CN2473787Y - Radio frequency exciting diffusion cooling kilowatt CO2 laser - Google Patents
Radio frequency exciting diffusion cooling kilowatt CO2 laser Download PDFInfo
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- CN2473787Y CN2473787Y CN 01226571 CN01226571U CN2473787Y CN 2473787 Y CN2473787 Y CN 2473787Y CN 01226571 CN01226571 CN 01226571 CN 01226571 U CN01226571 U CN 01226571U CN 2473787 Y CN2473787 Y CN 2473787Y
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Abstract
The utility model relates to a radio frequency incentive diffusion type cooling kw level CO<2> laser. A pair of rectangular discharge spatial is formed by a radio frequency input board stripy intermediate electrode in the vacuum cavity and two earth plate stripy electrodes. A radio frequency field is arranged between the intermediate plate electrode and the two earth electrodes. The radio frequency field is matched with a partial axis folding non stable resonator or a juxtaposition non stable resonator. The partial axis folding non stable resonator comprises a partial axis concave high reflector, a partial axis convex high reflector with a laser beam square output coupling hole and two 45 degree angle plane high reflectors. The juxtaposition partial axis non stable resonator consists of a pair of partial axis non stable resonator, thus a compact type high power gas laser is formed.
Description
The utility model relates to a kind of high power laser, belongs to International Classification of Patents H01S3/00 laser technique field.
Present prior art situation: by constitute the space of a rectangle by pair of metal lath-shaped electrode, between described two electrodes, apply with rf electric field, produce the radio frequency gas discharge and form a rectangle gain region, because two electrode spacings are less, can utilize the mode refrigerating gas region of discharge of diffusion cooling, combine with the pseudo confocal unsteady resonator of off-axis, realize the gas laser of the diffused cooling of the compact that a kind of monolateral end laser is exported.Experimental studies have found that: because rf wave is a metric wave, and pair of metal lath-shaped electrode constitutes one section transmission line, particularly when gas discharge, pair of metal lath-shaped electrode forms the transmission line of one section big leakage current of high loss like this, between two electrodes, form the discharge plasma of non-uniform Distribution longitudinally, for obtaining the efficient laser gain length, make electrode length be restricted, make laser power further raising and keep the compact of Laser Devices to be restricted simultaneously.
The purpose of this utility model, the high-power New-type radio-frequency excitation diffused that provides a kind of compact cools off waveguide gas laser.
The utility model is by the following technical solutions:
Laser of the present utility model is made of the discharge space of a pair of rectangle the lath-shaped electrode of a radio frequency tablet strip target in the vacuum chamber and two ground connection, between the lath-shaped electrode of intermediate plate strip shaped electric poles and two ground connection, apply a radiofrequency field, form two lath-shaped gain regions, be complementary with the folding non-stable resonant cavity of an off-axis, or be complementary with a non-stable resonant cavity arranged side by side.The folding non-stable resonant cavity of off-axis is by an off-axis concave surface high reflection mirror, and off-axis convex surface high reflection mirror and two the miter angle plane high reflection mirrors that have the square output coupling aperture of laser beam constitute.Wherein two 45 angle plane high reflectivity mirrors are realized mode coupling between the low-loss plate waveguide of resonant cavity burst, constitute the high power gas laser of a compact.The off-axis non-stable resonant cavity is made of the off-axis non-stable resonant cavity of pair of parallel side by side, forms the high power gas laser of a compact.
Below in conjunction with accompanying drawing the utility model is elaborated.
These Laser Devices are by a cover electrode assemblie, and a cover optical resonator assembly and a vacuum chamber constitute.
(see figure 1) in electrode assemblie, central plate strip electrode (see among Fig. 1 2) and two ground plate strip electrodes (see among Fig. 11 and 3) are processed by metal oxygen-free copper, boring forms " well " font passage in electrode, wherein six channel outlet with metal oxygen-free copper post silver-bearing copper soldering vacuum seal (see among Fig. 5 16 and Fig. 1 in 16) form " U " type cooling-water duct (see among Fig. 5 72), all the other two channel outlet (see among Fig. 5 71) are connected with outlet with the cooling water inlet pipe.
The cooling water inlet pipe of central plate strip electrode (see among Fig. 1 2) or outlet be by a vacuum insulation porcelain tube (see among Fig. 1 17), and corrugated stainless steel tubing (see among Fig. 1 18) and steel flange (see among Fig. 1 19) are formed.Be connected between cooling-water duct outlet (see among Fig. 5 71) and the vacuum insulation porcelain tube (see among Fig. 1 17) by one that " " type sealing-in quoit B (see among Figure 12 121) is by silver-bearing copper soldering vacuum seal for U, be connected between vacuum insulation porcelain tube (see among Fig. 1 17) and the corrugated stainless steel tubing (see among Fig. 1 18) also by one that " " type sealing-in quoit (see among Figure 12 122) is by silver-bearing copper soldering vacuum seal, is connected by silver-bearing copper soldering vacuum seal between corrugated stainless steel tubing (see among Fig. 1 18) and the steel flange (see among Fig. 1 19) for J.Respectively be processed with two row's electrodes coupling inductance jacks (see among Fig. 1 14) in central plate strip electrode (see among Fig. 1 2) electrode length direction both sides, upper edge, in order to plug-in mounting coupling inductance (see among Fig. 1 15).The place is processed with a radio-frequency power input bar Connection Block ((see among Fig. 1 13) in the middle of central plate strip electrode (see among Fig. 1 2) side.
The cooling water inlet pipe of ground plate strip electrode (see among Fig. 11 and 3) or outlet are made up of a corrugated stainless steel tubing (see among Fig. 1 20 or 22) and steel flange (see among Fig. 1 21 or 23).Be connected between cooling-water duct outlet (see among Fig. 5 71) and the corrugated stainless steel tubing (see among Fig. 1 20 or 22) by a metal oxygen-free copper bend pipe F (see among Figure 13 139) by silver-bearing copper soldering vacuum seal, be connected between corrugated stainless steel tubing (see among Fig. 1 20 and 22) and the steel flange (see among Fig. 1 21 and 23) by a metal oxygen-free copper straight tube A (see among Figure 13 138) by silver-bearing copper soldering vacuum seal.Respectively be processed with two row's electrodes coupling inductance jacks (see among Fig. 1 14) in ground plate strip electrode (see among Fig. 11 and 3) electrode length direction both sides, upper edge, in order to plug-in mounting coupling inductance (see among Fig. 1 15).
Central plate strip electrode (see among Fig. 1 2), the two pairs of vacuum ceramics (see among Fig. 16 and 7), two ground plate strip electrodes (see among Fig. 11 and 3) and two electrode fixation clips (see among Fig. 14 and 5) are pressed orientation shown in Fig. 1 and are installed.Eight electrode fixation clip threads (see among Fig. 1 25) by electrode fixedly top board thread hole (see among Fig. 1 26) and electrode fixedly lower platen thread hole (see among Fig. 1 27) and eight electrode fixation clip nuts (see among Fig. 1 28) with central plate strip electrode (see among Fig. 1 2), the two pairs of vacuum ceramics (see among Fig. 16 and 7), two ground plate strip electrodes (see among Fig. 11 and 3) and two electrode fixation clips (see among Fig. 14 and 5) are fixed together, and constitute a pair of rectangular waveguide discharge space (see among Figure 13 115 and 116).This rectangular waveguide discharge space height H is 1.5mm-3mm (die opening of a central plate strip electrode and a ground plate strip electrode), and width W is 80mm-160mm, and length L d is 400mm-800mm (a lath electrode length).
