CN107101754A - Pressure sensor with porous graphene foaming structure and preparation method thereof - Google Patents
Pressure sensor with porous graphene foaming structure and preparation method thereof Download PDFInfo
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- CN107101754A CN107101754A CN201710158133.5A CN201710158133A CN107101754A CN 107101754 A CN107101754 A CN 107101754A CN 201710158133 A CN201710158133 A CN 201710158133A CN 107101754 A CN107101754 A CN 107101754A
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- porous graphene
- foaming structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
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- Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
Abstract
The present invention proposes a kind of pressure sensor with porous graphene foaming structure, including electrode, porous graphene foaming structure, with connection of the silver paste as the porous graphene foaming structure and electrode, to increase electric conductivity, the electrode is one kind in aluminum strip, filamentary silver, copper sheet, and electrode is bonded in the upper and lower surface of the porous graphene foaming structure by silver paste.The present invention also proposes the preparation method of the pressure sensor.Compared with prior art, the pressure sensor that the present invention is provided has cost low, and sensitivity is high, and the features such as measurement range is big is prepared using flexible material, available for new wearable device.The pressure sensor manufacture craft is simple, it is easy to industrialization, with high market value and industrialization potential.
Description
Technical field
The invention belongs to sensor field, and in particular to a kind of sensor gathered for pressure signal.
Background technology
In recent years, as electronic information technology, material technology are continued to develop, intelligent wearable device it is rapidly growing and
Great raising has been arrived, while life is greatly convenient for people to, also new field has been opened for the development of information technology.It can wear
Wear developing rapidly for equipment and huge demand is generated to novel flexible sensor particularly pliable pressure sensor.But, mesh
The pressure sensor of preceding presence is many using silicon as substrate, is made based on conventional microelectronic technique, it is impossible to applied to wearable device.
Such as patent CN105784254A discloses a kind of pliable pressure sensor and touch-screen.The pliable pressure sensor includes medium
Layer and the first electrode layer above the dielectric layer and the second electrode lay below the dielectric layer, described first
Electrode layer and the second electrode lay are simultaneously metal grill transparent electrode layer or metal nanometer line transparent electrode layer.It is this kind of to be based on
The pliable pressure sensor generally existing sensitivity of nanometer new material technology is low, and the problems such as measurable range is small is upper in application
Receive certain limitation.The problems such as also there is material construction costliness, complex process in the pressure sensor based on new material, in city
Field meets with many bottlenecks on promoting.
Graphene is the two-dimentional layer structure material being stripped out from graphite material, and thickness is most thin can be reached only
One layer of atomic thickness, thus with the features such as light, thin, intensity is big, pliability is good, it is not easy to damaged, or even can also make can
The flexible screen rolled.It also receives the keen anticipation of people in the application of art of pressure sensors.
The content of the invention
The weak point existed for this area, has porous graphene foaming structure the purpose of the present invention is to propose to one kind
Pressure sensing.
It is another object of the present invention to propose the pressure sensing preparation method with porous graphene foaming structure.
The technical scheme for realizing above-mentioned purpose of the present invention is：
A kind of pressure sensor with porous graphene foaming structure, including electrode, porous graphene foaming structure, institute
The profile for stating porous graphene foaming structure is sheet, and top and bottom scribble silver paste, and the electrode is in aluminum strip, filamentary silver, copper sheet
One kind, electrode is bonded in the upper and lower surface of the porous graphene foaming structure by silver paste.The porous stone is used as with silver paste
The connection of black alkene foaming structure and electrode, to increase electric conductivity.
The profile of the porous graphene foaming structure can be rectangular sheet, disk, triangle, different in nature piece (such as petal
Shape) in one kind.
A kind of preparation method of the pressure sensor with porous graphene foaming structure, including step：
(1) sugar is placed in culture dish, the height of wherein culture dish is slightly above sugar；
(2) dimethyl silicone polymer is poured slowly into sugar, being placed in baking oven solidifies it；
(3) cakey dimethyl silicone polymer is placed among boiling water, melts sugar cube therein, form porous poly- two
Methylsiloxane structural；
(4) graphene oxide solution is poured into porous polydimethylsiloxane structural, treats that the moisture in solution steams naturally
Baking oven is put into after hair, makes its high temperature reduction, porous graphene foaming structure is formed；
(5) silver paste is coated with for porous graphene foaming structure upper and lower surface, is bonded with aluminum strip electrode, is then packaged.
