CN109411996A - A kind of excimer laser electrode structure and excimer laser - Google Patents
A kind of excimer laser electrode structure and excimer laser Download PDFInfo
- Publication number
- CN109411996A CN109411996A CN201811439648.3A CN201811439648A CN109411996A CN 109411996 A CN109411996 A CN 109411996A CN 201811439648 A CN201811439648 A CN 201811439648A CN 109411996 A CN109411996 A CN 109411996A
- Authority
- CN
- China
- Prior art keywords
- anode
- excimer laser
- mounting base
- plane
- support structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009413 insulation Methods 0.000 claims description 5
- 229910052573 porcelain Inorganic materials 0.000 claims 1
- 230000008859 change Effects 0.000 abstract description 11
- 230000001771 impaired effect Effects 0.000 abstract description 5
- 238000002513 implantation Methods 0.000 abstract description 5
- 238000012423 maintenance Methods 0.000 abstract description 5
- 230000007774 longterm Effects 0.000 abstract description 4
- 238000012790 confirmation Methods 0.000 abstract description 3
- 238000011160 research Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 13
- 239000007772 electrode material Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 238000010276 construction Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910001512 metal fluoride Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 238000012958 reprocessing Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000012994 industrial processing Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0381—Anodes or particular adaptations thereof
Abstract
Excimer laser electrode structure and excimer laser provided by the invention can be offset by the accurate adjusting of anode height because anode consumes the problem of guiding discharge spacing increases after laser long-term work, to guarantee that discharge range does not generate change.Support the maintenance repeatedly of impaired anode, under the premise of guaranteeing that laser output performance is consistent, the service life of the anode greatly improved has saved the operating cost of laser, and anode height is adjustable, it therefore can accurate coordination electrode spacing, it can be adapted for the power supply of different Implantation Energies, by adjusting the height of anode, obtain different discharge volumes, make laser works under conditions of excimer laser best injecting power density, to obtain the laser output of higher efficiency.Equally, the present invention can be used for studying the optimum power intensity of excimer laser, and the research of confirmation excimer laser optimum electrode spacing.
Description
Technical field
The present invention relates to laser technology field, in particular to a kind of excimer laser electrode structure and excimer laser
Background technique
The laser wave length of excimer laser does not generate fuel factor for material, therefore has in industrial processing field
It is widely applied.Especially in high-end field of lithography, the excimer laser for the characteristics of being provided simultaneously with Gao Zhongying, narrow linewidth and big energy
Device has become the light source that current semiconductor lithography field accounts for absolute leading position.
In Gao Zhongying excimer laser discharge cavity, electrode especially anode can be as the extension of working time be by gradually
" corrosion ".There are two the reason of generating this " corrosion " is main: first, contain fluorine gas in the working gas of excimer laser,
The gas of this strong oxidizing property can be reacted with electrode material, and electrode surface is caused to generate " the submerged reef layer " of metal fluoride, second,
The anode of excimer laser bears electron bombardment, and long-term electron bombardment will cause " evaporation " of electrode material.Both feelings
Condition can all impact laser performance.
The electric discharge that the presence of submerged reef layer will lead to laser becomes arc discharge from glow discharge, and arc discharge can seize sharp
The energy of light device causes delivery efficiency reduction and output energy unstable, and electrode material " evaporation " then will lead to electrode spacing
It changes, influences laser performance.
There are best injecting power density for excimer laser, when pump power density is in best injecting power density
When, export the efficiency highest of laser.Fig. 1 is excimer laser discharge range cross-sectional view.In figure 101 be cathode, 102
For anode, the 103 discharge range cross section between anode and cathode, the width of discharge range is W, and the height of discharge range is X,
It is determined by the height between anode and cathode, the length of discharge range has the length of anode and cathode to determine.Injecting power density such as formula (1)
It is shown:
ρ is injecting power density in formula, and P is injecting power.For excimer laser, there are best injecting power is close
The concept of degree, mainstream photoetching are about with the best injecting power density of excimer laser KrF (248nm) and ArF (193) nm
2MW/cm3, when injecting power density is lower than best injecting power, the light extraction efficiency of laser can sharply decline, to ArF standard point
For sub- laser, data in literature shows to work as injecting power density down to 1.52MW/cm3, laser will be unable to regular picture.From
It can be seen that, after the injectability of laser determines, i.e. injecting power P is definite value, then injecting power density in formula (1)
It is dependent only on electrode spacing X, because the working time with laser increases, the length L of electrode and the width W of discharge range
It will not change, only the increase that will cause electrode spacing X is lost in anode surface, so that injecting power density can be reduced.
