1313346 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種輪廓量測方法及其裝置，且特別 是有關於一種可線上量測液滴輪廟之輪靡量測方法及其裝 置。 【先前技術】 近幾年，喷墨技術的應用愈加廣泛，從單純的紙張資 料列印到LCD產業的彩色濾光片喷印’更進一步提升到立 體結構的喷印。其中，又以微凸透鏡應用最廣，然而微凸 透鏡的曲率與其輪廓息息相關，但也最難量測。 目前量測表面輪廓的方式有很多種，可粗略分為接觸 式與非接觸式兩種，接觸式以Alpha-Step Surface Profiler 以及AFM (Atomic force microscope)為主，如美國專利 US6508110，該案係提出AFM的組成架構，而美國專利 US5497656則提出AFM的量測方法，此兩種裝置都是以 探針去接觸物體表面，並偵測探針之回饋力來決定其表面 輪廓，此接觸式量測裝置不僅容易在表面留下刮痕，更是 無法應用在微液滴（micro-drops)的量測上。非接觸式量測 儀器則以掃瞄式電子顯微鏡(SEM)、白光干涉儀(white light interference)，以及雷射測距儀（丨aser displacement meter) 為主。其中使用掃瞄式電子顯微鏡進行量測前，必須先餘 鏡頭上鑛上一層金屬物質，如白金’因此不適合用於微液 滴量測；在白光干涉儀的部分，美國專利US4995726提 出了一種利用光學外差干涉裝置量測表面輪廓，中華民國 1313346 專利TW1237685提出一種演算法來分析待測物表面輪 廓，TWI237685則是提出了一種分析白光干涉條紋以量測 待測物表面輪廓之裝置及方法，然而光干涉式量測方法通 常需要花費數分鐘去使用不同波長間的相位差以及干涉強 度來求出物體之表面輪廓，因此此方法不適合用於秒級變 化（second-scale)的動態量測輪靡上；用雷射測距儀來掃瞄 物體的表面輪廓之相關研究也很多，如美國專利 US6392794敘述了雷射掃瞄機台應包括哪些元件， US6740868則提出一種光學式掃瞄機台的量測方法，另 外，雷射測距儀不僅可用來量測表面輪廓，更可以用來進 行三維掃猫，如US4971445提出了 一種使用雷射測距儀 進行三維掃瞄的基本架構，另外US5880880及 US5995283也提出一種使用雷射進行醫學用三維掃瞄裝 置；另一種用來量測表面輪廓的裝置則是共輛焦白光式顯 微鏡，其以白光當光源，再利用物鏡上下振動，若光源對 焦到物體表面時，偵測器會記錄到最大強度，藉此來判斷 高度，如US6128077所述。綜言之，目前市面上可以掃 瞄表面輪廓的量測儀器大多屬於離線量測型，並未考量同 時應用於靜態固體表面結構及動態液體結構之量測需求。 要量測微液滴從濕態到乾態的輪廓變化，其中的困難 點在於必須將剛喷出的微液滴在很短時間内移到量測裝置 底下，而且此量測裝置必須於數秒鐘之内就能得到正確的 輪廓值，最重要的是此量測裝置要能夠量測像微液滴這種 透明且高曲率的物體；因此，要動態量測微液滴的輪靡， 接觸式的量測儀器可說是完全沒有機會，對非接觸式量測 1313346 儀器也是一大挑戰 【發明内容】 本1月之主要目的係為提供一種輪廓量測方法，其係 利用夕項方程式進行微液滴之曲線補償，以達成提高量測 精確度之目的。 ^為，上述目的，本發明係提供一種輪廓量測方法，其 係用於畺測彳政液滴輪廓動態變化，包含步驟： ⑷提供-輪廓量測裝置，該輪.廓量測裝置包含— :台、設置並固U該移動平台上之—基板，以及 設置於該基板上方之—光束測量裝置，其中該基板 上係具有一微液滴； (b):光束測量裝置量測該微液滴之輪廓曲線以獲得 輪廓資料點； ' 點中找出該微液滴之輪靡邊界點； =I點間，將輪廓資料點中超出最 之貧料點剔除； 手 界點與前述剩餘之輪靡資 廓； 〇 求出该微液滴之正確輪 利用= = : =為輪•量測裝置，其係 廓之目的。 達成線上即時量測微液滴輪 為達上述目的，本發明更提供一 用於量測微液滴輪廓動態變化量測裝置，其 輪廓量測裝置包含： 1313346 一移動平台； 一基板，係設置並固定於該移動平台之上； 一噴液裝置’係設置於該基板上方；以及 、一點光束測量裝置，係設置於該基板上方，並與該噴 液裝置相隔一固定距離以量測該噴液裝置所噴出之微纩 滴。 為使貴審查委員對於本發明之結構目的和功效有更 進一步之了解與認同，茲配合圖示詳細說明如後。 【實施方式】 本發明之主旨在提供喷印製程前段、中段及 個完整量測方案，不僅可線上量測微液滴喷出後從^到 乾態的輪廓變化，還可掃猫微液滴乾燥後的三維形D profMe)。由於非接觸式的量測儀器，其量測原理都是 分析待測物反射回來的光源來決定其量測數值，因此，如 果待測物外貌的斜率太大(如微液滴接觸角大於2〇 -定會造：量測數值不正確。另—方面，為了能量：形 成的微f滴，吾人必須先進行對位動作以求出液滴落點盘 ，’以快速地將微液滴帶到點光 束董》則裝置底下進厅量測。#此初 丁里利乂些解決手段將於下文中詳細 彳田迷。 首先清爹見圖一，今圖总43 ^ σ固係揭鉻本發明之輪廓量測裝詈 之操作示意圖。於圖—中，輪 ： 台1…喷液裝置2、m、， 係包括私動+1313346 IX. Description of the Invention: [Technical Field] The present invention relates to a contour measuring method and apparatus thereof, and more particularly to a method and device for measuring the rim of a droplet wheel temple on-line . [Prior Art] In recent years, the application of inkjet technology has become more widespread, from the printing of simple paper materials to the color filter printing of the LCD industry, which has further enhanced the printing of the stereo structure. Among them, the micro convex lens is the most widely used, but the curvature of the micro convex lens is closely related to its contour, but it is also the most difficult to measure. At present, there are many ways to measure the surface contour, which can be roughly divided into contact type and non-contact type. The contact type is mainly Alpha-Step Surface Profiler and AFM (Atomic force microscope), such as US Pat. No. 6,508,110. The composition of the AFM is proposed. U.S. Patent No. 5,497,656 proposes an AFM measurement