CN106483759B

CN106483759B - Nano-imprinting apparatus

Info

Publication number: CN106483759B
Application number: CN201611181804.1A
Authority: CN
Inventors: 冀然
Original assignee: Germanlitho Co ltd
Current assignee: GERMANLITHO CO., LTD.
Priority date: 2016-12-12
Filing date: 2016-12-12
Publication date: 2020-09-04
Anticipated expiration: 2036-12-12
Also published as: CN106483759A

Abstract

The invention relates to the technical field of nanoimprint lithography, in particular to nanoimprint lithography equipment. It includes impression casing and workstation, and the workstation is located the below of impression casing, impression casing middle part is equipped with the cavity, and the bottom edge is equipped with gyration die clamping cylinder, and the side is equipped with inlet duct and the pipeline of giving vent to anger, and observation window is installed at the top of impression casing, observation window's lower extreme is equipped with mobilizable UV LED face lamp, middle part in the inner chamber of impression casing is equipped with sealed glass for isolated UV LED face lamp and observation window. The invention adopts the pressure regulator and the pressure sensor to combine the constant pressure regulation, and realizes the linear regulation of the imprinting force through the automatic feedback regulation; the temperature control system adopts PID control, controls the temperature accurately, has temperature stability and error far smaller than the equipment on the current market, adopts the UV LED surface lamp, compares pointolite and mercury lamp, and exposure time is short, illumination distribution is even, the production of heat is little, and work efficiency is high.

Description

Nano-imprinting apparatus

Technical Field

The invention relates to the technical field of nanoimprint lithography, in particular to nanoimprint lithography equipment.

Background

With the continuous development of semiconductor technology and precision parts thereof, the application of nano-scale technology is more and more extensive, so that nano-imprint equipment is more and more widely applied to various industries. Based on the needs of the existing market, the defects that the nano-imprinting equipment at the present stage is single in structure, low in automation degree, inaccurate in template positioning, large in imprinting force error in the imprinting process, inaccurate in temperature control in the imprinting process, long in exposure time, large in related parameter control error and the like are overcome, and the market blank is filled well. The technical problem is solved.

Disclosure of Invention

The technical problem to be solved by the invention is how to overcome the defects of the prior art and provide a nano-imprinting device.

The technical scheme adopted by the invention for realizing the purpose is as follows: nanometer impression equipment, including impression casing and workstation, the workstation is located the below of impression casing, impression casing middle part is equipped with the cavity, and the bottom edge is equipped with gyration die clamping cylinder, and the side is equipped with inlet duct and outlet duct, and observation window is installed at the top of impression casing, observation window's lower extreme is equipped with mobilizable UV LED face lamp, middle part in the inner chamber of impression casing is equipped with sealing glass for isolated UVLED face lamp and observation window form the upper end to impression casing middle part cavity and seal. The workstation includes servo elevating platform, working disc, supporting disk and heating plate, the heating plate is fixed the lower extreme of working disc, the bottom surface is fixed on servo elevating platform, and the outer fringe at the heating plate is cup jointed to the supporting disk.

Furthermore, a plurality of vacuum grooves which are uniformly distributed are formed in the upper surface of the working disc and used for fixing a workpiece needing clamping operation on the working disc in an air pressure difference mode, and the bottom of the workpiece is connected with a vacuum pump through a PU pipeline.

Furthermore, a temperature monitor is arranged on the heating plate and used for monitoring the temperature of the workbench.

Furthermore, a plurality of positioning pins which are regularly arranged are arranged at the gap of the vacuum groove, a plurality of cylinders which are connected in parallel are correspondingly arranged at the bottoms of the positioning pins, and the positioning pins are telescopic rods of the cylinders.

Further, an air source pump is connected to the air inlet pipeline, a pressure regulator is arranged on the air inlet pipeline, and a pressure sensor is arranged at the tail end of the air outlet pipeline.

Furthermore, the rotary clamping cylinder is used for clamping the template at the bottom of the cavity of the imprinting shell, so that a closed pressure cavity is formed between the template and the cavity, and the pressure of the pressure cavity is further controlled through an air inlet pipeline and an air outlet pipeline on the imprinting shell.

