CN204391037U - A kind of large area high ionization rate oxide coated cathode plasma source - Google Patents
A kind of large area high ionization rate oxide coated cathode plasma source Download PDFInfo
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- CN204391037U CN204391037U CN201520090240.5U CN201520090240U CN204391037U CN 204391037 U CN204391037 U CN 204391037U CN 201520090240 U CN201520090240 U CN 201520090240U CN 204391037 U CN204391037 U CN 204391037U
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- fixed head
- oxide coated
- large area
- plasma source
- coated cathode
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Abstract
The utility model discloses a kind of large area high ionization rate oxide coated cathode plasma source, it comprises the support frame be made up of upper beam, underbeam and fixed head, be used for the filament array heated, be arranged on after filament array and the metallic reflection plate of surrounding, minus plate; Described fixed head is circulus circular in outer polygon, and described minus plate outward flange is provided with contact; Electrical connection between described minus plate and fixed head is completed by electric connecting sheet, and electric connecting sheet is yielding sheet metal.The utility model has structural behaviour and stablizes, and can produce the advantage of uniform plasma environment on a large scale.
Description
Technical field
The utility model relates to hot cathode technology field, is specifically related to a kind of large area high ionization rate oxide coated cathode plasma source.
Background technology
Oxide coated cathode is widely used in electronics industry, is further developing of hot filament cathode.The general designation of the class emitter that present said oxide coated cathode general reference sprays one deck alkaline earth oxide at based metal surfaces and makes, document G. He Meng, S. Hua Geng receives and shows " the oxide coated cathode first volume ", " oxide coated cathode volume Two ", has detailed introduction in Jiang Jianping work " cathode electronics and gas discharge principle " to oxide coated cathode.Relative to hot filament cathode, its work function, working temperature are all much lower, but emission effciency is but higher than thoriated-tungsten cathode a lot.More estimable, under pulsed discharge pattern, it can provide the many current density larger than hot filament cathode.The representative instance that oxide coated cathode is applied in plasma physics experimental study is the LAPD (Large Area Plasma Device) of University of California in Los Angeles, document D.Lineman, W.Gleeman, and J.Moggs, Rev.Sci.Instrum.77,015108 (2006) is described in detail the parameter of this plasma source, structure and discharge scenario.
As Fig. 1, it is the rough schematic view of the operation principle of oxide coated cathode, be coated with the high temperature Base Metal plate of oxide coating as negative electrode, and placing an anodic grid mesh apart from its correct position place, between negative electrode and positive electrode, add pulse voltage, make the electron detachment of overflowing in oxide coating out, and obtain certain speed and go to collide neutral gas molecule, neutral gas molecule is ionized, produces plasma.
Current oxide coated cathode application stock size is industrially less.In some application, the uniform on a large scale background plasma environment that experimenter needs, but also there is no larger-size oxide coated cathode in prior art.
Utility model content
The utility model provides a kind of large area high ionization rate oxide coated cathode plasma source, and it has structural behaviour and stablizes, and can provide the advantage of uniform plasma environment in a big way.
Technical problem to be solved in the utility model realizes by the following technical solutions:
A kind of large area high ionization rate oxide coated cathode plasma source, it comprises support frame be made up of upper beam, underbeam and fixed head, is used for the filament array of heating, is arranged on after filament array and the metallic reflection plate of surrounding, minus plate; Described fixed head is circulus circular in outer polygon, and described minus plate outward flange is provided with contact.
Tangential and the radial direction of the circle of described fixed head has heat insulation slit.
Described fixed head is provided with breach.
Described filament array is by the wire being weaving through many high-temperature insulation earthenwares placed side by side, and earthenware, is used for fixing the stopper slot having U-type groove and the gag lever post composition of earthenware.
Described wire be one or more wires synthesis one.
Electrical connection between described minus plate and fixed head is completed by electric connecting sheet, and electric connecting sheet is yielding sheet metal.
The beneficial effects of the utility model are: the mechanical connection between minus plate with fixed head processes with being electrically connected to separate by the utility model, both ensure that the stability of mechanical connection therebetween, also ensure that good electrical connection; When runway nibs on fixed head and minus plate contact can prevent hot operation, dilatancy is comparatively large and occur bulge phenomenon; Heat insulation slit on fixed head can reduce the temperature of the contact point of fixed head and miscellaneous part, makes Stability Analysis of Structures.