method. Both devices use a probe to contact the surface of the object and detect the feedback force of the probe to determine the surface profile. The measuring device not only easily scratches the surface, but also cannot be applied to the measurement of micro-drops. Non-contact measuring instruments are mainly scanning electron microscope (SEM), white light interference, and 丨aser displacement meter. Before using the scanning electron microscope for measurement, the lens must be coated with a layer of metal material, such as platinum, so it is not suitable for microdroplet measurement; in the white light interferometer, US Patent 4,995,726 proposes a utilization. The optical heterodyne interference device measures the surface contour. The Republic of China 1313346 patent TW1237685 proposes an algorithm to analyze the surface contour of the object to be tested, and TWI237685 proposes a device and method for analyzing the white light interference fringe to measure the surface contour of the object to be tested. However, the optical interferometry method usually takes several minutes to use the phase difference between different wavelengths and the interference intensity to find the surface profile of the object, so this method is not suitable for the second-scale dynamic measuring wheel. There are also many studies on the use of laser range finder to scan the surface profile of objects. For example, US Pat. No. 6,392,794 describes which components should be included in the laser scanning machine. US6740868 proposes an optical scanning machine. Measurement method, in addition, the laser range finder can not only be used to measure the surface contour, but also can be used to A three-dimensional scanning cat, such as US 4,941, 144, proposes a basic structure for three-dimensional scanning using a laser range finder. In addition, US 5,880,880 and US 5,992, 528 also propose a three-dimensional scanning device for medical use using lasers; The device is a co-focus white light microscope, which uses white light as a light source, and then uses the objective lens to vibrate up and down. If the light source is focused on the surface of the object, the detector will record the maximum intensity, thereby judging the height, as described in US6128077. In summary, most of the measuring instruments on the market that can scan the surface contours are offline measurement types, and are not considered for the measurement requirements of static solid surface structures and dynamic liquid structures. To measure the contour change of the microdroplet from wet to dry state, the difficulty is that the newly ejected microdroplet must be moved under the measuring device in a short time, and the measuring device must be in a few seconds. The correct contour value can be obtained within the clock. The most important thing is that the measuring device should be able to measure transparent and high curvature objects like microdroplets; therefore, it is necessary to dynamically measure the rim of the microdroplets, contact The measuring instrument can be said to have no chance at all, and it is also a challenge for the non-contact measuring 1313346 instrument. [Inventive content] The main purpose of