can cause the beam quality of light beam in non-steady direction not as the good beam quality of wave guide direction.Bicylindrical mirror orthopedic systems does not promote the beam quality of output beam.If the precision of processing requires higher with quality to laser beam quality, this light beam with secondary lobe is obviously inappropriate.
Summary of the invention
The object of this invention is to provide a kind of CO
2radio frequency laser, first overcomes CO traditional in the market
2radio frequency laser electrode is after electrode carries out fine finishining installation, distance between electrode just cannot adjust again, when electrode needs to optimize and revise, then need dismounting laser cavity again even will revise the dimensional parameters of related device, because laser cavity is vacuum cavity, belong to precise part, above-mentioned adjustment mode not only needs by professional apparatus and personnel, and the precision of laser cavity can be affected, next overcomes existing market CO
2the deficiency of radio frequency laser light path system, realizes the shaping to light path, well can eliminate the secondary lobe of light beam, thus improves machining accuracy.
The present invention is achieved through the following technical solutions:
A kind of CO2 radio frequency laser, comprise laser cavity (1), shaping cavity (2), it is characterized in that: described laser cavity (1) is provided with top electrode (13), bottom electrode (14), top electrode (13), connected by coupling inductance (15) between bottom electrode (14), described laser cavity (1) bilateral symmetry is fixedly installed end cap (12), bottom electrode (14) is fixed by base plate (16) and laser cavity (1) bottom interior wall, the bilateral symmetry of fixing bottom electrode (14) base plate (16) is provided with the installing rack (112) for fixing resonant cavity outgoing mirror (115), laser cavity (1) side, upper end is provided with window mirror (116), top electrode (13) is provided with arrangement for adjusting height,
Described arrangement for adjusting height comprises upper adjusting slider (17), the lower adjusting slider (18) that one group of rectangular triangle is arranged, the inclined-plane of upper adjusting slider (17), lower adjusting slider (18) is oppositely arranged, and overall rectangular shaped, upper adjusting slider (17) is provided with adjusting screw(rod) (110) with the side right-angle side of lower adjusting slider (18), and the end cap (12) that adjusting screw(rod) (110) and laser cavity (1) bilateral symmetry are arranged is adjustable to be connected;
Described lower adjusting slider (18) two bottom sides is connected with top electrode (13) upper surface by symmetrically arranged insulation ceramics (19), and the middle position of top electrode (13) side is along its length provided with radiofrequency signal Connection Block (111);
Described shaping cavity (2) comprises plane mirror (21), spherical surface focusing mirror (22), spatial filter (23), cylindrical mirror (24) and sphere collimating mirror (25) and forms;
The laser beam that described laser cavity (1) interior top electrode (13), bottom electrode (14) produce enters shaping cavity (2) by the resonant cavity outgoing mirror (115) that arranges in it, window mirror (116) successively, and laser beam enters shaping cavity (2) and carries out shaping by plane mirror (21), spherical surface focusing mirror (22), spatial filter (23), cylindrical mirror (24) and sphere collimating mirror (25) successively.
The further Technological improvement plan of the present invention is:
Described insulation ceramics (19) thickness is 0.2mm.
The further Technological improvement plan of the present invention is:
The correspondence position of described top electrode (13), bottom electrode (14) side along its length is evenly provided with multiple inductance jack (113), and the coupling inductance (15) by arranging in the every corresponding inductance jack (113) arranged of group between top electrode (13), bottom electrode (14) connects.
The further Technological improvement plan of the present invention is:
Adjusting play (114) is provided with between described top electrode (13) and laser cavity (1) upper inside wall.
The further Technological improvement plan of the present invention is:
Described top electrode (13), bottom electrode (14), upper adjusting slider (17), lower adjusting slider (18) and base plate (16) are made by aluminum.
The further Technological improvement plan of the present invention is:
Described window mirror (116) adopts diamond to make.
