CN103737488A - Vacuum adsorption device and operating method thereof - Google Patents

Vacuum adsorption device and operating method thereof Download PDF

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Publication number
CN103737488A
CN103737488A CN201410003032.7A CN201410003032A CN103737488A CN 103737488 A CN103737488 A CN 103737488A CN 201410003032 A CN201410003032 A CN 201410003032A CN 103737488 A CN103737488 A CN 103737488A
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CN
China
Prior art keywords
suction tray
base
workpiece
positioning device
flexible suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410003032.7A
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Chinese (zh)
Inventor
姚振强
忻晓蔚
徐正松
胡俊
孙姚飞
许胜�
侯耀宗
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Shanghai Jiaotong University
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Shanghai Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Jiaotong University filed Critical Shanghai Jiaotong University
Priority to CN201410003032.7A priority Critical patent/CN103737488A/en
Publication of CN103737488A publication Critical patent/CN103737488A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • B24B41/068Table-like supports for panels, sheets or the like

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

The invention provides a vacuum adsorption device and an operating method thereof. The vacuum adsorption device includes a base 1, a flexible adsorption plate 2, an adsorption plate positioning device 3, a working piece positioning device 5, and a joint and pipe fitting 6. The flexible adsorption plate 2 is arranged on the adsorption plate positioning device 3, the adsorption plate positioning device 3 is arranged on the base 1, and the adsorption plate positioning device 3 is provided with inner holes. The working piece positioning device 5 which is arranged on the periphery of the base 1 is used to regulate the position of a working piece 4 relative to the base 1 through being moved. The lower part of the adsorption plate positioning device 3 is connected with a vacuum pump through the joint and pipe fitting 6 and achieves the adsorption of the flexible adsorption plate 2 to the working piece 4 through the deformation of the flexible adsorption plate 2, thereby enabling the working piece 4 to closely attach to the upper end face of the base 1. The vacuum adsorption device can substantially improve the positioning accuracy of the working pieces made of optical glass, ceramic materials, stainless steel materials, and other nonferromugnetic materials.

