CN104819957A - CRDS principle-based gas concentration measurement system of continuously adjustable laser light source - Google Patents
CRDS principle-based gas concentration measurement system of continuously adjustable laser light source Download PDFInfo
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Abstract
The present invention relates to a CRDS principle-based gas concentration measurement system of a continuously adjustable laser light source. The CRDS principle-based gas concentration measurement system comprises light path portion devices and electric circuit portion devices, wherein the light path portion devices comprise a laser, a light isolator, a light collimator, a wavemeter, and an optical passive cavity, and the electric circuit portion devices comprise a photoelectric detector, a control circuit, a PZT cavity length modulator, a high-speed data acquisition card and a computer. According to the present invention, the light in the one polarization direction is only utilized to detect, the connection with the light collimator adopts the polarization maintaining optical fiber connection, the light isolator in the system is eliminated, and the good polarization laser light beam can be obtained; the problem that the S component and the P component have different resonance frequencies in the annular cavity so as not to achieve the concurrent resonance is solved; a lot of the devices having the polarization beam splitting adjusting function are simplified and eliminated, and the light energy utilization rate of the laser is improved; and the on/off function of the laser is achieved through the current tuning so as to eliminate the AOM and the related control systems.
Description
Technical field
The present invention relates to CRDS measuring system technical field, particularly a kind of gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source.
Background technology
In traditional CRDS measuring system, usually adopt the two straight chambeies of mirror for filling gas high-quality optical passive chamber to be measured.The light intensity time decay of the pulsed light beam set up in chamber.For cavity, in chamber, light intensity attenuation speed is relevant with the distance between cavity mirrors reflectivity, two chamber mirrors and the speed of light in chamber.When being full of gas to be measured in optical passive chamber, in chamber, light intensity attenuation speed increases.In a good condition, in chamber, light intensity will in single e number decay.Absorption spectrum in chamber is obtained like this by the relation of drawing in chamber between light intensity attenuation speed and corresponding optical maser wavelength.
Traditional pulse CRDS measuring system has several problem anxious to be resolved, and laser instrument adopts pulse type semiconductor laser usually, and data acquisition rate is limited to the pulsed frequency of laser instrument.In addition, due to the laser frequency of pulsed laser and chamber intrinsic light spectral frequency intersection less, by the impact of the pulsed frequency of pulsed laser, be coupled into optical passive chamber and the stable light intensity set up in chamber also can be less.
Adopt the PDH method of Drever in traditional CRDS measuring system, the people such as Drever utilize the phase propetry in optics optical passive chamber to form frequency stabilization system, utilize modulating light spectral technology to obtain the dispersion curve in optics optical passive chamber as frequency discrimination curve figure.Small phase-modulation is done to laser, produces and be distributed in equal but two sidebands that initial bit is mutually contrary of carrier frequency both sides, amplitude.Due to the impact by optics passive cavity or other medium, the amplitude of two sidebands or phase place have had uneven change, then two Beat Signals can not be offset completely, and receiver can export a frequency signal.This output signal is used for producing the frequency discrimination curve being similar to optical passive chamber phase-shift curve, and in less scope, all can produce effective error signal so long in order to regulate and control chamber, therefore, system is losing lock not easily, and antijamming capability is very strong.
Summary of the invention
The present invention will solve technical matters of the prior art, provides a kind of gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source.
In order to solve the problems of the technologies described above, technical scheme of the present invention is specific as follows:
The gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source, comprises light path part device and circuit part device;
Described light path part device comprises laser instrument, optoisolator, optical collimator, wavemeter, optical passive chamber; Described laser instrument comprises the absorption light frequency of gas to be measured; The effect of described optoisolator is protection laser instrument from polarisation of light characteristic in the impact of feedback light and controlling brancher; The effect of described optical collimator is the quality regulating laser emitting light beam, is convenient to carry out pattern match with optical passive chamber;
Described circuit part device comprises photodetector, control circuit, the long modulator in PZT chamber, high-speed data acquisition card and computing machine;
Formed after stablizing light path in the chamber in described optical passive chamber, at the light signal that optical passive chamber output mirror transmission is stronger, emergent light is divided into two-beam by beam splitter, light beam is obtained laser instrument and the whether good information of optical passive chamber match condition by photodetector detection, by distributing to the hot spot of chamber emergent light, determine the fundamental-mode gaussian beam that laser instrument has only excited optical passive chamber corresponding; Another light beam is detected by photodetector, obtains the judgement of Intensity threshold accumulation and the measurement of rate of decay in chamber; Strong ring-down spectroscopy is obtained finally by the measurement of light intensity attenuation speed.
In technique scheme, what be also provided with auxiliary low damage optics cavity takes out aerating device.
In technique scheme, described laser instrument is Distributed Feedback Laser.
In technique scheme, described optical passive chamber is made up of two level crossing one spherical mirrors, and wherein two level crossings are respectively input minute surface and export minute surface, and three mirror contact lens all crosses the ultra-high reflectivity corresponding with gas absorption frequency to be measured.
In technique scheme, laser instrument polarization state used is S component polarization light, to the mirror plated film in optical passive chamber and the timing really of mirror spacing, all needs to carry out installation modulation for S component.
In technique scheme, by laser beam expander and pattern match mirror, the eigenmodes of laser emitting optical mode with optical passive chamber is mated, and adjusted by the horizontal spot size of diaphragm to light beam, the irregular part light of cross direction profiles is tackled.
The present invention has following beneficial effect:
1) solution of triangle ring cavity and relevant issues.Triangle ring cavity has following advantage: (1) can realize longer absorption path in limited cavity material.This can reduce chamber longitudinal mode spacing for tuner-type system, thus improves system spectrum resolution; (2) except input, except output cavity mirror, refrative mirror add the installation facilitating and adjust the long modulator in PZT chamber in cavate system; (3), when laser is selected to incide in chamber from refrative mirror, light beam can be prevented directly to be reflected back toward laser instrument, thus can optoisolator to be saved.It is characterized in that: utilize triangle ring cavity and adopt the LASER Light Source with polarization characteristic, the light of a polarization direction is only utilized to detect, adopt polarization maintaining optical fibre to connect with the connection of optical collimator, save the optoisolator in system like this, and can good polarized laser beam be obtained; And solve in ring cavity, S component and P component have different resonance frequencies therefore can not the problem of simultaneously resonance.
2), the wavelength locking system of laser instrument.The Distributed Feedback Laser with tunable effect is adopted in the present invention, because this LASER Light Source has temperature, electric current tuning function, utilize wavemeter to the temperature of laser instrument, the determination of electric current tuning coefficient, just the mode of Data Control can be adopted in the product, the Frequency Locking system of the frequency of laser instrument being carried out to precision tuning and laser instrument and optical passive chamber is realized by control temperature and electric current, the temperature current of above laser instrument controls in conjunction with the higher wavemeter of current precision, the tuning mode of Error Feedback is adopted to carry out frequency stabilization mode compared with traditional PDH mode to laser instrument, both the number of instrument middle controller part had been reduced, reduce the difficulty of control system, LASER Light Source frequency stabilization in a long time can be realized again.
3), the present invention realizes carrying out multimetering on absorption line.Accurately measure and control temperature and pressure most important to quantitative test.Traditional cavity ring-down spectroscopy (CRDS) instrument measures absorptance only by 2, i.e. maximum absorption wavelength and baseline wavelength two point, and laser is alternate emission between these 2 only, and this causes occurring multiple noise and error source.First, simple statistics illustrates, the peak height measurement of single-point is limited, because it is subject to the impact of shot noise (bimirror chamber); Secondly, this method hypothesis laser is always in core, and this is not right, even if optical maser wavelength is not really floated from core, baseline and crest line also can float from, unless the temperature and pressure of equipment can be controlled by accurate stable.3rd, if non-targeted gaseous absorption line is overlapping with object gas Absorption Line, even close to the wavelength of the selected baseline of object gas, the equipment surveying at 2 all cannot be identified.All these all will cause the inaccurate of measurement result.In fact, the present invention is the Absorption Line along object gas spectrum, regulates the optical maser wavelength of corresponding Absorption Line diverse location, and calculates the concentration of object gas by meticulous coupling absorption peak.
4), mode detecting system is increased.Be connected with the distribution situation of CCD for detecting optical passive cavity emergent light spot in one end of detector, ensure that laser instrument is coupled with the basic mode in optical passive chamber.In addition, system is also auxiliary a set of high-precision laser Wavelength calibration system and vacuum system (marking not yet in the drawings), for the mensuration of Distributed Feedback Laser wavelength and tuning coefficient, and low damage optics cavity take out inflation.Except hardware, the normal operation of spectroscopic system also needs supportingly have corresponding software.The function that software section need complete comprises: coordinate hardware each module work, collection analyze cavity-type BPM signal and display cavity loss value, the curve of spectrum etc.There is polarization characteristic by adopting, there is certain light isolation features and there is the humorous Distributed Feedback Laser of current adjustment, only adopt a polarization direction for the detection to intracavity gas.Eliminated the device of some polarization beam splitting adjustment functions by such simplification, improve the efficiency of light energy utilization of laser instrument; Realized the switching function of laser instrument by electric current tuning, thus eliminate AOM and relevant control system thereof.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Fig. 1 is the System's composition schematic diagram of measuring system.
