CN105136375A - Preparation method of flexible pressure sensor having high sensitivity - Google Patents
Preparation method of flexible pressure sensor having high sensitivity Download PDFInfo
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- CN105136375A CN105136375A CN201510567278.1A CN201510567278A CN105136375A CN 105136375 A CN105136375 A CN 105136375A CN 201510567278 A CN201510567278 A CN 201510567278A CN 105136375 A CN105136375 A CN 105136375A
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Abstract
The invention discloses a preparation method of a flexible pressure sensor based on a carbon nanotube and a high-molecular polymer. According to the preparation method, the carbon nanotube is doped in a polymer substrate, thereby obtaining an elastomer material having electrical conductivity; and an electrode and a composite material are assembled, thereby building a flexible pressure sensor. After a circuit is accessed, the conductive elastomer converts self-deformation into a resistance change under the function of external force, and detection of pressure is realized through measurement of an electrical signal. A microcosmic structure of the surface of the elastomer material is modified, unique surface appearance enables the elastomer material to only present elastic behavior, but creepage does not occur, and a rapid response can be made to pressure applied by the outside world, thereby greatly improving sensitivity of the sensor.
Description
Technical field
The present invention relates to a kind of preparation method of pressure transducer, be specifically related to a kind of preparation method of the pliable pressure sensor based on carbon nano-tube and high molecular polymer.
Background technology
Pressure transducer is widely used in wearable device and other electronic products, as household electrical appliance, robot, Medical Devices, safety feature, enviromental monitoring equipment etc.Along with the appearance of the industries such as the increasing of wearable device kind, health data monitoring and tele-medicine, there is higher requirement to the sensitivity of pliable pressure sensor and accuracy in actual applications.
Conductive material and flexible substrates are assembled by the common preparation method of current pliable pressure sensor.Obtained compound substance produces certain deformation under ambient pressure and stress, causes its resistance or electric capacity to change, thus causes the change of electric signal in circuit.Conventional conductive materials comprises metal and inorganic nano material, carbon nano-tube, Graphene and polymer fiber.Dimethyl silicone polymer (PDMS), owing to having good biocompatibility and elasticity, is the most frequently used flexible substrates.For common pressure transducer, the main cause restricting its sensitivity is that compound substance not exclusively shows elastic behavior, under external force creep occurs, and has the longer relaxation time, can not reinstatement rapidly after external force disappears.Sensor is so just made externally not go out and respond rapidly by masterpiece, the sensitivity that impact detects and accuracy.
Summary of the invention
The object of the invention is for overcoming above-mentioned the deficiencies in the prior art, a kind of preparation method of the pliable pressure sensor based on carbon nano-tube and high molecular polymer is provided.The present invention makes it have electric conductivity by doped carbon nanometer pipe in polymeric substrates; Change the micromechanism of compound substance, construct unique surface topography, enable resilient material be converted into elastic deformation by entirely complete for born pressure, and discharge rapidly elastic potential energy reinstatement when external force disappears.The method adopts the raw material easily obtained, and can obtain having fast-response and highly sensitive pressure transducer through simple preparation process.
For achieving the above object, the present invention adopts following technical proposals:
Based on a preparation method for the pliable pressure sensor of carbon nano-tube and high molecular polymer, concrete steps are as follows:
1) carbon nano-tube (CNT) is scattered in chloroform, fully ultrasonic, obtain the CNT suspending liquid with good dispersion;
2) in turbine mixer, CNT suspending liquid is mixed completely with liquid dimethyl silicone polymer (PDMS), revolve subsequently and steam removing solvent chloroform, obtain the potpourri of PDMS and CNT;
3) hexane and hardening agent are to add in above-mentioned PDMS-CNT potpourri after 1:10 mixing, and ratio is add 1mL hexane in 500mgPDMS.Abundant stirring makes it mix completely, and degassed under vacuo, removing bubble;
4) get the above-mentioned mixing material of 100 μ L to transfer in micro-template, at high temperature solidify 3h.Template is by obtaining the photo-engraving process of silicon chip, and its surface has the inverted triangle taper hole of periodic arrangement, is of a size of several microns;
5) by sputter coating method Pt is deposited on PDMS film and forms Pt electrode, and be covered on PDMS-CNT compound.Compound is taken off from template, obtains the compound substance that surface has triangle taper microstructure;
6) the PDMS film of Pt electrode is had to assemble, in place in circuit in above-mentioned compound substance and another surface.
