CN106813591A - Sample preparation method for warpage deformation testing - Google Patents

Sample preparation method for warpage deformation testing Download PDF

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Publication number
CN106813591A
CN106813591A CN201611258886.5A CN201611258886A CN106813591A CN 106813591 A CN106813591 A CN 106813591A CN 201611258886 A CN201611258886 A CN 201611258886A CN 106813591 A CN106813591 A CN 106813591A
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China
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sample
white
film
tested
test
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CN201611258886.5A
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Chinese (zh)
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刘海燕
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华进半导体封装先导技术研发中心有限公司
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Priority to CN201611258886.5A priority Critical patent/CN106813591A/en
Publication of CN106813591A publication Critical patent/CN106813591A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/16Measuring arrangements characterised by the use of optical means for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161Measuring arrangements characterised by the use of optical means for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q

Abstract

The invention relates to a sample preparation method for warpage deformation testing, characterized by the following steps: 1) placing a to-be-tested sample on a sample station whose middle part is a placing region for the to-be-tested sample to be placed in; arranging a protruding station around the placing region; 2) placing a white adhesive film on the to-be-tested sample with the edges of the adhesive film placed on the protruding station; 3) extruding downwards the pressure rolling wheel above the sample station; enabling the white adhesive film to be closely attached with the to-be-tested sample by the rolling and pressing of the pressure rolling wheel from one side to the other; and 4) taking the to-be-tested sample off the sample station; and removing the excessive white adhesive film at the edges of the to-be-tested sample. According to the invention, a white adhesive layer is coated on the surface of the sample; the thickness of the white adhesive layer can be controlled more uniformly; after the testing, the white adhesive film could be removed easily without causing pollution to the surface of the sample. In addition, when the temperature rises, the adhesive film does not volatile or influences the grating and the sample testing result.

Description

用于翘曲变形测试的样品制备方法 Sample preparation methods for warpage test

技术领域 FIELD

[0001]本发明涉及一种用于翘曲变形测试的样品制备方法,属于半导体封装技术领域。 [0001] The present invention relates to a method of preparing a sample for testing warpage, belonging to the field of semiconductor packaging technology.

背景技术 Background technique

[0002] 在半导体制作技术和半导体封装技术中,芯片、基板等组件的表面形貌和翅曲控制非常重要。 [0002] In semiconductor fabrication techniques and semiconductor packaging technology, chip components, and other surface topography of the substrate and warpage control is very important. 一种非接触式,利用云纹干涉原理进行翘曲检测的设备(如shadow moire)和检测方法在该领域应用广泛,其优势在于可以模拟回流工艺曲线,检测样品在整个回流过程中各温度点下的变形情况。 A non-contact type, the use of moire interferometry principle warp detecting apparatus (e.g., shadow moire) and detection methods are widely used in the art, the advantage that the profile can be simulated reflow process, the reflow process test samples throughout each temperature point under the deformation. 该检测设备一般配备有镜头,用于捕捉样品表面形貌信息;刻有一定长度和间距条纹的玻璃光栅将平行光束照射在样品表面,其反射条纹与光栅条纹相互干涉,形成包含样品表面变形情况的干涉条纹。 The detection apparatus is generally equipped with a camera, for capturing a sample surface topographic information; engraved with a length and pitch of the grating fringes glass parallel beam is irradiated on the sample surface, the grating strips of reflective stripes which interfere with each other, the case of forming the surface modification comprises a sample interference fringes. 该检测方法要求样品表面为白色,这样才能被样品上方的镜头捕捉到,并记录其变形情况。 This detection method requires that the sample surface is white, so as to be above the lens to the sample capture, and record the deformation. 因此,在样品制备过程中,通常要在表面涂覆一层白色薄膜。 Thus, during sample preparation, the film is usually applied to the surface layer of white. 在测试过程中,要求镜头捕捉到的薄膜表面形变信息可以等同为样品表面形变信息,且薄膜容易去除,对样品表面无污染,这对薄膜提出了很高的要求。 During the test, the film captured with lens surface deformation information may be information equivalent to the sample surface deformation, and the film is easy to remove, clean the sample surface, which film presents high demands.

[0003] 目前的样品制备方法,通常是在其表面喷洒一层白色的漆。 [0003] Current methods of sample preparation, usually sprayed on its surface a layer of white paint. 喷洒过程中细小的液滴均匀落在样品表面,形成一层白色薄膜。 During spraying fine droplets uniformly onto the sample surface, forming a white film layer. 但这种制样技术会对样品表面造成严重污染,测试完毕后样品只能废弃不用,因此该测试不能用于半导体制程的在线检测,这对测试样品造成很大限制;此外在升温过程中,白漆存在部分挥发,其挥发的物质遮盖在样品上方的光栅上,影响光栅条纹的干涉及样品变形检测结果。 However, this sample preparation would cause serious pollution of the surface of the sample, the sample is finished only after the test abandoned, so the test can not be used to detect a semiconductor manufacturing process line, which causes a great limitation on the test sample; In addition, in the heating process, the presence of white paint evaporation of a portion of the volatile substance covering on the grating above the sample, and the sample deformation affect the detection result of the interference fringes of the grating.

