CN107830893A - A kind of multi-functional microfluid flexible sensor - Google Patents
A kind of multi-functional microfluid flexible sensor Download PDFInfo
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- CN107830893A CN107830893A CN201711061055.3A CN201711061055A CN107830893A CN 107830893 A CN107830893 A CN 107830893A CN 201711061055 A CN201711061055 A CN 201711061055A CN 107830893 A CN107830893 A CN 107830893A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
Abstract
A kind of multi-functional microfluid flexible sensor, is related to sensor.Provided with flexible substrate, microfluid and electrode, flexible substrate includes upper matrix and lower substrate, and upper lower substrate is gas permeable matrix, and fluid channel of different shapes is carried in upper matrix, electrode is carried in lower substrate；The microfluid is located inside the fluid channel of upper matrix, and the electrode is located at lower substrate.Available for measurement structure in-plane deformation, body structure surface normal pressure, Pneumatic pressure, ambient oxygen concentration and temperature, when for measurement structure in-plane deformation and body structure surface normal pressure, microfluid is conducting liquid inside fluid channel, microfluid flexible sensor is affixed on body structure surface, when structure stress acts on, the shape of microfluid also changes so as to cause sensor resistance to change, the magnitude relationship deformed by demarcating resistance variations and body structure surface, and then the deformation that structure occurred is calculated according to the change of measurement sensor resistance.Low manufacture cost, measurable variable are more, high sensitivity.
Description
Technical field
The present invention relates to sensor, more particularly, to based on MEMS technology, can be integrated in any labyrinth surface, be used for
Normal pressure, the in-plane deformation of structure suffered by measurement structure, it can also be used to measure a kind of more work(of gas componant, temperature and humidity
Can microfluid flexible sensor.
Background technology
Primary information resource of the sensor as control system, its application have penetrated into industrial production, Aero-Space, ocean
The key areas such as detection, environmental protection, medical diagnosis, bioengineering, space development and smart home.To a certain extent
Say, sensor is the critical component for determining a system performance and performance indications.At present, sensor is mainly used in every field
Detect the parameters such as the in-plane deformation of structure, surface pressing, the gas componant under Service Environment, temperature, humidity.
If being presently used for the sensor main resistance strain gage of measurement structure in-plane deformation and surface pressing, its principle is
The change strained in structure is converted into resistance strain gage resistance variations.By development for many years, the making work of resistance strain gage
Skill maturation, low manufacture cost, measurement accuracy are high, and yet forms both effective temperature compensation, but due to resistance
The sensing original cost of foil gauge is wire/paper tinsel, and it bears, and deformability is poor, and when moderate finite deformation occurs for structure, resistance strain gage is golden
Fracture failure easily occurs for category silk/paper tinsel, causes measurement to fail；Furthermore resistance strain gage can only be in measurement structure in-plane deformation and face
Pressure, normal pressure that can not be suffered by measurement structure surface, for the measurement of Flight Vehicle Structure surface Pneumatic pressure, skyscraper wind
The key areas such as pressure measurement its helpless ([1] Pan Xi armies country resistance strain gage and mechanical quantity sensor general situation of development [J]
Sensor technology, 1982, (03):23-37).
As the development of MEMS technology and new material, new technology are constantly applied, emerge in recent years a collection of new
Flexible sensor, mainly there is novel graphite alkene flexible sensor ([2] J Yang, Q Ran, D Wei, et al.Three-
dimensional conformal graphene microstructure for flexible and highly
sensitive electronic skin[J].Nanotechnology.2017,28(11):115501), microfluid sensor
([3]J C Yeo,Kenry,J Yu,et al.Triple-State Liquid-Based Microfluidic Tactile
Sensor with High Flexibility,Durability,and Sensitivity[J].ACS Sensors.2016,1
(5):543-551).If novel graphite alkene sensor main deposits one by the method for chemical vapor deposition on flexible substrate
Layer has certain thickness graphene, then encapsulated moulding, and its principle is similar to resistance strain gage, by the change of sensor institute stress
Be converted to sensor resistance change.Novel graphite alkene sensor, due to its encapsulating material and graphene sensing layer be all it is flexible,
It can be used for measurement structure surface suffered by face in pressure and normal pressure, when stress acts on, sensor easily deform into
And causing its resistance to change, the relation by establishing resistance variations and institute's stress size can draw the size of institute's stress.
