CN2370594Y - Plate type wave guide gas laser - Google Patents
Plate type wave guide gas laser Download PDFInfo
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- CN2370594Y CN2370594Y CN 98241454 CN98241454U CN2370594Y CN 2370594 Y CN2370594 Y CN 2370594Y CN 98241454 CN98241454 CN 98241454 CN 98241454 U CN98241454 U CN 98241454U CN 2370594 Y CN2370594 Y CN 2370594Y
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Abstract
The utility model relates to a lath-shaped waveguide gas laser that has a rear back-feed folded cavity. A radio frequency input lath-shaped intermediate electrode and two earthed lath-shaped electrodes form a pair of rectangular discharge spaces, and the part between the lath-shaped intermediate electrode and the two earthed lath-shaped electrodes are applied with a radio frequency field, which forms two lath-shaped gain regions that are matched with a rear back-feed folded cavity. Simultaneously, a concave cylindrical surface type high reflectivity mirror of 45DEG and a planar high reflectivity mirror of 45DEG are adopted to achieve the mode coupling between low-loss lath waveguides at the folded part of a resonant cavity, which forms a compact gas laser that has high power.
Description
The utility model relates to waveguide gas laser, particularly about a kind of back feedback fold resonator double lath type waveguide gas laser.
In the prior art, among " in laser, adopting the prospect of high frequency capacitance discharge " (Sov.J.Quantum Electron.11 (10) .Oct.1981. " the Prospets for using high-frequency capacitative discharges in lasers ") that on the 11st (10) phase of October in 1981 " quantum electronics ", delivers by V.l.Myshen Kov and N.A.Yatsenko, and in U.S. Pat 4169251 " high frequency transverse-discharge excitation waveguide gas laser " (" Waveguide Gas Laser With HighFrequency Tansverse Discharge Excitation "), the technology that high-frequency discharge excites slat guide gas laser is disclosed, this laser is by being made of the space of a rectangle pair of metal lath-shaped electrode, between described two electrodes, apply with rf electric field, produce the radio frequency gas discharge, form a rectangle gain region, because two electrode spacings are less, can utilize the mode refrigerating gas region of discharge of diffusion cooling, combine with the pseudo confocal unsteady resonator of off-axis, realize the gas laser of the diffused cooling of the compact that a kind of monolateral end laser is exported.The structure of this class laser as shown in figure 10, wherein each label is represented: 1. vacuum chamber, 3. ground connection lath bottom electrode, 5. vacuum porcelain insulating bar, 7. rectangle discharge space, 8. radio frequency input electrode bar, 9. radio frequency input electrode bar vacuum insulation insulator, 10. radio frequency matching network, 11. radio frequency source, 20. radio frequencies input lath top electrode, 21. vacuum porcelain insulating support bars, W. rectangle discharge space width, X. rectangle discharge space height.Experimental studies have found that: because rf wave is a metric wave, and pair of metal lath-shaped electrode constitutes one section transmission line, particularly when gas discharge, pair of metal lath-shaped electrode forms the transmission line of one section big leakage current of high loss like this, between two electrodes, form the discharge plasma of non-uniform Distribution longitudinally, for obtaining the efficient laser gain length, make electrode length be restricted, make laser power further raising and keep the compact of Laser Devices to be restricted simultaneously.
In this external present existing technology, roll up at " optical communication " the 31st as O.L.Bourae and P.E.Dyer, the 2nd phase, " a kind of novel stable-unstable resonator that is used for the rare gas halogenide laser Beam Control " (" Optics Communications " Volume 31 that delivers in November, 1979, number 2, " A Novel Stable-Unstable Resonator for Deamcontrol of Rare-gas Halide Lasers ") in the literary composition, and disclosed laserresonator in the United States Patent (USP) 4719639 " carbon dioxide slab laser " (" Carbon Dioxide Slab Laser "), employing be the pseudo confocal unsteady resonator of the side light beam output of traditional off-axis.In this pseudo confocal unsteady resonator, the laser beam of output is the continuous transmission light that amplifies of light beam physical dimension that the nothing feedback is amplified, and the laser beam that the light beam physical dimension of reverse transfer is constantly dwindled is contributed effectively and given laser power.
For overcoming the above-mentioned shortcoming of prior art, the utility model provides a kind of back feedback fold resonator double lath waveguide gas laser of new structure.
Main purpose of the present utility model provides a kind of fold resonator double lath waveguide gas laser, makes laser structure more compact.
