CN106423994A - Automatic cleaning and drying device of photovoltaic solar wafers - Google Patents

Automatic cleaning and drying device of photovoltaic solar wafers Download PDF

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Publication number
CN106423994A
CN106423994A CN201611133622.7A CN201611133622A CN106423994A CN 106423994 A CN106423994 A CN 106423994A CN 201611133622 A CN201611133622 A CN 201611133622A CN 106423994 A CN106423994 A CN 106423994A
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CN
China
Prior art keywords
hydraulic cylinder
photovoltaic solar
rinse bath
cleaning
automatic cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201611133622.7A
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Chinese (zh)
Inventor
钱理
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Individual
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Individual
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Publication date
Application filed by Individual filed Critical Individual
Priority to CN201611133622.7A priority Critical patent/CN106423994A/en
Publication of CN106423994A publication Critical patent/CN106423994A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention discloses an automatic cleaning and drying device of photovoltaic solar wafers. The device comprises cleaning grooves, drying grooves are formed in the right sides of the cleaning grooves, a sliding way is arranged above the cleaning grooves and the drying grooves, a rack is arranged on the right side of the sliding way, a motor is arranged on the right side of a supporting frame, the supporting frame is fixedly sleeved with vertical hydraulic cylinders, electric hydraulic pumps are arranged on the tops of the vertical hydraulic cylinders, the bottoms of the vertical hydraulic cylinders are connected with guide rails, transverse electric hydraulic cylinders are arranged on transverse hydraulic cylinder supporting bases, sliding blocks are arranged at the two ends of each transverse electric hydraulic cylinder, the sliding blocks are mounted on the guide rails, hooks are arranged at the bottoms of the sliding blocks, and lifting baskets are hung on the bottoms of the hooks. The device is simple in structure, the multiple lifting baskets can be lifted at a time, all the cleaning grooves and the drying grooves can work at the same time, and it is ensured that a cleaning and drying assembly line can efficiently work; and meanwhile, the drying grooves are formed in the rear sides of the cleaning grooves, and therefore it is ensured that the machining result of the previous working procedure cannot affect the next working procedure, and the cleaning and drying quality of the photovoltaic solar wafers is improved.