this month is to provide a contour measuring method, which uses the equation of the evening term. Curve compensation of microdroplets for the purpose of improving measurement accuracy. ^ For the above purpose, the present invention provides a profile measuring method for detecting a dynamic change of a plaque droplet profile, comprising the steps of: (4) providing a profile measuring device, the wheel profile measuring device comprising - a substrate, a substrate, and a beam measuring device disposed above the substrate, wherein the substrate has a microdroplet; (b) the beam measuring device measures the microfluid The contour curve of the drop is obtained to obtain the contour data point; 'the point of the rim of the micro-droplet is found in the point; the point between the points I=1 exceeds the most poor point in the contour data point; the hand boundary point and the remaining The rim of the rim; 〇 find the correct wheel of the micro-drop using = = : = for the wheel • measuring device, the purpose of the system. To achieve the above purpose, the present invention further provides a measuring device for measuring the dynamic change of the micro-droplet contour, and the contour measuring device comprises: 1313346 a mobile platform; a substrate, a system setting And being fixed on the mobile platform; a liquid ejecting device is disposed above the substrate; and a point beam measuring device is disposed above the substrate and spaced apart from the liquid ejecting device by a fixed distance to measure the spray The micro-drops sprayed from the liquid device. In order to enable the reviewing committee to have a better understanding and approval of the structural purpose and efficacy of the present invention, the detailed description is as follows. [Embodiment] The main purpose of the present invention is to provide a front, middle and complete measurement scheme of the printing process, which can not only measure the contour change from ^ to the dry state after the micro droplets are ejected on the line, but also scan the micro droplets of the cat. Three-dimensional shape D profMe after drying. Due to the non-contact measuring instrument, the measuring principle is to analyze the light source reflected from the object to be measured to determine the measured value. Therefore, if the slope of the appearance of the object to be tested is too large (for example, the contact angle of the microdroplet is greater than 2) 〇-定会: The measured value is incorrect. On the other hand, for the energy: the formation of the micro-f drop, we must first perform the alignment action to find the drop drop disk, 'to quickly take the micro-droplet To the point of the beam of Dong, the device is measured under the device. #本初丁里利乂The solution will be detailed in the following 彳田迷. First clearing Figure 1, the current picture total 43 ^ σ solid system chrome The schematic diagram of the operation of the profile measuring device of the invention. In the figure - the wheel: the station 1 ... the liquid spraying device 2, m, the system includes the private movement +