发明内容 SUMMARY

[0004] 本发明的目的是克服现有技术中存在的不足,提供一种用于翘曲变形测试的样品制备方法,在样品表面涂覆一层白色胶膜,该白色胶膜的厚度控制更加均匀;测试完毕后胶膜可以很容易去除,不会对样品表面造成污染;升温过程中胶膜不易挥发,不会对光栅和样品测试结果造成影响。 [0004] The object of the present invention is to overcome the disadvantages of the prior art, there is provided a sample preparation method for warpage test, the sample surface is coated with a white film, a thickness of the white film more control uniformity; after test film can be easily removed, without causing contamination of the sample surface; less volatile film during heating, does not affect the grating and the sample test results.

[0005] 按照本发明提供的技术方案,所述用于翘曲变形测试的样品制备方法,其特征是, 包括以下步骤: (1) 将待测样品放置在样品台上,样品台中间为放置待测样品的放置区域,在放置区域的周围设置凸台; (2) 在待测样品的上方放置白色胶膜,白色胶膜的边缘托放在凸台上; (3) 在样品台上方的压力滚轮向下挤压,并且压力滚轮从一侧向另一侧滚压,使白色胶膜与待测样品紧密贴; (4) 将待测样品从样品台上取下,并将待测样品边缘多余的白色胶膜切割去除。 [0005] according to the aspect of the present invention provides a sample preparation method for the warpage test, characterized in that, comprising the steps of: (1) The sample to be tested is placed on the sample stage, the sample stage is placed in the middle region of sample to be tested is placed in the placement region is provided around the boss; (2) a white film is placed over the sample to be tested, on the edge of the white film Tropsch bosses; (3) side of the sample stage pressure rollers pressed down, and the pressure rollers roll from side to side, and the white film sample to be tested and tightly; (4) the test sample was removed from the sample stage, and the test sample white Tape cutting edge excess removed.

[0006] 进一步的,所述白色胶膜的成分为特氟龙。 [0006] Further, the content of the white film of Teflon.

[0007] 进一步的,所述白色胶膜的厚度不超过5微米。 [0007] Further, the white film of a thickness not exceeding 5 microns.

[0008] 进一步的,所述凸台围绕样品台的放置区域设置呈封闭状的凸台,或者围绕样品台的放置区域呈间断状布置的多个凸台。 [0008] Further, the projection area of ​​the sample stage is placed around the closed shape is provided as a boss or as a plurality of discontinuous projections arranged like placed around the region of the sample stage.

[0009] 进一步的,所述凸台的高度高于待测样品的厚度,使得步骤(2)白色胶膜的边缘托放在凸台上后,白色胶膜与待测样品之间存在一定间隙。 [0009] Further, the height of the boss is greater than the thickness of the sample to be tested, so that the step (2) on the edge of the white film Tropsch boss, there is a certain gap between the white film and the sample to be tested .

[0010] 进一步的,所述步骤(3)中压力滚轮由放置区域的一侧向另一侧滚压一次或多次。 [0010] Further, the step (3) by the pressure rollers in a side-to-side placement region one or more times rolled. [0011] 本发明取消在样品表面喷漆的制样方法,改为在样品表面涂覆一层白色胶膜,该白色胶膜与喷漆液滴形成的薄膜相比,厚度可以控制的更加均匀;测试完毕后胶膜可以很容易去除,不会对样品表面造成污染;升温过程中,胶膜中的树脂成分更加稳定,不易挥发, 不会对光栅和样品测试结果造成影响。 [0011] The present invention eliminates the surface of the sample preparation methods of the paint, to the surface of the sample coated with a white film, compared to a more uniform thin film of the white paint with a thickness of droplet formation can be controlled; Test after completion of the film can be easily removed, without causing contamination of the sample surface; heating process, the resin component in the film is more stable, less volatile, does not affect the grating and the sample test results. 由于不会造成样品表面污染,应用此制样方法的样品在完成翘曲测试后可继续使用而不需要浪费额外的样品,因此可适用于半导体制程的在线检测。 Since not cause contamination of the sample surface, the sample application method of this kind in the system after the completion of the test may continue to use warp without wasting additional samples, thus applicable to a semiconductor manufacturing process line detection.

附图说明 BRIEF DESCRIPTION

[0012]图1〜图4为本发明所述用于翘曲变形测试的样品制备方法的流程图。 [0012] FIG. 1 ~ FIG. 4 is a flowchart of a method of preparing a sample for the test warpage. 其中, 图1为将待测样品放置在样品台上的示意图。 Wherein a sample to be tested is placed on the sample stage schematic FIG.

