CN106768873B - A kind of method and device measuring high-fineness fineness of cavity - Google Patents
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Abstract
本发明属于激光光谱技术领域，具体为一种测量高精细度腔精细度的方法及装置。解决了目前测量高精细度腔参数时存在的测量精度较低、对探测器精度要求高的技术问题。本发明利用频率锁定技术，扫描第二调制频率用光强信号描绘出了高精细度腔的腔模形状，从原理上更具有准确性。本发明在测量过程中由于使用了频率锁定技术，光‑腔一直处于锁定状态，避免了光‑腔频率的相对漂移，单次测量结果可信度高。本发明在测量中对探测器响应时间要求不高；由于腔模宽度一般在KHz量级，测量探测器带宽也不需要太大，这样就能保证使用的探测器精度可以很高。
The invention belongs to the technical field of laser spectroscopy, in particular to a method and device for measuring the fineness of a high-precision cavity. It solves the technical problems of low measurement accuracy and high requirements for detector accuracy existing in the current measurement of high-precision cavity parameters. The invention utilizes the frequency locking technology to scan the second modulation frequency and use the light intensity signal to describe the cavity mode shape of the high-precision cavity, which is more accurate in principle. Because the frequency locking technology is used in the measurement process of the present invention, the optical-cavity is always in a locked state, avoiding the relative drift of the optical-cavity frequency, and the reliability of a single measurement result is high. The present invention does not have high requirements on the response time of the detector in the measurement; since the width of the cavity mode is generally in the KHz order, the bandwidth of the measuring detector does not need to be too large, so that the precision of the detector used can be guaranteed to be very high.
Description
技术领域technical field
本发明属于激光光谱技术领域，是针对实验室普遍采用的高精细度腔精细度测量的一种新方法，具体为一种测量高精细度腔精细度的方法及装置。The invention belongs to the technical field of laser spectroscopy, and is a new method for measuring the fineness of a high-precision cavity commonly used in laboratories, specifically a method and a device for measuring the fineness of a high-precision cavity.
背景技术Background technique
作为光学谐振腔，法布里-珀罗干涉仪(F-P腔)自其研发之始就在光谱学与光谱分析上占有了重要的地位，在光学频率定标、光学探测、光学检测方面应用广泛。描述F-P腔有多个参数，包括自由光谱范围、精细度、分辨本领、角色散等。这些参数对于F-P腔的选择上具有非常重要的指导意义，我们也可以通过传统的公式法计算出以上参数，但是计算的粗略性并不能满足人们现在对微小测量的要求，尤其是在超精密的光学测量上。因此，找到一种针对F-P腔参数的测量方法，并且这种方法简单、便捷，能够快速的投入使用，对于任何应用F-P腔的实验计量测量来说意义非凡。As an optical resonant cavity, the Fabry-Perot interferometer (F-P cavity) has played an important role in spectroscopy and spectral analysis since its development, and is widely used in optical frequency calibration, optical detection, and optical detection. . There are many parameters to describe the F-P cavity, including free spectral range, fineness, resolving power, angular dispersion and so on. These parameters have very important guiding significance for the selection of F-P cavity. We can also calculate the above parameters through the traditional formula method, but the roughness of the calculation cannot meet people's current requirements for tiny measurements, especially in ultra-precision optical measurement. Therefore, finding a method for measuring the parameters of the F-P cavity, which is simple, convenient, and can be put into use quickly, is of great significance for any experimental metrology measurement using the F-P cavity.
掺铒光纤激光器(EDFL)作为近几年发展起来的超窄线宽激光器，具有输出光波长稳定，线宽窄(百Hz)，功率稳定等优点，广泛的应用在光谱分析，光谱测量，非线性光谱泵浦源方面。对比一般的腔模半高全宽(FWHM)在几十KHz量级，光纤激光器完全可以胜任作为测量腔模半高全宽的光源。Erbium-doped fiber laser (EDFL), as an ultra-narrow linewidth laser developed in recent years, has the advantages of stable output light wavelength, narrow linewidth (100 Hz), stable power, etc., and is widely used in spectral analysis, spectral measurement, nonlinear In terms of spectral pump sources. Compared with the general full width at half maximum (FWHM) of the cavity mode, which is on the order of tens of KHz, the fiber laser is fully qualified as a light source for measuring the full width at half maximum of the cavity mode.
F-P腔腔镜反射率较高、也即精细度较大的类型被叫做高精细度腔，目前人们常用来测量高精细度腔精细度的方法是腔衰荡光谱(CRDS)，它通过测量腔内光场的衰减时间进行换算来得到腔的镜面反射率，进而得到一系列关于高精度腔的参数。在腔衰荡方法中，一束短脉冲激光(光束脉宽小于光在腔内往返一周的时间)注入高精细度腔内，激光会在腔内来回反射，由于腔镜具有一定的透射损耗，每一次反射都会有一定比例的光透射出腔外，这部分透射的光就构成了腔的衰荡信号。这个衰荡信号是一个呈e指数衰减形式的信号，用公式：The F-P cavity mirror with higher reflectivity, that is, the type with greater fineness is called a high-definition cavity. At present, the method commonly used to measure the fineness of a high-definition cavity is cavity ring-down spectroscopy (CRDS), which measures cavity The decay time of the internal optical field is converted to obtain the specular reflectivity of the cavity, and then a series of parameters about the high-precision cavity are obtained. In the cavity ring-down method, a beam of short-pulse laser (the pulse width of the beam is less than the round-trip time of the light in the cavity) is injected into the high-precision cavity, and the laser will reflect back and forth in the cavity. Since the cavity mirror has a certain transmission loss, Every reflection will have a certain proportion of light transmitted out of the cavity, and this part of the transmitted light constitutes the ring-down signal of the cavity. This ringing signal is a signal in the form of e-exponential decay, using the formula:
拟合会得到高精度腔内光的衰荡时间t0，y0与A是与探测器有关的常数。在腔内没有相应激光波长吸收物的情况下，测量的衰荡时间与高精细度腔腔镜的反射率关系为：Fitting can obtain the ring-down time t 0 of the light in the cavity with high precision, and y 0 and A are constants related to the detector. In the case that there is no corresponding laser wavelength absorber in the cavity, the relationship between the measured ring-down time and the reflectivity of the high-precision cavity mirror is:
而腔镜的反射率与腔的精细度之间的关系式：The relationship between the reflectivity of the cavity mirror and the fineness of the cavity is:
式中c是光速，L0是高精细度腔的几何长度，R是所求的镜面反射率，F是腔的精细度。In the formula, c is the speed of light, L 0 is the geometric length of the high-precision cavity, R is the desired mirror reflectivity, and F is the fineness of the cavity.
这里假设光照射在高精度腔腔镜上时只有透射与反射现象的发生，也即It is assumed here that only the transmission and reflection phenomena occur when the light is irradiated on the high-precision cavity mirror, that is,
T+R＝1 (4)T+R＝1 (4)
T表示腔镜的透射率。T represents the transmittance of the cavity mirror.
目前CRDS方法是人们采用测量高精细度腔参数最常用的方法，但是CRDS仍有四个缺点。第一，在测量时，腔长L0无法通过这种方法直接获得，测量者还需要采用别的精密仪器对腔长进行测量，腔长测量的精确度限制了高精细度腔精细度的测量值。第二，CRDS测量的是腔内的光强衰减时间，因此它只能针对超高精细度腔的测量，当精细度腔的腔镜反射率下降时，腔内光强的衰减时间很容易下滑到可以与测量仪器的反应时间比拟，如百ns量级，这样测量得到的衰荡时间精度要远远低于对高精细度腔的测量。第三，即使对于超高精细度腔，由于不同探测器的响应不同，测量的衰荡时间信号也大不一样。第四，腔衰荡方法通常采用数据采集卡采集大量数据平均来提高测量时间的精确度，现实生活中太消耗时间。At present, the CRDS method is the most commonly used method for measuring high-precision cavity parameters, but there are still four shortcomings of CRDS. First, during measurement, the cavity length L0 cannot be directly obtained by this method, and the measurer needs to use other precision instruments to measure the cavity length. The accuracy of cavity length measurement limits the measurement of high-precision cavity fineness value. Second, CRDS measures the decay time of light intensity in the cavity, so it can only be used for the measurement of ultra-high-precision cavity. When the reflectivity of the cavity mirror of the fine-scale cavity decreases, the decay time of light intensity in the cavity is easy to decline It can be compared with the response time of the measuring instrument, such as on the order of hundreds of ns, and the precision of the ring-down time measured in this way is far lower than that of the measurement of the high-precision cavity. Third, even for ultra-high-definition cavities, the measured ring-down time signals are quite different due to the different responses of different detectors. Fourth, the cavity ringdown method usually uses a data acquisition card to collect a large amount of data and average to improve the accuracy of the measurement time, which is too time-consuming in real life.
因此结合现实考虑，非常需要一种测量高精细度腔参数的方法，这种方法不仅适合于反射率在99.99％左右的超高精细度腔，对于反射率稍低的高精细度腔也适合；并且方便快捷，适合大多数探测器测量。Therefore, combined with practical considerations, a method for measuring the parameters of high-definition cavities is very much needed. This method is not only suitable for ultra-high-definition cavities with a reflectivity of about 99.99%, but also for high-definition cavities with slightly lower reflectivity; And convenient and fast, suitable for most detectors to measure.
发明内容Contents of the invention
本发明提出了一种可以测量高精度腔的新方法—双调制法。The invention proposes a new method for measuring high-precision cavities—double modulation method.
本发明所述的一种测量高精细度腔精细度的方法是采用以下技术方案实现的:一种测量高精细度腔精细度的方法，包括以下步骤：(1)对激光器输出的激光加上第一个调制频率，作为载频的激光会产生对称的两个边带，即边带-1和边带1，边带-1和边带1通过与待测的高精细度腔作用产生误差信号，误差信号的反馈将激光器出射激光的中心频率锁定到高精细度腔腔模的中心；所述第一个调制频率大于腔模的全宽小于一个自由光谱区；(2)对激光加上第二个调制频率x，该调制频率的大小近似等于高精细度腔一倍自由光谱区的大小，这时激光会产生对称的两个边带，即边带-2和边带2，扫描第二个调制频率，这样在待测的高精细度腔的透射端会得到一个关于光强的起伏，光强起伏的形状对应于高精细度腔腔模的形状；(3)将扫描得到的高精细度腔腔模图样用腔模的洛伦兹线型进行拟合：A method for measuring the fineness of a high-precision cavity according to the present invention is realized by adopting the following technical scheme: a method for measuring the fineness of a high-precision cavity comprises the following steps: (1) adding The first modulation frequency, as the carrier frequency laser, will produce two symmetrical sidebands, namely sideband-1 and sideband 1, and sideband-1 and sideband 1 will generate errors by interacting with the high-precision cavity to be measured signal, the feedback of the error signal locks the central frequency of the laser output laser to the center of the high-precision cavity mode; the first modulation frequency is greater than the full width of the cavity mode and less than a free spectral region; (2) add The second modulation frequency x, the magnitude of this modulation frequency is approximately equal to the size of the free spectral region of the high-definition cavity. At this time, the laser will generate two symmetrical sidebands, namely sideband-2 and sideband 2. Scan the first Two modulation frequencies, so that a fluctuation about the light intensity can be obtained at the transmission end of the high-definition cavity to be tested, and the shape of the light intensity fluctuation corresponds to the shape of the high-definition cavity mode; (3) the high-definition cavity obtained by scanning The fine cavity mold pattern is fitted with the Lorentz line shape of the cavity mold:
就可以直接得出高精细度腔的精细度F；The fineness F of the high-precision cavity can be directly obtained;
式中，x代表高精度腔内透射光的频率，y代表透射光的光强，y0与A是与探测器有关的常数，F是高精细度腔的精细度，FSR是测量得到的高精细度腔的一倍自由光谱区频率。In the formula, x represents the frequency of the transmitted light in the high-precision cavity, y represents the light intensity of the transmitted light, y 0 and A are constants related to the detector, F is the fineness of the high-precision cavity, and FSR is the measured high-precision The frequency of the free spectral region of the fineness cavity is doubled.
图1表示测量的原理图。高精细度腔的腔模是一个洛伦兹线型，对于超窄线宽激光器来说，当对激光进行频率调制时，作为载频的激光会产生对称的两个边带，即边带-1和边带1，边带-1和边带1通过与高精细度腔作用产生误差信号，误差信号的反馈将激光的中心频率锁定到高精细度腔腔模的中心时，激光与高精细度腔共振会全部透射出腔，这时候透射的光强是最大的。理论上第一个调制频率只要大于腔模的全宽小于一个自由光谱区均可以采用，普遍的锁定会采用MHz量级。之后给激光加上第二个调制，调制频率的大小近似等于高精细度腔自由光谱区的大小，这时激光会产生对称的两个边带，边带-2和边带2，扫描第二个调制频率，这样在腔的透射端会得到一个关于光强的起伏，起伏的形状对应于高精细度腔腔模的形状。当第二个调制频率在扫描过程中正等于高精度腔自由光谱区的大小时，透过光强最大，当调制频率远离高精细度腔自由光谱区时，透过光强逐渐减小。扫描得到的腔模图样用腔模的洛伦兹线型进行拟合：Figure 1 shows the schematic diagram of the measurement. The cavity mode of the high-definition cavity is a Lorentzian line shape. For an ultra-narrow linewidth laser, when the laser is frequency modulated, the laser as the carrier frequency will produce two symmetrical sidebands, namely the sideband- 1 and sideband 1, sideband-1 and sideband 1 generate an error signal by interacting with the high-definition cavity, and the feedback of the error signal locks the center frequency of the laser to the center of the high-definition cavity mode, the laser and the high-definition cavity mode The cavity resonance will be completely transmitted out of the cavity, and the transmitted light intensity is the maximum at this time. Theoretically, the first modulation frequency can be used as long as it is larger than the full width of the cavity mode and smaller than a free spectral region, and the general locking will use the order of MHz. Then add a second modulation to the laser. The modulation frequency is approximately equal to the size of the free spectral region of the high-definition cavity. At this time, the laser will produce two symmetrical sidebands, sideband-2 and sideband 2, and scan the second A modulation frequency, so that a fluctuation of the light intensity will be obtained at the transmission end of the cavity, and the shape of the fluctuation corresponds to the shape of the cavity mode of the high-definition cavity. When the second modulation frequency is equal to the size of the free spectral region of the high-precision cavity during the scanning process, the transmitted light intensity is the largest, and when the modulation frequency is far away from the free spectral region of the high-precision cavity, the transmitted light intensity gradually decreases. The cavity mold pattern obtained by scanning is fitted with the Lorentz line shape of the cavity mold:
直接得出高精细度腔的精细度F。The fineness F of the high-definition cavity can be obtained directly.
式中，y0与A是与探测器有关的常数；F是高精细度腔的精细度；FSR是测量得到的高精细度腔的一倍自由光谱区频率。In the formula, y 0 and A are constants related to the detector; F is the fineness of the high-definition cavity; FSR is one time of the free spectral region frequency of the high-definition cavity measured.
本发明所述的一种测量高精细度腔精细度的装置是采用以下技术方案实现的：一种测量高精细度腔精细度的装置，包括激光器、顺次位于激光器出射光路上的第一电光调制器、第二电光调制器、匹配透镜、1/2波片、偏振分光棱镜；偏振分光棱镜的透射光路上设有1/4波片，待测的高精细度腔位于1/4波片的出射光路上，高精细度腔的出射光路上顺次设有第一聚焦透镜和第一探测器，第一探测器的信号输出端连接有示波器；偏振分光棱镜的反射光路上顺次设有第二聚焦透镜和第二探测器；第二电光调制器的射频输入端口连接有压控振荡器，压控振荡器的信号输入端连接有第一函数发生器，第一函数发生器与示波器相连接；A device for measuring the fineness of a high-precision cavity according to the present invention is realized by adopting the following technical scheme: a device for measuring the fineness of a high-precision cavity, including a laser, a first electro-optical device sequentially located on the laser exit optical path Modulator, second electro-optic modulator, matching lens, 1/2 wave plate, polarization beam splitter; the transmission light path of the polarization beam splitter prism is provided with a 1/4 wave plate, and the high-precision cavity to be tested is located on the 1/4 wave plate On the outgoing light path of the high-definition cavity, a first focusing lens and a first detector are arranged in sequence on the outgoing light path of the high-definition cavity, and an oscilloscope is connected to the signal output end of the first detector; The second focusing lens and the second detector; the radio frequency input port of the second electro-optic modulator is connected with a voltage-controlled oscillator, and the signal input end of the voltage-controlled oscillator is connected with a first function generator, and the first function generator is in phase with the oscilloscope connect;
还包括第二函数发生器，第二函数发生器的信号输出端连接有分束器，分束器的第一输出端口与第一电光调制器的射频输入端口相连接，分束器的第二输出端口顺次连接有移相器、混频器、低通滤波器、比例积分电路和高压放大器；高压放大器的信号输出端与激光器的电压调制端口相连接；第二探测器的信号输出端与混频器相连接。It also includes a second function generator, the signal output end of the second function generator is connected with a beam splitter, the first output port of the beam splitter is connected with the radio frequency input port of the first electro-optical modulator, and the second The output port is sequentially connected with a phase shifter, a mixer, a low-pass filter, a proportional integral circuit and a high-voltage amplifier; the signal output port of the high-voltage amplifier is connected with the voltage modulation port of the laser; the signal output port of the second detector is connected with the The mixer is connected.
测量方案如图2所示。The measurement scheme is shown in Figure 2.
掺铒光纤激光器出射光信号经过第一电光调制器，第二电光调制器由光纤出射口发射激光，经过匹配透镜后，经过1/2波片，偏振分光棱镜与1/4波片照射到高精细度腔前镜上。高精细度腔前镜反射光经第二聚焦透镜进入第二探测器，进入到F-P腔的光经过第一聚焦透镜进入第一探测器。第二函数发生器产生射频信号，经分束器后一束信号进入到第一电光调制器中对激光进行调制，另一束信号进入移相器后，与第二探测器探测到的光信号进入混频器进行混频，经过低通滤波器后，误差信号同时送入比例积分电路。比例积分电路经过高压放大器对激光器进行锁定。锁定之后，压控振荡器产生中心频率为w0MHz(通过对腔长的测量计算得到的大致的腔的自由光谱范围的频率)的信号，同时第一函数发生器产生的扫描信号进入压控振荡器中，使压控振荡器以w0MHz为中心频率扫描，压控振荡器信号进入光纤电光调制器中对激光进行二次调制，第一探测器采样腔模信号。The output light signal of the erbium-doped fiber laser passes through the first electro-optic modulator, and the second electro-optic modulator emits laser light from the fiber output port. After passing through the matching lens, the 1/2 wave plate, the polarization beam splitter prism and the 1/4 wave plate irradiate to the high Fineness cavity front mirror. The light reflected by the front mirror of the high-definition cavity enters the second detector through the second focusing lens, and the light entering the FP cavity enters the first detector through the first focusing lens. The second function generator generates a radio frequency signal. After passing through the beam splitter, one beam of signal enters the first electro-optic modulator to modulate the laser light. After the other beam of signal enters the phase shifter, it is combined with the optical signal detected by the second detector. Enter the mixer for mixing, and after passing through the low-pass filter, the error signal is sent to the proportional integral circuit at the same time. The proportional-integral circuit locks the laser through a high-voltage amplifier. After locking, the voltage-controlled oscillator generates a signal with a center frequency of w 0 MHz (the frequency of the free spectral range of the cavity roughly calculated by measuring the cavity length), and at the same time the scanning signal generated by the first function generator enters the voltage-controlled In the oscillator, the voltage-controlled oscillator is scanned with w 0 MHz as the center frequency, the signal of the voltage-controlled oscillator enters the optical fiber electro-optical modulator for secondary modulation of the laser, and the first detector samples the cavity mode signal.
为进一步说明这种双调制方法测量腔模精细度方法的优越性，发明人用不同方法对同一高精细度腔进行了精细度的测量。测量结果如图3、图4所示。图3与4表示使用腔衰荡光谱方法测量的衰荡时间和拟合结果。图3采用探测器a(型号：PDA 10CS-EC，THORLABS公司)，图4采用探测器b(型号：PDA 10CF-EC，THORLABS公司)，使用e指数拟合公式(1)显示，探测器a测量得到的衰荡时间是1.10969us，探测器b测量得到的衰荡时间是1.10094us。采用的高精细度腔的腔长L0为394mm，光速c为2.997×108m/s，将这些参数带入式(2)(3)中可以得到探测器a测量得到的腔的精细度为2651，探测器b测量得到的腔的精细度为2630。In order to further illustrate the superiority of this dual modulation method for measuring the fineness of the cavity mode, the inventors used different methods to measure the fineness of the same high-definition cavity. The measurement results are shown in Figure 3 and Figure 4. Figures 3 and 4 show the ring-down time and fitting results measured using cavity ring-down spectroscopy. Figure 3 adopts detector a (model: PDA 10CS-EC, THORLABS Company), and Figure 4 adopts detector b (model: PDA 10CF-EC, THORLABS Company), using e index fitting formula (1) to show that detector a The measured ring-down time is 1.10969us, and the ring-down time measured by detector b is 1.10094us. The cavity length L 0 of the high-definition cavity used is 394 mm, and the light speed c is 2.997×10 8 m/s. Putting these parameters into formula (2) (3) can obtain the cavity fineness measured by detector a is 2651, and the fineness of the cavity measured by detector b is 2630.
图5与图6是使用双调制法测量高精细度腔腔模的结果。图5采用探测器a(型号：PDA 10CS-EC，THORLABS公司)，图6采用探测器b(型号：PDA 10CF-EC，THORLABS公司)，用公式(5)拟合显示，探测器a测量得到的腔的精细度为2615；探测器b测量得到的腔的精细度为2613。Figure 5 and Figure 6 are the results of measuring the high-definition cavity mode using the dual modulation method. Figure 5 adopts detector a (model: PDA 10CS-EC, THORLABS Company), and Figure 6 adopts detector b (model: PDA 10CF-EC, THORLABS Company), using formula (5) to fit and display, and detector a measures The fineness of the cavity is 2615; the fineness of the cavity measured by detector b is 2613.
更一般的，探测器a具有不同的增益，不同的增益意味着探测器不同的带宽和不同的响应时间。用腔衰荡方法在不同的增益下进行衰荡信号的测量并拟合，结果如图7。得到的在0dB、10dB、20dB、30dB增益下测量的衰荡时间分别为1.10152us、1.11004us、1.11896us、1.15864us，用式(2)(3)计算得到腔的精细度分别为2631、2652、2673、2768。使用探测器a用双调制的方法在0dB、10dB、20dB、30dB增益下测量的腔模如图8，得到的精细度分别为2615、2617、2609、2618。使用探测器b我们分别用双调制方法和腔衰荡方法测量了100组信号并进行拟合得到腔的精细度以及残差，测量结果如图9所示。More generally, detector a has different gains, and different gains mean different bandwidths and different response times of the detectors. The cavity ring-down method is used to measure and fit the ring-down signal at different gains, and the results are shown in Figure 7. The obtained ring-down times measured under 0dB, 10dB, 20dB, and 30dB gains are 1.10152us, 1.11004us, 1.11896us, and 1.15864us, respectively, and the fineness of the cavity calculated by formula (2) (3) is 2631, 2652 , 2673, 2768. Figure 8 shows the cavity modes measured by detector a with double modulation at 0dB, 10dB, 20dB, and 30dB gains. Using detector b, we measured 100 sets of signals with double modulation method and cavity ring-down method respectively and performed fitting to obtain cavity fineness and residual error. The measurement results are shown in Figure 9.
图9中左图图a是使用双调制方法测量的高精细度腔精细度，右图图b是使用腔衰荡方法测量的高精度腔精细度，下图是各自对应的用平均值拟合的残差。对比图9中拟合图像可以看出使用双调制方法测量的高精细度腔精细度起伏更小，拟合残差更小，数据更为准确可信。并且，腔衰荡方法测量的腔的精细度在平均值方面与双调制法有一定差别，这是因为腔衰荡方法对探测器的响应时间具有很强的依赖性，此外腔衰荡方法在公式的推导过程中有一定的近似，这些近似是建立在高精细度腔腔镜的反射率接近于1并且腔内只有透射与反射现象的发生的，当高精细度腔腔镜反射率下降时，腔衰荡公式的近似方法会引入较大误差。In Figure 9, the left figure a is the high-precision cavity fineness measured by the double modulation method, the right figure b is the high-precision cavity fineness measured by the cavity ring-down method, and the following figures are the corresponding average values residuals. Comparing the fitting images in Figure 9, it can be seen that the fineness fluctuation of the high-definition cavity measured by the double modulation method is smaller, the fitting residual error is smaller, and the data is more accurate and reliable. Moreover, the fineness of the cavity measured by the cavity ring-down method is different from the double modulation method in terms of average value, because the cavity ring-down method has a strong dependence on the response time of the detector, and the cavity ring-down method is in the There are certain approximations in the derivation of the formula. These approximations are based on the fact that the reflectivity of the high-definition cavity mirror is close to 1 and only transmission and reflection phenomena occur in the cavity. When the reflectivity of the high-definition cavity mirror decreases , the approximation method of the cavity ring-down formula will introduce a large error.
最终双调制法得到的腔的精细度为The fineness of the cavity obtained by the final double modulation method is
F＝2613.8±5.3 (6)F＝2613.8±5.3 (6)
使用腔衰荡法得到腔的精细度为The fineness of the cavity obtained by using the cavity ring-down method is
F＝2639.9±25.5 (7)F＝2639.9±25.5 (7)
对比腔衰荡方法和双重调制方法的测量结果可以看出，腔衰荡方法过于依赖测量中电子伺服的响应带宽和响应时间，这对于衰荡时间在us量级的测量来说影响巨大。腔衰荡方法为了提高测量精度，通常会用数据采集卡对测量的衰荡时间进行大量的数据采样与时间平均，采样耗时较长，数据处理时间长，不利于当今快节奏的生产生活。双调制方法利用频率锁定技术，扫描第二调制频率用光强信号描绘出了腔模形状，从原理上更具有准确性。并且扫描的过程光-腔处于锁定状态，避免了光-腔频率的相对漂移，多次测量结果基本保持一致；由于锁定状态，不需要探测器的快速响应，对于市面上多数光电探测器都可以展开此种测量。Comparing the measurement results of the cavity ring-down method and the dual modulation method, it can be seen that the cavity ring-down method is too dependent on the response bandwidth and response time of the electronic servo in the measurement, which has a huge impact on the measurement of the ring-down time in the order of us. In order to improve the measurement accuracy of the cavity ring down method, a large amount of data sampling and time averaging are usually performed on the measured ring down time with a data acquisition card, which takes a long time for sampling and data processing, which is not conducive to today's fast-paced production and life. The double modulation method utilizes the frequency locking technology, scans the second modulation frequency and uses the light intensity signal to describe the shape of the cavity mode, which is more accurate in principle. And the optical-cavity is in the locked state during the scanning process, which avoids the relative drift of the optical-cavity frequency, and the results of multiple measurements are basically consistent; due to the locked state, the fast response of the detector is not required, and it can be used for most photodetectors on the market. Expand this measurement.
本发明技术与其它相同类技术相比有以下优点：Compared with other similar technologies, the technology of the present invention has the following advantages:
1、本发明技术提出了一种可用于测量高精细度腔腔模精细度的新方法及装置。1. The technology of the present invention proposes a new method and device for measuring the fineness of high-precision cavity molds.
2、本发明利用频率锁定技术，扫描第二调制频率用光强信号描绘出了高精细度腔的腔模形状，从原理上更具有准确性。2. The present invention uses the frequency locking technology to scan the second modulation frequency and use the light intensity signal to describe the cavity mode shape of the high-precision cavity, which is more accurate in principle.
3、本发明在测量过程中由于使用了频率锁定技术，光-腔一直处于锁定状态，避免了光-腔频率的相对漂移，单次测量结果可信度高，对比一些需要大量数据平均结果的测量来说节省了测量时间，有利于当今快节奏生活。3. Due to the frequency locking technology used in the measurement process of the present invention, the light-cavity is always in a locked state, which avoids the relative drift of the light-cavity frequency, and the reliability of the single measurement result is high. Compared with some methods that require a large amount of data average results In terms of measurement, it saves measurement time and is conducive to today's fast-paced life.
4、测量中对探测器响应时间要求不高；由于腔模宽度一般在KHz量级，测量探测器带宽也不需要太大，这样就能保证使用的探测器精度可以很高，因为探测器带宽越大一般它的噪声也越大。说明本发明在很多探测器下都可以实现，并且可以达到更高精度的测量。4. The requirements for the response time of the detector are not high during the measurement; since the width of the cavity mode is generally on the order of KHz, the bandwidth of the measurement detector does not need to be too large, so that the precision of the detector used can be guaranteed to be very high, because the detector bandwidth The bigger it is, the louder it is generally. It shows that the present invention can be realized under many detectors, and can achieve higher precision measurement.
附图说明Description of drawings
图1为本发明-双调制法测量高精度腔精细度的原理图示。载频为激光频率，边带-1与边带+1是第一个调制产生的双边带，用于光-腔的频率锁定；边带-2与边带+2是第二个调制产生的双边带，扫描它会在光电探测器一端绘出腔模信号。Fig. 1 is a schematic illustration of the principle of measuring the fineness of a high-precision cavity by the double modulation method of the present invention. The carrier frequency is the laser frequency, sideband-1 and sideband+1 are the double-sidebands generated by the first modulation, and are used for frequency locking of the optical cavity; sideband-2 and sideband+2 are generated by the second modulation Double sideband, scanning it will plot the cavity mode signal at the photodetector end.
图2是双调制法的实验装置结构示意图。1-激光器，2-第一电光调制器，3-第二电光调制器，4-激光输出口，5-匹配透镜，6-1/2波片，7-偏振分光棱镜，8-1/4波片，9-高精细度腔，10-第一聚焦透镜，11-第一探测器，12-第二聚焦透镜，13-第二探测器，14-第一函数发生器，15-压控振荡器，16-第二函数发生器，17-分束器，18-移相器，19-混频器，20-低通滤波器，21-比例积分电路，22-高压放大器；其中激光器1采用1531nm光纤激光器。Fig. 2 is a schematic diagram of the experimental device structure of the double modulation method. 1-laser, 2-first electro-optic modulator, 3-second electro-optic modulator, 4-laser output port, 5-matching lens, 6-1/2 wave plate, 7-polarization beam splitter, 8-1/4 Wave plate, 9-high-precision cavity, 10-first focusing lens, 11-first detector, 12-second focusing lens, 13-second detector, 14-first function generator, 15-voltage control Oscillator, 16-second function generator, 17-beam splitter, 18-phase shifter, 19-mixer, 20-low-pass filter, 21-proportional integral circuit, 22-high voltage amplifier; where laser 1 Using 1531nm fiber laser.
图3是使用腔衰荡法在探测器PDA 10CS-EC下测量的高精度腔数据的图像。图中■是使用腔衰荡方法在该探测器下测量得到的腔衰荡图样，黑线是公式(1)拟合图样。Figure 3 is an image of high-precision cavity data measured under the detector PDA 10CS-EC using the cavity ring-down method. In the figure ■ is the cavity ring-down pattern measured under the detector using the cavity ring-down method, and the black line is the fitting pattern of formula (1).
图4是使用腔衰荡法在探测器PDA 10CF-EC下测量的高精度腔数据的图像。图中■是使用腔衰荡方法在该探测器下测量得到的腔衰荡图样，黑线是公式(1)拟合图样。Figure 4 is an image of high-precision cavity data measured under the detector PDA 10CF-EC using the cavity ring-down method. In the figure ■ is the cavity ring-down pattern measured under the detector using the cavity ring-down method, and the black line is the fitting pattern of formula (1).
图5是使用双调制法在探测器PDA 10CS-EC下测量的高精度腔数据的图像。图中■是使用双调制方法在该探测器下测量得到的腔模图样，黑线是公式(5)拟合图样。Fig. 5 is an image of high-precision cavity data measured under the detector PDA 10CS-EC using the dual modulation method. In the figure ■ is the cavity mode pattern measured under the detector using the double modulation method, and the black line is the fitting pattern of formula (5).
图6是使用双调制法在探测器PDA 10CF-EC下测量的高精度腔数据的图像。图中■是使用双调制方法在该探测器下测量得到的腔模图样，黑线是公式(5)拟合图样。Fig. 6 is an image of high-precision cavity data measured under the detector PDA 10CF-EC using the dual modulation method. In the figure ■ is the cavity mode pattern measured under the detector using the double modulation method, and the black line is the fitting pattern of formula (5).
图7是使用腔衰荡法在探测器PDA 10CS-EC不同增益下测量高精度腔数据的图像。图中■是使用腔衰荡方法在该探测器不同增益下测量得到的腔衰荡图样，黑线是公式(1)拟合图样。Figure 7 is an image of measuring high-precision cavity data using the cavity ring-down method under different gains of the detector PDA 10CS-EC. In the figure ■ is the cavity ring-down pattern measured by using the cavity ring-down method under different gains of the detector, and the black line is the fitting pattern of formula (1).
图8是使用双调制法在探测器PDA 10CS-EC不同增益下测量高精度腔数据的图像。图中■是使用腔衰荡方法在该探测器不同增益下测量得到的腔衰荡图样，黑线是公式(5)拟合图样。Fig. 8 is an image of measuring high-precision cavity data under different gains of the detector PDA 10CS-EC using the double modulation method. In the figure ■ is the cavity ring-down pattern measured under different gains of the detector using the cavity ring-down method, and the black line is the fitting pattern of formula (5).
图9是分别使用双调制法和腔衰荡方法在同一探测器PDA10CF-EC下测量得到的100组精细度值。■是测量得到散点值，黑线是平均值拟合图像，下图是拟合残差；当中a图是使用双调制方法测得的值及拟合，b图是使用腔衰荡方法测量的值及拟合。Figure 9 shows 100 sets of fineness values measured under the same detector PDA10CF-EC using the double modulation method and the cavity ring-down method respectively. ■ is the measured scattered point value, the black line is the average fitting image, and the figure below is the fitting residual; among them, figure a is the value and fitting measured by the double modulation method, and figure b is measured by the cavity ring-down method value and fit.
具体实施方式Detailed ways
一种测量高精细度腔精细度的方法，包括以下步骤：(1)对激光器输出的激光加上第一个调制频率，作为载频的激光会产生对称的两个边带，即边带-1和边带1，边带-1和边带1通过与待测的高精细度腔作用产生误差信号，误差信号的反馈将激光器出射激光的中心频率锁定到高精细度腔腔模的中心；理论上第一个调制频率只要大于腔模的全宽小于一个自由光谱区均可以采用，普遍的锁定会采用MHz量级，此处针对我们的实验装置带宽采用25MHz最优频率；(2)对激光加上第二个调制频率，该调制频率的大小近似等于高精细度腔自由光谱区的大小，用公式A method for measuring the fineness of a high-definition cavity, comprising the following steps: (1) adding the first modulation frequency to the laser output by the laser, as the carrier frequency laser will produce two symmetrical sidebands, i.e. sideband- 1 and sideband 1, sideband-1 and sideband 1 generate an error signal by interacting with the high-precision cavity to be tested, and the feedback of the error signal locks the center frequency of the laser output laser to the center of the high-precision cavity mode; Theoretically, the first modulation frequency can be used as long as it is greater than the full width of the cavity mode and less than a free spectral region, and the general locking will use the order of MHz. Here, the optimal frequency of 25MHz is used for the bandwidth of our experimental device; (2) for Add a second modulation frequency to the laser, and the magnitude of the modulation frequency is approximately equal to the size of the free spectral region of the high-definition cavity, using the formula
可以得到。其中c是光速2.997×108m/s，n是内腔折射率，气体情况下通常取1，L0是测量得到的高精细度腔腔长，精确到mm。这时激光会产生对称的两个边带，即边带-2和边带2，扫描第二个调制频率，这样在待测的高精细度腔的透射端会得到一个关于光强的起伏，光强起伏的形状对应于高精细度腔腔模的形状；(3)将扫描得到的高精细度腔腔模图样用腔模的洛伦兹线型进行拟合：available. Where c is the speed of light 2.997×10 8 m/s, n is the refractive index of the inner cavity, which is usually taken as 1 in the case of gas, and L 0 is the measured high-precision cavity length, accurate to mm. At this time, the laser will generate two symmetrical sidebands, namely sideband-2 and sideband 2, and scan the second modulation frequency, so that a fluctuation of the light intensity will be obtained at the transmission end of the high-definition cavity to be tested, The shape of the light intensity fluctuation corresponds to the shape of the high-definition cavity mode; (3) Fit the scanned high-definition cavity mode pattern with the cavity mode's Lorentz linetype:
就可以直接得出高精细度腔的精细度F。The fineness F of the high-definition cavity can be obtained directly.
步骤(3)中可进行多次测量以及拟合后得到多个高精细度腔精细度值，然后求得一个高精细度腔精细度的平均值。In step (3), multiple measurements and fittings can be performed to obtain multiple high-precision cavity fineness values, and then an average value of the high-fineness cavity fineness is obtained.
一种测量高精细度腔精细度的装置，包括激光器1、顺次位于激光器1出射光路上的第一电光调制器2、第二电光调制器3、匹配透镜5、1/2波片6、偏振分光棱镜7；偏振分光棱镜7的透射光路上设有1/4波片8，待测的高精细度腔9位于1/4波片8的出射光路上，高精细度腔9的出射光路上顺次设有第一聚焦透镜10和第一探测器11，第一探测器11的信号输出端连接有示波器；偏振分光棱镜7的反射光路上顺次设有第二聚焦透镜12和第二探测器13；第二电光调制器3的射频输入端口连接有压控振荡器15，压控振荡器15的信号输入端连接有第一函数发生器14，第一函数发生器14与示波器相连接；A device for measuring the fineness of a high-precision cavity, including a laser 1, a first electro-optic modulator 2, a second electro-optic modulator 3, a matching lens 5, a 1/2 wave plate 6, Polarizing beam splitting prism 7; the transmitted light path of polarizing beam splitting prism 7 is provided with 1/4 wave plate 8, and the high-definition cavity 9 to be measured is located on the outgoing light path of 1/4 wave plate 8, and the outgoing light of high-definition cavity 9 The first focusing lens 10 and the first detector 11 are arranged successively on the road, and the signal output end of the first detector 11 is connected with an oscilloscope; Detector 13; the RF input port of the second electro-optic modulator 3 is connected with a voltage-controlled oscillator 15, and the signal input end of the voltage-controlled oscillator 15 is connected with a first function generator 14, and the first function generator 14 is connected with an oscilloscope ;
还包括第二函数发生器16，第二函数发生器16的信号输出端连接有分束器17，分束器17的第一输出端口与第一电光调制器2的射频输入端口相连接，分束器17的第二输出端口顺次连接有移相器18、混频器19、低通滤波器20、比例积分电路21和高压放大器22；高压放大器22的信号输出端与激光器1的电压调制端口相连接；第二探测器13的信号输出端与混频器19相连接。Also includes a second function generator 16, the signal output end of the second function generator 16 is connected with a beam splitter 17, the first output port of the beam splitter 17 is connected with the radio frequency input port of the first electro-optic modulator 2, and the splitter The second output port of beamer 17 is connected with phase shifter 18, mixer 19, low-pass filter 20, proportional integral circuit 21 and high-voltage amplifier 22 in sequence; The ports are connected; the signal output end of the second detector 13 is connected with the mixer 19 .
第一电光调制器2、第二电光调制器3采用光纤电光调制器。The first electro-optic modulator 2 and the second electro-optic modulator 3 are optical fiber electro-optic modulators.
下面结合附图对本发明技术作进一步的说明。The technology of the present invention will be further described below in conjunction with the accompanying drawings.
掺铒光纤激光器出射光信号经过第一电光调制器2，第二电光调制器3由激光输出口4发射激光，经过匹配透镜5后，经过1/2波片6，偏振分光棱镜7与1/4波片8照射到高精细度腔9前镜上。高精细度腔9前镜反射光经第二聚焦透镜12进入第二探测器13，进入到高精细度腔的光经过第一聚焦透镜10进入第一探测器11。第二函数发生器16产生25MHZ射频信号，经分束器17后一束信号进进入到第一电光调制器2中对激光进行调制，另一束信号进入移相器18后，与第二探测器13探测到的光信号进入混频器19进行混频，经过低通滤波器20后，误差信号同时送入比例积分电路21。比例积分电路21经过高压放大器22对激光器进行锁定。锁定之后，压控振荡器15产生中心频率为380MHz(通过对腔长的测量计算得到的大致的腔的自由光谱范围)的信号，进入第二电光调制器3中对激光进行二次调制，同时第一函数发生器14产生频率1HZ，±450mv的扫描信号进入压控振荡器15中，使压控振荡器15以380MHz为中心频率扫描，第一探测器11就会测量到随时间变化的光强信号，将第一探测器11连接到示波器上，可以看到一个完整的腔模轮廓。将第一函数发生器14产生的1HZ，±450mv的扫描信号分束进入示波器，示波器能接收到在同一时间刻度下，扫描电压的幅度和腔模信号的幅度，通过查表可以知道给压控振荡器15加的电压值和压控振荡器输出频率之间的对应关系，用电压换算成频率值，将频率值与腔模信号一起导入origin下进行拟合就可以得到频率与腔模幅度之间的关系。The outgoing optical signal of the erbium-doped fiber laser passes through the first electro-optic modulator 2, the second electro-optic modulator 3 emits laser light from the laser output port 4, passes through the matching lens 5, passes through the 1/2 wave plate 6, and the polarization beam splitter prism 7 and 1/2 4 The wave plate 8 irradiates onto the front mirror of the high-definition cavity 9 . The light reflected by the front mirror of the high-definition cavity 9 enters the second detector 13 through the second focusing lens 12 , and the light entering the high-definition cavity enters the first detector 11 through the first focusing lens 10 . The second function generator 16 produces a 25MHZ radio frequency signal. After passing through the beam splitter 17, one beam signal enters the first electro-optic modulator 2 to modulate the laser light, and the other beam signal enters the phase shifter 18, and is combined with the second detector The optical signal detected by the detector 13 enters the mixer 19 for frequency mixing, and after passing through the low-pass filter 20, the error signal is sent to the proportional-integral circuit 21 at the same time. The proportional-integral circuit 21 locks the laser through a high-voltage amplifier 22 . After locking, the voltage-controlled oscillator 15 produces a signal with a center frequency of 380MHz (the approximate free spectrum range of the cavity obtained by measuring the cavity length), and enters the second electro-optic modulator 3 to perform secondary modulation on the laser light. The first function generator 14 generates a frequency of 1HZ, and the scanning signal of ±450mv enters the voltage-controlled oscillator 15, so that the voltage-controlled oscillator 15 scans with a center frequency of 380MHz, and the first detector 11 will measure the light that changes with time. If the signal is strong, connect the first detector 11 to an oscilloscope, and a complete outline of the cavity mode can be seen. The 1HZ, ±450mv scanning signal generated by the first function generator 14 is split into the oscilloscope, and the oscilloscope can receive the amplitude of the scanning voltage and the amplitude of the cavity mode signal at the same time scale, and the voltage control can be known by looking up the table. The corresponding relationship between the voltage value added by the oscillator 15 and the output frequency of the voltage-controlled oscillator is converted into a frequency value by using the voltage, and the frequency value and the cavity mode signal are imported into origin for fitting to obtain the relationship between the frequency and the cavity mode amplitude. relationship between.
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