The present invention compared with prior art, has following obvious advantage:
One, in laser cavity of the present invention, primary structure is by discharge plate, base plate, adjusting slider forms, discharging structure is made up of two metal aluminium electrodes, two pairs of upper bottom crown parallel placements along its length, separated by insulation ceramics such as aluminum oxide ceramic between top crown and bottom crown, form waveguide sidewalls, the spacing of top electrode and bottom electrode can be regulated by the adjusting screw(rod) of vacuum cavity both sides, coordinate corresponding resonant cavity, form the electric discharge gain space of rectangle, the installation of this kind of very convenient cavity of electrode structure and electrode, the adjustment of the spacing of electrode can be realized in addition at containment portion,
Two, below the present invention be the cavity of laser, it is shaping cavity above cavity, laser excites generation by the lath electrode in laser cavity, plastic chamber is outputted to through laser cavity, after plastic chamber shaping, produce the laser beam meeting related request, the beamwidth of the light beam after shaping in the distance of transmission 8000mm in both direction closely.In both direction, light beam half-breadth difference remains within 0.1mm always.Meanwhile, little in the transmission range inner light beam half-breadth change of 8000mm, its maxima and minima difference is no more than 0.6mm.Can think that the light beam after shaping is collimated light beam in the scope of 8000mm, and the scope of 8000mm can meet the needs of most laser-processing system.
Accompanying drawing explanation
Fig. 1 is present system structural representation.
Fig. 2 is laser cavity structure schematic diagram of the present invention.
Fig. 3 is spatial filter structural representation of the present invention.
Embodiment
As Fig. 1, 2, shown in 3, the present invention includes laser cavity 1, shaping cavity 2, described laser cavity 1 is provided with top electrode 13, bottom electrode 14, top electrode 13, connected by coupling inductance 15 between bottom electrode 14, described laser cavity 1 bilateral symmetry is fixedly installed end cap 12, bottom electrode 14 is fixed by base plate 16 and laser cavity 1 bottom interior wall, the bilateral symmetry of fixing bottom electrode 14 base plate 16 is provided with the installing rack 112 for fixing resonant cavity outgoing mirror 115, side, laser cavity 1 upper end is provided with window mirror 116, top electrode 13 is provided with arrangement for adjusting height,
Described arrangement for adjusting height comprises upper adjusting slider 17, the lower adjusting slider 18 that one group of rectangular triangle is arranged, the inclined-plane of upper adjusting slider 17, lower adjusting slider 18 is oppositely arranged, and overall rectangular shaped, upper adjusting slider 17 is provided with adjusting screw(rod) 110 with the side right-angle side of lower adjusting slider 18, and the end cap 12 that adjusting screw(rod) 110 and laser cavity 1 bilateral symmetry are arranged is adjustable to be connected;
Described lower adjusting slider 18 two bottom sides is connected with top electrode 13 upper surface by symmetrically arranged insulation ceramics 19, and described insulation ceramics 19 thickness is 0.2mm, and the middle position of top electrode 13 side is along its length provided with radiofrequency signal Connection Block 111;
Described shaping cavity 2 comprises plane mirror 21, spherical surface focusing mirror 22, spatial filter 23, cylindrical mirror 24 and sphere collimating mirror 25 and forms;
The laser beam that top electrode 13 in described laser cavity 1, bottom electrode 14 produce enters shaping cavity 2 by the resonant cavity outgoing mirror 115 that arranges in it, window mirror 116 successively, and laser beam enters shaping cavity 2 and carries out shaping by plane mirror 21, spherical surface focusing mirror 22, spatial filter 23, cylindrical mirror 24 and sphere collimating mirror 25 successively.
The correspondence position of described top electrode 13, bottom electrode 14 side along its length is evenly provided with multiple inductance jack 113, and the coupling inductance 15 by arranging in the every corresponding inductance jack 113 arranged of group between top electrode 13, bottom electrode 14 connects.
