CN106813580B - A kind of Range Measurement System and its application based on the vectorial field after cross-polarization - Google Patents

A kind of Range Measurement System and its application based on the vectorial field after cross-polarization Download PDF

Info

Publication number
CN106813580B
CN106813580B CN201710057167.5A CN201710057167A CN106813580B CN 106813580 B CN106813580 B CN 106813580B CN 201710057167 A CN201710057167 A CN 201710057167A CN 106813580 B CN106813580 B CN 106813580B
Authority
CN
China
Prior art keywords
photodetector
double
slit
vector
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201710057167.5A
Other languages
Chinese (zh)
Other versions
CN106813580A (en
Inventor
陈瑞品
高腾跃
钱朝阳
张晓雨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hangzhou Huicui Intelligent Technology Co ltd
Original Assignee
Zhejiang Sci Tech University ZSTU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Sci Tech University ZSTU filed Critical Zhejiang Sci Tech University ZSTU
Priority to CN201710057167.5A priority Critical patent/CN106813580B/en
Publication of CN106813580A publication Critical patent/CN106813580A/en
Application granted granted Critical
Publication of CN106813580B publication Critical patent/CN106813580B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a kind of Range Measurement System based on the vectorial field after cross-polarization and its applications, including vector light source, reflective mirror, double lens, double slit, convex lens, polarizing film, photodetector and signal processing system;Double slit is arranged in initial point position, photodetector is arranged in tested point position, the vector light source emits vector light to reflective mirror, vector light is after mirror reflection, after double lens adjusts optical path width, double slit is injected, interference light is after polarizing film filters, it is incident upon on photodetector, the distance of the object under test is obtained according to the optical information that photodetector measures.It is high that the system has measurement accuracy, and structure is simple, feature easy for installation, cheap, applied widely.