Fig. 2 is several frequently seen excimer laser electrode structure schematic diagram.201 be cathode in figure, and 202 be anode, electricity
Interpolar is away from for X.In Gao Zhongying excimer laser discharge cavity, electrode especially anode can with the working time extension by by
Gradually " corrode ".There are two the reason of generating this " corrosion " is main: first, containing fluorine in the working gas of excimer laser
The gas of gas, this strong oxidizing property can be reacted with electrode material, cause electrode surface to generate " the submerged reef layer " of metal fluoride, such as
Shown in Fig. 3,301 react " submerged reef " to be formed with electrode material for fluorine gas in figure, and 302 be anode, and 303 be anode surface；Second,
The anode of excimer laser bears electron bombardment, and long-term electron bombardment will cause " evaporation " of electrode material.Both feelings
Condition can all impact laser performance.Submerged reef layer excessively so just must carry out mechanical reprocessing to it, make electrode surface
Cleaning.Electrode material caused by either mechanical reprocessing or electron bombardment evaporates, and certainly will will cause the increasing of electrode spacing X
Add, when (a) anode damage causes the increase of electrode spacing X in Fig. 2, electric discharge width W is remained unchanged, and (b) anode damage is made in Fig. 2
At electrode spacing X increase when, electric discharge width W also increase, both electrode structures can all be caused because of anode damage injection function
The decline of rate density.Therefore in someone's design drawing 2 (c) electrode structure, anode uses structure wide at the top and narrow at the bottom, when anode damage is made
At electrode spacing X increase when, electric discharge width W reduce therewith, guarantee electric discharge cross-sectional area it is constant, to guarantee that injecting power is close
Degree is maintained at optimum state.But although this anode construction can guarantee that injecting power does not change, but will lead to electric discharge
The electrode spacing X and electric discharge width W in section change, and change so as to cause the size of laser output spot, this is right
It is unacceptable for user especially photoetching user.
The installation site of two electrodes of yin-yang of commercialization excimer laser is fixed at present, and height is unadjustable, such as
Shown in Fig. 4.401 be cathode in figure, and 402 be anode, as shown in the figure no matter model machine and cathode, installation site be it is fixed can not
Height adjustment is carried out, then once causing anode damage, electrode spacing inevitably enlarges, to cause under injecting power density
The adverse effect that drop and spot size increase.
To solve the above problems, there has been proposed a kind of height-adjustable mounting structures of anode, as shown in Figure 5.502 in figure
For anode, 502a is anode surface, and 500 be insulating ceramics, and 503 play support to insulating ceramics and anode for metal support structure
Effect.When anode surface 502a is lost with the increase of working time, electrode spacing be will increase, but by adjusting sun
The adjustable supports screw of pole bottom, increases anode position, offsets anode loss, so that keeping height L is definite value.Thus can
Guarantee that electrode spacing does not change, to guarantee injecting power density and spot size all in optimum state.But it is this
Structure has the disadvantage in that the 1, structure carries out the height adjustment of anode using jackscrew mode, interior when excimer laser works
The blower in portion is with thousands of rpms of revolving speed high-speed rotation, and necessarily with the presence of vibration, long-play, jackscrew is easy to pine
It is dynamic, so the positional stability of anode is poor；2, anode is contacted by the screw thread of jackscrew with support construction 503, and contact area is small, conductive
Property is poor；3, the electrode length of photoetching excimer laser be greater than 50cm, if only use a jackscrew, it cannot be guaranteed that entirely
Anode is uniformly contacted with support construction 503, just not can guarantee the Uniform Discharge in entire electrode length direction, if in electrode length
It supports using row's jackscrew on direction and adjusts anode height, although can increase the contact area of anode Yu support construction 503, protect
The Uniform Discharge in electrode length direction is demonstrate,proved, but multiple jackscrews is needed to adjust together, just can guarantee that anode high precision controls,
Guarantee that the height adjustments such as row's jackscrew are very difficult simultaneously, it is more likely that because the adjusting height of jackscrew is different, cause electricity
Interpolar will lead to laser and be unable to regular picture away from changing on electrode length direction when serious, therefore this mode increases
The inaccuracy and unstability for having added electrode spacing to adjust.
