CN104216236A - Film and workpiece adherence method applicable to image transfer exposure machine - Google Patents
Film and workpiece adherence method applicable to image transfer exposure machine Download PDFInfo
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- CN104216236A CN104216236A CN201410419325.3A CN201410419325A CN104216236A CN 104216236 A CN104216236 A CN 104216236A CN 201410419325 A CN201410419325 A CN 201410419325A CN 104216236 A CN104216236 A CN 104216236A
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Abstract
The invention discloses a film and workpiece adherence method applicable to an image transfer exposure machine. The method is characterized by comprising the steps of providing a film, a glass plate and a workpiece, arranging a porous material medium layer on the lower surface of the workpiece, arranging a platform on the lower part of the porous material medium layer, connecting the platform with an air pump, arranging a first drive device on the upper part of the glass plate, arranging a second drive device on the lower part of the platform, attaching the film to the lower surface of the glass plate, forming a plurality of tiny pores running through the upper end surface and the lower end surface in the porous material medium layer, sending filter air generated by the air pump to the lower surface of the workpiece through the platform and the tiny pores by virtue of the film and workpiece adherence method, and forming uniform air floating pressure enabling the workpiece to be tightly attached to the film on the lower surface of the workpiece. According to the film and workpiece adherence method, the time for forming the floating negative pressure is several times less than the time for forming the negative pressure, the production efficiency can be remarkably improved, and the adherence negative pressure can be unlimitedly increased.
Description
Technical field
The present invention relates to exposure machine operation technique field, particularly relate to a kind of film and workpiece adherence method of applicable image transfer exposure machine.
Background technology
In batch production printed circuit board process, be through ultraviolet exposure, required circuitous pattern is transferred on workpiece by the film, if having gap or bubble between the film and workpiece, will aliasing be caused, cause ill-exposed, recent decades are for this reason all adopt to vacuumize formation negative pressure in industry, make glass pressurized or distortion reach the laminating of the film and workpiece, but there is following problem all the time: the overlong time 1, vacuumized, make production efficiency step-down; 2, owing to posting the Glass breadks easily of the film, so vacuum tightness can not be too high, this just makes the larger workpiece of distortional stress and the film can not form good laminating, in addition, the remainder filling and leading up vacuum chamber must be removed with different pads (workpiece to different), quick-fried to avoid glass to be taken out, time-consumingly to take a lot of work, be not suitable with automated production; 3, due to workpiece upper and lower surface simultaneously with platform and the glass contact of high rigidity, the not gentle depression of glass itself (with work piece interface) and aluminum alloy platform will cause fits bad, is also difficult to by regulating vacuum tightness to improve the uniformity coefficient of laminating.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of film and workpiece adherence method of applicable image transfer exposure machine, the film and the workpiece adherence method of this applicable image transfer exposure machine are by the inflation to described platform, make to produce uniform air supporting pressure at its porosint dielectric layer surface, fit tightly to force workpiece and the film.
Can under air blowing condition, make the film in image transfer exposure machine and workpiece fit tightly, avoid glass plate to crush, gassing time be short, and the air pressure of air blowing can infinitely increase, and production efficiency is high, and automaticity is high.
For solving the above-mentioned technical matters vacuumizing adherence and exist, the film of applicable image transfer exposure machine provided by the invention and workpiece adherence method comprise provides the film, glass plate, can bonded to each other with film lower surface together with workpiece, at workpiece lower surface, porosint dielectric layer is set, the platform fitted tightly with described porosint dielectric layer is provided with in the bottom of described porosint dielectric layer, described platform is connected with pneumatic pump, portion is provided with the first drive unit on a glass, the second drive unit of the Distance geometry depth of parallelism between the described workpiece of adjustment and the film is provided with at described platform lower, the described film is attached to this glass sheet lower surface, described porosint dielectric layer offers and is somely evenly distributed through the tiny holes of upper and lower both ends of the surface, the filtered air produced by pneumatic pump by the film and workpiece adherence method is by platform and deliver to the lower surface of workpiece through described tiny holes, the uniform air supporting pressure that workpiece and the film are fitted tightly is formed at the lower surface of workpiece, the described film and workpiece adherence method comprise and post the film, described workpiece is placed in described porosint dielectric layer top by mechanical arm, described platform first moves to the position below glass plate, detect workpiece whether tentatively to aim at the position of the film, described glass plate is driven to carry out X by the first drive unit, Y-axis moves and circular-rotation, described second drive unit drives moving up and down of described platform simultaneously, adjust the position of described workpiece and the described film, realize the accurate contraposition of the described film and described workpiece, then described pneumatic pump work, uniform air supporting pressure is formed at described porosint dielectric layer surface by making it to the inflation of described platform, described workpiece and the film is forced to fit tightly, laminating puts in place laggard row ultraviolet exposure, make the image transfer on the described film on described workpiece, then described pneumatic pump is bled, described absorption of workpieces is returned platform remove again.
Preferably, the described film and workpiece adherence method comprise the following steps:
S1: the described film is posted at described glass sheet lower surface, described workpiece is placed on described porosint dielectric layer top by mechanical arm, and described platform first moves to the position below glass plate, and whether CCD camera detects workpiece and tentatively aim at the position of the film;
S2:CCD camera carries out contraposition demarcation to the target on four of described workpiece pilot holes and the film, driven by the first drive unit that described glass plate carries out X, Y-axis moves and circular-rotation, described second drive unit drives moving up and down of described platform simultaneously, adjust the spacing of described workpiece and the described film, realize the accurate contraposition of the described film and described workpiece;
S3: described pneumatic pump is blown, by the tiny holes of described platform and described porosint dielectric layer, described workpiece is blown, the even air supporting pressure produced makes described workpiece and the film fit tightly, detect described workpiece and the described film whether to fit and put in place, if laminating puts in place, ultraviolet light starts exposure, by the image transfer above the described film on described workpiece;
S4: described pneumatic pump air-breathing, makes described workpiece be separated with the described film, described absorption of workpieces is returned described platform surface and removes.
Preferably, the performing step of described step S2 comprises:
S201: described second drive unit drives described platform movement, makes described workpiece movable to the bottom of the described film;
S202: the first drive unit drives that described glass plate carries out X, Y-axis moves and circular-rotation;
S203: described second drive unit drives moving up and down of described platform, adjusts the spacing of described workpiece and the described film, realizes the accurate contraposition of the described film and described workpiece;
Preferably, described second drive unit comprises four and can be elevated separately and for the electric cylinder of the spacing that adjusts described workpiece and platform and the depth of parallelism and three laser displacement sensors, the electric cylinder of each described lifting is arranged at described platform lower.
Preferably, described porosint dielectric layer is pottery or aluminum metallic material composition, and the trickle pore that air can be evenly distributed from it carries out air supporting and absorption.
Preferably, described first drive unit adopts servocontrol, and described glass plate can move and circular-rotation along X, Y-axis relative to the first drive unit.
Preferably, described first drive unit comprises device body, be placed in the Control Component in described device body, be installed in the X-axis screw mandrel on described device body, the X-axis screw rodb base be assembled together with described X-axis screw mandrel, be installed in the Y-axis screw mandrel on described X-axis screw rodb base, to be assembled together Y-axis screw rodb base with described Y-axis screw mandrel, be installed in the 3rd servomotor for driving described glass plate to do circular-rotation on described Y-axis screw rodb base, for the first servomotor driving described first screw mandrel to rotate, for the second servomotor driving described second screw mandrel to rotate, described glass plate and described 3rd servomotor are assembled together.
Preferably, the lower surface of described platform offers an air intake opening, and its upper surface offers the corresponding pore of some and described tiny holes, and described air intake opening is communicated with each described pore, and described air intake opening is connected with described pneumatic pump.
Preferably, described pneumatic pump can infinitely increase the blow gas pressure of described workpiece.
After adopting above-mentioned technical method, the described film is posted at described glass sheet lower surface, described workpiece is placed on described porosint dielectric layer top by mechanical arm, and described platform first moves to the position below glass plate, and whether CCD camera detects workpiece and tentatively aim at the position of the film; The target of CCD camera to four of described workpiece pilot holes and the film carries out centering, driven by the first drive unit that described glass plate carries out X, Y-axis moves and circular-rotation, described second drive unit drives moving up and down of described platform simultaneously, adjust the spacing of described workpiece and the described film, realize the accurate contraposition of the described film and described workpiece, and make described workpiece movable to bonded to each other with the described film; Described pneumatic pump is blown, by described tiny holes, described workpiece is blown, the even air supporting pressure produced makes described workpiece and the film fit tightly, detect described workpiece and the described film whether to fit and put in place, if laminating puts in place, ultraviolet light starts exposure, by the image transfer above the described film on described workpiece.The advantage of this adherence method is:
1, the time of this adherence method formation air supporting normal pressure comparatively forms negative pressure of vacuum time shorten several times, can significantly improve production efficiency;
2, the normal pressure of laminating can unrestrictedly increase, and can regulate the consistance of workpiece and film spacing respectively by the lifting of four of a support platform electric cylinder, to improve the homogeneity of laminating;
3, due to adherence time, workpiece and platform contactless, and be flexible workpiece distortion deacclimatize glass, so the depression of platform and glass etc. to laminating influential effect less;
4, the absorption that possesses of platform itself and air supporting function are conducive to picking and placeing of workpiece and transmit, and more adapt to automated production.
Accompanying drawing explanation
Fig. 1 is that the present invention is applicable to the film of image transfer exposure machine and the operating diagram of workpiece adherence method;
Fig. 2 is that the present invention is applicable to the film of image transfer exposure machine and the operating diagram of workpiece adherence method step S1;
Fig. 3 is that the present invention is applicable to the film of image transfer exposure machine and the operating diagram of workpiece adherence method step S2;
Fig. 4 is that the present invention is applicable to the film of image transfer exposure machine and the operating diagram of workpiece adherence method step S3;
Fig. 5 is that the present invention is applicable to the film of image transfer exposure machine and the operating diagram of workpiece adherence method step S4;
Fig. 6 is that the present invention is applicable to the film of image transfer exposure machine and the flowchart of workpiece adherence method;
Fig. 7 is that the present invention is applicable to the film of image transfer exposure machine and the realization flow figure of workpiece adherence method step S2.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only for explaining the present invention, being not intended to limit the present invention.
Refer to Fig. 1, Fig. 1 is that the present invention is applicable to the film of image transfer exposure machine and the operating diagram of workpiece adherence method, in the present embodiment, the film of applicable image transfer exposure machine and workpiece adherence method comprise provides the film 12, glass plate 11, can bonded to each other with the film 12 lower surface together with workpiece 13, at workpiece 13 lower surface, porosint dielectric layer 14 is set, the platform 15 fitted tightly with porosint dielectric layer 14 is provided with in the bottom of porosint dielectric layer 14, platform 15 is connected with pneumatic pump, glass plate 11 top is provided with the first drive unit, the second drive unit 16 of the Distance geometry depth of parallelism between adjustment workpiece 13 and the film 12 is provided with in platform 15 bottom, the film 12 is attached to this glass plate 11 lower surface, porosint dielectric layer 14 offers and is somely evenly distributed through the tiny holes of upper and lower both ends of the surface, the filtered air produced by pneumatic pump by the film and workpiece adherence method is by platform and deliver to the lower surface of workpiece through described tiny holes, the even air supporting pressure that workpiece 13 and the film 12 are fitted tightly is formed at the lower surface of workpiece 13, the film 13 and workpiece 12 adherence method comprise and post the film 13, described workpiece is placed in described porosint dielectric layer top by mechanical arm, described platform first moves to the position below glass plate, detect workpiece 12 whether tentatively to aim at the position of the glass plate 11 placing the film 13, glass plate 11 is driven to carry out X by the first drive unit, Y-axis moves and circular-rotation, second drive unit drives moving up and down of platform described in 16 simultaneously, the position of adjustment glass plate 11 and the film 12, realize the accurate contraposition of the film 12 and workpiece 13, then described pneumatic pump work, uniform air supporting pressure is formed at described porosint dielectric layer surface by making it to the inflation of described platform, workpiece 13 and the film 12 are fitted tightly, laminating puts in place laggard row ultraviolet exposure, make image transfer on the film 12 on workpiece 13, then described pneumatic pump venting, workpiece 13 is removed.
Refer to Fig. 6, Fig. 6 is that the present invention is applicable to the film of image transfer exposure machine and the flowchart of workpiece adherence method; The film 12 and workpiece 13 adherence method comprise the following steps:
S1: as shown in Figure 2, the described film is posted at described glass sheet lower surface, described workpiece is placed on described porosint dielectric layer top by mechanical arm, and described platform first moves to the position below glass plate, and whether CCD camera detects workpiece and tentatively aim at the position of the film;
S2: as shown in Figure 3, CCD camera carries out contraposition demarcation to the target on four of workpiece 13 pilot holes and the film 12, driven by the first drive unit that described glass plate carries out X, Y-axis moves and circular-rotation, described second drive unit drives moving up and down of described platform simultaneously, adjust the spacing of described workpiece and the described film, realize the accurate contraposition of the described film and described workpiece;
S3: as shown in Figure 4, described pneumatic pump is blown, by the tiny holes of platform 15 with porosint dielectric layer 14, workpiece 13 is blown, the even air supporting pressure produced makes workpiece 13 and the film 12 fit tightly, whether detection workpiece 13 fits with the film 12 is put in place, if laminating puts in place, ultraviolet starts exposure, by the image transfer above the described film on described workpiece;
S4: as shown in Figure 5, described pneumatic pump air-breathing, makes described workpiece be separated with the described film, described absorption of workpieces is returned platform surface and removes.
