CN105769121A - Three-dimensional carbon-based pressure sensor making method - Google Patents
Three-dimensional carbon-based pressure sensor making method Download PDFInfo
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- CN105769121A CN105769121A CN201610091023.7A CN201610091023A CN105769121A CN 105769121 A CN105769121 A CN 105769121A CN 201610091023 A CN201610091023 A CN 201610091023A CN 105769121 A CN105769121 A CN 105769121A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
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Abstract
The invention discloses a three-dimensional carbon-based pressure sensor making method, and relates to the technical field of pressure sensors.The method comprises the steps that foam metal nickel is put into a chemical vapor deposition furnace, methane and hydrogen are introduced for a reaction, and graphene is obtained; foam metal nickel which obtains graphene in the first step is soaked in a mixed aqueous solution of ferric nitrate and hydrochloric acid, foam metal nickel is removed, and foamed graphene is obtained; foamed graphene is washed with water, and drying is conducted; carbon-based fibers are arranged on the top and bottom of foamed graphene respectively to serve as a flexible electrode material; polydimethylsiloxane is poured on foamed graphene and carbon-based fiber flexible electrodes, curing is conducted, and a pressure sensor device is obtained.The pressure sensor has good biocompatibility with a human body and can be closely attached to the skin of the human body to collect physiological signals quantificationally in real time.
Description
Technical field
The invention discloses a kind of three-dimensional carbon back pressure transducer preparation method, relate to pressure sensor technique field.
Background technology
Along with the high speed development of information technology, in daily life, people's quantity of information to be dealt with is increasing, and traditional rigid electronic device can not meet people to electronic device gentlier, faster, less, the requirement of Highgrade integration aspect.The solution route of future electronic is in that the device of development flexibility, deformable, human body close friend.In recent years, flexible (bending stretches) electronics is due in different field, for instance the application of the aspects such as the sensor skin of bio-robot, wearable communication device and bionical integrated device and get more and more people's extensive concerning.
Electronic skin, electronics muscle, electronic fiber etc. all represent the integrated electronics of a kind of new principle, large area, shape-plastic.Research and the close electronic skin of human skin sensitivity come from the demand of the detection array of preparation large area, multisensor, and these surfaces are widely used in that artificial intelligence is bionical, medical diagnosis, and replace or replace the aspect such as organ of the mankind.Such as, provide sensing capability will extend their range of application for robot, including: old people accompanies and attends to, medical treatment and nursing etc..These electronic skin sensors are if applied in, on the skin of people, providing diagnosis and the body signal monitoring of high level.
The most challenging electric property allowing flexible device simultaneously obtain exactly of development flexible electronic and mechanical stability.Especially, form the material of flexible integration system and device reasonably to combine, in order to give full play to their mechanically and electrically function under heavily stressed.
In recent years, the pressure transducer in wearable device receives much concern because monitoring human body signal such as joint motions, beat pulse etc..But, this kind of wearable device contains much extremely complex, expensive manufacturing process, thus limiting they extensive uses in reality.Traditional has higher sensitivity based on silicon metal oxide semiconductor field-effect transistor, but they cannot fold, and is therefore not appropriate for preparing flexible device.In the device of follow-on Collapsible mobile, pressure transducer flexible, highly sensitive, low cost becomes to be subject to researcher and more and more payes attention to.Researcher prepares the pressure transducer of multiple flexibility, including the elastomeric dielectric capacitor element of complex and expensive, interlaced piezoresistance sensor, organic field effect tube and the field-effect transistor etc. based on nano-wire array.The pressure transducer of these flexibilities needs well-designed nanostructured, and therefore their cost of manufacture and method are extremely complex and expensive.Therefore, development is a kind of cheap, can large area prepare, to pressure-sensitive flexible material, the pliable pressure sensor being applied to respond on a large scale is imperative.The sensor mechanism of pressure transducer includes: transistor type sensor, capacitance type sensor, piezoelectric transducer and piezoresistive transducer etc..Piezoresistive transducer is a kind of typical pressure transducer, and mechanical pressure signal can be changed into the signal of resistance variations by this sensor.It is due to its attracting advantage that this type of pressure transducer receives much attention, as: the plurality of advantages such as preparation is simple, cheap, signal collection is easy.Generally, the carbon black particle of conduction is doped in flexible resilient macromolecule and prepares piezoresistance sensor by researcher.But, the rubber of these conductions or macromolecule membrane sensor is less sensitive, unstable and be difficult to detect little pressure, therefore limit the application in flexible electronic skin, bionics skin of this material.