Electrode fixation clip (see among Fig. 14 and 5) is processed by aluminium alloy.Electrode fixedly above the top board (see among Fig. 1 4) two ends and electrode fixedly below the lower platen (see among Fig. 1 5) two ends an electrode fixation clip fin (see among Fig. 1 24) is respectively arranged, be used for the fastening lower skateboard of barrier electrode assemblie (see among Figure 10 103).Electrode fixedly top board (see among Fig. 1 4) and electrode fixedly is processed to high reflection mirror adjustment rack holder in lower platen (see among Fig. 1 5) two ends, be processed with laser resonant cavity mirror adjustment rack steady brace through hole (see among Fig. 1 8) on the seat, laser resonant cavity mirror adjustment rack fixed mandril screwed hole (see among Fig. 1 9) and logical light rectangular opening (see among Fig. 1 10) are used for adjusting the laserresonator eyeglass.Electrode fixedly below the top board (see among Fig. 1 4) two ends and electrode fixedly above the lower platen (see among Fig. 1 5) two ends respectively be processed with a laserresonator eyeglass protection convex mouth (see among Fig. 1 11); this laserresonator eyeglass protection convex mouth (is seen Fig. 1; among Fig. 6 and Fig. 7 11) be arranged between laserresonator eyeglass and the rectangular waveguide discharge space (seeing Figure 16 115 and 116), with barrier gas discharge plasma damage laserresonator eyeglass superficial film.In each laserresonator eyeglass protection convex mouth (see Fig. 1, among Fig. 6 and Fig. 7 11), be processed with air vent hole in the vacuum chamber (see among Fig. 1 12), as vacuumizing and inflating.
The optical resonator assembly is folding non-stable resonant cavity of off-axis or off-axis non-stable resonant cavity arranged side by side.The folding non-stable resonant cavity of off-axis is by a cover off-axis concave surface high reflection mirror assembly (see figure 2), and a cover off-axis convex surface high reflection mirror assembly (see figure 3) and two cover miter angle plane high reflection mirror assembly (see figure 4)s constitute.Its off-axis folded optical non-stable resonant cavity operation principle as shown in figure 16.Off-axis concave surface high reflection mirror (see among Fig. 2 and Figure 16 29), off-axis convex surface high reflection mirror that has a square output coupling aperture (see among Fig. 3 and Figure 16 42) and two miter angle plane high reflection mirrors (see among Fig. 4 and Figure 16 58) constitute an off-axis folded optical non-stable resonant cavity.The off-axis non-stable resonant cavity is made of two cover off-axis concave surface high reflection mirror assembly (see figure 2)s and two cover off-axis convex surface high reflection mirror assembly (see figure 3)s side by side.Its off-axis optics non-stable resonant cavity operation principle arranged side by side as shown in figure 18.Two off-axis concave surface high reflection mirrors (see among Fig. 2 and Figure 18 29), two off-axis convex surface high reflection mirrors that have a square output coupling aperture (see among Fig. 3 and Figure 18 42) constitute an off-axis optics non-stable resonant cavity arranged side by side.Wherein the parameter designing of off-axis optics non-stable resonant cavity is as follows:
2L＝R
D－R
d (1)
R
D=2 * L * W ÷ Δ W (2) wherein, L is that off-axis optics non-stable resonant cavity chamber is long, R
DBe off-axis concave surface high reflection mirror curvature mirror radius, Rd is an off-axis convex surface high reflection mirror curvature mirror radius, and W is a rectangular waveguide discharge space width, and W is an off-axis folded optical non-stable resonant cavity output laser beam width.
In off-axis optics resonator components, off-axis concave surface high reflection mirror assembly (see figure 2) is by an off-axis concave surface high reflection mirror (see among Fig. 2 29), and off-axis concave surface high reflection mirror water-cooled frame (see among Fig. 2 30) and off-axis concave surface high reflection mirror adjustment rack (see among Fig. 2 31) constitute.Wherein, off-axis concave surface high reflection mirror (see among Fig. 2 29) two ends respectively are processed with a pair of standing screw through hole (see among Fig. 2 35); Respectively there is a cooling water outlet and inlet pipe at off-axis concave surface high reflection mirror water-cooled frame (see among Fig. 2 30) two ends, and Guan Youyi corrugated stainless steel tubing of this cooling water outlet and inlet (see among Fig. 2 32) and steel flange (see among Fig. 2 33) are formed.Be connected between off-axis concave surface high reflection mirror water-cooled frame aquaporin outlet and the corrugated stainless steel tubing (see among Fig. 2 32) by a metal oxygen-free copper bend pipe D (see among Figure 15 159) by silver-bearing copper soldering vacuum seal, be connected between corrugated stainless steel tubing (see among Fig. 2 32) and the steel flange (see among Fig. 2 33) also by a metal oxygen-free copper bend pipe C (see among Figure 15 158) by silver-bearing copper soldering vacuum seal, off-axis concave surface high reflection mirror water-cooled frame two ends respectively are processed with two pairs of standing screw through holes (see among Fig. 2 36 and 38), wherein be complementary, and another is to being complementary from a pair of standing screw through hole at off-axis concave surface high reflection mirror water-cooled frame end face standing screw through hole far away (see among Fig. 2 38) and off-axis concave surface high reflection mirror adjustment rack (see among Fig. 2 31) two ends (see among Fig. 2 39) from a pair of standing screw through hole at the nearer a pair of standing screw through hole of off-axis concave surface high reflection mirror water-cooled frame end face (see among Fig. 2 36) and off-axis concave surface high reflection mirror (see among Fig. 2 29) two ends (see among Fig. 2 35); Be processed with a square light hole in the middle of the off-axis concave surface high reflection mirror adjustment rack (see among Fig. 2 31), off-axis concave surface high reflection mirror adjustment rack (see among Fig. 2 31) two ends respectively are processed with a pair of standing screw through hole (see among Fig. 2 39), and respectively be processed with an adjustment rack push rod location hole at two ends (see among Fig. 2 40) and adjustment rack pull rod screw hole (see among Fig. 2 41).Fixing tight between off-axis concave surface high reflection mirror (see among Fig. 2 29) and the off-axis concave surface high reflection mirror water-cooled frame (see among Fig. 2 30) with two pairs of standing screws (see among Fig. 2 34).Fixing tight between off-axis concave surface high reflection mirror water-cooled frame (see among Fig. 2 30) and the off-axis concave surface high reflection mirror adjustment rack (see among Fig. 2 31) with two pairs of standing screws (see among Fig. 2 37).
