CN205863633U - A kind of Novel carbon dioxide radio frequency metal laser instrument - Google Patents

A kind of Novel carbon dioxide radio frequency metal laser instrument Download PDF

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Publication number
CN205863633U
CN205863633U CN201620763620.5U CN201620763620U CN205863633U CN 205863633 U CN205863633 U CN 205863633U CN 201620763620 U CN201620763620 U CN 201620763620U CN 205863633 U CN205863633 U CN 205863633U
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China
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discharge
region
laser
electrode
bottom electrode
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Expired - Fee Related
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CN201620763620.5U
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Chinese (zh)
Inventor
张津
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BEIJING KINGLY ELECTRONICS Co Ltd
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BEIJING KINGLY ELECTRONICS Co Ltd
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Abstract

The utility model discloses a kind of Novel carbon dioxide radio frequency metal laser instrument, including laser cavity, shaping cavity, in laser chamber body, be provided with baffle plate on the left of electrode, bottom electrode, region of discharge, region of discharge right-hand apron;Upper electrode is positioned in the upper groove of laser chamber body, bottom electrode is positioned in the low groove of laser chamber body, during on the left of region of discharge, baffle plate is positioned at the left groove of laser chamber body, region of discharge right-hand apron is positioned in the right groove of laser chamber body, and on the left of upper electrode, bottom electrode, region of discharge, baffle plate, region of discharge right-hand apron are fixed in laser chamber body by jackscrew;Use place kick fixed insulation on the left of upper electrode, bottom electrode and region of discharge between baffle plate, region of discharge right-hand apron, and form rectangle radio-frequency discharge passage.The laser instrument that this utility model provides have simple and compact for structure, machining accuracy is high, without the advantage of light beam secondary lobe, and the position between electrode is adjustable so that the distance between electrode is easy to professional operator and is adjusted.

Description

A kind of Novel carbon dioxide radio frequency metal laser instrument
Technical field
This utility model relates to the technical field of laser instrument, particularly to a kind of Novel carbon dioxide radio frequency metal laser Device.
Background technology
Novel carbon dioxide radio frequency metal laser instrument, be technology with the fastest developing speed on industrial lasers market in recent years it One it is considered to be the best substitute of glass tubing sealed-off carbon dioxide laser.
It uses all-metal structure, have that volume is little, totally-enclosed, device is compact, sealed-off operating, non-maintaining, low cost, Modulating characteristic is excellent, output beam quality is high (finer more than 3 times than glass tubing), injecting power density high, running voltage is low, output Power facilitate adjustable, power stability is excellent, operational reliability high, it is even more important that Novel carbon dioxide radio frequency Metal laser device also has that length in service life (typically more than 20000 hours), maintenance cost be low, the most repeatable after inflation make With, and without advantages such as replacings;In all kinds of commodity laser, every watt of output cost of carbon dioxide laser is minimum, plug Efficiency is higher, and between 10%-12%, its application includes flexible material, the high-speed cutting of nonmetal thermoset material, carves, welds Connect.These advantages so that Novel carbon dioxide radio frequency metal laser instrument, are especially suitable for industrialization and work continuously production.
But, in prior art, carbon dioxide radio frequency laser electrode after electrode carries out polish installation, electrode it Between distance cannot adjust, when electrode needs to optimize and revise, then need again to dismount laser cavity, amendment related device Dimensional parameters, owing to laser cavity is vacuum cavity, belongs to precise part, and above-mentioned adjustment mode needs specialty apparatus and people Member so that the problem that there may be the relevant parameter affecting laser cavity during adjusting;Furthermore, in prior art, The problem that carbon dioxide laser light path system there is also light beam secondary lobe, machining accuracy is the highest.