Therefore, the electrode of excimer laser has the service life.Nothing is generated to laser performance when electrode corrosion seriously arrives
When the influence that method is endured, it is necessary to which the replacement for re-replacing electrode, especially anode is more frequent.
The anode of current commercial quasi-molecule light device is direct replacement, will cause the increase of the operating cost of laser.
Although no matter using any processing method that can all bring anode height side because the anode surface of corrosion can re-work
Upward loss, after installing back laser again, the spacing that necessarily will cause cathode and anode increases, and electrode spacing increase can be led
Causing the energy injection efficiency of laser reduces, and laser output energy can be directly resulted in when serious and is drastically reduced, additionally due to putting
Electric section changes, and the output facula size of laser can also change correspondingly, and can make to the use of laser user when serious
At undesirable influence.
Summary of the invention
The embodiment of the invention provides a kind of excimer laser electrode structure and excimer lasers, and anode height is can
Adjust, can accurate coordination electrode spacing suitable for the power supply of different Implantation Energies also support the maintenance repeatedly of impaired anode,
Under the premise of guaranteeing that laser output performance is consistent, the service life of the anode greatly improved has saved the operation of laser
Cost.
In a first aspect, the present invention provides a kind of excimer laser electrode structure, including anode, cathode, it is used to support institute
The support structure of anode, the insulating part for being used to support the cathode, cavity wall, the insulating part is stated to be arranged in the cavity wall
On, the cathode and the anode are oppositely arranged, and the cathode and the cavity wall have insulation gap, the support structure
It is electrically connected with the cavity wall, the anode has mounting base, and the mounting base and the support structure use face face paste
The mode of conjunction connects, by adjusting the position between the mounting base and the support structure with respect to sliding between the face of face,
And then complete the clearance distance between the anode and the cathode.
As a kind of optional scheme, the insulating part uses T-type structure, the bottom of the T-type structure and the cavity wall
It is connected, the top of the T-type structure is arranged in the cathode.
As a kind of optional scheme, the support structure has the first vertical plane, and correspondence is set in the mounting base
There is the second vertical plane, first vertical plane and second vertical plane face face paste are closed.
It further include the first bolt as a kind of optional scheme, the mounting base penetrates through the first waist of setting in the horizontal direction
The widest diameter of type hole, first waist-shaped hole is arranged along the vertical direction, edge on the first vertical plane of the support structure
Horizontal direction is equipped with the first mounting hole, and first bolt is by first waist-shaped hole and first mounting hole by the peace
Dress seat is removably mounted in the support structure.
As a kind of optional scheme, the support structure has the first inclined-plane, is correspondingly provided in the mounting base
Second inclined-plane, first inclined-plane and second inclined-plane face face paste are closed.
It further include the second bolt and third bolt, the support structure is along vertical institute as a kind of optional scheme
State direction perforation second waist-shaped hole of setting on the first inclined-plane, widest diameter the inclining along first inclined-plane of second waist-shaped hole
Tilted direction is arranged, and the vertical direction in the mounting base along the first inclined-plane is equipped with the second mounting hole, and second bolt passes through institute
It states the second waist-shaped hole and the mounting base is removably mounted in the support structure by second mounting hole, it is described
Support structure is mounted in the cavity wall by third bolt.
As a kind of optional scheme, the discharge end of the anode is plane.