Refer to Fig. 7, Fig. 7 is that the present invention is applicable to the film of image transfer exposure machine and the realization flow figure of workpiece adherence method step S2;
The performing step of described step S2 comprises:
S201: described second drive unit drives described platform movement, makes described workpiece movable to the bottom of the described film;
S202: the first drive unit drives that described glass plate carries out X, Y-axis moves and circular-rotation;
S203: described second drive unit drives moving up and down of described platform, the spacing of adjustment workpiece 13 and the film 12, realize the accurate contraposition of the film 12 and workpiece 13, in the present embodiment, preferred sensor is laser displacement sensor, in other embodiments, the displacement transducer of other types can also be selected.
In the present embodiment, the preferred material of porosint dielectric layer 14 be ceramic or aluminum metallic material in other embodiments, also can select the material of other types, the tiny holes that air can be evenly distributed from porosint dielectric layer 14 carries out air supporting and absorption.
In the present embodiment, described first drive unit adopts servocontrol, and glass plate 11 can move and circular-rotation along X, Y-axis relative to the first drive unit.
First drive unit comprises device body, be placed in the Control Component in described device body, be installed in the X-axis screw mandrel on described device body, the X-axis screw rodb base be assembled together with described X-axis screw mandrel, be installed in the Y-axis screw mandrel on described X-axis screw rodb base, to be assembled together Y-axis screw rodb base with described Y-axis screw mandrel, be installed in the 3rd servomotor for driving described glass plate to do circular-rotation on described Y-axis screw rodb base, for the first servomotor driving described first screw mandrel to rotate, for the second servomotor driving described second screw mandrel to rotate, described glass plate 11 is assembled together with described 3rd servomotor.
The lower surface of platform 15 offers an air intake opening, and its upper surface offers the corresponding pore of some and described tiny holes, and described air intake opening is communicated with each described pore, and described air intake opening is connected with described pneumatic pump.
Pneumatic pump can unrestrictedly increase the blow gas pressure of workpiece 13.
The film of this applicable image transfer exposure machine and the advantage of workpiece adherence method are:
1, the time of this adherence method formation air supporting normal pressure comparatively forms negative pressure of vacuum time shorten several times, can significantly improve production efficiency;
2, the normal pressure of laminating can unrestrictedly increase, and can regulate the consistance of workpiece and film spacing respectively by the lifting of four of a support platform electric cylinder, to improve the homogeneity of laminating;
3, due to adherence time, workpiece and platform contactless, and be flexible workpiece distortion deacclimatize glass, so the depression of platform and glass etc. to laminating influential effect less;
4, the absorption that possesses of platform itself and air supporting function are conducive to picking and placeing of workpiece and transmit, and more adapt to automated production.
Should be understood that; these are only the preferred embodiments of the present invention; can not therefore limit the scope of the claims of the present invention; every utilize instructions of the present invention and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.
Claims (9)
1. be applicable to the film and the workpiece adherence method of image transfer exposure machine, it is characterized in that: the film is provided, glass plate, can bonded to each other with film lower surface together with workpiece, at workpiece lower surface, porosint dielectric layer is set, the platform fitted tightly with described porosint dielectric layer is provided with in the bottom of porosint dielectric layer, described platform is connected with pneumatic pump, portion is provided with the first drive unit on a glass, the second drive unit of the Distance geometry depth of parallelism between the described workpiece of adjustment and the film is provided with at described platform lower, the described film is attached to this glass sheet lower surface, described porosint dielectric layer offers and is somely evenly distributed through the tiny holes of upper and lower both ends of the surface, the filtered air produced by pneumatic pump by the film and workpiece adherence method is by platform and deliver to the lower surface of workpiece through described tiny holes, the uniform air supporting pressure that workpiece and the film are fitted tightly is formed at the lower surface of workpiece, the described film and workpiece adherence method comprise and post the film, described workpiece is placed in described porosint dielectric layer top by mechanical arm, described platform first moves to the position below glass plate, detect workpiece whether tentatively to aim at the position of the film, described glass plate is driven to carry out X by the first drive unit, Y-axis moves and circular-rotation, described second drive unit drives moving up and down of described platform simultaneously, adjust the spacing of described workpiece and the described film, realize the accurate contraposition of the described film and described workpiece, then described pneumatic pump work, uniform air supporting pressure is formed at described porosint dielectric layer surface by making it to the inflation of described platform, described workpiece and the film is forced to fit tightly, laminating puts in place laggard row ultraviolet exposure, make the image transfer on the described film on described workpiece, then described pneumatic pump getter, described workpiece is removed.
