CN108151949A - A kind of flexible electronic pressure sensor device and preparation method thereof - Google Patents
A kind of flexible electronic pressure sensor device and preparation method thereof Download PDFInfo
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- CN108151949A CN108151949A CN201711384185.0A CN201711384185A CN108151949A CN 108151949 A CN108151949 A CN 108151949A CN 201711384185 A CN201711384185 A CN 201711384185A CN 108151949 A CN108151949 A CN 108151949A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
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- Measuring Fluid Pressure (AREA)
Abstract
The present invention is suitable for sensor production and encapsulation technology field, discloses a kind of flexible electronic pressure sensor device and preparation method thereof.Flexible electronic pressure sensor device includes soft shell, there is inner volume in soft shell, inner volume includes multiple array channels and connects chamber be communicated in the same end face of multiple array channels, liquid metal conductor is provided in inner volume, soft shell is connected at least two electrodes to connect with liquid metal conductor.The preparation method of flexible electronic pressure sensor device is used to prepare above-mentioned flexible electronic pressure sensor device.A kind of flexible electronic pressure sensor device provided by the present invention and preparation method thereof, flexible electronic pressure sensor device can be bonded completely 3 D complex it is quiet/dynamic surface while complete contact measurement, and stability, precision, accuracy and reliability are high, high temperature resistant, it is applied widely, service life is long.
Description
Technical field
It makes the invention belongs to electronic pressure transmitter and is passed with encapsulation technology field more particularly to a kind of flexible electronic pressure
Induction device and preparation method thereof.
Background technology
As people increasingly pay attention to oneself health status, being gradually keen to can real-time physiological parameter acquisition and movement shape
The wearable device of state analysis.Sensing system as one of wearable device core element is limited since itself is flexible insufficient
The further development of wearable device is made, in real time health detection, implantable medical device, smart home and skin electronics
In the utilizations such as equipment, all there is an urgent need to high performance flexible electronic devices.Most of current pressure sensor is still by inorganic material
Material such as silicon is made.Once generate stretching or flexural deformation, it will sensor hardware structure is made to destroy and fail, and adopted in signal
During collection, sensitivity is low, is easily such as breathed, and the interference of the physiological noises such as contraction of muscle can not be acquired completely and clearly
Data.
And popularizing with intelligent terminal, our daily activities are cascaded by Intelligent life.Wearable electronic
Equipment shows huge market prospects, and the main consumer electronics companies in the whole world are nearly all proposed respective wearable product,
Such as Apple Watch, Microsoft Microsoft Bend and Huawei Watch of Huawei of Apple Inc. etc..In a few years
Various wearable devices continue to bring out, from meter step, calorie consumption, eating habit, sleep monitor to chronic disease early warning,
Electronics is tatooed with retinal implant etc..Us are greatly enriched to live.However wearable technology is often based upon at present
Rigid basement, sensor needs are embedded into rigidity encapsulation, exist mechanically with the three-dimensional cutaneous surface of flexible human body complexity
Mismatch, affect the experience of user and the result of measurement.
Flexible sensor of the prior art is mainly prepared in the following ways.
1. preparing highdensity tactile sensor array using vertical orientated zinc oxide (ZnO) nano wire, stretching is utilized
Under the conditions of zinc oxide nanowire generate piezoelectric effect, using piezoelectric current as grid electric signal, it is only necessary to two terminal electrodes
In the case of obtained the electronic skin sensor with detection sensitivity.
2. with the film that the hollow ball polypyrrole polymers of elastic, the low modulus micro-structure of heterogeneous reaction generation form, with
Contact area between the size film and electrode puted forth effort changes and detects different size of load.
3. being designed by structure and shape, traditional inorganic material such as metal can be utilized, three-dimensional " wave " knot is made in silicon substrate etc.
The flexible conducting element of structure.Enable traditional inorganic conductive material with the extension of elastic substrates and elongation strain but not
The destructions such as fracture occur.
