CN108663154A - Flexible wearable baroceptor, preparation method and application - Google Patents
Flexible wearable baroceptor, preparation method and application Download PDFInfo
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- CN108663154A CN108663154A CN201710206612.XA CN201710206612A CN108663154A CN 108663154 A CN108663154 A CN 108663154A CN 201710206612 A CN201710206612 A CN 201710206612A CN 108663154 A CN108663154 A CN 108663154A
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- flexible
- baroceptor
- layer
- wearable
- top layer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
Abstract
The invention discloses a kind of flexible wearable baroceptor, preparation method and applications.The flexible wearable baroceptor includes flexible top layer, the flexible top layer have first surface and with the opposite facing second surface of first surface, the second surface has microstructure, the microstructure can be directed to the variation of born pressure size and make sensitive distinguishable response, and be electrically connected to a power source；Flexible bottom layer, the flexible bottom layer have third surface, and at least third surface is conductive, and in electrical contact with microstructure；And it is formed in the sealed air chamber between flexible top layer and flexible bottom layer, at least regional wall of the sealed air chamber is formed by at least regional area of second surface and at least regional area on third surface, and the indoor air pressure of blanket gas reaches setting vacuum degree.It is 20KPa to 101KPa that the flexible wearable baroceptor of the present invention, which has the characteristic of flexible wearable, testable air pressure range, and preparation process is simple, of low cost.
Description
Technical field
The present invention relates to a kind of pressure sensor, more particularly to a kind of flexible wearable baroceptor and preparation method thereof
With application, belong to technical field of microelectronic devices.
Background technology
With the tremendous development of smart field, flexible wearable equipment has attracted a large amount of attention of people.People endeavour
In preparing the flexible wearable device for incuding all kinds of outer signals, pressure sensor such as flexible, temperature sensor flexible
And strain gauge flexible etc..For the research of such flexible wearable device, it is preferred that emphasis is synthesis or selection are closed
Suitable flexible material, and special device architecture or material microstructure are designed to realize special function.People simultaneously
On existing Research foundation, to have achievement in research concrete application in terms of done a large amount of popularizing action.
But in general, flexible wearable device still has very large space in the popularization practical of practical application.This master
It is constrained to the complexity of flexible device technological design in a particular application.So the reality based on existing achievement in research is answered
It is very necessary with promoting.
Currently, air pressure sensing equipment is widely used in multiple fields.Traditional air pressure sensing equipment mainly has mercury
Barometer and aneroid etc., such barometer be according to evangelista torricelli (Evangelista Torricelli, 1608~
1647) experimental principle and be made, generally all can there are one the rigid base that glass or other solid materials are prepared into, because
This this kind of barometer structure is fixed, and can not be bent and deformation, and then can not be applied to some special application demands, such as uncomfortable
Close embedded wearable device.
Invention content
The main purpose of the present invention is to provide a kind of flexible wearable baroceptor, preparation method and application, with
Overcome deficiency in the prior art.
For realization aforementioned invention purpose, the technical solution adopted by the present invention includes：
An embodiment of the present invention provides a kind of flexible wearable baroceptors comprising：
Flexible top layer, have first surface and with the opposite facing second surface of first surface, the second surface have it is micro-
Structure is seen, the microstructure can be directed to the variation of born pressure size and make sensitive distinguishable response, described micro-
Structure is seen to be electrically connected to a power source；
Flexible bottom layer, have third surface, at least described third surface be it is conductive, and the third surface with it is described micro-
It is in electrical contact to see structure；
And it is formed in the sealed air chamber between the flexible top layer and flexible bottom layer, at least office of the sealed air chamber
Portion's locular wall is formed by at least regional area of the second surface and at least regional area on the third surface, and the sealing
The indoor air pressure of gas reaches setting vacuum degree.
In some preferred embodiments, the microstructure can at least be directed to born different pressures and generate not
With degree and distinguishable deformation.
The embodiment of the present invention additionally provides a kind of preparation method of flexible wearable baroceptor comprising：
Prepare flexible top layer and flexible bottom layer respectively, the flexible top layer has first surface and opposite facing with first surface
Second surface, the second surface have microstructure, the microstructure can be directed to born pressure size variation
And sensitive distinguishable response is made, and the microstructure is electrically connected to a power source, the flexible bottom layer has third surface, until
Few third surface is conductive, and the third surface and the microstructure is in electrical contact；
Under vacuum, the third surface of the second surface of the flexible top layer and flexible bottom layer is oppositely arranged, and
It is packaged, to form blanket gas in at least regional area on at least regional area of the second surface and the third surface
Room obtains the flexible wearable baroceptor.
