CN105470807A - Carbon dioxide infrared hollow-core fiber laser and manufacturing method thereof - Google Patents
Carbon dioxide infrared hollow-core fiber laser and manufacturing method thereof Download PDFInfo
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- CN105470807A CN105470807A CN201410455727.9A CN201410455727A CN105470807A CN 105470807 A CN105470807 A CN 105470807A CN 201410455727 A CN201410455727 A CN 201410455727A CN 105470807 A CN105470807 A CN 105470807A
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Abstract
The invention discloses a carbon dioxide infrared hollow-core fiber laser comprising a hollow-core fiber which is divided into a resonant cavity and a conduction part which is arranged to be integrated with the resonant cavity, wherein the resonant cavity is arranged in a straight, folding or winding shape; a total reflection mirror which is installed at one end of the resonant cavity; a semi-reflecting mirror which is installed at the other end of the resonant cavity; gas work material which fills in the resonant cavity; and an excitation system which is arranged between the total reflection mirror and the semi-reflecting mirror. The excitation system is a radio frequency excitation system, a high-voltage DC excitation system or a microwave excitation system and excites the gas work material in a non-pumping light source excitation mode. Energy level transition of the gas work material occurs so that population inversion is realized and laser is generated in the resonant cavity, and laser is incident into the condition part to be conducted through the semi-reflecting mirror. Manufacturing cost can be reduced by miniaturized equipment, and transmission precision and stability in the actual application of CO2 laser can be enhanced. The invention also discloses a manufacturing method of the carbon dioxide infrared hollow-core fiber laser.
Description
Technical field
The present invention relates to photoelectron and devices field, particularly relate to carbon dioxide infrared hollow optical fiber laser and preparation method thereof.
Background technology
LONG WAVE INFRARED electromagnetic wave, especially wavelength are in the CO of the second atmospheric window (8-14 μm)
2laser occupies critical role in military and civilian.CO
2laser line enriches, and about have 140 spectral lines, and line width is narrow, CO in addition in 9.1-11.3 micrometer range
2energy of lasers conversion efficiency and power output higher, this laser can be applied to active infra-red laser acquisition, the medical treatment of laser life, low-gap semiconductor electron spin regulation and control, laser weapon, laser ignition, forming materials processing and the field such as LONG WAVE INFRARED information transmission.
Carbon dioxide laser is with CO
2gas is as the gas laser of gas operation material.The box carbon dioxide laser of tradition generally adopts hard glass, pottery or the metal material of thickness number millimeter to do rectangularity or circular cavity structure, and adds upper reflector and half-reflecting mirror at two ends, is filled with CO
2and other assist gass, make gas discharge realize population inversion Output of laser by high voltage direct current, radio frequency, microwave equal excitation mode.The volume of the box carbon dioxide laser of tradition is about several cubic decimeters to several cubic metres, and weight is about tens of kilograms to thousands of kilograms.The glass of what the resonant cavity of box carbon dioxide laser inside adopted is hard, pottery or metallic cavity, the power output of carbon dioxide laser is directly proportional to its length of excited target in resonant cavity, therefore longer glass, pottery or metallic cavity must be selected in order to obtain high-power carbon dioxide laser, these cavitys cannot bend itself, therefore further increase the volume of box carbon dioxide laser.Although adopt many glass, pottery or metal tubes can reduce volume side by side, but need to arrange a series of speculum change light path at the end of every root pipe, make complex structure.Box carbon dioxide laser realizes Laser output and conduction by external optical fiber.Because carbon dioxide laser is high energy laser, therefore require that box carbon dioxide laser is accurately coupled with optical fiber during conduction, otherwise laser leakage or optical fiber can be caused to burn, reduce the stability of use system.Further, due to CO
2laser is in the long wave limit of 9.1-11.3 micron, can not transmit with the silica fiber of routine.Light-conducting arm is one of its main transmission means, but its flexibility is subject to larger restriction.
For many years, scientists is also always for CO
2the transmission problem of laser has carried out the research of infrared real core fibre (sulfide, halide and fluoride fiber), hollow-core fiber and photonic crystal fiber.Wherein hollow-core fiber take air as transmission medium, and structure is simple, and endless reflects.Hollow-core fiber has leak type and fully-reflected type two kinds.Leak type hollow-core fiber relies on the mirror-reflection of metal pair light to realize CO
2the transmission of laser.Fully-reflected type hollow-core fiber is by air directive refractive index (n according to light
r) reflectance coating that is less than 1 produces the principle of total reflection and realize CO
2the transmission of laser.Dielectric/metal leak type hollow-core fiber and the total reflection such as aluminium oxide, the germanium oxide hollow-core fiber of current exploitation have also reached practical degree.Generally as outer light path and traditional box CO in actual use using these optical fiber
2laser docks, and realizes beam Propagation.Because outer light path is in use easier to the impact being subject to extraneous vibration and impact, every secondary device starts or all will carry out light path adjustment in use procedure, reduces the stability of equipment work.
In recent years, the appearance of real core fibre laser achieves the miniaturization of laser and intensive, almost can realize the generation of laser and " slitless connection " of conduction, improve stability and the accuracy of equipment work.But the fiber laser of at present exploitation is mainly based on the real core glass optical fiber of doped rare earth element and wavelength is in near-infrared, such as S-wave band (1460 ~ 1530nm), C-wave band (1530 ~ 1565nm), L-wave band (1565 ~ 1610nm) etc., be all form high-power laser by pump light as excitation.Also do not utilize gas operation material at present, realize in the mode of the non-pumped light source excitations such as radiofrequency signal the fiber laser exporting 9.1-11.3 hum silicon dioxide carbon laser.
