CN103117501A - Cooling water flow channel structure of electrode of radiofrequency slab CO<2> laser device - Google Patents

Cooling water flow channel structure of electrode of radiofrequency slab CO<2> laser device Download PDF

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Publication number
CN103117501A
CN103117501A CN2013100312352A CN201310031235A CN103117501A CN 103117501 A CN103117501 A CN 103117501A CN 2013100312352 A CN2013100312352 A CN 2013100312352A CN 201310031235 A CN201310031235 A CN 201310031235A CN 103117501 A CN103117501 A CN 103117501A
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CN
China
Prior art keywords
electrode body
cooling
flow channel
cooling water
rectangular plate
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Pending
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CN2013100312352A
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Chinese (zh)
Inventor
吴益
钟理京
邓前松
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JIANGSU YILIN DIAMOND TOOLS CO Ltd
Huazhong University of Science and Technology
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JIANGSU YILIN DIAMOND TOOLS CO Ltd
Huazhong University of Science and Technology
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Application filed by JIANGSU YILIN DIAMOND TOOLS CO Ltd, Huazhong University of Science and Technology filed Critical JIANGSU YILIN DIAMOND TOOLS CO Ltd
Priority to CN2013100312352A priority Critical patent/CN103117501A/en
Publication of CN103117501A publication Critical patent/CN103117501A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a cooling water flow channel structure of an electrode of a radiofrequency slab CO<2> laser device, and belongs to the technical field of laser devices. The cooling water flow channel structure comprises a rectangular plate electrode body. A cooling flow channel is arranged in the rectangular plate electrode body, cooling water can flow through the cooling flow channel, flows into the cooling flow channel from a water inlet on the rectangular plate electrode body and flows out of the cooling flow channel from a water outlet on the rectangular plate electrode body, the cooling flow channel spreads all over the center and edges of the rectangular plate electrode body, and extension sections which extend towards outer sides of the rectangular plate electrode body are arranged at turning points, which are positioned at the edges of the rectangular plate electrode body, of the cooling flow channel. Owing to the structure, the cooling water flow channel structure has the advantages that the contact area of the cooling water and the metal electrode is increased, two opposite corners of the rectangular plate electrode body are effectively cooled, the center, edges and opposite corners of the electrode are uniformly cooled, the integral temperature of the rectangular plate electrode body is low during operation, the temperature is distributed uniformly, output laser power is unaffected fundamentally, and the heat dissipation requirement of the electrode can be effectively met.

Description

Radio-frequency (RF) board bar CO 2Laser electrode cooling water runner structure
 