4. forming the interlocking small-sized domes array of pressure resistance type using PDMS and carbon nanotube (CNT), one kind is developed
Can be with the electronic skin of sensed pressure method, this transducer sensitivity is high, it might even be possible to perceive the direction of air stream and strong
Degree.
5. the array of pressure sensors based on piezoresistive principles, the round sensing unit quilt of dispersion are made using pressure drag rubber
It is arranged on flexible PET thin slices, silver is used to make the electrode of sensor since the flexibility of making material realizes sensor array
The flexibility of row.
Although above-mentioned strain transducer has certain flexibility, it can not still realize and optionally stretch, be bent and turn round
Turn to wait specific forms.Lack class it is dermatoid flexible, it is impossible to completely fitting 3 D complex it is quiet/dynamic surface while complete
The measurement of contact.Even if being integrated into wearable device, due to, in the presence of mismatch mechanically, making with human skin surface
The experience effect for obtaining user is bad.In addition, because of the limitation of structure design and encapsulation technology so that the accuracy of measurement and sensitive
Degree cannot be taken into account.Easily interfered by the physiological signal of human body itself.For current carbon nanotube and graphene etc. for soft
The material preparation technology horizontal techniques of property sensor are also immature, and there is also non-refractory, the scope of application, service life etc. are asked
Topic.
Invention content
It is an object of the invention to overcome above-mentioned the deficiencies in the prior art, a kind of flexible electronic pressure sensor device is provided
And preparation method thereof, it is stability, precision and the accuracy of flexible electronic pressure sensor device, of good reliability.
The technical scheme is that：A kind of flexible electronic pressure sensor device, including soft shell, the soft shell
Interior to have inner volume, the inner volume includes multiple array channels and is communicated in multiple same end faces of the array channel
Chamber is connected, is provided with liquid metal conductor in the inner volume, the soft shell is connected at least two and the liquid
The electrode that metallic conductor connects.
Optionally, the soft shell is using degradation polyester material or silastic material.
Optionally, fluid conductors eutectic gallium indium is provided in the inner volume.
Optionally, the soft shell connects the first flexible substrate to form the inner volume and second soft including pairing
Property matrix, the inner wall of first flexible substrate is provided with the bulge-structure that is used to form the array channel or/and recess knot
Structure；The connection chamber is set to the second flexible substrate body.
The present invention also provides a kind of wearable device, the wearable device has a kind of above-mentioned flexible electronic pressure
Sensing device.
The present invention also provides a kind of preparation methods of flexible electronic pressure sensor device, include the following steps：
The soft shell with inner volume is prepared, and the inner volume includes multiple array channels and is communicated in multiple
The connection chamber of the array channel；In injecting liquid metal conductor in the inner volume, it is inserted at least in the soft shell
Two electrodes make the electrode be in contact with the liquid metal conductor.
Optionally, the soft shell is prepared to include the following steps：
The first mold, the second mold and flexible material solution are prepared, bubble removing is removed after flexible material solution is mixed；
The flexible material solution for mixing and going after bubble removing is added in into first mold to be formed with multiple battle arrays
First flexible substrate of row channel；
It is added in second mold and mixes and remove the flexible material solution after bubble removing, and make flexible material solution shape
Into the second flexible substrate with connection chamber；
First flexible substrate is pressed on second flexible substrate not being fully cured, makes the described first flexible base
Body and the second flexible substrate integrally connected form soft shell, while make multiple array channels and connect chamber and connect to form envelope
The inner volume closed.
Optionally, include the following steps in injection liquid metal conductor in the inner volume：
The both ends of the inner volume are inserted into using two syringes, are led in one of syringe with liquid metal
Body；Another syringe takes out the air in the inner volume, has the syringe of liquid metal conductor to the inner volume
Interior injection liquid metal conductor, makes liquid metal conductor extract the syringe full of inner volume.
Optionally, electrode is inserted into the both ends of the inner volume to include the following steps：
Two electrodes are inserted into the both ends of the inner volume respectively, it is internal using same half solidification flexible material sealing
Cavity volume.