Summary of the invention
The present invention proposes a kind of carbon dioxide infrared hollow optical fiber laser, comprising: hollow-core fiber, described hollow-core fiber is divided into resonant cavity, and with the conducting part of the integral setting of described resonant cavity; Described resonant cavity straighe, folding or winding form setting; Be arranged on the completely reflecting mirror of one end of described resonant cavity; Be arranged on the half-reflecting mirror of the described resonant cavity other end; Be filled in the gas operation material in described resonant cavity; And the excitation system be arranged between described completely reflecting mirror and described half-reflecting mirror; Described excitation system is radio frequency excitation system, high voltage direct current excitation system or microwave excitation system; Described excitation system produces excitation in the mode of non-pumped light source excitation to described gas operation material, described gas operation material generation energy level transition realizes population inversion and produce laser in described resonant cavity, and half-reflecting mirror described in described laser light incides in described conducting part and conducts.
In carbon dioxide infrared hollow optical fiber laser of the present invention, described hollow-core fiber is total reflection hollow-core fiber, or the combination of total reflection hollow-core fiber and electrolyte/metal leakage type hollow-core fiber; Reflective film material in described total reflection hollow-core fiber is the material being less than 1 in carbon dioxide laser wavelength place refractive index, comprises germanium oxide or aluminium oxide.
In carbon dioxide infrared hollow optical fiber laser of the present invention, described radio frequency excitation system is arranged on the outside of described resonant cavity, described high voltage direct current excitation system is arranged on the inside and outside of described resonant cavity, and described microwave excitation Operation system setting is in the outside of described resonant cavity.
In carbon dioxide infrared hollow optical fiber laser of the present invention, described hollow-core fiber is provided with the first cutting ferrule and/or the second cutting ferrule further; Described first cutting ferrule is used for described completely reflecting mirror to be fixed in described resonant cavity, and described second cutting ferrule is used for described half-reflecting mirror to be fixed in described resonant cavity also coaxially to connect described resonant cavity and described conducting part.
In carbon dioxide infrared hollow optical fiber laser of the present invention, be positioned at described conducting part and be provided with condenser lens further for the port of Output of laser.
In carbon dioxide infrared hollow optical fiber laser of the present invention, described resonant cavity is provided with aperture further, described aperture supplements described gas operation material for connecting wireway in described resonant cavity.
The invention allows for a kind of manufacture method of carbon dioxide infrared hollow optical fiber laser, comprise the steps:
Step one: half-reflecting mirror is set in the inside of hollow-core fiber, at a port of described hollow-core fiber, completely reflecting mirror is set, described completely reflecting mirror and described half-reflecting mirror form resonant cavity in described hollow-core fiber, form conducting part with the residue hollow-core fiber of the integral setting of described resonant cavity; Described resonant cavity straighe, folding or winding form setting;
Step 2: insufflation gas operation material in described resonant cavity;
Step 3: arrange excitation system in the outside of described resonant cavity and/or inside, described excitation system is radio frequency excitation system, high voltage direct current excitation system or microwave excitation system.
In the manufacture method of carbon dioxide infrared hollow optical fiber laser of the present invention, the wall of described resonant cavity being provided with aperture, in described resonant cavity, supplementing described gas operation material for connecting wireway.
In the manufacture method of carbon dioxide infrared hollow optical fiber laser of the present invention, on described hollow-core fiber, the outer setting being positioned at described completely reflecting mirror has the first cutting ferrule, for being connected with one end of described resonant cavity by described completely reflecting mirror; The outer setting of described half-reflecting mirror has the second cutting ferrule, is fixed in described resonant cavity by described half-reflecting mirror.
In the manufacture method of carbon dioxide infrared hollow optical fiber laser of the present invention, the port for Output of laser being positioned at described conducting part is provided with condenser lens.
Beneficial effect of the present invention comprises: a kind of carbon dioxide infrared hollow optical fiber of the present invention laser directly adopts hollow-core fiber as agent structure, utilize and realize optical resonator and laser beam conduction portion in one in inside configuration, and hollow-core fiber is flexible, further simplify the structure of fiber laser, make it have miniaturized advantage, avoid the problems such as optical coupled that traditional box carbon dioxide laser and external beam conducting system be separated and bring is bad and unstable simultaneously, can CO be improved
2transmission precision in laser practical application and stability.
Accompanying drawing explanation
Fig. 1 is the structural representation of carbon dioxide infrared hollow optical fiber laser in the present invention.
Fig. 2 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 1.
Fig. 3 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 2.
Fig. 4 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 3.
Fig. 5 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 4.
Fig. 6 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 5.
Fig. 7 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 6.
Fig. 8 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 7.
Fig. 9 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 8.
Figure 10 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 9.
Figure 11 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 10.
Figure 12 is the structural representation of carbon dioxide infrared hollow optical fiber laser in embodiment 11.
Figure 13 is the structural representation of gas operation material filling device in embodiment.
Embodiment
In conjunction with following specific embodiments and the drawings, the present invention is described in further detail.Implement process of the present invention, condition, experimental technique etc., except the following content mentioned specially, be universal knowledege and the common practise of this area, the present invention is not particularly limited content.
As shown in Figure 1, a kind of carbon dioxide infrared hollow optical fiber of the present invention laser is used for realizing producing in hollow-core fiber and conducting exporting CO
2laser, carbon dioxide infrared hollow optical fiber laser of the present invention comprises hollow-core fiber 1, and hollow-core fiber 1 is divided into resonant cavity 11 and the conducting part 12 of integral setting.Resonant cavity 11 arranges with conducting part 12 is coaxial and is communicated with, resonant cavity 11 straighe, folding or winding form setting.The length and width of resonant cavity 11 or radius are all as the criterion with the size that can realize, and simply change the length of resonant cavity 11, width or radius and all belong to design of the present invention.The two ends of resonant cavity 11 are provided with completely reflecting mirror 2 and half-reflecting mirror 3; Excitation system 7 is installed between completely reflecting mirror 2 and half-reflecting mirror 3 and is filled with gas operation material 6 in resonant cavity 11.Hollow-core fiber 1 also can be divided into resonant cavity 11 and conducting part 12 two parts, segmentation portion is merged after arranging completely reflecting mirror 2 and half-reflecting mirror 3 in resonant cavity 11, and resonant cavity 11 and conducting part are coaxially arranged.Because resonant cavity 11 can near seamless dock with the cut place of conducting part 12, therefore still the good degree of coupling can be kept.
