CN106813580B - A kind of Range Measurement System and its application based on the vectorial field after cross-polarization - Google Patents
A kind of Range Measurement System and its application based on the vectorial field after cross-polarization Download PDFInfo
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- CN106813580B CN106813580B CN201710057167.5A CN201710057167A CN106813580B CN 106813580 B CN106813580 B CN 106813580B CN 201710057167 A CN201710057167 A CN 201710057167A CN 106813580 B CN106813580 B CN 106813580B
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- 238000005259 measurement Methods 0.000 title claims abstract description 20
- 238000005388 cross polarization Methods 0.000 title claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- 238000012360 testing method Methods 0.000 claims abstract description 14
- 238000012545 processing Methods 0.000 claims abstract description 12
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 230000010287 polarization Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 abstract description 2
- 230000005622 photoelectricity Effects 0.000 description 2
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 244000131316 Panax pseudoginseng Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of Range Measurement System based on the vectorial field after cross-polarization and its applications, including vector light source, reflective mirror, double lens, double slit, convex lens, polarizing film, photodetector and signal processing system;Double slit is arranged in initial point position, photodetector is arranged in tested point position, the vector light source emits vector light to reflective mirror, vector light is after mirror reflection, after double lens adjusts optical path width, double slit is injected, interference light is after polarizing film filters, it is incident upon on photodetector, the distance of the object under test is obtained according to the optical information that photodetector measures.It is high that the system has measurement accuracy, and structure is simple, feature easy for installation, cheap, applied widely.
Description
Technical field
The present invention relates to vector flash ranging displacement field more particularly to a kind of distances based on the vectorial field after cross-polarization
Measuring system and its application.
Background technique
Laser interferance method displacement.This is a kind of relative measurement, it can not measure an absolute distance of the object from instrument,
But the relative distance of two testees can be measured.Its principle is a Michelson's interferometer, is become using reflecting mirror distance
The variation of interference fringe measures when change, and reflecting mirror moves to object B from object A, and the quantity of interference fringe variation reflects it
Distance.This measurement request condition is higher, but can be with precise measurement, it is also most accurate one in current all measurement means
Kind.And vectorial field displacement, it is the technological innovation moved to optical location, so that original interference fringe is become from one-dimensional
Two dimension greatly improves system sensitivity, so that displacement measurement is more accurate.
Summary of the invention
The purpose of the invention is to provide a kind of Range Measurement System based on the vectorial field after cross-polarization and its
Using.
The present invention is achieved through the following technical solutions: a kind of range measurement system based on the vectorial field after cross-polarization
System, including vector light source, reflective mirror, double lens, double slit, convex lens, cross-polarization piece, photodetector and signal processing system
System;By double slit setting in initial point position, by photodetector setting in tested point position, the vector light source is sent out to reflective mirror
Vector light is penetrated, vector light is after mirror reflection, after double lens adjusts optical path width, forms the light beam that radius is ε, then penetrates
Enter double slit, generates interference;It after interference light planoconvex lens focus, injects cross-polarization piece and is filtered, be then incident upon photoelectricity spy
It surveys on device, photodetector measures the light intensity I by any point P in the filtered interference pattern of polarizing film, and is input to signal
Processing system, signal processing system obtain initial point to the distance between tested point d=2 π bx/ (λ δ) by calculating;
Wherein,IxFor the cross stream component of light intensity I, m is to open up
Lotus number is flutterred, b is slit spacing, and x is horizontal distance of the P point to interference pattern central point, θB=arccos (b/ (2 ε)), λ are arrow
Measure optical wavelength.θ0For the initial phase of vector light, l/r0Change speed parameter for the polarization state of vector light radially.
Further, the double slit is micro-structure double slit.
Further, the photodetector is planar array detector or linear array detector, can also be pixilated detectors.
The application of a kind of distance measurement system in straight-line displacement sensing, which is characterized in that the application is, by the photoelectricity
Detector is connect with object under test, the double slit is arranged on the extended line of object under test linear motion, according to photodetection
The optical information that device measures obtains the real-time displacement of the object under test.
The beneficial effects of the present invention are: it is high that the system has measurement accuracy, and structure is simple, and easy for installation, price is low
Honest and clean, applied widely feature.
