CN108429482B - Friction nanometer power generator, micro-mechanic sensor and sensor-based system - Google Patents

Friction nanometer power generator, micro-mechanic sensor and sensor-based system Download PDF

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Publication number
CN108429482B
CN108429482B CN201710081177.2A CN201710081177A CN108429482B CN 108429482 B CN108429482 B CN 108429482B CN 201710081177 A CN201710081177 A CN 201710081177A CN 108429482 B CN108429482 B CN 108429482B
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layer
power generator
friction nanometer
nanometer power
micro
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CN201710081177.2A
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Chinese (zh)
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CN108429482A (en
Inventor
李舟
田静静
欧阳涵
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北京纳米能源与系统研究所
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/04Friction generators

Abstract

The present invention provides a kind of friction nanometer power generators, including the first electric layer, the second electric layer and encapsulated layer, the first electric layer includes: the first substrate material layer, the first electrode layer on the first surface that the first substrate material layer is arranged in, the first polymer nanostructured layers being arranged on the first substrate material layer second surface;Second electric layer includes: the second substrate material layer, the second polymer nanostructured layers on the first surface that the second substrate material layer is arranged in, the second electrode lay being arranged on second polymer nanostructured layers, and the second electrode lay is arranged face-to-face with first polymer nanostructured layers;Encapsulated layer is for encapsulating first electric layer and the second electric layer.The present invention also provides a kind of micro-mechanic sensor based on friction nanometer power generator and the sensor-based systems including multiple micro-mechanic sensors.Micro-mechanic sensor of the invention real-time, high can accurately detect faint mechanical signal, and realize wearable application.

Description

Friction nanometer power generator, micro-mechanic sensor and sensor-based system

Technical field

The present invention relates to a kind of sensor, in particular to a kind of friction nanometer power generator, based on friction nanometer power generator Micro-mechanic sensor and sensor-based system.

Background technique

Currently, micro-mechanic sensor mainly has strain-type, pressure resistance type and piezoelectric type Three models.Strain-type is the change power The variation that change is converted into resistance value measures, and resistance value changes with straining caused by power, this transducer sensitivity It is lower.Pressure resistance type sensitivity is higher, and response frequency is preferable, but signal-to-noise ratio is not high, and structure is complicated, is affected by temperature larger.Pressure Electric-type is the piezoelectric effect based on certain crystalline materials, but this sensor signal is very weak and output impedance is very high, needs Faint signal is amplified by voltage amplification or charge, while high output impedance is converted into low output impedance, this sensing The defect of device is that charge is easy leakage, and the interference by electric field is larger.

In addition, presently used micro-mechanic sensor is all made of hard material and medium, it can not be close with test surfaces Fitting, also therefore can not be made into wearable sensors.In addition, for conventional micro-mechanic sensor, it is different when testing pulse The pulse wave difference of position is big, it is difficult to compare, lead to not the spread speed for accurately calculating pulse wave.

Summary of the invention

(1) technical problems to be solved

In view of above-mentioned technical problem, the present invention provides a kind of friction nanometer power generator and based on friction nanometer power generator Micro-mechanic sensor, which real-time, high can accurately detect faint mechanical signal, and realize that mechanics senses The wearable application of device.

(2) technical solution

According to an aspect of the invention, there is provided a kind of friction nanometer power generator, including the first electric layer, the second power generation Layer and encapsulated layer, the first electric layer include: the first substrate material layer, first electrode layer and first polymer nanostructured layers, First electrode layer is arranged on the first surface of the first substrate material layer, and first polymer nanostructured layers are arranged in the first substrate On the second surface of material layer;Second electric layer includes: the second substrate material layer, second polymer nanostructured layers and the second electricity Pole layer, second polymer nanostructured layers are arranged on the first surface of the second substrate material layer, and the second electrode lay setting is the On dimerization object nanostructured layers, the second electrode lay is arranged face-to-face with first polymer nanostructured layers;Encapsulated layer is for sealing Fill the first electric layer and the second electric layer.