After completing the preparation of pliable pressure sensor in described step 6), also comprise the detection to pressure signal, concrete grammar is:
A) pressure of different numerical value is applied in sensor, the electric current in writing circuit and voltage;
B) static pressure is acted on sensor, the change of electric signal in writing circuit;
C) dynamic pressure is acted on sensor, the change of electric signal in writing circuit.
Described steps A) refer to: the I-V curve of system when pressure is respectively 0Pa, 500Pa, 1000Pa, 2000Pa, 5000Pa, 10000Pa, 30000Pa.
Described step B) in, the pressure value investigated is 0Pa, 500Pa, 1000Pa, 2000Pa, 5000Pa, 10000Pa, 30000Pa.
Described step B) in, the change of electric signal refers to
Δ I/
i off numerical value, wherein
Δ Ithe relative change numerical value of electric current,
i off without the current values in circuit under External Force Acting.
Described step C) in, dynamic electric voltage is the pressure within the scope of 500 – 2000Pa, with the frequency effect of 1Hz in sensor.
Principle of work of the present invention:
The present invention selects PDMS as flexible substrates, makes it have electric conductivity, and carry out finishing to substrate with conductive materials is carbon nano tube-doped, with Pt electrode compound, in place in circuit.
1) surface of conduction PDMS-CNT compound substance is pyrometric cone structure, and it contacts with two Pt electrodes simultaneously;
2) External Force Acting is when sensor, and pyrometric cone structure generation elastic deformation, increases with the contact area of Pt electrode, cause resistance to reduce, and electric current increases;
3) after external force disappears, the shape that pyrometric cone structure quick recoverable is initial;
4) after carrying out finishing to PDMS, under external force, creep does not occur, the external force-responsive of system is rapid.
The invention has the beneficial effects as follows, the present invention, by conductive materials and PDMS directly being adulterated, obtains the composite elastic body with electric conductivity; Electrode and compound substance are assembled, forming circuit, self-deformation is converted into the change of resistance by conductive elastomer under external force, causes electric current to the response of pressure.Structure of the present invention is simple, easy to operate, cheap, and the direct-assembling of different materials makes complex have multi-functional; The harmful effect that the surface structure of elastic body uniqueness can be eliminated creep and bring, can meet the requirement of related industry to pressure detection.Concrete advantage is as follows:
1) different materials is assembled into structure and the preparation process that complex simplifies sensor;
2) compared with not surface treated PDMS in report, after its surface structure is designed, under external force, elastic behavior is showed completely;
3) the rapid response to external force and higher sensitivity is showed in the detection;
4), after circulation repeatedly, its performance has no obvious reduction.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of pressure transducer preparation process.
Fig. 2 is pressure transducer schematic diagram in circuit.
Fig. 3 is the I-V curve of circuit under different pressures.
Fig. 4 is the change of electric current in circuit under different pressures.
Fig. 5 is the change of electric current in circuit under 1Hz frequency dynamic voltage.
Embodiment
Below in conjunction with drawings and Examples, the present invention will be further elaborated, should be noted that following explanation is only to explain the present invention, not limiting its content.
Embodiment:
The preparation of pliable pressure sensor:
(1) cut-off footpath is 110 – 190nm, and length is that the multi-walled carbon nano-tubes (CNT) of 5 – 9 μm is scattered in chloroform, and ultrasonic 6h, obtains the CNT suspending liquid with good dispersion.
(2) in turbine mixer, CNT suspending liquid is mixed completely with PDMS substrate liquid, steam 6h at 90 ° of C backspins subsequently and remove solvent chloroform, obtain the potpourri of PDMS and CNT.