Detailed description of the invention
Fig. 1 is demonstration of the vector beam by double slit;
Fig. 2 is two-slit interference schematic device;
Fig. 3 is that vector beam projects schematic diagram;
Fig. 4 is when initial phase is 0, and topological charge number 1 regulates and controls interference fringe pattern when parameter l is 1.
In figure, vector light source 1, reflective mirror 2, double lens 3, double slit 4, convex lens 5, cross-polarization piece 6, photodetector 7,
Signal processing system 8.
Specific embodiment
As shown in figure 3, a kind of Range Measurement System based on the vectorial field after cross-polarization, including it is vector light source 1, anti-
Light microscopic 2, double lens 3, double slit 4, convex lens 5, cross-polarization piece 6, photodetector 7 and signal processing system 8;Double slit 4 is set
It sets in initial point position, by the setting of photodetector 7 in tested point position, the vector light source 1 emits vector to reflective mirror 2
Light, vector light is after the reflection of reflective mirror 2, after double lens 3 adjusts optical path width, forms the light beam that radius is ε, then injects double
Seam 4 generates interference;After interference light planoconvex lens 5 focus, injects cross-polarization piece and be filtered, be then incident upon photodetection
On device 7, the generation of interference fringe is realized by the following method:
The distribution of light intensity formula of known any mixed polarization states vectorial field is
Wherein r=(x2+y2)1/2, as through double lens 3 adjust optical path width after beam radius, r=ε, θ=arctan
(y/x)、l/r0Change speed parameter for the polarization state of vector light radially.M is topological charge number, θ0For initial phase, exAnd eyPoint
Not Wei unit vector on the direction x and the direction y, A0Amplitude is indicated, in next reckoning, it is believed that A is cut positioned at light beam
Any point is steady state value on face.R indicates that on the x/y plane where slit, origin is put to investigation in cartesian coordinate system
Distance.θ is the azimuth of the polar coordinate system where beam cross-section.As shown in Figure 1, there are two slits of AB on x/y plane,
The distance between slit is b, while the distance of AB slit to origin is identical, and is parallel to each other, slit width vertical with x-axis
For a.After monochromatic mixed polarization states vectorial field represented by by formula passes through two slits, it can be equivalent to two secondary wires
Light source is finally overlapped on the plane of vision being parallel to after x/y plane.It is distance of the slit to plane of vision that we, which take d,.
Assuming that the width of slit is sufficiently small and infinite in length, furthermore the scale of slit spacing b be sewn to plane of vision distance d compared to
It is sufficiently small.
It decomposes vectorial field and carries out theoretical calculation:
Mixed polarization states vectorial field is decomposed into two component polarization light of x Yu the direction y, it is independent opposite to each other.Expression
Formula is write respectively:
Ex(θ)=cos [+2 π l (r/r of m θ0)+θ0]
Ey(θ)=sin [+2 π l (r/r of m θ0)+θ0]
When light beam reaches AB slit, light beam can regard as shown in Figure 1, it can be seen from the figure that only lucky position
Light in slit position can just pass through slit.Slit AB is symmetrical about y-axis, therefore is located at y-coordinate value on two slits
The azimuth of origin corresponding to identical two points is respectively θAWith θB.We can be found that θAWith θBSupplementary angle relationship each other, i.e. θA
=π-θB, θB=arccos (b/ (2 ε));When the polarized light field in the x of decomposition and the direction y passes through AB slit, expression formula can be with
It is written as:
The light intensity expression Ix of the direction x polarization state component and the direction y polarization state component after interference can be write out respectively
With Iy.We enable first
Then the light intensity expression of Ix and Iy, which can simplify, is written as:
Wherein δ is to pass through the phase difference between two slit beam of AB.In Tomas Young's tow-slit experiment, as shown in Fig. 2, setting
The initial phase of incident light source isIt is the amount being randomly generated, received respectively at inspecting position P from (QAP) with
(QBP) phase of two optical disturbances is written as respectively:
Then phase difference are as follows:
The π bx/ of δ=2 (λ d)
Wherein d is distance of the plane where double slit to plane where photoelectric sensor, that is, measured required for us
Distance.