Off-axis convex surface high reflection mirror assembly (see figure 3) is by an off-axis convex surface high reflection mirror that has a square output coupling aperture (see among Fig. 3 45) (see among Fig. 3 42), and off-axis convex surface high reflection mirror water-cooled frame (see among Fig. 3 43) and off-axis convex surface high reflection mirror adjustment rack (see among Fig. 3 44) constitute.Wherein, off-axis convex surface high reflection mirror (see among Fig. 3 a 42) end is processed with a square output coupling aperture (see among Fig. 3 45), and two ends respectively are processed with a pair of standing screw through hole (see among Fig. 3 49); Off-axis convex surface high reflection mirror water-cooled frame (see among Fig. 3 43) also is being processed with a square light hole (see among Fig. 3 46) in the same side mutually with the square output coupling aperture of off-axis convex surface high reflection mirror (see among Fig. 3 45).Respectively there is a cooling water outlet and inlet pipe at two ends, and Guan Youyi corrugated stainless steel tubing of this cooling water outlet and inlet (see among Fig. 3 56) and steel flange (see among Fig. 3 57) are formed.Be connected between off-axis convex surface high reflection mirror water-cooled frame aquaporin outlet and the corrugated stainless steel tubing (see among Fig. 3 56) by a metal oxygen-free copper bend pipe E (see among Figure 15 160) by silver-bearing copper soldering vacuum seal, be connected between corrugated stainless steel tubing (see among Fig. 3 56) and the steel flange (see among Fig. 3 57) also by a metal oxygen-free copper straight tube B (see among Figure 15 161) by silver-bearing copper soldering vacuum seal.Off-axis convex surface high reflection mirror water-cooled frame two ends respectively are processed with two pairs of standing screw through holes (see among Fig. 3 50 and 52).Wherein be complementary, and another is to being complementary from a pair of standing screw through hole at off-axis convex surface high reflection mirror water-cooled frame end face standing screw through hole far away (see among Fig. 3 52) and off-axis convex surface high reflection mirror adjustment rack (see among Fig. 3 44) two ends (see among Fig. 3 53) from a pair of standing screw through hole at the nearer a pair of standing screw through hole of off-axis convex surface high reflection mirror water-cooled frame end face (see among Fig. 3 50) and off-axis convex surface high reflection mirror (see among Fig. 3 42) two ends (see among Fig. 3 49); Be processed with a square light hole (see among Fig. 3 47) in the middle of the off-axis convex surface high reflection mirror adjustment rack (see among Fig. 3 44), off-axis convex surface high reflection mirror adjustment rack (see among Fig. 3 44) two ends respectively are processed with a pair of standing screw through hole (see among Fig. 3 53), and respectively be processed with an adjustment rack push rod location hole at two ends (see among Fig. 3 55) and adjustment rack pull rod screw hole (see among Fig. 3 54).Fixing tight between off-axis convex surface high reflection mirror (see among Fig. 3 42) and the off-axis convex surface high reflection mirror water-cooled frame (see among Fig. 3 43) with two pairs of standing screws (see among Fig. 3 48).Fixing tight between off-axis concave surface high reflection mirror water-cooled frame (see among Fig. 3 43) and the off-axis concave surface high reflection mirror adjustment rack (see among Fig. 3 44) with two pairs of standing screws (see among Fig. 3 51).
Miter angle plane high reflection mirror assembly (see figure 4) is by a miter angle plane high reflection mirror (see among Fig. 4 58), and miter angle plane high reflection mirror water-cooled frame (see among Fig. 4 59) and miter angle plane high reflection mirror adjustment rack (see among Fig. 4 60) constitute.Wherein, miter angle plane high reflection mirror (see among Fig. 4 58) two ends respectively are processed with a pair of standing screw through hole (see among Fig. 4 62); Respectively there is a cooling water outlet and inlet pipe at miter angle plane high reflection mirror water-cooled frame (see among Fig. 4 59) two ends, and Guan Youyi corrugated stainless steel tubing of this cooling water outlet and inlet (see among Fig. 4 69) and steel flange (see among Fig. 4 70) are formed.Be connected between the outlet of miter angle plane high reflection mirror water-cooled frame aquaporin and the corrugated stainless steel tubing (see among Fig. 4 69) by a metal oxygen-free copper bend pipe A (see among Figure 14 144) by silver-bearing copper soldering vacuum seal, be connected between corrugated stainless steel tubing (see among Fig. 4 69) and the steel flange (see among Fig. 4 70) also by a metal oxygen-free copper bend pipe B (see among Figure 14 145) by silver-bearing copper soldering vacuum seal.High reflection mirror water-cooled frame two ends, miter angle plane respectively are processed with two pairs of standing screw through holes (see among Fig. 4 63 and 65).Wherein be complementary, and another is to being complementary from a pair of standing screw through hole at miter angle plane high reflection mirror water-cooled frame end face standing screw through hole far away (see among Fig. 4 65) and miter angle plane high reflection mirror adjustment rack (see among Fig. 4 60) two ends (see among Fig. 4 66) from a pair of standing screw through hole at the nearer a pair of standing screw through hole of miter angle plane high reflection mirror water-cooled frame end face (see among Fig. 4 63) and miter angle plane high reflection mirror (see among Fig. 4 58) two ends (see among Fig. 4 62); Be processed with a square light hole in the middle of the miter angle plane high reflection mirror adjustment rack (see among Fig. 4 60), miter angle plane high reflection mirror adjustment rack (see among Fig. 4 60) two ends respectively are processed with a pair of standing screw through hole (see among Fig. 4 66), and respectively be processed with an adjustment rack push rod location hole at two ends (see among Fig. 4 68) and adjustment rack pull rod screw hole (see among Fig. 4 67).Fixing tight between miter angle plane high reflection mirror (see among Fig. 4 58) and the miter angle plane high reflection mirror water-cooled frame (see among Fig. 4 59) with two pairs of standing screws (see among Fig. 4 61).Fixing tight between miter angle plane high reflection mirror water-cooled frame (see among Fig. 4 59) and the miter angle plane high reflection mirror adjustment rack (see among Fig. 4 60) with two pairs of standing screws (see among Fig. 4 64).
In the folding non-stable resonant cavity structure of off-axis, the cooperation mounting structure of high reflection mirror assembly and electrode assemblie is as follows:
Two miter angle plane high reflection mirror assembly (see figure 4)s cooperate mounting structure as shown in Figure 6 with the electrode assemblie (see figure 2).In Fig. 6, two speculum adjustment rack push rod positioning screws (see among Fig. 6 74) pass top electrode fixation clip (see among Fig. 1 4) respectively and go up the laser resonant cavity mirror adjustment rack fixed mandril screwed hole of processing (see among Fig. 1 9), withstand on the adjustment rack push rod location hole on the miter angle plane high reflection mirror adjustment rack (see among Fig. 4 60) (see among Fig. 4 68).Two speculum adjustment rack pull bar positioning screws (see among Fig. 6 73) pass top electrode fixation clip (see among Fig. 1 4) respectively and go up the laser resonant cavity mirror adjustment rack steady brace through hole of processing (see among Fig. 1 8), and lining, adjustment rack pull rod screw hole on the miter angle plane high reflection mirror adjustment rack (see among Fig. 4 60) (see among Fig. 4 67) is gone in precession.A miter angle plane high reflection mirror assembly (see figure 4) location is fastened on the top electrode fixation clip (see among Fig. 1 4) of electrode assemblie (see figure 2).By adjusting the position of two speculum adjustment rack pull bar positioning screws (see among Fig. 6 73) and two speculum adjustment rack push rod positioning screws (see among Fig. 6 74) turnover adjustment rack fixed mandril screwed hole (see among Fig. 1 9) and adjustment rack steady brace through hole (see among Fig. 1 8), can adjust the orientation of miter angle plane high reflection mirror.In addition, two speculum adjustment rack push rod positioning screws (see among Fig. 6 76) pass bottom electrode fixation clip (see among Fig. 1 5) respectively and go up the laser resonant cavity mirror adjustment rack fixed mandril screwed hole of processing (see among Fig. 1 9), withstand on the adjustment rack push rod location hole on the miter angle plane high reflection mirror adjustment rack (see among Fig. 4 60) (see among Fig. 4 68).Two speculum adjustment rack pull bar positioning screws (see among Fig. 6 75) pass bottom electrode fixation clip (see among Fig. 1 5) respectively and go up the laser resonant cavity mirror adjustment rack steady brace through hole of processing (see among Fig. 1 8), and lining, adjustment rack pull rod screw hole on the miter angle plane high reflection mirror adjustment rack (see among Fig. 4 60) (see among Fig. 4 67) is gone in precession.A miter angle plane high reflection mirror assembly (see figure 4) location is fastened on the bottom electrode fixation clip (see among Fig. 1 5) of electrode assemblie (see figure 2).By adjusting the position of two speculum adjustment rack pull bar positioning screws (see among Fig. 6 75) and two speculum adjustment rack push rod positioning screws (see among Fig. 6 76) turnover adjustment rack fixed mandril screwed hole (see among Fig. 1 9) and adjustment rack steady brace through hole (see among Fig. 1 8), can adjust the orientation of miter angle plane high reflection mirror.
