CN106768515B - Differential type pressure cell and its method of production based on double hamburger structures - Google Patents
Differential type pressure cell and its method of production based on double hamburger structures Download PDFInfo
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- CN106768515B CN106768515B CN201710032959.7A CN201710032959A CN106768515B CN 106768515 B CN106768515 B CN 106768515B CN 201710032959 A CN201710032959 A CN 201710032959A CN 106768515 B CN106768515 B CN 106768515B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
Abstract
The present invention relates to a kind of differential type pressure cell and its method of production based on double hamburger structures, belongs to field of sensing technologies.Differential type pressure cell based on double hamburger structures includes the highly conductor phase content list hamburger structure sheaf being made of window encapsulating film, highly conductor phase content pressure-sensitive film, hot-setting adhesive and small electrode encapsulating film and low conductive phase content list hamburger structure sheaf for being made of large electrode encapsulating film, low conductive phase content pressure-sensitive film, hot-setting adhesive and window encapsulating film.The adverse effect that temperature exports pressure cell can be reduced using highly conductor phase content list hamburger structure sheaf and low conductive phase content list hamburger structure sheaf as the adjacent bridge arm of electric bridge.Using method development proposed by the present invention the differential type pressure cell based on double hamburger structures number of electrodes than traditional based on the few of single hamburger structure, be conducive to simplify component structure, in order to be mounted on small space, it is suitable for the fields such as the narrow interlayer pressure measurement of military and civil equipment or the realization of robot finger tip tactile.
Description
Technical field
The invention belongs to field of sensing technologies, are related specifically to narrow interlayer pressure measurement.
Background technique
Not only there is piezoresistive characteristic by the conductive polymer composite that conductive nano powder and macromolecule matrix are constituted, and
And there is workability and good flexibility.Therefore, more and more scientific research institutions are all developing based on this composite material
Flexible pressure-sensitive element to realize the pressure measurement of modern national defense and industrial circle, such as: the narrow interlayer pressure of large scale equipment is surveyed
Amount and the development of artificial electron's skin etc..Since the resistance of this composite material has temperature dependency, caused by temperature meeting
Pressure cell output shift.So how to reduce the influence that temperature exports pressure cell is the current critical issue in the field.
The resistance of the pressure-sensitive subelement of highly conductor phase content and the pressure-sensitive subelement of low conductive phase content with pressure trend mutually instead
It varies with temperature that trend is identical, therefore can be used based on the differential bridge of both pressure-sensitive subelements and reduce as caused by temperature
Pressure cell output shift.Since traditional pressure-sensitive subelement all uses single hamburger structure, increase the quantity meeting of pressure-sensitive subelement
Cause sensing probe increasingly complex.For example, four electrodes are then needed according to half-bridge differential form, than traditional single hamburger structure
Number of electrodes increases one times.But the narrow space of sensor can be installed in many engineer applications, therefore, need to simplify pressure
The structure of quick subelement, can be installed in the structure of narrow space to complete measurement task.
Summary of the invention
The purpose of the present invention is the shortcomings to overcome prior art, propose a kind of differential type based on double hamburger structures
Pressure cell and its method of production.The differential type pressure cell based on double hamburger structures includes the highly conductor phase content list Chinese
Fort structure sheaf and low conductive phase content list hamburger structure sheaf, highly conductor phase content list hamburger structure sheaf are led by window encapsulating film, height
Electric phase content pressure-sensitive film, hot-setting adhesive and small electrode encapsulating film are constituted, and low conductive phase content list hamburger structure sheaf is encapsulated by large electrode
Film, low conductive phase content pressure-sensitive film, hot-setting adhesive and window encapsulating film are constituted.