The stamping device further comprises a controller, wherein the controller is in wired or wireless connection with an HMI (human machine interface), and the controller is connected with the stamping shell and the workbench and used for controlling the rotary clamping cylinder, the UV LED surface lamp and the air source pump in the stamping shell and controlling the workbench and the stamping shell to run in a coordinated manner.

Further, a sealing ring is arranged between the rotary clamping end of the rotary clamping cylinder and a plate to be clamped, the sealing ring is a rectangular silica gel surface, a through hole is formed in the middle of the sealing ring, and the workbench is in direct contact with the template by utilizing the through hole in the sealing ring.

The invention has the advantages that: the linear adjustment of the stamping force is realized by adopting the combination of a pressure regulator and a pressure sensor for constant pressure adjustment and automatic feedback adjustment; the temperature control system adopts PID control, controls the temperature accurately, has temperature stability and error far smaller than the equipment on the current market, adopts the UV LED surface lamp, compares pointolite and mercury lamp, and exposure time is short, illumination distribution is even, the production of heat is little, and work efficiency is high.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention.

Detailed Description

Nanometer impression equipment, including impression casing 1 and workstation 2, workstation 2 is located the below of impression casing 1, impression casing 1 middle part is equipped with the cavity, the bottom edge is equipped with gyration die clamping cylinder 11, the side is equipped with inlet line 12 and outlet duct 13, observation window 14 is installed at the top of impression casing 1, observation window 14's lower extreme is equipped with mobilizable UV LED face lamp 15 (be equipped with and install rack and pinion, realize the removal function through the drive of motor), middle part in the inner chamber of impression casing 1 is equipped with sealing glass 16, be used for isolated UV LED face lamp 15 and observation window 14, it is sealed to form the upper end to impression casing 1 middle part cavity, sealing glass 16 adopts O type circle and sealed glue to seal.

The workbench 2 comprises a servo lifting platform 21, a working disc 22, a supporting disc 24 and a heating disc 23, wherein the heating disc 23 is fixed at the lower end of the working disc 22, the bottom surface of the working disc is fixed on the servo lifting platform 21, and the supporting disc is sleeved on the outer edge of the heating disc.

The invention also comprises a controller which is connected with an HMI through a wire and is connected with the stamping shell 1 and the workbench 2 for controlling the rotary clamping cylinder 11, the UV LED surface lamp 15 and the air source pump in the stamping shell 1 and controlling the coordinated operation between the workbench 2 and the stamping shell 1.

Work dish 22 upper surface is equipped with a plurality of vacuum grooves 231 of evenly arranging for adopt the form of atmospheric pressure difference to fix the panel that needs the centre gripping operation on the work dish 22, its bottom has the vacuum pump through PU pipe connection, when the template is placed on work dish 22, through the vacuum pumping effect of vacuum groove 231, can firmly hold the template, fix on work dish 22. The vacuum groove 231 is connected with a vacuum sensor for measuring a vacuum value on a PU pipe of the vacuum pump, when the vacuum pump is controlled by the controller and starts to work and vacuumize, the vacuum sensor feeds the measured vacuum value back to the controller in real time and displays the vacuum value on an HMI interface, and when the vacuum value does not accord with a set threshold value, the vacuum value can be displayed in the HMI, and the HMI interface displays a correct method for enabling the template (including but not limited to the fixed operation of the template, also including related materials with different functions or effects such as a mask plate, a substrate and the like used in the imprinting industry) to be sucked.

The heating plate 23 is provided with a temperature monitor for monitoring the temperature of the workbench, the temperature monitor transmits the temperature to the controller in real time, and the controller judges whether the temperature meets the imprinting requirement according to a preset temperature threshold value and further displays the temperature value on an HMI interface.

The clearance department of vacuum tank 231 is equipped with the locating pin 232 that a plurality of rules were arranged, locating pin 232 bottom corresponds and is equipped with a plurality of parallelly connected cylinders, locating pin 232 is the telescopic link of cylinder, when locating pin 232 is in non-location state, its upper surface that highly is less than workstation 2 in the working disk 22, when having panel to place on the working disk 22, parameter setting through the controller, the locating pin 232 of the corresponding panel size in location stretches out the upper surface of working disk 22, fix a position panel, after the location, under the control of controller, shrink to its state that highly is less than the working disk upper surface.