As a kind of optional scheme, the insulating part uses insulating ceramics.
As a kind of optional scheme, the angle between first vertical plane and first inclined-plane is 30 degree.
Second aspect, the present invention provide a kind of excimer laser, and the excimer laser has such as above-mentioned standard point
Sub- laser electrode structure.
As can be seen from the above technical solutions, the embodiment of the present invention has the advantage that
Excimer laser electrode structure and excimer laser provided by the invention, can pass through the accurate of anode height
Adjust offset offset laser long-term work after because anode consumption due to guiding discharge spacing increase the problem of, to guarantee to discharge
Section does not generate change.The maintenance repeatedly of impaired anode is supported to mention significantly under the premise of guaranteeing that laser output performance is consistent
The service life of high anode has saved the operating cost of laser, and anode height is adjustable, therefore can accurately be controlled
Electrode spacing processed can be adapted for the power supply of different Implantation Energies, by adjusting the height of anode, obtain different discharge bodies
Product, makes laser works under conditions of excimer laser best injecting power density, to obtain the laser of higher efficiency
Output.Equally, the present invention can be used for studying the optimum power intensity of excimer laser, and confirmation excimer laser is most
The research of good electrode spacing.
Detailed description of the invention
Fig. 1 is the schematic diagram of excimer laser discharge range cross section in existing scheme；
Fig. 2 is excimer laser electrode structure schematic diagram several frequently seen in existing scheme；
Fig. 3 is the schematic diagram of existing scheme Anodic submerged reef layer corrosion；
Fig. 4 is the schematic diagram that excimer laser electrode mounting structure is commonly used in existing scheme；
Fig. 5 is a kind of schematic diagram of the height-adjustable mounting structure of traditional anode in existing scheme；
Fig. 6 is a kind of structure chart of embodiment of excimer laser electrode structure provided by the invention；
Fig. 7 is the structure chart of another embodiment of excimer laser electrode structure provided by the invention；
Fig. 8 is the structure chart of the another embodiment of excimer laser electrode structure provided by the invention.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The model that the present invention protects all should belong in member's every other embodiment obtained without making creative work
It encloses.
Description and claims of this specification and term " first ", " second ", " third ", " in above-mentioned attached drawing
Four " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that using in this way
Data be interchangeable under appropriate circumstances, so that the embodiments described herein can be in addition to illustrating herein or describing
Sequence other than appearance is implemented.In addition, term " includes " and " having " and their any deformation, it is intended that covering is non-exclusive
Include, for example, the process, method, system, product or equipment for containing a series of steps or units are not necessarily limited to clearly arrange
Those of out step or unit, but may include be not clearly listed or it is solid for these process, methods, product or equipment
The other step or units having.
As shown in connection with fig. 6, the present invention provides a kind of excimer laser electrode structure, including anode 602, cathode, is used for
Support the support structure 603 of the anode 602, insulating part 600 for being used to support the cathode 601, cavity wall 604, described
Insulating part 600 is arranged in the cavity wall 604, and the cathode 601 and the anode 602 are oppositely arranged, the discharge end of anode 602
602a can be plane, and the cathode 601 and the cavity wall 604 have an insulation gap, the support structure 603 with it is described
Cavity wall 604 is electrically connected, and the anode 602 has mounting base 605, and the mounting base 605 is adopted with the support structure 603
It is connected with the mode that face face paste is closed, the mounting base 605 and the support structure is adjusted by sliding opposite between the face of face
Position between 603, need to carry out between cathode 601 and anode 602 apart from when, pass through mounting base 605 and conductive branch
Opposite sliding is carried out between support structure 603 to change the position of mounting base 605, so that the anode 602 in mounting base 605
Position changes, so that the gap between 601 anode 602 of cathode changes, can pass through the accurate tune of 602 height of anode
Section is to offset the problem.To guarantee that discharge range does not generate change, the maintenance repeatedly of impaired anode 602 is supported, guaranteeing to swash
Under the premise of light device output performance is consistent, the service life of the anode 602 greatly improved has saved the operating cost of laser.