2. the film of applicable image transfer exposure machine according to claim 1 and workpiece adherence method, is characterized in that: described porosint dielectric layer is pottery or aluminum metallic material composition, and the tiny holes that air can be evenly distributed from it carries out air supporting and absorption.
3. the film of applicable image transfer exposure machine according to claim 1 and workpiece adherence method, it is characterized in that: the lower surface of described platform offers an air intake opening, its upper surface offers the corresponding pore of some and described tiny holes, described air intake opening is communicated with each described pore, and described air intake opening is connected with described pneumatic pump.
4. the film of applicable image transfer exposure machine according to claim 1 and workpiece adherence method, is characterized in that: described pneumatic pump can infinitely increase the blow gas pressure of described workpiece.
5. the film of applicable image transfer exposure machine according to claim 1 and workpiece adherence method, is characterized in that: the described film and workpiece adherence method comprise the following steps:
S1: the described film is posted at described glass sheet lower surface, described workpiece is placed on described porosint dielectric layer top by mechanical arm, and described platform first moves to the position below glass plate, and whether CCD camera detects workpiece and tentatively aim at the position of the film;
S2:CCD camera carries out contraposition demarcation to the target on four of described workpiece pilot holes and the film, driven by the first drive unit that described glass plate carries out X, Y-axis moves and circular-rotation, described second drive unit drives moving up and down of described platform simultaneously, adjust the spacing of described workpiece and the described film, realize the accurate contraposition of the described film and described workpiece;
S3: described pneumatic pump is blown, by the tiny holes of described platform and described porosint dielectric layer, described workpiece is blown, the unbroken air supporting pressure produced makes described workpiece and the film fit tightly, detect described workpiece and the described film whether to fit and put in place, if laminating puts in place, ultraviolet starts exposure, by the image transfer above the described film on described workpiece;
S4: described pneumatic pump air-breathing, makes described workpiece be separated with the described film, described absorption of workpieces is returned described platform surface and removes.
6. the film of applicable image transfer exposure machine according to claim 5 and workpiece adherence method, is characterized in that: the performing step of described step S2 comprises:
S201: described second drive unit drives described platform movement, makes described workpiece movable to the bottom of the described film;
S202: the first drive unit drives that described glass plate carries out X, Y-axis moves and circular-rotation;
S203: described second drive unit drives moving up and down of described platform, adjusts the spacing of described workpiece and the described film, realizes the accurate contraposition of the described film and described workpiece.
7. the film of applicable image transfer exposure machine according to claim 6 and workpiece adherence method, it is characterized in that: described second drive unit comprises four and can be elevated separately and for the electric cylinder of the spacing that adjusts described workpiece and platform and the depth of parallelism and three laser displacement sensors, the electric cylinder of each described lifting is arranged at described platform lower.
8. the film of applicable image transfer exposure machine according to claim 5 and workpiece adherence method, is characterized in that: described first drive unit adopts servocontrol, and described glass plate can move and circular-rotation along X, Y-axis relative to the first drive unit.
9. the film of applicable image transfer exposure machine according to claim 8 and workpiece adherence method, it is characterized in that: described first drive unit comprises device body, be placed in the Control Component in described device body, be installed in the X-axis screw mandrel on described device body, the X-axis screw rodb base be assembled together with described X-axis screw mandrel, be installed in the Y-axis screw mandrel on described X-axis screw rodb base, to be assembled together Y-axis screw rodb base with described Y-axis screw mandrel, be installed in the 3rd servomotor for driving described glass plate to do circular-rotation on described Y-axis screw rodb base, for the first servomotor driving described first screw mandrel to rotate, for the second servomotor driving described second screw mandrel to rotate, described glass plate and described 3rd servomotor are assembled together.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410419325.3A CN104216236B (en) | 2014-08-22 | 2014-08-22 | It is suitable for the film and the workpiece adherence method of image transfer exposure machine |
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| CN201410419325.3A CN104216236B (en) | 2014-08-22 | 2014-08-22 | It is suitable for the film and the workpiece adherence method of image transfer exposure machine |
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| CN107561870A (en) * | 2016-06-30 | 2018-01-09 | 上海微电子装备（集团）股份有限公司 | A kind of sports platform adsorbent equipment and lithographic equipment |
| CN114472098A (en) * | 2022-01-27 | 2022-05-13 | 苏州希盟智能装备有限公司 | Optical waveguide piece dispensing and laminating equipment |
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| Publication number | Publication date |
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| CN104216236B (en) | 2016-08-17 |
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