Concave surface high reflection mirror assembly (see figure 2) and convex surface high reflection mirror assembly (see figure 3) cooperate mounting structure as shown in Figure 7 with electrode assemblie.In Fig. 7, two speculum adjustment rack push rod positioning screws (see among Fig. 7 78) pass top electrode fixation clip (see among Fig. 1 4) respectively and go up the laser resonant cavity mirror adjustment rack fixed mandril screwed hole of processing (see among Fig. 1 9), withstand on the adjustment rack push rod location hole on the concave surface high reflection mirror adjustment rack (see among Fig. 2 31) (see among Fig. 2 40).Two speculum adjustment rack pull bar positioning screws (see among Fig. 7 77) pass top electrode fixation clip (see among Fig. 1 4) respectively and go up the laser resonant cavity mirror adjustment rack steady brace through hole of processing (see among Fig. 1 8), and lining, adjustment rack pull rod screw hole on the concave surface high reflection mirror adjustment rack (see among Fig. 2 31) (see among Fig. 2 41) is gone in precession.Concave surface high reflection mirror assembly (see figure 2) location is fastened on the top electrode fixation clip (see among Fig. 1 4) of electrode assemblie (see figure 2).By adjusting the position of two speculum adjustment rack pull bar positioning screws (see among Fig. 7 77) and two speculum adjustment rack push rod positioning screws (see among Fig. 7 78) turnover adjustment rack fixed mandril screwed hole (see among Fig. 1 9) and adjustment rack steady brace through hole (see among Fig. 1 8), can adjust the orientation of concave surface high reflection mirror (see among Fig. 7 29).In addition, two speculum adjustment rack push rod positioning screws (see among Fig. 7 80) pass bottom electrode fixation clip (see among Fig. 1 5) respectively and go up the laser resonant cavity mirror adjustment rack fixed mandril screwed hole of processing (see among Fig. 1 9), withstand on the adjustment rack push rod location hole on the convex surface high reflection mirror adjustment rack (see among Fig. 3 44) (see among Fig. 3 55).Two speculum adjustment rack pull bar positioning screws (see among Fig. 7 79) pass bottom electrode fixation clip (see among Fig. 1 5) respectively and go up the laser resonant cavity mirror adjustment rack steady brace through hole of processing (see among Fig. 1 8), and lining, adjustment rack pull rod screw hole on the convex surface high reflection mirror adjustment rack (see among Fig. 3 44) (see among Fig. 3 54) is gone in precession.Convex surface high reflection mirror assembly (see figure 3) location is fastened on the bottom electrode fixation clip (see among Fig. 1 5) of electrode assemblie (see figure 2).By adjusting the position of two speculum adjustment rack pull bar positioning screws (see among Fig. 7 79) and two speculum adjustment rack push rod positioning screws (see among Fig. 7 80) turnover adjustment rack fixed mandril screwed hole (see among Fig. 1 9) and adjustment rack steady brace through hole (see among Fig. 1 8), can adjust the orientation of convex surface high reflection mirror (see among Fig. 7 42).
In off-axis non-stable resonant cavity structure arranged side by side, the cooperation mounting structure of high reflection mirror assembly and electrode assemblie is as follows:
Two concave surface high reflection mirror assembly (see figure 2)s cooperate mounting structure as shown in figure 19 with electrode assemblie.In Figure 19, four speculum adjustment rack push rod positioning screws (see among Fig. 7 74 and 76) pass electrode fixation clip (see among Fig. 14 and 5) respectively and go up the laser resonant cavity mirror adjustment rack fixed mandril screwed hole of processing (see among Fig. 1 9), withstand on the adjustment rack push rod location hole on the concave surface high reflection mirror adjustment rack (see among Fig. 2 31) (see among Fig. 2 40).Four speculum adjustment rack pull bar positioning screws (see among Figure 19 73 and 75) pass top electrode fixation clip (see among Fig. 1 4) respectively and go up the laser resonant cavity mirror adjustment rack steady brace through hole of processing (see among Fig. 1 8), and lining, adjustment rack pull rod screw hole on the concave surface high reflection mirror adjustment rack (see among Fig. 2 31) (see among Fig. 2 41) is gone in precession.Concave surface high reflection mirror assembly (see figure 2) location is fastened on the electrode fixation clip (see among Fig. 14 and 5) of electrode assemblie (see figure 2).By adjusting the position of four speculum adjustment rack pull bar positioning screws (see among Figure 19 73 and 75) and four speculum adjustment rack push rod positioning screws (see among Figure 19 74 and 76) turnover adjustment rack fixed mandril screwed hole (see among Fig. 1 9) and adjustment rack steady brace through hole (see among Fig. 1 8), can adjust the orientation of concave surface high reflection mirror (see among Figure 19 29).
Two convex surface high reflection mirror assembly (see figure 3)s cooperate mounting structure as shown in figure 20 with electrode assemblie.In Figure 20, four speculum adjustment rack push rod positioning screws (see among Figure 20 78 and 80) pass electrode fixation clip (see among Fig. 14 and 5) respectively and go up the laser resonant cavity mirror adjustment rack fixed mandril screwed hole of processing (see among Fig. 1 9), withstand on the adjustment rack push rod location hole on the convex surface high reflection mirror adjustment rack (see among Fig. 3 44) (see among Fig. 3 55).Four speculum adjustment rack pull bar positioning screws (see among Figure 20 77 and 79) pass electrode fixation clip (see among Fig. 14 and 5) respectively and go up the laser resonant cavity mirror adjustment rack steady brace through hole of processing (see among Fig. 1 8), and lining, adjustment rack pull rod screw hole on the convex surface high reflection mirror adjustment rack (see among Fig. 3 44) (see among Fig. 3 54) is gone in precession.Convex surface high reflection mirror assembly (see figure 3) location is fastened on the electrode fixation clip (see among Fig. 14 and 5) of electrode assemblie (see figure 2).By adjusting the position of four speculum adjustment rack pull bar positioning screws (see among Figure 20 77 and 79) and four speculum adjustment rack push rod positioning screws (see among Figure 20 78 and 80) turnover adjustment rack fixed mandril screwed hole (see among Fig. 1 9) and adjustment rack steady brace through hole (see among Fig. 1 8), can adjust the orientation of convex surface high reflection mirror (see among Figure 20 42).