Another purpose of the present utility model is to adopt recessed cylindrical mirror to match with plane mirror at the laser resonant cavity place of unfolding, realize mode coupling between low-loss plate waveguide, so that a kind of fold resonator double lath waveguide gas laser of high power compact to be provided.
Another purpose of the present utility model provides a kind of back feedback fold resonator double lath waveguide gas laser, with the power output of further raising laser.
Another purpose of the present utility model is by a plurality of inductance of cross-over connection non-equivalence respectively between the central electrode of double lath laser and each grounding electrode, to provide a kind of along the uniform fold resonator double lath of electrode length direction radio frequency discharge waveguide gas laser.
For reaching above-mentioned each purpose and effect, the fold resonator double lath waveguide laser that the utility model provides has following several formation:
A kind of slat guide gas laser comprises: a vacuum chamber is provided with in the chamber as lower member: a water-cooled radio frequency tablet strip target; The first and second two water-cooled ground plate strip shaped electric poles divide to be located at described target both sides; Four vacuum porcelain bar branches are located at the two ends of described target and first, second two grounding electrode, to constitute a pair of rectangle discharge space between this target and two grounding electrodes; An electrode stem that links to each other with described target, this electrode stem links to each other with external radio-frequency power supply by the insulated hole on the described vacuum chamber sidewall; One convex surface high reflectivity mirror is arranged on the outside of the discharge space that described first grounding electrode and the target constituted, and its reflecting surface is towards discharge space; One concave surface high reflectivity mirror is arranged on the outside of the discharge space that described second grounding electrode and the target constituted, and is positioned at described three electrode homonymy with described convex surface high reflectivity mirror, and its reflecting surface is towards discharge space; Another outside of the discharge space that two high reflectivity mirrors are located at described first, second grounding electrode and target respectively and are constituted as the light path folding mirror, its reflecting surface constitutes the folding coupling optical path of U-shaped respectively towards two discharge spaces; Described convex surface high reflectivity mirror, concave surface high reflectivity mirror and two folding high reflectivity mirrors constitute the empty confocal laser unsteady cavity of an off-axis.
In above-mentioned laser structure, one of two described folding high reflectance refrative mirrors can be recessed cylindrical mirrors, and another is a plane mirror, and described convex surface high reflectivity mirror is a projection face speculum, and described concave surface high reflectivity mirror is a projection face speculum.
In above-mentioned two kinds of laser structures, at the reverse output beam place of described concave surface high reflectivity mirror, a plane high reflectivity mirror perpendicular to this light beam can be set, its reflecting surface is towards this output beam, as the feedback reflector mirror.
In above-mentioned various laser structures, along the electrode length direction, also can be between described target and two grounding electrodes both sides alternately a plurality of high inductance value of cross-over connection and low inductance value inductance respectively, the quantity Nf of inductance is determined by following formula: Nf=2*Lz/Df, wherein, Lz is a gain length, and Lz is the twice of electrode length Ld; Df is the spacing between adjacent two inductance, gets 50mm-100mm, and the size of inductance value is determined by following formula:
Lf＝ω
f 2*Nf/(2*Cf) (1)
Lc＝Kc*Lf (2)
Lx＝Kx*Lf (3)
Lf＝Lc+Lx (4)
Kc＝0.55-0.65 (5)
In Kx=0.45-0.35 (6) formula: ω
fBe radio frequency gas discharge frequency, Df is the spacing between adjacent two inductance, and Cf is the electric capacity in radio frequency gas discharge rectangular waveguide space.Lf is the nominal inductance value of each inductance, and Lc is the actual inductance value of each high inductance, and Lx is the actual inductance value of each low inductance.
Below in conjunction with accompanying drawing specific embodiment of the utility model is elaborated.
Brief Description Of Drawings:
Fig. 1. the utility model laser cross sectional representation.
Fig. 2. the laser resonant cavity of the utility model preferred embodiment and electrode structure relative position schematic diagram.
Fig. 3. the laser resonant cavity of the utility model preferred embodiment and electroplax structure relative position schematic side view.
Fig. 4. the laser resonant cavity of the utility model preferred embodiment and electrode structure relative position schematic top view.
Fig. 5. the fundamental diagram of feedback fold resonator behind the utility model laser.
Fig. 6. the utility model laser plate waveguide pseudo confocal unsteady resonator laser principle schematic.
Fig. 7. the utility model laser inductance syndeton schematic diagram.
Fig. 8. the utility model laser inductance syndeton schematic side view.