Utility model content
The technical problems to be solved in the utility model is to provide that a kind of machining accuracy is high, novel titanium dioxide without light beam secondary lobe Carbon radio frequency metal laser instrument, to overcome when electrode needs to optimize and revise, needs again to dismount laser cavity and arranges and to revise The dimensional parameters of related device, owing to laser cavity is vacuum cavity, belongs to precise part, and above-mentioned adjustment mode needs specialty Apparatus and personnel so that the problem that there may be the relevant parameter affecting laser cavity during adjusting.
In order to solve above-mentioned technical problem, the technical solution of the utility model is:
A kind of Novel carbon dioxide radio frequency metal laser instrument, including laser cavity, shaping cavity, sets in laser chamber body It is equipped with baffle plate on the left of electrode, bottom electrode, region of discharge, region of discharge right-hand apron;
Upper electrode is positioned in the upper groove of laser chamber body, and bottom electrode is positioned in the low groove of laser chamber body, on Electrode and bottom electrode are along the parallel longitudinal placement of laser cavity;On the left of region of discharge, baffle plate is positioned at the left groove of laser chamber body In, region of discharge right-hand apron is positioned in the right groove of laser chamber body, baffle plate, electric discharge on the left of upper electrode, bottom electrode, region of discharge District's right-hand apron is fixed in laser chamber body by jackscrew;
Baffle plate on the left of upper electrode, bottom electrode, region of discharge, region of discharge right-hand apron vertical section in T shape;
Place kick fixed insulation is used between baffle plate, region of discharge right-hand apron, location on the left of upper electrode, bottom electrode and region of discharge Ball material is aluminium oxide ceramics, a diameter of 2mm;Formed rectangular on the left of upper electrode, bottom electrode, region of discharge on the right side of baffle plate, region of discharge Shape radio-frequency discharge passage.
As further technical scheme, laser cavity is overall in cuboid;On the left of upper electrode, bottom electrode, region of discharge The region of baffle plate, region of discharge right-hand apron composition forms airtight air storage chamber, is CO in air storage chamber2、N2, the gaseous mixture of He and Xe Body, and control the optimal total gas pressure of mixed gas between 10~12kPa, optimal gas mixing ratio is CO2: N2: He:Xe=16: 16:63:5。
As further technical scheme, on the left of upper electrode, bottom electrode, region of discharge, baffle plate, region of discharge right-hand apron pass through The jackscrew arranged on baffle plate, region of discharge right-hand apron on the left of upper electrode, bottom electrode, region of discharge carries out the adjustment of height.
As further technical scheme, shaping cavity includes plane mirror, spherical surface focusing mirror, spatial filter, post Face mirror and sphere collimating mirror are constituted;
The resonator cavity output that the laser beam that upper electrode in laser chamber body, bottom electrode produce is arranged in passing sequentially through it Mirror, window mirror enter shaping cavity, and laser beam enters shaping cavity and passes sequentially through plane mirror, spherical surface focusing mirror, space filter Ripple device, cylindrical mirror and sphere collimating mirror carry out shaping.
As further technical scheme, the correspondence position of upper electrode, bottom electrode side along its length is evenly arranged with Hole, multiple inductance location, the coupling inductance that the inductance being correspondingly arranged by often group between upper electrode, bottom electrode is arranged in positioning hole Connect;Between the hole, inductance location of the jackscrew of upper electrode and upper electrode, the hole, inductance location of the jackscrew of bottom electrode and bottom electrode it Between all have groove.
As further technical scheme, laser cavity is provided above fan, and fan is by laser cavity Multiple screws are screwed connection.
As further technical scheme, two, the left and right of laser cavity is provided with heat-dissipating fin on lateral wall;Dissipate Hot fin is structure as a whole with laser cavity, monolithic extruded molding.
As further technical scheme, for increasing output, can be provided with some to mirror of turning back in laser chamber body, Mirror of turning back is positioned at before resonator cavity outgoing mirror.
As further technical scheme, baffle plate, the region of discharge right side on the left of laser cavity, upper electrode, bottom electrode, region of discharge Side shield material is aluminium alloy, is pressing drawing and forms.