In some preferred embodiments, the preparation method includes：
Flexible top layer and flexible bottom layer are prepared respectively；
Annular packing material is coated on the surface of the flexible bottom layer, later on the annular packing material described in covering
Flexible top layer；
It is warming up to the melt temperature of annular packing material under vacuum, and keeps setting time, closes heat source later,
Keep vacuum, natural cooling so that flexible top layer bonds under vacuum with flexible bottom layer, with the second surface extremely
Few regional area and at least regional area on the third surface form sealed air chamber, obtain the flexible wearable air pressure sensing
Device.
The embodiment of the present invention additionally provides the flexible wearable baroceptor in the purposes of air pressure detection field.
Compared with prior art, advantages of the present invention includes：
1. the material of main part of flexible wearable baroceptor provided by the invention uses organic polymer, generally have soft
Property, flexible, deformable characteristic, and then make baroceptor obtained that there is the characteristic of flexible wearable, so can be very well
Meet the needs of flexible wearable equipment development at present, can be that the wearable aspect popularization of microelectronic component contributes；
It, should 2. the testable air pressure range of flexible wearable baroceptor provided by the invention is 20KPa to 101KPa
Air pressure range may include earth surface all areas.
3. the preparation process of flexible wearable baroceptor provided by the invention is simple, structure is very succinct, only includes
Upper layer and lower layer film, while only needing the be heating and curing method of natural cooling of hot melt adhesive that can realize the envelope for meeting specified conditions
Dress, it is easy to process, it is of low cost.
Description of the drawings
Fig. 1 is the structural schematic diagram of the microstructure of the flexible top layer in an exemplary embodiments of the invention；
Fig. 2 is that the bonding method that flexible bottom layer in an of the invention exemplary embodiments has applied after hot melt adhesive with flexible top layer shows
It is intended to；
Fig. 3 is the structural schematic diagram of the flexible wearable baroceptor prepared in the typical embodiment of the present invention one；
Fig. 4 is testing for the flexible wearable baroceptor encapsulated under normal pressure in the typical embodiment of the present invention one
Air pressure range schematic diagram；
Fig. 5 is the flexible wearable baroceptor that is encapsulated under normal pressure in one typical embodiment of the present invention to different gas
The response curve of pressure；
Fig. 6 is the flexible wearable air pressure encapsulated under the conditions of vacuum degree is 100Pa in the typical embodiment of the present invention one
Sensor can measuring air pressure range schematic diagram.
Specific implementation mode
In view of deficiency in the prior art, inventor is able to propose the present invention's through studying for a long period of time and largely putting into practice
Technical solution.The technical solution, its implementation process and principle etc. will be further explained as follows.
The one side of the embodiment of the present invention provides a kind of flexible wearable baroceptor comprising：
Flexible top layer, have first surface and with the opposite facing second surface of first surface, the second surface have it is micro-
Structure is seen, the microstructure can be directed to the variation of born pressure size and make sensitive distinguishable response, described micro-
Structure is seen to be electrically connected to a power source；
Flexible bottom layer, have third surface, at least described third surface be it is conductive, and the third surface with it is described micro-
It is in electrical contact to see structure；
And it is formed in the sealed air chamber between the flexible top layer and flexible bottom layer, at least office of the sealed air chamber
Portion's locular wall is formed by at least regional area of the second surface and at least regional area on the third surface, and the sealing
The indoor air pressure of gas reaches setting vacuum degree.
In some preferred embodiments, the microstructure can at least be directed to born different pressures and generate not
With degree and distinguishable deformation, the microstructure can make the extraneous variation for applying pressure size sensitive distinguishable
Response.Such as pyramid inverted triangle structure, when the external world applies pressure and gradually increases, shape occurs the structure for inverted triangle tip
Become, the contact surface of tip and bottom is caused to increase, to realize the reduction of contact resistance, output current increases under same voltage,
The final response realized to extraneous pressure change.
Preferably, the microstructure includes being formed in a plurality of protruding portions of the second surface.
Preferably, the shape of the protruding portion includes reverse pyramid.
Preferably, the flexible top layer is integrally conductive, i.e., the described flexible top layer should have conductive properties or extremely
Few microstructural surfaces should have one layer of conductive layer.
In some preferred embodiments, the first surface is equipped with first electrode, and the microstructure passes through described the
One electrode is electrically connected to a power source.
Preferably, the first surface is covered with conductive layer, and the first electrode is set on the conductive layer.
In some preferred embodiments, the flexible bottom layer include flexible substrates and cover on a flexible substrate
At least regional area of two electrodes, the second electrode surface constitutes the third surface.
