CN112014003A - Flexible sensor for measuring human muscle deformation and preparation method thereof - Google Patents

Flexible sensor for measuring human muscle deformation and preparation method thereof Download PDF

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CN112014003A
CN112014003A CN201910451135.2A CN201910451135A CN112014003A CN 112014003 A CN112014003 A CN 112014003A CN 201910451135 A CN201910451135 A CN 201910451135A CN 112014003 A CN112014003 A CN 112014003A
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carbon nanotube
nanotube film
walled carbon
flexible sensor
elastomer layer
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CN112014003B (en
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郭家杰
李鑫
李国民
陈明惠
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Huazhong University of Science and Technology
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    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

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Abstract

本发明属于人体运动测量相关技术领域,其公开了一种用于人体肌肉变形测量的柔性传感器及其制备方法,柔性传感器包括第一弹性体层、第二弹性体层、第三弹性体层、第一多壁碳纳米管薄膜及第二多壁碳纳米管薄膜;第一多壁碳纳米管薄膜设置在第三弹性体层上,第二弹性体层设置在第三弹性体层上,且其覆盖第一多壁碳纳米管薄膜;第二多壁碳纳米管薄膜设置在第二弹性体层上,第一弹性体层设置在第二弹性体层上,且其覆盖第二多壁碳纳米管薄膜;第一多壁碳纳米管薄膜与第二多壁碳纳米管薄膜相互垂直设置,且第一多壁碳纳米管薄膜与第二多壁碳纳米管薄膜之间有重叠区域。本发明实现了主被动测量,操作简单,适用性较强。

Figure 201910451135

The invention belongs to the related technical field of human motion measurement, and discloses a flexible sensor for measuring human muscle deformation and a preparation method thereof. The flexible sensor comprises a first elastic body layer, a second elastic body layer, a third elastic body layer, a first multi-wall carbon nanotube film and a second multi-wall carbon nanotube film; the first multi-wall carbon nanotube film is disposed on the third elastomer layer, the second elastomer layer is disposed on the third elastomer layer, and It covers the first multi-wall carbon nanotube film; the second multi-wall carbon nanotube film is provided on the second elastomer layer, the first elastomer layer is provided on the second elastomer layer, and it covers the second multi-wall carbon Nanotube film; the first multi-wall carbon nanotube film and the second multi-wall carbon nanotube film are perpendicular to each other, and there is an overlapping area between the first multi-wall carbon nanotube film and the second multi-wall carbon nanotube film. The invention realizes active and passive measurement, has simple operation and strong applicability.

Figure 201910451135

Description

一种用于人体肌肉变形测量的柔性传感器及其制备方法A flexible sensor for measuring human muscle deformation and its preparation method

技术领域technical field

本发明属于人体运动测量相关技术领域,更具体地,涉及一种用于人体肌肉变形测量的柔性传感器及其制备方法。The invention belongs to the technical field of human body motion measurement, and more particularly, relates to a flexible sensor for measuring human muscle deformation and a preparation method thereof.

背景技术Background technique

如果把人体看作是一台精密的机器,那分布在人体的骨骼肌便是这台机器的驱动器,正常人体大概有650条骨骼肌,这些肌肉是人体骨骼系统的主要固定者和活动者,人体稳定的姿态来源于相互对抗的力之间的平衡,由骨骼肌产生的力是控制姿态与运动之间复杂平衡的主要方式。If the human body is regarded as a precise machine, the skeletal muscles distributed in the human body are the drivers of this machine. The normal human body has about 650 skeletal muscles. These muscles are the main fixers and movers of the human skeletal system. The stable posture of the human body comes from the balance between opposing forces, and the force generated by skeletal muscles is the main way to control the complex balance between posture and movement.

肌肉作为人体的“电机”,既要适应外部复杂的环境,还要受到人体神经系统的调控,肌肉具有非常复杂的结构,每条肌肉都由很多可以产生内力的肌节构成。由于肌肉分布在人体内部,且结构复杂,对于肌肉运动状态的测量在不对人体造成伤害的前提下只能从肌肉外的皮肤表面入手。目前最为成熟的肌肉运动测量方法为肌电图学(EMG)。EMG能够监测到肌肉主动运动时,神经元中所传递的电信号。EMG信号振幅虽然能够用于衡量肌肉力,但这种关系并不稳定,且某些条件下两者并无相关关系,EMG信号容易受到电极配置和大小、以及被测肌肉附近肌肉的干扰等因素的影响,导致信号出现复杂的噪声,难以分析;此外,EMG信号只能测量肌肉的主动运动,在肌肉发生被动运动(不受主动运动控制)时,由于没有电信号的产生故无法测量。相应地,本领域存在着发展一种肌肉主被动状态均可测量的用于人体肌肉变形测量的柔性传感器及其制备方法的技术需求。As the "motor" of the human body, muscles must not only adapt to the complex external environment, but also be regulated by the human nervous system. Muscles have a very complex structure, and each muscle is composed of many sarcomeres that can generate internal force. Because the muscles are distributed inside the human body and the structure is complex, the measurement of the muscle movement state can only start from the skin surface outside the muscle without causing harm to the human body. The most mature method for measuring muscle movement is electromyography (EMG). EMG can monitor the electrical signals transmitted in neurons during active muscle movement. Although EMG signal amplitude can be used to measure muscle force, this relationship is not stable, and there is no correlation between the two under certain conditions. EMG signal is susceptible to factors such as electrode configuration and size, as well as interference from muscles near the measured muscle. In addition, EMG signals can only measure the active movement of the muscle, and when the muscle is passively moved (not controlled by active movement), it cannot be measured because there is no electrical signal. Correspondingly, there is a technical need in the art to develop a flexible sensor for measuring human muscle deformation, which can measure both active and passive states of the muscle, and a preparation method thereof.