The method of production of the flexible piezoresistance sensor based on built-in electrode the following steps are included:
In the electrode and its lead conduct that the side of first insulation film is a length of 3.36 centimetres laminating, width is 5.12 centimetres
Large electrode encapsulating film；In the electrode that the side of second insulation film is a length of 0.38 centimetre laminating, width is 0.59 centimetre and its draw
Line is as small electrode encapsulating film；In the electrode that the side of third insulation film is a length of 3.36 centimetres laminating, width is 5.12 centimetres
And its lead, and in the window that the side of the third not laminating electrode of insulation film opens a length of 0.38 centimetre, width is 0.59 centimetre,
It is exposed by window in the side of not laminating electrode to make the laminating electrode on third insulation film, and ensures the window
Axle center is overlapped with the laminating electrode axle center on third insulation film, and then completes the preparation of window encapsulating film；By small electrode
Encapsulating film is placed in spare on rotating platform, and ensures that the laminating side for having electrode is upward；
Carbon black, room temperature vulcanized silicone rubber and n-hexane that average grain diameter is 30 nanometers are mixed by 1: 8: 100 volume ratio,
Disperse carbon black in the mixed solution being made of room temperature vulcanized silicone rubber and n-hexane using mechanical stirring and sonic oscillation, to
After n-hexane volatilization, the carbon black filled silicon rubber composite material of highly conductor phase content is formed；The carbon black of highly conductor phase content is filled out
Silicon rubber composite material is filled to instill on the electrode for the small electrode encapsulating film being fixed on rotating platform；Highly conductor phase content
Carbon black filled silicon rubber composite material spin coating ensures the carbon black filled silicon rubber composite wood of highly conductor phase content at required thickness
Material is completely covered on the electrode of small electrode encapsulating film；Carbon black filled silicon rubber composite material to highly conductor phase content vulcanizes
After molding, the carbon black filled silicon rubber composite material of the highly conductor phase content except the electrode of small electrode encapsulating film is removed, it is remaining
The electrode for being covered on small electrode encapsulating film on the carbon black filled silicon rubber composite material of highly conductor phase content led as height
The highly conductor phase content pressure-sensitive film of electric phase content list hamburger structure sheaf；Highly conductor phase content pressure-sensitive film on small electrode encapsulating film
Hot-setting adhesive is applied on the insulation film of surrounding, window encapsulating film is covered on highly conductor phase content pressure-sensitive film and hot-setting adhesive, and
Ensure the window of window encapsulating film with highly conductor phase content pressure-sensitive film face and the laminating electrode on window encapsulating film is not covering
The part that the side of composite electrode is exposed by window is completely attached to highly conductor phase content pressure-sensitive film, utilizes flexible material hot pressing
Sealing machine carries out packaging by hot pressing to window encapsulating film, highly conductor phase content pressure-sensitive film, hot-setting adhesive and small electrode encapsulating film, and then complete
At the highly conductor phase content list Chinese being made of window encapsulating film, highly conductor phase content pressure-sensitive film, hot-setting adhesive and small electrode encapsulating film
The preparation of fort structure sheaf；
The fixation of highly conductor phase content list hamburger structure sheaf is spare on the rotating platform, and make laminating on window encapsulating film
Electrode side it is upward；Carbon black, room temperature vulcanized silicone rubber and n-hexane that average grain diameter is 30 nanometers are pressed to 1: 16: 180 body
Product makes carbon black in the mixed solution being made of room temperature vulcanized silicone rubber and n-hexane than mixing using mechanical stirring and sonic oscillation
Middle dispersion forms the carbon black filled silicon rubber composite material of low conductive phase content after n-hexane volatilization；By low conductive phase content
Carbon black filled silicon rubber composite material instill the rotating platform for being fixed with highly conductor phase content list hamburger structure sheaf it
On, the carbon black filled silicon rubber composite material spin coating of low conductive phase content at required thickness, and ensure low conductive phase content
Carbon black filled silicon rubber composite material be completely covered on the window encapsulating film of highly conductor phase content list hamburger structure sheaf electrode it
On；After the carbon black filled silicon rubber composite material sulfidization molding of low conductive phase content, except the electrode for removing window encapsulating film
Part, the carbon black filled silicon rubber composite material of the low conductive phase content on the remaining electrode for being covered on window encapsulating film
Low conductive phase content pressure-sensitive film as low conductive phase content list hamburger structure sheaf；Window around low conductive phase content pressure-sensitive film
Apply hot-setting adhesive on the insulation film of mouthful encapsulating film, by large electrode encapsulating film be covered on low conductive phase content pressure-sensitive film and hot-setting adhesive it
On, and ensure electrode and low conductive phase content pressure-sensitive film face and the full contact of large electrode encapsulating film, utilize flexible material heat
Press seal is installed to highly conductor phase content list hamburger structure sheaf, low conductive phase content pressure-sensitive film and hot-setting adhesive and large electrode encapsulating film
Packaging by hot pressing is carried out, is made of with completion large electrode encapsulating film, low conductive phase content pressure-sensitive film, hot-setting adhesive and window encapsulating film
The preparation of low conductive phase content list hamburger structure sheaf, and then complete to be contained by highly conductor phase content list hamburger structure sheaf and low conductive phase
Measure the preparation for the differential type pressure cell based on double hamburger structures that single hamburger structure sheaf is constituted.