Hollow-core fiber 1 is total reflection hollow-core fiber, or the combination of total reflection hollow-core fiber and electrolyte/metal leakage type hollow-core fiber; The reflector material of total reflection hollow-core fiber comprises germanium oxide or aluminium oxide etc.Preferably, the interior diameter of hollow-core fiber 1 is 0.8-2 millimeter, and wall thickness is 50-150 micron.Hollow-core fiber 1 length is good in 1-3 rice.
Completely reflecting mirror 2 is gold-plated speculum, and half-reflecting mirror 3 is the partially reflecting mirror that germanium or GaAs grind.Completely reflecting mirror 2 and half-reflecting mirror 3 are not limited only to be made up of above-mentioned material, and the other materials that those skilled in the art can expect all should be included.
Gas operation material 6 in resonant cavity 11 is mainly carbon dioxide and assist gas nitrogen, helium etc., an aperture is dug in advance in one end that resonant cavity 11 is connected with completely reflecting mirror 2, and be connected (see Figure 13) with the wireway 108 of valve 109 with one, by gas operation material 6 by this passage inject resonant cavity 11 inner after and valve 109 is closed sealing.Utilize this wireway 108 can in use to make-up gas operation material 6 in resonant cavity 11.Wherein, arrange heat abstractor and shell thereof further in the outside of resonant cavity 11, heat abstractor comprises the assembly such as fin and fan.Because heat abstractor and shell all do not relate to inventive point of the present invention, therefore do not described in detail in following embodiment part.
Excitation system 7 is radio frequency excitation system, high voltage direct current excitation system or microwave excitation system.Excitation system 7 is arranged on outside and/or the inner side of resonant cavity 11.See Fig. 2 to Figure 12, wherein excitation system 7 unsettled be arranged on resonant cavity 11 outside or the structure of inner side laser of the present invention all for convenience of description, in implementation process, excitation system 7 is fixed on the outside of resonant cavity 11 and/or the surface of inner side by modes such as bolts by those skilled in the art.Excitation system 7 by energy transferring to the gas operation material 6 in resonant cavity 11, carbon dioxide molecule is made to transit to high level from low-lying level, form population inversion and send laser, the laser of generation is entered into conducting part 12 by half-reflecting mirror 3 and conducts and the surface being outputted to laser work object by its conduction.
Hollow-core fiber 1 is provided with the first cutting ferrule 4 and the second cutting ferrule 5 further.Wherein, the first cutting ferrule 4 central authorities are provided with completely reflecting mirror 2, and the first cutting ferrule 4 is connected and fixed with one end of resonant cavity 11, for completely reflecting mirror 2 and resonant cavity 11 coaxially being fixed.The central authorities of the second cutting ferrule 5 are provided with half-reflecting mirror 3, and the other end of resonant cavity 11 is connected with conducting part 12 by the second cutting ferrule 5, for half-reflecting mirror 3 and resonant cavity 11 and conducting part 12 coaxially being fixed.
Present invention also offers the manufacture method of a kind of carbon dioxide infrared hollow light laser, it comprises the steps:
Step one: half-reflecting mirror 3 is set in the inside of hollow-core fiber 1, at a port of hollow-core fiber 1, completely reflecting mirror 2 is set, completely reflecting mirror 2 and half-reflecting mirror 3 form resonant cavity 11 in hollow-core fiber 1, form conducting part 12 with the remainder of the hollow-core fiber 1 of the integral setting of resonant cavity 11; That resonant cavity 11 can be arranged to is straight, the shape of folding or winding;
Step 2: insufflation gas operation material 6 in resonant cavity 11;
Step 3: arrange excitation system 7 in the outside of resonant cavity 11 and/or inside, excitation system 7 is radio frequency excitation system, high voltage direct current excitation system or microwave excitation system.
Wherein, the wall of resonant cavity 11 is provided with aperture 9.Aperture 9 is equipped with the wireway 108 of band valve 109, this wireway 108 is communicated with outside gas operation material filling device, and filling device is to make-up gas operation material 6 in resonant cavity 11.Aperture 9, to be arranged on the end of resonant cavity 11, is namely best near completely reflecting mirror 2.
The gas operation material filling device of the outside mentioned in this embodiment is illustrated in fig. 13 shown below.The gas operation material filling device mentioned in the present embodiment comprises vacuum pump 101, air accumulator 102, three-way pipe 103, valve 104, valve 105 and wireway 106 and 107.Vacuum pump 101 and air accumulator 102 are connected respectively by the first port of wireway 106 and wireway 107 and three-way pipe 103 and the second port, and the 3rd port of three-way pipe 103 is by being communicated with the aperture 9 on resonant cavity 11 with the wireway 108 of valve 109.First port of three-way pipe 103 and two branch roads of the second port are respectively equipped with two valves 104 and 105, are respectively used to control and being communicated with and closedown of vacuum pump 101 and air accumulator 102.To in resonant cavity 11 during blanketing gas operation material 6, valve-off 105, opens the valve 109 on valve 104 and wireway 108, utilizes vacuum pump 101 to be pumped into high vacuum state by resonant cavity 11.Valve-off 104 afterwards, open valve 109 and valve 105, allow gas operation material 6 under suction function, be filled with the inside of resonant cavity 11 from air accumulator 102.Then valve-off 105 and valve 109, ensures the gas operation material 6 of sealing certain volume in resonant cavity 11.
On hollow-core fiber 1, the outer setting being positioned at completely reflecting mirror 2 has the first cutting ferrule 4, for being connected completely reflecting mirror 2 one end with resonant cavity 11; The outer setting of half-reflecting mirror 3 has the second cutting ferrule 5, is fixed in resonant cavity 11 by half-reflecting mirror 3.