发明内容SUMMARY OF THE INVENTION

针对现有技术的以上缺陷或改进需求,本发明提供了一种用于人体肌肉变形测量的柔性传感器及其制备方法,其基于现有肌肉运动状态的测量特点,研究及设计了一种主被动状态均可测量的用于人体肌肉变形测量的柔性传感器及其制备方法。所述柔性传感器以肌肉形变为出发点,对肌肉运动中,肌肉外皮肤多方向的应变与肌肉膨胀进行测量,具体地,该柔性传感器采用多壁碳纳米管(MW-CNTs)薄膜作为电极,以铂催化硅橡胶(Ecoflex)作为弹性体,两层垂直布置的多壁碳纳米管薄膜独立为两个应变传感器,可以测量出平面内相互垂直的两个方向的应变,两层所述多壁碳纳米管薄膜相互重叠的部分构成平行板电容传感器,可以用于测量传感器受到的、垂直于平面的力的信息,由此实现了主被动状态均可测量的功能。此外,所述柔性传感器通过分层成型制作而成,操作简单,易于实施。In view of the above defects or improvement needs of the prior art, the present invention provides a flexible sensor for measuring human muscle deformation and a preparation method thereof. Based on the measurement characteristics of the existing muscle motion state, an active and passive sensor is studied and designed. The invention discloses a flexible sensor for measuring human muscle deformation and its preparation method. The flexible sensor starts from muscle deformation, and measures the multi-directional strain and muscle expansion of the skin outside the muscle during muscle movement. Specifically, the flexible sensor uses a multi-walled carbon nanotube (MW-CNTs) film as an electrode to Platinum-catalyzed silicone rubber (Ecoflex) is used as an elastomer, and two layers of vertically arranged multi-wall carbon nanotube films are independently two strain sensors, which can measure the strain in two directions perpendicular to each other in the plane. The overlapping part of the nanotube films constitutes a parallel-plate capacitive sensor, which can be used to measure the information of the force perpendicular to the plane that the sensor is subjected to, thereby realizing the function of measuring both active and passive states. In addition, the flexible sensor is fabricated by layered molding, and the operation is simple and easy to implement.

为实现上述目的,按照本发明的一个方面,提供了一种用于人体肌肉变形测量的柔性传感器,所述柔性传感器包括第一弹性体层、第二弹性体层、第三弹性体层、第一多壁碳纳米管薄膜及第二多壁碳纳米管薄膜;所述第一多壁碳纳米管薄膜设置在所述第三弹性体层上,所述第二弹性体层设置在所述第三弹性体层上,且其覆盖所述第一多壁碳纳米管薄膜;所述第二多壁碳纳米管薄膜设置在所述第二弹性体层上,所述第一弹性体层设置在所述第二弹性体层上,且其覆盖所述第二多壁碳纳米管薄膜;所述第一多壁碳纳米管薄膜与所述第二多壁碳纳米管薄膜相互垂直设置,且所述第一多壁碳纳米管薄膜与所述第二多壁碳纳米管薄膜之间有重叠区域;In order to achieve the above object, according to one aspect of the present invention, a flexible sensor for measuring human muscle deformation is provided, the flexible sensor includes a first elastomer layer, a second elastomer layer, a third elastomer layer, a a multi-wall carbon nanotube film and a second multi-wall carbon nanotube film; the first multi-wall carbon nanotube film is disposed on the third elastomer layer, and the second elastomer layer is disposed on the first three elastomer layers covering the first multi-wall carbon nanotube film; the second multi-wall carbon nanotube film is disposed on the second elastomer layer, and the first elastomer layer is disposed on the on the second elastomer layer and covering the second multi-wall carbon nanotube film; the first multi-wall carbon nanotube film and the second multi-wall carbon nanotube film are perpendicular to each other, and the There is an overlapping area between the first multi-walled carbon nanotube film and the second multi-walled carbon nanotube film;

