CN203672526U - Flexible three-dimensional force tactile sensor based on piezoresistive and capacitive combination - Google Patents
Flexible three-dimensional force tactile sensor based on piezoresistive and capacitive combination Download PDFInfo
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- CN203672526U CN203672526U CN201320893252.2U CN201320893252U CN203672526U CN 203672526 U CN203672526 U CN 203672526U CN 201320893252 U CN201320893252 U CN 201320893252U CN 203672526 U CN203672526 U CN 203672526U
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Abstract
The utility model discloses a flexible three-dimensional force tactile sensor based on a piezoresistive and capacitive combination. The flexible three-dimensional force tactile sensor comprises an elastic substrate for supporting, a flexible circuit lower layer, a three-dimensional force sensitive array filled with flexible filter around, a flexible circuit upper layer, and an elastic protruding layer for protection, the five portions form a three-dimensional force sensor component advantaged by compact structure, and each three-dimensional force sensitive unit is simultaneously integrated with vertically-arranged force sensitive strain gauges and four sets of vertically-arranged induction capacitors which are respectively sensitive to the vertical formally force and the vertical tangential force. According to the flexible three-dimensional force tactile sensor, characteristics of static nature and dynamic nature are provided, the interference from capacitance coupling caused by external surface metals with the measurement can be reduced, accurate measurement of the three-dimensional force is realized, and the flexible three-dimensional force sensitive unit can be applicable to mechanical and electrical equipment such as artificial limbs, and manipulators etc.
Description
Technical field
The utility model relates to flexible 3 D force-touch sensor, especially relates to a kind of flexible 3 D force-touch sensor based on pressure resistance type and condenser type combination.
Background technology
Touch sensor is that mechanical hand obtains the indispensable means of tactile data, the information providing according to touch sensor, and robot can reliably capture target object, and the further physical characteristics such as its size of perception, shape, weight, soft or hard.Can stick on surface on nonplanar object and accurately detect the flexible 3 D force-touch sensor array of three direction contact forces, intelligent skin becomes mechanical hand and obtains the important tool of the information such as comprehensive grip, moment, slip.
In recent years, " robot flexibility tactile sensing skin " has become the new study hotspot of intelligent robot tactile sensing technical field, the robot flexibility sense of touch skin with perceptional function can strengthen it and under various environment, complete ability meticulous, complex job, improve level of operation and the intelligent level of robot system, the micro-drive machines people of accurate operation under high-level service robot, robot for space and hazardous environment etc. will be produced to important impact.Therefore, research can detect three-dimensional force, and has the flexible touch sensation sensor that is similar to skin elasticity and become the important technology that Sensors in Intelligent Robots further develops.
Condenser type flexible touch sensation sensor has the features such as high sensitivity, dynamic property be good, has a wide range of applications.But the just current known condenser type flexible touch sensation sensor of developing, its capacitive electrode plates is all horizontally disposed.As China national patent of invention (application number 201210037651.9) discloses a kind of based on pressure resistance type and capacitive Bionic flexible tactile sensor array.This sensor is made up of flexible base layer, capacitor layers, piezoresistance layer and surface encapsulation layer from bottom to up.The lower floor of the responsive layer of capacitive force is electric capacity bottom crown, and upper strata forms electric capacity top crown, middle for having the PDMS dielectric layer of picture on surface.In the time that this sensor is attached on the metal parts of robot, due to the existence of metal surface stray capacitance, easily produce capacitive coupling and disturb, affect the three-dimensional force measuring accuracy of touch sensor.
Summary of the invention
The purpose of this utility model is to provide a kind of flexible 3 D force-touch sensor based on pressure resistance type and condenser type combination, can be attached to reliably on various curved surfaces, wherein, capacitive electrode plates is vertically arranged, can reduce the capacity coupled interference that surface metal causes, realize the accurate measurement to three-dimensional force, there is all good features of nature static and dynamic simultaneously.
The technical solution adopted in the utility model is:
The responsive array of three-dimensional force, flexible circuit upper strata and elastic bumps layer that the utility model is filled with flexible filling material by Elastic Foundation bottom, flexible circuit lower floor, surrounding from bottom to up successively form.