Technical field
The present invention relates to a kind of radio-frequency (RF) board bar CO 2Laser, specifically a kind of radio-frequency (RF) board bar CO 2Laser electrode cooling water runner structure belongs to the laser technique field.
Background technology
High-power strip CO 2Laser refers to that gas discharge electrode is a class laser of rectangular flat.Rectangular electrode can greatly dwindle on the one hand the laser volume, improve laser output power, on the other hand, also the cooling of electrode is had higher requirement.At high-power strip CO 2In laser, plate electrode is simultaneously also as the reflecting cavity mirror of laser.Thermal deformation appears in the cooling insufficient or inhomogeneous electrode surface that all can cause of plate electrode, thereby changes the original surface curvature radius of speculum, greatly reduces the beam quality of laser, therefore need to be cooling to laser electrode.
Laser electrode is cooling the cooling and water cooling two schemes of wind.Air cooling structure is simple, and cooling effectiveness is low; For the demanding device of heat radiation, often adopt water-cooled mode.High-power strip CO 2During laser works unit interval heating is more, and laser output is very sensitive to the deformation of electrode surface.Thereby in engineering practice, employing scheme of process water cold trap in battery lead plate reaches the purpose of cooling.The cooling water runner heat radiation of plate electrode is the important step of guaranteeing laser operation steady in a long-term.
The problems such as practice is found, initial U-shaped, S shape coolant flow channel structure exist the temperature of electrode both sides higher, and the temperature field distributes not bery desirable, and radiating effect is not good.Existing serpentine flow path structure still exists electrode diagonal angle excess Temperature, maximum temperature difference is excessive, mean temperature is too high shortcoming, therefore, does not also have a kind of good radiator structure to satisfy the heat radiation requirement in prior art.
Summary of the invention
The technical problem to be solved in the present invention is to provide the radio-frequency (RF) board bar CO of a kind of uniformity of temperature profile, good heat dissipation effect 2Laser electrode cooling water runner structure.
In order to solve the problems of the technologies described above, radio-frequency (RF) board bar CO of the present invention 2Laser electrode cooling water runner structure, comprise the rectangular flat electrode body, be provided with the coolant flow channel that cooling water is passed through in the rectangular flat electrode body, cooling water enters with delivery port from the water inlet on the rectangular flat electrode body and flows out, the cooling duct spreads all over the center and peripheral of rectangular flat electrode body, and the turning point that is positioned at the cooling duct of rectangular flat electrode body edge is provided with the extension that extends to the rectangular flat electrode body outside.
Described cooling-water duct is class serpentine flow path structure, and described extension is arranged on the turning point of class serpentine flow path initiating terminal and the turning point of end.
Described cooling-water duct is class U-shaped flow passage structure, and described extension is arranged on the perpendicular edge of class U-shaped runner and the intersection of horizontal sides.
Described cooling-water duct is class S shape flow passage structure, and described extension is arranged on each horizontal sides of class S shape runner and the intersection of perpendicular edge.
after adopting above-mentioned structure, the center and peripheral that spreads all over the rectangular flat electrode body due to the cooling duct, the turning point that is positioned at the cooling duct of rectangular flat electrode body edge is provided with the extension that extends to the rectangular flat electrode body outside, arrange thus and taken into full account the electrode diagonal angle excess Temperature that exists in the engineering practice, maximum temperature difference is excessive, mean temperature is crossed the problems such as high, by the extension that arranges, increased the contact area of cooling water and metal electrode, make rectangular flat electrode body two diagonal angles obtain better cooling effect, make electrode centers, edge and diagonal angle obtain uniform cooling effect, reached and made the rectangular flat electrode body bulk temperature is lower in the course of the work, temperature distribution uniform, substantially do not affect the power output of laser, be well positioned to meet the requirement of electrode heat radiation.
Description of drawings
Fig. 1 is the schematic diagram of class serpentine flow path structure in the present invention;
Fig. 2 is the schematic diagram of class U-shaped flow passage structure in the present invention;
Fig. 3 is the schematic diagram of class S shape flow passage structure in the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, to radio-frequency (RF) board bar CO of the present invention 2Laser electrode cooling water runner structure is described in further detail.
As shown in the figure, radio-frequency (RF) board bar CO of the present invention 2Laser electrode cooling water runner structure, comprise rectangular flat electrode body 1, be provided with the coolant flow channel 2 that cooling water is passed through in rectangular flat electrode body 1, cooling water enters with delivery port 4 from the water inlet 3 on the rectangular flat electrode body and flows out, cooling duct 2 spreads all over the center and peripheral of rectangular flat electrode body, and the turning point that is positioned at the cooling duct of rectangular flat electrode body 1 edge is provided with the extension 5 that extends to rectangular flat electrode body 1 outside.
Wherein, cooling water runner of the present invention can be arranged to class serpentine flow path structure, U-shaped flow passage structure and three kinds of versions of class S shape flow passage structure.
when being arranged to class serpentine flow path structure, extension 5 is arranged on the turning point of coolant flow channel initiating terminal and the turning point of end, class serpentine flow path structure is the conversion of serpentine flow path structure, namely in order to simplify manufacturing procedure, each turning edge is designed to straight line, as shown in Figure 1, by extending two limit cooling water runners, increase the contact area of cooling water and metal electrode, make rectangular flat electrode body 1 two diagonal angles obtain better cooling effect, even also rectangular flat electrode body 1 center, edge and diagonal angle obtain uniform cooling effect, by this scheme, the maximum temperature of whole electrode reduces, minimum temperature is substantially constant, thereby the maximum temperature difference of rectangular flat electrode body 1 is also less, and the mean temperature of whole electrode is also lower.
This scheme is also the preferred technical scheme of the present invention, under the flow passage structure design of this scheme, electrode in the course of the work, bulk temperature is not bery high, temperature distribution uniform, substantially do not affect the power output of laser, the design of this kind cooling of electrode water flow passage is desirable, satisfies the requirement of electrode heat radiation; Experiment shows that this shape cooling water runner can obtain more satisfactory cooling effect.
When being arranged to cooling-water duct and being the U-shaped flow passage structure, extension 5 is arranged on the intersection of perpendicular edge and the horizontal sides of U-shaped runner, and class U-shaped flow passage structure is the conversion of U-shaped flow passage structure, namely in order to simplify manufacturing procedure, each turning edge is designed to straight line.
Simultaneously when being arranged to cooling-water duct and being class S shape flow passage structure, extension 5 is arranged on each horizontal sides of class S shape runner and the intersection of perpendicular edge, class S shape flow passage structure is the conversion of S shape flow passage structure, namely in order to simplify manufacturing procedure, each turning edge is designed to straight line.
Setting by said structure of the present invention, compared to traditional U-shaped and S shape flow passage structure, its runner lateral length accounts for 36.4% of electrode length, cooling water runner nearly cover whole rectangular flat electrode body 1, can correspondingly promote cooling effect, guarantee cooling uniformity, the cooling water flow velocity is suitable, and cooling effect and the uniformity are obviously improved.