The port for Output of laser being positioned at conducting part 12 is provided with condenser lens 8, for focusing on the laser signal exported, can reduce the spot size that it exports further.Further, conducting part 12 inside between condenser lens 8 and half-reflecting mirror 3 is filled with gas operation material 6, condenser lens 8 is sealed by the cutting ferrule of outer setting, when the gas operation material 6 of resonant cavity 11 inside reduces, gas operation material 6 in conducting part 12 is flowed in resonant cavity 11 by gap reserved between half-reflecting mirror 3 and hollow-core fiber 1, realizes make-up gas operation material 6 in resonant cavity 11.
Below exemplify some specific embodiments to be further elaborated laser of the present invention and preparation method thereof; the numerical value that in the excitation system 7 that the present invention adopts, the size of electrode slice and the concrete data of power output all can be implemented with those skilled in the art is as the criterion, and size and power output that the basis of the present invention's design changes electrode slice are all comprised in protection scope of the present invention.
Embodiment 1
Consult Fig. 2, this specific embodiment hollow core optical fiber 1 is the quartz glass capillary hollow-core fiber 1 inner surface being formed with germanium oxide reflectance coating, optical fiber interior diameter 1.3 millimeters, wall thickness 0.07 millimeter, germanium oxide thickness 12 microns, length 2.5 meters.Hollow-core fiber is cut into two sections that length is 1.5 meters and 1 meter, respectively as resonant cavity 11 and conducting part 12.Completely reflecting mirror 2 is the quartzy speculum of surface gold-plating, and half-reflecting mirror 3 is partially reflecting mirrors that GaAs grinds.Completely reflecting mirror 2 and half-reflecting mirror 3 are processed into the disk of overall diameter 5 millimeters.Completely reflecting mirror 2 is embedded in and has in plane matrix circular hole first cutting ferrule 4 of interior diameter 5 millimeters, and the one end of being inserted in resonant cavity 11 realizes completely reflecting mirror 2 resonant cavity 11 is coaxially fastenedly connected.Half-reflecting mirror 3 to be embedded in the second cutting ferrule 5 and to be closely connected with resonant cavity 11 and conducting part 12 are coaxial by this cutting ferrule.Completely reflecting mirror 2, hollow-core fiber 1 and half-reflecting mirror 3 form resonant cavity 11, and conducting part 12 forms laser conduction part.First cutting ferrule 4 is opened the aperture 9 of a diameter 0.5mm and is connected by the resonant cavity inside, space reserved between completely reflecting mirror 2 resonant cavity 11 inwall, aperture and is with the breather pipe of valve to be communicated with.Utilize aerating device that gas operation material 6 is filled with resonant cavity 11 from wireway 108, and valve-off.Valve make-up gas operation material 6 can be opened again after gas consumption in resonant cavity.Directly over outside resonant cavity 11 and immediately below symmetrical place nickel electrode, partial resonance chamber 11 is clipped in the middle by electrode slice.Two electrodes and radio-frequency power supply are connected to form condenser type radio frequency discharge excitation system 7.
Embodiment 2
Consult Fig. 3, this specific embodiment hollow core optical fiber 1 is quartz glass capillary hollow-core fiber inner surface being formed with germanium oxide reflectance coating, in order to shorten the size of laser, utilizes the flexibility of hollow-core fiber to be arranged by resonant cavity 11 one-tenth takeup type.Coiled resonant cavity 11 can extend the length of gas operation material 6 excited target, improves CO
2the laser power of Laser output, resonant cavity 11 still can keep less volume simultaneously.
Resonant cavity 11 can adopt as the hollow-core fiber 1 in above-described embodiment 1 reels.In order to reduce the volume of takeup type ground resonant cavity 11 further, interior diameter and the wall thickness of hollow-core fiber 1 is reduced further in the present embodiment, the interior diameter of hollow-core fiber 1 is 0.8 millimeter, and wall thickness is 0.05 millimeter, and the interior diameter of hollow-core fiber 1 and wall thickness include but not limited to above-mentioned numerical value.
Completely reflecting mirror 2 is the Si mirror of surface gold-plating, and half-reflecting mirror 3 is partially reflecting mirrors that germanium grinds.Completely reflecting mirror 2 and half-reflecting mirror 3 are processed into the disk of overall diameter 4 millimeters.Because the interior diameter of hollow-core fiber 1 is less, for the consideration of manufacture craft feasibility, in the present embodiment, grind completely reflecting mirror 2 and the half-reflecting mirror 3 of overall diameter 4 millimeters, and be separately positioned in the first cutting ferrule 4 and the second cutting ferrule 5.
Consult Fig. 3, hollow-core fiber 1 is split into resonant cavity 11 and conducting part 12, and completely reflecting mirror 2 is fixed in the first cutting ferrule 4, and one end of resonant cavity 11 embeds the inside of the first cutting ferrule 4, docks with the surface of completely reflecting mirror.Half-reflecting mirror 3 is fixed in the second cutting ferrule 5, and the other end of resonant cavity 11 and one end of conducting part 12 embed in the second cutting ferrule 5 respectively, and resonant cavity 11 and conducting part 12 are coaxially arranged, and dock respectively at the seamless surface of half-reflecting mirror 3.
In first cutting ferrule 4 resonant cavity 11, cutter is installed with an aperture 9, and this aperture 9 is communicated with gas operation material filling device by the wireway 108 with valve 109, for make-up gas operation material 6 in resonant cavity 11.Directly over outside resonant cavity 11 and immediately below symmetrical place circular nickel electrode, partial resonance chamber 11 is clipped in the middle by electrode slice.Two electrodes and radio-frequency power supply are connected to form condenser type radio frequency discharge excitation system 7.
