CN106813580A - A kind of Range Measurement System of vectorial field based on after cross-polarization and its application - Google Patents

A kind of Range Measurement System of vectorial field based on after cross-polarization and its application Download PDF

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Publication number
CN106813580A
CN106813580A CN201710057167.5A CN201710057167A CN106813580A CN 106813580 A CN106813580 A CN 106813580A CN 201710057167 A CN201710057167 A CN 201710057167A CN 106813580 A CN106813580 A CN 106813580A
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photodetector
double
slit
vector
light
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CN106813580B (en
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陈瑞品
高腾跃
钱朝阳
张晓雨
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Hangzhou Huicui Intelligent Technology Co ltd
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Zhejiang Sci Tech University ZSTU
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Range Measurement System and its application the invention discloses a kind of vectorial field based on after cross-polarization, including vector light source, reflective mirror, double lens, double slit, convex lens, polarizer, photodetector and signal processing system;Double slit is arranged on initial point position, photodetector is arranged on tested point position, the vector light source launches vector light to reflective mirror, vector light is after mirror reflection, after through double lens adjustment optical path width, double slit is injected, interference light is by after polarizer filtering, it is incident upon on photodetector, the optical information measured according to photodetector obtains the distance of the object under test.The system has certainty of measurement high, and simple structure, easy for installation, cheap, the characteristics of applied widely.