WenlongCheng and colleague report by being clipped between two thin polymer electrodes, embedded in a kind of pliable pressure sensor that the cotton paper of nanowires of gold is constituted.They prove that this sensor sensor best with performance so far is equally sensitive, also demonstrate it simultaneously and are used as mike and the application for monitor heart rate.It is essential that this design enable itself at low cost, large area manufacture simply, simultaneously power consumption is very low again.For another example, flexible pressure transducer is integrated in bionics skin, utilizes it to produce signal and execute stressed intensity and position to be reflected in skin surface.These sensors make us from realizing the future electronic device including flexible touch screen display, man-machine interface device and artificial skin closer to a step.But nanowires of gold pressure transducer yet suffers from the shortcomings such as expensive, structure is complicated, technological requirement is high.
In a word, the complicated process of preparation of existing pressure transducer, environmental pollution is big, preparation cost is expensive, not collapsible, portability is poor etc., and shortcoming is also to be further improved.
Summary of the invention
The technical problem to be solved is: for the defect of prior art, a kind of three-dimensional carbon back pressure transducer preparation method is provided, a kind of high stability, highly sensitive pressure transducer can be prepared for measuring physiology signal, and microseism.
The present invention solves above-mentioned technical problem by the following technical solutions:
A kind of three-dimensional carbon back pressure transducer preparation method, concrete steps include:
Step one, foam metal nickel is positioned in chemical vapor deposition stove, passes into methane and react with hydrogen, prepare Graphene；
Step 2, preparation step one obtained have the foam metal nickel of Graphene to be soaked in the mixed aqueous solution of ferric nitrate and hydrochloric acid, and scumming metallic nickel obtains foamed Graphene；
Step 3, with water clean foamy graphite alkene, post-drying；
Step 4, all place carbon based fibers as flexible electrode material at the top of foamy graphite alkene and bottom；
Step 5, on foamy graphite alkene and carbon based fibers flexible electrode upper polydimethylsiloxane, be solidified into pressure transducer devices.
As present invention further optimization scheme, in described step one, the thickness of foam metal nickel is 1～12mm.
As present invention further optimization scheme, in described step one, foam metal nickel and methane, hydrogen react 5～20 minutes under 800～1000 degree.
As present invention further optimization scheme, in described step 2, preparation had in the mixed aqueous solution that the foam metal nickel of Graphene is soaked in ferric nitrate and hydrochloric acid, 80 degree of heating 3～6 hours.
As present invention further optimization scheme, in described step 5, described solidification process needs to solidify 0.5～3 hour in the baking oven of 70～100 degree.
As present invention further optimization scheme, also include step 6: the pressure transducer devices obtained through step 5 is undertaken the senile experiment extruding-recovering, through loop test so that the electric current flowing through device becomes steady by the stepper built.
The present invention adopts above technical scheme compared with prior art, have following technical effect that the present invention utilize the carbon back graphene nano material of conduction be prepared for light, portable, cost is low, simple in construction, preparation is convenient, susceptiveness high, bio-compatibility is good full carbon back low cost, high stable, high-sensitive three-dimensional carbon back pressure transducer.The pressure transducer of the present invention is compatible with human-body biological very well, it is possible to be close to human body skin and physiological signal is carried out real-time, quantitative collection.
Accompanying drawing explanation
Fig. 1 is the schematic flow sheet of the present invention.
Fig. 2 is the equipment effect schematic diagram in a specific embodiment one of the present invention.
Fig. 3 is the equipment effect schematic diagram in another specific embodiment two of the present invention.
Detailed description of the invention
Being described below in detail embodiments of the present invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of same or like function from start to finish.The embodiment described below with reference to accompanying drawing is illustrative of, and is only used for explaining the present invention, and is not construed as limiting the claims.
Below in conjunction with accompanying drawing, technical scheme is described in further detail:
The schematic flow sheet of the present invention is as it is shown in figure 1, the preparation method concrete steps of described three-dimensional carbon back pressure transducer include:
Step one, foam metal nickel is positioned in chemical vapor deposition stove, passes into methane and react with hydrogen, prepare Graphene；
Step 2, preparation step one obtained have the foam metal nickel of Graphene to be soaked in the mixed aqueous solution of ferric nitrate and hydrochloric acid, and scumming metallic nickel obtains foamed Graphene；
Step 3, with water clean foamy graphite alkene, post-drying；
Step 4, all place carbon based fibers as flexible electrode material at the top of foamy graphite alkene and bottom；
Step 5, on foamy graphite alkene and carbon based fibers flexible electrode upper polydimethylsiloxane, be solidified into pressure transducer devices.