[0013]图2为在待测样品上方放置白色胶膜的示意图。 [0013] FIG. 2 is a schematic view of a white film is placed over the test sample.

[0014]图3为通过压力滚轮将白色胶膜和待测样品紧密贴合的示意图。 [0014] FIG. 3 is a schematic engaged by the pressure rollers and in close contact with the white film sample to be tested.

[0015]图4为将待测样品边缘多余白色胶膜切割去除的示意图。 [0015] FIG. 4 is a sample to be tested as a white film schematic remove excess edge cutter.

[0016] 图5为将贴合白色胶膜的待测样品进行翘曲测试的示意图。 [0016] FIG. 5 is a schematic view of the warpage test sample to be tested is bonded to the white film.

[0017] 图6为去除胶膜后的样品示意图。 [0017] FIG. 6 is a schematic view of the film sample was removed.

具体实施方式 Detailed ways

[0018] 下面结合具体附图和具体实施例对本发明作进一步说明。 [0018] The drawings and the specific embodiments below with reference to specific embodiments of the present invention will be further described.

[0019] 本发明所述用于翘曲变形测试的样品制备方法,包括以下步骤: (1)如图1所示,将待测样品1放置在样品台2上,样品台2中间为放置待测样品1的放置区域,在放置区域的周围设置凸台3;所述凸台3围绕样品台2的放置区域设置呈封闭状的凸台,或者围绕样品台2的放置区域呈间断状布置的多个凸台; ⑵如图2所示,在待测样品1的上方放置白色胶膜4,白色胶膜4的边缘托放在凸台3上; 所述凸台3的高度高于待测样品1的厚度,使得白色胶膜4与待测样品1之间存在一定间隙; (3) 如图3所示,在样品台2的上方通过压力滚轮5向下挤压,并且压力滚轮5从一侧向另一侧滚压一次或多次,使白色胶膜4与待测样品1紧密贴合,保证白色胶膜和待测样品之间无气泡、无分层; (4) 如图4所示,将待测样品1从样品台2上取下,并将待测样品1边缘多余的白色胶膜4 切割去除;待 [0019] Test sample preparation methods warpage of the present invention, comprising the steps of: (1) shown in Figure 1, a sample to be tested is placed on the sample stage 2, the sample stage 2 to be placed as an intermediate region measured sample 1 is placed in the placement region is provided around the boss 3; the projection 3 placed around the area of ​​the sample table 2 is provided as a closed-shaped boss, or the sample is placed around the region of table 2 was intermittent like arrangement a plurality of bosses; ⑵ As shown, a white film is placed over the sample to be tested 1 2 4, a white film on the edge 4 of the tray 3 on the boss; a height of the boss 3 is higher than the measured the thickness of the sample 1, so that the white film 4 and a gap exists between the test sample 1; (3) shown in Figure 3, above the sample stage 2 is pressed down by pressure rollers 5, 5 and the pressure rollers side to side rolled one or more times, the white film 4 and close contact with a sample to be tested to ensure that no air bubbles between the test sample and the white film, no delamination; (4) in FIG. 4 As shown in the test sample 1 was removed from the sample stage 2, and the edge of a sample to be measured 4 cut the excess film removing white; be 试结束后,去除样品表面的白色胶膜,可以通过揭膜机、化学溶解或光照等方式使其粘性失效。 After the end of the test, remove the white film sample surface, so that the viscosity can be disabled by removing film and the like machines, chemical dissolution or illumination mode.

[0020] 上述过程中采用的白色胶膜为特氟龙,厚度一般不超过5微米。 [0020] The process employed for the white Teflon film thickness of not more than 5 microns.

[0021] 将贴合白色胶膜后的待测样品放置在翘曲测试设备中进行测试,如图5所示,待测样品1放置于测试设备的样品台7上,玻璃光栅6置于待测样品1上方,光线透过玻璃光栅6形成千涉条纹,从而得到样品表面变形信息;测试过程中可通过加热模块8对待测样品1加热, 最高加热温度不超过30(TC。测试结束后,将白色胶膜从样品表面去除,白色胶膜去除方法可包括通过揭膜设备去除,也可将样品浸没在化学清洗药液中将膜去除或通过光照方法去除。去除胶膜后的样品如图6所示。 [0021] The sample to be tested after the film is placed in a bonded white warpage test equipment for testing, 5, 7, a glass grating test sample 1 is placed on the test device to be placed on the sample stage 6 1 above the sample being measured, the light grating 6000 is formed through the glass fringes, thereby obtaining information of the sample surface modification; test sample to be measured 1 may be heated by the heating module 8, the maximum heating temperature is not more than 30 (TC after test. the white film is removed from the sample surface, a white film removing method may include removing film removing apparatus, the sample may be immersed in the chemical in the membrane is removed or is removed by chemical cleaning method of illumination. FIG film samples were removed FIG 6.