彳係汀少v先束測量裝置3以及一基板4; 吕亥移動平口 1係可在X及Y 士 A 方向上移動；該基板4係設置 1313346 並固定於該移動平台1之上，故可被該移動平台】帶動； 該噴液裝置2與該點光束測量裝置3係設置於該基板4上 方亚鎖固於一支架5,該喷液裝置2與該點光束測量裝置3 係相隔一固定距離D。 -般來說’基板4上會設有一些微結構或標記（圖中未 因此在噴印前，吾人可先對該基 嘯賴結 步驟2a ·’指定點光束測量裝置3掃 位置，以及停止位晋，廿胺外# t』 又 %始 之上； 並將5玄基板4固定於該移動平台彳 步驟2b:將該基板4移動至起始位置； y驟2c · 5亥點光束測量裳 二維之輪輪烟圖-二r: 步驟2d :該移動平台）向停 且移動方向係與該點光束測量裝置 °移動—距離， —中為Y方向）； ^ 孓田之方向垂直（於圖 步驟2e:該點光束測量裝 瞄完畢；若否，則回到步驟2〇一 /疋否已將微液滴掃 及 ，右疋，則進行步驟2f ;以 步驟2f:將前述每— 維輪廓。 &于之正確輪廓依序組合出三 在量測微液滴前，必須 —步是將喷液裝置2與點光束測量 1=作，對位的第 衣置3掛得越近越好， 以縮短移動平台彳的 數滴微液滴於同„位^㈣’再來先用喷液裝置2噴出 以移動平台1 (滴數依待測需求而定），再即時 丁口丨移動到點光束測量 、』、 了 距離D。接下來，喷 、 氐下，以求出相對 光束測量裝置3麻丁、镟液滴皆可移動相對距離D到點 圖三中之虛線3。:吾測’這時取回的輪廓線會如同 連續狀態，此為不正確在斜率較大的區域會呈現不 缺點。 確的輪廊’也是非接觸式量測裝置的 為解決這個缺點， 測量裝置3之最大旦·^百先而先知道所選用的點光束 先取一已乾燥之二:二厂限制。測定此斜率的方法可以 知（例如，經由不準权正樣品’其正確輪廓係為已 用點光束量_置3^_心量測記錄完畢），然後使 廊原始值，找此樣品輪廊’分別比較這兩種輪 大量測斜斗率即為該點光束測量裝⑽^ 找出’首先係從取回的輪靡資料點中， 在m、达1點於圖三中為邊界點A及邊界點E)，並 在兩邊界點間的線段剔 政，; 3之斜率限制n于、掉切線斜率大於點光束測量裝置 equation、貝^點’再用多項式方程式（polynomial 二=，合邊界點與剩下的資料點(斤段之資料 方便說明，吾人y am線32所^為 决斜人^ 係使用—個二次方程式（quadratic equation) 口 curve fitting)這些輪廓資料點，如式⑴所示： ax2+bx+c = y 式⑴The 亥 汀 v 先 v first beam measuring device 3 and a substrate 4; Lu Hai moving flat 1 system can move in the direction of X and Y A; the substrate 4 is set 1313346 and fixed on the mobile platform 1, so The liquid ejecting device 2 and the spot beam measuring device 3 are disposed on the substrate 4 and are sub-locked to a bracket 5, and the liquid ejecting device 2 is fixed to the spot beam measuring device 3 Distance D. - Generally speaking, there will be some microstructures or marks on the substrate 4. (Before the printing is performed, we can first scan the position of the beam measuring device 3 for the basis of the step 2a · ', and stop Bit Jin, 廿 amine outside # t 』 %% above; and 5 玄 substrate 4 fixed to the mobile platform 彳 Step 2b: Move the substrate 4 to the starting position; y 2c · 5 Hai point beam measurement Two-dimensional wheel smoke diagram - two r: step 2d: the moving platform) moves to the direction of movement and the point beam measuring device moves - distance, - in the Y direction); ^ the direction of the field is vertical (in Figure 2e: The spot beam measurement is completed; if not, then return to step 2〇/疋, if the microdroplet has been swept, right 疋, then proceed to step 2f; with step 2f: the aforementioned per-dimension The contours are combined with the correct contours in sequence. Before measuring the micro-droplets, the step must be to measure the spray device 2 and the spot beam 1 =, the closer the alignment of the first garment is to the 3 Well, to shorten the number of droplets of the mobile platform 于 in the same „位^(四)' and then spray it out with the liquid spraying device 2 to move the platform 1 (The number of drops depends on the demand to be tested), and then the Dingkou 丨 moves to the point beam measurement, 』, the distance D. Next, spray, squat, to find the relative beam measuring device 3 Ma Ding, 镟 droplets You can move the relative distance D to the dotted line 3 in the third figure.: I measured 'the outline that will be retrieved at this time will be like a continuous state. This is incorrect. It will show no defects in the area with a large slope. In order to solve this shortcoming, the maximum measurement of the measuring device 3 first knows that the selected spot beam first takes a dry second: the second factory