The pressure transducer of preparation carries out the senile experiment extruding-recovering by the stepper oneself built.Through the loop test of 50,000 times, the electric current flowing through device becomes very steady, it is possible to the relation between reflection external mechanical power and device current suffered by device exactly.
By the pressure sensor application of aging mistake in the test of two aspects:
The extraneous weak vibration of (i) monitoring: monitor different vibrational states, the regular vibration of such as mobile phone.Shaking according to mobile phone, pressure transducer can depict device current value change curve over time.The different vibration frequency of mobile phone can the curve that changes over time of the different electric current of respective devices.
(ii) monitor various physiological signal, for instance: beat pulse, acoustical vibration etc.: with pressure transducer monitor human body clear-headed time, beat pulse state in bed, it is achieved the collection of physiological signal.If it addition, this sensor to be fitted in the throat position of human body, it is possible to monitor in real time one's voice in speech.
Test as specific embodiment with the use of specific product below, be further described technical scheme.
Case study on implementation one: the test to physiological signal
The pressure transducer prepared is close to wrist pulse place, digital sourcemeter in connection,
I () monitors the change of beat pulse when regaining consciousness and beat pulse in bed.
(ii) fitting near throat by pressure transducer, read from 1 to 10 and read through, digital sourcemeter is recorded and is flow through the curve that the electric current of device changes over time, as shown in Figure 2.Picking out 1,3,5 three numerals, each numeral is read three times, and contrast is originally from the curve of 1 to 10, it has been found that their current waveform keeps consistent.This pressure transducer describing us can detect the faint vibrations pressure produced when speaking very delicately.
Case study on implementation two
Pressure transducer is placed on iPhone6 mobile phone, iPhone6 is transferred to vibration mode.In time dialing this mobile phone, pressure transducer detects mobile phone vibrational waveform under different vibration modes, draws the current-vs-time figure of stable different wave, as shown in Figure 3.
Preparation method of the present invention is simple, raw material is cheap, preparation technology is simple, first passes through and prepares a kind of novel carbon-based material foamy graphite alkene to prepare pressure transducer, and this material preparation method is ripe, cheaply, easily operate.Afterwards, then the foamy graphite alkene of preparation is combined with flexible carbon fiber electrode, then builds polydimethylsiloxane, solidify and prepare pressure sensor.
From above-mentioned specific embodiment, low-pressure is quick on the draw by the present invention:
1. from the beating pattern of pulse different time clear-headed time the pressure transducer of the present invention can feed back rest.
2. can accurately tell the vibrations under different frequency simultaneously, monitor in real time for development physiological signal and provide way.Above in conjunction with accompanying drawing, embodiments of the present invention are explained in detail, but the present invention is not limited to above-mentioned embodiment, in the ken that those of ordinary skill in the art possess, it is also possible to make a variety of changes under the premise without departing from present inventive concept.The above, it it is only presently preferred embodiments of the present invention, not the present invention is done any pro forma restriction, although the present invention is disclosed above with preferred embodiment, but it is not limited to the present invention, any those skilled in the art, without departing within the scope of technical solution of the present invention, when the technology contents of available the disclosure above makes a little change or is modified to the Equivalent embodiments of equivalent variations, in every case it is without departing from technical solution of the present invention content, technical spirit according to the present invention, within the spirit and principles in the present invention, the any simple amendment that above example is made, equivalent replacement and improvement etc., all still fall within the protection domain of technical solution of the present invention.
Claims (6)
1. a three-dimensional carbon back pressure transducer preparation method, it is characterised in that: concrete steps include,
Step one, foam metal nickel is positioned in chemical vapor deposition stove, passes into methane and react with hydrogen, prepare Graphene；
Step 2, preparation step one obtained have the foam metal nickel of Graphene to be soaked in the mixed aqueous solution of ferric nitrate and hydrochloric acid, and scumming metallic nickel obtains foamed Graphene；
Step 3, with water clean foamy graphite alkene, post-drying；
Step 4, all place carbon based fibers as flexible electrode material at the top of foamy graphite alkene and bottom；
Step 5, on foamy graphite alkene and carbon based fibers flexible electrode upper polydimethylsiloxane, be solidified into pressure transducer devices.
2. a kind of three-dimensional carbon back pressure transducer preparation method as claimed in claim 1, it is characterised in that: in described step one, the thickness of foam metal nickel is 1～12mm.