Description

A kind of Range Measurement System and its application based on the vectorial field after cross-polarization
Technical field
The present invention relates to vector flash ranging displacement field more particularly to a kind of distances based on the vectorial field after cross-polarization Measuring system and its application.
Background technique
Laser interferance method displacement.This is a kind of relative measurement, it can not measure an absolute distance of the object from instrument, But the relative distance of two testees can be measured.Its principle is a Michelson's interferometer, is become using reflecting mirror distance The variation of interference fringe measures when change, and reflecting mirror moves to object B from object A, and the quantity of interference fringe variation reflects it Distance.This measurement request condition is higher, but can be with precise measurement, it is also most accurate one in current all measurement means Kind.And vectorial field displacement, it is the technological innovation moved to optical location, so that original interference fringe is become from one-dimensional Two dimension greatly improves system sensitivity, so that displacement measurement is more accurate.
Summary of the invention
The purpose of the invention is to provide a kind of Range Measurement System based on the vectorial field after cross-polarization and its Using.
The present invention is achieved through the following technical solutions: a kind of range measurement system based on the vectorial field after cross-polarization System, including vector light source, reflective mirror, double lens, double slit, convex lens, cross-polarization piece, photodetector and signal processing system System;By double slit setting in initial point position, by photodetector setting in tested point position, the vector light source is sent out to reflective mirror Vector light is penetrated, vector light is after mirror reflection, after double lens adjusts optical path width, forms the light beam that radius is ε, then penetrates Enter double slit, generates interference;It after interference light planoconvex lens focus, injects cross-polarization piece and is filtered, be then incident upon photoelectricity spy It surveys on device, photodetector measures the light intensity I by any point P in the filtered interference pattern of polarizing film, and is input to signal Processing system, signal processing system obtain initial point to the distance between tested point d=2 π bx/ (λ δ) by calculating;
Wherein,IxFor the cross stream component of light intensity I, m is to open up Lotus number is flutterred, b is slit spacing, and x is horizontal distance of the P point to interference pattern central point, θB=arccos (b/ (2 ε)), λ are arrow Measure optical wavelength.θ0For the initial phase of vector light, l/r0Change speed parameter for the polarization state of vector light radially.
Further, the double slit is micro-structure double slit.
Further, the photodetector is planar array detector or linear array detector, can also be pixilated detectors.
The application of a kind of distance measurement system in straight-line displacement sensing, which is characterized in that the application is, by the photoelectricity Detector is connect with object under test, the double slit is arranged on the extended line of object under test linear motion, according to photodetection The optical information that device measures obtains the real-time displacement of the object under test.
The beneficial effects of the present invention are: it is high that the system has measurement accuracy, and structure is simple, and easy for installation, price is low Honest and clean, applied widely feature.
Detailed description of the invention
Fig. 1 is demonstration of the vector beam by double slit;
Fig. 2 is two-slit interference schematic device;
Fig. 3 is that vector beam projects schematic diagram;
Fig. 4 is when initial phase is 0, and topological charge number 1 regulates and controls interference fringe pattern when parameter l is 1.
In figure, vector light source 1, reflective mirror 2, double lens 3, double slit 4, convex lens 5, cross-polarization piece 6, photodetector 7, Signal processing system 8.
Specific embodiment
As shown in figure 3, a kind of Range Measurement System based on the vectorial field after cross-polarization, including it is vector light source 1, anti- Light microscopic 2, double lens 3, double slit 4, convex lens 5, cross-polarization piece 6, photodetector 7 and signal processing system 8;Double slit 4 is set It sets in initial point position, by the setting of photodetector 7 in tested point position, the vector light source 1 emits vector to reflective mirror 2 Light, vector light is after the reflection of reflective mirror 2, after double lens 3 adjusts optical path width, forms the light beam that radius is ε, then injects double Seam 4 generates interference;After interference light planoconvex lens 5 focus, injects cross-polarization piece and be filtered, be then incident upon photodetection On device 7, the generation of interference fringe is realized by the following method:
The distribution of light intensity formula of known any mixed polarization states vectorial field is
Wherein r=(x2+y2)1/2, as through double lens 3 adjust optical path width after beam radius, r=ε, θ=arctan (y/x)、l/r0Change speed parameter for the polarization state of vector light radially.M is topological charge number, θ0For initial phase, exAnd eyPoint Not Wei unit vector on the direction x and the direction y, A0Amplitude is indicated, in next reckoning, it is believed that A is cut positioned at light beam Any point is steady state value on face.R indicates that on the x/y plane where slit, origin is put to investigation in cartesian coordinate system Distance.θ is the azimuth of the polar coordinate system where beam cross-section.As shown in Figure 1, there are two slits of AB on x/y plane, The distance between slit is b, while the distance of AB slit to origin is identical, and is parallel to each other, slit width vertical with x-axis For a.After monochromatic mixed polarization states vectorial field represented by by formula passes through two slits, it can be equivalent to two secondary wires Light source is finally overlapped on the plane of vision being parallel to after x/y plane.It is distance of the slit to plane of vision that we, which take d,. Assuming that the width of slit is sufficiently small and infinite in length, furthermore the scale of slit spacing b be sewn to plane of vision distance d compared to It is sufficiently small.
It decomposes vectorial field and carries out theoretical calculation:
Mixed polarization states vectorial field is decomposed into two component polarization light of x Yu the direction y, it is independent opposite to each other.Expression Formula is write respectively:
Ex(θ)=cos [+2 π l (r/r of m θ0)+θ0]
Ey(θ)=sin [+2 π l (r/r of m θ0)+θ0]
When light beam reaches AB slit, light beam can regard as shown in Figure 1, it can be seen from the figure that only lucky position Light in slit position can just pass through slit.Slit AB is symmetrical about y-axis, therefore is located at y-coordinate value on two slits The azimuth of origin corresponding to identical two points is respectively θAWith θB.We can be found that θAWith θBSupplementary angle relationship each other, i.e. θA =π-θB, θB=arccos (b/ (2 ε));When the polarized light field in the x of decomposition and the direction y passes through AB slit, expression formula can be with It is written as:
The light intensity expression Ix of the direction x polarization state component and the direction y polarization state component after interference can be write out respectively With Iy.We enable first
Then the light intensity expression of Ix and Iy, which can simplify, is written as:
Wherein δ is to pass through the phase difference between two slit beam of AB.In Tomas Young's tow-slit experiment, as shown in Fig. 2, setting The initial phase of incident light source isIt is the amount being randomly generated, received respectively at inspecting position P from (QAP) with (QBP) phase of two optical disturbances is written as respectively:
Then phase difference are as follows:
The π bx/ of δ=2 (λ d)
Wherein d is distance of the plane where double slit to plane where photoelectric sensor, that is, measured required for us Distance.
Below by the reliability of following experimental verification the method for the invention:
Test distance 5cm, 20cm, 1m are set, according to arrangement vector light source 1 shown in Fig. 3, reflective mirror 2, double Lens 3, double slit 4, convex lens 5, cross-polarization piece 6, photodetector 7 and signal processing system 8;Double slit 4 is arranged initial Point position, by the setting of photodetector 7 in tested point position, the vector light source 1 emits vector light, vector light to reflective mirror 2 After the reflection of reflective mirror 2, after double lens 3 adjusts optical path width, the light beam that radius is ε is formed, double slit 4 is then injected, is generated Interference;After interference light planoconvex lens 5 focus, injects cross-polarization piece and be filtered, be then incident upon on photodetector 7, light Electric explorer 7 measures the light intensity I by any point P in the filtered interference pattern of polarizing film, and is input to signal processing system 8, signal processing system 8 obtains initial point to the distance between tested point d=2 π bx/ (λ δ) by calculating;
Wherein,IxFor the cross of light intensity I To component, m is topological charge number, and b is slit spacing, and x is horizontal distance of the P point to interference pattern central point, θB=arccos (b/ (2 ε)), λ is vector optical wavelength.θ0For the initial phase of vector light, l/r0Change speed ginseng for the polarization state of vector light radially Number.
The result output of three measurement distances is as shown in the table:
Set distance 5cm 20cm 1m
Measurement result 4.998cm 20.001cm 100.002cm
The present invention also provides application of the above system in straight-line displacement sensing, which is, by the photodetector 7 It connect, the double slit 4 is arranged on the extended line of object under test linear motion with object under test, surveyed according to photodetector 7 The optical information obtained obtains the real-time displacement of the object under test.