Optionally, flexible material solution is mixed and bubble removing is gone to include the following steps：
It is put into the container of centrifugal mixer using Ecoflex series silicone rubber solutions, the rotating speed of the centrifugal mixer
For 300-400rpm, after the retention time is 10-15s, the rotating speed of the centrifugal mixer is increased to 1400-1600rpm, during holding
Between for 25-30s, obtain mixed silicone rubber solution；
Mixed silicone rubber solution is put into Vacuum filtration device, opens the vacuum pump of the Vacuum filtration device,
Obtain the silicone rubber solution after bubble removing；
The first flexible substrate is formed to include the following steps：
At least one layer of releasing agent is sprayed in first die surface, then using pipettor toward the cavity of first mold
The silicone rubber solution after bubble removing is removed in middle filling；
First mold is moved on in oven, 45-60min is toasted under conditions of 80 degrees Celsius, is had after demoulding
There is the first flexible substrate of multiple array channels；
At least one layer of releasing agent is sprayed in second die surface, then using pipettor toward the cavity of second mold
The silicone rubber solution after bubble removing is removed in middle filling, then molds；
When the silicone rubber solution in the cavity of second mold half solidifies and forms the second flexible substrate, die sinking, then
First flexible substrate is pressed on the second flexible substrate, first flexible substrate is made to be connected with the second flexible substrate pairing
It forms connection chamber and connects chamber be communicated in multiple same end faces of the array channel.
A kind of flexible electronic pressure sensor device provided by the present invention and preparation method thereof, flexible electronic pressure sensing dress
Putting has the characteristics that highly flexible, draftability are good and geometry is simple, size is thin, and the sensor is made to have broken away from the beam of physics accessory
It ties up, can conformably be pasted on skin, it is achieved thereby that the measurement of any position, even the great each joint of deflection
Place.Also, the sensor is at work, and main acquisition liquid conductor resistance variations as caused by sealing microarray channel deformation are believed
Number, high sensitivity, strong antijamming capability can be stretched optionally, be bent and be reversed, outstanding especially suitable for wearable device field
It is large deformation situation etc., can be bonded completely 3 D complex it is quiet/dynamic surface while complete the measurement of contact, and steady
Qualitative, precision, accuracy and reliability are high, it is not easy to be interfered, and inner volume is envelope by the physiological signal of human body itself
Closed type structure, high temperature resistant are applied widely, service life is long.
Description of the drawings
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to needed in the embodiment
Attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is only some embodiments of the present invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is a kind of diagrammatic cross-section of flexible electronic pressure sensor device provided in an embodiment of the present invention；
Fig. 2 is the section signal of soft shell in a kind of flexible electronic pressure sensor device provided in an embodiment of the present invention
Figure；
Fig. 3 is a kind of the flat of flexible electronic pressure sensor device with circular flexible shell provided in an embodiment of the present invention
Face schematic diagram；
Fig. 4 is a kind of flexible electronic pressure sensor device with rectangle shape soft shell provided in an embodiment of the present invention
Floor map；
Fig. 5 is to prepare silicon rubber in a kind of preparation method of flexible electronic pressure sensor device provided in an embodiment of the present invention
The floor map of solution；
Fig. 6 be a kind of flexible electronic pressure sensor device provided in an embodiment of the present invention preparation method in silicone rubber solution
Mixed floor map；
Fig. 7 be a kind of flexible electronic pressure sensor device provided in an embodiment of the present invention preparation method in silicone rubber solution
Go the floor map after bubble removing；
Fig. 8 be a kind of flexible electronic pressure sensor device provided in an embodiment of the present invention preparation method in the first mold
Floor map during middle filled silicon rubber solution；
Fig. 9 be a kind of flexible electronic pressure sensor device provided in an embodiment of the present invention preparation method in the first mold
Floor map after middle filled silicon rubber solution after baking；
Figure 10 be a kind of flexible electronic pressure sensor device provided in an embodiment of the present invention preparation method in the second mould
Floor map after silicone rubber solution is added in tool and is molded；
Figure 11 be a kind of flexible electronic pressure sensor device provided in an embodiment of the present invention preparation method in it is soft by first
Property matrix and the second flexible substrate press when floor map；
Figure 12 be obtained in a kind of preparation method of flexible electronic pressure sensor device provided in an embodiment of the present invention it is soft
The diagrammatic cross-section of property electronic pressure-sensing device.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, it is right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
It should be noted that when element is referred to as " being fixed on " or " being set to " another element, it can be directly another
On one element or it may be simultaneously present centering elements.When an element is known as " being connected to " another element, it can
To be directly to another element or may be simultaneously present centering elements.