The formation of vacuum chamber as shown in Figure 8.The stainless steel cylinder that vacuum chamber body (see among Fig. 8 86) is all processed with electropolishing by an inside and outside wall constitutes.Processing and adopt the method for argon arc welding eight the mirror holder water channel vacuum chamber inner flanges (see among Fig. 8 91) of burn-oning on the stainless steel barrel, four vacuum chamber blow vent inner flanges (see among Fig. 8 92), two central plate strip electrode cooling water channel vacuum chamber inner flanges (see among Fig. 8 93), four grounded upper and lower plates strip electrode cooling water channel vacuum chamber inner flange (see among Fig. 8 94) and radio-frequency power input vacuum chamber inner flange (see among Fig. 8 95).On the stainless steel cylinder both ends of the surface processing and adopt the method for argon arc welding to burn-on one to have the vacuum chamber of screw vent (see among Fig. 8 88) after end closure inner flange (see among Fig. 8 87) and one the vacuum chamber output that has a screw vent (see among Fig. 8 85) seal inner flange (see among Fig. 8 84).What match with end closure inner flange behind the vacuum chamber (see among Fig. 8 87) is end closure outward flange behind the vacuum chamber that has a screw vent (see among Fig. 8 90) (see among Fig. 8 89).During application, be lined with a metal o-ring between the end closure outward flange behind end closure inner flange behind vacuum chamber (see among Fig. 8 87) and the vacuum chamber (see among Fig. 8 89), the screw rod of outward flange screw vent forms vacuum seal between two flanges in fastening the passing.What seal that inner flange (see among Fig. 8 84) matches with the vacuum chamber output is that a vacuum chamber output that has a screw vent (see among Fig. 8 83) seals outward flange (see among Fig. 8 81).During application, seal inner flange (see among Fig. 8 84) and vacuum chamber output at the vacuum chamber output and seal between the outward flange (see among Fig. 8 81) and be lined with a metal o-ring, the screw rod of outward flange screw vent forms vacuum seal between two flanges in fastening the passing.Seal at the vacuum chamber output and to be processed with a light beam output port (see among Fig. 8 82) on the outward flange (see among Fig. 8 81), be processed with light beam output window pressing plate fixing threaded hole (see among Fig. 8 96) around it.Vacuum chamber laser beam output window structure as shown in Figure 9.Go up at light beam output port (see among Fig. 9 82) and to place a laser infrared waves output window (see among Fig. 9 97).Be placed with window metal o-ring (see among Fig. 9 101) between light beam output port (see among Fig. 9 82) and the laser infrared waves output window (see among Fig. 9 97), on laser infrared waves output window (see among Fig. 9 97), press an output window pressing plate (see among Fig. 9 98), by window pressing plate standing screw (see among Fig. 9 99) and light beam output window pressing plate fixing threaded hole (see among Fig. 8 96) laser infrared waves output window (see among Fig. 9 97) means of press seals is exported on the port (see among Fig. 9 82) at light beam, formed vacuum seal.
The fastening location of electrode assemblie (see figure 1) in the vacuum chamber (see figure 8) is to realize by two pairs of slide plates (see Figure 10,11,12 and 13 in 102 and 103).Between electrode assemblie (see figure 1) upper plane and the vacuum chamber (see figure 8) inwall and between electrode assemblie lower flat and the vacuum chamber inwall pair of slide is installed respectively and (sees Figure 10,11, in 12 and 13 102 and 103), can change the height of two pairs of slide plates by fastening slide plate pull bar and slide plate pull-rod nut, electrode assemblie is fixed in the vacuum chamber securely.Skateboard as shown in figure 17.In Figure 17, upper slide (see among Figure 17 102) top is a circular shape, and its radius of curvature is identical with vacuum chamber inwall radius of curvature, and upper slide (see among Figure 17 102) bottom is an inclined-plane; Lower skateboard (see among Figure 17 103) top is an inclined-plane, and its inclined-plane slope with the upper slide bottom is identical, and lower skateboard (see among Figure 17 103) bottom is a plane.By fastening two slide plate pull bars (see among Figure 17 104) and two slide plate pull-rod nuts (see among Figure 17 173), can spur up and down that slide plate slides along slide plate pull bar direction, thereby change the height that slide plate is up and down added up.
Syndeton as shown in figure 10 by vacuum chamber body (see among Figure 10 86) and central plate strip electrode (see among Figure 10 2) for radio-frequency power input bar (see among Figure 10 114).Wherein, radio-frequency power input bar (see among Figure 10 114) directly inserts in the radio-frequency power input bar Connection Block (see among Figure 10 13), and radio-frequency power input bar (see among Figure 10 114) and radio-frequency power input insulate and be connected between the vacuum insulator (see among Figure 10 111) by " ladder " type sealing-in quoit (see among Figure 10 113) vacuum brazing sealing-in.Be connected between radio-frequency power input insulation vacuum insulator (see among Figure 10 111) and the radio-frequency power input vacuum chamber outward flange (see among Figure 10 108) by " U " type sealing-in quoit A (see among Figure 10 a 112) vacuum brazing sealing-in.Be lined with the inside and outside flange seal quoit of a radio-frequency power input vacuum chamber (see among Figure 10 110) between radio-frequency power input vacuum chamber outward flange (see among Figure 10 108) and the radio-frequency power input vacuum chamber inner flange (see among Figure 10 95), outward flange fastening screw in the fastening radio-frequency power input vacuum chamber (see among Figure 10 109) forms vacuum seal between two flanges.
Breather pipe by vacuum chamber and electrode assemblie syndeton as shown in figure 11.Vacuum chamber blow vent pipe (see among Figure 11 119) passes air vent hole in electrode fixation clip (see among Fig. 14 and 5) and the vacuum chamber (see among Figure 11 12) and links to each other.Adopt the method welding of argon arc welding to form vacuum seal between vacuum chamber blow vent pipe (see among Figure 11 119) and the vacuum chamber blow vent outward flange (see among Figure 11 117).Be lined with the inside and outside flange seal quoit of a vacuum chamber blow vent (see among Figure 11 120) between vacuum chamber blow vent outward flange (see among Figure 11 117) and the vacuum chamber blow vent inner flange (see among Figure 11 92), outward flange fastening screw in the fastening vacuum chamber blow vent (see among Figure 11 118) forms vacuum seal between two flanges.
Cooling water pipe by vacuum chamber and central plate strip electrode syndeton as shown in figure 12.Be lined with an inside and outside flange seal quoit between central plate strip electrode water channel inner flange (see among Figure 12 19) and the central plate strip electrode water channel outward flange (see among Figure 12 125), outward flange fastening screw in the fastening central plate strip electrode water channel (see among Figure 12 126) forms vacuum seal between outward flange in the central plate strip electrode water channel.The connection that central plate strip electrode water channel outward flange (see among Figure 12 125) and central electrode are connected outward between the bellows (see among Figure 12 127) forms vacuum seal by the silver-bearing copper soldering.The connection that central plate strip electrode water channel vacuum chamber outward flange (see among Figure 12 123) and central electrode are connected outward between the bellows (see among Figure 12 127) also forms vacuum seal by the silver-bearing copper soldering.Be lined with an inside and outside flange seal quoit between central plate strip electrode cooling water channel vacuum chamber inner flange (see among Figure 12 93) and the central plate strip electrode water channel vacuum chamber outward flange (see among Figure 12 123), outward flange fastening screw in the fastening central plate strip electrode water channel vacuum chamber (see among Figure 12 124) forms vacuum seal between outward flange in the central plate strip electrode water channel vacuum chamber.The outer arm-tie of central plate strip electrode water channel vacuum chamber (see among Figure 12 128) inside and outside wall all is processed with screw thread, matches with central plate strip electrode water channel vacuum chamber outer plate (see among Figure 12 129) outer wall thread and central plate strip electrode water channel vacuum chamber outward flange (see among Figure 12 123) inner thread.The outer arm-tie of central plate strip electrode water channel vacuum chamber (see among Figure 12 128) is put in the central plate strip electrode water channel vacuum chamber outward flange (see among Figure 12 123), central plate strip electrode water channel vacuum chamber outer plate (see among Figure 12 129) is packed in the outer arm-tie of central plate strip electrode water channel vacuum chamber (see among Figure 12 128), with central plate strip electrode water channel vacuum chamber outer catheter (see among Figure 12 130) end face and central plate strip electrode water channel inner flange (see among Figure 12 19) inner face means of press seals, cooling water is not leaked.
