CN103078239B - Microwave gas excitation device and method - Google Patents
Microwave gas excitation device and method Download PDFInfo
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- CN103078239B CN103078239B CN201210579501.0A CN201210579501A CN103078239B CN 103078239 B CN103078239 B CN 103078239B CN 201210579501 A CN201210579501 A CN 201210579501A CN 103078239 B CN103078239 B CN 103078239B
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Abstract
The invention discloses a microwave gas excitation device and a microwave gas excitation method. High-power microwave pulse generated by a microwave source enters a microwave resonant cavity of a cross structure through an output coupling waveguide to form standing wave distribution; a hollow photonic crystal fiber is placed in an intersection region with the strongest field distribution; the two ends of the optical fiber are connected with a gas cavity through a sealing device respectively; and a resonant cavity sheet is arranged close to an optical fiber port in the gas cavity and is provided with two ports which are used as a vacuuming port and a gas inlet respectively. According to the device, no large-size gas storage cylinder or gas circulating system is arranged, the device can be changed to be small and skillful, no discharge electrode is arranged, no discharge powder is produced so as not to pollute working gas, the life of the working gas and an optical element can be prolonged, the working voltage of the microwave source is relatively low, the safety coefficient when the device is applied on some occasions is relatively high, the quality of a light beam can be improved through optimization of the light beam by the hollow photonic crystal optical fiber, and the application with high light beam quality requirement is met.
Description
Technical field
The present invention relates to a kind of laser aid, particularly relate to a kind of device and method of microwave excited gas.
Background technology
Excimer laser has more application in fields such as industry, medical treatment, scientific researches.Practical quasi-molecule device generally adopts discharge excitation, the quasi-molecule device of the companies such as the U.S. Coherent and Cymer as larger in current sales volume.The excimer laser device that some macro-energy export adopts electron beam excitation, as the excimer laser system etc. of Sprite and the Titania device of the Nike device of the Aurora device in U.S. Los Alamos laboratory, US Naval Research Laboratory, Britain's Rutherford experiment room, the Ashura device of NEC technical research institute, daylight device of China and Flash II pumping.The common feature of these main flow quasi-molecule devices is: one, have the gas receiver that volume is larger; Two, metal energy injection device in chamber, easily wearing and tearing produce Substances Pollution working gas and the optical elements such as dust; Two, driving source comprises high-pressure installation, and structure is more complicated; Three, intracavity reflecting number of times is little, and output beam quality is poor, and special applications needs process; Four, output pulse width is narrower, generally at tens ns to tens ns.Conventional excimer laser device, due to its design feature and drive characteristic, does not possess some output characteristic.
Summary of the invention
The object of the invention is exactly the defect in order to make up prior art, provides a kind of device and method of the microwave excited gas using hollow-core photonic crystal fiber as discharge cavity.
The present invention is achieved by the following technical solutions:
A kind of device of microwave excited gas, include microwave source, described microwave source is connected with cross structure microwave cavity by exporting coupled waveguide, described cross structure microwave cavity is by two measure-alike orthogonal resonant cavities placing composition of waveguide, hollow-core photonic crystal fiber is placed with at two waveguide infalls of cross structure microwave cavity, and the two ends of hollow-core photonic crystal fiber all pass cross structure microwave cavity, the two ends of described hollow-core photonic crystal fiber are sealedly connected with air chamber respectively, described air chamber has vacuum orifice and gas feed, described vacuum orifice connects vacuum pump, in air chamber, the near ports of hollow-core photonic crystal fiber is provided with resonant cavity sheet.
A kind of method of microwave excited gas, the microwave pulse produced by microwave source enters in cross structure microwave cavity through output coupled waveguide and forms standing wave distribution, hollow-core photonic crystal fiber is placed in the intersection region that the field distribution of cross structure microwave cavity is the strongest, microwave pulse is injected in the air chamber of both sides through hollow-core photonic crystal fiber, gas is injected into microwave excitation, when microwave excitation power density reaches more than 100KW/cm3, realize quasi-molecule running, realize excimer laser oscillation by the resonant cavity sheet of the near ports of hollow-core photonic crystal fiber to export.