Preferably, the second electrode includes being formed in the conductive layer on the flexible substrates surface.
Preferably, the conductive layer includes tin indium oxide (ITO) layer.
In some preferred embodiments, the flexible top layer includes flexible conductive film, filled with conductive filler
Flexible nonconductive film and microstructural surfaces are provided with any one in the flexible nonconductive substrate of conductive coating.It is i.e. described
The material of flexible top layer should include conducting polymer materials, have the non-conducting polymeric material or microstructure of conductive filler
There is the non-conducting polymeric material of conductive coating on surface.
Preferably, the thickness of the flexible top layer is at 200 μm or less.
Preferably, the flexible bottom layer should equally have a conductive properties, or at least arbitrary surfaces (at least with flexible top
The one side of layer fitting) there is conductive layer, that is, there is good electric conductivity.
In some preferred embodiments, the flexible bottom layer includes that flexible conductive film and surface are provided with conductive coating
Flexible nonconductive substrate in any one.The material of the i.e. described flexible bottom layer include conducting polymer materials flexible or
There are other flexible nonconductive substrates of conductive coating on surface.
Preferably, the thickness of the flexible bottom layer is at 500 μm or less.
Preferably, the material of the flexible conductive film should select relatively thin flexible conductive polymer material, and such
Material has good elasticity, such as PUD/PEDOT simultaneously:PSS complex thin films.
Preferably, the material of the flexible nonconductive film includes flexible nonconductive polymer.
Preferably, the material of the flexible nonconductive substrate includes flexible nonconductive polymer.
Further, flexible nonconductive polymer should select thinner thickness, the preferable polymer material of flex capability, such as
Polyethylene terephthalate (PET), dimethyl silicone polymer (PDMS) etc..
Preferably, the conductive filler includes metal nanoparticle, c-based nanomaterial etc..
Preferably, the c-based nanomaterial include any one or two kinds in carbon nanotube, carbon black and graphene with
On combination, but not limited to this.
Especially preferred, the carbon nanotube includes multi-walled carbon nanotube (CNTs).
Preferably, the air pressure test scope of the flexible wearable baroceptor is 20~101KPa, the air pressure range
It may include earth surface all areas.
Preferably, the operating voltage of the flexible wearable baroceptor is 5V hereinafter, especially preferably 1V.
In some preferred embodiments, the flexible wearable baroceptor further includes annular packing material, described
Annular packing material is set between flexible top layer and flexible bottom layer, and the annular packing material and the second surface are at least
Regional area and at least regional area on the third surface are enclosed the sealed air chamber.
Preferably, the outer peripheral edge portion of the annular packing material and the flexible top layer, which is surround, is tightly connected.
In some preferred embodiments, the vacuum degree of the sealed air chamber is 0~101KPa.
Preferably, the shape of the annular packing material and the shape of flexible top layer are identical, facilitate the edge of flexible top layer
It is perfectly pasted with flexible bottom layer.
Preferably, it is preferred that the annular packing material includes alite paste, especially preferably hot melt adhesive, and its purity is got over
It is high better, the mode packaging of heating and melting cooling and solidifying thus can be used.
Especially preferred, the hot melt adhesive includes the glass transition temperature that fusing point is less than flexible bottom layer and flexible top layer
Colloid.
Further, the suitable selection component of the hot melt adhesive is single, the colloid that fusing point determines, such as high paraffin refined wax.
The embodiment of the present invention another aspect provides a kind of preparation method of flexible wearable baroceptor, this hairs
The bright principle based on contact resistance formula pressure sensor is prepared for the baroceptor, selects flexible bottom layer and one side to have microcosmic
The flexible top layer of structure is prepared by specific encapsulation technology to the sensitive flexible wearable device of air pressure change.Such gas
Pressure sensor basic structure is also similarly to contact resistance formula pressure sensor, is divided into upper layer and lower layer, is referred to as flexible top
Layer and flexible bottom layer.
Specifically, the method that the present invention prepares flexible wearable baroceptor includes：
Prepare flexible top layer and flexible bottom layer respectively, the flexible top layer has first surface and opposite facing with first surface
Second surface, the second surface have microstructure, the microstructure can be directed to born pressure size variation
And sensitive distinguishable response is made, and the microstructure is electrically connected to a power source, the flexible bottom layer has third surface, until
Few third surface is conductive, and the third surface and the microstructure is in electrical contact；
Under vacuum, the third surface of the second surface of the flexible top layer and flexible bottom layer is oppositely arranged, and
It is packaged, to form blanket gas in at least regional area on at least regional area of the second surface and the third surface
Room obtains the flexible wearable baroceptor.
