CN103117501A - Electrode Cooling Channel Structure of RF Slab CO2 Laser - Google Patents

Abstract

The invention discloses an electrode cooling water channel structure of a radio frequency slab _CO2 laser, belonging to the technical field of lasers. It includes a rectangular flat electrode main body, the rectangular flat electrode main body is provided with a cooling channel through which cooling water can pass, the cooling water enters and flows out from the water inlet and outlet on the rectangular flat electrode main body, and the cooling channel spreads all over the center of the rectangular flat electrode main body and the edge, the turning point of the cooling channel located at the edge of the rectangular flat electrode body is provided with an extension extending to the outside of the rectangular flat electrode body. After adopting the above-mentioned structure, the contact area between the cooling water and the metal electrode is increased, so that the two opposite corners of the rectangular flat electrode body can obtain better cooling effects, and the center, edge and diagonal corners of the electrode can obtain uniform cooling effects, achieving The overall temperature of the main body of the rectangular plate electrode is relatively low during the working process, and the temperature distribution is relatively uniform, which basically does not affect the output power of the laser, and can well meet the requirements of electrode heat dissipation.

Description

Electrode Cooling Channel Structure of RF Slab CO2 Laser

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technical field

The invention relates to a radio-frequency slab CO ₂ laser, in particular to a cooling water channel structure for an electrode of the radio-frequency slab CO ₂ laser, and belongs to the technical field of lasers.

Background technique

High-power slab _CO2 laser refers to a type of laser whose gas discharge electrode is a rectangular flat plate. On the one hand, the rectangular electrode can greatly reduce the volume of the laser and increase the laser output power. On the other hand, it also puts forward higher requirements for the cooling of the electrode. In high power slab _CO2 lasers, the slab electrode also serves as the reflective cavity mirror of the laser. Insufficient or uneven cooling of the plate electrode will cause thermal deformation on the electrode surface, thereby changing the original surface curvature radius of the mirror and greatly reducing the beam quality of the laser. Therefore, the laser electrode needs to be cooled.

There are two options for laser electrode cooling: air cooling and water cooling. Air cooling has a simple structure and low cooling efficiency; for devices with high heat dissipation requirements, water cooling is often used. The high-power slab CO ₂ laser generates more heat per unit time when it works, and the laser output is very sensitive to the deformation of the electrode surface. Therefore, in engineering practice, the scheme of processing water-cooling grooves in the electrode plate is adopted to achieve the purpose of heat dissipation and cooling. The heat dissipation of the cooling water channel of the flat electrode is an important link to ensure the long-term stable operation of the laser.

Practice has found that the original U-shaped and S-shaped cooling channel structures have problems such as high temperature on both sides of the electrode, unsatisfactory temperature field distribution, and poor heat dissipation. The existing serpentine channel structure still has the disadvantages of high electrode diagonal temperature, large maximum temperature difference, and high average temperature. Therefore, there is no good heat dissipation structure in the prior art to meet the heat dissipation requirements.

Contents of the invention

The technical problem to be solved by the present invention is to provide a cooling water passage structure for electrodes of radio frequency slab CO ₂ lasers with uniform temperature distribution and good heat dissipation effect.

In order to solve the above-mentioned technical problems, the RF slab _CO2 laser electrode cooling water channel structure of the present invention includes a rectangular flat electrode body, and a cooling flow channel that allows cooling water to pass through is arranged in the rectangular flat electrode body, and the cooling water flows from the rectangular flat electrode The water inlet on the main body enters and the water outlet flows out. The cooling channel spreads over the center and edge of the rectangular flat electrode body. The turning point of the cooling channel at the edge of the rectangular flat electrode body is provided with an extension extending to the outside of the rectangular flat electrode body.

The cooling water channel is a serpentine-like flow channel structure, and the extension section is arranged at the turning point at the beginning end and the turning point at the end of the serpentine-like flow channel.

The cooling water channel is a U-shaped flow channel structure, and the extension section is arranged at the intersection of the vertical and horizontal sides of the U-shaped flow channel.

The cooling water channel is a S-shaped flow channel structure, and the extension section is arranged at the intersection of each horizontal side and vertical side of the S-like flow channel.

After adopting the above-mentioned structure, since the cooling channel spreads all over the center and edge of the rectangular flat electrode body, the turning point of the cooling channel located at the edge of the rectangular flat electrode body is provided with an extension section extending to the outside of the rectangular flat electrode body, so that the setting is fully considered. Problems such as excessively high temperature at the opposite corner of the electrode, excessively large maximum temperature difference, and excessively high average temperature existed in engineering practice. The corners get a better cooling effect, so that the center, edge and diagonal of the electrode get a uniform cooling effect, so that the overall temperature of the rectangular flat electrode body is lower during the working process, and the temperature distribution is more uniform, which basically does not affect the output power of the laser. , can well meet the requirements of electrode heat dissipation.