limit. The method for determining the slope can be known ( For example, by not weighing the positive sample 'the correct contour is the used spot beam amount _ set 3 ^ _ heart measurement recorded), and then the original value of the gallery, find the sample ship gallery 'respect the two rounds respectively The measuring bevel rate is the point beam measuring device (10) ^ find 'first from the retrieved rim data points, at m, up to 1 point in Figure 3 for boundary point A and boundary point E), and Line segmentation between two boundary points; 3 slope limits n to and off tangent slope In the point beam measuring device, the point of the point, the polynomial equation (polynomial two =, the boundary point and the remaining data points (the information of the mass section is convenient to explain, we y am line 32 ^ is the slanting person ^ system Use a quadratic equation to fill these contour data points as shown in equation (1): ax2+bx+c = y (1)
1313346 將所有資料點都代入式（υ，可以得到式（2)，由於式（2)是 一個過定方程式（over-determined equation)，故可以用最 小平方法（丨east-square)來求其最接近的解 (maximum-likehood solution) ° X ,2 X , I X 2 X 2 I a b y ^ y 2 _ x "2 x " 1 c -y n ^ 式(2) 當然，當資料點多時’也可以使用更高階的方程式來 擬合。 除此之外’為了看出微液滴乾燥過程中有無非對稱 (asymmetric)現象發生’吾人尚可以輪廓3〇的頂點c為分 界點，分界點C到左端點A間的資料點以一條曲線去擬 合，分界點C到右端點E間的資料點以另一條曲線去擬合。 為了驗證本發明之擬合輪廓的正確性，吾人係將同一 乾燥的微液滴另外以接觸式的a丨pha_口step、_le (KLA-Tencor Corp·，USA)進行量測，戶斤得到的結果如圖四 中之虛線40，而實線42則是利用頂點c左右兩邊各自以 二次方程式擬合出來的輪廓’吾人可發現這兩條曲線不管 是直徑、高度以及輪廓幾乎都-模—樣，足證本發明確 所提出之輪廓Μ方法確實可行且具有極高的正確产。' 上述二維量測方法之流程步驟係如圖五所示，=中. 步驟5a:以該錢裝置喷出—微_於該基板I上表 12 1313346 步驟5b··該移動平台移動—距離，使該光束測量 罝測賴液滴之輪廓曲線以獲得輪廓資料點； 、 =:，資料點中找出該微液滴之輪偷點; 旦、靜W 兩邊界點間’將輪廓㈣財超出點光束 里射置3的攻大量測斜率之資料點剔除；以及 =5e :將輪廓邊界點與前述剩餘之輪㈣料點以多 員式方程式進行曲線擬合，以求出該微液滴之正確輪靡。 經由結合上述的㈣方法及裝置後，吾人即 悲輪廓圖。在缝滴經由移動平台彳送到點光束_力 U下’如此便缺時量測微液滴之輪廓，在將其描綠於 同：圖_^便絲，如圖六所示，在微液滴之錢過程中， 直徑及高度都會變小，吾人可假設此微液滴為半球型 (hemispherical segment)，财接觸角㊀計算方式則如式 (3). e=2tan—1(h/r)式（3) 體積V之計算方式則如式(4)，其中h為高度，「 徑： ’ V=(1/6)Trh(3h2+r2)式(4) 如此一來，便可分別計算出微液滴之初始接觸角與體 積，以及微液滴乾燥時之接觸角與體積，進而以體積變化 罝來計异微液滴之濃度，此種效果也是其他量測儀器所無 法達成的。 當然’本發明之量測方法亦可以進行微液滴於乾燥時 之二維輪靡罝測’其方法步驟係如圖七所示。類似於圖二， 13 1313346 圖七之步驟係為： 步驟7a :指定光束测量 置，以及停止位置； 、知目田之解析度、起始位 台將微液滴移動至起始位置； 獲得：料:束測量裝置量測該微液滴之輪廊曲線以 點；步驟7d:從輪料料點中找出該微液滴之輪廊邊界 曰、二:在兩邊界點間，將輪庵資料點中超出點光束 I測裝置3的最大量測斜率之資料點剔除；⑴先束 項式進將::邊界點與前述剩餘之輪廓資料點以多 、私式進㈣線擬合，以求出該微液滴之 移動=7g:亥移動平台向停止位置方向移動一距離且 移動方向係與該光束測量裝置掃目苗之方向垂直； 二：7h亥光束測夏裝置判斷是否已將微液滴 畢二否’則回到步驟7c;若是，則進行步驟7i;以及 維輪ί驟71 :將前述每一筆獲得之正確輪腐依序組合出三 =於士發明中’該點光束測量裝置係可為雷射量測裝 生白h測裝置或其他使用點光源之測量裝置。基板則 ^經過親水或斥水處理以利於喷墨或點膠；而該基板係 I為不可撓基板或可撓性基板，端視使用者之用途；當為 可換基板時，係使用例如玻璃等不可撓材料所製成；而 ^可繞性基板時，制用例如絲合聚丙烯（pp)、聚乙二 -予對苯—甲㈣（pET)、水溶性聚p基丙婦酸T酯㈣隊） 1313346 或其他可撓性材料所製成 墨元件或點膠元件。 ^夜衷置則如厨述般可為噴 到：上述之光束測量裝置為微高度計工呈，故太 可相^般固體垂直面（非曲面或 廊)本 喷印過程中進行量測，無論是從在整個 貌，到微液滴固化過程的動態二維輪廟變化維形 可有效改良先前技術之缺失。门“極精確之量測結果， 唯以上所述者，僅為本發明之最佳 能以之限定本發明所實施之範圍。 ' =已1不 利範圍所作之均等變依本叙明申請專 蓋之範圍内，丄!上=’皆應仍屬於本發明專利涵 禱。