In some preferred embodiments, the preparation method includes：
Flexible top layer and flexible bottom layer are prepared respectively；
Annular packing material is coated on the surface of the flexible bottom layer, later on the annular packing material described in covering
Flexible top layer；
It is warming up to the melt temperature of annular packing material under vacuum, and keeps setting time, closes heat source later,
Keep vacuum, natural cooling so that flexible top layer bonds under vacuum with flexible bottom layer, with the second surface extremely
Few regional area and at least regional area on the third surface form sealed air chamber, obtain the flexible wearable air pressure sensing
Device.
Different annular packing materials has different melt temperatures, but when selecting fluid sealant, is not easy selection and melts temperature
Material of the degree more than 80 DEG C, i.e., preferably, the melt temperature is less than 80 DEG C.
Preferably, the setting time is within 2min.
Preferably, the air pressure test scope of the flexible wearable baroceptor is 20~101KPa, the air pressure range
It may include earth surface all areas.
In some preferred embodiments, the vacuum degree of the air pressure cavity is 0~101KPa.
Preferably, the operating voltage of the flexible wearable baroceptor is 5V hereinafter, especially preferably 1V.
Preferably, the sensitivity of the flexible wearable baroceptor is 0.087KPa-1~5.25KPa-1.
In some preferred embodiments, the microstructure can at least be directed to born different pressures and generate not
With degree and distinguishable deformation, the microstructure can make sensitive (sensitivity to the extraneous variation for applying pressure size
For 0.087KPa-1~5.25KPa-1) distinguishable response.Such as pyramid inverted triangle structure, the structure apply when extraneous
When pressure gradually increases, inverted triangle tip deforms upon, and causes the contact surface of tip and bottom to increase, to realize contact resistance
Reduction, output current increases under same voltage, finally realizes the response to extraneous pressure change.
Preferably, the microstructure includes being formed in a plurality of protruding portions of the second surface.
Preferably, the shape of the protruding portion includes reverse pyramid.
Preferably, the flexible top layer is integrally conductive, i.e., the described flexible top layer should have conductive properties or extremely
Few microstructural surfaces should have one layer of conductive layer.
In some preferred embodiments, the first surface is equipped with first electrode, and the microstructure passes through described the
One electrode is electrically connected to a power source.
Preferably, the first surface is covered with conductive layer, and the first electrode is set on the conductive layer.
In some preferred embodiments, the flexible bottom layer include flexible substrates and cover on a flexible substrate
At least regional area of two electrodes, the second electrode surface constitutes the third surface.
Preferably, the second electrode includes being formed in the conductive layer on the flexible substrates surface.
Preferably, the conductive layer includes tin indium oxide (ITO) layer.
In some preferred embodiments, the flexible top layer includes flexible conductive film, filled with conductive filler
Flexible nonconductive film and microstructural surfaces are provided with any one in the flexible nonconductive substrate of conductive coating.It is i.e. described
The material of flexible top layer should include conducting polymer materials, have the non-conducting polymeric material or microstructure of conductive filler
There is the non-conducting polymeric material of conductive coating on surface.
Preferably, the thickness of the flexible top layer is at 200 μm or less.
Preferably, the flexible bottom layer should equally have a conductive properties, or at least arbitrary surfaces (at least with flexible top
The one side of layer fitting) there is conductive layer, that is, there is good electric conductivity.
In some preferred embodiments, the flexible bottom layer includes that flexible conductive film and surface are provided with conductive coating
Flexible nonconductive substrate in any one.The material of the i.e. described flexible bottom layer include conducting polymer materials flexible or
There are other flexible nonconductive substrates of conductive coating on surface.
Preferably, the thickness of the flexible bottom layer is at 500 μm or less.
Preferably, the material of the flexible conductive film should select relatively thin flexible conductive polymer material, and such
Material has good elasticity, such as PUD/PEDOT simultaneously:PSS complex thin films.
Preferably, the material of the flexible nonconductive film includes flexible nonconductive polymer.
Preferably, the material of the flexible nonconductive substrate includes flexible nonconductive polymer.
Further, flexible nonconductive polymer should select thinner thickness, the preferable polymer material of flex capability, such as
Polyethylene terephthalate (PET), dimethyl silicone polymer (PDMS) etc..
Preferably, the conductive filler includes metal nanoparticle, c-based nanomaterial etc..
Preferably, the c-based nanomaterial include any one or two kinds in carbon nanotube, carbon black and graphene with
On combination, but not limited to this.
Especially preferred, the carbon nanotube includes multi-walled carbon nanotube (CNTs).