Below by the reliability of following experimental verification the method for the invention:
Test distance 5cm, 20cm, 1m are set, according to arrangement vector light source 1 shown in Fig. 3, reflective mirror 2, double
Lens 3, double slit 4, convex lens 5, cross-polarization piece 6, photodetector 7 and signal processing system 8;Double slit 4 is arranged initial
Point position, by the setting of photodetector 7 in tested point position, the vector light source 1 emits vector light, vector light to reflective mirror 2
After the reflection of reflective mirror 2, after double lens 3 adjusts optical path width, the light beam that radius is ε is formed, double slit 4 is then injected, is generated
Interference;After interference light planoconvex lens 5 focus, injects cross-polarization piece and be filtered, be then incident upon on photodetector 7, light
Electric explorer 7 measures the light intensity I by any point P in the filtered interference pattern of polarizing film, and is input to signal processing system
8, signal processing system 8 obtains initial point to the distance between tested point d=2 π bx/ (λ δ) by calculating;
Wherein,IxFor the cross of light intensity I
To component, m is topological charge number, and b is slit spacing, and x is horizontal distance of the P point to interference pattern central point, θB=arccos (b/
(2 ε)), λ is vector optical wavelength.θ0For the initial phase of vector light, l/r0Change speed ginseng for the polarization state of vector light radially
Number.
The result output of three measurement distances is as shown in the table:
Set distance | 5cm | 20cm | 1m |
Measurement result | 4.998cm | 20.001cm | 100.002cm |
The present invention also provides application of the above system in straight-line displacement sensing, which is, by the photodetector 7
It connect, the double slit 4 is arranged on the extended line of object under test linear motion with object under test, surveyed according to photodetector 7
The optical information obtained obtains the real-time displacement of the object under test.
Claims (4)
1. a kind of Range Measurement System based on the vectorial field after cross-polarization, which is characterized in that including vector light source (1),
Reflective mirror (2), double lens (3), double slit (4), convex lens (5), cross-polarization piece, photodetector (7) and signal processing system
(8);By double slit (4) setting in initial point position, photodetector (7) are arranged in tested point position, the vector light source (1)
Emit vector light to reflective mirror (2), vector light is after reflective mirror (2) are reflected, and after double lens (3) adjust optical path width, is formed
Radius is the light beam of ε, then injects double slit (4), generates interference;After interference light planoconvex lens (5) focus, cross-polarization piece is injected
It is filtered, is then incident upon on photodetector (7), photodetector (7) is measured by the filtered interference pattern of polarizing film
The light intensity I of any point P in sample, and signal processing system (8) are input to, signal processing system (8) obtains initial point by calculating
To the distance between tested point d=2 π bx/ (λ δ);
Wherein,IxFor the cross stream component of light intensity I, m
For topological charge number, b is slit spacing, and x is horizontal distance of the P point to interference pattern central point, θB=arccos (b/ (2 ε)), λ
For vector optical wavelength;θ0For the initial phase of vector light, l/r0Change speed parameter for the polarization state of vector light radially;
When detecting straight-line displacement, the photodetector is connect with object under test, the double slit is arranged in object under test
On the extended line of linear motion, the real-time displacement of the object under test is obtained according to the optical information that photodetector measures.
2. Range Measurement System according to claim 1, which is characterized in that the double slit (4) is micro-structure double slit.
3. Range Measurement System according to claim 1, which is characterized in that the photodetector (7) is that face battle array is visited
Survey device or linear array detector or pixilated detectors.
4. a kind of application method of Range Measurement System described in claim 1 in straight-line displacement sensing, which is characterized in that should
Method is to connect the photodetector (7) with object under test, and the double slit (4) setting is moved along a straight line in object under test
Extended line on, the real-time displacement of the object under test is obtained according to the optical information that photodetector (7) measures.
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CN202041720U (en) * | 2011-04-26 | 2011-11-16 | 四川大学 | Reflection-type double-slit interferometer |
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Effective date of registration: 20231025 Address after: No. 998, Wenyi West Road, Yuhang District, Hangzhou City, Zhejiang Province Patentee after: HANGZHOU HUICUI INTELLIGENT TECHNOLOGY CO.,LTD. Address before: No.928, No.2 street, Jianggan Economic Development Zone, Hangzhou City, Zhejiang Province, 310018 Patentee before: ZHEJIANG SCI-TECH University |