In addition the height of anode 602 is adjustable, can accurate coordination electrode spacing, can be adapted for the power supply of different Implantation Energies, pass through tune
The height of whole anode 602, obtains different discharge volumes, makes laser works in the best injecting power density of excimer laser
Under conditions of, to obtain the laser output of higher efficiency.
In the present embodiment, the insulating part 600 uses T-type structure, the bottom of the T-type structure and 604 phase of cavity wall
Even, the top of the T-type structure is arranged in the cathode 601, and the insulating part 600 can use rubber, insulating ceramics, this reality
It applies in example using insulating ceramics, it should be noted that the structure of insulating part 600, which can according to need, to be selected, and cathode is kept
It insulate, does not limit this between 601 and cavity wall 604.
As shown in connection with fig. 7, in one embodiment, mounting base 704 is in such a way that vertical shift adjusts anode height, institute
Stating support structure 702 has the first vertical plane, is correspondingly provided with the second vertical plane, first vertical plane in the mounting base
It is closed with second vertical plane face face paste, by mounting base in the position of the sliding adjustment anode of vertical direction, in adjustment position
It needs that the position of mounting base is fixed afterwards, the mode being fixed by bolts in the present embodiment, further includes the first spiral shell specifically
Bolt 706, the mounting base penetrate through the first waist-shaped hole 705 of setting, the widest diameter edge of first waist-shaped hole 705 in the horizontal direction
Vertical direction setting, such first bolt 706 can carry out opposite sliding between the first waist-shaped hole 705, carry out the conduction
The first mounting hole 707 is equipped on first vertical plane of support construction 702 in the horizontal direction, first bolt passes through described first
The mounting base is removably mounted in the support structure 702 by waist-shaped hole and first mounting hole, is being adjusted
When position, by the first bolt looseness, mounting base is moved under the position-limiting action of the first bolt by the first waist-shaped hole, is adjusted
It is whole to the first bolt being screwed after desired height, the position between mounting base and support structure 702 is fixed, is needed
Illustrate, the first bolt can use sunk screw, not limit this.
As shown in connection with fig. 8, in another embodiment, mounting base is by the way of vertical tilt adjustments anode height, tool
Body, the support structure 803 have the first inclined-plane, are correspondingly provided with the second inclined-plane in the mounting base 804, and described first
Inclined-plane and second inclined-plane face face paste are closed, and gradient can be set to 30 degree, further include the second bolt 806 and the specifically
Three bolts 807, the second waist-shaped hole is arranged in direction perforation of the support structure 803 along vertical first inclined-plane, described
Inclined direction of the widest diameter of second waist-shaped hole 805 along first inclined-plane is arranged, and mounting base 804 can use the second waist type
The adjustment that position is carried out under 806 position-limiting action of hole 805 and the second bolt, along the Vertical Square on the first inclined-plane in the mounting base 804
To the second mounting hole 808 is equipped with, second bolt 806 will by second waist-shaped hole 805 and second mounting hole 808
The mounting base 804 is removably mounted in the support structure 803, and the support structure 803 passes through third
Bolt 807 is mounted in the cavity wall 803, is waited when adjusting the position, and the second bolt 806 and third bolt 807 are loosened, installation
Seat 804 is moved under the position-limiting action of the second bolt 806 by the second waist-shaped hole 808, is adjusted to the after desired height
Two bolts 806 screw, since mounting base 804 carries out position adjustment using inclination movement mode, so mounting base 804 and conductive branch
There is horizontal gap in one section of support structure 803, the other end of support structure 803 can be adjusted by horizontal direction by between
Gap is reduced up to fitting together, and is then tightened third bolt 807, is completed between mounting base 804 and support structure 803
Position be fixed, it should be noted that the second bolt 806 can use sunk screw, and third bolt 807 can use disk
Head screw, does not limit this.
For two kinds of embodiments of vertical direction and inclined direction being combined use, also can be used alone, when
When combined use, the angle between first vertical plane and first inclined-plane is 30 degree, and angle can be right with flexible choice
This is without limitation.