Wherein, the sugar is the loaf sugar being pressed into granulated sugar particle, and it is shaped as one in square, cylinder, prism
Kind.Sugar cube can easily be cut with a knife with sugar cube purchased in market, purchased in market is segmented into cylindrical, prismatic (such as triangular prism), so as to be made
The sensor of the porous graphene foaming structure of the other shapes such as disc, triangle.
Dimethyl silicone polymer is made up of polydimethylsiloxane liquid and curing agent, usually separated.Will when using
Both in mass ratio 10：After 1 is well mixed, you can hot setting.Wherein, in step (2), by polydimethylsiloxane liquid and
Curing agent in mass ratio 10：1 pours into culture dish, and being placed in after stirring in 60~70 degree of baking ovens solidifies it.
There is hole between the sugared particle of sugar, dimethyl silicone polymer is poured slowly into, then dimethyl silicone polymer can be with
Sugar is penetrated into, volume and sugar are essentially identical after solidification.
Preferably, in step (4), the concentration of the graphene oxide solution is 2~5mg/mL, graphene oxide solution
The volume for the porous polydimethylsiloxane structural that volume is formed with step (3) is 1~1.5：1.
Wherein, in step (4), the temperature of the high temperature reduction is 180~280 degree, and the recovery time is 1~3 hour.
Compared with prior art, the present invention has the following advantages that and effect：
In pressure sensor proposed by the present invention, porous graphene foaming structure has bulk loose structure, has simultaneously
There is certain electric conductivity.When there is pressure to act on the pressure sensor, its loose structure can be compacted, the connection shape of graphene
Condition changes, while its resistance will change, then just pressure signal can be converted into electric signal.
The novel pressure sensor low in raw material price, and with characteristics such as nontoxic pollution-frees.Its preparation technology letter simultaneously
It is single, it is adapted to batch production, with high market value.
Compared with prior art, the pressure sensor that the present invention is provided has cost low, and sensitivity is high, and measurement range is big etc.
Feature, while being prepared using flexible material, available for new wearable device.The pressure sensor manufacture craft is simple, it is easy to
Industrialization, with high market value and industrialization potential.
Brief description of the drawings
Fig. 1 is basic structure schematic diagram of the invention；
Fig. 2 is preparation method flow chart of the present invention；
Fig. 3 is pressure characteristic of the invention.
Embodiment
Now illustrate the present invention with following examples, but be not limited to the scope of the present invention.The hand used in embodiment
Section, unless otherwise instructed, using the conventional means in this area.
Embodiment 1.
The basic structure schematic diagram of novel pressure sensor that Fig. 1 provides for the present invention, wherein sensor include electrode, many
Hole grapheme foam structure, with connection of the silver paste as the porous graphene foaming structure and electrode, to increase electric conductivity, institute
Electrode is stated for aluminum strip, electrode is bonded in the upper and lower surface of the porous graphene foaming structure by silver paste.Electrode connecting test
Circuit.Porous graphene foaming structure is made up of the graphene oxide of porous dimethyl silicone polymer and reduction.
Because porous graphene foaming structure has more cavernous structure, the pressure sensor is acted on when there is pressure
When, the structure will be extruded, wherein the connection status of the graphene oxide reduced will change, its resistance also changes,
So that pressure signal is converted to electric signal.Electrode is made up of aluminum strip, and in the contact of aluminum strip and porous graphene foaming structure
Smear silver paste to increase electric conductivity in place.Test circuit is added on electrode, just sensor can be tested.
Fig. 2 is pressure sensor preparation method flow chart.
First, sugar cube (commercially available, size is about 2 × 2 × 1cm) is placed in culture dish, the height of wherein culture dish is slightly higher
In sugar cube.
Then by polydimethylsiloxane liquid and curing agent in mass ratio 10：After 1 mixing, it is poured slowly into culture dish
In sugar cube, dimethyl silicone polymer is filled in sugar cube, afterwards hot setting, then boiling water melts sugar cube, and culture dish is put
It is solidified in 65 degree of baking ovens.After after dimethyl silicone polymer solidification, cakey dimethyl silicone polymer is placed on boiling water
It is central, melt sugar cube therein, form porous dimethyl silicone polymer, size is about 2*2*1cm.
Pouring into graphene oxide solution in porous polydimethylsiloxane structural afterwards, (graphene oxide solution is commercially available
Solution, concentration is 2mg/mL, and volume is 5mL), carry out high temperature reduction, shape after being put into baking oven after the moisture natural evaporation in solution
Into porous graphene foaming structure.Aluminum strip finally is added as electrode for porous graphene foaming structure, is then packaged, one
Individual novel pressure sensor, which is just prepared, to be completed.The pressure sensor thickness of preparation is about 10 millimeters, and area is about 4 squares lis
Rice.