As further technical scheme, laser cavity is provided above a step, step is provided with circuit and installs Groove, equipped with control circuit plate, radio frequency power board and electrode inside circuit mounting groove.
Using technique scheme, owing to upper electrode is positioned in the upper groove of laser chamber body, bottom electrode is positioned at laser In low groove in device cavity, during on the left of region of discharge, baffle plate is positioned at the left groove of laser chamber body, region of discharge right-hand apron position In right groove in laser chamber body, on the left of upper electrode, bottom electrode, region of discharge, baffle plate, region of discharge right-hand apron pass through jackscrew It is fixed in laser chamber body;On the left of upper electrode, bottom electrode, region of discharge, baffle plate, region of discharge right-hand apron with laser cavity are Split type structure, position is adjustable so that overall structure is the compactest, and the distance between upper electrode, bottom electrode is easy to professional operation people Member is adjusted.
Use place kick fixed insulation between baffle plate, region of discharge right-hand apron on the left of upper electrode, bottom electrode and region of discharge, power on Rectangle radio-frequency discharge passage is formed on the right side of baffle plate, region of discharge, it is ensured that when radio-frequency discharge on the left of pole, bottom electrode, region of discharge, It does not interfere with each other between electrode and side shield.
Additionally, upper electrode and bottom electrode spacing can be regulated by jackscrew, baffle plate, region of discharge on the left of upper electrode and region of discharge The spacing of right-hand apron can be regulated by jackscrew, and on the left of region of discharge, baffle plate can be by top with the spacing of region of discharge right-hand apron Silk regulation, on the left of bottom electrode and region of discharge, baffle plate, the spacing of region of discharge right-hand apron can be regulated by jackscrew.Upper electrode jackscrew And between hole, upper electrode inductance location, all have groove between bottom electrode jackscrew and hole, bottom electrode inductance location.This electrode structure Not only facilitate laser cavity and upper electrode, the installation of bottom electrode, and achieve the micro-of the spacing of electrode, bottom electrode Adjust.
Laser of the present utility model enters the shaping cavity on top after producing, light beam passes sequentially through plane mirror, sphere Focus lamp, spatial filter, cylindrical mirror and sphere collimating mirror, can meet the light beam after shaping in two sides of 7000 millimeters of distances Beamwidth upwards is basically identical, and light beam half-breadth difference is in 0.15 millimeter.Completely it is believed that the light beam after shaping is at 7000 millis It is collimated beam in the range of meter, it is ensured that the needs of most laser-processing system can be met.
Accompanying drawing explanation
Fig. 1 is the system structure schematic diagram of this utility model a kind of Novel carbon dioxide radio frequency metal laser instrument;
Fig. 2 is the laser cavity structure schematic diagram of this utility model a kind of Novel carbon dioxide radio frequency metal laser instrument;
Fig. 3 is the mirror structural representation of turning back of this utility model a kind of Novel carbon dioxide radio frequency metal laser instrument.
In figure, 1-laser cavity, 2-shaping cavity, the upper electrode of 3-, 4-bottom electrode, baffle plate on the left of 5-region of discharge, 6-is put Electricity district right-hand apron, 7-jackscrew, 8-place kick, 9-air storage chamber, hole, 10-inductance location, 11-mates inductance, 12-heat-dissipating fin, 13-resonator cavity outgoing mirror, 14-window mirror, 15-turns back mirror, 16-plane mirror, 17-spherical surface focusing mirror, 18-space filtering Device, 19-cylindrical mirror, 20-sphere collimating mirror, 21-circuit mounting groove.
Detailed description of the invention
Below in conjunction with the accompanying drawings detailed description of the invention of the present utility model is described further.At this it should be noted that The explanation of these embodiments is adapted to assist in and understands this utility model, but be not intended that restriction of the present utility model.This Outward, as long as technical characteristic involved in each embodiment of this utility model disclosed below does not constitutes conflict each other Just can be mutually combined.
As shown in Figure 1 to Figure 3, a kind of Novel carbon dioxide radio frequency metal laser instrument of the present utility model, including laser instrument Cavity 1, shaping cavity 2, laser cavity 1 is bilateral symmetry, is inside provided with on the left of electrode 3, bottom electrode 4, region of discharge Baffle plate 5, region of discharge right-hand apron 6.
Upper electrode 3 is positioned in the upper groove of laser cavity 1, and bottom electrode 4 is positioned at the low groove of laser cavity 1 In, upper electrode 3 and bottom electrode 4 are along the parallel longitudinal placement of laser cavity 1;On the left of region of discharge, baffle plate 5 is positioned at laser cavity 1 In interior left groove, region of discharge right-hand apron 6 is positioned in the right groove of laser cavity 1, upper electrode 3, bottom electrode 4, electric discharge On the left of district, baffle plate 5, region of discharge right-hand apron 6 are fixed in laser cavity 1 by jackscrew 7;Upper electrode 3, bottom electrode 4, electric discharge On the left of district, baffle plate 5, region of discharge right-hand apron 6 are by baffle plate 5, region of discharge right-hand apron on the left of upper electrode 3, bottom electrode 4, region of discharge The jackscrew 7 arranged on 6 carries out the adjustment of height.
Fix absolutely with place kick 8 between baffle plate 5, region of discharge right-hand apron 6 on the left of upper electrode 3, bottom electrode 4 and region of discharge Edge, place kick 8 material is preferably aluminium oxide ceramics, a diameter of 2mm;Baffle plate 5, electric discharge on the left of upper electrode 3, bottom electrode 4, region of discharge Rectangle radio-frequency discharge passage is formed on the right side of district;By bar type law understand baffle plate 5 on the left of upper electrode 3 and region of discharge, upper electrode 3 with Not electric discharge between baffle plate 5, bottom electrode 4 and region of discharge right-hand apron 6 on the left of region of discharge right-hand apron 6, bottom electrode 4 and region of discharge Occur, can effectively the interval of gas discharge be limited between the upper electrode 3 of regulation and bottom electrode 4.
Laser cavity 1 entirety is cuboid;Keep off on the right side of baffle plate 5, region of discharge on the left of upper electrode 3, bottom electrode 4, region of discharge The vertical section of plate 6 is in T shape, and the region of its composition forms airtight air storage chamber 9, sends laser for discharging in air storage chamber 9 Gas, the gas in air storage chamber 9 of the present utility model is CO2、N2, the mixed gas of He and Xe, and control mixed gas Good total gas pressure is between 10~12kPa, and controlling optimal gas mixing ratio is CO2: N2: He:Xe=16:16:63:5.
Shaping cavity 2 includes plane mirror 16, spherical surface focusing mirror 17, spatial filter 18, cylindrical mirror 19 and sphere Collimating mirror 20 is constituted;The resonance that the laser beam that upper electrode 3 in laser cavity 1, bottom electrode 4 produce is arranged in passing sequentially through it Chamber outgoing mirror 13, window mirror 14 enter shaping cavity 2, and laser beam enters shaping cavity 2 and passes sequentially through plane mirror 16, sphere Focus lamp 17, spatial filter 18, cylindrical mirror 19 and sphere collimating mirror 20 carry out shaping.
Window mirror 14 selects Diamond window to make, and the heat conductivity of diamond window mouth mirror 14 is good, and heat conductivity means well While higher output, there is less heat effect;Plane mirror 16 is a turning mirror, its Main Function Being the transmission direction changing light beam, spherical surface focusing mirror 17 represents a coquille, for carrying out the non-steady direction of output beam Focus on, and the effect of coquille is focused in steady direction non-to non-shaping light beam exactly, is focused at coquille focal plane The far-field distribution of light beam, it is achieved light beam low frequency separates on focal plane with HFS, it is simple to the elimination of follow-up secondary lobe;Space is filtered Ripple device 18 eliminates the secondary lobe in output beam, improves the beam quality in the non-steady direction of output beam;Cylindrical mirror 19 is used for controlling The angle of divergence in the non-steady direction of output beam processed, controls the beamwidth of output beam both direction;By adjusting sphere collimating mirror 20 Radius of curvature and placement location, can be adjusted the beam waist position of shaping light beam.
Upper electrode 3, the correspondence position of bottom electrode 4 side along its length are evenly arranged with hole 10, multiple inductance location, on The interior coupling inductance 11 arranged in hole, inductance location 10 being correspondingly arranged by often group between electrode 3, bottom electrode 4 is connected;This practicality Two resonant inductances in parallel between novel upper electrode 3 and bottom electrode 4, the resonance circuit forming LC height Q vibrates with radio-frequency power supply Frequency is mated, it is ensured that being uniformly distributed of radio-frequency voltage discharge channel, it is achieved that the maximum conversion efficiency of radio-frequency power;Upper electrode 3 Jackscrew 7 and the hole 10, inductance location of upper electrode 3 between, between the hole 10, inductance location of the jackscrew 7 of bottom electrode 4 and bottom electrode 4 All having groove, this electrode structure not only facilitates laser cavity 1 and upper electrode 3, the installation of bottom electrode 4, and achieves Electrode 3, the fine setting of spacing of bottom electrode 4.
Laser cavity 1 is provided above fan, and fan is screwed even by the multiple screws in laser cavity 1 Connect;Laser cavity 1 is dispelled the heat by the fan using the outside being arranged at laser cavity 1 so that the body of laser cavity 1 Long-pending less, and substituted for water-cooled with air-cooled, the radiator leak, the cooling current difference that exist when overcoming water-cooled cause heat radiation always The critical failures such as deficiency, improve the reliability of system.
Two, the left and right of laser cavity 1 is provided with heat-dissipating fin 12 on lateral wall;Heat-dissipating fin 12 and laser chamber Body 1 is structure as a whole, monolithic extruded molding, it is achieved that good thermal diffusion effect;Laser cavity 1, upper electrode 3, bottom electrode 4, on the left of region of discharge, baffle plate 5, region of discharge right-hand apron 6 material are aluminium alloy, are pressing drawing and form.
For increase power output, use collapsible turn back mirror 15 structure design, be provided with in laser cavity 1 certain do right Turning back mirror 15, mirror 15 of turning back is positioned at before resonator cavity outgoing mirror 13, ensures the big of laser by the direct reflection of mirror 15 of turning back Power exports.
Laser cavity 1 is provided above a step, and step is provided with circuit mounting groove 21, and circuit mounting groove 21 is internal Equipped with control circuit plate, radio frequency power board and electrode;The design of step makes circuit mounting groove 21 take off with laser cavity 1 From, it is ensured that the heat radiation of cavity does not affect the real work effect of circuit.
Above in association with accompanying drawing, embodiment of the present utility model is explained in detail, but this utility model is not limited to be retouched The embodiment stated.For a person skilled in the art, in the case of without departing from this utility model principle and spirit, right These embodiments carry out multiple change, revise, replace and modification, still fall within protection domain of the present utility model.

Claims (10)

1. a Novel carbon dioxide radio frequency metal laser instrument, it is characterised in that include laser cavity, shaping cavity, described Baffle plate on the left of electrode, bottom electrode, region of discharge, region of discharge right-hand apron it is provided with in laser chamber body;
Described upper electrode is positioned in the upper groove of described laser chamber body, and described bottom electrode is positioned at described laser chamber body In low groove, during on the left of described region of discharge, baffle plate is positioned at the left groove of described laser chamber body, described region of discharge right-hand apron It is positioned in the right groove of described laser chamber body, baffle plate on the left of described upper electrode, described bottom electrode, described region of discharge, described Region of discharge right-hand apron is fixed in described laser chamber body by jackscrew;
On the left of described upper electrode, described bottom electrode, described region of discharge, baffle plate, the vertical section of described region of discharge right-hand apron are T Font;
Place kick is used between baffle plate, described region of discharge right-hand apron on the left of described upper electrode, described bottom electrode and described region of discharge Fixed insulation, forms rectangle and penetrates on the right side of baffle plate, described region of discharge on the left of described upper electrode, described bottom electrode, described region of discharge Frequently discharge channel.
Novel carbon dioxide radio frequency metal laser instrument the most according to claim 1, it is characterised in that described laser cavity Overall in cuboid;Baffle plate, described region of discharge right-hand apron composition on the left of described upper electrode, described bottom electrode, described region of discharge Region form airtight air storage chamber.
Novel carbon dioxide radio frequency metal laser instrument the most according to claim 2, it is characterised in that described upper electrode, institute State baffle plate on the left of bottom electrode, described region of discharge, described region of discharge right-hand apron by described upper electrode, described bottom electrode, described The described jackscrew arranged on baffle plate, described region of discharge right-hand apron on the left of region of discharge carries out the adjustment of height.
Novel carbon dioxide radio frequency metal laser instrument the most according to claim 1, it is characterised in that described shaping cavity bag Include plane mirror, spherical surface focusing mirror, spatial filter, cylindrical mirror and sphere collimating mirror to constitute;
The resonance that the laser beam that described upper electrode in described laser chamber body, described bottom electrode produce is arranged in passing sequentially through it Chamber outgoing mirror, window mirror enter described shaping cavity, laser beam enter described shaping cavity pass sequentially through described plane mirror, Described spherical surface focusing mirror, described spatial filter, described cylindrical mirror and described sphere collimating mirror carry out shaping.
Novel carbon dioxide radio frequency metal laser instrument the most according to claim 1, it is characterised in that described upper electrode, institute The correspondence position stating bottom electrode side along its length is evenly arranged with hole, multiple inductance location, described upper electrode, described lower electricity The coupling inductance connection that the described inductance being correspondingly arranged by often group between pole is arranged in positioning hole;The described top of described upper electrode Between the hole, described inductance location of silk and described upper electrode, the described jackscrew of described bottom electrode and the described inductance of described bottom electrode Location all has groove between hole.
Novel carbon dioxide radio frequency metal laser instrument the most according to claim 1, it is characterised in that described laser cavity Being provided above fan, described fan is screwed connection by the multiple screws in described laser cavity.
Novel carbon dioxide radio frequency metal laser instrument the most according to claim 1, it is characterised in that described laser cavity Lateral wall, left and right on be provided with heat-dissipating fin, described heat-dissipating fin is structure as a whole with described laser cavity, overall squeezes Molded.
Novel carbon dioxide radio frequency metal laser instrument the most according to claim 4, it is characterised in that described laser cavity Inside be additionally provided with certain dry to mirror of turning back, described in mirror of turning back be positioned at before described resonator cavity outgoing mirror.
Novel carbon dioxide radio frequency metal laser instrument the most according to claim 1, it is characterised in that described laser chamber Keeping off material on the left of body, described upper electrode, described bottom electrode, described region of discharge on the right side of baffle plate, described region of discharge is aluminium alloy, is Pressing drawing forms.
Novel carbon dioxide radio frequency metal laser instrument the most according to claim 1, it is characterised in that described laser chamber Body is provided above a step, described step is provided with circuit mounting groove, equipped with control circuit inside described circuit mounting groove Plate, radio frequency power board and electrode.
CN201620763620.5U 2016-07-19 2016-07-19 A kind of Novel carbon dioxide radio frequency metal laser instrument Expired - Fee Related CN205863633U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105977769A (en) * 2016-07-19 2016-09-28 北京康迪光电子股份有限公司 Novel carbon dioxide radio frequency metal laser device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105977769A (en) * 2016-07-19 2016-09-28 北京康迪光电子股份有限公司 Novel carbon dioxide radio frequency metal laser device

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Granted publication date: 20170104