CN105161957A - Electrode adjustable device of CO2 radio frequency laser - Google Patents
Electrode adjustable device of CO2 radio frequency laser Download PDFInfo
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- CN105161957A CN105161957A CN201510524976.3A CN201510524976A CN105161957A CN 105161957 A CN105161957 A CN 105161957A CN 201510524976 A CN201510524976 A CN 201510524976A CN 105161957 A CN105161957 A CN 105161957A
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- adjusting slider
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Abstract
The invention discloses an electrode adjustable device of a CO2 radio frequency laser. The electrode adjustable device comprises a vacuum cavity (1), wherein an upper electrode (3) and a lower electrode (4) are arranged in the vacuum cavity (1) and are connected via a matching inductor (5), the electrode adjustable device is characterized in that end covers (2) are symmetrically and fixedly arranged at the two sides of the vacuum cavity (1), the lower electrode (4) is fixed with the inner wall of the bottom of the vacuum cavity (1) via a base plate (6), and the upper electrode (3) is provided with a height adjustment device. The electrode adjustable device aims to solve the problems that the distance between electrodes cannot be adjusted after the electrodes are accurately processed and installed with regard to the electrodes of the traditional CO2 radio frequency laser in the current market and the laser cavity is needed to be disassembled and assembled again and even the size parameter of a relevant device is needed to be changed when the electrodes are required to be optimized and adjusted; and since the laser cavity is the vacuum cavity and belongs to a precision part, a professional tool and an operator are required by the above adjustment mode, and moreover, the accuracy of the laser cavity can be affected.
Description
Technical field
The present invention relates to CO
2radio frequency laser equipment technical field, is specifically related to a kind of CO
2radio frequency laser electrode tunable arrangement.
Background technology
RF excited diffusion coldplate Luciola substriata CO
2laser is called as forth generation gas laser, with the advantage of uniqueness as: volume is little, lightweight, compact conformation, easy for installationly (can be directly installed on the arm of industrial machine, on the crossbeam of flame planer), sealed-off runs, non-maintaining, low cost, modulating characteristic are excellent, photoelectric conversion efficiency is done, output beam quality is high, power stability is excellent, operational reliability is high and long service life etc. is subject to the favor of people gradually, market is for high-power strip CO
2the demand of laser is also increasing, therefore about plate waveguide CO
2the research of laser will become the important innovations direction of gas laser development.
Current lath electrode CO
2the associated core technology of radio frequency laser is main or monopolized by external associated mechanisms, at present can administration measure CO
2the company of radio frequency laser only has four in the world, i.e. relevant, new master, Luo Fen, Zeus.At CO
2in the production process of laser, the design of electrode is most important, is the core of laser, and its performance of relevant parameter to last laser is most important, so the design of electrode can be described as CO
2a most important link in laser design process.Traditional C O
2radio frequency laser electrode is after electrode carries out fine finishining installation, distance between electrode just cannot adjust again, and the distance between electrode directly concerns the generation of laser, distance according to actual needs between electrode may need to be optimized adjustment, this just needs dismounting laser cavity again, even sometimes, the dimensional parameters of related device in laser to be revised, use very inconvenient.
Summary of the invention
The object of this invention is to provide a kind of CO
2radio frequency laser electrode tunable arrangement, thus overcome CO traditional in the market
2radio frequency laser electrode is after electrode carries out fine finishining installation, distance between electrode just cannot adjust again, when electrode needs to optimize and revise, then need dismounting laser cavity again even will revise the dimensional parameters of related device, because laser cavity is vacuum cavity, belong to precise part, above-mentioned adjustment mode not only needs by professional apparatus and personnel, and can affect the precision of laser cavity.
The present invention is achieved through the following technical solutions:
A kind of CO2 radio frequency laser electrode tunable arrangement, comprise vacuum cavity (1), top electrode (3), bottom electrode (4) is provided with in vacuum cavity (1), connected by coupling inductance (5) between top electrode (3), bottom electrode (4), it is characterized in that: described vacuum cavity (1) bilateral symmetry is fixedly installed end cap (2), bottom electrode (4) is fixed by base plate (6) and vacuum cavity (1) bottom interior wall, and top electrode (3) is provided with arrangement for adjusting height;
Described arrangement for adjusting height comprises upper adjusting slider (7), the lower adjusting slider (8) that one group of rectangular triangle is arranged, the inclined-plane of upper adjusting slider (7), lower adjusting slider (8) is oppositely arranged, and overall rectangular shaped, upper adjusting slider (7) is provided with adjusting screw(rod) (10) with the side right-angle side of lower adjusting slider (8), and the end cap (2) that adjusting screw(rod) (10) and vacuum cavity (1) bilateral symmetry are arranged is adjustable to be connected;
Described lower adjusting slider (8) two bottom sides is connected with top electrode (3) upper surface by symmetrically arranged insulation ceramics (9), and the middle position of top electrode (3) side is along its length provided with radiofrequency signal Connection Block (11).