The sugar cube of the present embodiment, which cuts with a knife, is segmented into cylinder, using same preparation method, can obtain porous graphene
Foaming structure is the sensor of disk shape.
Embodiment 2
The pressure sensor that embodiment 1 is made, is connected to test circuit, with tension and compression force tester (model SHIMADZU
AGS-X) apply pressure, resistance value is recorded with digital multimeter (model ROGOL DM3068).When not applying pressure, initial resistance
For 300k Ω.
Fig. 3 represents the pressure characteristic of the sensor of the embodiment of the present invention 1, wherein measurement range up to more than 150kPa,
Sensitivity is up to more than 3.5, has reacted the sensor of the pressure while having larger sensitivity and larger measurement range.
Embodiment above is only that the preferred embodiment of the present invention is described, and not the scope of the present invention is entered
Row is limited, on the premise of design spirit of the present invention is not departed from, technical side of this area ordinary skill technical staff to the present invention
In all variations and modifications that case is made, the protection domain that claims of the present invention determination all should be fallen into.
Claims (7)
1. a kind of pressure sensor with porous graphene foaming structure, it is characterised in that steeped including electrode, porous graphene
Foam structure, the profile of the porous graphene foaming structure is sheet, and top and bottom scribble silver paste, the electrode be aluminum strip, filamentary silver,
One kind in copper sheet, electrode is bonded in the upper and lower surface of the porous graphene foaming structure by silver paste.
2. pressure sensor according to claim 1, it is characterised in that the profile of the porous graphene foaming structure is
One kind in rectangular sheet, disk, triangle, different in nature piece.
3. a kind of preparation method of the pressure sensor with porous graphene foaming structure, it is characterised in that including step：
(1) sugar cube is placed in culture dish, the height of wherein culture dish is slightly above sugar cube；
(2) dimethyl silicone polymer is poured slowly into sugar, being placed in baking oven solidifies it；
(3) cakey dimethyl silicone polymer is placed among boiling water, melts sugar cube therein, form porous poly dimethyl
Siloxane structure；
(4) graphene oxide solution is poured into porous polydimethylsiloxane structural, after after the moisture natural evaporation in solution
Baking oven is put into, makes its high temperature reduction, porous graphene foaming structure is formed；
(5) silver paste is coated with for porous graphene foaming structure upper and lower surface, is bonded with aluminum strip electrode, is then packaged.
4. preparation method according to claim 3, it is characterised in that the sugar is the bulk being pressed into granulated sugar particle
Sugar, it is shaped as one kind in square, cylinder, prism.
5. preparation method according to claim 3, it is characterised in that in step (2), by polydimethylsiloxane liquid and
Curing agent in mass ratio 10：1 pours into culture dish, and being placed in after stirring in 60~70 degree of baking ovens solidifies it.
6. the preparation method according to any one of claim 3~5, it is characterised in that in step (4), the graphite oxide
The concentration of alkene solution is 1~5mg/mL, the volume and the porous dimethyl silicone polymer of step (3) formation of graphene oxide solution
The volume of structure is 1~1.5：1.
7. the preparation method according to any one of claim 3~5, it is characterised in that in step (4), the high temperature reduction
Temperature be 180~280 degree, the recovery time be 1~3 hour.