(3) hexane and hardening agent are to add in above-mentioned PDMS-CNT potpourri after 1:10 mixing, and ratio is add 1mL hexane in 500mgPDMS.Stirring 5min makes it mix completely, and degassed under vacuo, removing bubble.
(4) getting the above-mentioned mixing material of 100 μ L is coated with at 600 rpm in micro-template, and thickness is about 500 μm, and solidifies 3h under 90 ° of C.Template is by obtaining the photo-engraving process of silicon chip, and its surface has the inverted triangle taper hole of periodic arrangement, is of a size of several microns, as shown in figures i a andb.
(5) by sputter coating by Pt electrode deposition on PDMS film, and to be covered on PDMS-CNT compound.Compound is taken off from template, obtains the compound substance that surface has triangular pyramidal microstructure, as shown in Fig. 1 c and d.
(6) the PDMS film of Pt electrode is had to assemble in above-mentioned compound substance and another surface, in place in circuit, as shown in Figure 2.
Detection to pressure signal:
(1), when pressure is respectively 0Pa, 500Pa, 1000Pa, 2000Pa, 5000Pa, 10000Pa, 30000Pa, the I-V curve of writing circuit, result as shown in Figure 3.
(2) when pressure value is 0Pa, 500Pa, 1000Pa, 2000Pa, 5000Pa, 10000Pa, 30000Pa, electric signal in writing circuit
Δ I/
i off the change of numerical value, wherein
Δ Ithe relative change numerical value of electric current,
i off be without the current values in circuit under External Force Acting, result as shown in Figure 4.
(3) act on sensor with the dynamic electric voltage of 1Hz frequency change, pressure value within the scope of 500 – 2000Pa, electric signal in writing circuit
Δ I/
i off the change of numerical value, result as shown in Figure 5.
By reference to the accompanying drawings the specific embodiment of the present invention is described although above-mentioned; but not limiting the scope of the invention; on the basis of technical scheme of the present invention, those skilled in the art do not need to pay various amendment or distortion that creative work can make still within protection scope of the present invention.
Claims (1)
1., based on a preparation method for the pliable pressure sensor of carbon nano-tube and high molecular polymer, it is characterized in that, concrete steps are as follows:
1) carbon nano-tube (CNT) is scattered in chloroform, fully ultrasonic, obtain the CNT suspending liquid with good dispersion;
2) in turbine mixer, CNT suspending liquid is mixed completely with liquid dimethyl silicone polymer (PDMS), revolve subsequently and steam removing solvent chloroform, obtain the potpourri of PDMS and CNT;
3) hexane and hardening agent are to add in above-mentioned PDMS-CNT potpourri after 1:10 mixing, and ratio is add 1mL hexane in 500mgPDMS, fully stirs and makes it mix completely, and degassed under vacuo, removing bubble;
4) get the above-mentioned mixing material of 100 μ L to transfer in micro-template, at high temperature solidify 3h, template is by obtaining the photo-engraving process of silicon chip, and its surface has the inverted triangle taper hole of periodic arrangement, is of a size of several microns;
5) by sputter coating method Pt is deposited on PDMS film and forms Pt electrode, and be covered on PDMS-CNT compound, compound is taken off from template, obtains the compound substance that surface has triangle taper microstructure;
6) there is the PDMS film of Pt electrode to assemble in above-mentioned compound substance and another surface, in place in circuit, namely obtain sensor.