Described air chamber is also connected to air pressure detector, for detecting the gas pressure intensity in air chamber.
Resonant cavity sheet in one of them air chamber is output cavity sheet, and the resonant cavity sheet in another air chamber is the resonant cavity sheet that is all-trans.
Advantage of the present invention is: the gas receiver and the gas-circulating system that 1, do not have large volume, and device can become very small and exquisite; 2, do not have sparking electrode, can not produce electric discharge dust pollution working gas, working gas and optical element life-span can be extended; 3, microwave source operating voltage is relatively low, and some applications coefficient of safety is relatively high; 4, hollow-core photonic crystal fiber can improve beam quality to the optimization of light beam, meets and requires high application to beam quality; 5, the flexible optical circuit of optical fiber exports, and can use very easily in medical treatment, special industry processing and other fields; 6, microwave source output pulse is wide, hundreds of ns can be reached, mode-locking technique can be utilized to realize ps level short pulse export, in addition hollow-core photonic crystal fiber may have the output of high light beam quality, this kind of pulse as the seed light source of high-quality, can adopt MOPA structure to amplify and can obtain high-quality Laser output.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present invention.
Fig. 2 is cross structure microwave cavity structural representation.
Embodiment
As Fig. 1, shown in 2, a kind of device of microwave excited gas, include microwave source 1, described microwave source 1 is connected with cross structure microwave cavity 3 by exporting coupled waveguide 2, described cross structure microwave cavity 3 is by two measure-alike orthogonal resonant cavities placing composition of waveguide 4, hollow-core photonic crystal fiber 5 is placed with at two waveguide 4 infalls of cross structure microwave cavity 3, and the two ends of hollow-core photonic crystal fiber 5 all pass cross structure microwave cavity 3, the two ends of described hollow-core photonic crystal fiber 5 are sealedly connected with air chamber 6 respectively, described air chamber 6 has vacuum orifice 7 and gas feed 8, described vacuum orifice 7 connects vacuum pump 11, in air chamber 6, the near ports of hollow-core photonic crystal fiber 5 is provided with resonant cavity sheet 9.
A kind of method of microwave excited gas, the microwave pulse produced by microwave source 1 enters in cross structure microwave cavity 3 through output coupled waveguide 2 and forms standing wave distribution, hollow-core photonic crystal fiber 5 is placed in the intersection region that the field distribution of cross structure microwave cavity 3 is the strongest, microwave pulse is injected in the air chamber 6 of both sides through hollow-core photonic crystal fiber 5, gas is injected into microwave excitation, when microwave excitation power density reaches more than 100KW/cm3, realize quasi-molecule running, realize excimer laser oscillation by the resonant cavity sheet 9 of the near ports of hollow-core photonic crystal fiber 5 to export.
Described air chamber 6 is also connected to air pressure detector 10, for detecting the gas pressure intensity in air chamber 6.
Resonant cavity sheet 9 in one of them air chamber 6 is output cavity sheet, and the resonant cavity sheet 9 in another air chamber 6 is the resonant cavity sheet that is all-trans.
Hollow-core photonic crystal fiber 5 structure is different from general fiber waveguide, and be that the hollow in Two Dimensional Uniform period profile distributes outside core region, its Waveguide Mechanism based on photonic band gap effects and transmission characteristic, make hollow-core photonic crystal fiber 5 have extremely low loss.
Cross structure microwave cavity 3 is that measure-alike orthogonal placement of two Luciola substriata 4 forms, and microwave forms vibration in two chambeies.At the infall of waveguide, the orthogonal area of two waveguides can obtain intensity greatly, the very big region of standing wave of good evenness, and this region is placed gas active device and will be obtained larger energy coupling efficiency.
The employing hollow-core photonic crystal fiber 5 of the present invention's design is as discharge cavity, the device producing microwave in conjunction with microwave source 1, except being applied to quasi-molecule class laser, can also be applied to such as He-Ne Lasers, carbon dioxide, gas laser that nitrogen molecular equal excitation power density requirements is lower than quasi-molecule.
Claims (1)
1. the method for a microwave excited gas, it is characterized in that: the device of the microwave excited gas that the method utilizes, include microwave source, described microwave source is connected with cross structure microwave cavity by exporting coupled waveguide, described cross structure microwave cavity is by two measure-alike orthogonal resonant cavities placing composition of waveguide, hollow-core photonic crystal fiber is placed with at two waveguide infalls of cross structure microwave cavity, and the two ends of hollow-core photonic crystal fiber all pass cross structure microwave cavity, the two ends of described hollow-core photonic crystal fiber are sealedly connected with air chamber respectively, described air chamber has vacuum orifice and gas feed, described vacuum orifice connects vacuum pump, in air chamber, the near ports of hollow-core photonic crystal fiber is provided with resonant cavity sheet, described air chamber is also connected to air pressure detector, resonant cavity sheet in one of them air chamber is output cavity sheet, and the resonant cavity sheet in another air chamber is the resonant cavity sheet that is all-trans,
The method of microwave excited gas: the microwave pulse produced by microwave source enters in cross structure microwave cavity through output coupled waveguide and forms standing wave distribution, hollow-core photonic crystal fiber is placed in the intersection region that the field distribution of cross structure microwave cavity is the strongest, microwave pulse is injected in the air chamber of both sides through hollow-core photonic crystal fiber, gas is injected into microwave excitation, when microwave excitation power density reaches 100KW/cm
3time above, realize quasi-molecule running, realize excimer laser oscillation by the resonant cavity sheet of the near ports of hollow-core photonic crystal fiber and export.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201210579501.0A CN103078239B (en) | 2012-12-27 | 2012-12-27 | Microwave gas excitation device and method |
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| CN201210579501.0A CN103078239B (en) | 2012-12-27 | 2012-12-27 | Microwave gas excitation device and method |
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| CN103078239A CN103078239A (en) | 2013-05-01 |
| CN103078239B true CN103078239B (en) | 2015-06-24 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105470807A (en) * | 2014-09-09 | 2016-04-06 | 华东师范大学 | Carbon dioxide infrared hollow-core fiber laser and manufacturing method thereof |
| CN104577683A (en) * | 2015-01-12 | 2015-04-29 | 中国科学院合肥物质科学研究院 | Resonant cavity of hollow-core photonic crystal fiber gas laser |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102421237A (en) * | 2010-09-16 | 2012-04-18 | 国立大学法人名古屋大学 | Plasma generating apparatus, plasma processing apparatus and plasma processing method |
| CN203071386U (en) * | 2012-12-27 | 2013-07-17 | 中国科学院安徽光学精密机械研究所 | Device exciting gas through microwaves |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| FR2974680B1 (en) * | 2011-04-29 | 2014-04-11 | Univ Limoges | DEVICE FOR EXCITATION OF A GAS COLUMN CONFINED IN A HOLLOW HEART OPTICAL FIBER |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102421237A (en) * | 2010-09-16 | 2012-04-18 | 国立大学法人名古屋大学 | Plasma generating apparatus, plasma processing apparatus and plasma processing method |
| CN203071386U (en) * | 2012-12-27 | 2013-07-17 | 中国科学院安徽光学精密机械研究所 | Device exciting gas through microwaves |
Non-Patent Citations (2)
| Title |
|---|
| Prospects on hollow-core photonic crystal fibers for unconventional fibered laser sources;Raphael Jamier等;《Transparent Optical Networks (ICTON),2011 13th International Conference on》;20110630;第3页-第4页 3.Used of HCPCFs for the development of unconventional laser sources, 3.2 Towards a gas laser source based on a glow discharge、图3 * |
| 全光纤型空芯光子晶体光纤高压气体腔;孙青等;《中国激光》;20080731;第35卷(第7期);第1029-1034页 * |
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