CN102354905A

CN102354905A - Radio-frequency excited gas laser

Info

Publication number: CN102354905A
Application number: CN2011103186901A
Authority: CN
Inventors: 秦应雄; 李文芳; 杨钒; 王炜; 唐霞辉
Original assignee: Huazhong University of Science and Technology
Current assignee: Huazhong University of Science and Technology
Priority date: 2011-10-19
Filing date: 2011-10-19
Publication date: 2012-02-15

Abstract

The invention discloses a radio-frequency excited gas laser, which comprises a lath-shaped sealed discharge chamber, discharge electrodes, a water cooling passage with a water inlet and a water outlet, a gas storage chamber with a gas return pipe, a matching network, a radio-frequency power supply connected with the discharge electrodes through the matching network, a metal shroud with a light hole and a resonant cavity. The radio-frequency excited gas laser is characterized in that the discharge electrodes are arranged outside the left side and the right side of the lath-shaped sealed discharge chamber. By using the radio-frequency power supply, the discharge process is enabled to be more stable and the laser output power is higher; the discharge electrodes which are arranged outside the left side and the right side of the discharge chamber can ensure that pollution caused by electrode sputtering does not occur during the discharge process; and the spacing between the discharge electrodes is large, electrode leads which are connected into the discharge chamber are not required, the leak sources are reduced, the sealing performance of the discharge chamber is improved, and the gas change time and the service life of the laser are greatly prolonged. The radio-frequency excited gas laser has the characteristics that the electrode structure is simple, the installation is convenient to conduct, the cost is low, the overall structure is more compact, the size is smaller and the discharge process is more stable.

Description

A kind of radio frequency excited gas laser device

Technical field

The present invention relates to gas laser, specifically a kind of radio frequency excited gas laser device.

Background technology

Seeing that the market potential of middle high power (hundreds of watts～kilowatts) laser is huge; And existing gas laser is not enough below existing: the gas laser that 1, uses DC power supply; Not only it the phenomenon of discharge instability can occur when high power is exported; And sputter can take place at discharge process in the electrode that is arranged in arc chamber, and the eyeglass of arc chamber resonant cavity is polluted, and influences the useful life of laser; 2, the RF excited of external design diffusion cooling lath laser performance is good, the life-span is long; But owing to processing, the installation of electrode are very complicated; And its output beam is the bar shaped laser spot; Need shaping to use, make that its technical difficulty height, equipment purchase and working service cost are high, be difficult to applied widely in China.

Summary of the invention

The objective of the invention is to above-mentioned deficiency provide that a kind of electrode structure is simple, easy for installation, cost is low, long service life, overall structure stable more, the radio frequency excited gas laser device that electrode sputter pollution can not occur of compactness, better tightness, discharge process more.

The present invention includes lath-shaped sealing arc chamber, the sparking electrode processed by nonmetallic materials, be provided with the water-cooling channel that current import and export, the air storage chamber that is provided with muffler, matching network, the radio-frequency power supply that is connected with sparking electrode through matching network, the metal shroud resonant cavity that has light hole, it is characterized in that: said sparking electrode is positioned at outside the left and right sides that lath-shaped seals arc chamber.

In the technique scheme, said sparking electrode is the multistage sparking electrode that connects with parallel way, and said multistage sparking electrode can be the syllogic sparking electrode.

In the technique scheme, said air storage chamber is provided with the subsequent use exhaust joint that fills.

In the technique scheme, said sparking electrode is the sparking electrode that is provided with cooling pipe.

In the technique scheme; Said resonant cavity is made up of tail mirror end strip speculum, the output strip speculum that has light hole and full impregnated outgoing mirror; Said tail mirror end strip speculum and output strip speculum lay respectively at the front-end and back-end of lath-shaped sealing arc chamber, and said full impregnated outgoing mirror is positioned at the light hole place.

In the technique scheme; Said resonant cavity is made up of two refrative cavity mirrors, speculum and outgoing mirrors; Said two refrative cavity mirrors lay respectively at the front-end and back-end of lath-shaped sealing arc chamber; Said speculum is positioned at a side of one of them refrative cavity mirror, and said outgoing mirror is positioned at the wherein opposite side of another refrative cavity mirror.

In the technique scheme, said lath-shaped sealing arc chamber is processed by glass or pottery.

The present invention compared with prior art has following advantage:

(1) adopts RF excited mode (promptly using radio-frequency power supply); Make discharge process more stable; Can not produce as continuous current excitation, owing to the sparking electrode ablation causes the power decay under the long-term work state, arc chamber can inject higher power; Thereby can obtain more powerful laser output, power output can arrive the number multikilowatt.

(2) sparking electrode is positioned at outside the left and right sides of arc chamber, has following characteristics: 1. shorter with respect to the distance of the front-end and back-end of arc chamber, required breakdown potential is forced down; 2. discharge through being coupled into arc chamber, can not occur the eyeglass that the arc chamber resonant cavity is polluted in the electrode sputter in the discharge process; 3. with respect to the sparking electrode of the RF excited of metal structure diffusion cooling slab laser, need not be connected into the contact conductor of arc chamber, reduce leak source, improve the sealing property of arc chamber, the time of exchanging gas of laser and useful life big leap ahead; 4. the spacing of sparking electrode is big, and electrode can adopt common copper, aluminum, and need not use the difficult sputter material of high-melting-point, and not only electrode is simple in structure; The processing and fabricating simple cheap, easy for installation, and equal piezoelectricity sense need be set between sparking electrode; And because the sheath layer is little to power output influence, the frequency band of radio-frequency power supply is roomy; Therefore, low to the frequency stability requirement of radio-frequency power supply, also low to the requirement of matching network.

(3) output beam of RF excited diffusion cooling slab laser is the bar shaped laser spot, and hot spot needs shaping to use, and output beam of the present invention is the squarish light beam, does not need complicated shaping light channel structure, can directly use.

Description of drawings

Fig. 1 is a structural representation of the present invention.

Fig. 2 is that the A of Fig. 1 is to sketch map.

Fig. 3 is the unsteady cavity structural representation of concave-concave side coupling output.

Fig. 4 is the cavity resonator structure sketch map of syllogic sparking electrode.

Fig. 5 is the cavity resonator structure sketch map of flat folding light channel structure.

Among the figure: 1-lath-shaped sealing arc chamber, 2-sparking electrode, 3-water-cooling channel, 4-air storage chamber, 5-matching network, 6-radio-frequency power supply, 7-metal shroud, the import and export of 8-current, 9-muffler, 10-fill exhaust joint, 11-tail mirror end strip speculum, 12-output strip speculum (12a-light hole), 13-light hole, 14-full impregnated outgoing mirror, 15-cooling pipe, 16-refrative cavity mirror, 17-speculum, 18-outgoing mirror.

Embodiment

Further specify the present invention below in conjunction with accompanying drawing and embodiment.

Embodiment: the present invention includes lath-shaped sealing arc chamber 1, the sparking electrode 2 processed by glass or pottery or other nonmetallic materials, be provided with the radio-frequency power supply 6 that current import and export 8 water-cooling channel 3, the air storage chamber 4 that is provided with muffler 9, matching network 5, are connected with sparking electrode 2 through matching network 5, metal shroud 7 resonant cavity that have light hole 13.Wherein, Said sparking electrode 2 helps the cooling to sparking electrode 2 for being provided with the sparking electrode of cooling pipe 15, reaches better radiating effect; The syllogic sparking electrode (shown in Figure 4) that employing connects with parallel way; Can make discharge stable more and even, said sparking electrode 2 is positioned at outside the left and right sides of lath-shaped sealing arc chamber 1, and equal piezoelectricity sense need be set between two sparking electrodes 2; Said water-cooling channel 3 is distributed in the outside of lath-shaped sealing arc chamber 1, and the current on the water-cooling channel 3 import and export 8 makes cooling more fully in time; Said air storage chamber 4 is positioned at outside the water-cooling channel 3, and air storage chamber 4 is provided with the subsequent use exhaust joint 10 that fills, and conveniently repeatedly fills exhaust, improves the useful life of laser; Said muffler 9 can be provided with many (shown in Figure 2 is four), makes that to fill exhaust convenient more rapidly, and its two ends are communicated with arc chamber 1 and air storage chamber 4 respectively; Said resonant cavity can be the concave-concave unsteady cavity structure of side coupling output; Promptly constitute (Fig. 3 and shown in Figure 4) by tail mirror end strip speculum 11, the output strip speculum 12 and the full impregnated outgoing mirror 14 that have a light hole 12a; Said tail mirror end strip speculum 11 is the strip concave mirror with output strip speculum 12; And lay respectively at the front-end and back-end of lath-shaped sealing arc chamber 1; Said full impregnated outgoing mirror 14 is positioned at light hole 12a place, and laser can be along the emergent shaft direction through output strip speculum 12, and the light hole 13 from metal shroud 7 penetrates; Said resonant cavity also can adopt flat folding light channel structure; Promptly constitute (shown in Figure 5) by two refrative cavity mirrors 16, speculum 17 and outgoing mirror 18; Said two refrative cavity mirrors 16 lay respectively at the front-end and back-end of lath-shaped sealing arc chamber 1; Said speculum 17 is positioned at a side of one of them refrative cavity mirror 16, and said outgoing mirror 18 is positioned at the wherein opposite side of another refrative cavity mirror 16, and laser produces in lath-shaped sealing arc chamber 1 (being refrative cavity) and repeatedly comes and goes back output; Be equivalent under the situation that does not change sparking electrode 2 length, elongate total discharge length; Improved the power output of laser, had the high unique advantage of the little output of volume, and can obtain much better zlasing mode; Metal shroud 7 seals arc chamber 1, sparking electrode 2, water-cooling channel 3, air storage chamber 4, matching network 5 and radio-frequency power supply 6 with lath-shaped and seals, to prevent the radio-frequency radiation pollution of environment to external world.

Claims

1. radio frequency excited gas laser device; Comprise lath-shaped sealing arc chamber (1), the sparking electrode (2) processed by nonmetallic materials, be provided with the radio-frequency power supply (6) that current import and export the water-cooling channel (3) of (8), the air storage chamber (4) that is provided with muffler (9), matching network (5), are connected with sparking electrode (2) through matching network (5), metal shroud (7) resonant cavity that has light hole (13), it is characterized in that: said sparking electrode (2) is positioned at outside the left and right sides that lath-shaped seals arc chamber (1).

2. radio frequency excited gas laser device according to claim 1 is characterized in that: the multistage sparking electrode of said sparking electrode (2) for connecting with parallel way.

3. according to the said radio frequency excited gas laser device of claim 2, it is characterized in that: said multistage sparking electrode is the syllogic sparking electrode.

4. according to each described radio frequency excited gas laser device of claim 1-3, it is characterized in that: said air storage chamber (4) is provided with the subsequent use exhaust joint (10) that fills.

5. according to each described radio frequency excited gas laser device of claim 1-3, it is characterized in that: said sparking electrode (2) is for being provided with the sparking electrode of cooling pipe (15).

6. according to each described radio frequency excited gas laser device of claim 1-3; It is characterized in that: said resonance cavity system is made up of tail mirror end strip speculum (11), the output strip speculum (12) that has light hole (12a) and full impregnated outgoing mirror (14); Said tail mirror end strip speculum (11) and output strip speculum (12) lay respectively at the front-end and back-end of lath-shaped sealing arc chamber (1), and said full impregnated outgoing mirror (14) is positioned at light hole (12a) and locates.

7. according to each described radio frequency excited gas laser device of claim 1-3; It is characterized in that: said resonant cavity is made up of two refrative cavity mirrors (16), speculum (17) and outgoing mirror (18); Said two refrative cavity mirrors (16) lay respectively at the front-end and back-end of lath-shaped sealing arc chamber (1); Said speculum (17) is positioned at a side of one of them refrative cavity mirror (16), and said outgoing mirror (18) is positioned at the wherein opposite side of another refrative cavity mirror (16).

8. according to each described radio frequency excited gas laser device of claim 1-3, it is characterized in that: said lath-shaped sealing arc chamber (1) is processed by glass or pottery.