Described Elastic Foundation bottom is the flat resin bed of one deck.
Described flexible circuit lower floor, is the flat resin bed that is embedded with conductive rubber line, and conductive rubber line is corresponding with the responsive array of three-dimensional force, and with the responsive foil gauge electrical communication of power.
Described surrounding is filled with the responsive array of three-dimensional force of flexible filling material, is by the responsive cell formation of the identical three-dimensional force of 2 × 2 above structures: include the silicon substrate, insulating elastomer, the four responsive foil gauges of sensitive electrode plate, center sensitive electrode post and power that are stereo hollow shape; Insulating elastomer is positioned at the bottom of the center cavity of silicon substrate; Four blocks of sensitive electrode plates are square profile, are vertically bonded in the inside surface of silicon substrate, and align with the upper surface of silicon substrate; Center sensitive electrode post is vertically bonded in above insulating elastomer, and sensitive electrode plate is just right respectively with separately for four side surfaces of center sensitive electrode post, forms four groups of inductance capacitances; The responsive foil gauge of power is attached to side of insulating elastomer; Between center sensitive electrode post and sensitive electrode plate, leave gap, be equipped with flexible filling material.
Described flexible circuit upper strata is the three-dimensional convex of equal thickness, three-dimensional bulge-structure is identical with the responsive unit of three-dimensional force number, on three-dimensional bulge-structure, have the hole of passing for center sensitive electrode post, the conductive rubber line of the upper surface on flexible circuit upper strata is corresponding with the responsive array of three-dimensional force, and the upper surface of Bing Yu center sensitive electrode post carries out electrical communication; The conductive rubber line orthogonal directions of the lower surface on flexible circuit upper strata is arranged, and carries out electrical communication respectively with the upper surface of four blocks of sensitive electrode plates.
Described elastic bumps layer is the three-dimensional convex film of one deck equal thickness, and three-dimensional bulge-structure is identical with the responsive unit of three-dimensional force number, and elastic bumps layer and flexible circuit upper strata fit tightly.
Move horizontally the battery lead plate spacing that changes four groups of inductance capacitances by center sensitive electrode post, capacitance changes thereupon, for detection of horizontal tangential power.By center sensitive electrode post, the power of vertical direction is transmitted on insulating elastomer, the responsive foil gauge of power dilatation thereupon, resistance value changes, for detection of vertical normal force.
The beneficial effect the utlity model has is:
1), because three-dimensional force sensor adopts single crystal silicon material and forms by the manufacture of MEMS technique, therefore the responsive unit size of each three-dimensional force is little, thereby can realize higher tactual space resolution, and accuracy of detection is high.
2) elastic bumps layer is positioned at the outermost layer of three-dimensional force sensor, and surface has micro-protrusions structure, and electron device and the circuit of sensor internal are not only protected in this design, and effectively improves the Mechanical Sensitivity of sensor.
3) between the sensitive electrode Ban He center sensitive electrode post of the responsive unit of three-dimensional force, leave minim gap, be equipped with flexible filling material.In the time that center sensitive electrode post occurred level moves, effectively impact-absorbing power, and keep existing between capacitor board spacing always.
4) the existing responsive foil gauge of pressure resistance type power that is suitable for measuring static force in three-dimensional force tactile sensing array, has again the capacitance structure that is adapted to measure transition power, can meet static force and the requirement of transition force measurement, has good integration capability.
5) the responsive member of the capacitive force of the utility model design, its capacitive electrode plates is vertically arranged, the capacity coupled impact in various metal surfaces is reduced, more accurate to small force measurement, can be applicable on the electromechanical equipment such as artificial limb, mechanical arm.
Accompanying drawing explanation
Fig. 1 is 3 D force-touch sensor cross section structure schematic diagram of the present utility model.
Fig. 2 is that the utility model hierarchy splits stereographic map.
Fig. 3 is Elastic Foundation bottom schematic diagram of the present utility model.
Fig. 4 is flexible circuit of the present utility model lower floor schematic diagram.