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760099A (en) * | 2018-04-10 | 2018-11-06 | 浙江欧仁新材料有限公司 | Preparation process for high sensitivity voltage sensitive sensor |
| CN108896213A (en) * | 2018-04-25 | 2018-11-27 | 北京大学 | Stress sensor based on porous conductive elastomer and manufacturing method thereof |
| CN108917992A (en) * | 2018-07-10 | 2018-11-30 | 浙江欧仁新材料有限公司 | Stretch sensor based on flexible pressure-sensitive element |
| CN108917993A (en) * | 2018-07-10 | 2018-11-30 | 浙江欧仁新材料有限公司 | Tactile sensor manufacturing method |
| CN108955964A (en) * | 2018-04-10 | 2018-12-07 | 浙江欧仁新材料有限公司 | Flexible pressure-sensitive sensor |
| CN109100058A (en) * | 2018-07-10 | 2018-12-28 | 浙江欧仁新材料有限公司 | Micropressure sensor |
| CN109203500A (en) * | 2018-07-17 | 2019-01-15 | 黄河科技学院 | The plate forming and stress determination method of carbon-fibre reinforced epoxy resin |
| WO2019223353A1 (en) * | 2018-05-25 | 2019-11-28 | 京东方科技集团股份有限公司 | Pressure sensing device, sensor manufacturing method and piezoresistive material layer manufacturing method |
| CN111238694A (en) * | 2020-02-06 | 2020-06-05 | 腾讯科技（深圳）有限公司 | Touch sensor, touch event detection method and device and intelligent robot |
| CN111964813A (en) * | 2020-08-18 | 2020-11-20 | 西安电子科技大学 | Wireless-driven high-sensitivity flexible pressure sensor and preparation method thereof |
| CN112393829A (en) * | 2020-10-26 | 2021-02-23 | 有研工程技术研究院有限公司 | Pressure sensor based on composite conductive fabric and preparation method thereof |
| CN113292856A (en) * | 2021-05-19 | 2021-08-24 | 清华大学 | Mechanoluminescence device and method for producing same |
| CN113375843A (en) * | 2021-06-18 | 2021-09-10 | 沈阳航空航天大学 | Multi-channel flexible array sensor and manufacturing method thereof and method for monitoring stress of curved metal part |
| CN113670488A (en) * | 2021-08-20 | 2021-11-19 | 辽宁石油化工大学 | Preparation method of carbon black/porous PDMS and application of carbon black/porous PDMS in resistance-type flexible pressure sensor |
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| CN106500886A (en) * | 2016-09-22 | 2017-03-15 | 太原理工大学 | A kind of preparation method of the flexibility stress sensor based on nanometer conductive material |
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Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108955964A (en) * | 2018-04-10 | 2018-12-07 | 浙江欧仁新材料有限公司 | Flexible pressure-sensitive sensor |
| CN108760099A (en) * | 2018-04-10 | 2018-11-06 | 浙江欧仁新材料有限公司 | Preparation process for high sensitivity voltage sensitive sensor |
| CN108896213A (en) * | 2018-04-25 | 2018-11-27 | 北京大学 | Stress sensor based on porous conductive elastomer and manufacturing method thereof |
| US11391639B2 (en) | 2018-05-25 | 2022-07-19 | Beijing Boe Technology Development Co., Ltd. | Pressure sensing device, manufacturing method of sensor, and manufacturing method of piezoresistive material layer |
| WO2019223353A1 (en) * | 2018-05-25 | 2019-11-28 | 京东方科技集团股份有限公司 | Pressure sensing device, sensor manufacturing method and piezoresistive material layer manufacturing method |
| CN108917992A (en) * | 2018-07-10 | 2018-11-30 | 浙江欧仁新材料有限公司 | Stretch sensor based on flexible pressure-sensitive element |
| CN108917993A (en) * | 2018-07-10 | 2018-11-30 | 浙江欧仁新材料有限公司 | Tactile sensor manufacturing method |
| CN109100058A (en) * | 2018-07-10 | 2018-12-28 | 浙江欧仁新材料有限公司 | Micropressure sensor |
| CN109203500A (en) * | 2018-07-17 | 2019-01-15 | 黄河科技学院 | The plate forming and stress determination method of carbon-fibre reinforced epoxy resin |
| CN111238694A (en) * | 2020-02-06 | 2020-06-05 | 腾讯科技（深圳）有限公司 | Touch sensor, touch event detection method and device and intelligent robot |
| CN111238694B (en) * | 2020-02-06 | 2022-07-12 | 腾讯科技（深圳）有限公司 | Touch sensor, touch event detection method and device and intelligent robot |
| CN111964813B (en) * | 2020-08-18 | 2021-10-26 | 西安电子科技大学 | Wireless-driven high-sensitivity flexible pressure sensor and preparation method thereof |
| CN111964813A (en) * | 2020-08-18 | 2020-11-20 | 西安电子科技大学 | Wireless-driven high-sensitivity flexible pressure sensor and preparation method thereof |
| CN112393829A (en) * | 2020-10-26 | 2021-02-23 | 有研工程技术研究院有限公司 | Pressure sensor based on composite conductive fabric and preparation method thereof |
| CN113292856A (en) * | 2021-05-19 | 2021-08-24 | 清华大学 | Mechanoluminescence device and method for producing same |
| CN113375843A (en) * | 2021-06-18 | 2021-09-10 | 沈阳航空航天大学 | Multi-channel flexible array sensor and manufacturing method thereof and method for monitoring stress of curved metal part |
| CN113670488A (en) * | 2021-08-20 | 2021-11-19 | 辽宁石油化工大学 | Preparation method of carbon black/porous PDMS and application of carbon black/porous PDMS in resistance-type flexible pressure sensor |
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