Cooling water pipe by vacuum chamber and ground plate strip electrode syndeton as shown in figure 13.Be lined with an inside and outside flange seal quoit between ground plate strip electrode water channel inner flange (see among Figure 13 23) and the ground plate strip electrode water channel outward flange (see among Figure 13 131), outward flange fastening screw in the fastening ground plate strip electrode water channel (see among Figure 13 132) forms vacuum seal between outward flange in the ground plate strip electrode water channel.The connection that ground plate strip electrode water channel outward flange (see among Figure 13 132) and grounding electrode are connected outward between the bellows (see among Figure 13 135) forms vacuum seal by the silver-bearing copper soldering.The connection that ground plate strip electrode water channel vacuum chamber outward flange (see among Figure 13 133) and grounding electrode are connected outward between the bellows (see among Figure 13 135) also forms vacuum seal by the silver-bearing copper soldering.Be lined with an inside and outside flange seal quoit between ground plate strip electrode cooling water channel vacuum chamber inner flange (see among Figure 13 94) and the ground plate strip electrode water channel vacuum chamber outward flange (see among Figure 13 133), outward flange fastening screw in the fastening ground plate strip electrode water channel vacuum chamber (see among Figure 13 134) forms vacuum seal between outward flange in the ground plate strip electrode water channel vacuum chamber.The outer arm-tie of ground plate strip electrode water channel vacuum chamber (see among Figure 13 136) inside and outside wall all is processed with screw thread, matches with ground plate strip electrode water channel vacuum chamber outer plate (see among Figure 13 137) outer wall thread and ground plate strip electrode water channel vacuum chamber outward flange (see among Figure 13 133) inner thread.The outer arm-tie of ground plate strip electrode water channel vacuum chamber (see among Figure 13 136) is put in the ground plate strip electrode water channel vacuum chamber outward flange (see among Figure 13 133), ground plate strip electrode water channel vacuum chamber outer plate (see among Figure 13 137) is packed in the outer arm-tie of ground plate strip electrode water channel vacuum chamber (see among Figure 13 136), ground plate strip electrode water channel vacuum chamber outer catheter (is seen among Figure 13 140,141,142 and 143) end face and ground plate strip electrode water channel inner flange (see among Figure 13 23) inner face means of press seals is not leaked cooling water.
Cooling water pipe by vacuum chamber and two miter angle plane high reflection mirror assembly cooling water pipe syndetons as shown in figure 14.Be lined with an inside and outside flange seal quoit between miter angle plane high reflection mirror water-cooled frame water channel inner flange (see among Figure 14 70) and the miter angle plane high reflection mirror water-cooled frame water channel outward flange (see among Figure 14 146), outward flange fastening screw in the high reflection mirror water-cooled frame water channel of fastening miter angle plane (see among Figure 14 147) forms vacuum seal between outward flange in the high reflection mirror water-cooled frame water channel of miter angle plane.Miter angle plane high reflection mirror water-cooled frame water channel outward flange (see among Figure 14 146) with is connected connection between the bellows A (see among Figure 14 148) outward by silver-bearing copper soldering formation vacuum seal.Miter angle plane high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 14 149) with is connected connection between the bellows A (see among Figure 14 148) outward also by silver-bearing copper soldering formation vacuum seal.Be lined with an inside and outside flange seal quoit between miter angle plane high reflection mirror frame water channel vacuum chamber inner flange (see among Figure 14 91) and the miter angle plane high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 14 149), outward flange fastening screw in the high reflection mirror water-cooled frame water channel vacuum chamber of fastening miter angle plane (see among Figure 14 150) forms vacuum seal between outward flange in the high reflection mirror water-cooled frame water channel vacuum chamber of miter angle plane.The outer arm-tie of miter angle plane high reflection mirror water-cooled frame water channel vacuum chamber (see among Figure 14 151) inside and outside wall all is processed with screw thread, matches with miter angle plane high reflection mirror water-cooled frame water channel vacuum chamber outer plate (see among Figure 14 152) outer wall thread and miter angle plane high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 14 149) inner thread.The outer arm-tie of miter angle plane high reflection mirror water-cooled frame water channel vacuum chamber (see among Figure 14 151) is put in the miter angle plane high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 14 149), miter angle plane high reflection mirror water-cooled frame water channel vacuum chamber outer plate (see among Figure 14 152) is packed in the outer arm-tie of miter angle plane high reflection mirror water-cooled frame water channel vacuum chamber (see among Figure 14 151), miter angle plane high reflection mirror water-cooled frame water channel vacuum chamber outer catheter intake-outlet (is seen among Figure 14 153,154,155 and 156) end face and miter angle plane high reflection mirror water-cooled frame water channel inner flange (see among Figure 14 70) inner face means of press seals is not leaked cooling water.
Cooling water pipe by vacuum chamber and a concave surface high reflection mirror assembly cooling water pipe and a convex surface high reflection mirror assembly cooling water pipe syndeton as shown in figure 15.Be lined with an inside and outside flange seal quoit between concave surface high reflection mirror water-cooled frame water channel inner flange (see among Figure 15 33) and the concave surface high reflection mirror water-cooled frame water channel outward flange (see among Figure 15 162), outward flange fastening screw in the fastening concave surface high reflection mirror water-cooled frame water channel (see among Figure 15 163) forms vacuum seal between outward flange in the concave surface high reflection mirror water-cooled frame water channel.Concave surface high reflection mirror water-cooled frame water channel outward flange (see among Figure 15 162) with is connected connection between the bellows B (see among Figure 15 164) outward by silver-bearing copper soldering formation vacuum seal.Concave surface high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 15 166) with is connected connection between the bellows B (see among Figure 15 164) outward also by silver-bearing copper soldering formation vacuum seal.Be lined with an inside and outside flange seal quoit between concave surface high reflection mirror frame water channel vacuum chamber inner flange (see among Figure 15 91) and the concave surface high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 15 166), outward flange fastening screw in the fastening concave surface high reflection mirror water-cooled frame water channel vacuum chamber (see among Figure 15 165) forms vacuum seal between outward flange in the concave surface high reflection mirror water-cooled frame water channel vacuum chamber.The outer arm-tie of concave surface high reflection mirror water-cooled frame water channel vacuum chamber (see among Figure 15 167) inside and outside wall all is processed with screw thread, matches with concave surface high reflection mirror water-cooled frame water channel vacuum chamber outer plate (see among Figure 15 168) outer wall thread and concave surface high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 15 166) inner thread.The outer arm-tie of concave surface high reflection mirror water-cooled frame water channel vacuum chamber (see among Figure 15 167) is put in the concave surface high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 15 168), in the outer arm-tie of concave surface high reflection mirror water-cooled frame water channel vacuum chamber outer plate (see among Figure 15 168) the concave surface high reflection mirror water-cooled of packing into frame water channel vacuum chamber (see among Figure 15 167), with concave surface high reflection mirror water-cooled frame water channel vacuum chamber outer catheter intake-outlet (see among Figure 15 169 and 170) end face and concave surface high reflection mirror water-cooled frame water channel inner flange (see among Figure 15 33) inner face means of press seals, cooling water is not leaked.
