CN106908003B - A kind of Range Measurement System and its application based on the vectorial field after longitudinal polarization - Google Patents
A kind of Range Measurement System and its application based on the vectorial field after longitudinal polarization Download PDFInfo
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- CN106908003B CN106908003B CN201710050449.2A CN201710050449A CN106908003B CN 106908003 B CN106908003 B CN 106908003B CN 201710050449 A CN201710050449 A CN 201710050449A CN 106908003 B CN106908003 B CN 106908003B
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- 238000005259 measurement Methods 0.000 title claims abstract description 17
- 230000010287 polarization Effects 0.000 title claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- 238000012360 testing method Methods 0.000 claims abstract description 14
- 238000012545 processing Methods 0.000 claims abstract description 12
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 6
- 235000006508 Nelumbo nucifera Nutrition 0.000 claims description 2
- 240000002853 Nelumbo nucifera Species 0.000 claims description 2
- 235000006510 Nelumbo pentapetala Nutrition 0.000 claims description 2
- 238000009434 installation Methods 0.000 abstract description 2
- 238000005388 cross polarization Methods 0.000 description 4
- 230000005622 photoelectricity Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
The invention discloses a kind of Range Measurement System based on the vectorial field after longitudinal polarization and its applications, including vector light source, reflective mirror, double lens, double slit, convex lens, polarizing film, photodetector and signal processing system；Double slit is arranged in initial point position, photodetector is arranged in tested point position, the vector light source emits vector light to reflective mirror, vector light is after mirror reflection, after double lens adjusts optical path width, double slit is injected, interference light is after polarizing film filters, it is incident upon on photodetector, the distance of the object under test is obtained according to the optical information that photodetector measures.It is high that the system has measurement accuracy, and structure is simple, feature easy for installation, cheap, applied widely.
Description
Technical field
The present invention relates to vector flash ranging displacement field more particularly to a kind of distances based on the vectorial field after longitudinal polarization
Measuring system and its application.
Background technique
Laser interferance method displacement.This is a kind of relative measurement, it can not measure an absolute distance of the object from instrument,
But the relative distance of two testees can be measured.Its principle is a Michelson's interferometer, is become using reflecting mirror distance
The variation of interference fringe measures when change, and reflecting mirror moves to object B from object A, and the quantity of interference fringe variation reflects it
Distance.This measurement request condition is higher, but can be with precise measurement, it is also most accurate one in current all measurement means
Kind.And vectorial field displacement, it is the technological innovation moved to optical location, so that original interference fringe is become from one-dimensional
Two dimension greatly improves system sensitivity, so that displacement measurement is more accurate.
Summary of the invention
The purpose of the invention is to provide a kind of Range Measurement System based on the vectorial field after longitudinal polarization and its
Using.
The present invention is achieved through the following technical solutions: a kind of range measurement system based on the vectorial field after longitudinal polarization
System, including vector light source, reflective mirror, double lens, double slit, convex lens, longitudinal polarizing film, photodetector and signal processing system
System；By double slit setting in initial point position, by photodetector setting in tested point position, the vector light source is sent out to reflective mirror
Vector light is penetrated, vector light is after mirror reflection, after double lens adjusts optical path width, forms the light beam that radius is ε, then penetrates
Enter double slit, generates interference；After interference light planoconvex lens focus, injects longitudinal polarizing film and be filtered, be then incident upon photoelectricity spy
It surveys on device, photodetector measures the light intensity I by any point P in the filtered interference pattern of polarizing film, and is input to signal
Processing system, signal processing system obtain initial point to the distance between tested point d=2 π bx/ (λ δ) by calculating；
Wherein,IyFor the longitudinal component of light intensity I, m is to open up
Lotus number is flutterred, b is slit spacing, and x is horizontal distance of the P point to interference pattern central point, θB=arccos (b/ (2 ε)), λ are arrow
Measure optical wavelength.θ0For the initial phase of vector light, l/r0Change speed parameter for the polarization state of vector light radially.
Further, the double slit is micro-structure double slit.
Further, the photodetector is planar array detector or linear array detector, can also be pixilated detectors.
The application of a kind of distance measurement system in straight-line displacement sensing, which is characterized in that the application is, by the photoelectricity
Detector is connect with object under test, the double slit is arranged on the extended line of object under test linear motion, according to photodetection
The optical information that device measures obtains the real-time displacement of the object under test.
The beneficial effects of the present invention are: it is high that the system has measurement accuracy, and structure is simple, and easy for installation, price is low
Honest and clean, applied widely feature.
Detailed description of the invention
Fig. 1 is demonstration of the vector beam by double slit；
Fig. 2 is two-slit interference schematic device；
Fig. 3 is that vector beam projects schematic diagram；
Fig. 4 is when initial phase is 0, and topological charge number 1 regulates and controls interference fringe pattern when parameter l is 1.
In figure, vector light source 1, reflective mirror 2, double lens 3, double slit 4, convex lens 5, cross-polarization piece 6, photodetector 7,
Signal processing system 8.