所述第一多壁碳纳米管薄膜与所述第二多壁碳纳米管薄膜相互独立为两个应变传感器,以实现测量平面内相互垂直的两个方向的应变的测量;所述第一多壁碳纳米管薄膜与所述第二多壁碳纳米管薄膜相互重叠的区域构成平行板电容传感器,以测量所述柔性传感器受到的、垂直于所述测量平面的压力。The first multi-walled carbon nanotube film and the second multi-walled carbon nanotube film are independent of each other as two strain sensors, so as to realize the measurement of strains in two directions perpendicular to each other in the measurement plane; The overlapping region of the walled carbon nanotube film and the second multi-walled carbon nanotube film constitutes a parallel plate capacitive sensor, so as to measure the pressure that the flexible sensor is subjected to and is perpendicular to the measurement plane.

进一步地,所述柔性传感器产生横向应变时,所述第一多壁碳纳米管薄膜的初始电阻值随之发生变化,基于所述第一多壁碳纳米管薄膜的电阻值变化量来计算得到横向应变。Further, when the flexible sensor generates lateral strain, the initial resistance value of the first multi-wall carbon nanotube film changes accordingly, which is calculated based on the change in the resistance value of the first multi-wall carbon nanotube film. Lateral strain.

进一步地,所述柔性传感器产生纵向应变时,所述第二多壁碳纳米管薄膜的初始电阻值随之发生改变,基于所述第二多壁碳纳米管薄膜的电阻值变化量来计算得到纵向应变。Further, when the flexible sensor generates longitudinal strain, the initial resistance value of the second multi-wall carbon nanotube film changes accordingly, which is calculated based on the change in the resistance value of the second multi-wall carbon nanotube film. longitudinal strain.

进一步地,当所述柔性传感器受到沿其厚度方向的压力时,所述第一多壁碳纳米管薄膜与所述第二多壁碳纳米管薄膜的重叠区域构成的电容发生变化,基于得到的电容变化量来得到所述柔性传感器受到的压力。Further, when the flexible sensor is subjected to pressure along its thickness direction, the capacitance formed by the overlapping area of the first multi-wall carbon nanotube film and the second multi-wall carbon nanotube film changes, based on the obtained The amount of capacitance change to obtain the pressure on the flexible sensor.

进一步地,所述第一多壁碳纳米管薄膜相背的两端及所述第二多壁碳纳米管薄膜相背的两端分别连接有铜导线,工作时,所述铜导线连接于外部测量电路。Further, the opposite ends of the first multi-wall carbon nanotube film and the opposite ends of the second multi-wall carbon nanotube film are respectively connected with copper wires. During operation, the copper wires are connected to the outside. measurement circuit.

进一步地,所述第一弹性体层、所述第二弹性体层及所述第三弹性体层组成弹性体,所述第一多壁碳纳米管薄膜及所述第二多壁碳纳米管薄膜内嵌在所述弹性体内;所述弹性体是采用透明的铂催化硅胶制成的。Further, the first elastomer layer, the second elastomer layer and the third elastomer layer constitute an elastomer, the first multi-wall carbon nanotube film and the second multi-wall carbon nanotube film The membrane is embedded within the elastomer; the elastomer is made of transparent platinum-catalyzed silica gel.

进一步地,所述第一多壁碳纳米管薄膜呈中字型,其包括第一连接部、第二连接部及中间部,所述第一连接部及所述第二连接部分别连接于所述中间部相背的两侧,所述第一连接部及所述第二连接部均为长方形,所述中间部为正方形。Further, the first multi-walled carbon nanotube film is in the shape of a middle shape, and includes a first connecting portion, a second connecting portion and an intermediate portion, and the first connecting portion and the second connecting portion are respectively connected to the On the opposite sides of the middle portion, the first connecting portion and the second connecting portion are both rectangular, and the middle portion is square.

进一步地,所述第一多壁碳纳米管薄膜的结构与所述第二多壁碳纳米管薄膜的结构相同。Further, the structure of the first multi-wall carbon nanotube film is the same as that of the second multi-wall carbon nanotube film.

按照本发明的另一个方面,提供了一种如上所述的用于人体肌肉测量的柔性传感器的制备方法,该制备方法包括以下步骤:According to another aspect of the present invention, there is provided a method for preparing a flexible sensor for measuring human muscle as described above, the preparation method comprising the following steps:

(1)制备第三弹性体层,并采用喷涂方式在所述第三弹性体层上制备第一多壁碳纳米管薄膜;(1) preparing a third elastomer layer, and preparing a first multi-walled carbon nanotube film on the third elastomer layer by spraying;

(2)在所述第一多壁碳纳米管薄膜上制备第二弹性体层;并在所述第二弹性体层上制备第二多壁碳纳米管薄膜;(2) preparing a second elastomer layer on the first multi-wall carbon nanotube film; and preparing a second multi-wall carbon nanotube film on the second elastomer layer;

(3)在所述第二多壁碳纳米管薄膜上制备第一弹性体层,由此得到所述柔性传感器。(3) A first elastomer layer is prepared on the second multi-walled carbon nanotube film, thereby obtaining the flexible sensor.