Only it is relative concept each other it should also be noted that, the orientation term such as left and right, upper and lower in the embodiment of the present invention
Or using the normal operating condition of product as reference, and should not be regarded as restrictive.
As depicted in figs. 1 and 2, a kind of flexible electronic pressure sensor device provided in an embodiment of the present invention, including flexibility outside
Shell 1, soft shell 1 may be used silastic material (such as Ecoflex series) etc. and be made.There is length in the soft shell 1
The inner volume that degree and cross section can deform under external force, inner volume 10 can be closed cavity, the inner volume 10
Liquid metal conductor 3 is inside provided with, liquid metal conductor 3 can be full of inner volume 10.The inner volume 10 includes multiple
Array channel (microarray channel) 101 connects chamber 102 be communicated in multiple 101 same end faces of the array channel, and array leads to
Road 101 can (i.e. part be in " well " word in uniformly at intervals, can also laterally or longitudinally use the crisscross arrangement form communicated
Shape is arranged), certainly, array channel 101 can also be formed by the cylindricality cavity or half-spherical cavity of matrix arrangement.The flexibility
Shell 1 is provided at both ends at least two electrodes 2 to connect with the liquid metal conductor, the end of electrode 2 and inner volume
Liquid metal conductor 3 in 10 contacts, in the working sensor, since the effect of external load causes the shape of inner volume 10
Shape (length and cross section) changes, so as to change the resistance of liquid metal conductor 3.The electrode 2 at both ends can be connected with amplification mould
Block and constant-current supply module, the electrode 2 at both ends add constant-current supply.The resistance signal of liquid metal conductor 3 is become for convenience
The voltage signal of measurement, by obtaining corresponding strain value to the analysis of voltage signal, which mainly acquires at work
3 resistance variations signal of liquid metal conductor in the inner volume 10 of sealing has highly flexible, tensility and thin geometry spy
Point makes it direct and is integrated, and high sensitivity with any flexibly direct writing mechanism, strong antijamming capability, which is answering
Change remains to work normally when reaching 300%, can optionally stretch, is bent and reverse, especially suitable for wearable device field
Especially large deformation situation etc., can be bonded completely 3 D complex it is quiet/dynamic surface while complete contact measurement, and
Stability, precision, accuracy and reliability be high, it is not easy to be interfered, and inner volume 10 by the physiological signal of human body itself
For enclosed construction, high temperature resistant is applied widely, service life is long.
Optionally, can be set in same soft shell 1 there are one or at least two inner volumes 10, each inner volume
10 can be correspondingly arranged there are two or at least two electrodes 2.
Optionally, the height of array channel 101 can be less than 1mm with 102 height of chamber is connected.
Optionally, the whole height of inner volume 10 can be less than 1mm.
Optionally, the thickness of flexible electronic pressure sensor device can be less than 1mm, i.e. the thickness of soft shell 1 can be small
In 1mm, can be perfectly suitable in intelligent wearable device.Soft shell 1 can be in flat.As shown in Figure 3 and Figure 4, it is soft
The shape of property shell 1 can be polygon (such as rectangle etc.), circle, abnormity etc..
Optionally, the soft shell 1 is using degradation polyester material or silastic material, in the present embodiment, soft shell 1
Using the silastic material of Ecoflex series as basic material, in concrete application, may be used manufactured by BASF Corp. of Germany
Aliphatic aromatic atactic polyester (Ecoflex), monomer can be：Adipic acid, terephthalic acid (TPA), 1,4- butanediols.