Be lined with an inside and outside flange seal quoit between convex surface high reflection mirror water-cooled frame water channel inner flange (see among Figure 15 57) and the convex surface high reflection mirror water-cooled frame water channel outward flange (see among Figure 15 162), outward flange fastening screw in the fastening convex surface high reflection mirror water-cooled frame water channel (see among Figure 15 163) forms vacuum seal between outward flange in the convex surface high reflection mirror water-cooled frame water channel.Convex surface high reflection mirror water-cooled frame water channel outward flange (see among Figure 15 162) with is connected connection between the bellows B (see among Figure 15 164) outward by silver-bearing copper soldering formation vacuum seal.Convex surface high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 15 166) with is connected connection between the bellows B (see among Figure 15 164) outward also by silver-bearing copper soldering formation vacuum seal.Be lined with an inside and outside flange seal quoit between convex surface high reflection mirror frame water channel vacuum chamber inner flange (see among Figure 15 91) and the convex surface high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 15 166), outward flange fastening screw in the fastening convex surface high reflection mirror water-cooled frame water channel vacuum chamber (see among Figure 15 165) forms vacuum seal between outward flange in the convex surface high reflection mirror water-cooled frame water channel vacuum chamber.The outer arm-tie of convex surface high reflection mirror water-cooled frame water channel vacuum chamber (see among Figure 15 167) inside and outside wall all is processed with screw thread, matches with convex surface high reflection mirror water-cooled frame water channel vacuum chamber outer plate (see among Figure 15 168) outer wall thread and convex surface high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 15 166) inner thread.The outer arm-tie of convex surface high reflection mirror water-cooled frame water channel vacuum chamber (see among Figure 15 167) is put in the convex surface high reflection mirror water-cooled frame water channel vacuum chamber outward flange (see among Figure 15 168), in the outer arm-tie of convex surface high reflection mirror water-cooled frame water channel vacuum chamber outer plate (see among Figure 15 168) the convex surface high reflection mirror water-cooled of packing into frame water channel vacuum chamber (see among Figure 15 167), with convex surface high reflection mirror water-cooled frame water channel vacuum chamber outer catheter intake-outlet (see among Figure 15 171 and 172) end face and convex surface high reflection mirror water-cooled frame water channel inner flange (see among Figure 15 57) inner face means of press seals, cooling water is not leaked.
The utility model has the advantage of: adopt a middle electrode of radio frequency input lath-shaped and two ground connection The lath-shaped electrode consist of the discharge space of one pair of rectangle, at the plate of middle lath-shaped electrode and two ground connection Apply a radiofrequency field between strip shaped electric poles, form two lath-shaped gain regions, so that the maintenance electrode length Increased simultaneously one times the effective gain length of laser, mated mutually with the folding non-stable resonant cavity of an off-axis, Or mate mutually with a non-stable resonant cavity arranged side by side. The folding non-stable resonant cavity of off-axis is high anti-by an off-axis concave surface Penetrate mirror, off-axis convex surface high reflection mirror and two 45 degree with the square output coupling of laser light beam hole The angle plane high reflection mirror consists of. Wherein two high reflectivity mirrors of 45 angle planes realize that the folding place of resonator is low Mode coupling between the plate waveguide of loss, the high power gas laser of a compact type of formation. Off-axis arranged side by side Non-stable resonant cavity is made of the off-axis non-stable resonant cavity of pair of parallel, forms the high power gas of a compact type Body laser.
Accompanying drawing of the present utility model and drawing are described as follows:
Fig. 1. be electrode package assembly schematic diagram in the laser vacuum vessel; Fig. 2. be concave surface high reflection mirror modular construction schematic diagram; Fig. 3. be convex surface high reflection mirror modular construction schematic diagram; Fig. 4. be miter angle plane high reflection mirror modular construction schematic diagram; Fig. 5. be laser lath electrode cooling water channel schematic diagram Fig., 6. be miter angle plane high reflection mirror mounting structure relative position schematic diagram; Fig. 7. be convex surface and concave surface high reflection mirror mounting structure relative position schematic diagram; Fig. 8. be the laser vacuum vessel structural representation; Fig. 9. be laser vacuum vessel laser beam output window structural representation; Figure 10. be radio-frequency power input bar and central plate strip electrode syndeton schematic diagram; Figure 11. be vacuum chamber blow vent syndeton schematic diagram; Figure 12. be central plate strip electrode cooling water channel external link structure schematic diagram; Figure 13. ground plate strip electrode cooling water channel external link structure schematic diagram about being; Figure 14. be miter angle plane high reflection mirror cooling water channel external link structure schematic diagram; Figure 15. be concave surface and convex surface high reflection mirror cooling water channel external link structure schematic diagram.Figure 16. be folded optical off-axis non-stable resonant cavity operation principle schematic diagram; Figure 17. be the fastening slide plate fastening structure schematic diagram up and down of electrode assemblie; Figure 18. be off-axis optics non-stable resonant cavity operation principle schematic diagram arranged side by side; Figure 19. be two concave surface high reflection mirror mounting structure relative position schematic diagrames; Figure 20. be two convex surface high reflection mirror mounting structure relative position schematic diagrames.：1.2.3.4.5.6.7.8.9.10.11.12.13.14.15.16.17.18.19.20.21.22.23.24.25.26.27.28.29.30.31.32.33.34.35.36.37.38.39.40.41.42.43.44.45.46.47.48.49.50.51.52.53.54.55.56.57.58. 4559. 4560. 4561. 4545
Water-cooled frame standing screw 62. miter angle plane high reflection mirrors and miter angle plane high reflection mirror
Water-cooled frame standing screw through hole 63. miter angle plane high reflection mirror water-cooled frame and miter angle planes
High reflection mirror standing screw through hole 64. miter angle plane high reflection mirror water-cooled framves and miter angle plane high reflection mirror
Adjustment rack standing screw 65. miter angle plane high reflection mirror water-cooled frame and miter angle planes
66. miter angle plane high reflection mirror adjustment rack and miter angle planes, high reflection mirror adjustment rack standing screw hole
67. 4568. 4569. 4570. 4571.72.“U”73. 4574. 4575. 4576. 4577.78.79.80.81.82.83.84.85.86.87.88.89.90.91.92.93.94.95.96.97.98.99.100.101.102.103.104.105.106.107.108.109.110.111.112.“U”A 113.“”114.115.116.117.118.119.120.121.“U”B122.“J”123.124.125.126.127.128.129.130.131.132.133.134.135.136.137.138.A139.F140.141.142.143.144.A145.B146. 45147. 45148.A149. 45150. 45151. 45152. 45153. 45154. 45155. 45156. 45157.158.C159.D160.E161.B162. ( ) 163. ( ) 164.B165. ( )
The outer fastening slide plate pull-rod nut of arm-tie 168. concave surfaces (or convex surface) high reflection mirror water-cooled frame water channel vacuum chamber outer plate 169. concave surface high reflection mirror water-cooled frame water channel vacuum chamber outer catheter delivery port 170. concave surface high reflection mirror water-cooled frame water channel vacuum chamber outer catheter water inlets, 171. convex surface high reflection mirror water-cooled frame water channel vacuum chamber outer catheter delivery port 172. convex surface high reflection mirror water-cooled frame water channel vacuum chamber outer catheter water inlet 173. electrode assemblies of interior outward flange fastening screw 166. concave surfaces (or convex surface) high reflection mirror water-cooled frame water channel vacuum chamber outward flange 167. concave surfaces (or convex surface) high reflection mirror water-cooled frame water channel vacuum chamber
Claims (7)
1, a kind of RF excited diffused cooling kilo-watt CO
2Laser, it is characterized in that: laser is made of the discharge space of a pair of rectangle the lath-shaped electrode of a radio frequency tablet strip target in the vacuum chamber and two ground connection, between the lath-shaped electrode of intermediate plate strip shaped electric poles and two ground connection, apply a radiofrequency field, form two lath-shaped gain regions, be complementary with the folding non-stable resonant cavity of an off-axis, or be complementary with a non-stable resonant cavity arranged side by side, the folding non-stable resonant cavity of off-axis is by an off-axis concave surface high reflection mirror, off-axis convex surface high reflection mirror and two the miter angle plane high reflection mirrors that have the square output coupling aperture of laser beam constitute, wherein two 45 angle plane high reflectivity mirrors are realized mode coupling between the low-loss plate waveguide of resonant cavity burst, the off-axis non-stable resonant cavity is made of the off-axis non-stable resonant cavity of pair of parallel side by side, forms the high power gas laser of a compact.
2, laser according to claim 1, it is characterized in that: the central plate strip electrode of electrode assemblie and two ground plate strip electrodes are processed by metal oxygen-free copper, boring forms " well " font passage in electrode, wherein six channel outlet form " U " type cooling-water duct with metal oxygen-free copper post silver-bearing copper soldering vacuum seal, and all the other two channel outlet are connected with outlet with the cooling water inlet pipe.