The further Technological improvement plan of the present invention is:
The bilateral symmetry of described fixing bottom electrode (4) base plate (6) is provided with the eyeglass installing rack (12) for fixing outgoing mirror, speculum.
The further Technological improvement plan of the present invention is:
Described insulation ceramics (9) thickness is 0.2mm.
The further Technological improvement plan of the present invention is:
The correspondence position of described top electrode (3), bottom electrode (4) side along its length is evenly provided with multiple inductance jack (13), and the coupling inductance (5) by arranging in the every corresponding inductance jack (13) arranged of group between top electrode (3), bottom electrode (4) connects.
The further Technological improvement plan of the present invention is:
Adjusting play (14) is provided with between described top electrode (3) and vacuum cavity (1) upper inside wall.
The further Technological improvement plan of the present invention is:
Described top electrode (3), bottom electrode (4), upper adjusting slider (7), lower adjusting slider (8) and base plate (6) are made by aluminum.
The present invention compared with prior art, has following obvious advantage:
In vacuum cavity of the present invention, primary structure is by discharge plate, base plate, adjusting slider forms, discharging structure is made up of two metal aluminium electrodes, two pairs of upper bottom crown parallel placements along its length, separated by insulation ceramics such as aluminum oxide ceramic between top crown and bottom crown, form waveguide sidewalls, the spacing of top electrode and bottom electrode can be regulated by the adjusting screw(rod) of vacuum cavity both sides, coordinate corresponding resonant cavity, form the electric discharge gain space of rectangle, the installation of this kind of very convenient cavity of electrode structure and electrode, the adjustment of the spacing of electrode can be realized in addition at containment portion.
Accompanying drawing explanation
Fig. 1 is present system structured flowchart.
Embodiment
As shown in Figure 1, the present invention includes vacuum cavity 1, top electrode 3, bottom electrode 4 is provided with in vacuum cavity 1, connected by coupling inductance 5 between top electrode 3, bottom electrode 4, described vacuum cavity 1 bilateral symmetry is fixedly installed end cap 2, bottom electrode 4 is fixed by base plate 6 and vacuum cavity 1 bottom interior wall, and top electrode 3 is provided with arrangement for adjusting height;
Described arrangement for adjusting height comprises upper adjusting slider 7, the lower adjusting slider 8 that one group of rectangular triangle is arranged, the inclined-plane of upper adjusting slider 7, lower adjusting slider 8 is oppositely arranged, and overall rectangular shaped, upper adjusting slider 7 is provided with adjusting screw(rod) 10 with the side right-angle side of lower adjusting slider 8, and the end cap 2 that adjusting screw(rod) 10 and vacuum cavity 1 bilateral symmetry are arranged is adjustable to be connected; Described lower adjusting slider 8 two bottom sides is connected with top electrode 3 upper surface by symmetrically arranged insulation ceramics 9, and the middle position of top electrode 3 side is along its length provided with radiofrequency signal Connection Block 11;
The bilateral symmetry of described fixing bottom electrode 4 base plate 6 is provided with the eyeglass installing rack 12 for fixing outgoing mirror, speculum; Described insulation ceramics 9 thickness is 0.2mm;
The correspondence position of described top electrode 3, bottom electrode 4 side along its length is evenly provided with multiple inductance jack 13, and the coupling inductance 5 by arranging in the every corresponding inductance jack 13 arranged of group between top electrode 3, bottom electrode 4 connects; Adjusting play 14 is provided with between described top electrode 3 and vacuum cavity 1 upper inside wall;
Described top electrode 3, bottom electrode 4, upper adjusting slider 7, lower adjusting slider 8 and base plate 6 are made by aluminum.
As shown in Figure 1, vacuum cavity 1 is laser cavity, is formed by 6063-T5 aluminium solid-drawn, after carry out fine finishining through machining center;
End cap 2 is laser front and rear cover, forms annular seal space together with vacuum cavity 1, adopts indium silk to seal between end cap and cavity;
Top electrode 3 is laser top crown, top crown length be about 616mm, 36mm, 15.8mm respectively, two ends outside the length direction of top crown, be processed with the inductance jack 13 of a row 4 coupling, for plug-in mounting coupling inductance 5, in the outer side center part of top electrode 3, be processed with a radiofrequency signal Connection Block 11, rf power signal inserts radiofrequency signal Connection Block 11 by a connecting rod through vacuum cavity 1, is coupled to by rf power signal in the electrode of upper pole;
Structure and the top electrode 3 of bottom electrode 4 are similar, and the size of bottom crown is identical with top crown, are processed with the coupling inductance jack 13 that a row is corresponding with two top electrodes 3 at the two ends, outside of pole plate;
Coupling inductance 5 is connected between top electrode 3 and bottom electrode 4;
Base plate 6 is made up of the metallic plate of a rectangle, be fixed on bottom vacuum cavity 1 inwall, on base plate 6, plane directly connects with bottom electrode 4, its lower plane connects with vacuum cavity 1 inner surface, whole bottom electrode 4 is fixed on base plate 6, at the eyeglass installing rack 12 being fixed with cavity mirror and outgoing mirror of the two ends symmetry of base plate 6 length direction.
Upper adjusting slider 7 and lower adjusting slider 8, the adjustment of electrode gap is realized slide block by this,
The upper surface of upper adjusting slider 7 is planes, connects with vacuum cavity 1 inwall, and lower surface is an inclined-plane, and Ye Shiyi inclined-plane, lower adjusting slider 8 top, corresponding with upper adjusting slider 7 lower surface, bottom is a plane.
Insulation ceramics 9 is very thin insulation ceramics, general thickness is about 0.2mm, separate lower adjusting slider 8 and top electrode 3, from bar punishment law: at the left branch of the relation curve of discharge firing voltage and air pressure and die opening product value, when die opening is less, gas breakdown voltage is higher, therefore, not discharge between top electrode 3 and lower adjusting slider 8 generation, therefore can by the limit of interval of gas discharge between upper/lower electrode.
Adjusting screw(rod) 10 is adjusting knob, by regulating through two adjusting screw(rod)s 10 on upper adjusting slider 7, lower adjusting slider 8, sliding block can be pulled to slide along its length, change two slide blocks relative position along its length, thus the height of adjustment two slide blocks, and then realize the adjustment of spacing of upper and lower electrode, firm for electrode is fixed in vacuum cavity 1 simultaneously.
Radiofrequency signal Connection Block 11 is radio-frequency (RF) signal input end, this laser adopts a top electrode 3 and a ground connection bottom electrode 4, form the discharge space of two rectangles, input radio frequency power signal in top electrode 3, formed between two lath-shaped gain regions, while the length keeping discharge plate, achieving the effective length increasing laser gain, providing condition for realizing high power compact laser.
Eyeglass installing rack 12 is the mirror holder of outgoing mirror and speculum, and for installing corresponding eyeglass, the output for laser provides accurate light path.
Inductance jack 13 is for installing coupling inductance 5.
Adjusting play 14 has certain space for upper adjusting slider 7 and lower adjusting slider 8 under adjusting screw(rod) 10 acts on.
Technological means disclosed in the present invention program is not limited only to the technological means disclosed in above-mentioned execution mode, also comprises the technical scheme be made up of above technical characteristic combination in any.It should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.
Claims (6)
1. a CO
2radio frequency laser electrode tunable arrangement, comprise vacuum cavity (1), top electrode (3), bottom electrode (4) is provided with in vacuum cavity (1), connected by coupling inductance (5) between top electrode (3), bottom electrode (4), it is characterized in that: described vacuum cavity (1) bilateral symmetry is fixedly installed end cap (2), bottom electrode (4) is fixed by base plate (6) and vacuum cavity (1) bottom interior wall, and top electrode (3) is provided with arrangement for adjusting height;
Described arrangement for adjusting height comprises upper adjusting slider (7), the lower adjusting slider (8) that one group of rectangular triangle is arranged, the inclined-plane of upper adjusting slider (7), lower adjusting slider (8) is oppositely arranged, and overall rectangular shaped, upper adjusting slider (7) is provided with adjusting screw(rod) (10) with the side right-angle side of lower adjusting slider (8), and the end cap (2) that adjusting screw(rod) (10) and vacuum cavity (1) bilateral symmetry are arranged is adjustable to be connected;
Described lower adjusting slider (8) two bottom sides is connected with top electrode (3) upper surface by symmetrically arranged insulation ceramics (9), and the middle position of top electrode (3) side is along its length provided with radiofrequency signal Connection Block (11).