Fig. 5 is that three-dimensional force sensor array of the present utility model is with flexible filling material schematic diagram.
Fig. 6 (a) is the cross section structure schematic diagram of three-dimensional force sensing unit of the present utility model.
Fig. 6 (b) is the schematic top plan view of three-dimensional force sensing unit of the present utility model.
Fig. 7 (a) is the upper surface circuit diagram on flexible circuit of the present utility model upper strata.
Fig. 7 (b) is the lower surface circuit diagram on flexible circuit of the present utility model upper strata.
Fig. 8 is elastic bumps layer schematic diagram of the present utility model.
Fig. 9 is flexible touch sensation sensor stereographic map of the present utility model.
In figure: 1. elastic bumps layer, 2. flexible circuit upper strata, 3. center sensitive electrode post, 4. four blocks of sensitive electrode plates, 5. flexible filling material, 6. flexible circuit lower floor, 7. Elastic Foundation bottom, the 8. responsive foil gauge of power, 9. insulating elastomer, 10. silicon substrate, the responsive array of 11. three-dimensional force.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further illustrated.
As depicted in figs. 1 and 2, the responsive array 11 of three-dimensional force, flexible circuit upper strata 2 and the elastic bumps layer 1 that the utility model is filled with flexible filling material 5 by Elastic Foundation bottom 7, flexible circuit lower floor 6, surrounding from bottom to up successively forms the three-dimensional force sensing member of a compact conformation.
As shown in Figure 3, described Elastic Foundation bottom 7 is the flat resin beds of one deck, is positioned at the bottom of flexible 3 D force-touch sensor, plays protection and insulation.
As shown in Figure 4, described flexible circuit lower floor 6, is the flat resin bed that is embedded with conductive rubber line, and conductive rubber line is corresponding with the responsive array 11 of three-dimensional force, and with the electrical communication of the responsive foil gauge 8 of power.
As shown in Figure 5, described surrounding is filled with the responsive array 11 of three-dimensional force of flexible filling material 5, be by the responsive cell formation of the identical three-dimensional force of 2 × 2 above structures, the utility model adopts the responsive arrays of 4 × 4 three-dimensional force of arranging: include and be the silicon substrate 10, insulating elastomer 9 of stereo hollow shape, four sensitive electrode plates 4, center sensitive electrode post 3 and the responsive foil gauges 8 of power; Insulating elastomer 9 is positioned at the bottom of silicon substrate 10 center cavities; Four blocks of sensitive electrode plates (4) are square profile, are vertically bonded in the inside surface of silicon substrate 10, and align with the upper surface of silicon substrate 10; Center sensitive electrode post 3 is vertically bonded in above insulating elastomer 9, and sensitive electrode plate is just right respectively with separately for four side surfaces of center sensitive electrode post 3, forms four groups of inductance capacitances; The responsive foil gauge 8 of power is attached to a side of insulating elastomer 9, between center sensitive electrode post 3 and four blocks of sensitive electrode plates 4, leaves gap, is equipped with flexible filling material, as shown in Fig. 6 (a), Fig. 6 (b).
By moving horizontally of center sensitive electrode post 3, change the battery lead plate spacing of 4 groups of inductance capacitances, capacitance changes thereupon, for detection of horizontal tangential power.By center sensitive electrode post 3, the power of vertical direction is transmitted on insulating elastomer 9, the responsive foil gauge 8 of power dilatation thereupon, resistance value changes, for detection of vertical normal force.
As shown in Fig. 7 (a), Fig. 7 (b), described flexible circuit upper strata 2 is the three-dimensional convex of equal thickness, three-dimensional bulge-structure is identical with the responsive unit of three-dimensional force number, on three-dimensional bulge-structure, have the hole of passing for center sensitive electrode post 3, the conductive rubber line of the upper surface on flexible circuit upper strata 2 is corresponding with the responsive array 11 of three-dimensional force, the upper surface of Bing Yu center sensitive electrode post 3 carries out electrical communication, the conductive rubber line orthogonal directions of the lower surface on flexible circuit upper strata 2 is arranged, and carries out electrical communication respectively with the upper surface of four blocks of sensitive electrode plates (4).
