CN101789559B - Gas laser - Google Patents
Gas laser Download PDFInfo
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- CN101789559B CN101789559B CN2010101141367A CN201010114136A CN101789559B CN 101789559 B CN101789559 B CN 101789559B CN 2010101141367 A CN2010101141367 A CN 2010101141367A CN 201010114136 A CN201010114136 A CN 201010114136A CN 101789559 B CN101789559 B CN 101789559B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/041—Arrangements for thermal management for gas lasers
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
The invention discloses a gas laser, which comprises a discharge chamber, a discharge electrode, a water-cooling channel and a gas storage chamber, wherein the water-cooling channel is distributed on the ektexine of the discharge chamber, the gas storage chamber is positioned outside the water-cooling channel, the discharge chamber and the gas storage chamber are communicated through a muffler, the discharge chamber is a sealed cavity which consists of a discharge cavity, a strip-shaped reflector on a tail end mirror, a strip-shaped reflector on an output end and a full-through output mirror, the discharge cavity is in a lath-shaped hollow-core structure which is made of nonmetal materials, the tail end mirror, the strip-shaped reflector on the output end are respectively positioned on the front end and the rear end of the discharge cavity, an aperture is left on the middle or one side of the strip-shaped reflector of the output end, the full-through output mirror is positioned at the position of the aperture and is used as a laser output window, and the discharge electrode is poisoned in the front end and rear end of the discharge cavity, or in the left side and the right side of the discharge cavity. The gas laser has small size, light weight, simple structure, a cooling system with good cooling effect, high output power and stable laser beam with good mode, and can be used for the laser processing industry.
Description
Technical field
The invention belongs to laser technique, particularly relate to a kind of gas laser, a kind of gas laser that is mainly used in the lath-shaped region of discharge of laser processing industry.
Background technology
At present, the laser market potential of middle power (hundreds of watts～kilowatts) is huge, till now; Also there is not the very satisfied practical product of user, for high-power laser output in obtaining, at present; Domestic a kind of scheme is a lengthening enclosed type glass tube laser region of discharge; Because region of discharge is long, causes driving voltage too high, inconveniences such as transportation, installation, use; Second kind of scheme is to adopt the folding light channel structure of a plurality of discharge tubes, and this structure has increased optical mirror slip, has also increased the complexity of system, reduced the stability of light path and the stability and the reliability of laser output.For high power laser, can adopt quick flowing gas excitation, make crossing current or axial flow laser, increased gas flow and cooling system, consequently bulky, Heavy Weight, running noises is big, and air consumption is big, and operating cost is high.In order to solve this present situation, designed RF excited diffusion cooling slab laser abroad, sparking electrode is the metal electrode of band water-cooling channel; Spacing between electrodes is little, is a waveguiding structure of optic path, thus the processing of electrode, install very complicated; Arc chamber is the airtight container of metal structure, and power supply is a radio-frequency power supply, and Laser Output Beam is the bar shaped laser spot; Hot spot needs shaping to use, and this laser performance is good, and the life-span is long; But its technical difficulty is high, and equipment purchase and working service cost are high, for 100 watts of lasers of equal-wattage; The price of RF excited slab laser is several 10 times of enclosed type glass tube laser price, so be difficult to apply widely in China.
Summary of the invention
The objective of the invention is to combine enclosed type glass tube laser and RF excited slab laser advantage separately, and overcome their deficiencies separately, a kind of brand-new gas laser simple in structure is provided.
A kind of gas laser provided by the invention; Comprise arc chamber, sparking electrode, water-cooling channel and air storage chamber; Water-cooling channel is distributed on the said arc chamber outer wall, and air storage chamber is positioned at outside the water-cooling channel, communicates through muffler between said arc chamber and the air storage chamber; It is characterized in that: arc chamber is for to constitute a hermetic cavity chamber by discharging chamber, tail mirror end strip speculum, output strip speculum and full impregnated outgoing mirror jointly; The lath-shaped hollow-core construction that discharging chamber is processed by nonmetallic materials, tail mirror end strip speculum and output strip speculum lay respectively at outside the front and back ends of discharging chamber, and the centre or a side of output strip speculum leave light hole; The full impregnated outgoing mirror is positioned at the light hole place, and as laser output window; Sparking electrode is positioned at the forward and backward two ends of discharging chamber, perhaps in the and arranged on left and right sides.