The features of the present invention and effect:
Utilize the differential type pressure cell based on double hamburger structures of method preparation of the invention comprising highly conductor phase
The volume ratio of the carbon black and room temperature vulcanized silicone rubber of content pressure-sensitive film and low conductive phase content pressure-sensitive film be by many experiments and
Analysis obtains, it can be ensured that the resistance of highly conductor phase content pressure-sensitive film and low conductive phase content pressure-sensitive film with pressure variation tendency
On the contrary and variation with temperature is identical, therefore can make the adjacent bridge arm of an electric bridge and then reduce temperature drift and increase sensitivity.It is high
Conductive phase content list hamburger structure sheaf and low conductive phase content list hamburger structure sheaf shared window encapsulating film, with traditional based on list
The differential type pressure cell of hamburger structure is compared, and is saved an electrode, is more advantageous to and simplifies component structure, and then be applied to more
Add narrow space, is realized especially suitable for the narrow interlayer pressure measurement of large-scale military and civil equipment or robot finger tip tactile
Equal fields.
Detailed description of the invention
Fig. 1 (A) is the laminating top view for having electrode side of large electrode encapsulating film.
Fig. 1 (B) is the sectional view of large electrode encapsulating film.
Fig. 2 (A) is the laminating top view for having electrode side of small electrode encapsulating film.
Fig. 2 (B) is the sectional view of small electrode encapsulating film.
Fig. 3 (A) is the laminating top view for having electrode side of window encapsulating film.
Fig. 3 (B) is the sectional view of window encapsulating film.
Fig. 3 (C) is the top view for being provided with window side of window encapsulating film.
Fig. 4 is the sectional view of highly conductor phase content list hamburger structure sheaf.
Fig. 5 is the sectional view of the differential type pressure cell based on double hamburger structures.
In Fig. 1-Fig. 5, a represents the insulating film (that is: first insulating film) of large electrode encapsulating film；B represents laminating in big electricity
Electrode on the insulating film of pole encapsulating film；C represents the laminating lead on the insulating film of large electrode encapsulating film；D represents small electrode
The insulating film (that is: second insulating film) of encapsulating film；E represents the laminating electrode on the insulating film of small electrode encapsulating film；F is represented
The laminating lead on the insulating film of small electrode encapsulating film；G represents the insulating film (that is: third insulating film) of window encapsulating film；h
Represent the laminating electrode on the insulating film of window encapsulating film；I represents the laminating lead on the insulating film of window encapsulating film；j1
Represent the window that the side of not laminating electrode is opened on the insulating film in window encapsulating film；J2 represents laminating on window encapsulating film
The part that is exposed in the side of not laminating electrode by window of electrode；K represents highly conductor phase content pressure-sensitive film；1 represents position
Hot-setting adhesive between small electrode encapsulating film and window encapsulating film；M represents low conductive phase content pressure-sensitive film；N, which is represented, is located at window
Hot-setting adhesive between encapsulating film and large electrode encapsulating film.