Description

A kind of Range Measurement System of vectorial field based on after cross-polarization and its application
Technical field
The present invention relates to vector light displacement field, more particularly to a kind of distance of the vectorial field based on after cross-polarization Measuring system and its application.
Background technology
Laser interferance method displacement.This is a kind of relative measurement, and it cannot measure absolute distance of the object from instrument, But the relative distance of two testees can be measured.Its principle is a Michelson's interferometer, is become using speculum distance The change of interference fringe is measured during change, and speculum moves to object B from object A, and the quantity of interference fringe change reflects it Distance.This measurement request condition is higher, but can be accurate measurement, and it is also most accurate one in current all measurement means Kind.And vectorial field displacement, it is the technological innovation moved to optical location so that interference fringe originally is changed into from one-dimensional Two dimension, greatly improves system sensitivity so that displacement measurement is more accurate.
The content of the invention
The purpose of the present invention be provide a kind of vectorial field based on after cross-polarization Range Measurement System and its Using.
The present invention is achieved through the following technical solutions:A kind of range measurement system of the vectorial field based on after cross-polarization System, including vector light source, reflective mirror, double lens, double slit, convex lens, cross-polarization piece, photodetector and signal transacting system System;Double slit is arranged on initial point position, photodetector is arranged on tested point position, the vector light source is sent out to reflective mirror Vector light is penetrated, after vector light is through mirror reflection, after adjusting optical path width through double lens, the light beam that radius is ε is formed, then penetrated Enter double slit, produce interference;After interference light planoconvex lens is focused on, inject cross-polarization piece and be filtered, be then incident upon light electrical resistivity survey Survey on device, photodetector measures the light intensity I by any point P in the filtered interference pattern of polarizer, and is input to signal Processing system, signal processing system obtains initial point to the distance between tested point d=2 π bx/ (λ δ) by calculating;
Wherein,IxIt is the cross stream component of light intensity I, m is to open up Lotus number is flutterred, b is slit spacing, and x is horizontal range of the P points to interference pattern central point, θB=arccos (b/ (2 ε)), λ are arrow Amount optical wavelength.θ0It is the initial phase of vector light, l/r0For vector light polarization state radially changes speed parameter.
Further, described double slit is micro-structural double slit.
Further, described photodetector is planar array detector or linear array detector, can also be pixilated detectors.
Application of a kind of distance measurement system in straight-line displacement sensing, it is characterised in that the application is, by the photoelectricity Detector is connected with object under test, the double slit is arranged on the extended line of object under test linear motion, according to photodetection The optical information that device is measured obtains the real-time displacement of the object under test.
The beneficial effects of the present invention are:The system has certainty of measurement high, and simple structure, easy for installation, and price is low It is honest and clean, the characteristics of applied widely.
Brief description of the drawings
Fig. 1 is demonstration of the vector beam by double slit;
Fig. 2 is two-slit interference schematic device;
Fig. 3 is that vector beam projects schematic diagram;
Fig. 4 is that topological charge number is 1 when initial phase is 0, interference fringe pattern when regulation and control parameter l is 1.
In figure, vector light source 1, reflective mirror 2, double lens 3, double slit 4, convex lens 5, cross-polarization piece 6, photodetector 7, Signal processing system 8.
Specific embodiment
It is as shown in figure 3, a kind of Range Measurement System of the vectorial field based on after cross-polarization including vector light source 1, anti- Light microscopic 2, double lens 3, double slit 4, convex lens 5, cross-polarization piece 6, photodetector 7 and signal processing system 8;Double slit 4 is set Put in initial point position, photodetector 7 is arranged on tested point position, the vector light source 1 launches vector to reflective mirror 2 Light, after vector light reflects through reflective mirror 2, after adjusting optical path width through double lens 3, forms the light beam that radius is ε, then injects double Seam 4, produces interference;After interference light planoconvex lens 5 is focused on, inject cross-polarization piece and be filtered, be then incident upon photodetection On device 7, the generation of interference fringe is realized by the following method:
The distribution of light intensity formula of known any mixed polarization states vectorial field is
Wherein r=(x2+y2)1/2, as through the beam radius after the adjustment optical path width of double lens 3, r=ε, θ=arctan (y/x)、l/r0For vector light polarization state radially changes speed parameter.M is topological charge number, θ0It is initial phase, exAnd eyPoint Unit vector that Wei be on x directions and y directions, A0Amplitude is represented, in ensuing reckoning, it is believed that A cuts positioned at light beam Any point is steady state value on face.R represents that on the x/y plane where slit origin is put to investigation in cartesian coordinate system Distance.θ is the azimuth of the polar coordinate system where beam cross-section.As shown in figure 1, there are two slits of AB on x/y plane, The distance between slit is b, while the distance of AB slits to origin is identical, and is parallel to each other, slit width vertical with x-axis It is a.When the monochromatic mixed polarization states vectorial field represented by formula is by that after two slits, can be equivalent to two secondary wires Light source, is finally overlapped on the plane of vision after parallel to x/y plane.It is the distance of slit to plane of vision that we take d. Assuming that the width of slit is sufficiently small and infinite in length, in addition the yardstick of slit spacing b be sewn to plane of vision apart from d compared with It is sufficiently small.
Decomposing vectorial field carries out theoretical calculation:
Mixed polarization states vectorial field is decomposed into two component polarization light of x and y directions, it is independent toward each other.Expression Formula is write respectively:
Ex(θ)=cos [π l (r/r of m θ+20)+θ0]
Ey(θ)=sin [π l (r/r of m θ+20)+θ0]
When light beam reaches AB slits, light beam can be regarded as shown in figure 1, it can be seen that only lucky position Light in slit position just can be by slit.Slit AB is symmetrical on y-axis, therefore in y-coordinate value on two slits The azimuth of origin is respectively θ corresponding to two points of identicalAWith θB.We can be found that θAWith θBSupplementary angle relation, i.e. θ each otherA =π-θB, θB=arccos (b/ (2 ε));When the polarized light field in x and the y directions decomposed passes through AB slits, its expression formula can be with It is written as:
The light intensity expression Ix of x directions polarization state component and y directions polarization state component after interference can respectively be write out With Iy.We make first
Then the light intensity expression of Ix and Iy can simplify and be written as:
Wherein δ is by the phase difference between the slit beams of AB two.In Tomas Young's tow-slit experiment, as shown in Fig. 2 setting The initial phase of incident light source isIt is an amount for randomly generating, at inspecting position P respectively receive from (QAP) with (QBP) phase of two optical disturbances is written as respectively:
Then phase difference is:
δ=2 π bx/ (λ d)
Wherein d is distance of the plane where double slit to plane where photoelectric sensor, that is, measured required for us Distance.
Below by the reliability of following experimental verification the method for the invention:
Test distance 5cm, 20cm, 1m are set, according to the arrangement vector light source 1, reflective mirror 2 shown in Fig. 3, double Lens 3, double slit 4, convex lens 5, cross-polarization piece 6, photodetector 7 and signal processing system 8;Double slit 4 is arranged on initially Point position, tested point position is arranged on by photodetector 7, and the vector light source 1 launches vector light, vector light to reflective mirror 2 After being reflected through reflective mirror 2, after adjusting optical path width through double lens 3, the light beam that radius is ε is formed, then inject double slit 4, produced Interference;After interference light planoconvex lens 5 is focused on, inject cross-polarization piece and be filtered, be then incident upon on photodetector 7, light Electric explorer 7 measures the light intensity I by any point P in the filtered interference pattern of polarizer, and is input to signal processing system 8, signal processing system 8 obtains initial point to the distance between tested point d=2 π bx/ (λ δ) by calculating;
Wherein,IxIt is the transverse direction of light intensity I Component, m is topological charge number, and b is slit spacing, and x is horizontal range of the P points to interference pattern central point, θB=arccos (b/ (2 ε)), λ is vector optical wavelength.θ0It is the initial phase of vector light, l/r0For vector light polarization state radially changes speed parameter.
The result output of three measurement distances is as shown in the table:
Setpoint distance 5cm 20cm 1m
Measurement result 4.998cm 20.001cm 100.002cm
The present invention also provides application of the said system in straight-line displacement sensing, and the application is, by the photodetector 7 It is connected with object under test, the double slit 4 is arranged on the extended line of object under test linear motion, is surveyed according to photodetector 7 The optical information for obtaining obtains the real-time displacement of the object under test.