Embodiment 3
Consult Fig. 4, this specific embodiment hollow core optical fiber 1 is aluminium oxide total reflection hollow-core fiber, utilizes the flexibility of hollow-core fiber to be arranged on the inner sleeve of inner-outer sleeve cartridge type nickel capacitance electrode by resonant cavity 11 one-tenth takeup type.Inner-outer sleeve cartridge type capacitance electrode arranges and the position of hollow-core fiber coiling can be made more easily to fix, and radiofrequency signal covers more abundant to hollow-core fiber simultaneously, more abundant to the operation material excitation in hollow-core fiber 1.Coiled resonant cavity 11 can extend the length of gas operation material 6 excited target, improves CO
2the laser power of Laser output, resonant cavity 11 still can keep less volume simultaneously.
Resonant cavity 11 also can adopt as the hollow-core fiber 1 in above-described embodiment 1 reels.In order to reduce the volume of takeup type ground resonant cavity 11 further, interior diameter and the wall thickness of aluminium oxide hollow-core fiber 1 is reduced further in the present embodiment, the interior diameter of hollow-core fiber 1 is 0.8 millimeter, and wall thickness is 0.05 millimeter, and the interior diameter of hollow-core fiber 1 and wall thickness include but not limited to above-mentioned numerical value.
Completely reflecting mirror 2 is the Si mirror of surface gold-plating, and half-reflecting mirror 3 is partially reflecting mirrors that germanium grinds.Completely reflecting mirror 2 and half-reflecting mirror 3 are processed into the disk of overall diameter 4 millimeters.Because the interior diameter of hollow-core fiber 1 is less, for the consideration of manufacture craft feasibility, in the present embodiment, grind completely reflecting mirror 2 and the half-reflecting mirror 3 of overall diameter 4 millimeters, and be separately positioned in the first cutting ferrule 4 and the second cutting ferrule 5.
Consult Fig. 4, hollow-core fiber 1 is split into resonant cavity 11 and conducting part 12, and completely reflecting mirror 2 is fixed in the first cutting ferrule 4, and one end of resonant cavity 11 embeds the inside of the first cutting ferrule 4, docks with the surface of completely reflecting mirror.Half-reflecting mirror 3 is fixed in the second cutting ferrule 5, and the other end of resonant cavity 11 and one end of conducting part 12 embed in the second cutting ferrule 5 respectively, and resonant cavity 11 and conducting part 12 are coaxially arranged, and dock respectively at the seamless surface of half-reflecting mirror 3.
In first cutting ferrule 4 resonant cavity 11, cutter is installed with an aperture 9, and this aperture 9 is communicated with gas operation material filling device by the wireway 108 with valve 109, for make-up gas operation material 6 in resonant cavity 11.Nickel sleeve capacitance electrode in the circle of coiled resonant cavity 11 and inside and outside the outer placement respectively of circle, two electrodes and radio-frequency power supply are connected to form inside and outside sleeve condenser type radio frequency excitation system 7.
Embodiment 4
Consult Fig. 5, this specific embodiment hollow core optical fiber 1 is aluminium oxide total reflection hollow-core fiber, utilizes the flexibility of hollow-core fiber by collapsible for resonant cavity 11 one-tenth setting.In the present embodiment, the radio frequency electrode area of excitation system 7 is consistent with embodiment 1, and resonant cavity 11 adopts folding setting that excitation system 7 can be made to be activated to more gas operation material 6, improves CO
2the laser power of Laser output, can also keep the smaller size smaller of resonant cavity 11 simultaneously.
In the present embodiment, resonant cavity 11 have employed collapsible setting, in order to reduce the volume of folded resonator 11 further, interior diameter and the wall thickness of hollow-core fiber 1 is reduced further in the present embodiment, the interior diameter of hollow-core fiber 1 is 0.9 millimeter, wall thickness is 0.06 millimeter, and the interior diameter of hollow-core fiber 1 and wall thickness include but not limited to above-mentioned numerical value.
Completely reflecting mirror 2 is the Si mirror of surface gold-plating, and half-reflecting mirror 3 is partially reflecting mirrors that germanium grinds.Completely reflecting mirror 2 and half-reflecting mirror 3 are processed into the disk of overall diameter 4 millimeters.Because the interior diameter of hollow-core fiber 1 is less, for the consideration of manufacture craft feasibility, in the present embodiment, grind completely reflecting mirror 2 and the half-reflecting mirror 3 of overall diameter 4 millimeters, and be separately positioned in the first cutting ferrule 4 and the second cutting ferrule 5.
Consult Fig. 5, hollow-core fiber 1 is split into resonant cavity 11 and conducting part 12, and completely reflecting mirror 2 is fixed in the first cutting ferrule 4, and one end of resonant cavity 11 embeds the inside of the first cutting ferrule 4, docks with the surface of completely reflecting mirror 2.Half-reflecting mirror 3 is fixed in the second cutting ferrule 5, and the other end of resonant cavity 11 and one end of conducting part 12 embed in the second cutting ferrule 5 respectively, and resonant cavity 11 and conducting part 12 are coaxially arranged, and dock respectively at the seamless surface of half-reflecting mirror 3.
In first cutting ferrule 4 resonant cavity 11, cutter is installed with an aperture 9, and this aperture 9 is communicated with gas operation material filling device by the wireway 108 with valve 109, for make-up gas operation material 6 in resonant cavity 11.Directly over outside resonant cavity 11 and immediately below symmetrical place nickel electrode, partial resonance chamber 11 is clipped in the middle by electrode slice.Two electrodes and radio-frequency power supply are connected to form condenser type radio frequency discharge excitation system 7.