Specific embodiment
Illustrate the development side of the differential type pressure cell proposed by the present invention based on double hamburger structures with reference to embodiments
Method:
In the electrode b and its lead c that the side of first insulation film a is a length of 3.36 centimetres laminating, width is 5.12 centimetres
As large electrode encapsulating film；In the electrode e that the side of second insulation film d is a length of 0.38 centimetre laminating, width is 0.59 centimetre
And its lead f is as small electrode encapsulating film；The side of third insulation film g is a length of 3.36 centimetres laminating, width is 5.12 lis
The electrode h and its lead i of rice, and a length of 0.38 centimetre, width 0.59 are opened in the side of the third not laminating electrode of insulation film g
Centimetre window j1, keep the laminating electrode h on third insulation film g naked by window j1 in the side of not laminating electrode
Dew, and ensure that the axle center window j1 is overlapped with the laminating axle center electrode h on third insulation film g, and then complete window
The preparation of mouth encapsulating film；Small electrode encapsulating film is placed in spare on rotating platform, and ensures that the laminating side for having electrode is upward；
Carbon black, room temperature vulcanized silicone rubber and n-hexane that average grain diameter is 30 nanometers are mixed by 1: 8: 100 volume ratio,
Disperse carbon black in the mixed solution being made of room temperature vulcanized silicone rubber and n-hexane using mechanical stirring and sonic oscillation, to
After n-hexane volatilization, the carbon black filled silicon rubber composite material of highly conductor phase content is formed；The carbon black of highly conductor phase content is filled out
Silicon rubber composite material is filled to instill on the electrode e for the small electrode encapsulating film being fixed on rotating platform；Highly conductor phase content
Carbon black filled silicon rubber composite material spin coating at required thickness, and ensure that the carbon black filled silicon rubber of highly conductor phase content is compound
Material is completely covered on the electrode e of small electrode encapsulating film；Carbon black filled silicon rubber composite material to highly conductor phase content
After sulfidization molding, the carbon black filled silicon rubber composite material of the highly conductor phase content except the electrode of small electrode encapsulating film is removed,
The carbon black filled silicon rubber composite material conduct of highly conductor phase content on the remaining electrode for being covered on small electrode encapsulating film
The highly conductor phase content pressure-sensitive film k of highly conductor phase content list hamburger structure sheaf；Highly conductor phase content on small electrode encapsulating film
Hot-setting adhesive 1 is applied on insulation film around pressure-sensitive film k, and window encapsulating film is covered on highly conductor phase content pressure-sensitive film k and thermosetting
On glue 1, and ensure the window j1 and highly conductor phase content pressure-sensitive film k face and laminating in window encapsulating film of window encapsulating film
On electrode connect completely in the part j2 and highly conductor phase content pressure-sensitive film k that the side of not laminating electrode is exposed by window
Touching encapsulates window encapsulating film, highly conductor phase content pressure-sensitive film k, hot-setting adhesive 1 and small electrode using flexible material packaging by hot pressing machine
Film carries out packaging by hot pressing, and then completes by window encapsulating film, highly conductor phase content pressure-sensitive film, hot-setting adhesive and small electrode encapsulating film structure
At highly conductor phase content list hamburger structure sheaf preparation；
The fixation of highly conductor phase content list hamburger structure sheaf is spare on the rotating platform, and make laminating on window encapsulating film
The side electrode h it is upward；Carbon black, room temperature vulcanized silicone rubber and n-hexane that average grain diameter is 30 nanometers are pressed to 1: 16: 180 body
Product makes carbon black in the mixed solution being made of room temperature vulcanized silicone rubber and n-hexane than mixing using mechanical stirring and sonic oscillation
Middle dispersion forms the carbon black filled silicon rubber composite material of low conductive phase content after n-hexane volatilization；By low conductive phase content
Carbon black filled silicon rubber composite material instill the rotating platform for being fixed with highly conductor phase content list hamburger structure sheaf it
On, the carbon black filled silicon rubber composite material spin coating of low conductive phase content at required thickness, and ensure low conductive phase content
Carbon black filled silicon rubber composite material be completely covered on the window encapsulating film of highly conductor phase content list hamburger structure sheaf electrode h it