Description

A kind of automatic cleaning drying device of photovoltaic solar silicon chip
Technical field
The present invention relates to photovoltaic solar Wafer Cleaning technical field, specifically a kind of photovoltaic solar silicon chip cleans automatically Drying unit.
Background technology
In the manufacture process of photovoltaic solar cell, due to the pollutant on surface can directly influence making herbs into wool quality, Efficiency, yield rate, quality percentage and transformation efficiency.So the cleaning of silicon chip is also increasingly subject to people's attention, cleaning Purpose is to remove surface contamination impurity, including Organic substance and inorganic matters.These impurity have with state of atom or ionic condition, Have in the form of a film or particle form is present in silicon chip surface.Organic contamination includes photoresist, organic solvent residual thing, synthesis Wax contacts device with people, instrument, vessel bring oils and fatss or fiber.Inorganic pollution includes heavy metal gold, copper, ferrum, chromium etc., seriously Impact minority carrier lifetime and surface conductance;Alkali metal such as sodium etc., causes serious drain;Particle contamination include white residue, dust, Antibacterial, microorganism, organic colloid fiber etc., can lead to various defects.The method removing pollution has physical cleaning and Chemical cleaning Two kinds.
In prior art, photovoltaic solar silicon chip first should be placed on silicon chip to be cleaned on rest stand in cleaning, then The dosing that adds water is carried out, and after the completion of cleaning, water and medicine is discharged and dries, operating process is complicated, and during each cleaning, drying Medicinal liquid will be discharged, cause the great wasting of resources, numerous and diverse operation causes work efficiency low.
Content of the invention
It is an object of the invention to provide a kind of automatic cleaning drying device of photovoltaic solar silicon chip, to solve above-mentioned background The problem proposing in technology.
For achieving the above object, the present invention provides following technical scheme:
A kind of automatic cleaning drying device of photovoltaic solar silicon chip, including rinse bath, bottom of rinse bath is provided with ultrasound wave and plate occurs, Bottom of rinse bath is provided with sewage draining exit, is provided with vibrator on the right side of rinse bath, and rinse bath left bottom is provided with electric heater, rinse bath Right side is drying tank, is provided with high-pressure air hose, is provided with slideway above rinse bath and drying tank, slideway is provided with support in drying tank Frame, is provided with tooth bar on the right side of slideway, be provided with motor on the right side of bracing frame, and motor is provided with motor shaft, and motor shaft is provided with gear, gear It is meshed with tooth bar, on bracing frame, fixed cover is connected to vertical hydraulic cylinder, vertical hydraulic cylinder top is provided with electric hydraulic pump, vertical liquid Cylinder pressure bottom is connected with guide rail, is provided with transverse electric Hydraulic Cylinder Pedestal Used in the middle of guide rail, and transverse hydraulic cylinder support base is provided with horizontal stroke To electrohydraulic cylinder, transverse electric hydraulic cylinder two ends are respectively equipped with slide block by piston rod, and slide block is arranged on guide rail, slide block bottom Portion is provided with hook, and hook bottom hangs with hanging basket.
As the further scheme of the present invention:It is provided with pH meter above electric heater in described rinse bath.
As the further scheme of the present invention:Described drying trench bottom is provided with multiple deionized water shower nozzles.
As the further scheme of the present invention:Described transverse electric hydraulic cylinder is two-way hydraulic cylinder.
As the further scheme of the present invention:Described rinse bath and drying tank are provided with multiple and adopt arranged for interval mode.
Compared with prior art, the invention has the beneficial effects as follows:Present configuration is simple, covers hanging basket transmission because setting Hook, can once lift by crane multiple hanging baskets, make all rinse baths and drying tank can work it is ensured that cleaning, drying flowing water simultaneously Line can be designed with drying tank with efficient operation on rear side of each rinse bath simultaneously, and is designed with multiple going in each drying tank Deionized water nozzle, thus ensure that the processing result of last operation can impact to next operation, increased photovoltaic solar silicon Piece cleaning, drying quality.
Brief description
Fig. 1 is the agent structure schematic diagram of the automatic cleaning drying device of photovoltaic solar silicon chip.
Fig. 2 is photovoltaic solar silicon chip automatic cleaning drying device side view.
In figure:There is plate, 3- hanging basket, 4- vibrator, 5- electric heater, 6- pH meter, 7- in 1- rinse bath, 2- ultrasound wave High-pressure air hose, 8- deionized water shower nozzle, 9- hook, 10- guide rail, 11- transverse electric hydraulic cylinder, the vertical hydraulic cylinder of 12-, 13- are horizontal To electrohydraulic cylinder support base, 14- slide block, 15- drying tank, 16- sewage draining exit, 17- slideway, 18- bracing frame, 19- tooth bar, 20- Motor, 21- motor shaft, 22- gear, 23- electric hydraulic pump.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Site preparation description is it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.It is based on Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of not making creative work Embodiment, broadly falls into the scope of protection of the invention.
Refer to Fig. 1, in the embodiment of the present invention, a kind of automatic cleaning drying device of photovoltaic solar silicon chip, including cleaning Groove 1, rinse bath 1 bottom is provided with ultrasound wave and plate 2 occurs, and rinse bath 1 bottom is provided with sewage draining exit 16, is provided with vibration on the right side of rinse bath 1 Device 4, rinse bath 1 left bottom is provided with electric heater 5, is provided with pH meter 6 above electric heater 5 in rinse bath 1, cleaning Groove 1 right side is drying tank 15, and drying tank 15 bottom is provided with multiple deionized water shower nozzles 8, is provided with high-pressure air hose inside drying tank 15 7, it is provided with slideway 17 above rinse bath 1 and drying tank 15, slip 17 is provided with bracing frame 18, is provided with tooth bar 19 on the right side of slip 17, It is provided with motor 20, motor 20 is provided with motor shaft 21, motor shaft 21 is provided with gear 22, gear 22 and tooth bar 19 on the right side of bracing frame Engagement, on bracing frame 18, fixed cover is connected to vertical hydraulic cylinder 12, and vertical hydraulic cylinder 12 top is provided with electric hydraulic pump 23, vertical liquid Cylinder pressure 12 bottom is connected with guide rail 10, is provided with transverse electric Hydraulic Cylinder Pedestal Used 13 in the middle of guide rail 10, and transverse electric hydraulic cylinder props up Support seat 13 is provided with two-way transverse electric hydraulic cylinder 11, and transverse electric hydraulic cylinder 11 two ends are by piston rod connection sliding block respectively 14, slide block 14 is arranged on guide rail 10, and slide block 14 bottom is provided with hook 9, and hook 9 bottoms hang with hanging basket 3, rinse bath 1 and drying Groove 2 is provided with multiple and arranged for interval mode, arranges a drying tank 2 between each two rinse bath 1.
Present configuration is novel, stable, and when using, the hanging basket 3 of fully loaded photovoltaic solar silicon chip hangs over the present invention On hook 9, in the presence of electric hydraulic pump 23, vertical hydraulic cylinder 12 moves downward, when hanging basket 3 is completely into rinse bath 1, Transverse electric hydraulic pump 11 shrinks, and hook 9 comes off from hanging basket, and then electric hydraulic pump 23 works, and makes vertical hydraulic cylinder receive 12 Contracting, hook 9 withdraws upwards, and in hanging basket 3, silicon chip cleans in rinse bath 1, and ultrasound wave occurs plate 2 to the cleanout fluid in rinse bath 1 Produce ultrasound wave, vibrator 4 makes cleanout fluid shake, and electric heater 5 heats to cleanout fluid, and pH meter measures in real time The acid-base value of rinse bath 1 cleaning liquid inside, when cleaning completes, electric hydraulic pump 23 makes vertical hydraulic cylinder 12 stretch downward, then Hanging basket 3 is tangled, then hanging basket is sling by electric hydraulic pump 23, and motor 20 is energized, electronic during transverse electric hydraulic cylinder 11 Machine 20 passes through gear 22, tooth bar 19 drives hanging basket 3 to turn right motion above drying tank 15, and left side hook will be new to be washed simultaneously To above left side rinse bath 1, when hanging basket 3 reaches drying tank 15 top, electric hydraulic pump 23 makes hanging basket 3 drop to chip transmission In drying tank 15, hanging basket 3 is come off from hook 9 by transverse electric hydraulic cylinder 11, and subsequent electric hydraulic pump 23 will link up with 9 rises, Rear motor 20 energising is allowed to be transferred to above the rinse bath 1 of left side by gear 22 and tooth bar 19 by linking up with 15, according to practical situation Difference, rinse bath 1 has multiple, but is designed with a drying tank 15 on rear side of each rinse bath 1, in real work, each is clear Washing trough 1 and drying tank 15 all work at the same time, greatly improve work efficiency.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment, Er Qie In the case of the spirit or essential attributes of the present invention, the present invention can be realized in other specific forms.Therefore, no matter From the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention is by appended power Profit requires rather than described above limits, it is intended that all in the implication and scope of the equivalency of claim by falling Change is included in the present invention.Any reference in claim should not be considered as limiting involved claim.
Moreover, it will be appreciated that although this specification is been described by according to embodiment, not each embodiment only wraps Containing an independent technical scheme, only for clarity, those skilled in the art should for this narrating mode of description Using description as an entirety, the technical scheme in each embodiment can also form those skilled in the art through appropriately combined Understandable other embodiment.

Claims (7)

1. the automatic cleaning drying device of a kind of photovoltaic solar silicon chip, including rinse bath it is characterised in that bottom of rinse bath is provided with There is plate in ultrasound wave, bottom of rinse bath is provided with sewage draining exit, is provided with vibrator on the right side of rinse bath, and rinse bath left bottom is provided with electronic Heater, is drying tank on the right side of rinse bath, is provided with high-pressure air hose, is provided with slideway above rinse bath and drying tank in drying tank, sliding Road is provided with bracing frame, is provided with tooth bar on the right side of slideway, is provided with motor on the right side of bracing frame, and motor is provided with motor shaft, on motor shaft It is provided with gear, wheel and rack is meshed, on bracing frame, fixed cover is connected to vertical hydraulic cylinder, vertical hydraulic cylinder top is provided with electronic Hydraulic pump, vertical hydraulic cylinder bottom is connected with guide rail, is provided with transverse electric Hydraulic Cylinder Pedestal Used in the middle of guide rail, and transverse hydraulic cylinder props up Support seat is provided with transverse electric hydraulic cylinder, and transverse electric hydraulic cylinder two ends are respectively equipped with slide block by piston rod, and slide block is arranged on On guide rail, slider bottom is provided with hook, and hook bottom hangs with hanging basket.
2. a kind of automatic cleaning drying device of photovoltaic solar silicon chip according to claim 1 is it is characterised in that described clear It is provided with pH meter above electric heater in washing trough.
3. the automatic cleaning drying device of a kind of photovoltaic solar silicon chip according to claim 1 or claim 2, its feature It is, described drying trench bottom is provided with multiple deionized water shower nozzles.
4. the automatic cleaning drying device of a kind of photovoltaic solar silicon chip according to claim 3 is it is characterised in that described horizontal stroke It is two-way hydraulic cylinder to electrohydraulic cylinder.
5. a kind of automatic cleaning drying device of photovoltaic solar silicon chip according to claim 3 is it is characterised in that described clear Washing trough and drying tank are provided with multiple and adopt arranged for interval mode.
6. a kind of automatic cleaning drying device of photovoltaic solar silicon chip according to claim 4 is it is characterised in that described clear Washing trough and drying tank are provided with multiple and adopt arranged for interval mode.
7. the automatic cleaning drying device of a kind of photovoltaic solar silicon chip according to claim 1 or claim 2, its feature It is, described transverse electric hydraulic cylinder is two-way hydraulic cylinder.
CN201611133622.7A 2016-12-10 2016-12-10 Automatic cleaning and drying device of photovoltaic solar wafers Pending CN106423994A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201611133622.7A CN106423994A (en) 2016-12-10 2016-12-10 Automatic cleaning and drying device of photovoltaic solar wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201611133622.7A CN106423994A (en) 2016-12-10 2016-12-10 Automatic cleaning and drying device of photovoltaic solar wafers

