CN110361118A - A kind of flexible sensor, preparation method and application method - Google Patents
A kind of flexible sensor, preparation method and application method Download PDFInfo
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- CN110361118A CN110361118A CN201910378441.8A CN201910378441A CN110361118A CN 110361118 A CN110361118 A CN 110361118A CN 201910378441 A CN201910378441 A CN 201910378441A CN 110361118 A CN110361118 A CN 110361118A
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
Abstract
The present invention provides a kind of flexible sensor and preparation method thereof and application methods.The flexible sensor includes flexible and nonconducting substrate, flowable pressure sensitive material and electrode；Channel is arranged in substrate, and flowable pressure sensitive material filling in channels, is formed with the electrode that channel both ends are arranged in and is electrically connected；It also, is in dissymmetrical structure in the flexible substrates thickness direction channel.The flexible substrates structure is simple, application method, when stress is bent, by the change in electric at detecting electrode both ends, not only can get bending angle, but also can get bending direction.
Description
Technical field
The present invention relates to field of sensing technologies, and in particular to a kind of flexible sensor, preparation method and application method.
Background technique
With the development of flexible electronic and wearable device, strain gauge is had been to be concerned by more and more people.
Traditional pressure sensor can be divided into several major class such as piezoelectric type, condenser type, pressure resistance type.Piezoelectric pressure indicator
It is the sensor according to made of piezoelectric effect, with structure is simple, reproducible, precision is higher, sensitivity is good, dynamic range
The advantages that wide, good mechanical performance, but there are signal acquisition circuits it is complicated, at high cost the deficiencies of.Capacitance pressure transducer,
The detection that ambient pressure is realized using the principle that capacitance changes with pressure change, simple, the low in energy consumption, linearity with structure
The advantages that good, small in size.But capacitance-type strain gauge force snesor is vulnerable to the effect of parasitic capacitance in connecting wire, therefore to survey
It is higher to measure circuit requirement.Piezoresistive pressure sensor is changed using the resistance of metal or semiconductor with the variation of ambient pressure
Principle work.The piezoresistive pressure sensor applied at present is mainly silicon substrate pressure sensor, has and is widely used, moves
State range is wide, is conducive to the advantages that integrated.
In practical applications, body to be measured tend to occur to stretch, compression, the deformation such as bending, relative to initial when Bending Deformation
There are different bending directions for state, for example, body to be measured is horizontal positioned when initial, when bending, which exists, to be bent upwards or be turned under
It is bent.Therefore, it is sensitive that the sensor that can not only be detected bending angle, and can detect bending direction will greatly improve detection
Degree.
Summary of the invention
The present invention provides a kind of flexible sensor, can not only detect bending angle, but also can detect bending direction.
The technical scheme is that a kind of flexible sensor, including flexible and nonconducting substrate, flowable pressure
Sensitive material and electrode；
Channel is arranged in the substrate, and flowable pressure sensitive material is filled in the channel, with setting in channel two
The electrode at end forms electrical connection；
The section vertical with the thickness direction of the substrate is known as cross section, positioned at the half thickness position of the substrate
The cross section set is middle shaft cross section, and the substrate is divide into upper part and lower part by middle shaft cross section；The channel is located at substrate
Upper part.
The substrate has flexibility, can occur the deformation such as to stretch, be bent, and the substrate is non-conductive.Described in composition
The material of substrate is unlimited, can be with flexible high molecular material, such as dimethyl silicone polymer (PDMS), polyurethane
(PU), polyimides (PI) etc..
The pressure sensitive material is conductive, and material is unlimited, can be ionic liquid, liquid metal, Yi Jisheng
Manage salt water etc., preferably liquid metal.
The electrode is conductive, and material is unlimited, can be metal material, such as copper wire, spun gold or filamentary silver etc..
The channel is located at the upper part of substrate, that is, along substrate thickness direction, channel is only located at substrate side, in not right
Claim structure.Preferably, the channel is far from middle shaft cross section.
The thickness of the substrate is unlimited, can be micron order, is also possible to grade, can be closed according to practical application request
Reason selection.
The channel shape is unlimited, can be one of linear, fold-line-shaped, curvilinear or several combinations.
Preferably, the thickness millimeter magnitude of the substrate, as further preferred, the substrate with a thickness of 1 milli
- 5 millimeters of rice.
Preferably, the width of the channel is micron dimension, depth is micron dimension, and length is millimeter magnitude.As
Further preferably, the width of the channel be 50 microns -500 microns, depth be 50 microns -200 microns, length be 10 millimeters -
100 millimeters.
The present invention also provides a kind of methods for preparing above-mentioned flexible sensor, specifically: preparation substrate and channel, in channel
The middle flowable pressure sensitive material of injection, then in channel both ends connection electrode.
As a kind of implementation, substrate and channel are prepared using the method for 3D printing.Preferably, by the substrate of liquid
Material successively solidifies, and carries out 3D printing in the method that channel structure position does not solidify and keeps liquid, then extracts wherein liquid out
Base material, obtain substrate and channel.
Channel is arranged using flexible substrates and flowable pressure sensitive material, in flexible substrates in the present invention, will be flowable
Pressure sensitive material filling in channels formed be conductively connected, since the upper part of flexible substrates is arranged in channel, in flexibility
Substrate thickness direction is in dissymmetrical structure, is had the following beneficial effects:
(1) when flexible substrates stress is bent, since by stress, channel resistance changes, detecting electrode two
The change in electric at end can get bending angle；Also, the inventors discovered that due in the present invention by channel along flexible substrates
Thickness direction is set as dissymmetrical structure, thus opposite original state when flexible substrates to the curving of setting channel and to
To setting channel opposite lateral bend when, the resistance R situation of change at electrode both ends is opposite:
When curving of the flexible substrates to setting channel, channel is mainly by action of compressive stress, the electricity at electrode both ends
It hinders R to reduce, therefore Δ R is negative, resistance change rate (Δ R/R × 100%) is negative, and resistance change rate is with bending angle
Substantially it changes linearly；
When opposite lateral bend of the flexible substrates to setting channel, channel is mainly acted on by tensile stress, electrode both ends
Resistance R increases, therefore Δ R is positive number, and resistance change rate (Δ R/R × 100%) is positive number, and resistance change rate is with bending angle
Degree changes linearly substantially；
Therefore, when flexible substrates stress is bent, by the change in electric at detecting electrode both ends, it not only can get bending
Angle, and can get bending direction.The electric signal can be voltage signal, current signal or resistance signal；As excellent
Choosing, using resistance signal.
(2) flexible sensor structure of the invention is simple, can be fitted on body to be measured, and easy to use, high sensitivity,
Detection with especially suitable joint motions, specific application method are as follows:
(2-1) flexible sensor is placed naturally, does not apply stress, is initial state, is tested the electricity of initial state flexible sensor
Hinder R；
(2-2) remaining test condition is identical as above-mentioned steps (1), and relative to initial state, flexible sensor is to setting channel
Curving, test resistance change rate of the sensor under differently curved angle as reference value one；
(2-3) remaining test condition is identical as above-mentioned steps (1), relative to initial state, by flexible sensor to setting ditch
The opposite lateral bend in road tests resistance change rate of the sensor under differently curved angle as reference value two；
In (2-4) actual use, flexible sensor is placed in body surface face to be measured, the lower part point contact measured of substrate is inscribed, and is surveyed
The resistance change rate of flexible sensor is tried, if resistance change rate is positive number, judges curving of the body to be measured to setting channel,
And resistance change rate is compared with reference value one, bending angle corresponding to identical numerical value is actual flexion angle；
If resistance change rate is negative, opposite lateral bend of the body to be measured to setting channel is judged, and by resistance change rate and reference
Value two is compared, and bending angle corresponding to identical numerical value is actual flexion angle.
(3) in the present invention, by the adjustment of substrate thickness and/or channel dimensions, the spirit of sensor can further be adjusted
Sensitivity；In addition, flexible sensor of the invention has stability, to improve the reliability of sensor.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the sensor in the embodiment of the present invention 1.
Fig. 2 is that the sensor in the embodiment of the present invention 1 is bent upwards schematic diagram.
Fig. 3 be when the sensor in the embodiment of the present invention 1 is bent upwards resistance change rate with the variation diagram of bending angle.
Fig. 4 is that the sensor in the embodiment of the present invention 1 is bent downwardly schematic diagram.
Fig. 5 be when the sensor in the embodiment of the present invention 1 is bent upwards resistance change rate with the variation diagram of bending angle.
Fig. 6 is the reperformance test result of the sensor in the embodiment of the present invention 1.
Fig. 7 is that the sensor in the embodiment of the present invention 1 is fitted in human body wrist, with the picture of human body wrist bending motion.
Fig. 8 is the resistance change rate monitoring result of sensor in Fig. 7.
Specific embodiment
Below with reference to embodiment, present invention is further described in detail with attached drawing, it should be pointed out that reality as described below
It applies example to be intended to convenient for the understanding of the present invention, and does not play any restriction effect to it.
Appended drawing reference in Fig. 1 are as follows: substrate 1, channel 2, pressure sensitive material 3, electrode 4.
Flexible sensor structure is as shown in Figure 1, include substrate 1, flowable pressure sensitive material 3 and electrode 4.Substrate
1 setting channel 2, electrode 4 are arranged at channel both ends, and pressure sensitive material 3 is filled in channel 2, form conductive connect with electrode 4
It connects.
As shown in Figure 1, substrate 1 is horizontal positioned, the thickness direction of substrate 1 is Y direction, and the cross section of substrate 1 is parallel to
XZ plane.
In the present embodiment, substrate 1 with a thickness of H, the cross section positioned at the H/2 thickness position of substrate 1 is middle shaft cross section,
Substrate 1 is divide into upper part and lower part by middle shaft cross section；Channel 2 is located at the upper part of substrate 1 and the upper surface close to substrate.
In the present embodiment, the material of substrate 1 is commercial resins (model RS-F2-FLGR-02), with a thickness of 3 millimeters,
Length is 60 millimeters, and width is 20 millimeters.Pressure sensitive material 3 is gallium indium tin liquid metal.The serpentine-like warp architecture of channel, ditch
Road width is 100 microns, and channel depth is 50 microns.Electrode is copper electrode.
The preparation method of above-mentioned flexible sensor includes the following steps:
(1) substrate and channel are prepared
Substrate and channel are prepared using 3D printing method.Using spot size be 140 microns and power is 250 milliwatts
The commercial resins (RS-F2-FLGR-02) of liquid are cured as solid by ultraviolet light.Successively solidification, every layer of cured thickness are 50 micro-
Rice, specific as follows:
Firstly, solidification size are as follows: 60 millimeters of length, 20 millimeters of width, solidify 40 times, formed and consolidated with a thickness of 2 millimeters
State；
Then, as shown in Figure 1, design width is 100 microns, the channel for the serpentine bend shape that depth is 50 microns is adopted
The channel is prepared with selectivity solidification, that is, resin does not solidify and is still in a liquid state at channel, remaining position is formed with a thickness of 0.05
The solid-state of millimeter；
Finally, solidification size are as follows: 60 millimeters of length, 20 millimeters of width, solidify 19 times, formed with a thickness of 0.95 millimeter
Solid-state.
(2) injection pressure sensitive material
The liquid resin in step (1) is extracted out using syringe, channel is formed, then injects gallium indium tin liquid metal
In the channel.
(3) electrode is prepared
Copper electrode is inserted into step (2) treated channel both ends.
The resistance R of flexible sensor obtained above is tested using semiconductor parameter instrument, specific test method is as follows:
(1) as shown in Fig. 2, flexible sensor is horizontal positioned, do not apply stress, be initial state, test the electricity at electrode both ends
Hinder R.
(2) remaining test condition is identical as above-mentioned steps (1), as shown in Fig. 2, flexible sensor is bent upwards, that is, to
The curving of channel is set, tests the variation of electrode both ends resistance R, test results are shown in figure 3, it can be seen that is bent up
Resistance R reduces after song, and Δ R is negative, and resistance change rate (Δ R/R × 100%) linearly becomes substantially with bending angle
Change, is recorded in the resistance change rate under differently curved angle as reference value one.
(3) remaining test condition is identical as above-mentioned steps (1), as shown in figure 4, flexible sensor is bent downwardly, that is, to
The opposite side bending of channel is set, tests the variation of electrode both ends resistance R, test results are shown in figure 5, it can be seen that
Resistance R increases after lower bending, and Δ R is positive number, and resistance change rate (Δ R/R × 100%) is substantially linear with bending angle
Variation, is recorded in the resistance change rate under differently curved angle as reference value two.
(4) remaining test condition is identical as above-mentioned steps (1), carries out following movement A to flexible sensor:
Movement A: flexible sensor is bent downwardly, that is, be bent to the opposite side of setting channel to 40 °, then restore
For initial state, the variation of electrode both ends resistance R is tested in the process；
It repeats above-mentioned movement A 68 times, obtains resistance change rate as shown in fig. 6, showing the flexible sensor in Bending Deformation
When have variation stability.Similarly, the also variation stability having the same when the flexible sensor is bent upwards.
In actual use, which is fitted in human body wrist position, and the lower part tap touching human body of substrate
Wrist, as shown in Figure 7.The resistance R of the flexible sensor, remaining test condition and above-mentioned steps are tested using semiconductor parameter instrument
(1) identical, test results are shown in figure 8.As can be seen from Figure 8: when initial, human body wrist is horizontal, and then wrist is bent up
Song, then it is horizontal, it is then bent downwardly, the resistance change rate curve measured is as shown in Figure 8, it will thus be seen that
It is initial state 1. position Δ R/R is 0；2. position Δ R/R is negative, then judge that wrist is bent upwards, according to Δ R/
The numerical value of R is compared with reference value one, it can be deduced that the angle value that wrist is bent upwards；3. position Δ R/R is 0, then judge
Wrist restPoses；4. position Δ R/R is positive number, then judge that wrist is bent downwardly, according to the numerical value of Δ R/R, with reference
Value two is compared, it can be deduced that the angle value that wrist is bent upwards.
Embodiment 2:
In the present embodiment, flexible sensor structure and the flexible sensor structure in embodiment 1 are essentially identical, different
It is substrate 1 with a thickness of 5 millimeters.
In the present embodiment, flexible sensor structure and the flexible sensor structure in embodiment 1 are essentially identical, different
It is substrate 1 with a thickness of 5 millimeters.
The resistance R of flexible sensor obtained above, specific test method and implementation are tested using semiconductor parameter instrument
Example 1 is identical, as follows:
(1) as shown in Fig. 2, flexible sensor is horizontal positioned, do not apply stress, be initial state, test the electricity at electrode both ends
Hinder R.
(2) remaining test condition is identical as above-mentioned steps (1), as shown in Fig. 2, flexible sensor is bent upwards, that is, to
The curving of channel is set, tests the variation of electrode both ends resistance R, test results are shown in figure 3, it can be seen that is bent up
Resistance R reduces after song, and Δ R is negative, and resistance change rate (Δ R/R × 100%) linearly becomes substantially with bending angle
Change, is recorded in the resistance change rate under differently curved angle as reference value one.In addition, it can be seen that compared with Example 1,
Resistance change rate under differently curved angle in the present embodiment is more sensitive.
(3) remaining test condition is identical as above-mentioned steps (1), as shown in figure 4, flexible sensor is bent downwardly, that is, to
The opposite side bending of channel is set, tests the variation of electrode both ends resistance R, test results are shown in figure 5, it can be seen that
Resistance R increases after lower bending, and Δ R is positive number, and resistance change rate (Δ R/R × 100%) is substantially linear with bending angle
Variation, is recorded in the resistance change rate under differently curved angle as reference value two.In addition, it can be seen that with 1 phase of embodiment
Than the resistance change rate under differently curved angle in the present embodiment is more sensitive.
(4) remaining test condition is identical as above-mentioned steps (1), carries out following movement A to flexible sensor:
Movement A: flexible sensor is bent downwardly, that is, be bent to the opposite side of setting channel to 50 °, then restore
For initial state, the variation of electrode both ends resistance R is tested in the process；
It repeats above-mentioned movement A 70 times, it is similar to Figure 6 to obtain resistance change rate, shows the flexible sensor in Curved
There is variation stability when change.Similarly, the also variation stability having the same when the flexible sensor is bent upwards.
In the present embodiment, the flexible sensor is arranged on body to be measured in actual use, and the lower part of substrate
Contact measured body tests the resistance of the flexible sensor using semiconductor parameter instrument, remaining test condition and above-mentioned steps (1) phase
Together, same as Example 1, bending direction and bending angle when bending motion are carried out by the available body to be measured of test result
Degree.
Technical solution of the present invention is described in detail in embodiment described above, it should be understood that the above is only
For specific embodiments of the present invention, it is not intended to restrict the invention, all any modifications made in spirit of the invention,
Supplement or similar fashion substitution etc., should all be included in the protection scope of the present invention.
Claims (12)
1. a kind of flexible sensor, it is characterized in that: including flexible and nonconducting substrate, flowable pressure sensitive material and electricity
Pole；
The substrate is arranged channel, and in the channel, and channel both ends are arranged in flowable pressure sensitive material filling
Electrode forms electrical connection；
The section vertical with the thickness direction of the substrate is known as cross section, positioned at the half thickness position of the substrate
Cross section is middle shaft cross section, and the substrate is divide into upper part and lower part by middle shaft cross section；The channel is located at the top of substrate
Point.