On；After the carbon black filled silicon rubber composite material sulfidization molding of low conductive phase content, except the electrode h for removing window encapsulating film
Part, the carbon black filled silicon rubber composite wood of the low conductive phase content on the remaining electrode h for being covered on window encapsulating film
Expect the low conductive phase content pressure-sensitive film m as low conductive phase content list hamburger structure sheaf；Around low conductive phase content pressure-sensitive film m
Window encapsulating film insulation film on apply hot-setting adhesive n, large electrode encapsulating film is covered on low conductive phase content pressure-sensitive film m and heat
On solid glue n, and ensure large electrode encapsulating film electrode b and low conductive phase content pressure-sensitive film m face and full contact, utilization it is soft
Property material packaging by hot pressing machine to highly conductor phase content list hamburger structure sheaf, low conductive phase content pressure-sensitive film m and hot-setting adhesive n and big
Electrode package film carries out packaging by hot pressing, to complete by large electrode encapsulating film, low conductive phase content pressure-sensitive film m, hot-setting adhesive n and window
The preparation for low conductive phase content list hamburger structure sheaf that encapsulating film is constituted, and then complete by highly conductor phase content list hamburger structure sheaf
The preparation of the differential type pressure cell based on double hamburger structures constituted with low conductive phase content list hamburger structure sheaf.
Embodiment
In the copper electrode and its copper that the side of first Kapton is a length of 3.36 centimetres laminating, width is 5.12 centimetres
Lead is as large electrode encapsulating film；The side of second Kapton is a length of 0.38 centimetre laminating, width is 0.59 centimetre
Copper electrode and its copper lead as small electrode encapsulating film；In laminating a length of 3.36 lis of the side of third Kapton
Rice, the copper electrode h and its copper lead that width is 5.12 centimetres, and opened in the side of the third not laminating copper electrode of Kapton
A length of 0.38 centimetre, the window j 1 that width is 0.59 centimetre are covering the laminating copper electrode on third Kapton not
The side for closing copper electrode is exposed by window, and ensures the window axle center with laminating on third Kapton
Copper electrode axle center is overlapped, and then completes the preparation of window encapsulating film；Small electrode encapsulating film is placed in spare on rotating platform and true
It is upward to protect the laminating side for having electrode；
Carbon black, room temperature vulcanized silicone rubber and n-hexane that average grain diameter is 30 nanometers are mixed by 1: 8: 100 volume ratio,
Disperse carbon black in the mixed solution being made of room temperature vulcanized silicone rubber and n-hexane using mechanical stirring and sonic oscillation, to
After n-hexane volatilization, the carbon black filled silicon rubber composite material of highly conductor phase content is formed；The carbon black of highly conductor phase content is filled out
Silicon rubber composite material is filled to instill on the electrode for the small electrode encapsulating film being fixed on rotating platform；Highly conductor phase content
Carbon black filled silicon rubber composite material spin coating ensures the carbon black filled silicon of highly conductor phase content at the thin slice with a thickness of 80 microns
Rubber composite material is completely covered on the electrode of small electrode encapsulating film；Carbon black filled silicon rubber to highly conductor phase content is multiple
After condensation material sulfidization molding, the carbon black filled silicon rubber for removing the highly conductor phase content except the electrode of small electrode encapsulating film is compound
Material, the carbon black filled silicon rubber composite material of the highly conductor phase content on the remaining electrode for being covered on small electrode encapsulating film
Highly conductor phase content pressure-sensitive film as highly conductor phase content list hamburger structure sheaf；Highly conductor phase on small electrode encapsulating film contains
Hot-setting adhesive is applied on Kapton around amount pressure-sensitive film, window encapsulating film is covered on highly conductor phase content pressure-sensitive film and heat
On solid glue, and ensure the window and highly conductor phase content pressure-sensitive film k face and laminating on window encapsulating film of window encapsulating film
The part that is exposed in the side of not laminating electrode by window of electrode and highly conductor phase content pressure-sensitive film completely attach to, utilize
Flexible material packaging by hot pressing machine carries out heat to window encapsulating film, highly conductor phase content pressure-sensitive film, hot-setting adhesive and small electrode encapsulating film