Laser structure provided by the invention is simple, according to the difference of lath-shaped region of discharge area, can obtain 100～1000W even higher power.Compared with prior art, the present invention has following advantage:
(1) arc chamber is by nonmetal composing plate strip sealing such as glass or pottery arc chamber; The increase of its power is to realize through increasing the transverse discharge width, compares with the common sealed CO 2 laser of equal length, and power output can improve several times even tens of times; Compare with extended type glass tube laser or folded form glass tube laser; Structure is compact more, and volume is smaller and more exquisite, and resonant cavity optical mirror slip quantity is few; Thereby can guarantee the stability of light path and the stability and the reliability of laser output, practice thrift cost.
(2) electrode of the present invention's employing is the electrode material of simple glass pipe laser; And the sparking electrode of RF excited diffusion cooling slab laser is the metal electrode of band water-cooling channel, and spacing between electrodes is little, is a waveguiding structure of optic path; The requirement on machining accuracy of electrode and installation accuracy require all very high; So the electrode structure that the present invention adopts is simple, easy for installation, with low cost.
(3) sparking electrode of the present invention's employing can be positioned at the forward and backward two ends of arc chamber; Perhaps in the and arranged on left and right sides; Electrode can be designed to the hollow rectangle electrode; Zigzag hollow rectangle electrode, structures such as segmentation pellet electrode, multi-needle electrode, plate electrode, multistylus electrode, porous plate electrode, spininess plate electrode, thus guarantee large-area uniform and stable discharge.
(4) RF excited diffusion cooling slab laser needs complex structure, and technical difficulty is high, expensive radio-frequency power supply, and the needed power supply of laser of the present invention can adopt common DC high-voltage power supply, simple in structure.
(5) the non-steady waveguide hybrid chamber of strip of RF excited diffusion cooling slab laser employing is a unsteady cavity in a direction promptly, and the another one direction is a waveguide cavity, and the present invention's employing is the strip unsteady cavity, does not have waveguide loss and Waveguide Coupling-loss.
(6) output beam of RF excited diffusion cooling slab laser is the bar shaped laser spot, and hot spot needs shaping to use, and output beam of the present invention can be the squarish light beam, does not need complicated shaping light channel structure, can directly use.
(7) the resonant cavity eyeglass all has water cooling plant, rather than adopt common method one by one the gas in eyeglass and the arc chamber be cooled together, such design gives eyeglass with good cooling under the prerequisite that guarantees the output high power laser simultaneously.
(8) water-cooling channel of arc chamber outside is the water-cooling channel of tandem compound in a kind of loong shunt, guarantees that current are more unobstructed, does not have the current dead angle, makes the cooling of discharge gas more abundant, thereby guarantees the stability of discharge and the stability of laser output well.
(9) air storage chamber stays fully and fills exhaust joint, and is convenient repeatedly towards exhaust, and laser can be recycled, and it is with once just scrapping not resemble common enclosed type glass tube laser, thus the useful life of raising laser.
Description of drawings
Fig. 1 is the overall structure sketch map of gas laser.
Fig. 2 .1,2.2,2.3,2.4 is respectively the cross section of several kinds of shapes of a kind of arc chamber.
Fig. 3 .1,3.2,3.3,3.4 is the discharge electrode structure of several kinds of longitudinal discharges.
Fig. 4 .1～4.10 are the electrode structure sketch map of several kinds of transverse discharges.
Fig. 5 .1 is the unsteady cavity structural representation of concavo-convex side coupling output.
Fig. 5 .2 is the unsteady cavity structural representation of concavo-convex middle coupling output.
Fig. 6 is the water-cooling channel structural representation.
Embodiment
Below in conjunction with accompanying drawing and instance the present invention is done further detailed description.
As shown in Figure 1, gas laser provided by the invention comprises discharging chamber 1, sparking electrode 2, water-cooling channel 3, air storage chamber 4, tail mirror end strip speculum 8, output strip speculum 9 and full impregnated outgoing mirror 10.
Discharging chamber 1 is by nonmetal making such as glass or potteries; Said sparking electrode 2 is positioned at the forward and backward two ends of discharging chamber 1; Perhaps and arranged on left and right sides links to each other with electrode connection 5, and electrode connection 5 links to each other with external power supply separately; This power supply can adopt common DC power supply, and needn't use radio-frequency power supply.Water-cooling channel 3 is distributed in discharging chamber 1 outside, simultaneously cooling discharge electrode 2 regions; The outer air storage chambers 4 that are provided with of water-cooling channel 3, air storage chamber 4 can be designed to integrative-structure with discharging chamber 1 and water-cooling channel 3, also can the design mix body structure; Stay fully on the air storage chamber 4 and fill exhaust joint 12, convenient repeatedly filling exhaust, the useful life of improving laser; Air storage chamber 4 communicates with discharging chamber 1 through muffler 6, and muffler can be provided with many; Tail mirror end strip speculum 8 lays respectively at outside the front and back ends of discharging chamber 1 with output strip speculum 9; The centre of output strip speculum 9 or a side leave light hole (shape in hole can be rectangle, square or circle etc.); Full impregnated outgoing mirror 10 is positioned at the light hole place, and as laser output window.Tail mirror end strip speculum 8, output strip speculum 9 and full impregnated outgoing mirror 10 and the discharging chamber 1 common arc chamber that constitutes a sealing.
Needs according to laserresonator; The concrete shape of discharging chamber 1 can be multiple shape, can be lath-shaped or similar lath-shaped, and Fig. 2 has given an example wherein several kinds; Like square-section lath-shaped structure (Fig. 2 .1); Intermediate narrower, the wide divergent shape cross section class battened construction (Fig. 2 .2) in both sides, the spindle shape cross section class battened construction (Fig. 2 .3) that the centre is wide, both sides are narrow, the trapezoid cross section class battened construction (Fig. 2 .4) that narrow, the other side of a side is wide; In addition, discharging chamber 1 can also be that the cross section is non-circular other analogous shape.
When sparking electrode 2 is positioned at the and arranged on left and right sides of discharging chamber 1, course of discharge is vertical with light direction, is transverse discharge, shown in 4.Concrete electrode structure can adopt plate electrode 14 (Fig. 4 .1, Fig. 4 .2), multistylus electrode 15 (Fig. 4 .3, Fig. 4 .4), porous plate electrode 16 (Fig. 4 .5, Fig. 4 .6), spininess plate electrode 17 (Fig. 4 .7, Fig. 4 .8), hollow rectangle electrode 18 structure and their various combining structures such as (Fig. 4 .9, Fig. 4 .10).
Among the present invention, the material that sparking electrode 2 adopts can be the electrode material of simple glass pipe laser, does not need the surperficial superlinishing metal electrode of the necessary band water-cooling channel of RF excited diffusion cooling slab laser.As adopt segmentation pellet electrode and multi-needle electrode, then need adopt a plurality of contact conductors.
The resonant cavity that the present invention adopts specifically can be designed to the concave-concave unsteady cavity structure (Fig. 1) of side coupling output, the concavo-convex unsteady cavity structure (Fig. 5 .1) of side coupling output and the concavo-convex unsteady cavity structure (Fig. 5 .2) of medial side face coupling output etc.
When the resonant cavity that adopts as the present invention is the unsteady cavity structure of concave-concave side coupling output shown in Figure 1; Tail mirror end strip speculum 8 is the strip concave mirror; Output strip speculum 9 is the strip concave mirror; Full impregnated outgoing mirror 10 is positioned at a side of output strip speculum 9, and the radius of curvature absolute value of tail mirror end strip speculum 8 and the radius of curvature absolute value sum of output strip speculum 9 are the long twice in resonant cavity chamber.
The resonant cavity that adopts as the present invention be the side coupling shown in Fig. 5 .1 export concavo-convex unsteady cavity structure the time; Tail mirror end strip speculum 8 is the strip concave mirror; Output strip speculum 9 is the strip convex reflecting mirror; Full impregnated outgoing mirror 10 is positioned at a side of output strip speculum 9, and the radius of curvature absolute value of tail mirror end strip speculum 8 deducts that the value of gained is the long twice in resonant cavity chamber behind the radius of curvature absolute value of output strip speculum 9.
When resonant cavity that the present invention adopts be shown in Fig. 5 .2 in the middle of coupling export concavo-convex unsteady cavity structure the time; Tail mirror end strip speculum 8 is the strip concave mirror; Output strip speculum 9 is the strip convex reflecting mirror; Full impregnated outgoing mirror 10 is positioned at the centre of output strip speculum 9, and the radius of curvature absolute value of tail mirror end strip speculum 8 deducts that the value of gained is the long twice in resonant cavity chamber behind the radius of curvature absolute value of output strip speculum 9.
The tail mirror end strip speculum 8 that the present invention adopts and the concave surface or the convex surface of output strip speculum 9 can be spheres, also can be cylinders.Each eyeglass all has water collar 11, and intake-outlet 7 is all arranged.
The resonant cavity that the present invention adopts is the strip unsteady cavity; A direction is a unsteady cavity, and the another one direction is because spacing is bigger, and light beam is freely to transmit; And cool off the non-steady waveguide hybrid chamber that slab laser adopts unlike diffusion; Do not have waveguide loss and Waveguide Coupling-loss, arc chamber need not be designed to waveguiding structure, so the Structural Design Requirement of arc chamber is low.And output beam of the present invention can be squarish light beam or circular light beam, does not need complicated shaping light channel structure, can directly use.
As shown in Figure 6, in order to improve the cooling effect of arc chamber, water-cooling channel 3 has been designed to the approximately equalised series connection water channel of sectional area, makes the unimpeded dead angle of not staying of current.If when the area that arc chamber need cool off is big, can design a plurality of series connection water channels, each series connection water channel parallel connection is used or independent water supply.The present invention also can use the mode of whole cooling.
The above is preferred embodiment of the present invention, but the present invention should not be confined to the disclosed content of this embodiment and accompanying drawing.So everyly do not break away from the equivalence of accomplishing under the disclosed spirit of the present invention or revise, all fall into the scope of the present invention's protection.
Claims (9)
1. gas laser; Comprise arc chamber, sparking electrode (2), water-cooling channel (3) and air storage chamber (4); Water-cooling channel (3) is distributed on the said arc chamber outer wall; Air storage chamber (4) is positioned at outside the water-cooling channel (3); Communicate through muffler (6) between said arc chamber and the air storage chamber (4), it is characterized in that: arc chamber is for to constitute a hermetic cavity chamber by discharging chamber (1), tail mirror end strip speculum (8), output strip speculum (9) and full impregnated outgoing mirror (10) jointly, the lath-shaped hollow-core construction that discharging chamber (1) is processed by nonmetallic materials; Tail mirror end strip speculum (8) and output strip speculum (9) lay respectively at outside the front and back ends of discharging chamber (1); Tail mirror end strip speculum (8), output strip speculum (9) and full impregnated outgoing mirror (10) are formed laserresonator, and this laserresonator is the strip unsteady cavity, does not have waveguide loss and Waveguide Coupling-loss; The centre or a side of output strip speculum (9) leave light hole, and being shaped as of light hole is square or circular, and full impregnated outgoing mirror (10) is positioned at the light hole place, and as laser output window; Output beam is direct applied squarish light beam or circular light beam; Sparking electrode (2) is positioned at the forward and backward two ends of discharging chamber (1), perhaps in the and arranged on left and right sides.