Optionally, liquid conductor eutectic gallium indium is provided in the inner volume 10 as liquid metal conductor, certainly,
Other liquid metal conductors can be set.Electrode 2 can be from the both ends of 1 length direction of soft shell or the both ends of inner volume 10
It is inserted into and is provided with liquid metal conductor 3 in front end and inner volume 10 and is in contact.It can lead between electrode 2 and soft shell 1
Sealing material sealing is crossed, to further improve its reliability.Sealing material can be silicone rubber solution material (Ecoflex).
Optionally, the soft shell 1 includes pairing and connects the first flexible substrate 11 to form the inner volume and the
Two flexible substrates 12, the inner wall of first flexible substrate 11 are provided with the bulge-structure for being used to form the array channel 101
Or/and sunk structure；Second flexible substrate 12 is provided with connection chamber 102, and it is soft that the connection chamber 102 is set to described second
The upper end of property 12 body of matrix.12 pairing of first flexible substrate 11 and the second flexible substrate (sealing bonding), array channel 101
The inner volume 10 of sealing is formed with connecting the connection of chamber 102.First flexible substrate 11 and the second flexible substrate 12 can be bonded shape
Into the soft shell 1 with inner volume 10
Optionally, can be integrally formed with multiple columnar projections of matrix arrangement in the first flexible substrate 11, each column is convex
Gap between rising can form array channel 101.It alternatively, can be integrally formed with matrix arrangement in the first flexible substrate 11
Multiple depressions, each depression connection can also form array channel 101.It is to be appreciated that the generation type of array channel 101 can not
Limit.
In the tension test of the flexible electronic pressure sensor device, sensitivity is higher, and the signal acquired is shown
The good linearity and repeatability, stability, precision, accuracy and reliability are high.Strain reaches 300% and remains to normal work
Make, can preferably be attached to complicated three-dimensional sound state curved surface, as large deformation human synovial at (elbow joint, knee joint), with
Skin compatibility is good, and study is worked normally on people almost not to be influenced.It is the imaginable flexibility sensor of wearable device.
The present invention also provides a kind of wearable device, the wearable device has above-mentioned flexible electronic pressure sensing
Device.Wearable device can be smartwatch, Intelligent bracelet, intelligent glasses, intelligent clothing, virtual implementing helmet etc..Pass through
The application of flexible electronic pressure sensor device, the performance thickness of the flexible electronic pressure sensor device are shown non-less than 1mm
Often good is flexible, and elongation strain reaches 300% and remains to work normally, it is sufficient to and human skin matches in excellence or beauty, in addition using biofacies
The Ecoflex materials of capacitive are as basic material, and people is almost without inadaptable sense in Wearable is integrated into.It also, should
Sensor acquisition is sealing 10 resistance signal of inner volume, eliminates interference of the outside noise to signal, gathered data is more
Accurately.The inner volume 10 portrayed by photoetching process substantially increases the sensitivity of sensor.Certainly, institute of the embodiment of the present invention
The flexible electronic pressure sensor device of offer can also be applied on miscellaneous equipment, also belong to protection scope of the present invention.
The embodiment of the present invention additionally provides a kind of preparation method of flexible electronic pressure sensor device, as shown in Fig. 5 to 12,
Include the following steps：
The soft shell 1 for having Packed inner volume 10 is prepared, and the inner volume 10 includes multiple array channels
101 connect chamber 102 be communicated in multiple 101 same end faces of the array channel；In injection liquid in the inner volume 10
Metallic conductor 3 is inserted into electrode 2 in the both ends of the soft shell 1.Liquid metal conductor 3 can be full of in inner volume 10, electricity
The end of pole 2 is contacted with liquid metal conductor 3.
Specifically, the soft shell 1 is prepared to include the following steps：
The first mold 41, the second mold 42 and flexible material solution are prepared, bubble removing is removed after flexible material solution is mixed；
The flexible material solution for mixing and going after bubble removing is added in into the first mold 41 to be formed with multiple arrays
First flexible substrate 11 of channel 101；
It is added on the second mold 42 and mixes and remove the flexible material solution after bubble removing, and form flexible material solution
The second flexible substrate 12 with connection chamber 102 and half solidification；
First flexible substrate 11 is pressed on to the second flexible substrate of the flexible material (the second flexibility not being fully cured
Matrix 12) on, 11 and second flexible substrate of the first flexible substrate, 12 integrally connected is made to form soft shell 1, while make more
A array channel 101 forms the inner volume 10 of closing with the connection of chamber 102 is connected；
Specifically, include the following steps in injection liquid metal conductor 3 in the inner volume 10：
The both ends of the inner volume 10 are inserted into using two syringes, are led in one of syringe with liquid metal
Body 3；Another syringe takes out the air in the inner volume 10, has the syringe of liquid metal conductor 3 to the inside
Simultaneous implantation liquid metal conductor 3 in cavity volume 10 makes liquid metal conductor 3 extract the syringe full of inner volume 10.
Specifically, electrode 2 is inserted into the both ends of the soft shell 1 (inner volume 10) to include the following steps：
Two electrodes 2 are inserted into the opposite both ends of the inner volume 10 respectively, solidify flexible material using same half
Material is sealed between electrode 2 and soft shell 1.
Specifically, flexible material solution is mixed and bubble removing is gone to include the following steps：
It is put into the container of centrifugal mixer using Ecoflex series silicone rubber solutions, the rotating speed of the centrifugal mixer
For 300-400rpm, after the retention time is 10-15s, the rotating speed of the centrifugal mixer is increased to 1400-1600rpm, during holding
Between for 25-30s, obtain mixed silicone rubber solution；
Mixed silicone rubber solution is put into Vacuum filtration device, opens the vacuum pump of the Vacuum filtration device,
Obtain the silicone rubber solution after bubble removing；It is to be appreciated that flexible material solution is not limited to silicone rubber solution.
The first flexible substrate 11 is formed to include the following steps：
At least one layer of releasing agent (200 releasing agents of ease release) is sprayed on 41 surface of the first mold, is then used
Pipettor fills the silicone rubber solution gone after bubble removing into the cavity of first mold 41；
The first mold 41 that the silicone rubber solution after removing bubble removing is full of in cavity is moved on in oven, at 80 degrees Celsius
Under the conditions of baking 45-60min (such as 46 to 59min), the first flexible substrate 11 is obtained after demoulding；
The second flexible substrate 12 is formed to include the following steps：
Second mold 42 includes upper mold 421 and lower die 422, in the mold cavity surface spray of the lower die 422 of second mold 42
At least one layer of releasing agent is then filled using pipettor into the cavity of the lower die 422 of second mold 42 after removing bubble removing
Silicone rubber solution, then upper mold 421 is molded in lower die 422；
When the silicone rubber solution in the cavity of second mold 42 half solidifies and forms the second flexible substrate 12, die sinking
Then first flexible substrate 11 fastening is pressed on the second flexible substrate 12, treats the first flexible substrate 11 by (removing upper mold 421)
With 12 adhering and sealing of the second flexible substrate it is intact when be placed on and be stored at room temperature 45-60min, make first flexible substrate 11 and described
Second flexible substrate, 12 pairing connects soft shell 1 and forms inner volume 10.
In concrete application, following flow can be referred to：
The first mold 41 made by photoetching process (material is SU-8 photoresists)；Liquid metals conductor eutectic gallium indium
((EGaIn)；Ecoflex series materials with highly flexible；200 releasing agents of ease release.Specifically include following step
Suddenly：
The first step：As shown in Figure 5 and Figure 6, it the Ecoflex 1A and 1B of quality such as takes respectively, is put into the appearance of centrifugal mixer
In device, to ensure two kinds of full and uniform mixing of silicon rubber.Centrifugal mixer rotating speed is 300-400rpm, retention time 10-15s
(12-14s), then rotating speed be increased to 1400-1600rpm, retention time 25-30s.
Second step：As shown in Figure 6 and Figure 7, the silicone rubber solution in the first step is put into Vacuum filtration device, opened true
Sky pump, until removing all bubbles in solution.