Description

Vacuum absorption device and method of operating thereof
Technical field
The invention belongs to mechanical engineering technical field, be specially a kind of vacuum absorption device and method of operating.
Background technology
Optical glass, ceramic material, stainless steel and other nonferromugnetic materials are widely used in precision instrument, high precision measuring instrument.And in such material processing, vacuum absorption device is widely used.Take inertial confinement fusion experiment as example, need numerous high-accuracy large-scale optical glass, and grinding is as main manufacturing process, and the installation accuracy of optical glass flat surface grinding has been proposed to very high requirement, existing vacuum fixture is difficult to meet positioning precision.Therefore, need reliably vacuum absorption device and method of operating thereof easily of one.
Summary of the invention
For defect in prior art, the object of the invention is to overcome the deficiency of existing vacuum fixture, a kind of vacuum absorption device and method of operating are provided.
According to vacuum absorption device provided by the invention, comprising: base 1, flexible suction tray 2, suction tray positioner 3, Working piece positioning device 5 and joint and pipe fitting 6;
Flexible suction tray 2 is installed on suction tray positioner 3; Suction tray positioner 3 is installed on base 1; Suction tray positioner 3 is provided with endoporus; Working piece positioning device 5 is installed on base 1 surrounding, and Working piece positioning device 5 is for adjusting the position of workpiece 4 with respect to base 1 by movement; Suction tray positioner 3 bottoms are connected with vavuum pump by joint and pipe fitting 6, and for be out of shape the absorption of flexible suction tray 2 to workpiece 4 by flexible suction tray 2, workpiece 4 and base 1 upper surface are fitted tightly.
Preferably, also comprise workpiece 4, wherein, flexible suction tray 2 fits tightly formation cavity with workpiece 4, and the gas pressure in this cavity can free adjustment, for adsorbing workpiece 4.
Preferably, suction tray positioner 3 can be adjusted with the relative position of base 1.
Preferably, endoporus can make the gas between flexible suction tray 2 and workpiece 4 pass through.
According to the method for operating of above-mentioned vacuum absorption device provided by the invention, comprise following operating procedure:
First, base 1 is fixed on the Grinder bench that will install;
Secondly, flat surface grinding is carried out in base 1 upper surface, the flatness of assurance device upper surface and with the depth of parallelism of Grinder bench plane;
Again, adjusting suction tray positioner 3 makes flexible suction tray 2 be positioned at correct position with respect to base 1;
Afterwards, utilize Working piece positioning device 5 positioning workpieces 4 positions of vacuum absorption device surrounding;
Finally, utilize vavuum pump by joint and pipe fitting 6, flexible suction tray 2 and the cavity that workpiece 4 forms to be vacuumized, flexible suction tray 2 produces distortion, and drives workpiece 4 and base 1 upper surface laminating, completes the positioning and clamping of workpiece 4.
Compared with prior art, the present invention has following beneficial effect:
The present invention, by the employing of vacuum absorption device and method of operating, can significantly improve optical glass, ceramic material, stainless steel and other nonferromugnetic material workpiece positioning precisions.
Accompanying drawing explanation
By reading the detailed description of non-limiting example being done with reference to the following drawings, it is more obvious that other features, objects and advantages of the present invention will become:
Fig. 1, Fig. 2 are structural representations of the present invention.
In figure:
1 is base;
2 is flexible suction tray;
3 is suction tray positioner;
4 is workpiece;
5 is Working piece positioning device;
6 is joint and pipe fitting.
The specific embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art further to understand the present invention, but not limit in any form the present invention.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, can also make some distortion and improvement.These all belong to protection scope of the present invention.
As shown in Figure 1 and Figure 2, in the present embodiment, a kind of vacuum absorption device comprises: base 1, flexible suction tray 2, suction tray positioner 3, workpiece 4, Working piece positioning device 5, joint and pipe fitting 6.
Flexible suction tray 2 fits tightly formation cavity with workpiece 4, and the gas pressure in this cavity can free adjustment, for adsorbing workpiece 4; Flexible suction tray 2 is fixed on suction tray positioner 3; Suction tray positioner 3 is fixed on base 1, and can adjust the position of suction tray positioner 3 relative bases 1; Suction tray positioner 3 has endoporus, can make the gas between flexible suction tray 2 and workpiece 4 pass through; Working piece positioning device 5 is fixed on base 1 surrounding, by Working piece positioning device, is moved and is adjusted the position of workpiece 4 with respect to base 1; Suction tray positioner 3 bottoms are connected with vavuum pump by joint and pipe fitting 6, and have been out of shape the absorption of flexible suction tray 2 to workpiece 4 by flexible suction tray 2, and workpiece 4 and base 1 upper surface are fitted tightly.
When the present invention works, first, base 1 is fixed on the Grinder bench that will install; Secondly, flat surface grinding is carried out in base 1 upper surface, the flatness of assurance device upper surface and with the depth of parallelism of Grinder bench plane; Again, adjusting suction tray positioner 3 makes flexible suction tray 2 be positioned at correct position with respect to base 1; Afterwards, utilize Working piece positioning device 5 positioning workpieces 4 positions of vacuum absorption device surrounding; Finally, utilize vavuum pump by joint and pipe fitting 6, flexible suction tray 2 and the cavity that workpiece 4 forms to be vacuumized, flexible suction tray 2 produces distortion, and drives workpiece 4 and base 1 upper surface laminating, completes the positioning and clamping of workpiece 4.
Above specific embodiments of the invention are described.It will be appreciated that, the present invention is not limited to above-mentioned specific implementations, and those skilled in the art can make various distortion or modification within the scope of the claims, and this does not affect flesh and blood of the present invention.

Claims (5)

1. a vacuum absorption device, is characterized in that, comprising: base (1), flexible suction tray (2), suction tray positioner (3), Working piece positioning device (5) and joint and pipe fitting (6);
Flexible suction tray (2) is installed on suction tray positioner (3); Suction tray positioner (3) is installed on base (1); Suction tray positioner (3) is provided with endoporus; Working piece positioning device (5) is installed on base (1) surrounding, and Working piece positioning device (5) is for adjusting the position of workpiece (4) with respect to base (1) by movement; Suction tray positioner (3) bottom is connected with vavuum pump by joint and pipe fitting (6), and for be out of shape the absorption of flexible suction tray (2) to workpiece (4) by flexible suction tray (2), workpiece (4) and base (1) upper surface are fitted tightly.
2. vacuum absorption device according to claim 1, is characterized in that, also comprises workpiece (4), wherein, flexible suction tray (2) fits tightly formation cavity with workpiece (4), and the gas pressure in this cavity can free adjustment, for adsorbing workpiece (4).
3. vacuum absorption device according to claim 1, is characterized in that, suction tray positioner (3) can be adjusted with the relative position of base (1).
4. vacuum absorption device according to claim 2, is characterized in that, endoporus can make the gas between flexible suction tray (2) and workpiece (4) pass through.
5. the method for operating of vacuum absorption device according to claim 1, is characterized in that, comprises following operating procedure:
First, base (1) is fixed on the Grinder bench that will install;
Secondly, flat surface grinding is carried out in base (1) upper surface, the flatness of assurance device upper surface and with the depth of parallelism of Grinder bench plane;
Again, adjusting suction tray positioner (3) makes flexible suction tray (2) be positioned at correct position with respect to base (1);
Afterwards, utilize Working piece positioning device (5) positioning workpieces (4) position of vacuum absorption device surrounding;
Finally, utilizing vavuum pump to pass through joint and pipe fitting (6) vacuumizes flexible suction tray (2) and the cavity that workpiece (4) forms, flexible suction tray (2) produces distortion, and drives workpiece (4) and the laminating of base (1) upper surface, completes the positioning and clamping of workpiece (4).
CN201410003032.7A 2014-01-03 2014-01-03 Vacuum adsorption device and operating method thereof Pending CN103737488A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410003032.7A CN103737488A (en) 2014-01-03 2014-01-03 Vacuum adsorption device and operating method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410003032.7A CN103737488A (en) 2014-01-03 2014-01-03 Vacuum adsorption device and operating method thereof