堇明3審查委員明鏹，並折惠准，是所至 【圖式簡單說明】 圖-係為本發明輪廓量測裝置之示音圖· =係為本發料於微結構的三維輪廓量财法之流程 =係為微液滴之位置·高度的量測曲線與實際曲線之比 係為微液滴之位置-高度的擬合曲線與實際曲線之比 本發明輪廓量測方法之流程圖; 微液滴之位置-高度與時間之曲線變化圖；以及 1313346 圖七係為本發明對於微液滴的三維輪廓量測方法流程圖 【主要元件符號說明】 1- 移動平台 2- 喷液裝置 3- 點光束測量裝置 4- 基板 5- 支架 ^ A-邊界點 B-左端點 C-頂點 D-右端點 E-邊界點1313346 Substituting all data points into equations (υ, we can get equation (2). Since equation (2) is an over-determined equation, we can use the least square method (丨east-square) to find it. The maximum-likehood solution ° X , 2 X , IX 2 X 2 I aby ^ y 2 _ x "2 x " 1 c -yn ^ (2) Of course, when there are many data points' It is also possible to use a higher order equation to fit. In addition to 'in order to see if there is an asymmetric phenomenon in the drying process of the microdroplet', we can still define the vertex c of the contour 3〇 as the demarcation point, the demarcation point C The data points to the left end point A are fitted with a curve, and the data points between the boundary point C and the right end point E are fitted with another curve. In order to verify the correctness of the fitting contour of the present invention, we will be the same The dried microdroplets were additionally measured by a contact a丨pha_port step, _le (KLA-Tencor Corp., USA). The results obtained by the household are shown by the dotted line 40 in Figure 4, while the solid line 42 is Using the contours of the left and right sides of the vertex c, each of which is fitted with a quadratic equation Now the two curves, regardless of diameter, height and contour, are almost all-mode-like, which proves that the proposed method is indeed feasible and has a very high correct production. The process steps of the above two-dimensional measurement method As shown in Figure 5, = medium. Step 5a: Ejecting with the money device - micro_ on the substrate I on the table 12 1313346 Step 5b · · The moving platform moves - the distance, so that the beam is measured The contour curve is obtained to obtain the contour data point; , =:, the data point is found in the wheel of the micro-droplet; the dark and the static W are between the two boundary points. The data point of the measurement slope is eliminated; and =5e: the contour boundary point and the remaining wheel (four) material point are curve-fitted in a multi-person equation to determine the correct rim of the micro-droplet. (4) After the method and device, we are the sorrowful contour map. When the slit is sent to the spot beam via the moving platform _ force U, the contour of the micro-droplet is measured, and the green droplet is measured in the same way: ^Mei silk, as shown in Figure 6, in the process of micro-droplet money, diameter and height It will become smaller. We can assume that the micro-droplet is a hemispherical segment, and the calculation of the fiscal contact angle is as in equation (3). e=2tan-1 (h/r) (3) Calculation of volume V The mode is as shown in equation (4), where h is the height, "path: ' V = (1/6) Trh (3h2 + r2) equation (4), so that the initial contact angle of the microdroplet can be calculated separately The effect is also unachievable by other measuring instruments, as well as the volume and the contact angle and volume of the droplets when they are dried, and then the concentration of the droplets in terms of volume change. Of course, the measuring method of the present invention can also perform the two-dimensional rounding measurement of the microdroplets during drying. The method steps are as shown in Fig. 7. Similar to Figure 2, the steps of Figure 13 are: Step 7a: Specify the beam measurement and stop position; Material: the beam measuring device measures the turf curve