3. a kind of three-dimensional carbon back pressure transducer preparation method as claimed in claim 1, it is characterised in that: in described step one, foam metal nickel and methane, hydrogen react 5～20 minutes under 800～1000 degree.
4. a kind of three-dimensional carbon back pressure transducer preparation method as claimed in claim 1, it is characterised in that: in described step 2, preparation had in the mixed aqueous solution that the foam metal nickel of Graphene is soaked in ferric nitrate and hydrochloric acid, 80 degree of heating 3～6 hours.
5. a kind of three-dimensional carbon back pressure transducer preparation method as claimed in claim 1, it is characterised in that: in described step 5, described solidification process needs to solidify 0.5～3 hour in the baking oven of 70～100 degree.
6. a kind of three-dimensional carbon back pressure transducer preparation method as claimed in claim 1, it is characterized in that: also include step 6: the pressure transducer devices obtained through step 5 is extruded by the stepper built--the senile experiment of recovery, through loop test so that the electric current flowing through device becomes steady.
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Cited By (7)
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| CN106525915A (en) * | 2016-09-30 | 2017-03-22 | 山东师范大学 | Support vector machine based foamed graphene sensor sample detection method and system |
| CN107788976A (en) * | 2017-09-22 | 2018-03-13 | 复旦大学 | Sleep monitor system based on Amplitude integrated electroencephalogram |
| CN108329524A (en) * | 2018-03-08 | 2018-07-27 | 大连理工大学 | A kind of method of modifying of filler and its application |
| CN108896219A (en) * | 2018-07-06 | 2018-11-27 | 清华大学 | Flexible bionic electronic skin and preparation method thereof |
| CN110387061A (en) * | 2019-07-26 | 2019-10-29 | 北京化工大学 | A kind of MXene-PDMS composite foam of hollow structure and its preparation method and application |
| CN111101112A (en) * | 2019-12-31 | 2020-05-05 | 新疆烯金石墨烯科技有限公司 | Graphene-aluminum composite material and preparation method thereof |
| CN111943177A (en) * | 2020-07-29 | 2020-11-17 | 青岛菲灿新材料科技服务有限责任公司 | Three-dimensional net-shaped graphene-based tensile strain sensor and preparation method thereof |
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| CN103254656A (en) * | 2013-04-24 | 2013-08-21 | 上海交通大学 | Flexible polymer-based graphene foam material and preparation method thereof |
| CN104807861A (en) * | 2015-04-09 | 2015-07-29 | 山东师范大学 | Preparation method of spongy graphene-based stretchable gas sensor |
| CN105286816A (en) * | 2015-11-23 | 2016-02-03 | 南京邮电大学 | High-sensitivity flexible pulse condition detection probe based on three-dimensional graphene and preparation method thereof |
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Patent Citations (3)
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| CN103254656A (en) * | 2013-04-24 | 2013-08-21 | 上海交通大学 | Flexible polymer-based graphene foam material and preparation method thereof |
| CN104807861A (en) * | 2015-04-09 | 2015-07-29 | 山东师范大学 | Preparation method of spongy graphene-based stretchable gas sensor |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106525915A (en) * | 2016-09-30 | 2017-03-22 | 山东师范大学 | Support vector machine based foamed graphene sensor sample detection method and system |
| CN107788976A (en) * | 2017-09-22 | 2018-03-13 | 复旦大学 | Sleep monitor system based on Amplitude integrated electroencephalogram |
| CN108329524A (en) * | 2018-03-08 | 2018-07-27 | 大连理工大学 | A kind of method of modifying of filler and its application |
| CN108896219A (en) * | 2018-07-06 | 2018-11-27 | 清华大学 | Flexible bionic electronic skin and preparation method thereof |
| CN108896219B (en) * | 2018-07-06 | 2019-05-21 | 清华大学 | Flexible bionic electronic skin and preparation method thereof |
| CN110387061A (en) * | 2019-07-26 | 2019-10-29 | 北京化工大学 | A kind of MXene-PDMS composite foam of hollow structure and its preparation method and application |
| CN111101112A (en) * | 2019-12-31 | 2020-05-05 | 新疆烯金石墨烯科技有限公司 | Graphene-aluminum composite material and preparation method thereof |
| CN111101112B (en) * | 2019-12-31 | 2022-03-18 | 新疆烯金石墨烯科技有限公司 | Graphene-aluminum composite material and preparation method thereof |
| CN111943177A (en) * | 2020-07-29 | 2020-11-17 | 青岛菲灿新材料科技服务有限责任公司 | Three-dimensional net-shaped graphene-based tensile strain sensor and preparation method thereof |
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