As shown in fig. 6, in a kind of embodiment of excimer laser electrode structure provided by the invention, comprising: 601 in figure
For cathode, 602 be anode, and the discharge end of anode is plane 602a, 600 for insulating ceramics play fixed electrode and with cavity wall 604
The effect of insulation, support structure 603 can be the metal support structure of copper material, 603 supporting anodes of support structure
602, and it connect anode 602 with cavity wall 604, play the role of electronic reflux.As shown, the mounting base 605 of anode 602 with
It is fixed by the way of the face contact in two faces between support structure 603, forms folder between two faces of mounting base 605
Angle, a reasonable angle are 30 degree, compared with traditional jackscrew regulative mode, program anode 602 and support structure
The stability of 603 anodes greatly improved using the fixed form of the face contact in two faces, will not be because of laser working process
Present in shake and 602 position of anode caused to loosen, while the fixed form of this face contact considerably increases anode 602
Electric conductivity between support structure 603 obtains more stable electronic reflux, help to obtain more stable between electrode put
Electricity.
In addition, adjustment process is cumbersome and is difficult accurately to adjust for needing multiple jackscrew linkages to adjust in traditional scheme
The drawbacks of anode height, a kind of excimer laser electrode structure proposed by the present invention can fast and accurately realize anode height
The accurate adjusting of degree, is specifically introduced below.
As shown in connection with fig. 7, another excimer laser electrode structure provided in the embodiment of the present invention, comprising: anode
701, support structure 702, cathode 703 and the mounting base 704 that anode 701 is arranged, the dotted portion in mounting base 704 are
Dotted portion on first waist-shaped hole 705,702 is the first mounting hole 707, and mounting base 704 is parallel with support structure 702
Face paste is fixed with the first bolt 706 afterwards together, and mounting base 704 can move down in the vertical direction along the first waist-shaped hole 706, adjusts peace
The distance between seat 704 and cathode 703 are filled, the effect for adjusting electrode height is had reached.
As shown in connection with fig. 8, another the excimer laser electrode structure provided in the embodiment of the present invention, including 801 sun
Pole, support structure 802, cavity wall 803 and mounting base 804, the dotted line in mounting base 804 is the second mounting hole 808, conductive
Dotted line in support construction 802 is the second waist-shaped hole 805, cavity wall 802 and mounting base 804 is pasted together, then with the second bolt 806
One end of mounting base 804 and support structure 802 is fixed together by screw, and support structure 802 and cavity wall 803 are pasted
Qi Houyong third bolt 807 is fixed together.
Correspondingly, the present invention also provides a kind of excimer laser, the excimer laser has such as above-mentioned standard point
Sub- laser electrode structure.
Excimer laser provided by the invention can offset the problem by the accurate adjusting of anode height.To
Guarantee that discharge range does not generate change.The maintenance repeatedly for supporting impaired anode is guaranteeing the consistent premise of laser output performance
Under, the service life of the anode greatly improved has saved the operating cost of laser, and anode height be it is adjustable, therefore
Can accurate coordination electrode spacing, can be adapted for the power supply of different Implantation Energies, by adjusting the height of anode, obtain different
Discharge volume, make laser works under conditions of excimer laser best injecting power density, to obtain more efficient
The laser of rate exports.Equally, the present invention can be used for studying the optimum power intensity of excimer laser, and confirmation quasi-molecule
The research of laser optimum electrode spacing.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, can refer to corresponding processes in the foregoing method embodiment, and details are not described herein.
In several embodiments provided herein, it should be understood that disclosed system, device and method can be with
It realizes by another way.For example, the apparatus embodiments described above are merely exemplary, for example, the unit
It divides, only a kind of logical function partition, there may be another division manner in actual implementation, such as multiple units or components
It can be combined or can be integrated into another system, or some features can be ignored or not executed.Another point, it is shown or
The mutual coupling, direct-coupling or communication connection discussed can be through some interfaces, the indirect coupling of device or unit
It closes or communicates to connect, can be electrical property, mechanical or other forms.