Preferably, the material of the annular packing material includes alite paste, especially preferably hot melt adhesive, and its purity is higher
It is better, the mode packaging of heating and melting cooling and solidifying thus can be used.
Preferably, the packaging method includes hot melt adhesive by the cooling mounting method of hot melt, while can also include that other are soft
Property colloid mounting method.
Preferably, the pattern of the hot melt adhesive coated on the flexible bottom layer should as possible with the shape size phase of flexible top layer
When, cushion rubber is continuous, the amount applied is few as possible, after ensureing to paste, the face that is in direct contact between flexible top layer and flexible bottom layer
Product is big as possible, realizes that the edge of flexible top layer is perfectly pasted with flexible bottom layer.
Especially preferred, the hot melt adhesive should select glass transition temperature of the fusing point less than flexible bottom layer and flexible top layer
Colloid.
Further, the suitable selection component of the hot melt adhesive is single, the colloid that fusing point determines, such as high paraffin refined wax.
Further, when heating hot melt adhesive, after heating temperature reaches hot melt adhesive temperature, heat source is easily closed as early as possible, is kept away
Exempt from colloid and colloid excess diffusion between flexible bottom layer and flexible top layer occur in melting state for a long time, or even filling is completely
All gaps between two layers.
In some preferred embodiments, the preparation method includes：It is more to being added in dimethyl silicone polymer (PDMS)
Wall carbon nano tube, it is evenly dispersed, mixing material is formed, the mixing material is spun on microstructure using spin-coating method
On silicon chip, the flexible top layer with microstructure is obtained.The flexible top layer meets flexible and electric conductivity requirement simultaneously, works as the external world
After applying certain pressure, microstructure deforms upon, and top layer increases with the effective contact area of bottom, and contact resistance reduces, specified
Under voltage, device output current increases, and cancels pressure, since PDMS elasticity promotes microstructure deformation to restore, effective contact surface
Product reduces, and contact resistance increases, and under rated voltage, device output current increases, to realize that device output current applies the external world
Stressed response.
Preferably, the mass ratio of the multi-walled carbon nanotube and dimethyl silicone polymer is 1：100~5：100.
In some more specific case study on implementation, the preparation method may comprise steps of：
The mixing material that evenly dispersed mass ratio is 2%CNTs in PDMS is selected, is revolved the mixing material using spin-coating method
It is coated on the silicon chip with microstructure, to prepare the flexible top layer for possessing microstructure.Then, with spin coating a thin layer
The PET film of conductive coating ITO coats a circle hot melt adhesive (selecting high paraffin refined wax) as flexible bottom layer, on the surfaces conductive coating ITO,
The loop-shaped should be close with flexible top layer size shape, and top layer edge is facilitated perfectly to be pasted with bottom.Later, different
Device to be packaged is heated to the melt temperature of hot melt adhesive under vacuum condition and is kept for certain time, heat source is then shut off, is kept
Vacuum, natural cooling, to complete between flexible top layer and flexible bottom layer to bond under different vacuum conditions, this makes it possible to obtain flexibilities
Device with different vacuum degrees between top layer and flexible bottom layer.Finally, obtain to test the air pressure in different air pressure change sections
Sensor.
The embodiment of the present invention additionally provides the flexible wearable baroceptor in the purposes of air pressure detection field.
For example, the embodiment of the present invention additionally provides a kind of flexible wearable device, it includes flexible wearable gas above-mentioned
Pressure sensor.
By above-mentioned technical proposal, the material of main part of flexible wearable baroceptor provided by the invention is using organic poly-
Object is closed, generally there is flexible, flexible, deformable characteristic, and then makes baroceptor obtained that there is flexible wearable
Characteristic, the testable air pressure range of the baroceptor are 20KPa to 101KPa, which may include that earth surface is all
Region.The preparation process of the present invention is simple, and structure is very succinct, only includes upper layer and lower layer film, while only hot melt adhesive being needed to heat
The method of solidification natural cooling can realize the encapsulation for meeting specified conditions, easy to process, of low cost.
Below in conjunction with attached drawing and some exemplary embodiments to technical scheme of the present invention carry out it is clear, completely retouch
It states.
Embodiment 1
By PDMS substrates liquid and CNTs (multi-walled carbon nanotube) with mass ratio for 100:2 ratio mixing, then with three chloromethanes
Alkane is with 1:4 volume ratios are prepared into mixed solution, stir 12 hours later, it is ensured that CNTs is uniformly blended in PDMS, and heating makes
It is complete to obtain chloroform volatilization, remaining mixture is spin-coated on the silicon chip with microstructure later and prepares flexibility and has
The flexible top layer of microstructure, as shown in Figure 1.Later in the PET film for selecting spin coating a thin layer ITO as flexible bottom layer,
The high paraffin refined wax of suitable pattern is coated on this layer, as shown in Figure 2.Later under normal pressure (101KPa), made by way of heating
Must be high-purity paraffin melting, it is then switched off heat source, keeps vacuum, natural cooling so that flexible top layer and flexible bottom layer are pasted naturally,
As shown in figure 3, finally obtaining the flexible wearable baroceptor that can test different air pressure sections.