Claims (4)

1. a kind of Range Measurement System based on the vectorial field after cross-polarization, which is characterized in that including vector light source (1), Reflective mirror (2), double lens (3), double slit (4), convex lens (5), cross-polarization piece, photodetector (7) and signal processing system (8);By double slit (4) setting in initial point position, photodetector (7) are arranged in tested point position, the vector light source (1) Emit vector light to reflective mirror (2), vector light is after reflective mirror (2) are reflected, and after double lens (3) adjust optical path width, is formed Radius is the light beam of ε, then injects double slit (4), generates interference;After interference light planoconvex lens (5) focus, cross-polarization piece is injected It is filtered, is then incident upon on photodetector (7), photodetector (7) is measured by the filtered interference pattern of polarizing film The light intensity I of any point P in sample, and signal processing system (8) are input to, signal processing system (8) obtains initial point by calculating To the distance between tested point d=2 π bx/ (λ δ);
Wherein,IxFor the cross stream component of light intensity I, m For topological charge number, b is slit spacing, and x is horizontal distance of the P point to interference pattern central point, θB=arccos (b/ (2 ε)), λ For vector optical wavelength;θ0For the initial phase of vector light, l/r0Change speed parameter for the polarization state of vector light radially;
When detecting straight-line displacement, the photodetector is connect with object under test, the double slit is arranged in object under test On the extended line of linear motion, the real-time displacement of the object under test is obtained according to the optical information that photodetector measures.
2. Range Measurement System according to claim 1, which is characterized in that the double slit (4) is micro-structure double slit.
3. Range Measurement System according to claim 1, which is characterized in that the photodetector (7) is that face battle array is visited Survey device or linear array detector or pixilated detectors.
4. a kind of application method of Range Measurement System described in claim 1 in straight-line displacement sensing, which is characterized in that should Method is to connect the photodetector (7) with object under test, and the double slit (4) setting is moved along a straight line in object under test Extended line on, the real-time displacement of the object under test is obtained according to the optical information that photodetector (7) measures.
CN201710057167.5A 2017-01-23 2017-01-23 A kind of Range Measurement System and its application based on the vectorial field after cross-polarization Active CN106813580B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710057167.5A CN106813580B (en) 2017-01-23 2017-01-23 A kind of Range Measurement System and its application based on the vectorial field after cross-polarization

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710057167.5A CN106813580B (en) 2017-01-23 2017-01-23 A kind of Range Measurement System and its application based on the vectorial field after cross-polarization

Publications (2)

Publication Number Publication Date
CN106813580A CN106813580A (en) 2017-06-09
CN106813580B true CN106813580B (en) 2019-05-07

Family

ID=59112226

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710057167.5A Active CN106813580B (en) 2017-01-23 2017-01-23 A kind of Range Measurement System and its application based on the vectorial field after cross-polarization

Country Status (1)

Country Link
CN (1) CN106813580B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109557679B (en) * 2019-01-07 2020-10-27 浙江理工大学 Linear polarization light generation device of vector light beam based on radial polarization change