The rotary clamping cylinder 11 is used to clamp the template at the bottom of the cavity of the imprinting shell 1, so that a sealed pressure chamber 17 is formed between the template and the cavity, and the pressure of the pressure chamber is further controlled by the gas inlet pipe 12 and the gas outlet pipe 13 on the imprinting shell 1. The rotary clamping head of the rotary clamping cylinder 11 is provided with a pressure sensor, when the rotary clamping cylinder does not clamp the template successfully, the pressure in the pressure cavity 17 is in a low-pressure state, the pressure sensor transmits data to the controller at the moment, and the controller judges that the pressure value does not accord with a preset pressure threshold value, further displays the pressure value on an interface of an HMI (human machine interface) and displays a correct clamping operation mode.

The air inlet pipe 12 is connected with an air source pump (controlled by a controller), the air source pump is also provided with a pressure regulator 121, the tail end of the air outlet pipe 13 is provided with a pressure sensor 131 (a pressure signal transmitted by the pressure sensor positioned on the rotary clamping cylinder has a priority level), pressure information is transmitted to the controller in real time through detection of the pressure sensor and is displayed on an HMI interface, and when the pressure in the pressure cavity 17 does not accord with a pressure threshold value set in the controller, the air source pump and the pressure regulator work correspondingly through control of the controller, and the pressure is regulated to accord with the set pressure value in a specific time period.

A sealing ring 18 is arranged between a rotary clamping head of the rotary clamping cylinder 11 and a plate to be clamped (the template and the mask plate are collectively referred to as the plate), the sealing ring 18 is a rectangular silica gel surface, a through hole is formed in the middle of the sealing ring 18, the diameter of the through hole is larger than that of the working disc 22 and smaller than that of the supporting disc 24, the shortest side of the sealing ring 18 is larger than that of the supporting disc 24, and the working table is in direct contact with the template by using the through hole in the sealing ring 18. The thickness of the sealing ring 18 is thicker than that of the working disc 22

Before clamping the template to form a pressure cavity 17 in the impression housing 1, a sealing ring 18 needs to be placed at the bottom of the template to realize sealing and clamping between the rotary clamping cylinder 11 and the template.

The imprinting process comprises three steps of template manufacturing, template pattern transfer and substrate pattern imprinting.

The invention executes two processes of template pattern transfer and substrate pattern imprinting in the process according to the imprinting process. Wherein, in the template pattern transfer, the mask plate 3 is used as the intermediate material of the pattern transfer, the operation method of the invention is that firstly, the sealing ring is sleeved on the working disk 22, so that the sealing ring falls on the supporting disk 24, the mask plate 3 is placed on the worktable 2 again, because the thickness of the working disk 22 is smaller than the thickness of the sealing ring 18, the upper surface of the supporting disk 24 is flush with the upper surface of the heating disk, the height of the upper surface of the sealing ring 18 is higher than the top surface of the working disk 22, when the mask plate is placed on the worktable, the diameter of the mask plate is smaller than that of the sealing ring 18 through the actual contact with the sealing ring 18, the worktable 2 rises, after the set height is reached, the rotary clamping cylinder 11 clamps the mask plate 3 with the sealing ring 18 at the bottom (the clamping action of the rotary clamping cylinder is carried out by the action of firstly rotating and then clamping), then the worktable 2 returns to the original position, the template after the manufacturing is further placed (the diameter of the template is smaller than that of the working disc), the template is positioned and fixed through a positioning pin 232, a vacuum groove 231 and the like on the working table, photoresist is further coated on the template, the working table 2 rises, the pressure cavity 17 starts to increase pressure until the middle of the mask plate 3 protrudes downwards under the action of pressure, and the working table 2 continues to rise until the lowest protruding end of the mask plate 3 is in contact with the template. As the stage 2 is raised, the mask eventually comes into full contact with the mask 3 (the mask is gradually planarized by the resistance of the mask). And further performing UV illumination (in each process, when the UV LED surface lamp is not needed, the UV LED surface lamp moves to one side of the observation window) or heating according to the property of the mask plate 3, and further processing the mask plate 3 after the photoresist is cured to complete the operation of template pattern transfer.