[0022]本发明在用于翘曲测试的样品制备中,在样品表面涂覆一层胶膜,其需要满足以下要求:该胶膜厚度均匀,贴合后与样品表面紧密贴合,确保薄膜表面形变信息与样品表面形变信息完全相同;可以承受300 °C高温,在加热及模拟回流曲线的测试过程中无挥发、与样品无分层、剥离;厚度方向的尺寸足够小;测试完成后,胶膜可通过揭膜设备、化学溶解或光照等方式去除;去除后胶膜在样品表面无残留,对样品表面不会造成污染。 [0022] In the present invention, sample preparation for the warpage test, the surface coating layer of the sample film, which needs to meet the following requirements: the uniform film thickness, after bonding in close contact with the surface of the sample, which ensures the film surface deformation information identical to the sample surface deformation information; can withstand high temperatures 300 ° C, no heating and volatilization during the test in simulated reflow profile, and the sample no delamination, peeling; dimension in the thickness direction is sufficiently small; the test is completed, film may be, dissolving or chemical light is removed by way of removing film equipment; no film residue after the removal of the sample surface, the sample surface will not cause pollution.

Claims (6)

1. 一种用于翘曲变形测试的样品制备方法,其特征是,包括以下步骤: (1) 将待测样品(1)放置在样品台(2)上,样品台(2)中间为放置待测样品(1)的放置区域,在放置区域的周围设置凸台(3); (2) 在待测样品(1)的上方放置白色胶膜(4),白色胶膜(4)的边缘托放在凸台(3)上; (3) 在样品台(2)上方的压力滚轮(5)向下挤压,并且压力滚轮(5)从一侧向另一侧滚压,使白色胶膜(4)与待测样品(1)紧密贴; (4) 将待测样品⑴从样品台⑵上取下,并将待测样品⑴边缘多余的白色胶膜⑷切割去除。 A sample preparation method for the warpage test, characterized in that, comprising the steps of: (1) The sample to be tested (1) is placed on the sample stage (2), a sample stage (2) to be placed intermediate samples (1) to be measured placement area, the placement region is provided around the boss (3); (2) is placed as a white film (4) above the sample (1) to be measured, the edge of the white film (4) Torr on bosses (3); (3) the sample stage (2) above the pressure rollers (5) pressed down, and the pressure roller (5) rolling from side to side, and the white gum film (4) and the sample to be tested (1) tightly; (4) the test sample was removed from the sample stage ⑴ ⑵, and the test sample ⑴ ⑷ edge cutting the excess film removing white.
2. 如权利要求1所述的用于翘曲变形测试的样品制备方法,其特征是:所述白色胶膜的成分为特氟龙。 2. The method of sample preparation according to the warpage test for claim 1, wherein: said component is a white film of Teflon.
3. 如权利要求1所述的用于翘曲变形测试的样品制备方法,其特征是:所述白色胶膜的厚度不超过5微米。 Warpage test sample preparation methods described for claim 1, wherein: the white film of a thickness not exceeding 5 microns.
4. 如权利要求1所述的用于翘曲变形测试的样品制备方法,其特征是:所述凸台(3)围绕样品台(2)的放置区域设置呈封闭状的凸台,或者围绕样品台(2)的放置区域呈间断状布置的多个凸台。 4. Sample preparation methods for testing the warpage of claim 1, wherein: said projections (3) arranged as a closed shape around the boss sample stage (2) placement area, or around sample stage (2) was intermittent placement area arranged like a plurality of bosses.
5. 如权利要求1所述的用于翘曲变形测试的样品制备方法,其特征是:所述凸台(3)的高度高于待测样品(1)的厚度,使得步骤(2)白色胶膜(4)的边缘托放在凸台(3)上后,白色胶膜(4)与待测样品(1)之间存在一定间隙。 5. Sample Preparation Methods for testing the warpage of claim 1, wherein: the height of the boss (3) is higher than the thickness of the sample (1) to be measured, so that the step (2) of a white after the film edge (4) of the tray on bosses (3), a gap exists between the white film (4) and the sample to be tested (1).
6.如权利要求1所述的用于翘曲变形测试的样品制备方法,其特征是:所述步骤(3)中压力滚轮(5)由放置区域的一侧向另一侧滚压一次或多次。 6. A sample preparation method for testing the warpage of claim 1, wherein: said step (3) of the pressure rollers (5) disposed by the side of the primary area to the other side of the rolling or repeatedly.
CN201611258886.5A 2016-12-30 2016-12-30 Sample preparation method for warpage deformation testing CN106813591A (en)

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