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101458211A (en) * 2007-12-12 2009-06-17 中国科学院高能物理研究所 Multi-slilt filtering double slit interferometer
CN101846553A (en) * 2010-03-30 2010-09-29 北京理工大学 Device and method for measuring polarization state by two-slit interference method
CN202041720U (en) * 2011-04-26 2011-11-16 四川大学 Reflection-type double-slit interferometer
CN102607435A (en) * 2012-03-27 2012-07-25 黑龙江工程学院 Device and method for measuring thickness of optical film by adopting double-slit interference method
CN203687880U (en) * 2014-01-20 2014-07-02 浙江大学 Optical displacement measuring system
CN104034268A (en) * 2014-07-01 2014-09-10 西安工业大学 Two-slit interference fringe decoding spectrum confocal displacement sensor and displacement measurement method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101458211A (en) * 2007-12-12 2009-06-17 中国科学院高能物理研究所 Multi-slilt filtering double slit interferometer
CN101846553A (en) * 2010-03-30 2010-09-29 北京理工大学 Device and method for measuring polarization state by two-slit interference method
CN202041720U (en) * 2011-04-26 2011-11-16 四川大学 Reflection-type double-slit interferometer
CN102607435A (en) * 2012-03-27 2012-07-25 黑龙江工程学院 Device and method for measuring thickness of optical film by adopting double-slit interference method
CN203687880U (en) * 2014-01-20 2014-07-02 浙江大学 Optical displacement measuring system
CN104034268A (en) * 2014-07-01 2014-09-10 西安工业大学 Two-slit interference fringe decoding spectrum confocal displacement sensor and displacement measurement method thereof

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
The Two-slit Interference of Vector Optical Fields with Radially-variant Polarization;Tengyue Gao等;《Progress In Electromagnetic Research Symposium》;20160811;正文第2节,图1
Young’s two-slit interference of vector light fields;Yongnan Li等;《OPTICS LETTERS》;20120601;第37卷(第11期);第1790-1792页

Also Published As

Publication number Publication date
CN106813580A (en) 2017-06-09

Similar Documents

Publication Publication Date Title
CN104634283B (en) Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection
CN108168465B (en) A kind of optical path laser heterodyne interferometry roll angle high precision measuring device and method altogether
CN102003935B (en) Environment compensation method for measurement employing laser tracker
CN105571529B (en) A kind of laser heterodyne interference system for angle measurement without error
CN109579780B (en) Polarization-based light splitting auto-collimation three-dimensional angle measuring device and method
CN105004273B (en) A kind of laser interferometer displacement measuring system
CN101846506B (en) Roll angle measurement method based on common path parallel beams
AU2014202103A1 (en) Apparatus For Detecting A 3D Structure Of An Object
CN104180776B (en) High-resolution roll angle measurement method and device based on difference interference phase method
CN101377414B (en) Apparatus and method for measuring two-dimensional small angle based on light beam angle drift dynamic compensation
CN102155927A (en) Two-dimensional micro angle measuring device based on laser auto-collimation
CN100460811C (en) Method and device for improving straight line degree measurement sensitivity
CN107806821B (en) With the difference single-frequency interference signal processing unit and method of integrated four photodetectors
CN105424322A (en) Self-calibration optical axis parallelism detector and detection method
CN101832821A (en) Method and device for measuring laser wavelength based on bound wavelength
CN108775878B (en) Grating heterodyne interference system and roll angle measuring method thereof
CN102636457A (en) Trace liquid refractive index measuring system and measuring method
CN106908004B (en) A kind of distance measurement system and its application based on vectorial field
CN106123769A (en) The differential planar mirror laser interference device of without error
CN105806215A (en) Roll angle measurement device and method based on bi-blazed grating heterodyne interference
CN105698710B (en) A dynamic angle measurement apparatus and application thereof
CN104330053B (en) Micro- angle measurement method and device
CN106813580B (en) A kind of Range Measurement System and its application based on the vectorial field after cross-polarization
CN106908003B (en) A kind of Range Measurement System and its application based on the vectorial field after longitudinal polarization
CN109579782A (en) A kind of big working distance auto-collimation three-dimensional perspective measuring device of high-precision and method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20231025

Address after: No. 998, Wenyi West Road, Yuhang District, Hangzhou City, Zhejiang Province

Patentee after: HANGZHOU HUICUI INTELLIGENT TECHNOLOGY CO.,LTD.

Address before: No.928, No.2 street, Jianggan Economic Development Zone, Hangzhou City, Zhejiang Province, 310018

Patentee before: ZHEJIANG SCI-TECH University