Claims (4)

1. a kind of Range Measurement System of the vectorial field based on after cross-polarization, it is characterised in that including vector light source (1), Reflective mirror (2), double lens (3), double slit (4), convex lens (5), cross-polarization piece, photodetector (7) and signal processing system (8);Double slit (4) is arranged on initial point position, photodetector (7) is arranged on tested point position, the vector light source (1) Launch vector light to reflective mirror (2), after vector light reflects through reflective mirror (2), after double lens (3) adjustment optical path width, formation Radius is the light beam of ε, then injects double slit (4), produces interference;After interference light planoconvex lens (5) is focused on, cross-polarization piece is injected It is filtered, is then incident upon on photodetector (7), photodetector (7) is measured by the filtered interference pattern of polarizer The light intensity I of any point P in sample, and signal processing system (8) is input to, signal processing system (8) obtains initial point by calculating To the distance between tested point d=2 π bx/ (λ δ);
Wherein,IxIt is the transverse direction point of light intensity I Amount, m is topological charge number, and b is slit spacing, and x is horizontal range of the P points to interference pattern central point, θB=arccos (b/ (2 ε)), λ is vector optical wavelength.θ0It is the initial phase of vector light, l/r0For vector light polarization state radially changes speed parameter.
2. Range Measurement System according to claim 1, it is characterised in that described double slit (4) is micro-structural double slit.
3. Range Measurement System according to claim 1, it is characterised in that described photodetector (7) is that face battle array is visited Device or linear array detector are surveyed, pixilated detectors are can also be.
4. a kind of application of the Range Measurement System described in claim 1 in straight-line displacement sensing, it is characterised in that the application For, the photodetector (7) is connected with object under test, the double slit (4) is arranged on prolonging for object under test linear motion On line long, the optical information measured according to photodetector (7) obtains the real-time displacement of the object under test.
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CN109557679A (en) * 2019-01-07 2019-04-02 浙江理工大学 A kind of linearly polarized light generating means of the vector beam based on radial polarisation variation

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Effective date of registration: 20231025

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Patentee before: ZHEJIANG SCI-TECH University