2. gas laser according to claim 1; It is characterized in that: discharging chamber (1) is a lath-shaped, and its cross section is a rectangle, perhaps intermediate narrower, the wide divergent shape in both sides; The spindle shape wide in the middle of perhaps, that both sides are narrow, perhaps wide trapezoidal of narrow, the other side of a side.
3. gas laser according to claim 1; It is characterized in that: when sparking electrode (2) is positioned at the forward and backward two ends of discharging chamber (1), sparking electrode (2) be in hollow rectangle electrode, zigzag hollow rectangle electrode, segmentation pellet electrode and the multi-needle electrode any or appoint several kinds combination.
4. gas laser according to claim 1; It is characterized in that: when sparking electrode (2) is positioned at the and arranged on left and right sides of discharging chamber (1), sparking electrode (2) be in plate electrode, multistylus electrode, porous plate electrode, spininess plate electrode (17) and the hollow rectangle electrode (18) any or appoint several kinds combination.
5. according to claim 3 or 4 described gas lasers, it is characterized in that: sparking electrode (2) is bending or rugosity.
6. gas laser according to claim 1; It is characterized in that: tail mirror end strip speculum (8) is the strip concave mirror; Output strip speculum (9) is the strip concave mirror; Full impregnated outgoing mirror (10) is positioned at a side of output strip speculum (9), and the radius of curvature absolute value sum of the radius of curvature absolute value of tail mirror end strip speculum (8) and output strip speculum (9) is the long twice in resonant cavity chamber.
7. gas laser according to claim 1; It is characterized in that: tail mirror end strip speculum (8) is the strip concave mirror; Output strip speculum (9) is the strip convex reflecting mirror; Full impregnated outgoing mirror (10) is positioned at a side of output strip speculum (9), and the radius of curvature absolute value of tail mirror end strip speculum (8) deducts that the value of gained is the long twice in resonant cavity chamber behind the radius of curvature absolute value of output strip speculum (9).
8. gas laser according to claim 1; It is characterized in that: tail mirror end strip speculum (8) is the strip concave mirror; Output strip speculum (9) is the strip convex reflecting mirror; Full impregnated outgoing mirror (10) is positioned at the centre of output strip speculum (9), and the radius of curvature absolute value of tail mirror end strip speculum (8) deducts that the value of gained is the long twice in resonant cavity chamber behind the radius of curvature absolute value of output strip speculum (9).
9. gas laser according to claim 1 is characterized in that: water-cooling channel (3) is that one or more sectional area equates or approximately equalised series connection water channel.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101141367A CN101789559B (en) | 2010-02-10 | 2010-02-10 | Gas laser |
| PCT/CN2011/070378 WO2011097974A1 (en) | 2010-02-10 | 2011-01-19 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101141367A CN101789559B (en) | 2010-02-10 | 2010-02-10 | Gas laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101789559A CN101789559A (en) | 2010-07-28 |
| CN101789559B true CN101789559B (en) | 2012-06-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101141367A Expired - Fee Related CN101789559B (en) | 2010-02-10 | 2010-02-10 | Gas laser |
Country Status (2)