The unit as illustrated by the separation member may or may not be physically separated, aobvious as unit
The component shown may or may not be physical unit, it can and it is in one place, or may be distributed over multiple
In network unit.It can select some or all of unit therein according to the actual needs to realize the mesh of this embodiment scheme
's.
It, can also be in addition, the functional units in various embodiments of the present invention may be integrated into one processing unit
It is that each unit physically exists alone, can also be integrated in one unit with two or more units.Above-mentioned integrated list
Member both can take the form of hardware realization, can also realize in the form of software functional units.
Those of ordinary skill in the art will appreciate that all or part of the steps in the various methods of above-described embodiment is can
It is completed with instructing relevant hardware by program, which can be stored in a computer readable storage medium, storage
Medium may include: read-only memory (ROM, Read Only Memory), random access memory (RAM, Random
Access Memory), disk or CD etc..
A kind of excimer laser electrode structure provided by the present invention and excimer laser have been carried out in detail above
It introduces, for those of ordinary skill in the art, thought according to an embodiment of the present invention, in specific embodiment and application range
Upper there will be changes, in conclusion the contents of this specification are not to be construed as limiting the invention.
Claims (10)
1. a kind of excimer laser electrode structure, which is characterized in that including anode, cathode, be used to support leading for the anode
Electrical support structure, the insulating part for being used to support the cathode, cavity wall, the insulating part are arranged in the cavity wall, the cathode
It is oppositely arranged with the anode, the cathode and the cavity wall have insulation gap, the support structure and the cavity wall
It is electrically connected, the anode has mounting base, and the mounting base is connected by the way of the conjunction of face face paste with the support structure
It connects, by adjusting the position between the mounting base and the support structure with respect to sliding between the face of face, and then completes institute
State the clearance distance between anode and the cathode.
2. excimer laser electrode structure according to claim 1, which is characterized in that the insulating part uses T junction
Structure, the bottom of the T-type structure are connected with the cavity wall, and the top of the T-type structure is arranged in the cathode.
3. excimer laser electrode structure according to claim 1, which is characterized in that the support structure has
First vertical plane is correspondingly provided with the second vertical plane, first vertical plane and second vertical plane face face in the mounting base
Fitting.
4. excimer laser electrode structure according to claim 3, which is characterized in that it further include the first bolt, it is described
Mounting base penetrates through the first waist-shaped hole of setting in the horizontal direction, and the widest diameter of first waist-shaped hole is arranged along the vertical direction, institute
It states and is equipped with the first mounting hole on the first vertical plane of support structure in the horizontal direction, first bolt passes through described first
The mounting base is removably mounted in the support structure by waist-shaped hole and first mounting hole.
5. excimer laser electrode structure according to claim 3 or 4, which is characterized in that the support structure
With the first inclined-plane, the second inclined-plane is correspondingly provided in the mounting base, first inclined-plane and second inclined-plane face face paste are closed.
6. excimer laser electrode structure according to claim 5, which is characterized in that further include the second bolt and third
Bolt, direction perforation setting second waist-shaped hole of the support structure along vertical first inclined-plane, the second waist type
Inclined direction of the widest diameter in hole along first inclined-plane is arranged, and the vertical direction in the mounting base along the first inclined-plane is equipped with
Second mounting hole, second bolt by second waist-shaped hole and second mounting hole by the mounting base removably
It is mounted in the support structure, the support structure is mounted in the cavity wall by third bolt.
7. excimer laser electrode structure according to claim 1, which is characterized in that the discharge end of the anode is flat
Face.
8. excimer laser electrode structure according to claim 1, which is characterized in that the insulating part is using insulation pottery
Porcelain.
9. excimer laser electrode structure according to claim 5, which is characterized in that first vertical plane and described
Angle between first inclined-plane is 30 degree.
