CN112361953A - Preparation method of laser-induced graphene flexible strain-temperature dual-parameter sensor - Google Patents
Preparation method of laser-induced graphene flexible strain-temperature dual-parameter sensor Download PDFInfo
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Abstract
The invention relates to a preparation method of a laser-induced graphene flexible strain-temperature double-parameter sensor. And then uniformly mixing and stirring the PDMS solution according to the proportion of A: B: 10:1, standing for 30 minutes until bubbles completely disappear, coating the PDMS on the prepared LIG, then putting the LIG into a heating box at 85 ℃ for heating for 120 minutes for curing, taking out after curing, melting the hydrosol by using clear water to obtain a flexible material separated from the glass slide, and then uncovering the PDMS to peel the LIG from the PI film. And finally, coating conductive silver adhesive, and bonding a lead to obtain the flexible patterned graphene strain-temperature dual-parameter sensor. The preparation method provided by the invention does not need a complex processing technology, is suitable for large-scale preparation and fine pattern processing, has no requirement on the operating environment, and is simple to operate. Has wide application prospect in the field of wearable devices for medical health.
Description
Technical Field
The invention belongs to the field of sensors, and particularly relates to a high-sensitivity flexible wearable laser-induced graphene flexible strain-temperature dual-parameter sensor and a preparation method thereof.
Background
The sensor is used as a precise device or device, can convert various non-electric quantity signals which are not easy to capture or measure into electric quantity signals which are easy to detect and display, and is an essential part in the application fields of modern industrial production, medical treatment and health, aerospace, wearable and the like. Especially, the flexible wearable sensor has wide application prospect in the fields of artificial intelligence, bioelectronics, medical treatment and human-computer interaction. The flexible wearable sensor with high sensitivity can be used for monitoring physiological parameters of human body such as pulse, respiration and the like, so that the flexible wearable sensor becomes a popular research direction in the field of medical care.
Graphene (Graphene) is a polymer made of carbon atoms in sp2The hybrid tracks form a hexagonal honeycomb lattice two-dimensional carbon nanomaterial. The graphene has excellent optical, electrical and mechanical properties, has important application prospects in the aspects of materials science, micro-nano processing, energy, biomedicine, drug delivery and the like, and is considered to be a revolutionary material in the future.
There are many studies to make graphene strain sensors or flexible temperature strain sensors, for example, patent CN109163653B is a patterned graphene flexible strain sensor, a micro flow channel mold is obtained by using photolithography to prepare a pattern on a rigid substrate, and a flexible stretchable substrate is subjected to patterning modification by using dopamine. Although the method uses the photoetching method, the obtained micro-channel mold is modified by using dopamine, so that the structure and the preparation process of the sensor are still relatively complex, the embodying of the function is easily influenced by the dopamine, and only the strain sensor is obtained, so that the problems of limitation and sensitivity still exist for the application in the biomedical field of the current society. The patent CN111599920A flexible temperature sensor comprises a flexible substrate, an active layer, a dielectric layer and a grid electrode, wherein the active layer is made of composite silk-based carbon nanofiber and Ag nanoparticles, the active layer is small in size and beneficial to temperature sensing of a cell microenvironment, the material has certain cost and a complex manufacturing process, and polyimide selected from the flexible material can only be bent and cannot be stretched and can only measure temperature.
Disclosure of Invention
In order to solve the technical problem, the invention provides a preparation method of a high-sensitivity laser-induced graphene flexible wearable strain-temperature double-parameter sensor. The preparation method provided by the invention has simple steps, is easy to control, and is suitable for processing the refined pattern.