As shown in Figure 8; described elastic bumps layer 1 is the three-dimensional convex film of one deck equal thickness; three-dimensional bulge-structure is identical with the responsive unit of three-dimensional force number; elastic bumps layer 1 fits tightly with flexible circuit upper strata 2; play circuit insulation, protection internal electrical device, and effectively improve the force sensitivity of three-dimensional touch sensor.
The design and fabrication of flexible 3 D force-touch sensor can be realized in the following way:
According to the demand of certain applications, as range, transducer sensitivity, the accuracy of detection of the spatial resolution requiring, three-dimensional force, require the indexs such as diastrophic degree, determine the size of flexible 3 D force-touch sensor and the size of three-dimensional force sensing unit and the gap between them.The range of three-dimensional force and sensitivity are determined by size and the spacing of sensitive electrode plate 4 in three-dimensional force sensing unit and center sensitive electrode post 3.
Described Elastic Foundation bottom 7, flexible circuit lower floor 2, flexible filling material 5, elastic bumps layer 1, flexible circuit upper strata 6 and insulating elastomer 9 make to realize flexible requirement by flexible resin material; Described sensitive electrode plate 4 adopts copper metal material with center sensitive electrode post 3; Silicon substrate 10 in the responsive array 11 of described three-dimensional force adopts single crystal silicon material.
Elastic bumps layer 1 adopts miromaching manufacture; The flexible PCB manufacturing technology of employing standard is made flexible circuit upper strata 2 and flexible circuit lower floor 6; Adopt MEMS technology to make silicon substrate 10; Center sensitive electrode post 3 and sensitive electrode plate 4 adopt LIGA technology to manufacture moulding; Adopt bonding techniques that center of gravity sensitive electrode post 3 is bonded in to insulating elastomer 9; Adopt bonding techniques or high-performance binder that responsive the each three-dimensional force in three-dimensional force sensor array 11 unit is bonded in above flexible circuit lower floor 6; In the responsive array 11 of flexible circuit upper strata 2 and three-dimensional force, the responsive unit of each three-dimensional force is electrically connected by flip chip bonding; Elastic bumps layer 1 adopts high-performance binder to be bonded in above flexible circuit upper strata 2.So just can obtain flexible 3 D force-touch sensor, as shown in Figure 9.
Claims (7)
1. the flexible 3 D force-touch sensor based on pressure resistance type and condenser type combination, is characterized in that: the responsive array of three-dimensional force (11), flexible circuit upper strata (2) and elastic bumps layer (1) formation that are filled with successively from bottom to up flexible filling material (5) by Elastic Foundation bottom (7), flexible circuit lower floor (6), surrounding.
2. a kind of flexible 3 D force-touch sensor based on pressure resistance type and condenser type combination according to claim 1, is characterized in that: described Elastic Foundation bottom (7) is the flat resin bed of one deck.
3. a kind of flexible 3 D force-touch sensor based on pressure resistance type and condenser type combination according to claim 1, it is characterized in that: described flexible circuit lower floor (6), it is the flat resin bed that is embedded with conductive rubber line, the responsive array of conductive rubber line and three-dimensional force (11) is corresponding, and with responsive foil gauge (8) electrical communication of power.
4. a kind of flexible 3 D force-touch sensor based on pressure resistance type and condenser type combination according to claim 1, it is characterized in that: described surrounding is filled with the responsive array of three-dimensional force (11) of flexible filling material (5), is by the responsive cell formation of the identical three-dimensional force of 2 × 2 above structures: include the responsive foil gauge of silicon substrate (10), insulating elastomer (9), four blocks of sensitive electrode plates (4), center sensitive electrode post (3) and power (8) that is stereo hollow shape; Insulating elastomer (9) is positioned at the bottom of silicon substrate (10) center cavity; Four blocks of sensitive electrode plates (4) are square profile, are vertically bonded in the inside surface of silicon substrate (10), and align with the upper surface of silicon substrate (10); Center sensitive electrode post (3) is vertically bonded in insulating elastomer (9) above, and sensitive electrode plate is just right respectively with separately for four side surfaces of center sensitive electrode post (3), forms four groups of inductance capacitances; The responsive foil gauge of power (8) is attached to (9) sides of insulating elastomer.