Accompanying drawing explanation
Fig. 1 is the rough schematic view of oxide coated cathode operation principle;
Fig. 2 is the front view of preferred embodiment of the present utility model;
Fig. 3 is the left view of preferred embodiment of the present utility model;
Fig. 4 is the detailed structure schematic diagram of the filament array of preferred embodiment of the present utility model;
Fig. 5 is the detailed structure schematic diagram that the local electric of preferred embodiment of the present utility model connects.
Embodiment
In order to make the utility model easy to understand, below in conjunction with concrete diagram, set forth the utility model further.
As described in Fig. 2-5, a kind of large area high ionization rate oxide coated cathode plasma source, its critical piece comprises upper beam 11, underbeam 12, minus plate 13, fixed head 14, filament (or earthenware) array 15, gag lever post 16, the parts such as electric connecting sheet 17, earthenware stopper slot 18, reflecting plate 19.
Because temperature difference when temperature during work and assembling is comparatively large, and the scale ratio of oxide coated cathode is comparatively large, and support frame of the present utility model adopts segmented, and main by weight is by upper beam 11, and underbeam 12 is born.As Fig. 2, fixed head respectively has 3 holes up and down, and wherein the hole 146 of bottom center, is circular port, and all the other holes are racetrack.The hole, two, left and right 147 of below is the runway nibs of level, the hole 145 of top center is the racetrack of vertical direction, and its right and left is the runway nibs 144 be obliquely installed, and its incline direction, angle of inclination are depending on actual needs, change, 15 degree, this Rio according to the size of minus plate.
The utility model adopts the heating of filament array heater-type, and as shown in Figure 4, an one metal wire 25 or many one metal wires synthesize one in the structural representation of filament array, are weaving through in many high-temperature insulation earthenwares 23 placed side by side.Earthenware is embedded in the special stopper slot 18 having U-type groove (abbreviation stopper slot), and the outside of stopper slot puts a gag lever post 16 again, further the activity of restriction earthenware.Several earthenwares are composed in series a unit, are connected to electrode 24.The array of multiple earthenware unit composition is called earthenware array or filament array.
As shown in Figure 2, the fixed head 14 of the present embodiment is designed to an outer octagon, the circulus of interior circle, if wished, it also can be that in outer hexagon, circle waits other shapes.Its Main Function is the support providing minus plate 13, and uniform current guided on minus plate, and we do not wish that temperature that it works is too high or lose too many heat by it.Fixed head passes through each 3 point cantact up and down and contacts with upper underbeam.In order to reduce the temperature of these contact points, our inner circle on fixed head is tangential, has opened 4 heat insulation slits 141.Wherein upper and lower this 2 slits effectively reduce the heat being transmitted to contact point.During fixed head work, the temperature of inner edges is higher than outer peripheral, so himself also have the problem that thermal expansion is inconsistent, the thermal expansion amplitude of inward flange is higher than outward flange.The risk may brought in order to avoid this is inconsistent, we have also opened 4 slits 142 in fixed head inner circle radial direction, are used for discharging this thermal stress.
The special tie point 148 that fixed head 14 is arranged by corner with peripheral circuit is connected.Near these 4 points, open 4 breach 143, reduced heat losses on the one hand, reduce the temperature of tie point 148; On the other hand, suitable breach size, can reduce by four angle temperature of minus plate 13, improves the uniformity of cathode plate temperature.
As Fig. 2, Fig. 3, stopper slot 18 directly contacts with earthenware 23, and temperature during its work is very high.For tackling thermal expansion during its work, we are designed to its upper end can be freely up and down movable.Fig. 3 upper right, stopper slot upper end 182 is columniform, has a circular hole at the corresponding part of upper beam, and this circular hole limits the degree of freedom of stopper slot radial direction, but it can axially can freely activity.Fig. 3 bottom right, in order to increase the thermal resistance between stopper slot and underbeam, the lower end of stopper slot does not directly contact with underbeam, limits the swing of its horizontal direction with a location-plate 26, and a cheese head screw 22 has been installed below stopper slot, stopper slot is placed on this screw.On the other hand, for avoiding the thermal radiation of stopper slot 18 to be applied directly to upper underbeam, we are also provided with one deck and reflect and pull 20 between stopper slot and upper underbeam, and this reflecting plate plays the effect of fixing gag lever post 16 simultaneously.