Microfluid sensor, by the way that conducting liquid is injected in the good flexible microfluidic road of advance comprising and encapsulated moulding.When sensor by
The effect of power and conducting liquid shape also changes when deforming, in its fluid channel, and then cause microfluid sensor electric
Resistance is changed, and by demarcating the mathematical relationship of resistance variations and institute's stress size, institute is calculated by the resistance variations measured
The size of stress.Although above two flexible sensor can pressure and normal pressure in measurement structure face, be all to rely on
The deformation of sensor itself causes the size of change stress to demarcate of resistance, and not only sensor thickness is big, and sensitivity
It is low.
The content of the invention
It is an object of the invention to for existing sensor above shortcomings, there is provided and measurement accuracy is high, stability is good,
Any labyrinth surface can be integrated in, for normal pressure suffered by measurement structure, the in-plane deformation of structure, it can also be used to measure
A kind of multi-functional microfluid flexible sensor of gas componant, temperature and humidity.
The present invention is provided with flexible substrate, microfluid and electrode, and the flexible substrate includes upper matrix and lower substrate, it is described on
Matrix and lower substrate are gas permeable matrix, and fluid channel of different shapes is carried in upper matrix, electrode is carried in lower substrate；Institute
State microfluid to be located inside the fluid channel of upper matrix, the electrode is located at lower substrate.
The present invention can be used for measurement structure in-plane deformation, body structure surface normal pressure, Pneumatic pressure, ambient oxygen concentration and
Temperature, when for measurement structure in-plane deformation and body structure surface normal pressure, microfluid is conducting liquid (bag inside fluid channel
Include liquid metal, salting liquid, conductive mixed solution etc.), microfluid flexible sensor is affixed on body structure surface, when structure stress is made
Used time, the shape of microfluid also changes so as to cause sensor resistance to change, by demarcating resistance variations and structure
The magnitude relationship of areal deformation, and then the deformation that structure occurred is calculated according to the change of measurement sensor resistance.
When for measuring Pneumatic pressure, microfluid is ionic liquid inside fluid channel, and microfluid flexible sensor is pasted
In body structure surface, when body structure surface is acted on by Pneumatic pressure, due to the gas permeability of flexible substrate, the oxygen in air is through soft
Property matrix and ionic liquid occur chemical reaction generation superoxipe ion, so as to change the electrical conductivity of ionic liquid.Determined by Henry
Rule understands that the oxygen concentration dissolved in the size and ionic liquid of Pneumatic pressure is a positively related relation, so establishing gas
The mathematical relationship of dynamic pressure size-oxygen concentration-ionic liquid conductance three, by the change for measuring ionic liquid conductance
And then calculate the size of Pneumatic pressure suffered by body structure surface；
When measuring oxygen concentration, microfluid is ionic liquid inside fluid channel, when oxygen concentration changes in environment
When, the oxygen concentration of microfluid is infiltrated into by flexible substrate can also change, and be led so establishing oxygen concentration-ionic liquid
The mathematical relationship of both electric rates, the size of ambient oxygen concentration is calculated by measuring the change of ionic liquid conductance；
When measuring temperature, microfluid can work as environment so that conducting liquid can also be ionic liquid inside fluid channel
When temperature changes, the conductance and micro-channel structure of microfluid can all change, calibration sensor resistance or conduction
The change of rate and the relation of temperature, the temperature of environment can be calculated by the size of measurement sensor resistance or conductance.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention；
Fig. 2 is the measurement structure in-plane deformation of the embodiment of the present invention and the schematic diagram of normal pressure；
Fig. 3 is the measurement Pneumatic pressure of the embodiment of the present invention and the schematic diagram of oxygen concentration；
Fig. 4 is the schematic diagram of the measurement temperature of the embodiment of the present invention；
Fig. 5 is measurement structure surface pressing field, temperature field and the strain field distribution figure of the embodiment of the present invention.
Embodiment
Following examples will the invention will be further described with reference to accompanying drawing.