Publications (1)

Publication Number Publication Date
CN103737488A true CN103737488A (en) 2014-04-23

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CN201410003032.7A Pending CN103737488A (en) 2014-01-03 2014-01-03 Vacuum adsorption device and operating method thereof

Country Status (1)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104139326A (en) * 2014-07-29 2014-11-12 中国科学院长春光学精密机械与物理研究所 Vacuum clamp for centering optical element in machining process
CN104339261A (en) * 2014-04-29 2015-02-11 山西太钢不锈钢股份有限公司 Adsorption method and grinding suction table for non-magnetic steel sheet-like sample
CN104551913A (en) * 2014-12-23 2015-04-29 都匀双成机械设备有限公司 Dual-surface de-burring machine for electronic ceramic substrate
CN105834900A (en) * 2016-04-28 2016-08-10 浙江工业大学 Automatic adjustment device for vacuum clamp for polishing workpieces
CN107608024A (en) * 2017-10-18 2018-01-19 江苏亨通光网科技有限公司 A kind of automatic absorbing device and method of attaching for array waveguide grating AWG
CN110587406A (en) * 2019-10-09 2019-12-20 彩虹(合肥)液晶玻璃有限公司 Grinding adjusting device and grinding device
CN116031496A (en) * 2022-12-29 2023-04-28 惠州市超力源科技有限公司 Lithium battery protection board laminating thickness location processingequipment

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3316980C2 (en) * 1983-05-09 1988-04-21 Erwin 7261 Gechingen De Jenkner
US4747589A (en) * 1987-05-15 1988-05-31 Gte Communication Systems Corporation Universal pneumatic parts locating system
DE10324194B4 (en) * 2003-04-30 2007-04-12 Electrovac Ag jig
CN101138834A (en) * 2006-09-06 2008-03-12 财团法人工业技术研究院 Negative pressure vacuum adsorption device and edge-grinding device using said device
CN102476300A (en) * 2010-11-30 2012-05-30 中国科学院大连化学物理研究所 Vacuum adsorption equipment used for fixing thin-wall plane workpiece
CN103201072A (en) * 2010-11-01 2013-07-10 旭硝子株式会社 Chamfering apparatus and chamfering method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3316980C2 (en) * 1983-05-09 1988-04-21 Erwin 7261 Gechingen De Jenkner
US4747589A (en) * 1987-05-15 1988-05-31 Gte Communication Systems Corporation Universal pneumatic parts locating system
DE10324194B4 (en) * 2003-04-30 2007-04-12 Electrovac Ag jig
CN101138834A (en) * 2006-09-06 2008-03-12 财团法人工业技术研究院 Negative pressure vacuum adsorption device and edge-grinding device using said device
CN103201072A (en) * 2010-11-01 2013-07-10 旭硝子株式会社 Chamfering apparatus and chamfering method
CN102476300A (en) * 2010-11-30 2012-05-30 中国科学院大连化学物理研究所 Vacuum adsorption equipment used for fixing thin-wall plane workpiece

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104339261A (en) * 2014-04-29 2015-02-11 山西太钢不锈钢股份有限公司 Adsorption method and grinding suction table for non-magnetic steel sheet-like sample
CN104339261B (en) * 2014-04-29 2017-02-15 山西太钢不锈钢股份有限公司 Grinding suction table for non-magnetic steel sheet-like sample
CN104139326A (en) * 2014-07-29 2014-11-12 中国科学院长春光学精密机械与物理研究所 Vacuum clamp for centering optical element in machining process
CN104551913A (en) * 2014-12-23 2015-04-29 都匀双成机械设备有限公司 Dual-surface de-burring machine for electronic ceramic substrate
CN105834900A (en) * 2016-04-28 2016-08-10 浙江工业大学 Automatic adjustment device for vacuum clamp for polishing workpieces
CN107608024A (en) * 2017-10-18 2018-01-19 江苏亨通光网科技有限公司 A kind of automatic absorbing device and method of attaching for array waveguide grating AWG
CN110587406A (en) * 2019-10-09 2019-12-20 彩虹(合肥)液晶玻璃有限公司 Grinding adjusting device and grinding device
CN116031496A (en) * 2022-12-29 2023-04-28 惠州市超力源科技有限公司 Lithium battery protection board laminating thickness location processingequipment

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Application publication date: 20140423

RJ01 Rejection of invention patent application after publication