Fig. 5 is the partial enlarged drawing of the Contact details of minus plate and fixed head.The circular edges of minus plate is stretched out uniformly 12 contacts 131, its each contact has the hole 132 of 1 racetrack, on fixed head, correspondence has a circular port.On minus plate, why arrange 12 runway nibs, be consider that minus plate and fixed head are when hot operation, and the thermal expansion degree of the two is different.These 12 points coordinate, and just ensure the mechanical connection of minus plate and fixed head, but in order to make the free-extension of hot dirty shrinkage in junction, these 12 tie points not secure fit.In order to make up the bad defect of electrical connection that above-mentioned cooperation may bring, be additionally provided with electric connecting sheet 17.Respectively there is a dogleg section 172 at the two ends of electric connecting sheet, its dogleg section 133 secure fit corresponding with on minus plate.Secure fit between the dogleg section 171 of electric connecting sheet and fixed head 14.Electric connecting sheet is a thin slice, yielding in the radial direction of circular cathode plate, to offset minus plate thermal expansion amount different from fixed head.Uniform current is guided on 12 contacts of minus plate by electric connecting sheet 17, ensures the uniformity of minus plate electromotive force as much as possible.
Filament array constitutes the thermal source that is similar to flat bulk, its thermal radiation towards both direction close to each half, in order to improve efficiency of utilization, reduce thermal loss, reduce the heat load of other peripheral components, we are provided with reflecting plate 19 at the another side of filament array simultaneously, reflecting plate 19 is one piece of metal sheet, its needs at high temperature maintain the original state preferably, and under high temperature, still there is higher heat reflectivity on its surface.The reflecting plate of the present embodiment adopts thin molybdenum plate.Reflector can be individual layer, can be also multilayer, depending on actual needs, is multilayer here.Similar, be also provided with reflector in the surrounding of filament array, reduce thermal loss further.
More than show and describe general principle of the present utility model and principal character and advantage of the present utility model.The technical staff of the industry should understand; the utility model is not restricted to the described embodiments; what describe in above-described embodiment and specification just illustrates principle of the present utility model; under the prerequisite not departing from the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the utility model.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (6)
1. a large area high ionization rate oxide coated cathode plasma source, is characterized in that: it comprises the support frame be made up of upper beam, underbeam and fixed head, is used for the filament array heated, and is arranged on after filament array and the metallic reflection plate of surrounding, minus plate; Described fixed head is circulus circular in outer polygon, and described minus plate outward flange is provided with contact.
2. a kind of large area high ionization rate oxide coated cathode plasma source according to claim 1, is characterized in that: the tangential and radial direction of the circle of described fixed head has heat insulation slit.
3. a kind of large area high ionization rate oxide coated cathode plasma source according to claim 1, is characterized in that: described fixed head is provided with breach.
4. a kind of large area high ionization rate oxide coated cathode plasma source according to claim 1, is characterized in that: described filament array forms by being weaving through the wire of many high-temperature insulation earthenwares placed side by side, earthenware, the stopper slot having U-type groove being used for fixing earthenware and gag lever post.
5. a kind of large area high ionization rate oxide coated cathode plasma source according to claim 4, is characterized in that: described wire be one or more wires synthesis one.
6. a kind of large area high ionization rate oxide coated cathode plasma source according to claim 1, it is characterized in that: the electrical connection between described minus plate and fixed head is completed by electric connecting sheet, electric connecting sheet is yielding sheet metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520090240.5U CN204391037U (en) | 2015-02-04 | 2015-02-04 | A kind of large area high ionization rate oxide coated cathode plasma source |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520090240.5U CN204391037U (en) | 2015-02-04 | 2015-02-04 | A kind of large area high ionization rate oxide coated cathode plasma source |
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| CN204391037U true CN204391037U (en) | 2015-06-10 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104681381A (en) * | 2015-02-04 | 2015-06-03 | 中国科学技术大学 | Oxide cathode plasma source with large area and high ionization rate |
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2015
- 2015-02-04 CN CN201520090240.5U patent/CN204391037U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104681381A (en) * | 2015-02-04 | 2015-06-03 | 中国科学技术大学 | Oxide cathode plasma source with large area and high ionization rate |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150610 Termination date: 20170204 |
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| CF01 | Termination of patent right due to non-payment of annual fee |