Electrical performance testing is carried out to flexible wearable baroceptor manufactured in the present embodiment, under normal pressure (101KPa)
The device of encapsulation can accurate measuring air pressure range as shown in figure 4, being responded to different air pressures as shown in Figure 5.
Embodiment 2
By PDMS substrates liquid and CNTs (multi-walled carbon nanotube) with mass ratio for 100:2 ratio mixing, then with three chloromethanes
Alkane is with 1:4 volume ratios are prepared into mixed solution, stir 12 hours later, it is ensured that CNTs is uniformly blended in PDMS, and heating makes
It is complete to obtain chloroform volatilization, remaining mixture is spin-coated on the silicon chip with microstructure later and prepares flexibility and has
The flexible top layer of microstructure, as shown in Figure 1.Later in the PET film for selecting spin coating a thin layer ITO as flexible bottom layer,
The high paraffin refined wax of suitable pattern is coated on this layer, as shown in Figure 2.Later under the conditions of vacuum degree is 100Pa, pass through the side of heating
Formula makes high-purity paraffin melting, is then switched off heat source, keeps vacuum, natural cooling so that flexible top layer and flexible bottom layer are natural
It pastes, as shown in figure 3, finally obtaining the flexible wearable baroceptor that can test different air pressure sections.
Electrical performance testing is carried out to flexible wearable baroceptor manufactured in the present embodiment, is 100Pa in vacuum degree
Under the conditions of the device that encapsulates, the air pressure range that can accurately test is as shown in Figure 6.
Embodiment 3
By PDMS substrates liquid and CB (carbon black) with mass ratio for 100:5 ratio mixing, then with chloroform with 1:4 volumes
It than being prepared into mixed solution, stirs 12 hours later, it is ensured that CB is uniformly blended in PDMS, and heating is so that chloroform volatilization
Completely, remaining mixture is spin-coated on later and prepares the flexible and flexibility with microstructure on the silicon chip with microstructure
Top layer, as shown in Figure 1.Later in the PET film for selecting spin coating a thin layer ITO as flexible bottom layer, it is suitable to be coated on the layer
The high paraffin refined wax of pattern, as shown in Figure 2.Make high-purity stone by way of heating under (101KPa) in atmospheric conditions later
Wax melts, and is then switched off heat source, natural cooling so that flexible top layer and flexible bottom layer are pasted naturally, as shown in figure 3, last same
Sample can obtain testing the flexible wearable baroceptor in different air pressure sections.
Embodiment 4
First by PDMS base fluids and crosslinking agent with 10:1 ratio is uniformly mixed, and by the way of vacuumizing, and is excluded molten
Ready PDMS mixed liquors are spin-coated on the silicon chip with microstructure and prepare flexibility and have by the bubble in liquid later
The film of microstructure has the one side of microstructure to apply last layer PEDOT using the method to instil is tilted in the film later：
The sample prepared is placed on half an hour in 80 DEG C of vacuum drying chamber so that PEDOT by PSS solution later：PSS solution is solid
It is melted into film, and is perfectly covered in microstructural surfaces.Reselection successively deposits 3 nanometers of Cr by high temperature deposition method later
Film, the PET film of 5 nanometers of Au films coat the high paraffin refined wax of suitable pattern, as shown in Figure 2 as flexible bottom layer on this layer.Later
In atmospheric conditions under (101KPa), made by way of heating high-purity paraffin melting, is then switched off heat source, natural cooling,
So that flexible top layer and flexible bottom layer are pasted naturally, as shown in figure 3, the last flexibility that can equally obtain testing different air pressure sections
Wearable baroceptor.
By embodiment 1-4 it can be found that the flexible wearable air pressure transmission prepared by the above-mentioned technical proposal of the present invention
Sensor can it is stable and accurate test different zones air pressure, it is sensitive to air pressure change, at the same can by modulate encapsulate when it is true
Reciprocal of duty cycle, it is final realize device can test scope modulation.
In addition, scheme of the inventor referring also to embodiment 1-4, to the flexible top layer of unlike material, unlike material
The packaging technology etc. of flexible bottom layer and different condition is tested, and has equally been made and can be tested different air pressure change sections
Flexible wearable baroceptor.