进一步地,所述第三弹性体层、所述第二弹性体层及所述第一弹性体层均是采用铂催化硅胶溶液涂布后、在70℃下加热30分钟得到的。Further, the third elastomer layer, the second elastomer layer and the first elastomer layer are all obtained by coating with a platinum-catalyzed silica gel solution and heating at 70° C. for 30 minutes.

总体而言,通过本发明所构思的以上技术方案与现有技术相比,本发明提供的用于人体肌肉变形测量的柔性传感器及其制备方法主要具有以下In general, compared with the prior art through the above technical solutions conceived by the present invention, the flexible sensor for measuring human muscle deformation and its preparation method provided by the present invention mainly have the following features:

有益效果:Beneficial effects:

1.所述第一多壁碳纳米管薄膜与所述第二多壁碳纳米管薄膜相互独立为两个应变传感器,以实现测量平面内相互垂直的两个方向的应变的测量;所述第一多壁碳纳米管薄膜与所述第二多壁碳纳米管薄膜相互重叠的区域构成平行板电容传感器,以测量所述柔性传感器受到的、垂直于所述测量平面的压力,由此同时实现了主被动状态的测量,提高了适用性及灵活性,功能较为齐全。1. The first multi-walled carbon nanotube film and the second multi-walled carbon nanotube film are independent of each other as two strain sensors, so as to realize the measurement of strains in two directions perpendicular to each other in the measurement plane; The overlapping area of a multi-walled carbon nanotube film and the second multi-walled carbon nanotube film constitutes a parallel-plate capacitive sensor to measure the pressure perpendicular to the measurement plane on the flexible sensor, thereby simultaneously achieving The measurement of active and passive states is improved, the applicability and flexibility are improved, and the functions are relatively complete.

2.所述弹性体是采用透明的铂催化硅胶制成的,且所述柔性传感器的厚度小于1毫米,具有非常好的可拉伸性能,能够很好地贴合皮肤,具有很好的可穿戴性。2. The elastomer is made of transparent platinum-catalyzed silica gel, and the thickness of the flexible sensor is less than 1 mm, which has very good stretchability, can fit the skin well, and has good flexibility. Wearability.

3.所述柔性传感器是通过分层成型制作的,操作简单,易于实施;所述第一多壁碳纳米管薄膜及所述第二多壁碳纳米管薄膜内嵌在所述弹性体内,使得柔性传感器的结构紧凑。3. The flexible sensor is made by layered molding, which is simple to operate and easy to implement; the first multi-wall carbon nanotube film and the second multi-wall carbon nanotube film are embedded in the elastomer, so that the The flexible sensor is compact.

4.本发明采用多壁碳纳米管薄膜作为电极,多壁碳纳米管具有极高的强度和韧性,具有非常优异的力学性能,由此具有较好的可伸展性及灵活性。4. The present invention uses the multi-walled carbon nanotube film as the electrode, and the multi-walled carbon nanotube has extremely high strength and toughness, as well as excellent mechanical properties, and thus has good extensibility and flexibility.

附图说明Description of drawings

图1是本发明较佳实施方式提供的用于人体肌肉变形测量的柔性传感器的结构示意图;1 is a schematic structural diagram of a flexible sensor for measuring human muscle deformation provided by a preferred embodiment of the present invention;

图2是图1中的用于人体肌肉变形测量的柔性传感器的测量原理示意图;FIG. 2 is a schematic diagram of the measurement principle of the flexible sensor for measuring human muscle deformation in FIG. 1;

图3是图1中的用于人体肌肉变形测量的柔性传感器的制备流程示意图;FIG. 3 is a schematic diagram of the preparation process of the flexible sensor for measuring human muscle deformation in FIG. 1;

图4是图1中的用于人体肌肉变形测量的柔性传感器的电阻测量电路示意图。FIG. 4 is a schematic diagram of a resistance measurement circuit of the flexible sensor for measuring human muscle deformation in FIG. 1 .