In order to achieve the above object, the present invention provides the following technical solutions:
a preparation method of a laser-induced graphene flexible strain-temperature dual-parameter sensor comprises the following steps:
(1) cutting a Polyimide (PI) film into a rectangular shape with a proper size;
(2) fixing the step (1) on a glass slide through hydrosol to obtain a PI film which is pasted flatly;
(3) utilizing CO to the fixed and flat PI film obtained in the step (2)2Inducing a three-dimensional graphene (LIG) pattern by using laser, wherein the three-dimensional graphene pattern comprises connecting electrodes at two ends and conductive graphene connected with the two electrodes, and the conductive graphene plays a role in connecting the two electrodes to form a conductive path;
(4) mixing and stirring the PDMS solution uniformly according to the proportion of A: B (10:1) - (13:1), standing for 15-30 minutes until bubbles disappear completely to obtain a clear and transparent PDMS solution;
(5) coating the transparent PDMS solution obtained in the step (4) on the LIG prepared in the step (3), and then putting the LIG into a heating box to be heated and cured at the temperature of 80-90 ℃ for 100-plus 150 minutes to obtain a completely cured PDMS-graphene-PI-hydrosol-glass slide structure;
(6) putting the structure obtained in the step (5) into clear water, and obtaining a PDMS-graphene-PI flexible structure separated from the glass slide after the hydrosol is melted;
(7) uncovering the flexible material PDMS in the step (6), and peeling the LIG from the PI film to obtain a stretchable and twistable PDMS-graphene flexible structure;
(8) and (4) completely coating the surface of the connecting electrode with conductive silver adhesive on the connecting electrode in the structure in the step (7) to prepare a silver coating, and bonding a lead to obtain the flexible graphene strain-temperature double-parameter sensor.
The laser is CO with the wavelength of 10.6um2Laser supplied, CO2The laser power of the laser is 6-9W, and the laser scanning speed is 317-444.5 mm/s.
The sensor obtained by the method can detect the micro strain with the tensile strain range of 0.025-0.050 percent, and can detect the temperature change of 0.3 ℃ at the lowest; the sensor can be used for detecting human physiological signals, including pulse, carotid artery, facial micromotion and the like.
A laser-induced graphene flexible strain-temperature double-parameter sensor comprises a flexible stretchable substrate and a graphene conducting layer fixed on the flexible stretchable substrate through laser induction, wherein the graphene conducting layer comprises graphene in the middle and connecting electrodes located at two ends of the graphene; the connecting electrode is provided with a conductive coating and is connected and fixed with a lead; the method is characterized in that: the straight line where the conductive graphene is located is a sensor body; the width of the conductive graphene is 1.29mm +/-1 mm, and the length of the conductive graphene is 17.62mm +/-5 mm; the two electrodes are connected and the single-line graphene forms a bone-shaped structure; the resistance of the sensor increases with increasing tensile strain, while the voltage of the sensor increases with increasing temperature difference across the sensor.
The length and width of the conductive graphene are set by considering factors such as miniaturization, aesthetic degree, initial resistance value and response quantity of the sensor, and the parameters are determined to be 1.29mm +/-1 mm in width and 17.62mm +/-5 mm in length.
The polyimide film of the step (1) is a preferable film of kapton corporation in the United states.
The connecting electrode in the step (3) can be in any pattern of square, rectangle, circle or other irregular shapes.
And (3) after the wire is bonded in the step (8), coating an encapsulation layer on the surfaces of the conductive graphene and the conductive silver adhesive, and leading the wire out of the encapsulation layer.
Wherein, the used glass slide, hydrosol, conductive copper foil, conductive silver adhesive, lead, PDMS and Polyimide (PI) film with the thickness of 75mm are also of conventional use types and can be purchased in the market.
The flexible strain-temperature sensor has high sensitivity, adopts flexible materials, has good wearability, can be used for monitoring physiological parameters of human bodies, such as pulse, respiration and the like, and can be applied to human physiological signal detection.
Compared with the existing sensor, the sensor has the beneficial effects that:
according to the invention, the laser-induced graphene is transferred to the flexible stretchable substrate, the sensor has a simple structure, complex chemical process treatment is not required, the preparation process is green, environment-friendly and pollution-free, the operation is simple, and the manufacturing cost is low. The sensor tensile strain can reach 49.8% at the maximum (tensile strain refers to (length after stretching-original length)/original length). The performance is good in the stretching range of 0-35%, the structural stability is good, stretching repeatability experiments show that the good performance can be still kept after 18000 times of stretching release cycle periods, and the stretching and recovery curves are basically coincident. The porous structure of the graphene sensor obtained under the given parameter conditions determines that the strain response of the sensor is large, the sensitivity is high, the reaction is fast, the contact distance between the graphene is changed due to the change of the form, and therefore the resistance change rate becomes an increasing trend along with the gradual increase of the tensile deformation, and the graphene sensor has excellent electrochemical characteristics. Meanwhile, the invention has high sensitivity and response, adopts flexible materials, has better wearability and has wide application prospect in the aspect of monitoring human physiological signals.
The invention provides a preparation method of a patterned graphene flexible strain-temperature double-parameter sensor. And then uniformly mixing and stirring the PDMS solution according to the proportion of A: B: 10:1, standing for 30 minutes until bubbles completely disappear, coating the PDMS on the prepared LIG, then putting the LIG into a heating box at 85 ℃ for heating for 120 minutes for curing, taking out after curing, melting the hydrosol by using clear water to obtain a flexible material separated from the glass slide, and then uncovering the PDMS to peel the LIG from the PI film. And finally, coating conductive silver adhesive, and bonding a lead to obtain the flexible patterned graphene strain-temperature dual-parameter sensor. The preparation method provided by the invention does not need a complex processing technology, is suitable for mass preparation and fine pattern processing, has no requirement on the operating environment, and is simple to operate. Has wide prospect in the field of medical health wearable devices. In the preparation method, the curing temperature of the flexible stretchable substrate is too low to be completely cured, and the properties of PDMS are changed when the curing temperature is too high; the heating time is determined according to the heating temperature, the heating time is less than 100 minutes, the curing cannot be completely carried out, the heating time is longer than 150 minutes, the PDMS property can be changed, the stretching effect is influenced, and energy is wasted.
The sensor provided by the invention is simple in preparation method, overcomes the defect that the tensile property of the sensor is affected due to the fact that the PI is attached to the substrate due to the use of the heat-release live adhesive tape, is completely peeled off by directly using transfer printing, is easy to transfer printing, and ensures the tensile property of the sensor. If the peel is incomplete, the sensor will break significantly, the initial resistance will be quite large, and the minimum strain to which it responds will also be greatly affected.
According to the invention, specific graphene laser induction parameters are set, and graphene with different graphitization degrees can be obtained in different laser parameter intervals, and the application creatively finds that the graphene sensor obtained by using a grating method to perform laser induction can measure tensile strain and temperature change (can also detect pressure) in an interval of 317-444.5mm/s with the power of 6-9W, and has high sensitivity.
Drawings
FIG. 1 is a schematic structural diagram of a high-sensitivity flexible wearable strain-temperature dual-parameter sensor according to an embodiment of the invention;
FIG. 2 is a strain-extensional diagram of the high-sensitivity flexible wearable strain-temperature sensor of the present invention;
FIG. 3 is an infrared temperature profile of a high-sensitivity flexible wearable strain-temperature sensor in accordance with one embodiment of the present invention;
FIG. 4 is a schematic diagram of a temperature sensing structure of a high-sensitivity flexible wearable strain-temperature sensor in accordance with an embodiment of the present invention;
FIG. 5 is an I-V graph of different tensile strains of a high sensitivity flexible wearable strain-temperature sensor in accordance with an embodiment of the present invention;
FIG. 6 is a graph of the rate of change of resistance for different tensile strains for a high sensitivity flexible wearable strain-temperature sensor in accordance with one embodiment of the present invention;
FIG. 7 is an I-V graph of different temperature differences for a high-sensitivity flexible wearable strain-temperature sensor in accordance with one embodiment of the present invention;
FIG. 8 is a graph of voltage change for different temperature differences for a high-sensitivity flexible wearable strain-temperature sensor in accordance with one embodiment of the present invention;
fig. 9 is a high-sensitivity flexible wearable strain-temperature sensor pulse mapping diagram of one embodiment of the present invention.
In the figure:
1. flexible stretchable substrate 2, graphene conductive layer 3 and conductive copper foil
4. Wire 5, peltier (heating) 6, peltier (cooling)
Detailed Description
The present invention is further illustrated by the following specific examples, which are provided for the purpose of illustration only and are not intended to limit the scope of the present invention.
Example 1
A schematic structural diagram of a laser-induced graphene flexible strain-temperature two-parameter sensor is shown in fig. 1, and the sensor comprises a flexible stretchable substrate 1, a graphene conductive layer 2, a conductive copper foil 3 and a lead 4. The flexible stretchable substrate 1 is arranged at the bottommost part of the sensor and made of flexible stretchable material PDMS, the graphene conducting layer 2 is tightly attached to the upper surface of the flexible stretchable substrate and can be stretched and bent with the flexible stretchable substrate 1 at the same time, the width of the graphene conducting layer is 1.29mm, the length of the graphene conducting layer is 17.62mm, and two ends of the graphene conducting layer are provided with graphene electrodes for connecting with external equipment; the conductive copper foil 3 is connected with the graphene electrodes at two ends of the graphene conductive layer through conductive silver adhesive, the conductive copper foil is pasted after the conductive silver adhesive is uniformly coated, the conductive copper foil is placed on a heating table at 80 ℃ to be heated for 40 minutes, and the conductive copper foil 3 is connected with the conducting wire 4 through soldering tin after the conductive copper foil is completely cured. The dimensions of the conductive copper foil 3 are: the length is 3.9mm, and the width is 2.6mm, and the size slightly is greater than the graphite alkene electrode part at graphite alkene conducting layer both ends, can cover corresponding graphite alkene electrode completely.
The flexible stretchable substrate 1 is a commercial flexible stretchable substrate PDMS with high resistivity, and the flexible stretchable substrate can be bent, stretched and can be tightly attached to the surface of the LIG. The graphene conductive layer 2 is a three-dimensional porous graphene pattern generated by inducing a PI film by high-energy laser, the PI film is a good carbon precursor and low in cost, graphene with a three-dimensional structure can be generated under the induction of the laser, the conductive copper foil 3 is prepared by coating conductive silver colloid, and the laser is prepared by CO with the wavelength of 10.6 mu m2A laser is provided.
The preparation method of the laser-induced graphene flexible strain-temperature double-parameter sensor comprises the following steps:
(1) cutting a Polyimide (PI) film into a rectangular shape with a proper size, wherein the length is 76mm, the width is 26mm, and the size of the Polyimide (PI) film is the same as that of a used glass slide (other flat carriers can be used, and the size can be randomly changed);
(2) fixing the PI film obtained in the step (1) on a glass slide through hydrosols (such as common PVA (polyvinyl alcohol), PVP (polyvinylpyrrolidone), CMC (sodium carboxymethylcellulose) and low-modulus sodium silicate water-soluble glue which can be dissolved in water and can rapidly lose the bonding performance) to obtain a flat-adhered PI film;
(3) utilizing CO to the fixed and flat PI film obtained in the step (2)2Laser induced three-dimensional graphene (LIG) pattern, which is in the shape of a bone, as shown in fig. 2 (a), the three-dimensional graphene pattern includes connection electrodes at both ends and a conductive stone between the two connection electrodesThe graphene integrally forms a graphene conducting layer, the conductive graphene plays a role in connecting two electrodes to form a conducting path, the width of the middle conductive graphene is 1.29mm, and the length of the middle conductive graphene is 17.62 mm;
(4) mixing and stirring the PDMS solution uniformly according to the proportion of A: B: 10:1, standing for 30 minutes until bubbles disappear completely to obtain a clear and transparent PDMS solution;
(5) coating the transparent PDMS solution obtained in the step (4) on the LIG prepared in the step (3), and then putting the LIG into a heating box to be heated and cured for 120 minutes at 85 ℃ to obtain a completely cured PDMS-graphene-PI-hydrosol-glass slide structure;
(6) melting the hydrosol of the structure obtained in the step (5) by using clear water to obtain a PDMS-graphene-PI flexible structure separated from the glass slide;
(7) uncovering the flexible material PDMS in the step (6), and further peeling the LIG from the PI film to obtain a stretchable and twistable PDMS-graphene flexible structure, as shown in FIG. 1;
(8) and (4) completely coating the surface of the connecting electrode of the PDMS-graphene flexible structure in the step (7) with conductive silver paste to prepare a silver coating, bonding a conductive copper foil, and connecting a lead to obtain the flexible graphene strain-temperature double-parameter sensor.
Fig. 2 shows a strain-tension working principle diagram of a high-sensitivity flexible wearable strain-temperature sensor, where an initial resistance of the sensor is a resistance corresponding to a tension rate of 0% shown in fig. 5 (fig. 5 is an I-V curve of the sensor, where an inverse of a slope is a resistance, and when a tension rate of the sensor is 0, a resistance corresponding to a straight line with a maximum slope is the initial resistance), and when the sensor is subjected to a tensile strain, as shown in fig. 2, since a large number of pores exist in a graphene conductive layer, the conductive layer is deformed after a certain tensile strain is applied, so that a surface area of the graphene conductive layer is increased, the pores are enlarged, and thus a resistance of the conductive layer is enlarged, so that a total resistance of the sensor is increased, and as shown in fig. 5, the larger the tensile deformation is.
Fig. 5 is an I-V curve of a strain-temperature two-parameter sensor according to an embodiment of the present invention under different tensile strains, and it can be seen that the sensor according to the present invention has excellent ohmic characteristics. Fig. 5 is a current-voltage curve diagram of the sensor in the range of 0-35% tensile strain, and it can be seen from the graph that the resistance of the sensor of the present invention increases with the increase of tensile strain and the resistance changes obviously under small tensile strain, so the graphene strain-temperature two-parameter sensor of the present invention has the capability of detecting micro tensile strain, can detect micro strain of 0.025-0.050%, and can be applied to the field of detecting human physiological signals such as pulse, carotid artery and facial micro motion.
Fig. 3 is an infrared temperature distribution diagram of a laser-induced graphene flexible strain-temperature two-parameter sensor according to an embodiment of the present invention, in which it can be seen that the sensor shows a trend of varying with temperature due to different temperatures at two ends of the given sensor. During temperature testing, the temperature testing is realized through two peltier parts, as shown in fig. 4, one peltier part is used for heating, the other peltier part is used for refrigerating, the left side is used for heating the peltier part 5, the right side is used for refrigerating the peltier part 6, and the peltier parts are symmetrically fixed at the bottom of the flexible stretchable substrate of the sensor and are close to the left end and the right end of the graphene conducting layer respectively. The temperature difference of the sensor is expressed as the temperature difference between two peltier elements. The corresponding change rule of the detection voltage is that the larger the temperature difference is, the larger the response quantity is, and the temperature change of 0.3 ℃ can be detected at the lowest.
Fig. 7 is an I-V curve diagram of the laser-induced graphene flexible strain-temperature two-parameter sensor under different temperature differences, and it can be seen that the sensor of the invention has excellent ohmic characteristics in the aspect of detecting temperature. FIG. 7 is a current-voltage curve diagram of the sensor under the temperature difference of 0 deg.C, 3 deg.C, 6 deg.C, 9 deg.C and 14 deg.C, and it can be seen that the influence of the resistance of the sensor of the present invention along with the temperature change is small, and the temperature change can be detected by the change of the voltage, the present invention relates to the ability of the sensor to detect the small temperature difference, and the minimum temperature difference can be as low as 0.3 deg.C through experimental detection. Can be applied to the detection of the epidermis temperature of human physiological signals. The change in resistance is hardly affected by the change in temperature, and the temperature change can be detected by the amount of change in voltage.
The sensor has the advantages that the sensor has flexible and stretchable performance, large stretching strain, high sensitivity and large response quantity after being transferred to the PDMS, and the PDMS is a colloidal transparent film, has attractive appearance, is attached to the skin of a human body and does not have constraint feeling. The change of the form of the sensing layer can change the contact area between the sensing graphene conductive layers, and finally the change is expressed as the change of the resistance of the sensor, so that the sensor has excellent electrochemical characteristics. The sensor has different resistance change rates under different tensile deformation and different voltage changes under different temperature differences.
Example 2
A laser-induced graphene flexible strain-temperature double-parameter sensor comprises a flexible stretchable substrate PDMS, a graphene conducting layer, a conductive copper foil and a lead. The flexible stretchable substrate is arranged at the bottommost part of the sensor, the flexible stretchable substrate is arranged on the flexible stretchable substrate, and the graphene conducting layer is arranged on the flexible stretchable substrate and is tightly attached to the flexible stretchable substrate.
The graphene conducting layer and the flexible stretchable substrate are stretched and bent simultaneously, the width of the conducting graphene is 1.29mm, the length of the conducting graphene is 17.62mm, and the two ends of the conducting graphene are provided with graphene electrodes for connecting with external equipment.
The copper foil is connected with electrodes at two ends of the graphene through conductive silver adhesive, wherein the conductive silver adhesive is uniformly coated and then is attached with the conductive copper foil, the conductive copper foil is placed on a heating table at 80 ℃ for heating for 40 minutes, and after the conductive copper foil is completely cured, the conductive copper foil is connected with the conductive wire through soldering tin. The length of the copper foil is 3.9mm, the width of the copper foil is 2.6mm, and the size of the copper foil is slightly larger than that of the two end electrodes of the graphene conducting layer.