2. flexible sensor as described in claim 1, it is characterized in that: when flexible substrates are to the curving of setting channel, it is electric
The resistance R at pole both ends reduces；When opposite lateral bend of the flexible substrates to setting channel, the resistance R at electrode both ends increases.
3. flexible sensor as described in claim 1, it is characterized in that: when flexible substrates are to the curving of setting channel, it is electric
The resistance R at pole both ends reduces, and resistance change rate changes linearly substantially with bending angle；When flexible substrates to setting channel
Opposite lateral bend when, the resistance R at electrode both ends increases, and resistance change rate changes linearly substantially with bending angle.
4. flexible sensor as described in claim 1, it is characterized in that: the channel is far from middle shaft cross section.
5. flexible sensor as described in claim 1, it is characterized in that: the material of the substrate is one of PDMS, PU, PI
Or it is several.
6. flexible sensor as described in claim 1, it is characterized in that: the pressure sensitive material is ionic liquid, liquid gold
Category or physiological saline.
7. flexible sensor as described in claim 1, it is characterized in that: the channel is linear, fold-line-shaped, it is curvilinear in
One or several kinds of combinations.
8. flexible sensor as described in claim 1, it is characterized in that: the width of the channel is 50 microns -500 microns, it is deep
Degree is 50 microns -200 microns, and length is 10 millimeters -100 millimeters.
9. flexible sensor as described in claim 1, it is characterized in that: the substrate with a thickness of 1 millimeter -5 millimeters.
10. the preparation method of the flexible sensor as described in any claim in claim 1 to 9, it is characterized in that: preparing base
Bottom and channel inject flowable pressure sensitive material in channels, then in channel both ends connection electrode.
11. the preparation method of flexible sensor as claimed in claim 7, it is characterized in that: the method using 3D printing prepares base
Bottom and channel；
Preferably, the base material of liquid is successively solidified, channel structure position do not solidify and keep the method for liquid into
Then row 3D printing extracts the base material of wherein liquid out, obtains substrate and channel.
12. the application method of the flexible sensor as described in any claim in claim 1 to 9, it is characterized in that: including such as
Lower step:
(1) flexible sensor is placed naturally, does not apply stress, is initial state, is tested the resistance of initial state flexible sensor；
(2) remaining test condition is identical as above-mentioned steps (1), and relative to initial state, flexible sensor is to the side of setting channel
Bending, tests resistance change rate of the sensor under differently curved angle as reference value one；
(3) remaining test condition is identical as above-mentioned steps (1), relative to initial state, by flexible sensor to the phase of setting channel
It tosses about bending, tests resistance change rate of the sensor under differently curved angle as reference value two；
(4) in actual use, flexible sensor is placed in body surface face to be measured, the lower part point contact measured of substrate is inscribed, and test is flexible
The resistance change rate of sensor judges curving of the body to be measured to setting channel, and will if resistance change rate is positive number
Resistance change rate is compared with reference value one, and bending angle corresponding to identical numerical value is actual flexion angle；If resistance
Change rate is negative, then judges opposite lateral bend of the body to be measured to setting channel, and by resistance change rate and reference value two into
Row compares, and bending angle corresponding to identical numerical value is actual flexion angle.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111551294A (en) * | 2020-05-21 | 2020-08-18 | 浙江大学 | Flexible pressure sensor based on liquid metal photocuring printing technology |
| CN112179237A (en) * | 2020-09-27 | 2021-01-05 | 神通科技集团股份有限公司 | Automobile stand column outer plate assembly quality detection system |
| CN113074846A (en) * | 2021-03-12 | 2021-07-06 | 电子科技大学 | Micro-channel stress sensor based on structural metamaterial and preparation method thereof |
| CN113203355A (en) * | 2021-03-24 | 2021-08-03 | 厦门大学 | Flexible strain sensor and manufacturing method thereof |
| CN114295255A (en) * | 2021-12-29 | 2022-04-08 | 金陵科技学院 | Flexible pressure sensor based on 3D prints |
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| CN115674276A (en) * | 2022-09-28 | 2023-02-03 | 哈尔滨工业大学 | Triboelectric type variable-stiffness soft paw state monitoring sensor and testing method thereof |
| CN117268250A (en) * | 2023-11-17 | 2023-12-22 | 苏州元脑智能科技有限公司 | Detection device and detection method for PCB and PCB |
| CN117268250B (en) * | 2023-11-17 | 2024-02-20 | 苏州元脑智能科技有限公司 | Detection device and detection method for PCB and PCB |
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