在所有附图中,相同的附图标记用来表示相同的元件或结构,其中:1-第一弹性体层,2-第二弹性体层,3-第三弹性体层,4-第一多壁碳纳米管薄膜,5-第二多壁碳纳米管薄膜,6-铜导线,7-导电银胶,8-铝基板,9-喷笔,10-掩膜板。Throughout the drawings, the same reference numerals are used to refer to the same elements or structures, wherein: 1-first elastomeric layer, 2-second elastomeric layer, 3-third elastomeric layer, 4-first Multi-walled carbon nanotube film, 5-second multi-walled carbon nanotube film, 6-copper wire, 7-conductive silver glue, 8-aluminum substrate, 9-airbrush, 10-mask.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

请参阅图1、图2及图4,本发明较佳实施方式提供的用于人体肌肉变形测量的柔性传感器,所述柔性传感器包括弹性体、分别内嵌在所述弹性体内的第一多壁碳纳米管薄膜4及第二多壁碳纳米管薄膜5、以及铜导线6,所述第一多壁碳纳米管薄膜4与所述第二多壁碳纳米管薄膜5间隔设置,且两者相互独立。所述第一多壁碳纳米管薄膜4相背的两端及所述第二多壁碳纳米管薄膜5相背的两端分别连接有所述铜导线6,所述铜导线6凸出于所述弹性体,其用于和外部测量电路相连接。Please refer to FIG. 1 , FIG. 2 and FIG. 4 . A preferred embodiment of the present invention provides a flexible sensor for measuring human muscle deformation. The flexible sensor includes an elastic body and a first multi-walled body respectively embedded in the elastic body. The carbon nanotube film 4, the second multi-wall carbon nanotube film 5, and the copper wire 6, the first multi-wall carbon nanotube film 4 and the second multi-wall carbon nanotube film 5 are spaced apart, and both Independent. The opposite ends of the first multi-walled carbon nanotube film 4 and the opposite ends of the second multi-walled carbon nanotube film 5 are respectively connected with the copper wires 6, and the copper wires 6 protrude from the copper wires 6. The elastic body is used for connecting with an external measuring circuit.

所述弹性体是采用透明的铂催化硅胶制成的,其基本呈矩型。所述弹性体用于承载所述第一多壁碳纳米管薄膜4及所述第二多壁碳纳米管薄膜5,其包括第一弹性体层1、第二弹性体层2及第三弹性体层3,所述第二多壁碳纳米管薄膜5设置在所述第三弹性体层3上,所述第二弹性体层2设置在所述第三弹性体层3上,且其覆盖所述第二多壁碳纳米管薄膜5。所述第一多壁碳纳米管薄膜4设置在所述第二弹性体层2上,所述第一弹性体层1设置在所述第二弹性体层2上,且其覆盖所述第一多壁碳纳米管薄膜4。The elastomer is made of transparent platinum-catalyzed silica gel, which is substantially rectangular. The elastomer is used to carry the first multi-walled carbon nanotube film 4 and the second multi-walled carbon nanotube film 5 , which includes a first elastomer layer 1 , a second elastomer layer 2 and a third elastic layer body layer 3, the second multi-walled carbon nanotube film 5 is provided on the third elastomer layer 3, the second elastomer layer 2 is provided on the third elastomer layer 3, and it covers The second multi-walled carbon nanotube film 5 . The first multi-walled carbon nanotube film 4 is disposed on the second elastomer layer 2, and the first elastomer layer 1 is disposed on the second elastomer layer 2 and covers the first Multi-walled carbon nanotube films 4.

所述第一多壁碳纳米管薄膜4与所述第二多壁碳纳米管薄膜5相互垂直设置,且两者分别独立为应变传感器。所述第一多壁碳纳米管薄膜4基本呈“中”字型,其包括第一连接部、第二连接部及中间部,所述第一连接部及所述第二连接部分别连接于所述中间部相背的两侧,所述第一多壁碳纳米管薄膜4通过所述第一连接部及所述第二连接部连接于所述铜导线6。本实施方式中,所述第一连接部及所述第二连接部均为长方形,所述中间部为正方形;所述第一多壁碳纳米管薄膜4的结构与所述第二多壁碳纳米管薄膜5的结构相同,所述第一多壁碳纳米管薄膜4的中间部与所述第二多壁碳纳米管薄膜5的中间部在所述柔性传感器的厚度方向重叠以构成平行板电容结构。The first multi-wall carbon nanotube film 4 and the second multi-wall carbon nanotube film 5 are arranged perpendicular to each other, and the two are respectively independent strain sensors. The first multi-walled carbon nanotube film 4 is basically in the shape of a "middle" shape, which includes a first connecting part, a second connecting part and a middle part, and the first connecting part and the second connecting part are respectively connected to the On the opposite sides of the middle portion, the first multi-walled carbon nanotube film 4 is connected to the copper wire 6 through the first connection portion and the second connection portion. In this embodiment, the first connecting part and the second connecting part are both rectangular, and the middle part is square; the structure of the first multi-wall carbon nanotube film 4 is the same as that of the second multi-wall carbon The structure of the nanotube film 5 is the same, the middle part of the first multi-wall carbon nanotube film 4 and the middle part of the second multi-wall carbon nanotube film 5 overlap in the thickness direction of the flexible sensor to form a parallel plate Capacitive structure.

工作时,所述第一连接部与所述第二连接部在发生应变时产生明显的电阻变化,所述柔性传感器产生横向应变时,所述第一多壁碳纳米管薄膜4的初始电阻值R1随之发生变化;所述柔性传感器产生纵向应变时,所述第二多壁碳纳米管薄膜5的初始电阻值R2随之发生改变;当所述柔性传感器受到沿其厚度方向的压力时,所述第一多壁碳纳米管薄膜4与所述第二多壁碳纳米管薄膜5之间的间距发生变化,使得所述第一多壁碳纳米管薄膜4的中间部与所述第二多壁碳纳米管薄膜5的中间部构成的电容发生变化,由此所述柔性传感器可以同时测量平面内相互垂直的两个方向的应变和垂直于平面方向的压力。本实施方式中,所述测量平面为水平面。During operation, the first connection part and the second connection part produce obvious resistance changes when strain occurs, and when the flexible sensor produces lateral strain, the initial resistance value of the first multi-walled carbon nanotube film 4 R1 changes accordingly; when the flexible sensor generates longitudinal strain, the initial resistance value R2 of the second multi-walled carbon nanotube film 5 changes accordingly; when the flexible sensor is subjected to pressure along its thickness direction, The distance between the first multi-walled carbon nanotube film 4 and the second multi-walled carbon nanotube film 5 changes, so that the middle part of the first multi-walled carbon nanotube film 4 and the second The capacitance formed by the middle part of the multi-walled carbon nanotube film 5 changes, so that the flexible sensor can simultaneously measure the strain in two mutually perpendicular directions in the plane and the pressure in the direction perpendicular to the plane. In this embodiment, the measurement plane is a horizontal plane.

请参阅图3,本发明还提供了一种用于人体肌肉变形测量的柔性传感器的制备方法,所述制备方法用于制备如上所述的用于人体肌肉变形测量的柔性传感器,具体包括以下步骤:Referring to FIG. 3 , the present invention also provides a method for preparing a flexible sensor for measuring human muscle deformation. The preparation method is used to prepare the above-mentioned flexible sensor for measuring human muscle deformation, which specifically includes the following steps :

步骤一,在铝基板上制备第三弹性体层。Step 1, prepare a third elastomer layer on the aluminum substrate.

具体地,提供一个铝基板8,将铂催化硅胶溶液A、B两部分按照质量比1:1进行混合并搅拌均匀后,在真空中放置15分钟以去除气泡;接着,采用自动流延涂布机在所述铝基板8上涂布配置好的铂催化硅胶溶液,并在70℃下加热30分钟以得到所述第三弹性体层3。Specifically, an aluminum substrate 8 is provided, and the platinum-catalyzed silica gel solutions A and B are mixed according to a mass ratio of 1:1 and stirred evenly, and then placed in a vacuum for 15 minutes to remove air bubbles; then, automatic casting coating is used. The prepared platinum-catalyzed silica gel solution was coated on the aluminum substrate 8 by machine, and heated at 70° C. for 30 minutes to obtain the third elastomer layer 3 .

步骤二,在所述第三弹性体层上制备第一多壁碳纳米管薄膜。In step 2, a first multi-wall carbon nanotube film is prepared on the third elastomer layer.

具体地,将多壁碳纳米管粉体加入95%的无水乙醇溶液中,使用超声分散仪分散处理30分钟,并在所述第三弹性体层3上盖上掩膜板10;接着,采用喷笔9将得到的碳纳米管乙醇分散液喷印在所述第三弹性体层3上,待乙醇挥发后再次喷涂,重复3次到4次,以在所述第三弹性体层3上形成均匀的第一多壁碳纳米管薄膜4。Specifically, the multi-walled carbon nanotube powder was added to a 95% absolute ethanol solution, dispersed for 30 minutes using an ultrasonic disperser, and the third elastomer layer 3 was covered with a mask plate 10; then, The obtained carbon nanotube ethanol dispersion is spray-printed on the third elastomer layer 3 by using an airbrush 9, and sprayed again after the ethanol is volatilized, and repeated 3 to 4 times, so that the third elastomer layer 3 can be sprayed on the third elastomer layer 3. A uniform first multi-walled carbon nanotube film 4 is formed thereon.

步骤三,将所述第一多壁碳纳米管薄膜4相背的两端分别连接铜导线6。具体地,用砂纸打磨铜制漆包线两端以去除两端的绝缘漆,使用导电银胶7将铜制漆包线固定在所述第一多壁碳纳米管薄膜相背的两端,在70摄氏度下加热20min,使所述导电银胶7固化,由此使所述第一多壁碳纳米管薄膜4相背的两端分别与所述铜导线6相连接。In step 3, the opposite ends of the first multi-walled carbon nanotube film 4 are connected to copper wires 6 respectively. Specifically, use sandpaper to polish both ends of the copper enameled wire to remove the insulating paint at both ends, use conductive silver glue 7 to fix the copper enameled wire on the opposite ends of the first multi-wall carbon nanotube film, and heat at 70 degrees Celsius After 20 minutes, the conductive silver glue 7 is cured, so that the opposite ends of the first multi-walled carbon nanotube film 4 are respectively connected to the copper wires 6 .