When the invention carries out the pattern imprinting of a substrate (a target plate for pattern imprinting), the mask plate 3 which finishes the pattern transfer is placed on the workbench 2 with a sealing ring 18 (one surface with a pattern structure faces downwards) again until the mask plate 3 is clamped at the lower end of the imprinting shell 1 and forms a pressure cavity 17 with the cavity, the substrate is further placed on the workbench 2 and is coated with photoresist, the substrate is gradually contacted with the mask plate 3 which generates bulges in the ascending process of the workbench 2, the substrate and the mask plate 3 which are contacted are subjected to UV illumination or heating according to a preset instruction in a controller, and the substrate is further processed after the photoresist is cured, so that the imprinting work of the target pattern on the imprinting target plate is finished.

The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention accordingly, and not to limit the protection scope of the present invention accordingly. All equivalent changes or modifications made in accordance with the spirit of the present disclosure are intended to be covered by the scope of the present disclosure.

Claims

1. The nano imprinting equipment is characterized by comprising an imprinting shell and a workbench, wherein the workbench is positioned below the imprinting shell, a cavity is arranged in the middle of the imprinting shell, a rotary clamping cylinder is arranged at the edge of the bottom of the imprinting shell, an air inlet pipeline and an air outlet pipeline are arranged on the side surface of the imprinting shell, an observation window is installed at the top of the imprinting shell, a movable UVLED (ultraviolet light emitting diode) surface lamp is arranged at the lower end of the observation window, sealing glass is arranged in the middle of an inner cavity of the imprinting shell and used for isolating the UVLED surface lamp from the observation window to form upper end sealing for the cavity in the middle of the imprinting shell, the workbench comprises a servo lifting platform, a working disk, a supporting disk and a heating disk, the heating disk is fixed at the lower end of the working disk, the bottom surface of the;

the rotary clamping cylinder is used for clamping the template at the bottom of the cavity of the imprinting shell, so that a closed pressure cavity is formed between the template and the cavity, and the pressure of the pressure cavity is further controlled through an air inlet pipeline and an air outlet pipeline on the imprinting shell;

the air inlet pipeline is connected with an air source pump, a pressure regulator is arranged on the air inlet pipeline, and a pressure sensor is arranged at the tail end of the air outlet pipeline.

2. The nanoimprinting apparatus of claim 1, wherein: the upper surface of the working disc is provided with a plurality of vacuum grooves which are uniformly distributed and used for fixing a workpiece needing clamping operation on the working disc in a mode of air pressure difference, and the bottom of the workpiece is connected with a vacuum pump through a PU pipeline.

3. The nanoimprinting apparatus of claim 1, wherein: and a temperature monitor is arranged on the heating plate and used for monitoring the temperature of the workbench.

4. The nanoimprinting apparatus of claim 2, characterized in that: the vacuum groove is characterized in that a plurality of positioning pins which are regularly distributed are arranged in the gap, a plurality of parallel cylinders are correspondingly arranged at the bottoms of the positioning pins, and the positioning pins are telescopic rods of the cylinders.

5. The nanoimprinting apparatus of claim 1, wherein: the stamping device is characterized by further comprising a controller, wherein the controller is in wired or wireless connection with an HMI (human machine interface), and the controller is connected with the stamping shell and the workbench and used for controlling a rotary clamping cylinder, a UVLED (ultraviolet light emitting diode) surface lamp and an air source pump in the stamping shell and controlling the workbench and the stamping shell to run in a coordinated mode.

6. The nanoimprinting apparatus of claim 1, wherein: a sealing ring is arranged between the rotary clamping end of the rotary clamping cylinder and a plate to be clamped, the sealing ring is a rectangular silica gel surface, a through hole is formed in the middle of the sealing ring, and the workbench is in direct contact with the template by utilizing the through hole in the sealing ring.