Adjusting play 114 is provided with between described top electrode 13 and laser cavity 1 upper inside wall.
Described top electrode 13, bottom electrode 14, upper adjusting slider 17, lower adjusting slider 18 and base plate 16 are made by aluminum.
Described window mirror 116 adopts diamond to make.
As shown in Figure 2, laser cavity 1 is laser cavity, is formed by 6063-T5 aluminium solid-drawn, after carry out fine finishining through machining center;
End cap 12 is laser front and rear cover, forms annular seal space together with vacuum cavity 1, adopts indium silk to seal between end cap and cavity;
Top electrode 13 is laser top crown, top crown length be about 616mm, 36mm, 15.8mm respectively, two ends outside the length direction of top crown, be processed with the inductance jack 113 of a row 4 coupling, for plug-in mounting coupling inductance 15, in the outer side center part of top electrode 13, be processed with a radiofrequency signal Connection Block 111, rf power signal inserts radiofrequency signal Connection Block 11 by a connecting rod through vacuum cavity 1, is coupled to by rf power signal in the electrode of upper pole;
Structure and the top electrode 13 of bottom electrode 14 are similar, and the size of bottom crown is identical with top crown, are processed with the coupling inductance jack 113 that a row is corresponding with two top electrodes 13 at the two ends, outside of pole plate;
Coupling inductance 15 is connected between top electrode 13 and bottom electrode 14;
Base plate 16 is made up of the metallic plate of a rectangle, be fixed on bottom laser cavity 1 inwall, on base plate 16, plane directly connects with bottom electrode 14, its lower plane connects with laser cavity 1 inner surface, whole bottom electrode 14 is fixed on base plate 16, at the eyeglass installing rack 112 being fixed with cavity mirror and outgoing mirror of the two ends symmetry of base plate 16 length direction.
Upper adjusting slider 17 and lower adjusting slider 18, the adjustment of electrode gap is realized slide block by this,
The upper surface of upper adjusting slider 17 is planes, connects with laser cavity 1 inwall, and lower surface is an inclined-plane, and Ye Shiyi inclined-plane, lower adjusting slider 18 top, corresponding with upper adjusting slider 17 lower surface, bottom is a plane.
Insulation ceramics 19 is very thin insulation ceramics, general thickness is about 0.2mm, separate lower adjusting slider 18 and top electrode 13, from bar punishment law: at the left branch of the relation curve of discharge firing voltage and air pressure and die opening product value, when die opening is less, gas breakdown voltage is higher, therefore, not discharge between top electrode 13 and lower adjusting slider 18 generation, therefore can by the limit of interval of gas discharge between upper/lower electrode.
Adjusting screw(rod) 110 is adjusting knob, by regulating through two adjusting screw(rod)s 110 on upper adjusting slider 7, lower adjusting slider 8, sliding block can be pulled to slide along its length, change two slide blocks relative position along its length, thus the height of adjustment two slide blocks, and then realize the adjustment of spacing of upper and lower electrode, firm for electrode is fixed in laser cavity 1 simultaneously.
Radiofrequency signal Connection Block 111 is radio-frequency (RF) signal input end, this laser adopts a top electrode 13 and a ground connection bottom electrode 14, form the discharge space of two rectangles, input radio frequency power signal in top electrode 13, formed between two lath-shaped gain regions, while the length keeping discharge plate, achieving the effective length increasing laser gain, providing condition for realizing high power compact laser.
Eyeglass installing rack 112 is the mirror holder of resonant cavity outgoing mirror 115, and the output for laser provides accurate light path.
Inductance jack 113 is for installing coupling inductance 15.
Adjusting play 114 has certain space for upper adjusting slider 17 and lower adjusting slider 18 under adjusting screw(rod) 110 acts on.