步骤四,在所述第一多壁碳纳米管薄膜上制备第二弹性体层2。具体地,与以步骤一类似,弹性体固化后,所述第一碳纳米管薄膜4及与其连接的铜导线6内嵌入所述第一弹性体层2及所述第二弹性体层3内。In step 4, a second elastomer layer 2 is prepared on the first multi-walled carbon nanotube film. Specifically, similar to the first step, after the elastomer is cured, the first carbon nanotube film 4 and the copper wires 6 connected thereto are embedded in the first elastomer layer 2 and the second elastomer layer 3 .

步骤五,在所述第二弹性体层2上制备第二多壁碳纳米管薄膜5;接着,将所述第二多壁碳纳米管薄膜5相背的两端分别连接铜导线6;最后,在所述第二多壁碳纳米管薄膜5上制备第一弹性体层1,并去除所述铝基板8以得到所述柔性传感器。其中,制备所述第二多壁碳纳米管薄膜5时需要将所述掩膜板10旋转90°,以保证所述第一多壁碳纳米管薄膜4与所述第二多壁碳纳米管薄膜5相互垂直。Step 5, prepare a second multi-wall carbon nanotube film 5 on the second elastomer layer 2; then, connect the opposite ends of the second multi-wall carbon nanotube film 5 to copper wires 6 respectively; finally , prepare a first elastomer layer 1 on the second multi-walled carbon nanotube film 5, and remove the aluminum substrate 8 to obtain the flexible sensor. Wherein, when preparing the second multi-wall carbon nanotube film 5, the mask plate 10 needs to be rotated by 90° to ensure that the first multi-wall carbon nanotube film 4 and the second multi-wall carbon nanotube film The films 5 are perpendicular to each other.

所述柔性传感器的电阻数据采集使用分压电路,通过分别测量所述第一多壁碳纳米管薄膜4两端的电压及所述第二多壁碳纳米管薄膜5两端的电压计算得到相应的电阻,其电阻与对应的应变具有固定关系,具体为:The resistance data acquisition of the flexible sensor uses a voltage divider circuit, and the corresponding resistance is calculated by measuring the voltage across the first multi-wall carbon nanotube film 4 and the voltage across the second multi-wall carbon nanotube film 5 respectively. , its resistance has a fixed relationship with the corresponding strain, specifically:

R11=R0×U1/(U-U1) (1)R 11 =R 0 ×U 1 /(UU 1 ) (1)

R21=R0×U2/(U-U2) (2)R 21 =R 0 ×U 2 /(UU 2 ) (2)

ε1=f(R11) (3)ε 1 =f(R 11 ) (3)

ε2=f(R21) (4)ε 2 =f(R 21 ) (4)

式中,R0为串联固定电阻;R11为产生应变时,所述第一多壁碳纳米管薄膜的电阻;U1为所述第一多壁碳纳米管薄膜两端的电压;U为总的电压;R21为产生应变时,所述第二多壁碳纳米管薄膜的电阻;U2为所述第二多壁碳纳米管薄膜两端的电压;ε1为柔性传感器受到的横向应变;f(R11)为标定得到的应变ε1的计算公式;ε2为柔性传感器受到的纵向应变;f(R21)为标定得到的应变ε2的计算公式。In the formula, R 0 is the series fixed resistance; R 11 is the resistance of the first multi-wall carbon nanotube film when strain occurs; U 1 is the voltage across the first multi-wall carbon nanotube film; U is the total voltage; R 21 is the resistance of the second multi-wall carbon nanotube film when strain is generated; U 2 is the voltage across the second multi-wall carbon nanotube film; ε 1 is the lateral strain received by the flexible sensor; f(R 11 ) is the calculation formula of the calibrated strain ε 1 ; ε 2 is the longitudinal strain of the flexible sensor; f(R 21 ) is the calculation formula of the calibrated strain ε 2 .

本发明提供的用于人体肌肉变形测量的柔性传感器及其制备方法,所述柔性传感器将两个多壁碳纳米管薄膜相互垂直设置,且两者分别镶嵌在弹性体内,两个所述多壁碳纳米管薄膜分别独立为应变传感器以实现测量平面相互垂直的两个方向的应变,而两个所述多壁碳纳米管薄膜相互重叠部分可测量传感器垂直于测量平面的压力,由此主被动状态均可测量,结构简单,易于操作,适用性较强。The present invention provides a flexible sensor for measuring human muscle deformation and a preparation method thereof. The flexible sensor has two multi-walled carbon nanotube films arranged perpendicular to each other, and the two are embedded in an elastic body respectively. The carbon nanotube films are independent strain sensors to measure the strain in two directions perpendicular to each other, and the overlapping parts of the two multi-walled carbon nanotube films can measure the pressure of the sensor perpendicular to the measurement plane, so that the active and passive The state can be measured, the structure is simple, the operation is easy, and the applicability is strong.