Embodiment 5
Consult Fig. 6, this specific embodiment hollow core optical fiber 1 is aluminium oxide total reflection hollow-core fiber, optical fiber interior diameter 1.5 millimeters, wall thickness 0.1 millimeter, length 2 meters.Completely reflecting mirror 2 is the Si mirror of surface gold-plating, and half-reflecting mirror 3 is partially reflecting mirrors that germanium grinds.Completely reflecting mirror 2 and half-reflecting mirror 3 are processed into the cylinder of external diameter 1.45 millimeters, completely reflecting mirror 2 is embedded in one end of resonant cavity 11, and half-reflecting mirror 3 is embedded in 40 centimeters apart from completely reflecting mirror 2 in hollow-core fiber 1.Utilize the first cutting ferrule 4 to entangle resonant cavity 11 be inlaid with the termination of completely reflecting mirror 2 and seal, with identical cutting ferrule, condenser lens 8 that is detachable, overall diameter 1.7 millimeters is installed at the output of conducting part 12.Filling device is utilized to be injected in hollow-core fiber 1 by gas operation material 6 from the output of conducting part 12, gas operation material 6 is diffused in the resonant cavity 11 between completely reflecting mirror 2 and half-reflecting mirror 3 by minim gap reserved between half-reflecting mirror 3 and hollow-core fiber 1 inwall, and the gas operation material 6 sealed up for safekeeping between the condenser lens 8 of half-reflecting mirror 3 and conducting part 12 output can be laid in and carry out diffusion to the gas operation material 6 in resonant cavity 11 at any time and exchange supplementary.To be positioned at directly over outside resonant cavity 11 and immediately below symmetrically place wide 2 millimeters, the symmetrical nickel electrode of long 25 centimetres, two electrodes are connected with radio-frequency power supply and form radio frequency excitation system 7.
Embodiment 6
Consult Fig. 7, this specific embodiment hollow core optical fiber 1 is by the combination of the resonant cavity 11 of aluminium oxide total reflection hollow-core fiber and the conducting part 12 of AgI/Ag leak type hollow-core fiber, and optical fiber interior diameter 1.5 millimeters, wall thickness 0.1 millimeter, length is respectively 30 centimetres and 120 centimetres.Completely reflecting mirror 2 is the K9 glass reflector of surface gold-plating, and half-reflecting mirror 3 is the partially reflecting mirrors for GaAs grinds.Completely reflecting mirror 2 and half-reflecting mirror 3 are processed into the disk of external diameter 1.7 millimeters, completely reflecting mirror 2 is embedded in the first cutting ferrule 4 of the plane matrix circular hole having interior diameter 1.7 millimeters, and be inserted in one end of aluminium oxide hollow-core fiber (i.e. resonant cavity 11), realize completely reflecting mirror 2 and aluminium oxide hollow-core fiber 1 is coaxially fastenedly connected.The half-reflecting mirror 3 ground with GaAs is processed into the disk of overall diameter 1.7 millimeters.Half-reflecting mirror 3 is clipped between resonant cavity 11 and conducting part 12, and puts the second cutting ferrule 5 and realize resonant cavity 11, conducting part 12 and half-reflecting mirror 3 and be coaxially closely connected.The inside of inlaying the resonant cavity 11 of position 1 centimeters of completely reflecting mirror 2 and half-reflecting mirror 3 in advance in distance plates the annular nickel cathode of a some anode and wide 1.5 centimetres of one deck opposite to each other, first cutting ferrule 4 and the second cutting ferrule 5 are outputed the aperture 9 of diameter 0.5 millimeter in advance, by completely reflecting mirror 2, the space that reserves half-reflecting mirror 3 and hollow-core fiber 1, the anode of electrode and high-voltage DC power supply and negative electrode is connected to form high-voltage DC power supply excitation system 7 through aperture 9 with electric wire.First cutting ferrule 4 is also opened the aperture 9 of a diameter 0.5mm and is connected with hollow-core fiber 1 inside by the space reserved between completely reflecting mirror 2 and hollow-core fiber 1 inwall in advance.Filling device is utilized to be filled with in resonant cavity 11 by gas operation material 6 from aperture 9, this aperture 9 of sealing after inflation.The aperture 9 on the first cutting ferrule 4 can be opened again and inside make-up gas operation material 6 after gas consumption in hollow-core fiber 1, or aperture 9 is directly connected with the air accumulator 102 containing gas operation material 6 by the wireway 108 being connected with valve 109, realizes at any time to make-up gas operation material 6 in resonant cavity 11.
Embodiment 7
Consult Fig. 8, this specific embodiment hollow core optical fiber 1 is combined by the conducting part 12 of the resonant cavity 11 of germanium oxide total reflection hollow-core fiber and cycloolefine polymer (COP)/Ag leak type hollow-core fiber, optical fiber interior diameter 1.8 millimeters, wall thickness 0.1 millimeter, length is respectively 40 centimetres and 150 centimetres.Completely reflecting mirror 2 is the K9 glass reflector of surface gold-plating, and half-reflecting mirror 3 is the partially reflecting mirrors for GaAs grinds.Completely reflecting mirror 2 and half-reflecting mirror 3 are processed into the cylinder of overall diameter 1.6 millimeters, and be inlaid in the two ends of resonant cavity 11 respectively, fixedly be inlaid with one end of speculum 3 with the first cutting ferrule 4, the one end with the second cutting ferrule 5 resonant cavity 11 being inlaid with half-reflecting mirror 3 is connected together with conducting part 12 close coaxial.Excitation system 7 adopts radio frequency excitation system, directly over outside resonant cavity 11 between completely reflecting mirror 2 and half-reflecting mirror 3 and immediately below symmetrical place wide 3 millimeters, the symmetrical nickel electrode of long 35 centimetres, two electrodes and radio-frequency power supply are connected to form radio frequency excitation system 7.First cutting ferrule 4 is opened the aperture 9 of a diameter 0.5mm and is connected by space resonant cavity 11 inside reserved between completely reflecting mirror 2 resonant cavity 11 inwall.Utilize filling device to be filled with in resonant cavity 11 from aperture 9 by gas operation material 6, and seal after filling.This aperture 9 make-up gas operation material 6 can be opened again after gas consumption in hollow-core fiber 1.