CO used in this example2The maximum laser power of the laser is 30W, and the maximum scanning speed is 1270 mm/s. This example set CO inducing graphene2The laser power is set to be 23% of the maximum laser power, the scanning speed is set to be 28% of the maximum scanning speed, laser induction is carried out by adopting a grating method, and the graphene strain-temperature sensor with good performance can be obtained under the laser power and the scanning speed.
The sensor has high response amount and fast response speed when different tensile strains are applied to the sensor, the maximum tensile strain of the sensor can reach 48.9 percent, and the minimum response tensile strain is reduced to 0.01 percent.
In the embodiment, when the laser power is 20-30% and the scanning speed is 25-35% (in the present application, only the percentage of the maximum power or the maximum speed is taken), the graphene with a good carbonized surface can be obtained, and the strain response is high. At a tensile strain of 5%, the response was about 180%; at 10% tensile strain, the response is about 750%; at a tensile strain of 15%, the response was about 1200%; at 20% tensile strain, the response was about 1600%. The response time was short, with a response time of 0.25s at 2% stretch.
Example 3
The laser-induced graphene flexible strain-temperature dual-parameter sensor has different resistance change rates under different stretching rates as shown in figure 6, the sensor responds to the resistance change rates under the stretching rates of 5%, 10%, 15% and 20%, stretching and releasing are repeated for 7 times under each stretching rate, the stretching resistivity is increased, the releasing can be basically and completely recovered, and multiple experimental performances are still good. At a 5% elongation, the sensor has a 180% response to the rate of change of the strain resistance; at a stretch rate of 10%, the sensor has a strain resistance rate of change response of 750%; at a stretch rate of 15%, the sensor has a strain rate response of 1200% (rate of change of resistance on ordinate: resistance after stretching-initial resistance)/initial resistance: 100%); at 20% elongation, the sensor has a strain rate of change response of 1600%.
Example 4
The laser-induced graphene flexible strain-temperature dual-parameter sensor has different voltage changes for different temperature differences as shown in fig. 8, and the sensor respectively responds to the voltage changes at 3 ℃, 6 ℃, 9 ℃ and 14 ℃, and the room temperature is 25 ℃. It can be seen from the figure that the larger the temperature difference, the larger the voltage response, and the longer the required response time, since the peltier heating element and the sensor absorb and release heat in a certain process.
Example 5
A laser-induced graphene flexible strain-temperature two-parameter sensor is tightly attached to the wrist pulse position, can detect tiny pulse movement, and is shown in an empirical diagram of fig. 9 (with a single pulse enlarged diagram). In order to demonstrate the fine strain detection capability of the sensor, the sensor was applied to human wrist pulse measurement. As shown in fig. 9(a), the corresponding resistance response within 21 seconds is recorded, the arterial pulse rate calculated according to two continuous systolic peaks is about 66 times per minute, the interval time is 0.91 seconds, the pulse rate conforms to the human pulse law, and the test is accurate. The 13 th pulse cycle was enlarged to obtain an enlarged view of fig. 9(b), and the presence of the tapping wave (p-wave) and the diastolic wave (d-wave) was observed. These are important clinical indicators for the diagnosis of cardiovascular disease and arteriosclerosis. It can be observed from the figure that the sensor can well detect the micro-motion of the human body. The sensor can also detect other human skin surface movements, such as finger bending, hand movement, blinking, smiling, micro expression, swallowing, and carotid arteries.
Example 6
The flexible stretchable substrate of the strain-temperature two-parameter sensor of the embodiment is made of Ecoflex, the solution ratio of the Ecoflex is a: B ═ 1:1, the Ecoflex is softer and has better stretching performance, but the flexible stretchable substrate is not easy to peel off as PDMS in the transfer peeling process. The resistance of the sensor increases with increasing tensile strain, while the voltage of the sensor increases with increasing temperature difference across the sensor. The temperature and strain variation trend of the object to be measured can be determined by continuously monitoring the variation trend of the resistance and the voltage of the sensor during use.
Comparative example 1: the laser power is 10-20%, the scanning speed is 10-25%, graphene with a good carbonized surface can be obtained, and the strain response amount is low. At a tensile strain of 5%, the response was about 30%; at 10% tensile strain, the response is about 95%; at a tensile strain of 15%, the response was about 140%; at a tensile strain of 20%, the response was about 210%. The response time was long, with a response time of 1.5s at 2% stretch.
Comparative example 2: the laser power is 40-100%, the scanning speed is 35-100%, and the laser power is too high, so that the graphitization is excessive, the surface is not flat, and the strain response is low. At a tensile strain of 5%, the response was about 15%; at 10% tensile strain, the response was about 35%; at a tensile strain of 15%, the response was about 70%; at a tensile strain of 20%, the response was about 130%. The response time was longer, with a response time of 1s at 2% stretch.
Although the embodiments of the present invention have been described in detail, the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All equivalent changes and modifications made within the scope of the present invention shall fall within the scope of the present invention.
Nothing in this specification is said to apply to the prior art.
Claims (8)
1. A preparation method of a laser-induced graphene flexible strain-temperature dual-parameter sensor comprises the following steps:
(1) cutting a Polyimide (PI) film into a rectangular shape with a proper size;
(2) fixing the step (1) on a glass slide through hydrosol to obtain a PI film which is pasted flatly;
(3) utilizing CO to the fixed and flat PI film obtained in the step (2)2Inducing a three-dimensional graphene (LIG) pattern by using laser, wherein the three-dimensional graphene pattern comprises connecting electrodes at two ends and conductive graphene connected with the two electrodes, and the conductive graphene plays a role in connecting the two electrodes to form a conductive path;
(4) mixing and stirring the PDMS solution uniformly according to the proportion of A: B (10:1) - (13:1), standing for 15-30 minutes until bubbles disappear completely to obtain a clear and transparent PDMS solution;
(5) coating the transparent PDMS solution obtained in the step (4) on the LIG prepared in the step (3), and then putting the LIG into a heating box to be heated and cured at the temperature of 80-90 ℃ for 100-plus 150 minutes to obtain a completely cured PDMS-graphene-PI-hydrosol-glass slide structure;
(6) putting the structure obtained in the step (5) into clear water, and obtaining a PDMS-graphene-PI flexible structure separated from the glass slide after the hydrosol is melted;
(7) uncovering the flexible material PDMS in the step (6), and peeling the LIG from the PI film to obtain a stretchable and twistable PDMS-graphene flexible structure;
(8) and (4) completely coating the surface of the connecting electrode with conductive silver adhesive on the connecting electrode in the structure in the step (7) to prepare a silver coating, and bonding a lead to obtain the flexible graphene strain-temperature double-parameter sensor.
2. The method of claim 1, wherein: and (3) the Young modulus of the fully cured PDMS flexible substrate obtained in the step (5) is 1 MPa-10 MPa.
3. The production method according to claim 1 or 2, characterized in that: and uniformly mixing the PDMS solution A and B in a ratio of 10:1, and heating and curing the mixture for 120 minutes in a heating box at 85 ℃ to obtain a flexible and stretchable substrate which is completely cured on the LIG, wherein the thickness of the film is 0.3 mm.
4. The method of claim 1, wherein the laser is CO having a wavelength of 10.6um2Laser supplied, CO2The laser power of the laser is 6-9W, the laser scanning speed is 317-444.5mm/s, and the laser is induced by a grating method.
5. The method of claim 1, wherein the sensor is capable of detecting a slight strain in the range of 0.025-0.050% in tension, and a temperature change of 0.3 ℃ at the lowest; the sensor can be applied to human body physiological signal detection, including pulse, carotid artery, facial micro-motion and the like.
6. A laser-induced graphene flexible strain-temperature double-parameter sensor comprises a flexible stretchable substrate and a graphene conducting layer fixed on the flexible stretchable substrate through laser induction, wherein the graphene conducting layer comprises graphene in the middle and connecting electrodes located at two ends of the graphene; the connecting electrode is provided with a conductive coating and is connected and fixed with a lead; the method is characterized in that: the straight line where the conductive graphene is located is a sensor body; the width of the conductive graphene is 1.29mm +/-1 mm, and the length of the conductive graphene is 17.62mm +/-5 mm; the two electrodes are connected and the single-line graphene forms a bone-shaped structure; the resistance of the sensor increases with increasing tensile strain and the voltage of the sensor increases with increasing temperature difference across the sensor.
7. The sensor of claim 6, wherein: the connecting electrodes are in a square, rectangular, circular or other irregular random pattern.
8. The sensor of claim 6, wherein: the flexible stretchable substrate is a PDMS substrate or an Ecoflex substrate.
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