2. a kind of CO according to claim 1
2radio frequency laser electrode tunable arrangement, is characterized in that: the bilateral symmetry of described fixing bottom electrode (4) base plate (6) is provided with the eyeglass installing rack (12) for fixing outgoing mirror, speculum.
3. a kind of CO according to claim 1 and 2
2radio frequency laser electrode tunable arrangement, is characterized in that: described insulation ceramics (9) thickness is 0.2mm.
4. a kind of CO according to claim 1 and 2
2radio frequency laser electrode tunable arrangement, it is characterized in that: the correspondence position of described top electrode (3), bottom electrode (4) side along its length is evenly provided with multiple inductance jack (13), the coupling inductance (5) by arranging in the every corresponding inductance jack (13) arranged of group between top electrode (3), bottom electrode (4) connects.
5. a kind of CO according to claim 1 and 2
2radio frequency laser electrode tunable arrangement, is characterized in that: be provided with adjusting play (14) between described top electrode (3) and vacuum cavity (1) upper inside wall.
6. a kind of CO according to claim 1 and 2
2radio frequency laser electrode tunable arrangement, is characterized in that: described top electrode (3), bottom electrode (4), upper adjusting slider (7), lower adjusting slider (8) and base plate (6) are made by aluminum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510524976.3A CN105161957A (en) | 2015-08-25 | 2015-08-25 | Electrode adjustable device of CO2 radio frequency laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510524976.3A CN105161957A (en) | 2015-08-25 | 2015-08-25 | Electrode adjustable device of CO2 radio frequency laser |
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| Publication Number | Publication Date |
|---|---|
| CN105161957A true CN105161957A (en) | 2015-12-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510524976.3A Pending CN105161957A (en) | 2015-08-25 | 2015-08-25 | Electrode adjustable device of CO2 radio frequency laser |
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| CN (1) | CN105161957A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105671527A (en) * | 2016-03-16 | 2016-06-15 | 大族激光科技产业集团股份有限公司 | Discharge electrode of carbon dioxide laser, preparation method of discharge electrode and carbon dioxide laser |
| CN106807705A (en) * | 2016-12-30 | 2017-06-09 | 东莞市圣荣自动化科技有限公司 | A kind of washing tool of cleaning SMT tools |
| CN105375243B (en) * | 2015-12-25 | 2018-06-01 | 中国科学院电子学研究所 | Transverse excitation atmosphere CO2Laser main electrode regulating device |
| CN109411996A (en) * | 2018-11-29 | 2019-03-01 | 北京科益虹源光电技术有限公司 | A kind of excimer laser electrode structure and excimer laser |
| JP2021516449A (en) * | 2018-03-07 | 2021-07-01 | コヒレント， インコーポレイテッド | Conductive cooling slab laser |
-
2015
- 2015-08-25 CN CN201510524976.3A patent/CN105161957A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105375243B (en) * | 2015-12-25 | 2018-06-01 | 中国科学院电子学研究所 | Transverse excitation atmosphere CO2Laser main electrode regulating device |
| CN105671527A (en) * | 2016-03-16 | 2016-06-15 | 大族激光科技产业集团股份有限公司 | Discharge electrode of carbon dioxide laser, preparation method of discharge electrode and carbon dioxide laser |
| CN106807705A (en) * | 2016-12-30 | 2017-06-09 | 东莞市圣荣自动化科技有限公司 | A kind of washing tool of cleaning SMT tools |
| JP2021516449A (en) * | 2018-03-07 | 2021-07-01 | コヒレント， インコーポレイテッド | Conductive cooling slab laser |
| JP7258904B2 (en) | 2018-03-07 | 2023-04-17 | コヒレント， インコーポレイテッド | conduction cooled slab laser |
| CN109411996A (en) * | 2018-11-29 | 2019-03-01 | 北京科益虹源光电技术有限公司 | A kind of excimer laser electrode structure and excimer laser |
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| C06 | Publication | ||
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20151216 |
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| WD01 | Invention patent application deemed withdrawn after publication |