5. a kind of flexible 3 D force-touch sensor based on pressure resistance type and condenser type combination according to claim 1, it is characterized in that: described flexible circuit upper strata (2) is the three-dimensional convex of equal thickness, three-dimensional bulge-structure is identical with the responsive unit of three-dimensional force number, on three-dimensional bulge-structure, have the hole of passing for center sensitive electrode post (3), the conductive rubber line of the upper surface on flexible circuit upper strata (2) is corresponding with the responsive array of three-dimensional force (11), the upper surface of Bing Yu center sensitive electrode post (3) carries out electrical communication, the conductive rubber line orthogonal directions of the lower surface on flexible circuit upper strata (2) is arranged, carry out electrical communication with the upper surface of four blocks of sensitive electrode plates (4) respectively.
6. a kind of flexible 3 D force-touch sensor based on pressure resistance type and condenser type combination according to claim 1, it is characterized in that: described elastic bumps layer (1) is the three-dimensional convex film of one deck equal thickness, three-dimensional bulge-structure is identical with the responsive unit of three-dimensional force number, and elastic bumps layer (1) fits tightly with flexible circuit upper strata (2).
7. a kind of flexible 3 D force-touch sensor based on pressure resistance type and condenser type combination according to claim 1, is characterized in that: between center sensitive electrode post (3) and four blocks of sensitive electrode plates (4), leave gap, be equipped with flexible filling material.
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| CN201320893252.2U CN203672526U (en) | 2013-12-31 | 2013-12-31 | Flexible three-dimensional force tactile sensor based on piezoresistive and capacitive combination |
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| CN201320893252.2U CN203672526U (en) | 2013-12-31 | 2013-12-31 | Flexible three-dimensional force tactile sensor based on piezoresistive and capacitive combination |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103743503A (en) * | 2013-12-31 | 2014-04-23 | 浙江大学 | Flexible three-dimensional force touch sensor based on piezoresistive and capacitive combination |
| CN104406722A (en) * | 2014-12-03 | 2015-03-11 | 合肥京东方光电科技有限公司 | Array pressure surface sensing imaging device |
| CN106802200A (en) * | 2017-02-23 | 2017-06-06 | 北京航空航天大学 | A kind of flexible vector tactile and slip sense compound sensor |
| CN107290082A (en) * | 2016-04-11 | 2017-10-24 | 刘垚 | A kind of capacitance type touch sensor |
| CN108613759A (en) * | 2018-05-03 | 2018-10-02 | 佛山琴笙科技有限公司 | A kind of touch sensor skin |
| CN108871628A (en) * | 2018-07-06 | 2018-11-23 | 清华大学 | For detecting the size of power and the flexible apparatus in direction |
| CN109690273A (en) * | 2016-09-13 | 2019-04-26 | 索尼公司 | Sensor, band, electronic equipment and Wristwatch-type electronic equipment |
| CN109791082A (en) * | 2016-09-27 | 2019-05-21 | 索尼公司 | Sensor, electronic equipment, wearable terminal and control method |
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| CN110954251A (en) * | 2019-12-24 | 2020-04-03 | 哈尔滨工业大学 | Pressure-capacitance and piezoresistive coupling proximity sensing and contact force sensor |
| CN111243966A (en) * | 2020-01-14 | 2020-06-05 | 联合微电子中心有限责任公司 | Flexible sensor manufacturing process and flexible sensor |
| CN111307345A (en) * | 2020-03-30 | 2020-06-19 | 天津大学 | Resistance-capacitance series flexible sensor for measuring contact force |
| CN112014003A (en) * | 2019-05-28 | 2020-12-01 | 华中科技大学 | Flexible sensor for measuring human muscle deformation and preparation method thereof |