As shown in Figure 1,3, resonant cavity outgoing mirror 115 is outgoing mirror, and first the light beam in laser cavity 1 outputs to outside chamber through window mirror 116 after outgoing mirror reflects 90 °;
Window mirror 116 selects Diamond window to make, and Diamond window compares the window mirror of other types, mainly has two advantages: one, adamantine mechanical strength is high.At radio-frequency (RF) board bar CO
2in laser, the air pressure in light intensity, usually not higher than 20kPa, cannot evenly discharge, well below atmospheric pressure by build-up of luminance because too high chamber pressure can cause between plate electrode.This just requires window mirror 3 can bear pressure difference inside and outside optical cavity and indeformable.There is the uncertainty that deformation can cause output beam transmission characteristic in window mirror 3, selects diamond can while proof strength as window mirror 3, and thickness is thinner; Two, the thermal conductivity of diamond window mouth mirror is good, thermal conductivity mean well obtain higher power output while there is less thermal effect.
Plane mirror 21 represents a turning mirror, its Main Function is the transmission direction changing light beam, output beam makes beam deflection by the turning mirror after window mirror 116 and with smaller incidence angle, paraxial approximate in order to what keep in beam Propagation process in research, usually this incidence angle is remained on about 3 ° and inject spherical surface focusing mirror 22.
Spherical surface focusing mirror 22 represents a spherical mirror, research finds that output beam has a large amount of high spatial frequency vibrations on non-steady direction, output beam can be caused in far-field distribution to there is secondary lobe, spherical surface focusing mirror 5 mainly contains two effects: one, focus on the non-steady direction of output beam, and the effect of spherical mirror focuses on the non-steady direction of non-shaping light beam exactly, the far-field distribution of focused beam is obtained at spherical mirror focal plane place, realize light beam low frequency to be separated on focal plane with HFS, be convenient to the elimination of follow-up secondary lobe; Two, the wave guide direction of output beam is collimated.In the process of design, the radius of curvature of spherical mirror changes to some extent according to the design parameter of optical cavity.
Spatial filter 23 is that confocal convex lens group places pin hole formation in its focal position, and spatial filter 6 is the core parts in orthopedic systems.Eliminated the secondary lobe in output beam by spatial filter 23, improve the beam quality in the non-steady direction of output beam.The Design of length of spatial filter slit is 30mm, does not affect the output beam of wave guide direction.
Cylindrical mirror 24 has two effects: the angle of divergence one, being controlled the non-steady direction of output beam by the radius of curvature of design cylindrical mirror.Output beam after spatial filter 6, the beam divergence angle of wave guide direction without any change.But the light beam in non-steady direction is owing to being subject to blocking of spatial filter 6, and its transmission characteristic there occurs change, the angle of divergence and beam radius all need to rethink.By designing the parameter of cylindrical mirror, the output beam angle of divergence in the two directions can be made equal, make output beam become non-astigmatic pencil from astigmatic pencil; Two, the beamwidth of output beam both direction is controlled by the design position of cylindrical mirror 7 in light path.In order to reach the object of shaping, the guideline of design post cylindrical mirror 7 is: by the light beam after cylindrical mirror 7, the angle of divergence is equal in the two directions, and beam radius is equal.
Sphere collimating mirror 25 is last spherical mirror in shaping cavity 2, and the effect of last spherical mirror collimates output beam, by adjusting radius of curvature and the placement location of spherical mirror, can adjust the beam waist position of shaping light beam.
Technological means disclosed in the present invention program is not limited only to the technological means disclosed in above-mentioned execution mode, also comprises the technical scheme be made up of above technical characteristic combination in any.It should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.