10. a kind of excimer laser, which is characterized in that the excimer laser has such as any one of claims 1 to 9
The excimer laser electrode structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811439648.3A CN109411996A (en) | 2018-11-29 | 2018-11-29 | A kind of excimer laser electrode structure and excimer laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811439648.3A CN109411996A (en) | 2018-11-29 | 2018-11-29 | A kind of excimer laser electrode structure and excimer laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109411996A true CN109411996A (en) | 2019-03-01 |
Family
ID=65456233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811439648.3A Pending CN109411996A (en) | 2018-11-29 | 2018-11-29 | A kind of excimer laser electrode structure and excimer laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109411996A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6466602B1 (en) * | 2000-06-09 | 2002-10-15 | Cymer, Inc. | Gas discharge laser long life electrodes |
| US20110058580A1 (en) * | 2001-01-23 | 2011-03-10 | Sandstrom Richard L | Extendable electrode for gas discharge laser |
| CN104350650A (en) * | 2012-06-07 | 2015-02-11 | 西默有限公司 | Corrosion resistant electrodes for laser chambers |
| CN105161957A (en) * | 2015-08-25 | 2015-12-16 | 范守娥 | Electrode adjustable device of CO2 radio frequency laser |
| CN209169622U (en) * | 2018-11-29 | 2019-07-26 | 北京科益虹源光电技术有限公司 | A kind of excimer laser electrode structure and excimer laser |
-
2018
- 2018-11-29 CN CN201811439648.3A patent/CN109411996A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6466602B1 (en) * | 2000-06-09 | 2002-10-15 | Cymer, Inc. | Gas discharge laser long life electrodes |
| US20110058580A1 (en) * | 2001-01-23 | 2011-03-10 | Sandstrom Richard L | Extendable electrode for gas discharge laser |
| CN104350650A (en) * | 2012-06-07 | 2015-02-11 | 西默有限公司 | Corrosion resistant electrodes for laser chambers |
| CN105161957A (en) * | 2015-08-25 | 2015-12-16 | 范守娥 | Electrode adjustable device of CO2 radio frequency laser |
| CN209169622U (en) * | 2018-11-29 | 2019-07-26 | 北京科益虹源光电技术有限公司 | A kind of excimer laser electrode structure and excimer laser |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| BR0012892B1 (en) | A process and apparatus for cleaning and / or coating metal surfaces using electro-plasma. | |
| CN209169622U (en) | A kind of excimer laser electrode structure and excimer laser | |
| CN104625264A (en) | Electrolytic machining device | |
| CN109411996A (en) | A kind of excimer laser electrode structure and excimer laser | |
| CA1147048A (en) | High power laser and cathode structure therefor | |
| JP2011155296A (en) | Buffer zone for preventing metallic migration | |
| CN103561535B (en) | A kind of array type micro-hole cathode air discharge plasma jet device | |
| WO2008054145A1 (en) | Blind-type apparatus using flexible solar cells | |
| CN101207965B (en) | Plasma generator and method for prolonging plasma generator cathode life | |
| CN201063954Y (en) | Plasma generator | |
| CN205116781U (en) | Building steel -structure supporting frame | |
| WO2019014485A1 (en) | Multilayer electrode assembly | |
| Equey et al. | Al/Cl 2 battery with slightly acidic NaCl electrolyte. I. Porous graphite chlorine cathodes | |
| CN215638849U (en) | Water-cooled electrode device of vacuum furnace | |
| CN204391037U (en) | A kind of large area high ionization rate oxide coated cathode plasma source | |
| CN104681381A (en) | Oxide cathode plasma source with large area and high ionization rate | |
| CN218555581U (en) | In-situ electric pulse auxiliary additive manufacturing 3D printing device | |
| CN220468205U (en) | Masking jig with uniform plating thickness | |
| CN219718143U (en) | Adjusting component for photovoltaic panel installation | |
| CN214482069U (en) | Control box for fan | |
| CN212898326U (en) | Mast deflection mechanism of drilling machine | |
| Rahman et al. | Generation of larger volume glow discharge in microhollow cathode sustained discharge with split third electrodes | |
| CN1300892C (en) | Holder for charge-discharge of lithium polymer cell | |
| US6503387B2 (en) | Method and device for electro-chemical discharge processing with self-acting bubble layer | |
| CN212832577U (en) | Compensation adjusting device for mounting electrical equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |