CN106567109B - 一种无氰镀银的电镀液及其电镀方法 - Google Patents
一种无氰镀银的电镀液及其电镀方法 Download PDFInfo
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- CN106567109B CN106567109B CN201611004451.8A CN201611004451A CN106567109B CN 106567109 B CN106567109 B CN 106567109B CN 201611004451 A CN201611004451 A CN 201611004451A CN 106567109 B CN106567109 B CN 106567109B
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- Prior art keywords
- silver
- electroplating
- cyanide
- electroplating solution
- cathode
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- 238000009713 electroplating Methods 0.000 title claims abstract description 134
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title claims abstract description 116
- 229910052709 silver Inorganic materials 0.000 title claims abstract description 103
- 239000004332 silver Substances 0.000 title claims abstract description 103
- 238000007747 plating Methods 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 28
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims abstract description 32
- MLKQJVFHEUORBO-UHFFFAOYSA-M silver;methanesulfonate Chemical compound [Ag+].CS([O-])(=O)=O MLKQJVFHEUORBO-UHFFFAOYSA-M 0.000 claims abstract description 21
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 42
- HZVOZRGWRWCICA-UHFFFAOYSA-N methanediyl Chemical compound [CH2] HZVOZRGWRWCICA-UHFFFAOYSA-N 0.000 claims description 29
- IMQLKJBTEOYOSI-GPIVLXJGSA-N Inositol-hexakisphosphate Chemical compound OP(O)(=O)O[C@H]1[C@H](OP(O)(O)=O)[C@@H](OP(O)(O)=O)[C@H](OP(O)(O)=O)[C@H](OP(O)(O)=O)[C@@H]1OP(O)(O)=O IMQLKJBTEOYOSI-GPIVLXJGSA-N 0.000 claims description 14
- IMQLKJBTEOYOSI-UHFFFAOYSA-N Phytic acid Natural products OP(O)(=O)OC1C(OP(O)(O)=O)C(OP(O)(O)=O)C(OP(O)(O)=O)C(OP(O)(O)=O)C1OP(O)(O)=O IMQLKJBTEOYOSI-UHFFFAOYSA-N 0.000 claims description 14
- 229910000403 monosodium phosphate Inorganic materials 0.000 claims description 14
- 235000019799 monosodium phosphate Nutrition 0.000 claims description 14
- 239000000467 phytic acid Substances 0.000 claims description 14
- 229940068041 phytic acid Drugs 0.000 claims description 14
- 235000002949 phytic acid Nutrition 0.000 claims description 14
- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 claims description 14
- 239000000126 substance Substances 0.000 claims description 14
- 239000006259 organic additive Substances 0.000 claims description 13
- 238000003756 stirring Methods 0.000 claims description 13
- YDONNITUKPKTIG-UHFFFAOYSA-N [Nitrilotris(methylene)]trisphosphonic acid Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CP(O)(O)=O YDONNITUKPKTIG-UHFFFAOYSA-N 0.000 claims description 12
- 235000014113 dietary fatty acids Nutrition 0.000 claims description 11
- 229930195729 fatty acid Natural products 0.000 claims description 11
- 239000000194 fatty acid Substances 0.000 claims description 11
- -1 amine ethoxylated sulfonate Chemical class 0.000 claims description 9
- 150000001412 amines Chemical class 0.000 claims description 6
- 229940051841 polyoxyethylene ether Drugs 0.000 claims description 6
- 229920000056 polyoxyethylene ether Polymers 0.000 claims description 6
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 4
- 244000269722 Thea sinensis Species 0.000 claims description 4
- PYIDGJJWBIBVIA-UYTYNIKBSA-N lauryl glucoside Chemical compound CCCCCCCCCCCCO[C@@H]1O[C@H](CO)[C@@H](O)[C@H](O)[C@H]1O PYIDGJJWBIBVIA-UYTYNIKBSA-N 0.000 claims description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 4
- 229920000036 polyvinylpyrrolidone Polymers 0.000 claims description 4
- 239000001267 polyvinylpyrrolidone Substances 0.000 claims description 4
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 claims description 4
- AVTYONGGKAJVTE-OLXYHTOASA-L potassium L-tartrate Chemical compound [K+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O AVTYONGGKAJVTE-OLXYHTOASA-L 0.000 claims description 4
- 239000001472 potassium tartrate Substances 0.000 claims description 4
- 229940111695 potassium tartrate Drugs 0.000 claims description 4
- 235000011005 potassium tartrates Nutrition 0.000 claims description 4
- 239000001397 quillaja saponaria molina bark Substances 0.000 claims description 4
- 229930182490 saponin Natural products 0.000 claims description 4
- 150000007949 saponins Chemical class 0.000 claims description 4
- DGSDBJMBHCQYGN-UHFFFAOYSA-N sodium;2-ethylhexyl hydrogen sulfate Chemical compound [Na+].CCCCC(CC)COS(O)(=O)=O DGSDBJMBHCQYGN-UHFFFAOYSA-N 0.000 claims description 4
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 2
- 239000002202 Polyethylene glycol Substances 0.000 claims description 2
- 229920002125 Sokalan® Polymers 0.000 claims description 2
- 150000002191 fatty alcohols Chemical class 0.000 claims description 2
- 239000004584 polyacrylic acid Substances 0.000 claims description 2
- 229920001223 polyethylene glycol Polymers 0.000 claims description 2
- 229940057950 sodium laureth sulfate Drugs 0.000 claims description 2
- SXHLENDCVBIJFO-UHFFFAOYSA-M sodium;2-[2-(2-dodecoxyethoxy)ethoxy]ethyl sulfate Chemical compound [Na+].CCCCCCCCCCCCOCCOCCOCCOS([O-])(=O)=O SXHLENDCVBIJFO-UHFFFAOYSA-M 0.000 claims description 2
- 244000060011 Cocos nucifera Species 0.000 claims 1
- 235000013162 Cocos nucifera Nutrition 0.000 claims 1
- 239000011248 coating agent Substances 0.000 abstract description 29
- 238000000576 coating method Methods 0.000 abstract description 29
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 abstract description 8
- 239000000654 additive Substances 0.000 abstract description 7
- 230000000996 additive effect Effects 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 7
- 239000008139 complexing agent Substances 0.000 abstract description 4
- 150000003839 salts Chemical class 0.000 abstract description 4
- 238000004377 microelectronic Methods 0.000 abstract description 3
- 230000005622 photoelectricity Effects 0.000 abstract description 3
- 238000005219 brazing Methods 0.000 abstract description 2
- OTWSURXLBKIUNH-UHFFFAOYSA-N methylidenesilver Chemical compound [Ag]=C OTWSURXLBKIUNH-UHFFFAOYSA-N 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 28
- 239000013078 crystal Substances 0.000 description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 239000002932 luster Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 235000019864 coconut oil Nutrition 0.000 description 4
- 239000003240 coconut oil Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 150000004665 fatty acids Chemical class 0.000 description 4
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 235000013616 tea Nutrition 0.000 description 3
- RYKLZUPYJFFNRR-UHFFFAOYSA-N 3-hydroxypiperidin-2-one Chemical compound OC1CCCNC1=O RYKLZUPYJFFNRR-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 229930006000 Sucrose Natural products 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- MRUAUOIMASANKQ-UHFFFAOYSA-O carboxymethyl-[3-(dodecanoylamino)propyl]-dimethylazanium Chemical compound CCCCCCCCCCCC(=O)NCCC[N+](C)(C)CC(O)=O MRUAUOIMASANKQ-UHFFFAOYSA-O 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 229930182470 glycoside Natural products 0.000 description 2
- 229940075468 lauramidopropyl betaine Drugs 0.000 description 2
- 125000001419 myristoyl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000005720 sucrose Substances 0.000 description 2
- 239000003440 toxic substance Substances 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- JTEQZWNDYJRHSC-UHFFFAOYSA-N C1(=CC=CC=C1)OS(=S)(=S)CCC.[Na] Chemical compound C1(=CC=CC=C1)OS(=S)(=S)CCC.[Na] JTEQZWNDYJRHSC-UHFFFAOYSA-N 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 244000021150 Orbignya martiana Species 0.000 description 1
- 235000014643 Orbignya martiana Nutrition 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229920002873 Polyethylenimine Polymers 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000010480 babassu oil Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229940048848 lauryl glucoside Drugs 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 125000001117 oleyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])/C([H])=C([H])\C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 229920002401 polyacrylamide Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- DHCDFWKWKRSZHF-UHFFFAOYSA-N sulfurothioic S-acid Chemical compound OS(O)(=O)=S DHCDFWKWKRSZHF-UHFFFAOYSA-N 0.000 description 1
- 231100000167 toxic agent Toxicity 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/46—Electroplating: Baths therefor from solutions of silver
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Abstract
Description
Claims (4)
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Families Citing this family (4)
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CN109778261A (zh) * | 2017-11-10 | 2019-05-21 | 丹阳市金地生态园林发展有限公司 | 一种含环氧氯丙烷的金属合金电镀液 |
CN109504990B (zh) * | 2018-12-11 | 2020-07-03 | 湖北工程学院 | 一种近中性电刷镀镀银液及其制备工艺、使用方法 |
CN113818056B (zh) * | 2021-09-18 | 2023-05-26 | 中国航发北京航空材料研究院 | 一种亚氨基二琥珀酸无氰镀银工艺添加剂及使用方法 |
CN114752973B (zh) * | 2022-05-13 | 2023-12-22 | 重庆大学 | 无氰光亮镀银溶液及电镀方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6251249B1 (en) * | 1996-09-20 | 2001-06-26 | Atofina Chemicals, Inc. | Precious metal deposition composition and process |
CN101092723A (zh) * | 2007-07-13 | 2007-12-26 | 福州大学 | 一种无氰镀银电镀液 |
CN102277601A (zh) * | 2011-08-09 | 2011-12-14 | 南京大学 | 含辅助配位剂的无氰镀银电镀液 |
CN102691081A (zh) * | 2012-06-11 | 2012-09-26 | 东莞市闻誉实业有限公司 | 一种电镀银溶液及电镀方法 |
CN103173814A (zh) * | 2011-12-23 | 2013-06-26 | 赵春美 | 一种光亮电镀银液 |
CN104611736A (zh) * | 2013-11-05 | 2015-05-13 | 无锡市雪江环境工程设备有限公司 | 一种丁二酰亚胺镀银电镀液及电镀方法 |
CN104611739A (zh) * | 2013-11-05 | 2015-05-13 | 无锡市雪江环境工程设备有限公司 | 一种半胱氨酸镀银电镀液及电镀方法 |
-
2016
- 2016-11-15 CN CN201611004451.8A patent/CN106567109B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6251249B1 (en) * | 1996-09-20 | 2001-06-26 | Atofina Chemicals, Inc. | Precious metal deposition composition and process |
CN101092723A (zh) * | 2007-07-13 | 2007-12-26 | 福州大学 | 一种无氰镀银电镀液 |
CN102277601A (zh) * | 2011-08-09 | 2011-12-14 | 南京大学 | 含辅助配位剂的无氰镀银电镀液 |
CN103173814A (zh) * | 2011-12-23 | 2013-06-26 | 赵春美 | 一种光亮电镀银液 |
CN102691081A (zh) * | 2012-06-11 | 2012-09-26 | 东莞市闻誉实业有限公司 | 一种电镀银溶液及电镀方法 |
CN104611736A (zh) * | 2013-11-05 | 2015-05-13 | 无锡市雪江环境工程设备有限公司 | 一种丁二酰亚胺镀银电镀液及电镀方法 |
CN104611739A (zh) * | 2013-11-05 | 2015-05-13 | 无锡市雪江环境工程设备有限公司 | 一种半胱氨酸镀银电镀液及电镀方法 |
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