| CN113776709A (en) * | 2021-08-09 | 2021-12-10 | 济南大学 | Dual-mode flexible touch sensor and preparation method and application thereof |
| CN114112159A (en) * | 2021-11-25 | 2022-03-01 | 山东科技大学 | Resistance-type flexible three-dimensional force sensor based on spring-shaped sensitive unit |
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- 2013-12-31 CN CN201320893252.2U patent/CN203672526U/en not_active Withdrawn - After Issue
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103743503A (en) * | 2013-12-31 | 2014-04-23 | 浙江大学 | Flexible three-dimensional force touch sensor based on piezoresistive and capacitive combination |
| CN104406722A (en) * | 2014-12-03 | 2015-03-11 | 合肥京东方光电科技有限公司 | Array pressure surface sensing imaging device |
| CN104406722B (en) * | 2014-12-03 | 2017-04-26 | 合肥京东方光电科技有限公司 | Array pressure surface sensing imaging device |
| US9823802B2 (en) | 2014-12-03 | 2017-11-21 | Boe Technology Group Co., Ltd. | Array pressure-sensing imaging device |
| CN107290082B (en) * | 2016-04-11 | 2019-12-20 | 刘垚 | Capacitive touch sensor |
| CN107290082A (en) * | 2016-04-11 | 2017-10-24 | 刘垚 | A kind of capacitance type touch sensor |
| CN109690273B (en) * | 2016-09-13 | 2021-06-04 | 索尼公司 | Sensor, belt, electronic device and watch type electronic device |
| CN109690273A (en) * | 2016-09-13 | 2019-04-26 | 索尼公司 | Sensor, band, electronic equipment and Wristwatch-type electronic equipment |
| CN109791082A (en) * | 2016-09-27 | 2019-05-21 | 索尼公司 | Sensor, electronic equipment, wearable terminal and control method |
| CN106802200A (en) * | 2017-02-23 | 2017-06-06 | 北京航空航天大学 | A kind of flexible vector tactile and slip sense compound sensor |
| CN110006468A (en) * | 2017-12-21 | 2019-07-12 | 塔科图特科有限责任公司 | Manufacture the purposes of the method for strain gauged equipment, strain gauged equipment and the equipment |
| CN108613759A (en) * | 2018-05-03 | 2018-10-02 | 佛山琴笙科技有限公司 | A kind of touch sensor skin |
| CN108613759B (en) * | 2018-05-03 | 2020-06-02 | 湖南厚生医疗器械有限公司 | Touch sensor skin |
| CN108871628B (en) * | 2018-07-06 | 2019-06-18 | 清华大学 | For detecting the size of power and the flexible apparatus in direction |
| CN108871628A (en) * | 2018-07-06 | 2018-11-23 | 清华大学 | For detecting the size of power and the flexible apparatus in direction |
| CN112014003A (en) * | 2019-05-28 | 2020-12-01 | 华中科技大学 | Flexible sensor for measuring human muscle deformation and preparation method thereof |
| CN110954251A (en) * | 2019-12-24 | 2020-04-03 | 哈尔滨工业大学 | Pressure-capacitance and piezoresistive coupling proximity sensing and contact force sensor |
| CN111243966A (en) * | 2020-01-14 | 2020-06-05 | 联合微电子中心有限责任公司 | Flexible sensor manufacturing process and flexible sensor |
| CN111307345A (en) * | 2020-03-30 | 2020-06-19 | 天津大学 | Resistance-capacitance series flexible sensor for measuring contact force |
| CN113776709A (en) * | 2021-08-09 | 2021-12-10 | 济南大学 | Dual-mode flexible touch sensor and preparation method and application thereof |
| CN113776709B (en) * | 2021-08-09 | 2023-10-13 | 济南大学 | Dual-mode flexible touch sensor and preparation method and application thereof |
| CN114112159A (en) * | 2021-11-25 | 2022-03-01 | 山东科技大学 | Resistance-type flexible three-dimensional force sensor based on spring-shaped sensitive unit |
| CN114112159B (en) * | 2021-11-25 | 2024-01-19 | 山东科技大学 | Resistance type flexible three-dimensional force sensor based on spring-shaped sensitive unit |
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| C14 | Grant of patent or utility model | ||
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| AV01 | Patent right actively abandoned |
Granted publication date: 20140625 Effective date of abandoning: 20150819 |
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