Specific embodiment
Below by taking cross-polarization piece as an example, the calculating of distance is derived.As shown in figure 3, a kind of distance based on vectorial field
Detection system, including vector light source 1, reflective mirror 2, double lens 3, double slit 4, convex lens 5, cross-polarization piece, 7 and of photodetector
Signal processing system 8；By the setting of double slit 4 in initial point position, photodetector 7 is arranged in tested point position, the vector
Light source 1 emits vector light to reflective mirror 2, and vector light is after the reflection of reflective mirror 2, after double lens 3 adjusts optical path width, forms half
Diameter is the light beam of ε, then injects double slit 4, generates interference；After interference light planoconvex lens 5 focus, injects cross-polarization piece and filtered
Then wave is incident upon on photodetector 7, the generation of interference fringe is realized by the following method:
The distribution of light intensity formula of known any mixed polarization states vectorial field is
Wherein r=(x2+y2)1/2, as through double lens 3 adjust optical path width after beam radius, r=ε, θ=arctan
(y/x)、l/r0Change speed parameter for the polarization state of vector light radially.M is topological charge number, θ0For initial phase, exAnd eyPoint
Not Wei unit vector on the direction x and the direction y, A0Amplitude is indicated, in next reckoning, it is believed that A is cut positioned at light beam
Any point is steady state value on face.R indicates that on the x/y plane where slit, origin is put to investigation in cartesian coordinate system
Distance.θ is the azimuth of the polar coordinate system where beam cross-section.As shown in Figure 1, there are two slits of AB on x/y plane,
The distance between slit is b, while the distance of AB slit to origin is identical, and is parallel to each other, slit width vertical with x-axis
For a.After monochromatic mixed polarization states vectorial field represented by by formula passes through two slits, it can be equivalent to two secondary wires
Light source is finally overlapped on the plane of vision being parallel to after x/y plane.It is distance of the slit to plane of vision that we, which take d,.
Assuming that the width of slit is sufficiently small and infinite in length, furthermore the scale of slit spacing b be sewn to plane of vision distance d compared to
It is sufficiently small.
It decomposes vectorial field and carries out theoretical calculation:
Mixed polarization states vectorial field is decomposed into two component polarization light of x Yu the direction y, it is independent opposite to each other.Expression
Formula is write respectively:
Ex(θ)=cos [+2 π l (r/r of m θ0)+θ0]
Ey(θ)=sin [+2 π l (r/r of m θ0)+θ0]
When light beam reaches AB slit, light beam can regard as shown in Figure 1, it can be seen from the figure that only lucky position
Light in slit position can just pass through slit.Slit AB is symmetrical about y-axis, therefore is located at y-coordinate value on two slits
The azimuth of origin corresponding to identical two points is respectively θAWith θB.We can be found that θAWith θBSupplementary angle relationship each other, i.e. θA
=π-θB, θB=arccos (b/ (2 ε))；When the polarized light field in the x of decomposition and the direction y passes through AB slit, expression formula can be with
It is written as:
The light intensity expression Ix of the direction x polarization state component and the direction y polarization state component after interference can be write out respectively
With Iy.We enable first
Then the light intensity expression of Ix and Iy, which can simplify, is written as:
Wherein δ is to pass through the phase difference between two slit beam of AB.In Tomas Young's tow-slit experiment, as shown in Fig. 2, setting
The initial phase of incident light source isIt is the amount being randomly generated, received respectively at inspecting position P from (QAP) with
(QBP) phase of two optical disturbances is written as respectively:
Then phase difference are as follows:
The π bx/ of δ=2 (λ d)
Wherein d is distance of the plane where double slit to plane where photoelectric sensor, that is, measured required for us
Distance.
Similarly, when the polarizing film used is longitudinal polarizing film,
Below by the reliability of following experimental verification the method for the invention:
Test distance 5cm, 20cm, 1m are set, according to arrangement vector light source 1 shown in Fig. 3, reflective mirror 2, double
Lens 3, double slit 4, convex lens 5, longitudinal polarizing film, photodetector 7 and signal processing system 8；And double slit 4 is arranged initial
Point position, by the setting of photodetector 7 in tested point position, the vector light source 1 emits vector light, vector light to reflective mirror 2
After the reflection of reflective mirror 2, after double lens 3 adjusts optical path width, the light beam that radius is ε is formed, double slit 4 is then injected, is generated
Interference；After interference light planoconvex lens 5 focus, injects longitudinal polarizing film and be filtered, be then incident upon on photodetector 7, light
Electric explorer 7 measures the light intensity I by any point P in the filtered interference pattern of polarizing film, and is input to signal processing system
8, signal processing system 8 obtains initial point to the distance between tested point d=2 π bx/ (λ δ) by calculating；Wherein,IyFor the longitudinal component of light intensity I, m is topological charge number, and b is narrow
Spacing is stitched, x is horizontal distance of the P point to interference pattern central point, θB=arccos (b/ (2 ε)), λ are vector optical wavelength.θ0For
The initial phase of vector light, l/r0Change speed parameter for the polarization state of vector light radially.