本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。Those skilled in the art can easily understand that the above are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, etc., All should be included within the protection scope of the present invention.

Claims (10)

1. A flexible sensor for measuring deformation of a muscle of a human body, comprising:
the flexible sensor comprises a first elastomer layer (1), a second elastomer layer (2), a third elastomer layer (3), a first multi-walled carbon nanotube film (4) and a second multi-walled carbon nanotube film (5); the first multi-walled carbon nanotube film (4) is arranged on the third elastomeric layer (3), the second elastomeric layer (2) is arranged on the third elastomeric layer (3) and it covers the first multi-walled carbon nanotube film (4); the second multi-walled carbon nanotube film (5) is arranged on the second elastomer layer (2), the first elastomer layer (1) is arranged on the second elastomer layer (2) and covers the second multi-walled carbon nanotube film (5); the first multi-walled carbon nanotube film (4) and the second multi-walled carbon nanotube film (5) are perpendicular to each other, and an overlapping area is formed between the first multi-walled carbon nanotube film (4) and the second multi-walled carbon nanotube film (5);
the first multi-walled carbon nanotube film (4) and the second multi-walled carbon nanotube film (5) are mutually independent to form two strain sensors so as to realize measurement of strains in two directions which are mutually vertical in a measurement plane; the area where the first multi-walled carbon nanotube film (4) and the second multi-walled carbon nanotube film (5) overlap each other constitutes a parallel plate capacitive sensor for measuring the pressure perpendicular to the measuring plane to which the flexible sensor is subjected.
2. A flexible sensor for human muscle deformation measurement as claimed in claim 1, wherein: when the flexible sensor generates transverse strain, the initial resistance value of the first multi-walled carbon nanotube film (4) is changed, and the transverse strain is calculated based on the resistance value change of the first multi-walled carbon nanotube film (4).
3. A flexible sensor for human muscle deformation measurement as claimed in claim 1, wherein: when the flexible sensor generates longitudinal strain, the initial resistance value of the second multi-walled carbon nanotube film (5) is changed, and the longitudinal strain is calculated based on the resistance value variation of the second multi-walled carbon nanotube film (5).
4. A flexible sensor for human muscle deformation measurement as claimed in claim 1, wherein: when the flexible sensor is pressed along the thickness direction of the flexible sensor, the capacitance formed by the overlapped area of the first multi-wall carbon nanotube film (4) and the second multi-wall carbon nanotube film (5) is changed, and the pressure applied to the flexible sensor is obtained based on the obtained capacitance change amount.
5. A flexible sensor for human muscle deformation measurement according to any one of claims 1 to 4, wherein: the two ends of the first multi-walled carbon nanotube film (4) which are back to back and the two ends of the second multi-walled carbon nanotube film (5) which are back to back are respectively connected with a copper wire (6), and the copper wires (6) are connected to an external measuring circuit during working.
6. A flexible sensor for human muscle deformation measurement according to any one of claims 1 to 4, wherein: the first elastomer layer (1), the second elastomer layer (2) and the third elastomer layer (3) constitute an elastomer, and the first multi-walled carbon nanotube film (4) and the second multi-walled carbon nanotube film (5) are embedded in the elastomer; the elastomer is made of transparent platinum-catalyzed silica gel.
7. A flexible sensor for human muscle deformation measurement according to any one of claims 1 to 4, wherein: the first multi-walled carbon nanotube film (4) is in a Chinese character 'zhong' shape and comprises first connecting portions, second connecting portions and a middle portion, the first connecting portions and the second connecting portions are connected to two sides of the middle portion in a back-to-back mode respectively, the first connecting portions and the second connecting portions are rectangular, and the middle portion is square.
8. The flexible sensor for human muscle deformation measurement according to claim 7, wherein: the structure of the first multi-walled carbon nanotube film (4) is the same as the structure of the second multi-walled carbon nanotube film (5).
9. A method for manufacturing a flexible sensor for measuring deformation of muscles of the human body according to any one of claims 1 to 8, comprising the steps of:
(1) preparing a third elastomer layer (3), and preparing a first multi-walled carbon nanotube film (4) on the third elastomer layer (3) by adopting a spraying mode;
(2) -preparing a second elastomeric layer (2) on said first multi-walled carbon nanotube film (4), and preparing a second multi-walled carbon nanotube film (5) on said second elastomeric layer (2);
(3) -preparing a first elastomeric layer (1) on said second multi-walled carbon nanotube film (5), thereby obtaining said flexible sensor.
10. The method of manufacturing a flexible sensor for measurement of human muscle deformation of claim 9, wherein: the third elastomer layer (3), the second elastomer layer (2) and the first elastomer layer (1) are all obtained by coating a platinum-catalyzed silica gel solution and then heating the coated solution at 70 ℃ for 30 minutes.
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