The structural representation of Fig. 9 A, 9B, other embodiment of 9C. the utility model laser.
Figure 10. existing plate waveguide gas laser schematic diagram.
The most preferred embodiment of feedback fold resonator double lath waveguide gas laser is shown in Fig. 1,2,3,4 behind the utility model, and 2,3 and four vacuum porcelain bars 5 of water-cooled lath-shaped electrode of importing water-cooled lath-shaped target 4 and two ground connection by a radio frequency in vacuum chamber 1 constitute the discharge space 6,7 of a pair of rectangle.The discharge space height H of this rectangle is 1mm-6mm (die opening of the lath- shaped electrode 2,3 of lath-shaped target 4 and a ground connection), and width W is 10mm-100mm, and length L d is 200mm-600mm (a lath-shaped electrode length).Because the die opening less (H is 1mm-6mm) of the lath- shaped electrode 2,3 of lath-shaped target 4 and ground connection, thereby can form effective diffused cooling.An electrode stem 8 links with central plate strip electrode 4 by a vacuum insulation insulator 9 on chamber walls, one rf frequency is that the radio-frequency power supply 11 of 20MHz-150MHz applies a radiofrequency field via electrode stem 8 at 2,3 at the lath-shaped electrode of intermediate plate strip shaped electric poles 4 and two ground connection by a matching network 10, is that (this quaternary mist is: CO in the 4Kpa-20Kpa quaternary mist at air pressure
2, N
2, He and Xe, its mixing ratio is CO
2: N
2: He: Xe=19%: 19%: 57%: 5%) produce gas discharge, at two lath-shaped gain regions of discharge space 6,7 formation of a pair of rectangle.
The feedback fold resonator is complementary behind these two lath-shaped gain regions and one, this back empty confocal laser unsteady cavity of feedback off-axis is by a protruding sphere (or projection face) high reflectivity mirror 12, a concave spherical surface (or recessed cylinder) high reflectivity mirror 13, recessed cylinder (or plane) high reflectivity mirror 15 that plane high reflectivity mirror is 14, one 45 jiaos and one 45 jiaos plane high reflectivity mirror 16 constitute.Plane high reflectivity mirror 14 (is seen Fig. 2 as the reverse output beam place that the feedback reflector mirror is placed on concave spherical surface (or recessed cylinder) high reflectivity mirror 13,3 and 4), its reflecting surface is towards reverse output beam 18, and perpendicular to the optical axis CD (seeing C and D among Fig. 3) of folded light beam.Label among Fig. 3 and symbolic representation: 17. folding coupled light beam, 18. reverse output beam, 19. forward output beam, Ld. rectangle discharge space length (being electrode length), the friendship section of A. folding optical axis and protruding sphere high reflectivity mirror, the friendship section of B. folding optical axis and 45 jiaos of recessed cylinder high reflectivity mirrors, the friendship section of C. folding optical axis and 45 angle plane high reflectivity mirrors, the friendship section of D. folding optical axis and concave spherical surface high reflectivity mirror, E. space waveguide mouth is gone up in the rectangle discharge, and the discharge of F. rectangle is space waveguide mouth down.
Symbolic representation among Fig. 4: Δ D
0Forward output beam width, Δ D
nReverse output beam width.
Label and symbolic representation in the plate waveguide pseudo confocal unsteady resonator laser principle schematic shown in Figure 6: 22. protruding sphere high reflectivity mirrors, 23. concave spherical surface high reflectivity mirrors, Δ Ds
0. laser output beam width, Fs
D. concave spherical surface high reflectivity mirror focal length, Fs
dProtruding sphere high reflectivity mirror focal length, Le lath-shaped electrode length, Ls pseudo confocal unsteady resonator chamber is long.
Because the size of the discharge space Width of the rectangle of described waveguide laser is bigger, when along the defined Fresnel number of electrode length direction when big, the waveguiding effect of its Width can be ignored.This Fresnel number is defined as: N
d=W
2/ (8*Ld* λ), wherein λ is the optical maser wavelength of being considered.In the utility model, W that is limited and Ld parameter make defined Fresnel count N
dMuch larger than 1, thereby the zlasing mode of the discharge space Width of propagating along the electrode length direction is the free space pattern.