Third walks：As shown in figure 8, last layer releasing agent is sprayed on 41 surface of the first mold, then using pipettor toward mold
Cavity in fill the silicone rubber solution obtained in full second step.
4th step：The first mold 41 in third step after filled silicon rubber solution is moved on in oven, in 80 degrees Celsius of item
45-60min is toasted under part, as shown in figure 9, obtaining the first flexible substrate 11.
5th step：Last layer releasing agent is sprayed to the mold cavity surface of the second mold 42, uses the type of pipettor filling lower die 422
Chamber and by upper mold 421 together in lower die 422, as shown in Figure 10.
6th step：When the second flexible substrate 12 formed in the 5th step is in half curdled appearance, first demoulding is soft
Property matrix 11 is gently pressed on the second flexible substrate 12, is placed on when adhering and sealing is intact and is stored at room temperature 45-60min, obtained soft
Property shell 1, as shown in figure 11.Soft shell 1 is taken out from lower die 422 again.
7th step：Two microsyringes is taken to be inserted into the opposite two side of soft shell 1 respectively and stretch into inner volume
10 both ends, a syringe are used for taking out the air of 10 the inside of inner volume, draining fluids conductor-EGaIn, another syringe
For synchronizing in lasting injection liquid conductor (EGaIn) to inner volume 10.It is of course also possible to first inner volume 10 is taken out very
Sky, then liquid conductor is injected into inner volume 10.When liquid conductor (EGaIn) fills full entire inner volume 10, it is inserted into electricity
Pole 2 takes a small amount of silicone rubber solution (being obtained in second step) to seal up port (between 1 side wall of electrode 2 and soft shell
Gap), it can be obtained by flexible extensible electronics strain transducer in this way, as shown in figure 12.This method is prepared simply, can be disposable
It realizes batch production, improves time and cost-effectiveness.Especially suitable for wearable device field especially large deformation situation etc..
A kind of flexible electronic pressure sensor device that the embodiment of the present invention is provided and preparation method thereof, the strain transducer
Using the Ecoflex series materials of highly flexible as basic material.The flexible electronic pressure sensor device has very thin geometry
Feature, thickness can be less than 1mm, and shows extraordinary flexible, and elongation strain reaches 300% and remains to work normally,
Almost work can be integrated with the three-dimensional surface of any complexity, in addition (depth of section, width can be with for 101 size of microarray channel
Less than 1mm) it is smaller, the pressure of very little can make microarray deform and cause resistance variations, meanwhile, the resistance variations letter acquired
Number it is derived from being sealed in the liquid conductor in microarray so that the pressure sensor has higher sensitivity and anti-noise jamming
Ability.The wearable electronic for being especially suitable for being integrated in human skin surface is caused to set using biocompatibility as basic material
It is standby.This method is prepared simply, can disposably be realized batch production, be improved time and cost-effectiveness.The embodiment of the present invention is carried
A kind of flexible electronic pressure sensor device supplied, in pressure test, sensitivity is higher, and the signal acquired shows on the image
Go out good repeatability, measure more accurate.It can easily be sticked with human body three-dimensional skin surface without having sense of discomfort, even
It remains to carry out pressure normal perception measurement at the great knee joint of deflection.It is good with skin compatibility, people is worked normally and is learned
Practising almost does not influence.It is the imaginable flexibility sensor of wearable device
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
Any modification, equivalent replacement or improvement made within refreshing and principle etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of flexible electronic pressure sensor device, which is characterized in that including soft shell, there is inside in the soft shell
Cavity volume, the inner volume include multiple array channels and the chamber that connects for being communicated in multiple array channels, the internal appearance
Intracavitary is provided with liquid metal conductor, and the soft shell is connected at least two and the fluid conductors or semi liquid state conductor phase
The electrode connect.
2. a kind of flexible electronic pressure sensor device as described in claim 1, which is characterized in that the soft shell includes pair
Close the first flexible substrate and the second flexible substrate that connection forms the inner volume, the inner wall setting of first flexible substrate
It is useful for being formed the bulge-structure or/and sunk structure of the array channel；The connection chamber is set to the described second flexible base
Body body.
3. a kind of flexible electronic pressure sensor device as claimed in claim 1 or 2, which is characterized in that the soft shell is adopted
With degradation polyester material or silastic material.
4. a kind of flexible electronic pressure sensor device as claimed in claim 1 or 2, which is characterized in that in the inner volume
It is provided with liquid metal conductor eutectic gallium indium.
5. a kind of wearable device, which is characterized in that the wearable device has as described in any one of claims 1 to 4
A kind of flexible electronic pressure sensor device.
6. a kind of preparation method of flexible electronic pressure sensor device, which is characterized in that include the following steps：
The soft shell with inner volume is prepared, and the inner volume includes multiple array channels and is communicated in multiple described
The connection chamber of array channel；In injecting liquid metal conductor in the inner volume, at least two are inserted into the soft shell
Electrode makes the electrode be in contact with the liquid metal conductor.
7. a kind of preparation method of flexible electronic pressure sensor device as claimed in claim 6, which is characterized in that described in preparation
Soft shell includes the following steps：
The first mold, the second mold and flexible material solution are prepared, bubble removing is removed after flexible material solution is mixed；
The flexible material solution formation for mixing and going after bubble removing is added in into first mold, and there are multiple arrays to lead to
First flexible substrate in road；
It is added in second mold and mixes and remove the flexible material solution after bubble removing, and flexible material solution is made to form tool
There is the second flexible substrate of connection chamber；
First flexible substrate is pressed on second flexible substrate not being fully cured, make first flexible substrate and
The second flexible substrate integrally connected forms soft shell, while makes multiple array channels and connect chamber and connect to form closing
Inner volume.
8. a kind of preparation method of flexible electronic pressure sensor device as claimed in claim 7, which is characterized in that in described interior
Injection liquid metal conductor includes the following steps in portion's cavity volume：
The both ends of the inner volume are inserted into using two syringes, there is liquid metal conductor in one of syringe；Separately
One syringe takes out the air in the inner volume, and the syringe with liquid metal conductor is injected into the inner volume
Liquid metal conductor makes liquid metal conductor extract the syringe full of inner volume.
9. a kind of preparation method of flexible electronic pressure sensor device as claimed in claim 6, which is characterized in that in described interior
The both ends of portion's cavity volume are inserted into electrode and are included the following steps：
Two electrodes are inserted into the both ends of the inner volume respectively, the electricity is sealed in using same half solidification flexible material
Between pole and the soft shell.
10. a kind of preparation method of flexible electronic pressure sensor device as claimed in claim 7, which is characterized in that will be flexible
Material solution mixes and bubble removing is gone to include the following steps：
It is put into the container of centrifugal mixer using Ecoflex series silicone rubber solutions, the rotating speed of the centrifugal mixer is
300-400rpm, after the retention time is 10-15s, the rotating speed of the centrifugal mixer is increased to 1400-1600rpm, retention time
For 25-30s, mixed silicone rubber solution is obtained；
Mixed silicone rubber solution is put into Vacuum filtration device, the vacuum pump of the Vacuum filtration device is opened, obtains
Remove the silicone rubber solution after bubble removing；
The first flexible substrate is formed to include the following steps：
At least one layer of releasing agent is sprayed in first die surface, is then filled out using pipettor into the cavity of first mold
Fill the silicone rubber solution after bubble removing；
First mold is moved on in oven, 45-60min is toasted under conditions of 80 degrees Celsius, obtains having after demoulding more
First flexible substrate of a array channel；
The silicone rubber solution after removing bubble removing is filled into the cavity of second mold using pipettor, is then molded；
When the silicone rubber solution in the cavity of second mold half solidifies and forms the second flexible substrate, die sinking, then by the
One flexible substrate is pressed on the second flexible substrate, and first flexible substrate is made to connect to be formed with the second flexible substrate pairing
Connection chamber connects chamber be communicated in multiple same end faces of the array channel.
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