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| CN106017751A (en) * | 2016-05-25 | 2016-10-12 | 东南大学 | High-sensitivity piezoresistive pressure sensor and preparation method thereof |
| CN106092390A (en) * | 2016-06-06 | 2016-11-09 | 中国科学院深圳先进技术研究院 | Piezoresistive pressure sensor and preparation method thereof |
| CN106500886A (en) * | 2016-09-22 | 2017-03-15 | 太原理工大学 | A kind of preparation method of the flexibility stress sensor based on nanometer conductive material |
| CN106768520A (en) * | 2016-12-28 | 2017-05-31 | 中国科学院深圳先进技术研究院 | pressure sensor and preparation method thereof |
| CN106953001A (en) * | 2017-03-24 | 2017-07-14 | 中山大学 | A kind of pliable pressure sensor based on carbon nano-tube film and photoresist and preparation method thereof |
| CN107290084A (en) * | 2017-06-28 | 2017-10-24 | 京东方科技集团股份有限公司 | A kind of pressure sensor and preparation method thereof, electronic device |
| CN108072389A (en) * | 2017-11-30 | 2018-05-25 | 西安交通大学 | A kind of wearable health monitoring sensor manufacturing process of bionical attaching type |
| CN108267248A (en) * | 2016-12-30 | 2018-07-10 | 香港科技大学深圳研究院 | For monitoring the pliable pressure sensor of physiology signal and its manufacturing method |
| CN108373974A (en) * | 2018-03-19 | 2018-08-07 | 东南大学 | Chip apparatus and its application for dimensional culture cell and the cardiac muscular tissue of monitoring in real time in situ |
| CN108469319A (en) * | 2018-03-20 | 2018-08-31 | 西南交通大学 | A kind of flexible force sensitive sensor and preparation method thereof, array device and application |
| CN108663154A (en) * | 2017-03-31 | 2018-10-16 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible wearable baroceptor, preparation method and application |
| CN108663142A (en) * | 2017-03-31 | 2018-10-16 | 中国科学院苏州纳米技术与纳米仿生研究所 | The voltage links such as pressure sensor method and pressure sensor |
| CN109320747A (en) * | 2018-09-25 | 2019-02-12 | 中南大学 | A kind of high sensitivity flexible compound coating and preparation method thereof |
| CN109425447A (en) * | 2017-09-04 | 2019-03-05 | 北京清正泰科技术有限公司 | A kind of microstrain graphene sensor and its manufacturing method |
| CN110186600A (en) * | 2019-06-18 | 2019-08-30 | 福建师范大学 | Self-supporting film preparation method and pressure sensing actuator |
| CN110243506A (en) * | 2018-03-08 | 2019-09-17 | 中国科学院深圳先进技术研究院 | A kind of piezoresistive pressure sensor and preparation method thereof |
| CN110285896A (en) * | 2019-07-31 | 2019-09-27 | 南京戎智信息创新研究院有限公司 | A kind of linear response capacitance type pressure sensor based on contact area |
| CN111765907A (en) * | 2019-04-02 | 2020-10-13 | 天津大学 | Method for preparing flexible resistance sensor based on polycarbonate template method |
| CN113079632A (en) * | 2021-04-01 | 2021-07-06 | 浙江大学 | High-resolution touch sensor and manufacturing and detecting method thereof |
| CN114479469A (en) * | 2022-01-20 | 2022-05-13 | 苏州大学 | Preparation method of two-phase flexible PDMS composite material and wearable pressure sensor |
| CN114878035A (en) * | 2022-05-09 | 2022-08-09 | 西南交通大学 | Flexible piezoresistive pressure sensor and preparation method thereof |
| CN115290223A (en) * | 2021-12-29 | 2022-11-04 | 太原工业学院 | Flexible force-sensitive sensing test method based on RC oscillation frequency detection |
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| CN106768520A (en) * | 2016-12-28 | 2017-05-31 | 中国科学院深圳先进技术研究院 | pressure sensor and preparation method thereof |
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| CN108663154A (en) * | 2017-03-31 | 2018-10-16 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible wearable baroceptor, preparation method and application |
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| US10921200B2 (en) | 2017-06-28 | 2021-02-16 | Boe Technology Group Co., Ltd. | Pressure sensor, manufacturing method thereof, and electronic device |
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| CN110186600B (en) * | 2019-06-18 | 2021-06-18 | 福建师范大学 | Self-supporting film preparation method and pressure sensing actuator |
| CN110285896A (en) * | 2019-07-31 | 2019-09-27 | 南京戎智信息创新研究院有限公司 | A kind of linear response capacitance type pressure sensor based on contact area |
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Application publication date: 20151209 |