Embodiment 8
Consult Fig. 9, this specific embodiment hollow core optical fiber 1 is the capillary glass tube total reflection hollow-core fiber that inner surface growth has germanium oxide, optical fiber interior diameter 2 millimeters, wall thickness 0.1 millimeter, length 2 meters.Completely reflecting mirror 2 is the Si mirror of surface gold-plating, and half-reflecting mirror 3 is partially reflecting mirrors that germanium grinds.Completely reflecting mirror 2 and half-reflecting mirror 3 are processed into the cylinder of external diameter 1.8 millimeters, completely reflecting mirror 2 is embedded in one end of hollow-core fiber 1, half-reflecting mirror 3 is embedded in hollow-core fiber 1 and one end 40 centimeters apart, and with completely reflecting mirror 2 at a distance of 40 centimetres, between completely reflecting mirror 2 and half-reflecting mirror 3, form resonant cavity 11.Entangle the termination at completely reflecting mirror 2 place with the first cutting ferrule 4 and seal, at hollow-core fiber 1 other end (that is, the output of conducting part 12) cutting ferrule, one dismountable condenser lens 8 being installed.Filling device is utilized to be injected in hollow-core fiber by gas operation material 6 from conducting part 12 output, gas operation material 6 is diffused in the resonant cavity 11 between completely reflecting mirror 2 and half-reflecting mirror 3 by the preset clearance between half-reflecting mirror 3 and hollow-core fiber 1 inwall, and the gas operation material 6 sealed up for safekeeping between half-reflecting mirror 3 and condenser lens 8 also can carry out diffusion to the gas operation material 6 in resonant cavity 11 at any time as deposit gas and exchange supplementary.Line also picks out to be connected with radio-frequency power supply and forms inductance coupling high radio frequency excitation system 7 by the outer winding around of resonant cavity 11 between completely reflecting mirror 2 with half-reflecting mirror 3.
Embodiment 9
Consult Figure 10, this specific embodiment hollow core optical fiber 1 is combined by the conducting part 12 of the resonant cavity 11 of aluminium oxide total reflection hollow-core fiber and AgI/Ag leak type hollow-core fiber, optical fiber interior diameter 1.8 millimeters, wall thickness 0.1 millimeter, length is respectively 30 centimetres and 150 centimetres.Completely reflecting mirror 2 is the molybdenum speculum of surface gold-plating, and half-reflecting mirror 3 is partially reflecting mirrors that GaAs grinds.Completely reflecting mirror 2 and half-reflecting mirror 3 are processed into the cylinder of external diameter 1.6 millimeters, completely reflecting mirror 2 and half-reflecting mirror 3 are embedded in the two ends of resonant cavity 11 respectively, entangle the termination being inlaid with completely reflecting mirror 2 of resonant cavity 11 with the first cutting ferrule 4, utilize the second cutting ferrule 5 resonant cavity 11 is inlaid with one end of half-reflecting mirror 3 and is coaxially connected with one end of conducting part 12.At the output cutting ferrule of conducting part 12, a dismountable condenser lens 8 is installed.Filling device is utilized to be injected in hollow-core fiber 1 by gas operation material 6 from the output of conducting part 12, gas operation material 6 is diffused in the resonant cavity 11 between completely reflecting mirror 2 and half-reflecting mirror 3 by preset clearance between half-reflecting mirror 3 and hollow-core fiber 1 wall, and the working gas sealed up for safekeeping between half-reflecting mirror 3 and condenser lens 8 also can carry out diffusion to gas operation material in resonant cavity 11 6 at any time as deposit gas and exchange supplementary.Resonant cavity 11 between completely reflecting mirror 2 and half-reflecting mirror 3 is placed in microwave generator tube and forms microwave excitation system as excitation system 7.
Embodiment 10
Consult Figure 11, this specific embodiment hollow core optical fiber 1 has the resonant cavity 11 of the capillary glass tube total reflection hollow-core fiber 1 of germanium oxide film and the conducting part 12 of COP/Ag leak type hollow-core fiber to combine by long on inwall, optical fiber interior diameter 2 millimeters, wall thickness 0.1 millimeter, length is respectively 30 centimetres and 150 centimetres.Completely reflecting mirror 2 is the molybdenum speculum of surface gold-plating, and half-reflecting mirror 3 is partially reflecting mirrors that germanium grinds.Completely reflecting mirror 2 and half-reflecting mirror 3 are processed into the disk of external diameter 2.2 millimeters.Completely reflecting mirror 2 is embedded in have diameter 2.3 millimeters of matrix circular holes the first cutting ferrule 4 in and be coaxially connected with one end of resonant cavity 11.With the second cutting ferrule 5, the other end of resonant cavity 11, half-reflecting mirror 3 are coaxially connected with one end of conducting part 12.First cutting ferrule 4 and the second cutting ferrule 5 open a point aperture 9 for a diameter 0.5 millimeter in advance respectively, and is communicated with resonant cavity 11 inside by preset clearance between the inwall of completely reflecting mirror 2 or half-reflecting mirror 3 and hollow-core fiber 1.Draw wireway 108 from an aperture 9 to connect with air accumulator 102 pump filling device and resonant cavity 11 (with the second cutting ferrule 5) another aperture 9 upper respectively, make the inside gassy operation material 6 of resonant cavity 11 and keep flowing.Resonant cavity 11 between completely reflecting mirror 2 and half-reflecting mirror 3 is placed in microwave generator tube and forms microwave excitation system as excitation system 7.