The result output of three measurement distances is as shown in the table:
| Set distance | 5cm | 20cm | 1m |
| Measurement result | 5.006cm | 19.998cm | 100.045cm |
The present invention also provides application of the above-mentioned distance measurement system in straight-line displacement sensing, which is, by the light
Electric explorer 7 is connect with object under test, the double slit 4 is arranged on the extended line of object under test linear motion, according to photoelectricity
The optical information that detector 7 measures obtains the real-time displacement of the object under test.
Claims (4)
1. a kind of Range Measurement System based on the vectorial field after longitudinal polarization, which is characterized in that including vector light source (1),
Reflective mirror (2), double lens (3), double slit (4), convex lens (5), longitudinal polarizing film, photodetector (7) and signal processing system
(8)；By double slit (4) setting in initial point position, photodetector (7) are arranged in tested point position, the vector light source (1)
Emit vector light to reflective mirror (2), vector light is after reflective mirror (2) are reflected, and after double lens (3) adjust optical path width, is formed
Radius is the light beam of ε, then injects double slit (4), generates interference；After interference light planoconvex lens (5) focus, longitudinal polarizing film is injected
It is filtered, is then incident upon on photodetector (7), photodetector (7) is measured by the filtered interference pattern of polarizing film
The light intensity I of any point P in sample, and signal processing system (8) are input to, signal processing system (8) obtains initial point by calculating
To the distance between tested point d=2 π bx/ (λ δ)；
Wherein,IyFor the longitudinal component of light intensity I, m is topology
Lotus number, b are slit spacing, and x is horizontal distance of the P point to interference pattern central point, θB=arccos (b/ (2 ε)), λ is vector
Optical wavelength, θ0For the initial phase of vector light, l/r0Change speed parameter for the polarization state of vector light radially；
When detecting straight-line displacement, the photodetector is connect with object under test, the double slit is arranged in object under test
On the extended line of linear motion, the real-time displacement of the object under test is obtained according to the optical information that photodetector measures.
2. system according to claim 1, which is characterized in that the double slit (4) is micro-structure double slit.
3. system according to claim 1, which is characterized in that the photodetector (7) is planar array detector or line
Array detector or pixilated detectors.
4. a kind of application method of the system described in claim 1 in straight-line displacement sensing, which is characterized in that the application is to be somebody's turn to do
Method are as follows: the photodetector (7) is connect with object under test, the double slit (4) setting is moved along a straight line in object under test
Extended line on, the real-time displacement of the object under test is obtained according to the optical information that photodetector (7) measures.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101458211A (en) * | 2007-12-12 | 2009-06-17 | 中国科学院高能物理研究所 | Multi-slilt filtering double slit interferometer |
| CN101846553A (en) * | 2010-03-30 | 2010-09-29 | 北京理工大学 | Device and method for measuring polarization state by two-slit interference method |
| CN102607435A (en) * | 2012-03-27 | 2012-07-25 | 黑龙江工程学院 | Device and method for measuring thickness of optical film by adopting double-slit interference method |
| CN203687880U (en) * | 2014-01-20 | 2014-07-02 | 浙江大学 | Optical displacement measuring system |
| CN104034268A (en) * | 2014-07-01 | 2014-09-10 | 西安工业大学 | Two-slit interference fringe decoding spectrum confocal displacement sensor and displacement measurement method thereof |
-
2017
- 2017-01-23 CN CN201710050449.2A patent/CN106908003B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101458211A (en) * | 2007-12-12 | 2009-06-17 | 中国科学院高能物理研究所 | Multi-slilt filtering double slit interferometer |
| CN101846553A (en) * | 2010-03-30 | 2010-09-29 | 北京理工大学 | Device and method for measuring polarization state by two-slit interference method |
| CN102607435A (en) * | 2012-03-27 | 2012-07-25 | 黑龙江工程学院 | Device and method for measuring thickness of optical film by adopting double-slit interference method |
| CN203687880U (en) * | 2014-01-20 | 2014-07-02 | 浙江大学 | Optical displacement measuring system |
| CN104034268A (en) * | 2014-07-01 | 2014-09-10 | 西安工业大学 | Two-slit interference fringe decoding spectrum confocal displacement sensor and displacement measurement method thereof |
Non-Patent Citations (2)
| Title |
|---|
| The Two-slit Interference of Vector Optical Fields with Radially-variant Polarization;Tengyue Gao等;《Progress In Electromagnetic Research Symposium》;20160811;正文第2节，图1 |
| Young’s two-slit interference of vector light fields;Yongnan Li等;《OPTICS LETTERS》;20120601;第37卷(第11期);第1790-1792页 |
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Effective date of registration: 20231025 Address after: No. 998, Wenyi West Road, Yuhang District, Hangzhou City, Zhejiang Province Patentee after: HANGZHOU HUICUI INTELLIGENT TECHNOLOGY CO.,LTD. Address before: No.928, No.2 street, Jianggan Economic Development Zone, Hangzhou City, Zhejiang Province, 310018 Patentee before: ZHEJIANG SCI-TECH University |