of the micro-droplet to point; step 7d: finds the rim boundary of the micro-droplet from the wheel material point, and two: between the two boundary points, the rim In the data point, the data point of the maximum measurement slope exceeding the point beam I measuring device 3 is removed; (1) the first beam item is entered: the boundary point is fitted with the remaining contour data points, and the private (4) line is fitted to Finding the movement of the micro-droplet=7g: the moving platform moves a distance to the stop position and the moving direction is perpendicular to the direction of the beam-measuring device; 2: 7h-beam beam measuring device determines whether it has been micro If the liquid droplets are not two, then return to step 7c; if yes, proceed to step 7i; and the dimensional wheel step 71: sequentially combine the correct rounds of the obtained rounds of the previous ones into three. The device can be used for laser measurement and white light measurement device or other use of spot light The measuring apparatus. The substrate is treated with hydrophilic or water repellent to facilitate inkjet or dispensing; and the substrate I is a non-flexible substrate or a flexible substrate, which is viewed by the user; when it is a replaceable substrate, for example, glass is used. When the substrate is made of a non-flexible material, for example, a spun polypropylene (pp), a polyethylene-di-p-phenylene (tetra) (pET), a water-soluble poly-p-propyl benzoate T is used. Ester (4) team) 1313346 or other flexible materials made of ink or dispensing components. ^The nightly setting can be sprayed as well as the cooking: the above-mentioned beam measuring device is micro-height calculation, so it can be measured in the same vertical plane (non-curved or gallery), regardless of the printing process, regardless of It is from the entire appearance, to the dynamic two-dimensional rotation of the micro-droplet curing process, which can effectively improve the lack of prior art. The "extremely accurate measurement results of the door" are only the best of the present invention to limit the scope of the present invention. '=The equalization of the unfavorable range has been described. Within the scope of the scope, 丄!上=' should still belong to the patent of the invention. 堇明3 Review Committee Alum, and discounted to the standard, is the [simplified description of the diagram] Figure - is the contour measurement of the present invention The sound map of the device is the flow of the three-dimensional contour method of the microstructure. The ratio of the measurement curve of the micro-droplet to the height of the actual curve is the position of the micro-droplet - Ratio of height fitting curve to actual curve Flow chart of contour measuring method of the present invention; position-height versus time curve of micro-droplet; and 1313346 Figure 7 is a three-dimensional contour amount of micro-droplet of the present invention Flow chart of measurement method [Description of main component symbols] 1- Mobile platform 2 - Liquid spray device 3 - Spot beam measuring device 4 - Substrate 5 - Bracket ^ A - Boundary point B - Left end point C - Vertex D - Right end point E - Boundary point