It should be noted that the attached drawing of the present embodiment is all made of very simplified form and uses non-accurate ratio,
It is only used for convenience, lucidly aids in illustrating the embodiment of the present invention.
The technology contents and technical characteristic of the present invention have revealed that as above, however those skilled in the art still may base
Make various replacements and modification without departing substantially from spirit of that invention, therefore, the scope of the present invention in teachings of the present invention and announcement
It should be not limited to the revealed content of embodiment, and should include various replacements and modification without departing substantially from the present invention, and be this patent Shen
Please claim covered.
Claims (22)
1. a kind of flexible wearable baroceptor, it is characterised in that including：
Flexible top layer, have first surface and with the opposite facing second surface of first surface, the second surface have microcosmic knot
Structure, the microstructure can be directed to the variation of born pressure size and make sensitive distinguishable response, the microcosmic knot
Structure is electrically connected to a power source；
Flexible bottom layer, has a third surface, and at least described third surface is conductive, and the third surface and the microcosmic knot
Structure is in electrical contact；
And it is formed in the sealed air chamber between the flexible top layer and flexible bottom layer, at least local room of the sealed air chamber
Wall is formed by at least regional area of the second surface and at least regional area on the third surface, and the sealed air chamber
Interior air pressure reaches setting vacuum degree.
2. flexible wearable baroceptor according to claim 1, it is characterised in that：The microstructure at least can
Different degrees of and distinguishable deformation is generated for the different pressures born.
3. flexible wearable baroceptor according to claim 1, it is characterised in that：The microstructure includes being formed
In a plurality of protruding portions of the second surface；Preferably, the shape of the protruding portion includes reverse pyramid；Preferably, institute
Stating microstructural surfaces has conductive layer.
4. flexible wearable baroceptor according to claim 1, it is characterised in that：The first surface is equipped with first
Electrode, the microstructure are electrically connected to a power source by the first electrode；Preferably, the first surface is covered with conduction
Layer, the first electrode are set on the conductive layer.
5. flexible wearable baroceptor according to claim 1, it is characterised in that：The flexible top layer is integrally led
Electricity.
6. flexible wearable baroceptor according to claim 1, it is characterised in that：The flexible bottom layer includes flexibility
Substrate and second electrode on a flexible substrate is covered, at least regional area of the second electrode surface constitutes the third
Surface；Preferably, the second electrode includes being formed in the conductive layer on the flexible substrates surface；Preferably, the conductive layer
Including ITO layer.
7. flexible wearable baroceptor according to claim 1, it is characterised in that further include annular packing material, institute
It states annular packing material to be set between flexible top layer and flexible bottom layer, and the annular packing material and the second surface are extremely
Few regional area and at least regional area on the third surface are enclosed the sealed air chamber.
8. flexible wearable baroceptor according to claim 7, it is characterised in that：The annular packing material and institute
The outer peripheral edge portion of flexible top layer is stated around sealed connection.
9. flexible wearable baroceptor according to claim 5, it is characterised in that：The flexible top layer includes flexibility
Conductive film, the flexible nonconductive film filled with conductive filler and microstructural surfaces are equipped with the flexible nonconductive of conductive layer
Any one in substrate；Preferably, the thickness of the flexible top layer is at 200 μm or less；Preferably, the conductive filler packet
Include metal nanoparticle and/or c-based nanomaterial；Preferably, the c-based nanomaterial includes carbon nanotube, carbon black and stone
Any one in black alkene or two or more combinations；Preferably, the carbon nanotube includes multi-walled carbon nanotube；
And/or the flexible bottom layer includes that flexible conductive film and surface are provided in the flexible nonconductive substrate of conductive layer
Any one；Preferably, the thickness of the flexible bottom layer is at 500 μm or less.
10. flexible wearable baroceptor according to claim 9, it is characterised in that：The flexible conductive film
Material includes flexible conductive polymer；And/or the material of the flexible nonconductive film includes flexible nonconductive polymer；With/
Or, the material of the flexible nonconductive substrate includes flexible nonconductive polymer；Preferably, the flexible nonconductive polymer packet
Include polyethylene terephthalate and/or dimethyl silicone polymer.
11. flexible wearable baroceptor according to claim 1, it is characterised in that：The vacuum of the sealed air chamber
Degree is 0~101KPa；And/or the air pressure test scope of the flexible wearable baroceptor is 20~101KPa；And/or
The operating voltage of the flexible wearable baroceptor is 5V or less.