Referring to Fig. 1~5, the embodiment of the present invention is provided with flexible substrate 3, microfluid 2 and electrode 4, and the flexible substrate 3 includes
Upper matrix 31 and lower substrate 32, the upper matrix 31 and lower substrate 32 are gas permeable matrix, with difference in upper matrix 31
The fluid channel 1 of shape, electrode 4 is carried in lower substrate 32；The microfluid 2 is located inside the fluid channel 1 of upper matrix 31, the electricity
Pole 4 is located on lower substrate 32.
The present invention can be used for measurement structure in-plane deformation, body structure surface normal pressure, Pneumatic pressure, ambient oxygen concentration and
Temperature, when for measurement structure in-plane deformation and body structure surface normal pressure, microfluid is conducting liquid (bag inside fluid channel
Include liquid metal, salting liquid, conductive mixed solution etc.), microfluid flexible sensor is affixed on body structure surface, when structure stress is made
Used time, the shape of microfluid also changes so as to cause sensor resistance to change, by demarcating resistance variations and structure
The magnitude relationship of areal deformation, and then the deformation that structure occurred is calculated according to the change of measurement sensor resistance.
Microfluid flexible sensor provided by the invention：1) fluid channel formpiston is made on a silicon substrate by photoetching technique；
2) dimethyl silicone polymer (PDMS) and curing agent are uniformly mixed by 1 ︰ 10, then pours into above-mentioned mould and naked silicon chip respectively
In, it is placed in being incubated 2h in 80 DEG C of vacuum drying ovens；3) PDMS being cured is removed from the molds, electrode is affixed in naked silicon chip
Solidify PDMS films both ends；4) by oxygen plasma activating technology, the two panels PDMS with fluid channel and with electrode is activated
And it is bonded；5) microfluid is injected in fluid channel using syringe, and seals inlet.Microfluid sensor is as shown in Figure 1.
As shown in Fig. 2 microfluid sensor is integrated in body structure surface, and when structure stress P is acted on, the shape of conducting liquid
Shape is also changed so as to cause sensor resistance to change, and microfluid sensor resistance is measured in real time by Keithley 2400
Change, the magnitude relationship deformed by demarcating resistance variations with body structure surface, and then according to the change meter of measurement sensor resistance
Calculate the deformation that structure is occurred.
As shown in figure 3, microfluid sensor is integrated in structure A surfaces, when structure A surfaces are by Pneumatic pressure P0Effect
When, due to the gas permeability of flexible substrate, air can enter inside fluid channel, wherein oxygen O2It can occur with ionic liquid M reversible
Redox reaction generation superoxipe ion, so as to change ionic liquid M electrical conductivity (resistance), by establishing Pneumatic pressure
The mathematical relationship of size-oxygen concentration-ionic liquid conductance three, by measure the change of ionic liquid M conductances and then
Calculate the size of Pneumatic pressure suffered by structure A surfaces.Similarly, when measuring oxygen concentration, establish oxygen concentration-ionic liquid and lead
The mathematical relationship of electric rate three, the size of ambient oxygen concentration is calculated by measuring the change of ionic liquid M conductances.
In figure 3, mark B represents other, and N represents glue-line.
As shown in figure 4, when environment temperature changes, the conductance and micro-channel structure of microfluid can all become
Change, the change of calibration sensor resistance or conductance and the relation of temperature, pass through measurement sensor resistance or conductance
Size can calculate the temperature of environment.In Fig. 4, label L represents anion, and G represents cation.
As shown in figure 5, an appropriate number of microfluid sensor Q is integrated in body structure surface, it is real based on above-mentioned sensing principle
When gather sensor resistance change, the data restructural of comprehensive all the sensors goes out body structure surface pressure field, strain field and temperature
.Δ R/R is the resistance change rate that sensor is stressed when acting on；P is body structure surface pressure；ε strains for body structure surface；
T is body structure surface temperature.
Claims (8)
- A kind of 1. multi-functional microfluid flexible sensor, it is characterised in that provided with flexible substrate, microfluid and electrode, the flexibility Matrix includes upper matrix and lower substrate, and fluid channel of different shapes is carried in upper matrix, electrode is carried in lower substrate；The miniflow Body is located inside the fluid channel of upper matrix, and the electrode is located at lower substrate.
- 2. a kind of multi-functional microfluid flexible sensor as claimed in claim 1, it is characterised in that the upper matrix and lower substrate It is gas permeable matrix.
- 3. a kind of multi-functional microfluid flexible sensor as claimed in claim 1, it is characterised in that for becoming in measurement structure face Shape, body structure surface normal pressure, Pneumatic pressure, ambient oxygen concentration and temperature, when for measurement structure in-plane deformation and structure During surface normal pressure, microfluid is conducting liquid inside fluid channel, and microfluid flexible sensor is affixed on into body structure surface, works as knot When structure stress acts on, the shape of microfluid also changes so as to cause sensor resistance to change, and is become by demarcating resistance Change the magnitude relationship with body structure surface deformation, the deformation that structure occurred is calculated according to the change of measurement sensor resistance.
- 4. a kind of multi-functional microfluid flexible sensor as claimed in claim 3, it is characterised in that the conducting liquid includes liquid State metal, salting liquid, conductive mixed solution.
- 5. a kind of multi-functional microfluid flexible sensor as claimed in claim 1, it is characterised in that when for measuring Pneumatic pressure When, fluid channel inside microfluid is ionic liquid, microfluid flexible sensor is affixed on into body structure surface, when body structure surface is by pneumatic When pressure acts on, due to the gas permeability of flexible substrate, through flexible substrate and ionic liquid chemistry occurs for the oxygen in air instead Superoxipe ion should be generated, changes the electrical conductivity of ionic liquid.
- A kind of 6. multi-functional microfluid flexible sensor as claimed in claim 1, it is characterised in that the size of Pneumatic pressure and from The oxygen concentration dissolved in sub- liquid is positive correlation, establishes Pneumatic pressure size-oxygen concentration-ionic liquid conductance three The mathematical relationship of person, the big of Pneumatic pressure suffered by body structure surface is calculated by measuring the change of ionic liquid conductance It is small.
- 7. a kind of multi-functional microfluid flexible sensor as claimed in claim 1, it is characterised in that micro- when measuring oxygen concentration Microfluid is ionic liquid inside runner, and when oxygen concentration changes in environment, microfluid is infiltrated into by flexible substrate Oxygen concentration can also change, the mathematical relationship of oxygen concentration-both ionic liquid conductances is established, by measuring ion The change of liquid conduction rate and then the size for calculating ambient oxygen concentration.
- A kind of 8. multi-functional microfluid flexible sensor as claimed in claim 1, it is characterised in that when measuring temperature, fluid channel Internal microfluid makes conducting liquid be ionic liquid, when environment temperature changes, the conductance and fluid channel knot of microfluid Structure can all change, and the change of calibration sensor resistance or conductance and the relation of temperature, pass through measurement sensor resistance Or the size of conductance is to calculate the temperature of environment.
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109374159A (en) * | 2018-09-28 | 2019-02-22 | 深圳大学 | A kind of multi-walled carbon nanotube piezoresistance sensor and preparation method thereof |
| CN109443610A (en) * | 2018-11-01 | 2019-03-08 | 重庆大学 | remote interactive monitoring device based on liquid metal sensor and monitoring method thereof |
| CN109540223A (en) * | 2019-01-08 | 2019-03-29 | 肇庆学院 | The device and method monitored for pipe fluid pressure, temperature, pressure fluctuation |
| CN109927070A (en) * | 2019-04-17 | 2019-06-25 | 苏州柔性智能科技有限公司 | Multi-functional software handgrip for articles sorting |
| CN110039533A (en) * | 2019-04-17 | 2019-07-23 | 苏州柔性智能科技有限公司 | For detecting the multi-functional software manipulator of fruit maturity |
| CN110132479A (en) * | 2019-05-06 | 2019-08-16 | 中国科学院理化技术研究所 | For measuring the microsensor of microfluid pressure |
| CN110361118A (en) * | 2019-05-08 | 2019-10-22 | 中国科学院宁波材料技术与工程研究所 | A kind of flexible sensor, preparation method and application method |
| CN110388997A (en) * | 2018-04-20 | 2019-10-29 | 中国科学院理化技术研究所 | A kind of pliable pressure sensor of composite liquefied metal electrode |
| CN110501086A (en) * | 2019-08-01 | 2019-11-26 | 电子科技大学 | A kind of flexibility temperature sensor and preparation method thereof |
| CN110553766A (en) * | 2018-05-30 | 2019-12-10 | 浙江清华柔性电子技术研究院 | Force sensor and method for manufacturing the same |
| CN111998985A (en) * | 2019-09-30 | 2020-11-27 | 南方科技大学 | Microchannel pressure sensor and microfluidic chip |
| WO2021005254A1 (en) * | 2019-07-05 | 2021-01-14 | Universidad Del País Vasco / Euskal Herriko Unibertsitatea | Microfluidic sensor for the detection of analytes |
| CN112539850A (en) * | 2020-12-04 | 2021-03-23 | 中国电力科学研究院有限公司 | Flexible double-parameter sensor for parallel measurement of temperature and strain and measurement method |
| EP3822225A4 (en) * | 2018-07-13 | 2022-04-13 | Institute of Flexible Electronics Technology of Thu, Zhejiang | Microfluidic device and preparation method therefor, and microfluidic system |
| CN109540223B (en) * | 2019-01-08 | 2024-04-19 | 肇庆学院 | Device and method for monitoring fluid pressure, temperature and pressure pulsation in pipeline |
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| CN110388997A (en) * | 2018-04-20 | 2019-10-29 | 中国科学院理化技术研究所 | A kind of pliable pressure sensor of composite liquefied metal electrode |
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| CN110553766A (en) * | 2018-05-30 | 2019-12-10 | 浙江清华柔性电子技术研究院 | Force sensor and method for manufacturing the same |
| EP3822225A4 (en) * | 2018-07-13 | 2022-04-13 | Institute of Flexible Electronics Technology of Thu, Zhejiang | Microfluidic device and preparation method therefor, and microfluidic system |
| CN109374159A (en) * | 2018-09-28 | 2019-02-22 | 深圳大学 | A kind of multi-walled carbon nanotube piezoresistance sensor and preparation method thereof |
| CN109443610A (en) * | 2018-11-01 | 2019-03-08 | 重庆大学 | remote interactive monitoring device based on liquid metal sensor and monitoring method thereof |
| CN109540223A (en) * | 2019-01-08 | 2019-03-29 | 肇庆学院 | The device and method monitored for pipe fluid pressure, temperature, pressure fluctuation |
| CN109540223B (en) * | 2019-01-08 | 2024-04-19 | 肇庆学院 | Device and method for monitoring fluid pressure, temperature and pressure pulsation in pipeline |
| CN109927070A (en) * | 2019-04-17 | 2019-06-25 | 苏州柔性智能科技有限公司 | Multi-functional software handgrip for articles sorting |
| CN110039533A (en) * | 2019-04-17 | 2019-07-23 | 苏州柔性智能科技有限公司 | For detecting the multi-functional software manipulator of fruit maturity |
| CN110132479A (en) * | 2019-05-06 | 2019-08-16 | 中国科学院理化技术研究所 | For measuring the microsensor of microfluid pressure |
| CN110361118A (en) * | 2019-05-08 | 2019-10-22 | 中国科学院宁波材料技术与工程研究所 | A kind of flexible sensor, preparation method and application method |
| WO2021005254A1 (en) * | 2019-07-05 | 2021-01-14 | Universidad Del País Vasco / Euskal Herriko Unibertsitatea | Microfluidic sensor for the detection of analytes |
| ES2802290A1 (en) * | 2019-07-05 | 2021-01-18 | Univ Del Pais Vasco / Euskal Herriko Unibertsitatea | MICROFLUID SENSOR FOR ANALYTES DETECTION (Machine-translation by Google Translate, not legally binding) |
| CN110501086B (en) * | 2019-08-01 | 2020-09-25 | 电子科技大学 | Flexible temperature sensor and preparation method thereof |
| CN110501086A (en) * | 2019-08-01 | 2019-11-26 | 电子科技大学 | A kind of flexibility temperature sensor and preparation method thereof |
| CN111998985A (en) * | 2019-09-30 | 2020-11-27 | 南方科技大学 | Microchannel pressure sensor and microfluidic chip |
| CN112539850A (en) * | 2020-12-04 | 2021-03-23 | 中国电力科学研究院有限公司 | Flexible double-parameter sensor for parallel measurement of temperature and strain and measurement method |
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