3, laser according to claim 1, it is characterized in that: the cooling water inlet pipe of central plate strip electrode or outlet are by a vacuum insulation porcelain tube, a corrugated stainless steel tubing and a steel flange are formed, be connected between cooling-water duct outlet and the vacuum insulation porcelain tube and pass through one " " type sealing-in quoit B is by silver-bearing copper soldering vacuum seal for U, be connected between vacuum insulation porcelain tube and the corrugated stainless steel tubing also by one that " " type sealing-in quoit is by silver-bearing copper soldering vacuum seal, is connected by silver-bearing copper soldering vacuum seal between corrugated stainless steel tubing and the steel flange for J; Respectively be processed with two row's electrode coupling inductance jacks in electrode length direction both sides, central plate strip electrode upper edge, in order to plug-in mounting coupling inductance, the place is processed with a radio-frequency power input bar Connection Block in the middle of central plate strip electrode side.
4, laser according to claim 1, it is characterized in that: the cooling water inlet pipe of ground plate strip electrode or outlet are made up of a corrugated stainless steel tubing and a steel flange, being connected between cooling-water duct outlet and the corrugated stainless steel tubing is by silver-bearing copper soldering vacuum seal by a metal oxygen-free copper bend pipe F, being connected between corrugated stainless steel tubing and the steel flange is by silver-bearing copper soldering vacuum seal by a metal oxygen-free copper straight tube A, respectively be processed with two row's electrode coupling inductance jacks in electrode length direction both sides, ground plate strip electrode upper edge, in order to plug-in mounting coupling inductance.
5, laser according to claim 1, it is characterized in that: two pairs of vacuum ceramics, two ground plate strip electrodes and two electrode fixation clips are fixed together, constitute a pair of rectangular waveguide discharge space, this rectangular waveguide discharge space height is 1.5mm-3mm, width is 80mm-160mm, and length is 400mm-800mm.
6, laser according to claim 1 is characterized in that: the electrode fixation clip is processed by aluminium alloy, electrode fixedly above the top board two ends and electrode fixedly below the lower platen two ends electrode fixation clip fin is respectively arranged; Electrode fixedly top board and electrode fixedly the lower platen two ends be high reflection mirror adjustment rack holder, be processed with laser resonant cavity mirror adjustment rack steady brace through hole, laser resonant cavity mirror adjustment rack fixed mandril screwed hole and logical light rectangular opening on the seat; Electrode fixedly below the top board two ends and electrode fixedly above the lower platen two ends laserresonator eyeglass protection convex mouth is respectively arranged, this laserresonator eyeglass protection convex mouth is between laserresonator eyeglass and rectangular waveguide discharge space; In each laserresonator eyeglass protection convex mouth, be processed with air vent hole in the vacuum chamber.
7, laser according to claim 1, it is characterized in that: the off-axis concave surface high reflection mirror assembly of off-axis optics resonator components is by an off-axis concave surface high reflection mirror, an off-axis concave surface high reflection mirror water-cooled frame and an off-axis concave surface high reflection mirror adjustment rack constitute, wherein, off-axis concave surface high reflection mirror two ends respectively are processed with a pair of standing screw through hole, respectively there is a cooling water outlet and inlet pipe at off-axis concave surface high reflection mirror water-cooled frame two ends, off-axis concave surface high reflection mirror water-cooled frame two ends respectively are processed with two pairs of standing screw through holes, wherein be complementary, and another is to being complementary from the off-axis concave surface high reflection mirror water-cooled frame end face standing screw through hole far away and a pair of standing screw through hole at off-axis concave surface high reflection mirror adjustment rack two ends from the nearer a pair of standing screw through hole of off-axis concave surface high reflection mirror water-cooled frame end face and a pair of standing screw through hole at off-axis concave surface high reflection mirror two ends; Be processed with a square light hole in the middle of the off-axis concave surface high reflection mirror adjustment rack, off-axis concave surface high reflection mirror adjustment rack two ends respectively are processed with a pair of standing screw through hole, and respectively be processed with an adjustment rack push rod location hole and an adjustment rack pull rod screw hole at two ends, fixing tight between off-axis concave surface high reflection mirror and the off-axis concave surface high reflection mirror water-cooled frame with two pairs of standing screws, fixing tight between off-axis concave surface high reflection mirror water-cooled frame and the off-axis concave surface high reflection mirror adjustment rack with two pairs of standing screws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01226571 CN2473787Y (en) | 2001-06-07 | 2001-06-07 | Radio frequency exciting diffusion cooling kilowatt CO2 laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01226571 CN2473787Y (en) | 2001-06-07 | 2001-06-07 | Radio frequency exciting diffusion cooling kilowatt CO2 laser |
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| CN2473787Y true CN2473787Y (en) | 2002-01-23 |
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| CN 01226571 Expired - Lifetime CN2473787Y (en) | 2001-06-07 | 2001-06-07 | Radio frequency exciting diffusion cooling kilowatt CO2 laser |
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| CN103117501A (en) * | 2013-01-28 | 2013-05-22 | 江苏益林金刚石工具有限公司 | Cooling water flow channel structure of electrode of radiofrequency slab CO<2> laser device |
| CN103618199A (en) * | 2013-11-05 | 2014-03-05 | 北京镭海激光科技有限公司 | Preparation method of high-voltage infrared type carbon dioxide laser tube |
| CN104577649A (en) * | 2014-12-29 | 2015-04-29 | 苏州凯锝微电子有限公司 | Slab laser device |
| CN105449495A (en) * | 2015-11-03 | 2016-03-30 | 北京热刺激光技术有限责任公司 | Radio frequency laser with negative electrode plate installed on parallel supports |
| CN105870770A (en) * | 2015-02-09 | 2016-08-17 | 依拉迪激光有限公司 | Flat-folded ceramic slab lasers |
| CN105896239A (en) * | 2016-06-07 | 2016-08-24 | 清华大学深圳研究生院 | Radio-frequency CO2 laser device and plate electrode and threaded hole structure employing same |
| CN114122905A (en) * | 2022-01-26 | 2022-03-01 | 广东粤港澳大湾区硬科技创新研究院 | Heat sink device and TO packaging laser array heat sink device |
-
2001
- 2001-06-07 CN CN 01226571 patent/CN2473787Y/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103117501A (en) * | 2013-01-28 | 2013-05-22 | 江苏益林金刚石工具有限公司 | Cooling water flow channel structure of electrode of radiofrequency slab CO<2> laser device |
| CN103618199A (en) * | 2013-11-05 | 2014-03-05 | 北京镭海激光科技有限公司 | Preparation method of high-voltage infrared type carbon dioxide laser tube |
| CN104577649A (en) * | 2014-12-29 | 2015-04-29 | 苏州凯锝微电子有限公司 | Slab laser device |
| CN105870770A (en) * | 2015-02-09 | 2016-08-17 | 依拉迪激光有限公司 | Flat-folded ceramic slab lasers |
| CN105870770B (en) * | 2015-02-09 | 2020-03-13 | 依拉迪激光有限公司 | Flat folded ceramic slab laser |
| CN105449495A (en) * | 2015-11-03 | 2016-03-30 | 北京热刺激光技术有限责任公司 | Radio frequency laser with negative electrode plate installed on parallel supports |
| CN105896239A (en) * | 2016-06-07 | 2016-08-24 | 清华大学深圳研究生院 | Radio-frequency CO2 laser device and plate electrode and threaded hole structure employing same |
| CN114122905A (en) * | 2022-01-26 | 2022-03-01 | 广东粤港澳大湾区硬科技创新研究院 | Heat sink device and TO packaging laser array heat sink device |
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