12. flexible wearable baroceptor according to claim 9, it is characterised in that：The annular packing material
Shape is identical as the shape of flexible top layer；Preferably, the annular packing material includes alite paste, especially preferably hot melt adhesive；
Especially preferred, the hot melt adhesive includes colloid of the fusing point less than flexible bottom layer and the glass transition temperature of flexible top layer；Especially
It is preferred, and the hot melt adhesive includes paraffin.
13. a kind of preparation method of flexible wearable baroceptor, it is characterised in that including：
Prepare flexible top layer and flexible bottom layer respectively, the flexible top layer have first surface and with first surface opposite facing the
There is microstructure, the microstructure can be directed to the variation of born pressure size and make for two surfaces, the second surface
Go out sensitive distinguishable response, the microstructure is electrically connected to a power source, the flexible bottom layer has third surface, at least institute
It is conductive to state third surface, and the third surface and the microstructure is in electrical contact；
Under vacuum, the third surface of the second surface of the flexible top layer and flexible bottom layer is oppositely arranged, and carried out
Encapsulation, to form sealed air chamber in at least regional area on at least regional area of the second surface and the third surface,
Obtain the flexible wearable baroceptor.
14. preparation method according to claim 13, it is characterised in that including：
Flexible top layer and flexible bottom layer are prepared respectively；
Annular packing material is coated on the surface of the flexible bottom layer, covers the flexibility on the annular packing material later
Top layer；
It is warming up to the melt temperature of annular packing material under vacuum, and keeps setting time, closes heat source later, keeps
Vacuum, natural cooling so that flexible top layer bonds under vacuum with flexible bottom layer, in at least office of the second surface
At least regional area on portion region and the third surface forms sealed air chamber, obtains the flexible wearable baroceptor；
Preferably, the melt temperature is less than 80 DEG C；Preferably, the setting time is within 2min.
15. preparation method according to claim 13, it is characterised in that：The vacuum degree of the vacuum condition be 0~
101KPa；And/or the air pressure test scope of the flexible wearable baroceptor is 20~101KPa；And/or it is described soft
Property wearable baroceptor operating voltage be 5V or less；And/or the sensitivity of the flexible wearable baroceptor is
0.087KPa-1~5.25KPa-1.
16. preparation method according to claim 13, it is characterised in that：The microstructure can at least be directed to and be born
Different pressures and generate different degrees of and distinguishable deformation；Preferably, the microstructure includes being formed in described the
A plurality of protruding portions on two surfaces；Preferably, the shape of the protruding portion includes reverse pyramid；Preferably, the microcosmic knot
Structure surface has conductive layer.
17. preparation method according to claim 13, it is characterised in that：The flexible bottom layer includes flexible substrates and covers
If second electrode on a flexible substrate, at least regional area of the second electrode surface constitutes the third surface；It is preferred that
, the second electrode includes being formed in the conductive layer on the flexible substrates surface；Preferably, the conductive layer includes ITO layer.
18. preparation method according to claim 13, it is characterised in that：The flexible top layer include flexible conductive film,
Flexible nonconductive film and microstructural surfaces filled with conductive filler are equipped in the flexible nonconductive substrate of conductive layer
Any one；And/or the flexible bottom layer includes the flexible nonconductive substrate that flexible conductive film and surface are provided with conductive layer
In any one.
19. preparation method according to claim 18, it is characterised in that：The material of the flexible conductive film includes flexibility
Conducting polymer；And/or the material of the flexible nonconductive film includes flexible nonconductive polymer；And/or the flexibility
The material of nonconductive substrate includes flexible nonconductive polymer；Preferably, the flexible nonconductive polymer includes poly- to benzene two
Formic acid second diester and/or dimethyl silicone polymer；Preferably, the conductive filler includes carbon nanotube；Preferably, the carbon
Nanotube includes multi-walled carbon nanotube.
20. preparation method according to claim 19, it is characterised in that including：Multi wall is added into dimethyl silicone polymer
Carbon nanotube, it is evenly dispersed, mixing material is formed, the mixing material is spun on by the silicon with microstructure using spin-coating method
On piece obtains the flexible top layer with microstructure；Preferably, the quality of the multi-walled carbon nanotube and dimethyl silicone polymer
Than being 1：100~5：100.
21. preparation method according to claim 13, it is characterised in that：The shape and flexible top of the annular packing material
The shape of layer is identical；Preferably, the annular packing material includes alite paste, especially preferably hot melt adhesive；It is especially preferred, institute
It includes colloid of the fusing point less than flexible bottom layer and the glass transition temperature of flexible top layer to state hot melt adhesive；It is especially preferred, it is described
Hot melt adhesive includes paraffin.
22. the flexible wearable baroceptor described in any one of claim 1-12 is in the purposes of air pressure detection field.
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