CN106629574A - 一种mems红外光源及其制作方法 - Google Patents
一种mems红外光源及其制作方法 Download PDFInfo
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- CN106629574A CN106629574A CN201611265720.6A CN201611265720A CN106629574A CN 106629574 A CN106629574 A CN 106629574A CN 201611265720 A CN201611265720 A CN 201611265720A CN 106629574 A CN106629574 A CN 106629574A
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- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 6
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- 229910052802 copper Inorganic materials 0.000 claims description 3
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- 239000005543 nano-size silicon particle Substances 0.000 claims description 3
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
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- 239000010937 tungsten Substances 0.000 claims description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical group [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 2
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910003978 SiClx Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
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- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
- B81B7/0019—Protection against thermal alteration or destruction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0083—Temperature control
- B81B7/0087—On-device systems and sensors for controlling, regulating or monitoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Micromachines (AREA)
Abstract
Description
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CN201611265720.6A CN106629574B (zh) | 2016-12-30 | 2016-12-30 | 一种mems红外光源及其制作方法 |
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CN106629574A true CN106629574A (zh) | 2017-05-10 |
CN106629574B CN106629574B (zh) | 2019-02-05 |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108364883A (zh) * | 2018-02-28 | 2018-08-03 | 中国电子科技集团公司第十三研究所 | 验证热反射测温设备准确性的装置、制备方法及验证方法 |
CN108508264A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
CN108508263A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
CN108508265A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
CN110687065A (zh) * | 2019-09-17 | 2020-01-14 | 中国科学院上海微系统与信息技术研究所 | 一种红外光源的制备方法及一种红外气体传感器 |
CN113175963A (zh) * | 2021-04-27 | 2021-07-27 | 华东师范大学 | 一种mems流量传感器及制备方法 |
CN113791048A (zh) * | 2021-09-13 | 2021-12-14 | 上海翼捷工业安全设备股份有限公司 | Mems红外光源及其制备方法 |
CN113979402A (zh) * | 2021-09-30 | 2022-01-28 | 山东大学 | 一种mems红外光源及其制备方法 |
CN116940203A (zh) * | 2023-09-07 | 2023-10-24 | 深圳市美思先端电子有限公司 | 一种热释电红外传感器 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1743959A (zh) * | 2004-09-01 | 2006-03-08 | 中国科学院电子学研究所 | 基于微电子机械系统技术的红外光源及制备方法 |
US8552380B1 (en) * | 2012-05-08 | 2013-10-08 | Cambridge Cmos Sensors Limited | IR detector |
CN105417491A (zh) * | 2015-12-14 | 2016-03-23 | 苏州诺联芯电子科技有限公司 | 定标黑体光源的制备方法及定标黑体光源 |
CN105452826A (zh) * | 2013-08-09 | 2016-03-30 | 世美特株式会社 | 红外线温度传感器及利用红外线温度传感器的装置 |
CN105668504A (zh) * | 2016-03-15 | 2016-06-15 | 苏州诺联芯电子科技有限公司 | 红外光源及其制作方法 |
-
2016
- 2016-12-30 CN CN201611265720.6A patent/CN106629574B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1743959A (zh) * | 2004-09-01 | 2006-03-08 | 中国科学院电子学研究所 | 基于微电子机械系统技术的红外光源及制备方法 |
US8552380B1 (en) * | 2012-05-08 | 2013-10-08 | Cambridge Cmos Sensors Limited | IR detector |
CN105452826A (zh) * | 2013-08-09 | 2016-03-30 | 世美特株式会社 | 红外线温度传感器及利用红外线温度传感器的装置 |
CN105417491A (zh) * | 2015-12-14 | 2016-03-23 | 苏州诺联芯电子科技有限公司 | 定标黑体光源的制备方法及定标黑体光源 |
CN105668504A (zh) * | 2016-03-15 | 2016-06-15 | 苏州诺联芯电子科技有限公司 | 红外光源及其制作方法 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108508264A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
CN108508263A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
CN108508265A (zh) * | 2017-09-27 | 2018-09-07 | 中国计量科学研究院 | 功率传感器 |
CN108508263B (zh) * | 2017-09-27 | 2020-04-17 | 中国计量科学研究院 | 功率传感器 |
CN108508264B (zh) * | 2017-09-27 | 2020-05-05 | 中国计量科学研究院 | 功率传感器 |
CN108508265B (zh) * | 2017-09-27 | 2020-05-05 | 中国计量科学研究院 | 功率传感器 |
CN108364883A (zh) * | 2018-02-28 | 2018-08-03 | 中国电子科技集团公司第十三研究所 | 验证热反射测温设备准确性的装置、制备方法及验证方法 |
CN110687065A (zh) * | 2019-09-17 | 2020-01-14 | 中国科学院上海微系统与信息技术研究所 | 一种红外光源的制备方法及一种红外气体传感器 |
CN113175963A (zh) * | 2021-04-27 | 2021-07-27 | 华东师范大学 | 一种mems流量传感器及制备方法 |
CN113791048A (zh) * | 2021-09-13 | 2021-12-14 | 上海翼捷工业安全设备股份有限公司 | Mems红外光源及其制备方法 |
CN113979402A (zh) * | 2021-09-30 | 2022-01-28 | 山东大学 | 一种mems红外光源及其制备方法 |
CN116940203A (zh) * | 2023-09-07 | 2023-10-24 | 深圳市美思先端电子有限公司 | 一种热释电红外传感器 |
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