Claims (6)
1. a CO
2radio frequency laser, comprise laser cavity (1), shaping cavity (2), it is characterized in that: described laser cavity (1) is provided with top electrode (13), bottom electrode (14), top electrode (13), connected by coupling inductance (15) between bottom electrode (14), described laser cavity (1) bilateral symmetry is fixedly installed end cap (12), bottom electrode (14) is fixed by base plate (16) and laser cavity (1) bottom interior wall, the bilateral symmetry of fixing bottom electrode (14) base plate (16) is provided with the installing rack (112) for fixing resonant cavity outgoing mirror (115), laser cavity (1) side, upper end is provided with window mirror (116), top electrode (13) is provided with arrangement for adjusting height,
Described arrangement for adjusting height comprises upper adjusting slider (17), the lower adjusting slider (18) that one group of rectangular triangle is arranged, the inclined-plane of upper adjusting slider (17), lower adjusting slider (18) is oppositely arranged, and overall rectangular shaped, upper adjusting slider (17) is provided with adjusting screw(rod) (110) with the side right-angle side of lower adjusting slider (18), and the end cap (12) that adjusting screw(rod) (110) and laser cavity (1) bilateral symmetry are arranged is adjustable to be connected;
Described lower adjusting slider (18) two bottom sides is connected with top electrode (13) upper surface by symmetrically arranged insulation ceramics (19), and the middle position of top electrode (13) side is along its length provided with radiofrequency signal Connection Block (111);
Described shaping cavity (2) comprises plane mirror (21), spherical surface focusing mirror (22), spatial filter (23), cylindrical mirror (24) and sphere collimating mirror (25) and forms;
The laser beam that described laser cavity (1) interior top electrode (13), bottom electrode (14) produce enters shaping cavity (2) by the resonant cavity outgoing mirror (115) that arranges in it, window mirror (116) successively, and laser beam enters shaping cavity (2) and carries out shaping by plane mirror (21), spherical surface focusing mirror (22), spatial filter (23), cylindrical mirror (24) and sphere collimating mirror (25) successively.
2. a kind of CO according to claim 1
2radio frequency laser, is characterized in that: described insulation ceramics (19) thickness is 0.2mm.
3. a kind of CO according to claim 1 and 2
2radio frequency laser, it is characterized in that: the correspondence position of described top electrode (13), bottom electrode (14) side along its length is evenly provided with multiple inductance jack (113), the coupling inductance (15) by arranging in the every corresponding inductance jack (113) arranged of group between top electrode (13), bottom electrode (14) connects.
4. a kind of CO according to claim 1 and 2
2radio frequency laser, is characterized in that: be provided with adjusting play (114) between described top electrode (13) and laser cavity (1) upper inside wall.
5. a kind of CO according to claim 1 and 2
2radio frequency laser, is characterized in that: described top electrode (13), bottom electrode (14), upper adjusting slider (17), lower adjusting slider (18) and base plate (16) are made by aluminum.
6. a kind of CO according to claim 1 and 2
2radio frequency laser, is characterized in that: described window mirror (116) adopts diamond to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510525785.9A CN105161970A (en) | 2015-08-25 | 2015-08-25 | CO2 radio frequency laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510525785.9A CN105161970A (en) | 2015-08-25 | 2015-08-25 | CO2 radio frequency laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105161970A true CN105161970A (en) | 2015-12-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510525785.9A Pending CN105161970A (en) | 2015-08-25 | 2015-08-25 | CO2 radio frequency laser |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105977769A (en) * | 2016-07-19 | 2016-09-28 | 北京康迪光电子股份有限公司 | Novel carbon dioxide radio frequency metal laser device |
| CN106129784A (en) * | 2016-07-19 | 2016-11-16 | 北京康迪光电子股份有限公司 | A kind of Novel carbon dioxide radio frequency metal laser instrument |
-
2015
- 2015-08-25 CN CN201510525785.9A patent/CN105161970A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105977769A (en) * | 2016-07-19 | 2016-09-28 | 北京康迪光电子股份有限公司 | Novel carbon dioxide radio frequency metal laser device |
| CN106129784A (en) * | 2016-07-19 | 2016-11-16 | 北京康迪光电子股份有限公司 | A kind of Novel carbon dioxide radio frequency metal laser instrument |
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Application publication date: 20151216 |
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