In the back feedback fold resonator that the utility model adopted, the recessed cylinder high reflectivity mirror 15 of a 45 and the plane high reflectivity mirror 16 of a 45 are as refrative mirror, the recessed cylinder high reflectivity mirror 15 of 45 plays a part the plane high reflectivity mirror for the zlasing mode of the discharge space width W direction of propagating along the electrode length direction, and plays mode coupling between the convergent beam waveguide for the zlasing mode of the discharge space height H direction of propagating along the electrode length direction.Thereby for the zlasing mode of the discharge space width W direction of propagating along the electrode length direction, the operation principle of the back feedback fold resonator that the utility model adopted can be as shown in Figure 5.
The back feedback is as follows from the empty confocal laser unsteady cavity of axle Design Theory reverse and forward output beam size: see Fig. 5, wherein Δ D
0. forward output beam width, Δ D
n. reverse output beam width, F
DConcave spherical surface high reflectivity mirror focal length, F
dProtruding sphere high reflectivity mirror focal length, the feedback fold resonator long L=AB+BC+CD in chamber behind the L.
Can get from Fig. 5 according to geometric optical theory:
L＝F
D-F
d (1)
\/ ... ...
Because D
n=d
N-1(n＞0, n is a positive integer) (4) so
(n＞0, n is a positive integer)
(n＞0, n is a positive integer) (5)
(n=0,1,2 ...) (6) D=D
0Because d=d
0=D
1So Δ D
0=Δ D=D-d=D
0-d
0=D
0-D
1(7) because
So
In equation (6) and (9) substitution equation (8):
In actual design, size according to equation (1) and (2) and laser output loss rate (d/D) calculating laserresonator parameter, select the folding times N (N=2n+1) of light beam in laser gain then, determine the size of reverse output beam, according to experimental data, the size of general reverse output beam is chosen as 1-3mm.Because light beam is introduced certain loss in the Light Diffraction Effect at laser gain edge, in order to reduce diffraction loss as far as possible and to take all factors into consideration the cost of speculum:
The size of convex surface high reflection mirror 12 is designed to:
Along lath-shaped gain Width be: d (mm)+δ
d
δ
d＝10～20mm
Along lath-shaped gain short transverse be: gain height H (mm)+δ
h
δ
h＝10～20mm
The size of concave surface high reflection mirror 13 is designed to:
Along lath-shaped gain Width be: D (mm)+δ
D
δ
D＝10～20mm
Along lath-shaped gain short transverse be: gain height H (mm)+δ
h
δ
h＝10～20mm
The size of plane high reflection mirror 14 is designed to:
Along lath-shaped gain Width be: Dn (mm)+δ
n
δ
n＝10～30mm
Along lath-shaped gain short transverse be: gain height H (mm)+δ
h
δ
h＝10～30mm
Lath-shaped laser gain length Z is:
Z＝L-δ
L
δ
L＝20～70mm
For the zlasing mode of the discharge space height H direction of propagating along the electrode length direction, the recessed cylinder high reflectivity mirror 15 of 45 plays mode coupling between the convergent beam waveguide.Its operation principle is as follows: because the utility model adopts the discharge space 6,7 of a pair of rectangle of lath-shaped electrode 2,3 formations of a radio frequency tablet strip target 4 and two ground connection, discharge space 6,7 electrode spacings less (1mm-6mm).Its Fresnel number is decided to be: N
d=H
2/ (8*Ld* λ), wherein λ is the optical maser wavelength of being considered.In the utility model, H that is limited and Ld parameter make defined Fresnel count N much smaller than 1, thereby are the waveguide basic mode for the zlasing mode of the discharge space height H direction of propagating along the electrode length direction.According to the waveguide resonant cavity theory, waveguide basic mode waist bundle is positioned at waveguide mouth place, and waveguide basic mode beam radius is ω
0=0.65*H/2, the propagation characteristic of waveguide basic mode light beam can be described with the propagation characteristic of Gauss's basic mode.In existing waveguide resonant cavity theory, the waveguide mouth is seen as the beam waist bundle, adopt level crossing, confocal mirror or concyclic heart mirror are realized the low loss mode coupling of waveguide outer light beam and waveguide inner light beam.In the utility model, light path folding becomes U-shaped, needs two speculums, according to existing waveguide-coupled theory, can adopt two level crossings, also can adopt two curved reflectors to form confocal coupling, or two curved reflectors form homocentric coupling, to realize the low-loss coupling.But when adopting two level crossings, because two plate waveguide mouth apart from each others, the coupling loss of generation is bigger; When adopting two curved reflectors, owing between two curved reflectors, can produce a focus point, easily cause gas breakdown and eyeglass damage in the vacuum, in order to reduce Waveguide Coupling-loss, the waveguide resonant cavity eyeglass is generally nearer apart from the waveguide mouth in addition, thereby forms confocal coupling at two curved reflectors, or two curved reflectors form under the homocentric coupling situation, the radius of curvature of curved reflector is less, and the aberration distortion that light beam is caused is bigger, has increased Waveguide Coupling-loss.So most preferred embodiment of the present utility model is to adopt the asymmetric U-shaped light path folding coupled system that is made of a plane mirror and curved reflector to realize mode coupling between low-loss waveguide.When the radius of curvature of recessed cylinder high reflectivity mirror 15 of design 45, can calculate according to the propagation equation of Gauss's basic mode and make that behind the forward and backward beam line focus of the recessed cylinder high reflectivity mirror by 45, its beam radius is all between 0.95* ω
0With 1.05* ω
0Between, make that the mode coupling loss can be ignored between plate waveguide.In addition, because most preferred embodiment of the present utility model adopts by a plane mirror and the asymmetric U-shaped light path folding coupled system that curved reflector constitutes, the radius of curvature of used curved reflector is bigger, thereby the aberration that light beam is caused distortion is less, can reduce Waveguide Coupling-loss.