Claims (4)

1. radio-frequency (RF) board bar CO 2Laser electrode cooling water runner structure, comprise rectangular flat electrode body (1), be provided with the coolant flow channel (2) that cooling water is passed through in rectangular flat electrode body (1), cooling water enters and delivery port (4) outflow from the water inlet (3) on the rectangular flat electrode body, it is characterized in that: described cooling duct (2) spread all over the center and peripheral of rectangular flat electrode body, and the described turning point that is positioned at the cooling duct of rectangular flat electrode body (1) edge is provided with the extension (5) that extends to rectangular flat electrode body (1) outside.
2. according to radio-frequency (RF) board bar CO claimed in claim 1 2Laser electrode cooling water runner structure is characterized in that: described cooling-water duct is class serpentine flow path structure, and described extension (5) is arranged on the turning point of class serpentine flow path initiating terminal and the turning point of end.
3. according to radio-frequency (RF) board bar CO claimed in claim 1 2Laser electrode cooling water runner structure is characterized in that: described cooling-water duct is class U-shaped flow passage structure, and described extension (5) is arranged on the perpendicular edge of class U-shaped runner and the intersection of horizontal sides.
4. according to radio-frequency (RF) board bar CO claimed in claim 1 2Laser electrode cooling water runner structure is characterized in that: described cooling-water duct is class S shape flow passage structure, and described extension (5) is arranged on each horizontal sides of class S shape runner and the intersection of perpendicular edge.
CN2013100312352A 2013-01-28 2013-01-28 Cooling water flow channel structure of electrode of radiofrequency slab CO<2> laser device Pending CN103117501A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2013100312352A CN103117501A (en) 2013-01-28 2013-01-28 Cooling water flow channel structure of electrode of radiofrequency slab CO<2> laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2013100312352A CN103117501A (en) 2013-01-28 2013-01-28 Cooling water flow channel structure of electrode of radiofrequency slab CO<2> laser device

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CN103117501A true CN103117501A (en) 2013-05-22

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105322418A (en) * 2015-11-23 2016-02-10 华中科技大学 Non-uniform water cooling grid structure for high-power radio frequency slab CO2 laser electrode
CN112828495A (en) * 2020-11-09 2021-05-25 浙江马尔风机有限公司 Main electrode water cooling mechanism of screen cover tool

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5412681A (en) * 1994-03-30 1995-05-02 Carl Zeiss, Inc. Slab-waveguide CO2 laser
CN2255681Y (en) * 1996-06-19 1997-06-04 中国科学院安徽光学精密机械研究所 Radio freqency panel-type carbon deoxide leaser
CN2473787Y (en) * 2001-06-07 2002-01-23 北京礴德恒激光科技有限公司 Radio frequency exciting diffusion cooling kilowatt CO2 laser
CN101789559A (en) * 2010-02-10 2010-07-28 华中科技大学 Gas laser
CN203150892U (en) * 2013-01-28 2013-08-21 江苏益林金刚石工具有限公司 Electrode cooling water channel structure of radio frequency lath CO2 laser

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5412681A (en) * 1994-03-30 1995-05-02 Carl Zeiss, Inc. Slab-waveguide CO2 laser
CN2255681Y (en) * 1996-06-19 1997-06-04 中国科学院安徽光学精密机械研究所 Radio freqency panel-type carbon deoxide leaser
CN2473787Y (en) * 2001-06-07 2002-01-23 北京礴德恒激光科技有限公司 Radio frequency exciting diffusion cooling kilowatt CO2 laser
CN101789559A (en) * 2010-02-10 2010-07-28 华中科技大学 Gas laser
CN203150892U (en) * 2013-01-28 2013-08-21 江苏益林金刚石工具有限公司 Electrode cooling water channel structure of radio frequency lath CO2 laser

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105322418A (en) * 2015-11-23 2016-02-10 华中科技大学 Non-uniform water cooling grid structure for high-power radio frequency slab CO2 laser electrode
CN105322418B (en) * 2015-11-23 2018-04-24 华中科技大学 A kind of high power RF CO slab2The non-homogeneous water cooling network of laser electrode
CN112828495A (en) * 2020-11-09 2021-05-25 浙江马尔风机有限公司 Main electrode water cooling mechanism of screen cover tool

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Application publication date: 20130522

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