Description of drawings

Fig. 1 is the schematic diagram of class serpentine runner structure in the present invention;

Fig. 2 is the schematic diagram of U-shaped runner structure in the present invention;

Fig. 3 is a schematic diagram of an S-like flow channel structure in the present invention.

Detailed ways

The structure of the electrode cooling water channel of the RF slab CO ₂ laser according to the present invention will be further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

As shown in the figure, the RF slab _CO2 laser electrode cooling water channel structure of the present invention includes a rectangular flat electrode body 1, and a cooling flow channel 2 that allows cooling water to pass through is arranged in the rectangular flat electrode body 1, and the cooling water flows from the rectangular flat electrode body 1. The water inlet 3 on the plate electrode body enters and the water outlet 4 flows out. The cooling channel 2 spreads over the center and edge of the rectangular plate electrode body. The turning point of the cooling channel at the edge of the rectangular plate electrode body 1 is provided with a Extended section 5 extending outside.

Wherein, the cooling water flow channel of the present invention can be arranged in three structural forms: serpentine-like flow channel structure, U-shaped flow channel structure and S-like flow channel structure.

When the serpentine-like flow channel structure is set, the extension section 5 is set at the turning point at the beginning and the end of the cooling flow channel. , each turning edge is designed as a straight line, as shown in Figure 1, by extending the cooling water channels on the two sides, the contact area between the cooling water and the metal electrode is increased, so that the two opposite corners of the rectangular flat electrode body 1 can be better Cooling effect, that is, even if the center, edge and diagonal of the rectangular flat electrode main body 1 are uniformly cooled, by this scheme, the maximum temperature of the entire electrode is reduced, and the minimum temperature is basically unchanged, so the maximum temperature difference of the rectangular flat electrode main body 1 is also greater Small, and the average temperature of the entire electrode is also lower.

This solution is also the preferred technical solution of the present invention. Under the flow channel structure design of this solution, the overall temperature of the electrode is not very high during the working process, and the temperature distribution is relatively uniform, which basically does not affect the output power of the laser. This kind of electrode cooling water flow The design of the channel is advisable to meet the heat dissipation requirements of the electrode; experiments show that the cooling water channel of this shape can obtain a relatively ideal cooling effect.

When the cooling water channel is set as a U-shaped flow channel structure, the extension section 5 is arranged at the intersection of the vertical side and the horizontal side of the U-shaped flow channel. The U-shaped flow channel structure is a conversion of the U-shaped flow channel structure, that is, for The processing procedure is simplified, and each turning edge is designed as a straight line.

At the same time, when the cooling water channel is set as an S-shaped flow channel structure, the extension section 5 is arranged at the intersection of each horizontal edge and vertical edge of the S-shaped flow channel, and the S-shaped flow channel structure is an extension of the S-shaped flow channel structure. Conversion, that is, in order to simplify the processing procedure, each turning edge is designed as a straight line.

Through the setting of the above-mentioned structure of the present invention, compared with the traditional U-shaped and S-shaped flow channel structures, the lateral length of the flow channel accounts for 36.4% of the electrode length, and the cooling water flow channel almost covers the entire rectangular plate electrode body 1, which can be correspondingly Improve the cooling effect and ensure the uniformity of cooling. The cooling water flow rate is appropriate, and the cooling effect and uniformity are significantly improved.

Claims (4)

1. A cooling water channel structure for radio frequency slab _CO2 laser electrodes, including a rectangular flat electrode body (1), a cooling channel (2) that allows cooling water to pass through the rectangular flat electrode body (1), the cooling water It enters from the water inlet (3) and flows out from the water outlet (4) on the rectangular flat electrode body, which is characterized in that: the cooling channel (2) spreads over the center and edge of the rectangular flat electrode body, and the rectangular flat electrode body ( 1) The turning point of the cooling channel at the edge is provided with an extension section (5) extending to the outside of the rectangular flat electrode body (1). 2. According to claim 1, the RF slab CO ₂ laser electrode cooling water flow channel structure is characterized in that: the cooling water channel is a serpentine-like flow channel structure, and the extension section (5) is set in a serpentine-like flow channel structure. The turning point at the beginning of the runner and the turning point at the end. 3. According to claim 1, the RF slab CO ₂ laser electrode cooling water channel structure is characterized in that: the cooling water channel is a U-shaped channel structure, and the extension section (5) is arranged in a U-shaped channel structure. The intersection of the vertical and horizontal sides of the runner. 4. The RF slab _CO2 laser electrode cooling water flow channel structure according to claim 1, characterized in that: the cooling water channel is a S-like flow channel structure, and the extension section (5) is arranged in an S-like shape The intersection of each horizontal and vertical edge of the runner.

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