| Country | Link |
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| CN (1) | CN101789559B (en) |
| WO (1) | WO2011097974A1 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101789559B (en) * | 2010-02-10 | 2012-06-20 | 华中科技大学 | Gas laser |
| CN102354905A (en) * | 2011-10-19 | 2012-02-15 | 华中科技大学 | Radio-frequency excited gas laser |
| CN103117501A (en) * | 2013-01-28 | 2013-05-22 | 江苏益林金刚石工具有限公司 | Cooling water flow channel structure of electrode of radiofrequency slab CO<2> laser device |
| CN103715592A (en) * | 2013-12-31 | 2014-04-09 | 丁健君 | Compact type glass structure medium-power carbon dioxide laser |
| CN105684243A (en) * | 2014-04-01 | 2016-06-15 | 北京热刺激光技术有限责任公司 | Radio frequency excited gas laser and preparation method therefor |
| CN105093401A (en) * | 2015-08-25 | 2015-11-25 | 中国科学院合肥物质科学研究院 | Adjustable temperature field distribution apparatus for optical waveguide |
| US9634455B1 (en) * | 2016-02-16 | 2017-04-25 | Cymer, Llc | Gas optimization in a gas discharge light source |
| CN110797749B (en) * | 2019-11-07 | 2021-10-08 | 深圳市神飞电子科技有限公司 | High-voltage excitation circuit of laser tube |
| CN111934172A (en) * | 2020-09-10 | 2020-11-13 | 南通斯派特激光科技有限公司 | Lath type carbon dioxide glass tube laser |
| CN113520590A (en) * | 2021-06-30 | 2021-10-22 | 武汉高科恒大光电股份有限公司 | Carbon dioxide laser therapeutic machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85205574U (en) * | 1985-12-27 | 1987-06-24 | 南京工学院 | Steam laser |
| CN1545173A (en) * | 2003-11-24 | 2004-11-10 | 迅 周 | Middle power carbon dioxide laser tube |
| CN2862437Y (en) * | 2005-10-10 | 2007-01-24 | 黄建国 | Enclosed type carbon dioxide laser |
| CN101060226A (en) * | 2006-04-18 | 2007-10-24 | 王向阳 | Photocatalytic sealed CO2 laser tube |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL156273B (en) * | 1967-06-01 | 1978-03-15 | Philips Nv | DEVICE FOR GENERATING STIMULATED INFRARED EMISSION, IRASER. |
| JPS58204583A (en) * | 1982-05-24 | 1983-11-29 | Matsushita Electric Ind Co Ltd | Sealed laser tube |
| CN85100563B (en) * | 1985-04-01 | 1987-03-04 | 南京工学院 | High-power He-Ne laser |
| CN86200785U (en) * | 1986-01-29 | 1987-01-14 | 南京工学院 | Gas lasar composed of discharge tube with gradient |
| CN87203941U (en) * | 1987-03-17 | 1987-11-25 | 江苏省激光研究所 | Auto-focusing laser |
| US7260134B2 (en) * | 2004-02-06 | 2007-08-21 | Coherent, Inc. | Dielectric coupled CO2 slab laser |
| US7583717B2 (en) * | 2004-08-30 | 2009-09-01 | Videojet Technologies Inc | Laser system |
| CN2901641Y (en) * | 2006-04-18 | 2007-05-16 | 王向阳 | Light catalytic seal isolated CO2 laser tube |
| CN1889312A (en) * | 2006-07-19 | 2007-01-03 | 中国科学院等离子体物理研究所 | Large power continuous wave DCN laser |
| CN201667485U (en) * | 2010-02-10 | 2010-12-08 | 华中科技大学 | Gas laser |
| CN101789559B (en) * | 2010-02-10 | 2012-06-20 | 华中科技大学 | Gas laser |
-
2010
- 2010-02-10 CN CN2010101141367A patent/CN101789559B/en not_active Expired - Fee Related
-
2011
- 2011-01-19 WO PCT/CN2011/070378 patent/WO2011097974A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85205574U (en) * | 1985-12-27 | 1987-06-24 | 南京工学院 | Steam laser |
| CN1545173A (en) * | 2003-11-24 | 2004-11-10 | 迅 周 | Middle power carbon dioxide laser tube |
| CN2862437Y (en) * | 2005-10-10 | 2007-01-24 | 黄建国 | Enclosed type carbon dioxide laser |
| CN101060226A (en) * | 2006-04-18 | 2007-10-24 | 王向阳 | Photocatalytic sealed CO2 laser tube |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011097974A1 (en) | 2011-08-18 |
| CN101789559A (en) | 2010-07-28 |
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