Fig. 2 is measuring system schematic diagram of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail.
As the first-selected system that Fig. 1 is invention at present, optics connects and is shown by dotted line, and electronics connection solid line shows.System comprises: the light source 1 of a tunable single-frequency, is connected with one in the optical path and declines and swing optical passive chamber 20, sample detector electronics system 30, instruction electronic system 40, locking electronic system 50 with between optical passive chamber for optics is connected.The connection of locking system between optical passive chamber and laser instrument is that electronics connects.That electronics is connected between instruction electronic system 50 detects with sample.
As shown in Figure 2, system for light source, realizes the quick shutoff of continuous laser with DFB (DistributedFeed-Back) laser instrument to the measuring system schematic diagram of the present invention's design by the current-modulation of Distributed Feedback Laser; Both Mode Coupling are realized by laser beam shaping and the isoparametric design of cavity body structure; By the long frequency matching realized between the two of tuning Distributed Feedback Laser Injection Current and scanning passive cavity chamber.Therefore, for traditional spectroscopic system, native system can be saved system cost, reduce system bulk.Can find out from the graph, the hardware of system can be divided into optical, electrical two large divisions totally 7 modules.Wherein, light path part device mainly comprises laser instrument, optoisolator, optical collimator, low-consumption optical chamber etc.; Circuit part device mainly comprises photodetector, control circuit, the long modulator in PZT chamber, high-speed data acquisition card and computing machine etc.
Should be comprised the absorption light frequency of gas to be measured by LASER Light Source 1, outgoing beam has the fundamental-mode gaussian beam of polarization characteristic, and desirable laser bandwidth is 2MHz, and laser output power is 10mW, and laser instrument 1 is for having the Distributed Feedback Laser of temperature, electric current tuning function.For the sake of security, usually after laser instrument 1, be connected with Fabry optoisolator 2, optoisolator 2 has two effects, and one protects laser instrument from the impact of feedback light; Two is polarisation of light characteristics in controlling brancher.Same chamber mirror has different reflectivity for the light of different polarization characteristics (S, P), and we select S component as detection light.From the polarized light that the light after optoisolator 2 outgoing is S direction.Optical passive chamber is made up of two level crossing one spherical mirrors, and wherein two level crossings are respectively input minute surface 6 and export minute surface 8, and three mirror contact lens all crosses the ultra-high reflectivity corresponding with gas absorption frequency to be measured.Being connected with chamber length regulating device 9 (PZT) in one end of spherical mirror 7, is the absorption frequency of gas to be measured by the resonance frequency of the enable basic mode pattern existed in stable cavity of adjustment mirror spacing.
The effect of optical collimator 3 is the quality regulating laser emitting light beam, is convenient to carry out pattern match with optical passive chamber.The aperture device 5 controlling spot size is connected with, for filtering the not so good edge-light of beam distribution characteristic after optical collimator 3.Be coupled into optical passive chamber by the effect of matched lenses 4 by high efficiency for incident beam, the light beam being coupled into optical passive chamber will repeatedly set up the pulse light intensity signal with some strength at intracavity round trip, last emergent light is by the outgoing of outgoing minute surface.
Formed after stablizing light path in chamber, at the light signal that outgoing mirror 8 transmission of optical passive chamber is stronger, emergent light is divided into two-beam by beam splitter, light beam is detected device CCD14 detection and obtains laser instrument and the whether good information of passive cavity match condition, by distributing to the hot spot of chamber emergent light, determine the fundamental-mode gaussian beam that laser instrument 1 has only excited optical passive chamber corresponding, concrete theory and experimentation are shown in pertinent literature.Another light beam detects 13 by photodetector, obtains the judgement of Intensity threshold accumulation and the measurement of rate of decay in chamber.Strong ring-down spectroscopy is obtained finally by the measurement of light intensity attenuation speed.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all embodiments.And thus the apparent change of extending out or variation be still among the protection domain of the invention.
Claims (6)
1. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source, is characterized in that, comprises light path part device and circuit part device;
Described light path part device comprises laser instrument, optoisolator, optical collimator, wavemeter, optical passive chamber; Described laser instrument comprises the absorption light frequency of gas to be measured; The effect of described optoisolator is protection laser instrument from polarisation of light characteristic in the impact of feedback light and controlling brancher; The effect of described optical collimator is the quality regulating laser emitting light beam, is convenient to carry out pattern match with optical passive chamber;
Described circuit part device comprises photodetector, control circuit, the long modulator in PZT chamber, high-speed data acquisition card and computing machine;
Formed after stablizing light path in the chamber in described optical passive chamber, at the light signal that optical passive chamber output mirror transmission is stronger, emergent light is divided into two-beam by beam splitter, light beam is obtained laser instrument and the whether good information of optical passive chamber match condition by photodetector detection, by distributing to the hot spot of chamber emergent light, determine the fundamental-mode gaussian beam that laser instrument has only excited optical passive chamber corresponding; Another light beam is detected by photodetector, obtains the judgement of Intensity threshold accumulation and the measurement of rate of decay in chamber; Strong ring-down spectroscopy is obtained finally by the measurement of light intensity attenuation speed.
2. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source according to claim 1, is characterized in that, what be also provided with auxiliary low damage optics cavity takes out aerating device.
3. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source according to claim 1, is characterized in that, described laser instrument is Distributed Feedback Laser.
4. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source according to claim 1, it is characterized in that, described optical passive chamber is made up of two level crossing one spherical mirrors, wherein two level crossings are respectively input minute surface and export minute surface, and three mirror contact lens all crosses the ultra-high reflectivity corresponding with gas absorption frequency to be measured.
5. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source according to claim 4, it is characterized in that, laser instrument polarization state used is S component polarization light, to the mirror plated film in optical passive chamber and the timing really of mirror spacing, all need to carry out installation modulation for S component.
6. the gas concentration measurement system based on CRDS principle of continuously adjustabe LASER Light Source according to claim 1, it is characterized in that, by laser beam expander and pattern match mirror, the eigenmodes of laser emitting optical mode with optical passive chamber is mated, and adjusted by the horizontal spot size of diaphragm to light beam, the irregular part light of cross direction profiles is tackled.
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| CN106290247A (en) * | 2016-09-21 | 2017-01-04 | 华东理工大学 | Continuous wave-cavity ring-down spectroscopy device and method based on the transparent effect of electromagnetically induced |
| WO2017092614A1 (en) * | 2015-12-01 | 2017-06-08 | 苏州谱道光电科技有限公司 | Mirror for optical resonator, optical resonator, and spectrometer |
| CN109557044A (en) * | 2018-12-06 | 2019-04-02 | 上海电力学院 | A kind of cavity ring-down spectroscopy beam path alignment system and method |
| CN109580541A (en) * | 2018-12-07 | 2019-04-05 | 中国科学院长春光学精密机械与物理研究所 | A kind of optical heterodyne cavity ring-down spectroscopy measuring device and method |
| CN109856078A (en) * | 2019-01-16 | 2019-06-07 | 深圳供电局有限公司 | Optical gas detection system |
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| WO2017092614A1 (en) * | 2015-12-01 | 2017-06-08 | 苏州谱道光电科技有限公司 | Mirror for optical resonator, optical resonator, and spectrometer |
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| CN109856078A (en) * | 2019-01-16 | 2019-06-07 | 深圳供电局有限公司 | Optical gas detection system |
| CN112557327A (en) * | 2020-12-22 | 2021-03-26 | 天津城建大学 | New coronavirus COVID-19 marker detector and detection method |
| CN113646621A (en) * | 2021-06-30 | 2021-11-12 | 徐州旭海光电科技有限公司 | Cavity ring-down photoelectric system and incident light path adjusting method thereof |
| CN113702302A (en) * | 2021-08-28 | 2021-11-26 | 武汉东泓华芯科技有限公司 | Gas detection device and method based on cavity ring-down spectroscopy |
| CN113702302B (en) * | 2021-08-28 | 2024-06-25 | 武汉东泓华芯科技有限公司 | Detection method of gas detection device based on cavity ring-down spectroscopy technology |
| CN113945528A (en) * | 2021-10-08 | 2022-01-18 | 中国科学院合肥物质科学研究院 | Ammonia gas measuring device and method based on Fabry-Perot interferometer |
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| CN113984670A (en) * | 2021-11-01 | 2022-01-28 | 中国科学院光电技术研究所 | Double-sensor cavity adjusting method for cavity ring-down high-reflectivity measurement |
| CN114383816A (en) * | 2021-12-21 | 2022-04-22 | 中国科学院光电技术研究所 | Multi-optical parameter fusion feedback cavity adjusting method for passive cavity |
| CN114383816B (en) * | 2021-12-21 | 2023-02-14 | 中国科学院光电技术研究所 | Multi-optical-parameter fusion feedback cavity adjusting method for passive cavity |
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