According to another aspect of the present invention, a kind of micro-mechanic sensor, including friction nanometer power generator, data are provided Transmitting device and display device, friction nanometer power generator are turned for measuring mechanical signal, friction nanometer power generator by modulus It changes system to connect with data transmission device, display device is connect with data transmission device, for showing measurement data.

According to a further aspect of the invention, a kind of sensor-based system, including multiple micro-mechanic sensors are provided, is put respectively It sets at different sensing positions.

(3) beneficial effect

It can be seen from the above technical proposal that friction nanometer power generator of the invention, be based on this friction nanometer power generator Micro-mechanic sensor and sensor-based system at least have the advantages that one of them:

(1) two frictional layers of friction nanometer power generator of the invention are Nano grade, improve two electric layers Surface charge density improves sensitivity and signal-to-noise ratio, and shortens the response time;Based on the micro- of this friction nanometer power generator Mechanics sensor real-time, high can accurately detect faint mechanical signal;

(2) micro-mechanic sensor of the invention is realized and is passed due to being to form metal as electrode layer on flexible material surface The flexibility of sensor can fit in the surface of test object well, realize the wearable application of mechanics sensor;

(3) micro-mechanic sensor based on the flexible friction nano generator after encapsulation can accurately collect different parts Pulse wave signal, the sensor-based system that multiple sensors cooperatively form can be precisely calculated the spread speed of pulse wave;

(4) signal that encapsulation collects micro-mechanic sensor is more stable, and the interference vulnerable to external environment disturbance, does not improve Signal-to-noise ratio expands its scope of application, such as liquid environment;

(5) micro-mechanic sensor of the invention can play the work of prevention and diagnosis to cardiovascular and cardia disease With realization hurtless measure monitoring technology;

(6) micro-mechanic sensor of the invention can use Bluetooth transmission reception device, realize wireless transmission with it is visual Change analysis.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of encapsulation type of embodiment of the present invention flexible friction nano generator.

Fig. 2 is the structural schematic diagram of the first, second electric layer of the friction nanometer power generator of Fig. 1.

Fig. 3 is the schematic diagram of the nanostructure preparation of the first, second electric layer in Fig. 2.

Fig. 4 is the Sensitivity comparison figure of friction nanometer power generator and other structures friction nanometer power generator of the invention.

Fig. 5 is the composition schematic diagram of micro-mechanic sensor of the embodiment of the present invention.

Fig. 6 is that the micro-mechanic sensor of the embodiment of the present invention is incorporated into the schematic diagram in other devices.

Fig. 7 is the schematic diagram that can measure position using the micro-mechanic sensor of the embodiment of the present invention.

Fig. 8 is the curve graph for measuring the pulse signal of four different parts in Fig. 7.

[main element]

The first electric layer of 1-;

The first flexible material layer of 11-;

12- first electrode layer;

13- first polymer nanostructured layers;

The second electric layer of 2-;

The second flexible material layer of 21-;

22- second polymer nanostructured layers;

23- the second electrode lay.

3- clearance layer;

4- encapsulated layer;

Specific embodiment

Before the present invention is introduced, first to the design principle of the friction nanometer power generator of frictional static effect into Row explanation.Friction nanometer power generator is, therebetween presence different according to the friction electrical property of the surfacing of two frictional layers The difference of receiving and losing electrons ability, when two frictional layers contact, the friction layer material of easy betatopic loses electronics, and be easy to get electronics Friction layer material obtains electronics, makes externally to export electric signal with two kinds of electrode layers that layer material is bonded that rub.When two frictional layers Between contact area when changing, just have electric signal and externally export.

The friction electrical property of material refers to what material was shown during friction or contact occurs with other materials Receiving and losing electrons ability, i.e., when two kinds of materials are in contact one it is positively charged, one is negatively charged, illustrates the receiving and losing electrons of both materials Ability is different, that is, the friction electrical property of the two is different.

To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference Attached drawing, the present invention is described in more detail.

In first exemplary embodiment of the invention, a kind of friction nanometer generating of encapsulation type double-layer structure is provided Machine (TENG).Fig. 1 is the structural schematic diagram of encapsulation type of embodiment of the present invention friction nanometer power generator.As shown in Figure 1, the encapsulation Type friction nanometer power generator includes the first electric layer 1, clearance layer 3, the second electric layer 2 and encapsulated layer 4.First electric layer 1 and Two electric layers 2 are oppositely arranged.

First electric layer includes: the first substrate material layer, first electrode layer and first polymer nanostructured layers, the second hair Electric layer includes: the second substrate material layer, the second electrode lay and second polymer nanostructured layers.In the present embodiment, the first base Bottom material layer and the second substrate material layer are respectively the first flexible material layer and the second flexible material layer.Fig. 2 is friction nanometer hair The structural schematic diagram of first, second electric layer of motor.Wherein, the first electric layer 1 includes the first flexible material layer 11, first First electrode layer 12 is arranged in the first surface of flexible material layer, in the first polymerization of second surface setting of the first flexible material layer 11 Object nanostructured layers 13 (as the first frictional layer).In the present embodiment, first surface is the upper surface of the first flexible material layer, the Two surfaces are the lower surface of the first flexible material layer.Second electric layer 2 includes the second flexible material layer 21, the second flexible material layer Second polymer nanostructured layers 22 are arranged in 21 first surface, and second electrode is arranged on second polymer nanostructured layers 22 23 (while as second frictional layer) of layer, the second electrode lay 23 and first polymer nanostructured layers 13 are arranged face-to-face.

The polymer that first polymer nanostructured layers 13, second polymer nanostructured layers 22 use can be polyamides Asia Amine (Kapton), polytetrafluoroethylene (PTFE) (PTFE), polycarbonate (PC), polyethylene terephthalate (PET) etc..The skill of this field Art personnel should be understood that the polymer in the present embodiment is not limited thereto, as long as obtaining the poly- of electronic capability with certain Close object.

First flexible material layer 11 and the second flexible material layer 21 all can be polymer material, for convenience in flexible material Polymer nanostructures layer, preferably the first flexible material layer 11 and first polymer nanostructured layers 13 is arranged in the surface of the bed of material Material is identical, and it is polymer material that the second flexible material layer 21 is identical as the material of second polymer nanostructured layers 22, the One flexible material layer 11 and the polymer of the second flexible material layer 21 selection can be the same or different.Polymer nanostructures The surface of polymeric layer can be set by micro-nano technology technology, the micro-nano technology technology that can be used have ICP lithographic technique, Photoetching, template etc..

Friction nanometer power generator in the present embodiment is using the second electrode lay 23 and first polymer nanostructured layers 13 contact with each other unseparated mode always.With the presence of a small amount of air between electric layer in order to guarantee two lamellar structures, Guarantee the contact area between two lamellar structures be it is variable, clearance layer 3, gap can be set between two lamellar structures Layer 3 is arranged between the electric layer of two lamellar structures, it is particularly possible to the edge of two lamellar structures be arranged in, can be thickness Range is the cured bar shaped flexible material of 500 μm of -2mm, such as can be the dimethyl silicone polymer (PDMS) of 1mm thickness Gasket.

In other embodiments, the second electrode lay 23 Yu first polymer nanostructured layers 13 of friction nanometer power generator (or the first electric layer and second electric layer) can also be disconnected from each other when not stressing, and stress contacts with each other friction when acting on.

Be arranged on the first polymer nanostructured layers 13 and the second electric layer 2 being arranged on first electric layer 1 The second electrode lay 23 on dimerization object nanostructured layers 22 is nanostructure, and the design of this nanostructure can increase by two Effective contact area of a frictional layer under power effect, improves the surface charge density of two electric layers, improves sensitivity and property It makes an uproar and compares, and shorten the response time.Nanostructure is preferably nano-wire array or nano column array.

First electrode layer and the second electrode lay are constructed from a material that be electrically conducting, and the material of electrode layer can be the same or different, Preferably metal, such as aluminium, iron, silver, platinum, copper, gold etc..Two electrode layers draw two conducting wires and are connected to A/D conversion system, Then it connect to be transmitted in visualization device with blue tooth transmission system and realizes visualization display analysis.Second polymer nanostructure When the second electrode lay 23 on layer 22 uses metal, it is properly termed as nanometer metal structure.

The case where first flexible material layer 11 and second polymer nanostructured layers 22 are all made of polymer, the first electric layer 1 and second electrode layer in electric layer 2 and polymeric layer be in close contact, preferably pass through the side of magnetron sputtering or vapor deposition Conductive material is deposited on the surface of polymeric layer by formula.

In the present embodiment, about the preparation method of friction nanometer power generator, comprising the following steps: in the first base material (magnetron sputtering or vapor deposition) gold particle layer is formed on the second surface of layer and on the first surface of the second substrate material layer;With first Gold particle layer on the second surface of substrate material layer is that template etches first polymer nanostructured layers, with the second substrate material Gold particle layer on the first surface of the bed of material is that template etches second polymer nanostructured layers;In the first substrate material layer On first surface and (magnetron sputtering or steaming are respectively formed in the second polymer nanostructure layer surface of the second substrate material layer Plating) one layer of metal, obtain the first electric layer and the second electric layer;First electric layer and the second electric layer are packaged, obtained Friction nanometer power generator.

In order to which the present invention is more clearly understood, first be arranged on first electric layer 1 in the present embodiment introduced below is poly- Close the double-layer nanostructured of the second polymer nanostructured layers 22 being arranged on object nanostructured layers 13 and the second electric layer 2 Preparation method, as shown in figure 3, should the preparation method is as follows:

Firstly, preparing first polymer film (the first flexible material layer 11) and second polymer film (the second flexible material The bed of material 21), in Fig. 3 shown in (a), it is all made of Kapton (polyimides glue) film, it is thin in first polymer after cleaning up Gold particle layer is sputtered on the second surface of film and on the first surface of second polymer film, in Fig. 3 shown in (b);Then, sharp The nano junction of one layer of Kapton is etched using metallic gold Au stratum granulosum as template with ICP (inductively coupled plasma etching) technology Structure layer, in Fig. 3 shown in (c);Finally, on the first surface of first polymer film and the nano junction of second polymer film Magnetron sputtering about 20min is distinguished on structure surface, sputters one layer of metallic copper, in Fig. 3 shown in (d).Nanostructured layers can be nanometer The height of line or nano column array, nano wire or nano-pillar can be 1-3 microns, and the cross sectional dimensions of nano wire or nano-pillar can Think 100nm-500nm, the density of nano wire or nano-pillar can be every square micron 1-3.Wherein, first electrode layer and The thickness range of two electrode layers can be 50~100nm.

The nanometer polymer structure and nanometer metal structure of the present embodiment are constituted double-layer nanostructured with existing three Kind structure (nanometer polymer structure and planar metallic structure friction, nanometer metal structure and polymer plane friction, planar metal Structure and polymer plane friction) discovery is compared, these three existing structures are made an uproar either in sensitivity, or in property Than upper, or on the response time, double-layer nanostructured friction nanometer power generator of the invention is all much larger than these three friction knots Structure, as shown in figure 4, the sensitivity test result for different structure generator compares.

In order to keep the signal collected more stable, the not interference vulnerable to external environment disturbance improves signal-to-noise ratio, expands it and is applicable in Range, such as can work under liquid (such as testing the pressure on flexible duct surface) or the environment that implants, the present embodiment In be proposed with sealing flexible structure friction nanometer power generator is packaged.Sealing flexible structure encapsulated layer can be soft for two layers Property material is formed.

Encapsulated layer 4 from inside to outside successively include polytetrafluoroethylene film and polydimethylsiloxanefilm film, poly- the four of internal layer The thickness range of fluoroethylene film can be 0.01mm~0.05mm, and the thickness range of the polydimethylsiloxanefilm film of outer layer can Think 0.2~0.6mm.

In second exemplary embodiment of the invention, a kind of micro mechanics biography based on friction nanometer power generator is provided Sensor.Fig. 5 is the composition schematic diagram of micro-mechanic sensor of the embodiment of the present invention.The micro-mechanic sensor includes: that denoising device supplies Power supply, denoising device, friction nanometer power generator (TENG), data transmission device (bluetooth, ZigBee module or WIFI module) And display device.Display device can be computer, mobile phone, APP display screen etc..

For denoising device power supply, voltage is generally required in 3V or more, but crossing conference makes the volume of device become larger, It is inconvenient to carry, so 3-6V is advisable.Connect a switch on denoising device power supply, when measurement, which opens it, can be used.Drop Device power supply of making an uproar is connect with denoising device, and denoising device is connect with friction nanometer power generator.Friction nanometer power generator passes through A/D conversion system is connect with data transmission device;Data transmission device is connect with display device, and display device is surveyed for showing Measure data.

The core component of micro-mechanic sensor of the invention is friction nanometer power generator, the friction nanometer power generator after encapsulation It can be used to measure the faint mechanical signal such as sound, vibration, breathing, pressure, pulse.Therefore, above to friction nanometer generating The explanation of machine all parts is applicable in micro-mechanic sensor in this present embodiment, and details are not described herein again.

In micro-mechanic sensor of the invention, since electric layer is to form metal layer as electrode in polymer surfaces Layer makes sensor realize flexibility, good can fit in the surface of test object.Also be based on TENG it is flexible this TENG and denoising device power supply, denoising device etc. can be incorporated into the flexible substrates such as wrist strap or wrist-watch by characteristic, be realized Wearable measurement (as shown in Figure 6).By taking pulse as an example, micro-mechanic sensor is fixed on wrist strap, is measured with can be convenient each The pulse at a position, as shown in Figure 7.

The micro-mechanic sensor, which is not limited to each position pulse in radial artery, such as Fig. 7, can be carried out testing, and four The pulse signal of different parts is as shown in Figure 8.In addition this sensor is also not limited to test artery, can also be used to test Veneous signal, such as refer to arteries and veins.Furthermore it is possible to which multiple micro-mechanic sensors are formed sensor-based system, multiple micro mechanics can be passed Sensor is placed on different sensing positions while measuring, and can be used for measuring pulse propagation speed.

It include physiological information abundant in human pulse signal, by the pulse signal of different people by time domain or frequency domain Analysis is used as big data background, finds out the corresponding relationship of these information and heart, cardiovascular disease, wearer can be made to above-mentioned Disease found and prevented in advance, and therefore, which, can be to the cardiovascular and heart by measurement human pulse signal The disease at dirty position plays the role of prevention and diagnosis, realizes hurtless measure monitoring technology.

Mechanics sensor production of the invention is simple, at low cost, is only made of two lamellar structures, and signal disturbance is smaller, Signal-to-noise ratio is increased to 40db, can substitute other mechanics sensors in certain fields.

It should be noted that in attached drawing or specification text, the implementation for not being painted or describing is affiliated technology Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, the above-mentioned definition to each element and method is simultaneously It is not limited only to various specific structures, shape or the mode mentioned in embodiment, those of ordinary skill in the art can carry out letter to it It singly changes or replaces, such as:

Clearance layer can be replaced with other solid materials or with cured material;

It should also be noted that, can provide the demonstration of the parameter comprising particular value herein, but these parameters are without definite etc. In corresponding value, but analog value can be similar in acceptable error margin or design constraint.The side mentioned in embodiment It is only the direction with reference to attached drawing to term, such as "upper", "lower", "front", "rear", "left", "right" etc., is not used to limit this The protection scope of invention.In addition, unless specifically described or the step of must sequentially occur, the sequences of above-mentioned steps there is no restriction in It is listed above, and can change or rearrange according to required design.

It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and ability Field technique personnel can be designed alternative embodiment without departing from the scope of the appended claims.In the claims, Any reference symbol between parentheses should not be configured to limitations on claims.

Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention Within the scope of shield.

Claims (18)

1. a kind of friction nanometer power generator, which is characterized in that including the first electric layer, the second electric layer and encapsulated layer, in which:
First electric layer, comprising:
First substrate material layer,
First electrode layer is arranged on the first surface of the first substrate material layer;
First polymer nanostructured layers are arranged on the second surface of the first substrate material layer;
Second electric layer, comprising:
Second substrate material layer,
Second polymer nanostructured layers are arranged on the first surface of the second substrate material layer;
The second electrode lay is arranged on second polymer nanostructured layers;The second electrode lay is received with the first polymer Rice structural level is provided opposite to;
Encapsulated layer, for encapsulating first electric layer and the second electric layer;Wherein,
The first polymer nanostructured layers and/or second polymer nanostructured layers are nano wire or nano column array.
2. friction nanometer power generator according to claim 1, which is characterized in that the first electrode layer and/or the second electricity Pole layer with a thickness of 50~100nm.
3. friction nanometer power generator according to claim 1, which is characterized in that first substrate material layer, the second base Bottom material layer is respectively the first flexible material layer and the second flexible material layer.
4. friction nanometer power generator according to claim 3, which is characterized in that further include:
Clearance layer is arranged between the first electric layer and the second electric layer.
5. friction nanometer power generator according to claim 4, which is characterized in that the clearance layer is arranged in two lamellar knots The edge of structure, is cured bar shaped flexible material, and thickness range is 500 μm of -2mm.
6. friction nanometer power generator according to claim 1-5, it is characterised in that:
First electric layer and the second electric layer contact with each other always;Alternatively,
First electric layer and the second electric layer are disconnected from each other when not stressing, and when stress contacts with each other.
7. friction nanometer power generator according to claim 1-5, which is characterized in that the nano wire or nano-pillar The height of nano wire or nano-pillar is 1-3 microns, cross sectional dimensions 100nm-500nm in array, and density is every square micron 1-3.
8. friction nanometer power generator according to claim 3, it is characterised in that:
First flexible material layer is identical as the material of first polymer nanostructured layers;First polymer nanostructured layers are logical Cross the second surface that first flexible material layer is arranged in micro-nano technology technology;
And/or
Second flexible material layer is identical as the material of second polymer nanostructured layers;Second polymer nanostructured layers are logical Cross the first surface that second flexible material layer is arranged in micro-nano technology technology.
9. friction nanometer power generator according to claim 8, which is characterized in that
The material of the first polymer nanostructured layers and second polymer nanostructured layers is polyimides, polytetrafluoroethyl-ne Alkene, polycarbonate or polyethylene terephthalate.
10. friction nanometer power generator according to claim 3, which is characterized in that the encapsulated layer is sealing flexible structure.
11. friction nanometer power generator according to claim 10, which is characterized in that the encapsulated layer successively wraps from inside to outside Include polytetrafluoroethylene film and polydimethylsiloxanefilm film.
12. friction nanometer power generator according to claim 11, which is characterized in that the thickness of the polytetrafluoroethylene film Range is 0.01mm~0.05mm, and the thickness range of the polydimethylsiloxanefilm film is 0.2~0.6mm.
13. friction nanometer power generator according to any one of claims 1 to 5, which is characterized in that the first electrode layer and The material of the second electrode lay is aluminium, iron, silver, platinum, copper or gold.
14. a kind of micro-mechanic sensor characterized by comprising
Friction nanometer power generator described in claim any one of 3-13, for measuring mechanical signal;
Data transmission device, friction nanometer power generator are connected thereto by A/D conversion system;
Display device is connect with data transmission device, for showing measurement data.
15. micro-mechanic sensor according to claim 14, which is characterized in that further include:
Denoising device power supply and denoising device, wherein denoising device is connect with the friction nanometer power generator.
16. micro-mechanic sensor according to claim 15, which is characterized in that
The data transmission device is bluetooth, ZigBee module or WIFI module;
The display device is computer or mobile phone.
17. micro-mechanic sensor according to claim 14, which is characterized in that the micro-mechanic sensor is fixed on flexibility In substrate, for measuring pulse wave signal.
18. a kind of sensor-based system, which is characterized in that including multiple described in any item micro-mechanic sensors of claim 14-17, It is individually positioned in different sensing positions.
CN201710081177.2A 2017-02-15 2017-02-15 Friction nanometer power generator, micro-mechanic sensor and sensor-based system CN108429482B (en)

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