Press seal dress, and then complete to be led by the height that window encapsulating film, highly conductor phase content pressure-sensitive film, hot-setting adhesive and small electrode encapsulating film are constituted
The preparation of electric phase content list hamburger structure sheaf；
The fixation of highly conductor phase content list hamburger structure sheaf is spare on the rotating platform, and make laminating on window encapsulating film
Electrode side it is upward；Carbon black, room temperature vulcanized silicone rubber and n-hexane that average grain diameter is 30 nanometers are pressed to 1: 16: 180 body
Product makes carbon black in the mixed solution being made of room temperature vulcanized silicone rubber and n-hexane than mixing using mechanical stirring and sonic oscillation
Middle dispersion forms the carbon black filled silicon rubber composite material of low conductive phase content after n-hexane volatilization；By low conductive phase content
Carbon black filled silicon rubber composite material instill the rotating platform for being fixed with highly conductor phase content list hamburger structure sheaf it
On, the carbon black filled silicon rubber composite material spin coating of low conductive phase content at the thin slice with a thickness of 80 microns, and ensure low lead
The carbon black filled silicon rubber composite material of electric phase content is completely covered on the window encapsulation of highly conductor phase content list hamburger structure sheaf
On the electrode of film；After the carbon black filled silicon rubber composite material sulfidization molding of low conductive phase content, window encapsulating film is removed
Electrode except part, the carbon black filled silicon rubber of the low conductive phase content on the remaining electrode for being covered on window encapsulating film
Low conductive phase content pressure-sensitive film of the glue composite material as low conductive phase content list hamburger structure sheaf；It is pressure-sensitive in low conductive phase content
Hot-setting adhesive is applied on the Kapton of window encapsulating film around film, large electrode encapsulating film is covered on low conductive phase content pressure
On quick film and hot-setting adhesive, and ensure electrode and low conductive phase content pressure-sensitive film face and the full contact of large electrode encapsulating film,
Using flexible material packaging by hot pressing machine to highly conductor phase content list hamburger structure sheaf, low conductive phase content pressure-sensitive film and hot-setting adhesive
Packaging by hot pressing is carried out with large electrode encapsulating film, to complete by large electrode encapsulating film, low conductive phase content pressure-sensitive film, hot-setting adhesive and window
The preparation for low conductive phase content list hamburger structure sheaf that mouth encapsulating film is constituted, and then complete by highly conductor phase content list hamburger structure
The preparation for the differential type pressure cell based on double hamburger structures that layer and low conductive phase content list hamburger structure sheaf are constituted.
Claims (1)
1. a kind of method of production of the differential type pressure cell based on double hamburger structures, which is characterized in that this method includes following
Step:
In the electrode and its lead that the side of first insulation film is a length of 3.36 centimetres laminating, width is 5.12 centimetres as big electricity
Pole encapsulating film；Make in the electrode and its lead that the side of second insulation film is a length of 0.38 centimetre laminating, width is 0.59 centimetre
For small electrode encapsulating film；In the electrode that the side of third insulation film is a length of 3.36 centimetres laminating, width is 5.12 centimetres and its
Lead, and in the window that the side of the third not laminating electrode of insulation film opens a length of 0.38 centimetre, width is 0.59 centimetre, make to cover
The electrode closed on third insulation film is exposed by window in the side of not laminating electrode, and ensures the window axle center
It is overlapped with the laminating electrode axle center on third insulation film, and then completes the preparation of window encapsulating film；Small electrode is encapsulated
Film is placed in spare on rotating platform, and ensures that the laminating side for having electrode is upward；
Carbon black, room temperature vulcanized silicone rubber and n-hexane that average grain diameter is 30 nanometers are mixed by 1: 8: 100 volume ratio, utilized
Mechanical stirring and sonic oscillation disperse carbon black in the mixed solution being made of room temperature vulcanized silicone rubber and n-hexane, to just oneself
After alkane volatilization, the carbon black filled silicon rubber composite material of highly conductor phase content is formed；By the carbon black filled silicon of highly conductor phase content