In addition, because on the discharging structure principle of fold resonator double lath waveguide laser of the present utility model is the radio-frequency transmission line of one section high leakage current, in order to obtain along the even discharge plasma density distribution of the radio frequency on the electrode length direction, most preferred embodiment of the present utility model is along on the electrode length direction, at the inductance of central electrode 4 and 2,3 cross-over connection inductance value cycle variations of grounding electrode, the quantity of required inductance is determined by the formed length of radio frequency gas discharge.In the utility model, the twice that the formed gain length Lz of radio frequency gas discharge is electrode length Ld, the space D f between adjacent two inductance is 50mm-100mm.Inductance quantity is determined that by formula Nf=2*Lz/Df the inductance value of each inductance is determined by the electric capacity in radio frequency gas discharge rectangular waveguide space.It determines that formula is as follows:
Lf＝ω
f 2*Nf/(2*Cf) (11)
Lc＝Kc*Lf (12)
Lx＝Kx*Lf (13)
Lf＝Lc+Lx (14)
Kc＝0.55-0.65 (15)
In Kx=0.45-0.35 (16) formula: ω
fBe radio frequency gas discharge frequency, Df is the spacing between adjacent two inductance, and Cf is the electric capacity in radio frequency gas discharge rectangular waveguide space.Lf is the nominal inductance value of each inductance, and Lc is the actual inductance value of each high inductance, and Lx is the actual inductance value of each low inductance.The nominal inductance value of each inductance is the mean value of the actual inductance value of the actual inductance value of each high inductance and each low inductance.
Selection principle according to equation (11)-(16) and inductance quantity thereof, along on the electrode length direction, at target 4 and 2,3 both sides difference 6 high inductance value inductance 24 of cross-over connection of each grounding electrode and 4 low inductance value inductance 25,12 high inductance value inductance 24 of cross-over connection and 8 low inductance value inductance 25 (seeing shown in Fig. 7,8) altogether.The size of each inductance value is determined by equation (11)-(16).
Above in conjunction with the accompanying drawings 1 to 4 described be most preferred embodiment of the present utility model.According to the technical solution of the utility model, specific embodiment of the utility model is not limited to the represented a kind of structure of accompanying drawing 1 to 4, and the structure of the utility model laser also can have following several form:
The speculum 12 and 13 at fold resonator two ends can be a protruding sphere or projection face high reflectivity mirror 12 and a concave spherical surface or recessed cylinder high reflectivity mirror 13.
Folding mirror 15 and 16 can be two plane mirrors (as Fig. 9 A, 9C), also can be the curved reflector of two confocal couplings or homocentric coupling, can also be a plane mirror and a curved reflector (as Fig. 9 B).
In waveguide laser of the present utility model, also can not adopt feedback plane mirror 14 (as Fig. 9 B, 9C).
In waveguide laser of the present utility model, between the grounding electrode 2,3 of target 4 and both sides, also can connect a plurality of equivalent inductances, can also not connect inductance.
Gas waveguide laser of the present utility model is not limited only to contain CO
2The quaternary mist, also be applicable to other gas laser media.
Waveguide laser structure of the present utility model also can change and as refrative cavity double lath waveguide gas laser image intensifer.