Embodiment 11
Consult Figure 12, this specific embodiment hollow core optical fiber 1 is the long capillary glass tube germanium oxide total reflection hollow-core fiber having germanium oxide film on inwall, and optical fiber interior diameter 1.5 millimeters, wall thickness 0.1 millimeter, length is 150 centimetres.Completely reflecting mirror 2 is the Si mirror of surface gold-plating, and half-reflecting mirror 3 is partially reflecting mirrors that germanium grinds.Completely reflecting mirror 2 is processed into the disk of overall diameter 1.5 millimeters, half-reflecting mirror 3 is processed into the cylinder of external diameter 1.3 millimeters.Completely reflecting mirror 2 is embedded in and has in the first cutting ferrule 4 of diameter 1.5 millimeters of matrix circular holes, and is coaxially connected by the first cutting ferrule 4 with one end of hollow-core fiber 1, and half-reflecting mirror 3 is embedded in hollow-core fiber 1 and completely reflecting mirror 2 30 centimeters apart.Resonant cavity 11 is formed between completely reflecting mirror 2 and half-reflecting mirror 3.At the output cutting ferrule of conducting part 12, a dismountable condenser lens 8 is installed.Utilize filling device that gas operation material 6 is injected into hollow-core fiber 1 from output, gas operation material 6 is diffused in resonant cavity 11 by the preset clearance between half-reflecting mirror 3 and hollow-core fiber 1 inwall, and the working gas sealed up for safekeeping between half-reflecting mirror 3 and condenser lens 8 also can carry out diffusion to resonance intracavity gas operation material 6 at any time as deposit gas and exchange supplementary.Resonant cavity 11 between completely reflecting mirror 2 and half-reflecting mirror 3 is placed in microwave generator tube and forms microwave excitation system as excitation system 7.
Protection content of the present invention is not limited to above embodiment.Under the spirit and scope not deviating from inventive concept, the change that those skilled in the art can expect and advantage are all included in the present invention, and are protection range with appending claims.
Claims (10)
1. a carbon dioxide infrared hollow optical fiber laser, is characterized in that, comprising:
Hollow-core fiber (1), described hollow-core fiber (1) is divided into resonant cavity (11), and with the conducting part (12) of described resonant cavity (11) integral setting; Described resonant cavity (11) straighe, folding or winding form setting;
Be arranged on the completely reflecting mirror (2) of one end of described resonant cavity (11);
Be arranged on the half-reflecting mirror (3) of described resonant cavity (11) other end;
Be filled in the gas operation material (6) in described resonant cavity (11); And
Be arranged on the excitation system (7) between described completely reflecting mirror (2) and described half-reflecting mirror (3); Described excitation system (7) is radio frequency excitation system, high voltage direct current excitation system or microwave excitation system;
Described excitation system (7) produces excitation in the mode of non-pumped light source excitation to described gas operation material (6), described gas operation material (6) generation energy level transition realizes population inversion and produce laser in described resonant cavity (11), and half-reflecting mirror (3) described in described laser light incides in described conducting part (12) and conducts.
2. carbon dioxide infrared hollow optical fiber laser as claimed in claim 1, it is characterized in that, described hollow-core fiber (1) is total reflection hollow-core fiber, or the combination of total reflection hollow-core fiber and electrolyte/metal leakage type hollow-core fiber; Reflective film material in described total reflection hollow-core fiber is the material being less than 1 in carbon dioxide laser wavelength place refractive index, comprises germanium oxide or aluminium oxide.
3. carbon dioxide infrared hollow optical fiber laser as claimed in claim 1, it is characterized in that, described radio frequency excitation system is arranged on the outside of described resonant cavity (11), described high voltage direct current excitation system is arranged on the inside and outside of described resonant cavity (11), and described microwave excitation Operation system setting is in the outside of described resonant cavity (11).
4. carbon dioxide infrared hollow optical fiber laser as claimed in claim 1, it is characterized in that, described hollow-core fiber (1) is provided with the first cutting ferrule (4) and/or the second cutting ferrule (5) further; Described first cutting ferrule (4) is for being connected described completely reflecting mirror (2) one end with described resonant cavity (11), and described second cutting ferrule (5) is for be fixed on described half-reflecting mirror (3) in described resonant cavity (11) and coaxially to connect described resonant cavity (11) and described conducting part (12).
5. carbon dioxide infrared hollow optical fiber laser as claimed in claim 1, is characterized in that, is positioned at described conducting part (12) and is provided with condenser lens (8) further for the port of Output of laser.
6. carbon dioxide infrared hollow optical fiber laser as claimed in claim 1, it is characterized in that, described resonant cavity (11) is provided with further aperture (9), it supplements described gas operation material (6) for connecting wireway in described resonant cavity (11).
7. a manufacture method for carbon dioxide infrared hollow optical fiber laser, is characterized in that, comprises the steps:
Step one: half-reflecting mirror (3) is set in the inside of hollow-core fiber (1), at a port of described hollow-core fiber (1), completely reflecting mirror (2) is set, described completely reflecting mirror (2) and described half-reflecting mirror (3) form resonant cavity (11) in described hollow-core fiber (1), form conducting part (12) with the residue hollow-core fiber (1) of described resonant cavity (11) integral setting; Described resonant cavity (11) straighe, folding or winding form setting;
Step 2: to the interior insufflation gas operation material (6) of described resonant cavity (11);
Step 3: arrange excitation system (7) in the outside of described resonant cavity (11) and/or inside, described excitation system (7) is radio frequency excitation system, high voltage direct current excitation system or microwave excitation system.
8. the manufacture method of carbon dioxide infrared hollow optical fiber laser as claimed in claim 7, it is characterized in that, the wall of described resonant cavity (11) being provided with aperture (9), in described resonant cavity (11), supplementing described gas operation material (6) for connecting wireway.
9. the manufacture method of carbon dioxide infrared hollow optical fiber laser as claimed in claim 7, it is characterized in that, on described hollow-core fiber (1), the outer setting being positioned at described completely reflecting mirror (2) has the first cutting ferrule (4), for being connected described completely reflecting mirror (2) one end with described resonant cavity (11); The outer setting of described half-reflecting mirror (3) has the second cutting ferrule (5), is fixed in described resonant cavity (11) by described half-reflecting mirror (3).
10. the manufacture method of carbon dioxide infrared hollow optical fiber laser as claimed in claim 7, it is characterized in that, the port for Output of laser being positioned at described conducting part (12) is provided with condenser lens (8).
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| CN111610628A (en) * | 2020-06-04 | 2020-09-01 | 杭州菲柏斯科技有限公司 | Single optical fiber scanner |
| CN111864513A (en) * | 2020-05-28 | 2020-10-30 | 中国人民解放军国防科技大学 | All-fiber 4.3 mu m waveband carbon dioxide optical fiber gas laser |
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