Rubber composite material instills on the electrode for the small electrode encapsulating film being fixed on rotating platform；The carbon black of highly conductor phase content
Filled silicon rubber composite material spin coating ensures that the carbon black filled silicon rubber composite material of highly conductor phase content is complete at required thickness
All standing is on the electrode of small electrode encapsulating film；Carbon black filled silicon rubber composite material sulfidization molding to highly conductor phase content
Afterwards, the carbon black filled silicon rubber composite material of the highly conductor phase content except the electrode of small electrode encapsulating film is removed, it is remaining to cover
The carbon black filled silicon rubber composite material of the highly conductor phase content on the electrode of small electrode encapsulating film is covered as highly conductor phase
The highly conductor phase content pressure-sensitive film of content list hamburger structure sheaf；Around the highly conductor phase content pressure-sensitive film on small electrode encapsulating film
Insulation film on apply hot-setting adhesive, window encapsulating film is covered on highly conductor phase content pressure-sensitive film and hot-setting adhesive, and is ensured
The window and highly conductor phase content pressure-sensitive film face and the laminating electrode on window encapsulating film of window encapsulating film are in not laminating electricity
The part that the side of pole is exposed by window is completely attached to highly conductor phase content pressure-sensitive film, utilizes flexible material packaging by hot pressing
Machine to window encapsulating film, highly conductor phase content pressure-sensitive film, hot-setting adhesive and small electrode encapsulating film carry out packaging by hot pressing, and then complete by
Highly conductor phase content list hamburger knot that window encapsulating film, highly conductor phase content pressure-sensitive film, hot-setting adhesive and small electrode encapsulating film are constituted
The preparation of structure layer；
The fixation of highly conductor phase content list hamburger structure sheaf is spare on the rotating platform, and make the laminating electricity on window encapsulating film
Pole side is upward；Carbon black, room temperature vulcanized silicone rubber and n-hexane that average grain diameter is 30 nanometers are pressed to 1: 16: 180 volume ratio
Mixing divides carbon black in the mixed solution being made of room temperature vulcanized silicone rubber and n-hexane using mechanical stirring and sonic oscillation
It dissipates, after n-hexane volatilization, forms the carbon black filled silicon rubber composite material of low conductive phase content；By the charcoal of low conductive phase content
Black filled silicon rubber composite material instillation is described to be fixed on the rotating platform of highly conductor phase content list hamburger structure sheaf,
The carbon black filled silicon rubber composite material spin coating of low conductive phase content ensures that the carbon black of low conductive phase content is filled out at required thickness
It fills on the electrode for the window encapsulating film that silicon rubber composite material is completely covered on highly conductor phase content list hamburger structure sheaf；To low
After the carbon black filled silicon rubber composite material sulfidization molding of conductive phase content, the part except the electrode of window encapsulating film is removed,
The carbon black filled silicon rubber composite material of low conductive phase content on the remaining electrode for being covered on window encapsulating film is as low
The low conductive phase content pressure-sensitive film of conductive phase content list hamburger structure sheaf；Window encapsulation around low conductive phase content pressure-sensitive film
Hot-setting adhesive is applied on the insulation film of film, large electrode encapsulating film is covered on low conductive phase content pressure-sensitive film and hot-setting adhesive, and
Electrode and low conductive phase content pressure-sensitive film face and the full contact for ensuring large electrode encapsulating film, utilize flexible material packaging by hot pressing
Machine carries out hot pressing to highly conductor phase content list hamburger structure sheaf, low conductive phase content pressure-sensitive film, hot-setting adhesive and large electrode encapsulating film
Encapsulation, to complete the low conductive phase being made of large electrode encapsulating film, low conductive phase content pressure-sensitive film, hot-setting adhesive and window encapsulating film
The preparation of content list hamburger structure sheaf, and then complete by highly conductor phase content list hamburger structure sheaf and low conductive phase content list hamburger
The preparation for the differential type pressure cell based on double hamburger structures that structure sheaf is constituted.
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