Claims (4)
1. a slat guide gas laser is characterized in that, comprising:
One vacuum chamber is provided with in the chamber as lower member:
One water-cooled radio frequency tablet strip target,
The first and second two water-cooled ground plate strip shaped electric poles divide to be located at described target both sides,
Four vacuum porcelain bar branches are located at the two ends of described target and first, second two grounding electrode, with a pair of rectangle discharge space of formation between this target and two grounding electrodes,
An electrode stem that links to each other with described target, this electrode stem links to each other with external radio-frequency power supply by the insulated hole on the described vacuum chamber sidewall,
One convex surface high reflectivity mirror is arranged on the outside of the discharge space that described first grounding electrode and the target constituted, and its reflecting surface is towards discharge space,
One concave surface high reflection mirror is arranged on the outside of the discharge space that described second grounding electrode and the target constituted, and is positioned at the homonymy of described three electrodes with described convex surface high reflectivity mirror, and its reflecting surface is towards discharge space,
Another outside of the discharge space that two high reflectivity mirrors are located at described first, second grounding electrode and target respectively and are constituted as refrative mirror, its reflecting surface constitutes the folding coupling optical path of U-shaped respectively towards two discharge spaces,
Described convex surface high reflectivity mirror, concave surface high reflectivity mirror and two high reflectivity mirrors constitute the empty confocal laser unsteady cavity of an off-axis.
2. waveguide gas laser as claimed in claim 1 is characterized in that:
One of two described high reflectance refrative mirrors are a recessed cylindrical mirror, and another is a plane mirror,
Described convex surface high reflection mirror is a projection face speculum,
Described concave surface high reflection mirror is a projection face speculum.
3. as each described waveguide gas laser in the claim 1,2, it is characterized in that
At the reverse output beam place of described concave surface high reflectivity mirror, a plane high reflectivity mirror perpendicular to this light beam is set, its reflecting surface is towards this output beam, as the feedback reflector mirror.
4. as each described waveguide gas laser in the claim 1,2 and 3, it is characterized in that:
Along the electrode length direction, both sides alternately a plurality of high inductance value of cross-over connection and low inductance value inductance respectively between described target and two grounding electrodes, the quantity Nf of inductance is determined by following formula:
Nf＝2*Lz/Df
Wherein, Lz is a gain length, and Lz is the twice of electrode length Ld; Df is the spacing between adjacent two inductance,
The size of inductance value is determined by following formula:
Lf＝ω
f 2*Nf/(2*Cf) (1)
Lc＝Kc*Lf (2)
Lx＝Kx*Lf (3)
Lf＝Lc+Lx (4)
Kc＝0.55-0.65 (5)
In Kx=0.45-0.35 (6) formula: ω
fBe radio frequency gas discharge frequency, Df is the spacing between adjacent two inductance, and Cf is the electric capacity in radio frequency gas discharge rectangular waveguide space.Lf is the nominal inductance value of each inductance, and Lc is the actual inductance value of each high inductance, and Lx is the actual inductance value of each low inductance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98241454 CN2370594Y (en) | 1998-10-23 | 1998-10-23 | Plate type wave guide gas laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98241454 CN2370594Y (en) | 1998-10-23 | 1998-10-23 | Plate type wave guide gas laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2370594Y true CN2370594Y (en) | 2000-03-22 |
Family
ID=33988205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 98241454 Expired - Fee Related CN2370594Y (en) | 1998-10-23 | 1998-10-23 | Plate type wave guide gas laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2370594Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012084425A1 (en) * | 2010-12-23 | 2012-06-28 | Rofin-Sinar Laser Gmbh | Stripline laser amplifier and laser arrangement with a stripline laser amplifier |
| EP3550678A1 (en) * | 2018-04-04 | 2019-10-09 | Kern Technologies, LLC | Folded slab waveguide laser |
-
1998
- 1998-10-23 CN CN 98241454 patent/CN2370594Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012084425A1 (en) * | 2010-12-23 | 2012-06-28 | Rofin-Sinar Laser Gmbh | Stripline laser amplifier and laser arrangement with a stripline laser amplifier |
| EP3550678A1 (en) * | 2018-04-04 | 2019-10-09 | Kern Technologies, LLC | Folded slab waveguide laser |
| US10811838B2 (en) | 2018-04-04 | 2020-10-20 | Kern Technologies, Llc | Folded slab laser |
| US11942753B2 (en) | 2018-04-04 | 2024-03-26 | Kern Technologies, Llc | Folded slab laser |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |