CN109115107A - A kind of preparation method of highly sensitive flexible strain transducer - Google Patents
A kind of preparation method of highly sensitive flexible strain transducer Download PDFInfo
- Publication number
- CN109115107A CN109115107A CN201811108190.3A CN201811108190A CN109115107A CN 109115107 A CN109115107 A CN 109115107A CN 201811108190 A CN201811108190 A CN 201811108190A CN 109115107 A CN109115107 A CN 109115107A
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- graphene
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- strain transducer
- preparation
- flexible substrate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
- G01B7/20—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance formed by printed-circuit technique
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
- G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The invention discloses a kind of preparation methods of highly sensitive flexible strain transducer then to do top electrode its main feature is that graphene strained layer is transferred in PDMS flexible substrate using self-assembly process and be packaged, and the strain transducer is made.The present invention has 300% or more strain compared with prior art, and sensitivity factor maximum, up to 4500, preparation process is simple, it is extensive to the material selectivity that sensor target amount is sensitive, raw material are easy to get, lower production costs, can be widely applied to biomedical wearable electronic device.
Description
Technical field
The present invention relates to flexible sensor technical field, specifically a kind of Gao Ling based on orderly monolayer technology
The preparation method of sensitivity flexibility strain transducer.
Background technique
Electronic sensor is generally based on the design of solid metal foil gauge, and portability, wearable property are poor, and frangible
Traditional sensors are compared, and flexible sensor is because of its good elasticity, draftability and can continue the advantages that detecting, and become a new generation
One of sensor important development direction.Currently, wearable electronic device has been widely used in biomedicine, physical activity
The various aspects closely related to human life such as detection and electronic skin.Patent (CN107726971) discloses a kind of strain
Sensor, the largest deformation amount for the sensor produced using carbon Nanowire can achieve 400%, but its resistance change is only
There are 60 times of initial resistance, sensitivity is unsatisfactory.It is stretchable soft that patent (CN107655398A) discloses a kind of high sensitivity
Property strain transducer and preparation method thereof, which can achieve 3390.06, but it is maximum
Strain only 65%.
The flexible sensor range of strain of the prior art is small, and sensitivity is poor, as can be seen that flexible sensing from above-mentioned patent
Device is difficult to combine highly sensitive and Large strain, greatly limits the further development of flexible sensor and answering in practice
With.
Summary of the invention
The purpose of the present invention is a kind of highly sensitive flexible strain transducers for providing in view of the deficiencies of the prior art
Image conversion graphene strained layer is transferred on dimethyl silicone polymer (PDMS) substrate by preparation method using self-assembly process,
Using the single-layer graphene film of electricity and heat excellent in conjunction with the PDMS of high optical transparency, preparation is strained up to 90%
And sensitivity factor maximum is realized 300% or more strain, can be answered extensively up to the 4500 flexible strain transducer of high sensitivity
For in biomedical wearable electronic device, having the advantages that good elasticity, draftability and can continue to detect, preparation
Simple process, quality stability is good, and preparation efficiency and final product quality are high.
Realizing the specific technical solution of the object of the invention is: a kind of preparation method of highly sensitive flexible strain transducer,
Its main feature is that graphene strained layer is transferred in dimethyl silicone polymer (PDMS) flexible substrate using self-assembly process, then
Do top electrode to be packaged, the strain transducer be made, specific preparation the following steps are included:
A step: to the cleaning of dimethyl silicone polymer flexible substrate using plasma and hydrophilicity-imparting treatment.
B step: the solution that watersoluble plumbago alkene is mixed with ethyl alcohol by the mass ratio of 1:0.5 ~ 1 is sonicated, takes after centrifugation
Supernatant liquor obtains graphene and sprawls liquid.
Step c: sprawling liquid for the graphene of above-mentioned preparation and be placed on deionized water liquid level, and 20 ~ 40 points are stood after sprawling
Clock forms graphene layer after ethyl alcohol volatilization in deionized water, and the sink that graphene layer is then placed on film analysis instrument is left
In the cunning cane of right two sides, and moved with 10 MNs/m of minutes speed to center, compressed graphite alkene liquid levels layer to two sliding canes
Spacing be 4 ~ 6 centimetres, obtain close graphene solution.
Step d: the laser ablation strained layer shape on Kapton Tape pastes patterned Kapton Tape
It in dimethyl silicone polymer flexible substrate, and is fixed on dipping plated film head, with the speed of 2 ~ 5 mm/mins upper
State the vertically transfer of lifting progress graphene film in the graphene solution through sliding cane processing.
Step e: the dimethyl silicone polymer flexible substrate for shifting graphene film is heat-treated 1 ~ 3 point at a temperature of 75 DEG C
Clock, then takes Kapton Tape off, and patterned graphene strained layer is made on flexible substrates.
F step: by the both ends of graphene strained layer instillation ag paste electrode and connecting wire respectively, then it is heated solidification
And encapsulate, graphene flexibility strain transducer is made.
The present invention have compared with prior art adaptability to changes is big, high sensitivity, it can be achieved that 300% or more strain, it is sensitive
Factor maximum is spent up to 4500, and preparation process is simple, and quality stability is good, easy to operate, lower production costs, to sensor mesh
The material selectivity of scalar sensitivity is extensive, and raw material are easy to get, it is good elasticity, draftability and can continue detect, can be wide
It is general to be applied to biomedical wearable electronic device.
Detailed description of the invention
Fig. 1 is process flow chart of the invention；
Fig. 2 is the PI glue band schematic diagram of etched features；
Fig. 3 is the substrat structure schematic diagram for pasting PI glue band；
Fig. 4 is surface pressure-curve of areas figure of graphene strained layer；
Fig. 5 is sensor structure schematic diagram；
Fig. 6 is Fig. 4 top view；
Fig. 7 is resistance change rate-strain curve figure of sensor；
Fig. 8 is sensitivity factor-strain curve figure of sensor.
Specific embodiment
Refering to attached drawing 1, below by taking the specific preparation of graphene strain transducer as an example, the present invention is made further detailed
Explanation.
Embodiment 1
A step: the ethyl alcohol for taking 50 milligrams of watersoluble plumbago alkene to be 98% with 50 milliliters of volumetric concentrations is ultrasonically treated 10 minutes after mixing,
Then it is 5000 revs/min of centrifugal treatings for carrying out 15 minutes with revolving speed, takes supernatant liquor, obtained graphene is sprawled liquid and waited for
With.
B step: PDMS substrate 2 is subjected to cleaning and hydrophilicity-imparting treatment with plasma cleaning instrument.
Step c: refering to attached drawing 2, shape needed for etching graphene strained layer 3 on PI glue band 1 using etching laser machining
Shape.
Refering to attached drawing 3, patterned PI glue band 1 is pasted on PDMS substrate 2.
Step d: deionized water is poured into the sink of " Langmuir " film analysis instrument as parfacies, is incited somebody to action using syringe
The graphene of above-mentioned preparation is sprawled liquid and is drop by drop spread on the liquid level of deionized water, stands 40 minutes, complete to ethyl alcohol
Graphene layer is formed after volatilization on the deionization water surface, then by the cunning cane at left and right sides of sink with 10 MNs/m of minutes speed
It spends mobile to center, is compressed to after distance between two sliding canes is 5 centimetres that form close graphene on the deionization water surface molten
Liquid.
Step e: the PDMS substrate 2 for having sticked PI glue band 1 is fixed on dipping plated film head, with the speed of 3 mm/mins
Decline, and minimum reduction point is set as under graphene liquid level about 3 millimeters, and after minimum point stands 4 seconds with 2 millimeters/
Minute speed is promoted, and the PDMS substrate 2 for shifting graphene film is placed on the heating platform of 75 DEG C of temperature, is heated 1 minute
After take PI glue band 1 off, patterned graphene strained layer 3 is made on PDMS substrate 2.
Refering to attached drawing 4, face of the graphene strained layer 3 of above-mentioned preparation in sliding cane compression process, between two sliding canes
Relationship between long-pending and surface pressing can be seen that when area reaches 80 square centimeters, and slope variation reduces, and illustrate graphene
Form close graphene strained layer.
F step: refering to 5 ~ Fig. 6 of attached drawing, 0.5 milliliter of silver paste is instiled respectively in graphene strained layer 3 with syringe
Both ends simultaneously connect copper conductor 5, transfer it on the heating platform of 75 DEG C of temperature, and heat cure obtains silver paste electricity after 2 minutes
Graphene flexibility strain transducer is made in pole 4 after encapsulation.
Refering to attached drawing 7, the graphene flexibility strain transducer of above-mentioned preparation reaches through resistance and strain testing in strain
When 90%, resistance relative variation can achieve maximum value 4300, for strain response well, high sensitivity.
Refering to attached drawing 8, the graphene flexibility strain transducer of above-mentioned preparation is tested through sensitivity factor and strain resistor, spirit
Sensitivity factor maximum is up to 4500, high sensitivity with higher.
Graphene film is transferred in flexible substrate by above-described embodiment by way of self assembly, is produced strain and is reached
90% and sensitivity factor maximum up to 4500 highly sensitive strain transducer.It is above that only the present invention is made further
Bright, not to limit this patent, all is equivalence enforcement of the present invention, is intended to be limited solely by within the scope of the claims of this patent.
Claims (1)
1. a kind of preparation method of highly sensitive flexible strain transducer, it is characterised in that answered graphene using self-assembly process
Change layer is transferred in dimethyl silicone polymer flexible substrate, is then done top electrode and is packaged, and flexibility strain transducer, tool is made
Body preparation the following steps are included:
A step: to the cleaning of dimethyl silicone polymer flexible substrate using plasma and hydrophilicity-imparting treatment；
B step: the solution that watersoluble plumbago alkene is mixed with ethyl alcohol by the mass ratio of 1:0.5 ~ 1 is sonicated, and upper layer is taken after centrifugation
Clear liquid obtains graphene and sprawls liquid；
Step c: sprawling liquid for the graphene of above-mentioned preparation and be placed on deionized water liquid level, stands 20 ~ 40 minutes after sprawling, to
Graphene layer is formed in deionized water after ethyl alcohol volatilization, is then placed on graphene layer at left and right sides of the sink of film analysis instrument
Cunning cane in, and with 10 MNs/m of minutes speed to center mobile, the spacing of compressed graphite alkene liquid levels layer to two sliding canes
It is 4 ~ 6 centimetres, obtains close graphene solution；
Step d: the laser ablation strained layer shape on Kapton Tape pastes patterned Kapton Tape poly- two
It in methylsiloxane flexible substrate, and is fixed on dipping plated film head, with the speed of 2 ~ 5 mm/mins above-mentioned through cunning
Vertically lifting carries out the transfer of graphene film in the graphene solution of cane processing；
Step e: the dimethyl silicone polymer flexible substrate for shifting graphene film is heat-treated 1 ~ 3 minute at a temperature of 75 DEG C,
Then it takes Kapton Tape off, patterned graphene strained layer is made on flexible substrates；
F step: it by the both ends of graphene strained layer instillation ag paste electrode and connecting wire respectively, is then heated solidification and seals
Graphene flexibility strain transducer is made in dress.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811108190.3A CN109115107B (en) | 2018-09-21 | 2018-09-21 | Preparation method of high-sensitivity flexible strain sensor |
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| CN201811108190.3A CN109115107B (en) | 2018-09-21 | 2018-09-21 | Preparation method of high-sensitivity flexible strain sensor |
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| CN109115107B CN109115107B (en) | 2023-08-22 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110455445A (en) * | 2019-07-19 | 2019-11-15 | 南京邮电大学 | Flexibility stress sensor and preparation method thereof |
| CN110500943A (en) * | 2019-08-20 | 2019-11-26 | 华东师范大学 | A kind of patterned flex strain transducer and preparation method |
| CN110542372A (en) * | 2019-08-21 | 2019-12-06 | 华东师范大学 | Preparation method of compressible strain sensor |
| CN110702248A (en) * | 2019-09-17 | 2020-01-17 | 江苏大学 | Thermoelectric sensor based on graphene material and preparation method thereof |
| CN110763132A (en) * | 2019-11-06 | 2020-02-07 | 吉林大学 | Omnidirectional sensing bionic strain sensor and preparation method thereof |
| CN112629399A (en) * | 2020-11-24 | 2021-04-09 | 南京航空航天大学 | Flexible sensing element of polyvinyl chloride ionic gel and preparation method thereof |
| CN113063342A (en) * | 2021-03-22 | 2021-07-02 | 华南理工大学 | Flexible strain sensor based on same conductive material and preparation method thereof |
| CN113551791A (en) * | 2021-07-02 | 2021-10-26 | 中国科学院力学研究所 | Resistance type strain sensor capable of being rapidly prepared and preparation method thereof |
| CN114608638A (en) * | 2022-03-10 | 2022-06-10 | 浙江理工大学 | Packaging method of flexible microelectronic sensor |
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Cited By (13)
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| CN110455445B (en) * | 2019-07-19 | 2021-12-14 | 南京邮电大学 | Flexible stress sensor and preparation method thereof |
| CN110455445A (en) * | 2019-07-19 | 2019-11-15 | 南京邮电大学 | Flexibility stress sensor and preparation method thereof |
| CN110500943A (en) * | 2019-08-20 | 2019-11-26 | 华东师范大学 | A kind of patterned flex strain transducer and preparation method |
| CN110542372A (en) * | 2019-08-21 | 2019-12-06 | 华东师范大学 | Preparation method of compressible strain sensor |
| CN110702248A (en) * | 2019-09-17 | 2020-01-17 | 江苏大学 | Thermoelectric sensor based on graphene material and preparation method thereof |
| CN110702248B (en) * | 2019-09-17 | 2020-12-18 | 江苏大学 | Thermoelectric sensor based on graphene material and preparation method thereof |
| CN110763132A (en) * | 2019-11-06 | 2020-02-07 | 吉林大学 | Omnidirectional sensing bionic strain sensor and preparation method thereof |
| CN110763132B (en) * | 2019-11-06 | 2021-04-27 | 吉林大学 | Omnidirectional sensing bionic strain sensor and preparation method thereof |
| CN112629399A (en) * | 2020-11-24 | 2021-04-09 | 南京航空航天大学 | Flexible sensing element of polyvinyl chloride ionic gel and preparation method thereof |
| CN112629399B (en) * | 2020-11-24 | 2022-04-22 | 南京航空航天大学 | Flexible sensing element of polyvinyl chloride ionic gel and preparation method thereof |
| CN113063342A (en) * | 2021-03-22 | 2021-07-02 | 华南理工大学 | Flexible strain sensor based on same conductive material and preparation method thereof |
| CN113551791A (en) * | 2021-07-02 | 2021-10-26 | 中国科学院力学研究所 | Resistance type strain sensor capable of being rapidly prepared and preparation method thereof |
| CN114608638A (en) * | 2022-03-10 | 2022-06-10 | 浙江理工大学 | Packaging method of flexible microelectronic sensor |
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| CN109115107B (en) | 2023-08-22 |
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