CN106500886A - A kind of preparation method of the flexibility stress sensor based on nanometer conductive material - Google Patents
A kind of preparation method of the flexibility stress sensor based on nanometer conductive material Download PDFInfo
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- CN106500886A CN106500886A CN201610838176.3A CN201610838176A CN106500886A CN 106500886 A CN106500886 A CN 106500886A CN 201610838176 A CN201610838176 A CN 201610838176A CN 106500886 A CN106500886 A CN 106500886A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
Abstract
The present invention discloses a kind of preparation method of the flexible mems thin film surface stress biology sensor based on electrical-conductive nanometer material.Specifically in a simple way electrical-conductive nanometer material is combined in flexible base, sensitivity and the telescopicing performance of strain gauge is further improved, first with flexible material（Such as PDMS）The reeded flexible masterplate of tool is made for raw material；Then electrical-conductive nanometer material is used（Such as CNT, nano silver wire）It is filled in the groove of above-mentioned template；Nanometer conductive material two ends extraction electrode in filling；Flexible polymeric materials are finally used（Such as PDMS etc.）Nano material and electrode, enhancing structure stability are fixed on upper strata（This step can be omitted according to current demand）.The inventive method process is simple, with low cost, controllability are strong, and the sensitivity height of the flexibility stress sensor based on electrical-conductive nanometer material for preparing, stability are strong, retractility is good, for realizing that miniaturization, low cost, mass production provide possibility.
Description
Technical field
The present invention relates to field of biosensors, specifically a kind of flexible meagre membrane stress biography based on electrical-conductive nanometer material
The preparation method of sensor.
Background technology
Flexible wearable electronic device is more and more paid attention to due to being interacted convenient with human body.Flexibly, scalable
Wearable sensor can be easily mounted at clothes or be directly connected on body, human body is realized with high flexible and sensitive
Motion and temperature change are detected.
PDMS is also called organosilicon, is a kind of the macromolecule organic silicon compound.PDMS after solidification is a kind of silica gel, has
Multifrequency nature, such as transparent, nontoxic, hydrophobicity, low flammability, is easily engaged with various material room temperature, and due to its Young
Modulus is low and possesses good elasticity.Simultaneously PDMS has extraordinary heat resistance, its highest can bearing temperature be 200oC.
Due to being had the advantages that low cost, use are simple, be widely used in micro-fluidic, chip with good chemical inertness by it
The fields such as encapsulation, are used as the substrate of flexible strain transducer the features such as there is high transparency, strong elasticity additionally, due to PDMS.
When the size of particulate is nanoscale, which will be with quantum size effect, skin effect, bulk effect, maroscopic quantity
Sub- tunnel-effect etc., in the property that the aspects such as mechanics, calorifics, magnetics and electricity also will have other special.Due to conduction material
A variety of advantages for showing on nanoscale of material, had at present research based on nanometer conductive material exploitation flexibly, can stretch
Contracting and sensitive strain transducer, further study the sensor based on this as rehabilitation and personal health monitoring, body
Monitoring structural health conditions, exercise performance monitoring and amusement human motion capture system（For example, for game action catches and dynamic
Draw）Etc..But at present the preparation method of the stress composite and flexible strain gauge of report is often all more complicated, and be difficult to towards
Mass production.
Content of the invention
It is an object of the invention to provide a kind of simple preparation method of the flexibility stress sensor based on nanometer conductive material,
While sensor stability, pliability, sensitivity is improved it is expected to realize mass production.In the preparation method, with one
The thin slice being sized prepares PDMS film with groove as template, solves the existing flexibility stress based on nanometer conductive material
Problems present in sensor preparation process.
The present invention employs the following technical solutions realization：A kind of flexibility stress sensor based on electrical-conductive nanometer material
Preparation method, comprises the steps：
1）A Flat bottom container is taken, and a thin slice is put at Flat bottom container center；
2）Configuration PDMS solution, it is 10 to take host with curing agent mass ratio:1 is placed in culture dish and is well mixed, dry using vacuum
Dry case vacuumizes 10min, makes the bubbles burst in mixed liquor obtain the bubble-free PDMS solution in surface；
3）Take step 2）Obtained PDMS solution is added to step 1）In in ready Flat bottom container, make PDMS solution by thin slice
Cover；
4）The Flat bottom container for filling PDMS and thin slice is put into 70 after standing levellingo1.5h, PDMS solution is heated in the drying box of C
Form PDMS film；
5）The PDMS film in Flat bottom container is taken out, is removed thin slice, has just been obtained the reeded PDMS Flexible formwork assemblies of tool；
6）After two opposite side of PDMS Flexible formwork assembly grooves draw an electrode respectively, conductive nano material is filled in a groove
Material；
7）After PDMS Flexible formwork assemblies after nanometer conductive material to be filled are thoroughly dried, PDMS solution, method such as step 2 is configured）,
One layer of PDMS is dripped in that layer surface of the PDMS film filled with nanometer conductive material, vacuumized using vacuum drying chamber
10min, the container that will be equipped with PDMS Flexible formwork assemblies after standing levelling are put into 70o1h is heated in the drying box of C, laminated film is obtained
Flexibility stress sensor.
The present invention prepares PDMS film with groove using the silicon chip of certain size as template, adds electrical-conductive nanometer wherein
Material extraction electrode, upper strata is fixed nano material and electrode with PDMS layer again, prepares flexibility stress sensor, preparation process
As shown in Figure 1.Step 5）In be by film in turn, bottom-up, thin slice is taken out, formed groove；Step 6）In be electrode
Drawn by two relative edges of groove laterally；Step 7）In reeded film surface drip one layer of PDMS solution, will
Nanometer conductive material is sealed, while electrode to be fixed on the surface of PDMS film.
Electrical-conductive nanometer material is combined by the present invention in a simple way with flexible base, is further improved stress and is passed
The sensitivity of sensor and telescopicing performance, first with flexible material（Such as PDMS etc.）Make with groove for raw material（The shape of groove
Shape, size, variable thickness）Flexible masterplate；Then electrical-conductive nanometer material is used（CNT, nano silver wire etc.）It is filled into above-mentioned
In the groove of template；Nanometer conductive material two ends extraction electrode in filling；Flexible polymeric materials are finally used（Such as PDMS etc.）
Nano material and electrode, enhancing structure stability are fixed on upper strata（This step can be omitted according to current demand）.
The inventive method process is simple, with low cost, controllability are strong, the flexibility based on electrical-conductive nanometer material for preparing
The sensitivity of strain gauge is high, stability is strong, retractility is good, is simultaneously suitable for preparing various differences for different application occasion
The flexibility stress sensor of shape size, is expected to realize miniaturization, low cost, mass production.
Description of the drawings
Fig. 1 prepares the process schematic of flexibility stress sensor for the inventive method.
Specific embodiment
A kind of preparation method of the flexibility stress sensor based on electrical-conductive nanometer material, comprises the steps：
1）A Flat bottom container is taken, and a thin slice is put at Flat bottom container center；
2）Configuration PDMS solution, it is 10 to take host with curing agent mass ratio:1 is placed in culture dish and is well mixed, dry using vacuum
Dry case vacuumizes 10min, makes the bubbles burst in mixed liquor obtain the bubble-free PDMS solution in surface；
3）Take step 2）Obtained PDMS solution is added to step 1）In in ready Flat bottom container, make PDMS solution by thin slice
Cover；
4）The Flat bottom container for filling PDMS and thin slice is put into 70 after standing levellingo1.5h, PDMS solution is heated in the drying box of C
Form PDMS film；
5）The PDMS film in Flat bottom container is taken out, is removed thin slice, has just been obtained the reeded PDMS Flexible formwork assemblies of tool；
6）After two opposite side of PDMS Flexible formwork assembly grooves draw an electrode respectively, conductive nano material is filled in a groove
Material；
7）After PDMS Flexible formwork assemblies after nanometer conductive material to be filled are thoroughly dried, PDMS solution, method such as step 2 is configured）,
One layer of PDMS is dripped in that layer surface of the PDMS film filled with nanometer conductive material, vacuumized using vacuum drying chamber
10min, the container that will be equipped with PDMS Flexible formwork assemblies after standing levelling are put into 70o1h is heated in the drying box of C, laminated film is obtained
Flexibility stress sensor.
The shape of the Flat bottom container and thin slice all can be adjusted according to application places, and its shape can adopt rectangular
Shape, circle, triangle, square, quadrangle, pentagon, five-pointed star, hexagon, hexagon, heptagon, hexagon, eight sides
Shape, octagonal, nonagon, nonagon, decagon, regular decagon, hendecagon, undecagon, dodecagon, dodecagon.
The thin slice adopts silicon chip, sheet glass, lucite piece, plastic sheet.
The nanometer conductive material that fills in the groove of PDMS Flexible formwork assemblies can require to be adjusted according to different application,
With the physical quantity measured needed for more high-sensitive detection；The nanometer conductive material is using gold, silver, copper, californium, iron, aluminium, carbon
The oxide of the one of which or their one of which of various pattern nano materials or two of which or several compounds and mixed
Compound.
Step 6）Two electrode structures of middle preparation are symmetric, and the electrode is from the edge of sensor base upper groove
Outwards draw；The electrode is using one or more in silver, copper or ITO.
Embodiment 1
1）The short wall Flat bottom container of rectangle of a 2*1cm is taken, and the silicon chip of a 0.8*0.3*0.05cm is put at center；
2）Configuration PDMS solution, it is 10 to take host with curing agent mass ratio:1 is placed in culture dish and is well mixed, dry using vacuum
Dry case vacuumizes 10min, makes the bubbles burst in mixed liquor obtain the bubble-free PDMS solution in surface；
3）Take step 2）Obtained PDMS solution is added to step 1）In in ready container；
4）The container for taking advantage of PDMS and silicon chip is put into 70 after standing levellingo1.5h is heated in the drying box of C；
5）The PDMS film in container is taken out, is removed silicon chip, has just been obtained the reeded PDMS Flexible formwork assemblies of tool；
6）After two narrow sides of groove are with conductive copper adhesive tape extraction electrode, nanometer conductive material nano silver wire is filled in a groove；
7）After colloidal sol is thoroughly dried, PDMS solution, method such as step 2 is configured）, one layer of PDMS is dripped above groove, using true
Empty drying box vacuumizes 10min, and the container that will be equipped with PDMS Flexible formwork assemblies and silicon chip is put into 70 after standing levellingoThe drying of C
1h is heated in case, the flexibility stress sensor with sandwich structure is obtained.
Embodiment 2
A kind of core-shell structural conductive polyaniline/Co3O4The preparation method of powder, comprises the steps：
1）The circular short wall Flat bottom container of a diameter 2cm is taken, and the silicon that a diameter 0.8cm thickness is 0.05cm is put at center
Piece；
2）Configuration PDMS solution, it is 10 to take host with curing agent mass ratio:1 is placed in culture dish and is well mixed, dry using vacuum
Dry case vacuumizes 10min, makes the bubbles burst in mixed liquor obtain the bubble-free PDMS solution in surface；
3）Take step 2）Obtained PDMS solution is added to step 1）In in ready container；
4）The container for taking advantage of PDMS and silicon chip is put into 70 after standing levellingo1.5h is heated in the drying box of C；
5）The PDMS film in container is taken out, is removed silicon chip, has just been obtained the reeded PDMS Flexible formwork assemblies of tool；
6）After two narrow sides of groove are with conductive copper adhesive tape extraction electrode, filling carbon nano-pipe in a groove；
7）After colloidal sol is thoroughly dried, PDMS solution, method such as step 2 is configured）, one layer of PDMS is dripped above groove, using true
Empty drying box vacuumizes 10min, and the container that will be equipped with PDMS Flexible formwork assemblies and silicon chip is put into 70 after standing levellingoThe drying of C
1h is heated in case, the flexibility stress sensor with sandwich structure is obtained.
Embodiment 3
1）The circular short wall Flat bottom container of a diameter 2 is taken, and the silicon chip of a 0.8*0.3*0.05cm is put at center；
2）Configuration PDMS solution, it is 10 to take host with curing agent mass ratio:1 is placed in culture dish and is well mixed, dry using vacuum
Dry case vacuumizes 10min, makes the bubbles burst in mixed liquor obtain the bubble-free PDMS solution in surface；
3）Take step 2）Obtained PDMS solution is added to step 1）In in ready container；
4）The container for taking advantage of PDMS and silicon chip is put into 70 after standing levellingo1.5h is heated in the drying box of C；
5）The PDMS film in container is taken out, is removed silicon chip, has just been obtained the reeded PDMS Flexible formwork assemblies of tool；
6）After two narrow sides of groove are with conductive copper adhesive tape extraction electrode, Graphene is filled in a groove；
7）After colloidal sol is thoroughly dried, PDMS solution, method such as step 2 is configured）, one layer of PDMS is dripped above groove, using true
Empty drying box vacuumizes 10min, and the container that will be equipped with PDMS Flexible formwork assemblies and silicon chip is put into 70 after standing levellingoThe drying of C
1h is heated in case, the flexibility stress sensor with sandwich structure is obtained.
Embodiment 4
1）The short wall Flat bottom container of rectangle of a 2*1cm is taken, and the silicon that a diameter 0.8cm thickness is 0.05cm is put at center
Piece；
2）Configuration PDMS solution, it is 10 to take host with curing agent mass ratio:1 is placed in culture dish and is well mixed, dry using vacuum
Dry case vacuumizes 10min, makes the bubbles burst in mixed liquor obtain the bubble-free PDMS solution in surface；
3）Take step 2）Obtained PDMS solution is added to step 1）In in ready container；
4）The container for taking advantage of PDMS and silicon chip is put into 70 after standing levellingo1.5h is heated in the drying box of C；
5）The PDMS film in container is taken out, is removed silicon chip, has just been obtained the reeded PDMS Flexible formwork assemblies of tool；
6）After two narrow sides of groove are with conductive copper adhesive tape extraction electrode, the carbon nanometer that filling silver nano-grain is coated in a groove
Pipe；
7）After colloidal sol is thoroughly dried, PDMS solution, method such as step 2 is configured）, one layer of PDMS is added a cover above groove, is utilized
Vacuum drying chamber vacuumizes 10min, and the container that will be equipped with PDMS Flexible formwork assemblies and silicon chip is put into 70 after standing levellingoC's is dry
1h is heated in dry case, the flexibility stress sensor with sandwich structure is obtained.
Claims (9)
1. a kind of preparation method of the flexibility stress sensor based on electrical-conductive nanometer material, it is characterised in that comprise the steps：
1）A Flat bottom container is taken, and a thin slice is put at Flat bottom container center；
2）Configuration PDMS solution, it is 10 to take host with curing agent mass ratio:1 is placed in culture dish and is well mixed, dry using vacuum
Dry case vacuumizes 10min, makes the bubbles burst in mixed liquor obtain the bubble-free PDMS solution in surface；
3）Take step 2）Obtained PDMS solution is added to step 1）In in ready Flat bottom container, make PDMS solution by thin slice
Cover；
4）The Flat bottom container for filling PDMS and thin slice is put into 70 after standing levellingo1.5h, PDMS solution is heated in the drying box of C
Form PDMS film；
5）The PDMS film in Flat bottom container is taken out, is removed thin slice, has just been obtained the reeded PDMS Flexible formwork assemblies of tool；
6）After two opposite side of PDMS Flexible formwork assembly grooves draw an electrode respectively, conductive nano material is filled in a groove
Material；
7）After PDMS Flexible formwork assemblies after nanometer conductive material to be filled are thoroughly dried, PDMS solution, method such as step 2 is configured）,
One layer of PDMS is dripped in that layer surface of the PDMS film filled with nanometer conductive material, vacuumized using vacuum drying chamber
10min, the container that will be equipped with PDMS Flexible formwork assemblies after standing levelling are put into 70o1h is heated in the drying box of C, laminated film is obtained
Flexibility stress sensor.
2. a kind of preparation method of the flexibility stress sensor based on electrical-conductive nanometer material as claimed in claim 1, its feature
It is, the shape of the Flat bottom container and thin slice all can be adjusted according to application places, its shape can adopt rectangle, circle
Shape, triangle, square, quadrangle, pentagon, five-pointed star, hexagon, hexagon, heptagon, hexagon, octagon, anise
Shape, nonagon, nonagon, decagon, regular decagon, hendecagon, undecagon, dodecagon, dodecagon.
3. a kind of preparation method of the flexibility stress sensor based on electrical-conductive nanometer material as claimed in claim 1, its feature
It is, the Flat bottom container adopts the short wall Flat bottom container of the rectangle of 2*1cm, it is 0.8*0.3* to place a specification at center
The thin slice of 0.05cm.
4. a kind of preparation method of the flexibility stress sensor based on electrical-conductive nanometer material as claimed in claim 1, its feature
It is, the Flat bottom container adopts circular short wall Flat bottom container, a diameter of 2cm；The thin slice is circle, and a diameter of 0.8cm is thick
Spend for 0.05cm.
5. a kind of preparation method of the flexibility stress sensor based on electrical-conductive nanometer material as claimed in claim 1, its feature
It is, the Flat bottom container is the circular short wall Flat bottom container of diameter 2cm, puts the thin of a 0.8*0.3*0.05cm at center
Piece.
6. a kind of preparation method of the flexibility stress sensor based on electrical-conductive nanometer material as claimed in claim 1, its feature
It is, the Flat bottom container adopts the short wall Flat bottom container of the rectangle of 2*1cm, and putting diameter 0.8cm, a thickness at center is
The thin slice of 0.05cm.
7. a kind of preparation method of the flexibility stress sensor based on electrical-conductive nanometer material as claimed in claim 1, its feature
It is, the thin slice adopts silicon chip, sheet glass, lucite piece, plastic sheet.
8. a kind of preparation method of the flexibility stress sensor based on electrical-conductive nanometer material as claimed in claim 1, its feature
Be, the nanometer conductive material using gold, silver, copper, californium, iron, aluminium, the one of which of the various pattern nano materials of carbon or it
The oxide of one of which or two of which or several compounds and mixture.
9. the preparation method of a kind of flexibility stress sensor based on electrical-conductive nanometer material according to claim 1 ~ 8, its
It is characterised by：Step 6）Two electrode structures of middle preparation are symmetric, and the electrode is from the side of sensor base upper groove
Edge is outwards drawn；The electrode is using one or more in silver, copper or ITO.
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