Publications (1)

Publication Number Publication Date
CN106423994A true CN106423994A (en) 2017-02-22

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107716440A (en) * 2017-09-25 2018-02-23 南通华林科纳半导体设备有限公司 Solar silicon wafer cleaning machine
CN108039331A (en) * 2017-11-30 2018-05-15 北京南轩兴达电子科技有限公司 A kind of full-automatic silicon wafer cleaning machine
CN109390262A (en) * 2018-11-30 2019-02-26 江苏润阳悦达光伏科技有限公司 The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart
CN110404874A (en) * 2019-06-25 2019-11-05 盐城华旭光电技术有限公司 Integrated circuit board productive power plates Wafer Cleaning drying device
CN111250463A (en) * 2020-01-22 2020-06-09 哈尔滨东安实业发展有限公司 Umbrella-shaped rotary type efficient cleaning line
CN111921945A (en) * 2020-07-14 2020-11-13 海盐得胜化工设备有限公司 Cleaning process for polycrystalline silicon structured packing
CN112259637A (en) * 2020-09-23 2021-01-22 江苏晶品新能源科技有限公司 Solar silicon wafer cleaning and drying integrated device
CN112570373A (en) * 2020-12-07 2021-03-30 江苏应龙光学科技有限公司 High-efficient cleaning equipment is used in screen glass processing
CN114123955A (en) * 2021-10-22 2022-03-01 华能阜新风力发电有限责任公司 Outdoor photovoltaic power generation panel cleaning device
WO2023241728A1 (en) * 2022-06-13 2023-12-21 Tcl Zhonghuan Renewable Energy Technology Co., Ltd. All-in-one wafer cleaning machine for monocrystalline silicon production

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CN204074616U (en) * 2014-09-23 2015-01-07 浙江昊能光电有限公司 A kind of ultrasonic wave solar silicon wafers cleaning machine
CN204746973U (en) * 2015-07-21 2015-11-11 浙江昊能光电有限公司 Novel full -automatic ultrasonic cleaner
CN206561007U (en) * 2016-12-10 2017-10-17 国家电网公司 A kind of automatic cleaning drying device of photovoltaic solar silicon chip

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CN201895002U (en) * 2010-06-12 2011-07-13 王一田 Ultrasonic cleaning device
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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107716440B (en) * 2017-09-25 2020-06-16 南通华林科纳半导体设备有限公司 Solar silicon wafer cleaning machine
CN107716440A (en) * 2017-09-25 2018-02-23 南通华林科纳半导体设备有限公司 Solar silicon wafer cleaning machine
CN108039331A (en) * 2017-11-30 2018-05-15 北京南轩兴达电子科技有限公司 A kind of full-automatic silicon wafer cleaning machine
CN108039331B (en) * 2017-11-30 2020-08-25 北京南轩兴达电子科技有限公司 Full-automatic silicon wafer cleaning machine
CN109390262A (en) * 2018-11-30 2019-02-26 江苏润阳悦达光伏科技有限公司 The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart
CN110404874B (en) * 2019-06-25 2022-02-01 深圳市荣之鑫科技有限公司 Cleaning and drying device for electroplated silicon wafers for integrated circuit board production
CN110404874A (en) * 2019-06-25 2019-11-05 盐城华旭光电技术有限公司 Integrated circuit board productive power plates Wafer Cleaning drying device
CN111250463A (en) * 2020-01-22 2020-06-09 哈尔滨东安实业发展有限公司 Umbrella-shaped rotary type efficient cleaning line
CN111921945A (en) * 2020-07-14 2020-11-13 海盐得胜化工设备有限公司 Cleaning process for polycrystalline silicon structured packing
CN112259637A (en) * 2020-09-23 2021-01-22 江苏晶品新能源科技有限公司 Solar silicon wafer cleaning and drying integrated device
CN112259637B (en) * 2020-09-23 2024-04-12 江苏晶品新能源股份有限公司 Solar silicon wafer washs integrative device of stoving
CN112570373A (en) * 2020-12-07 2021-03-30 江苏应龙光学科技有限公司 High-efficient cleaning equipment is used in screen glass processing
CN112570373B (en) * 2020-12-07 2023-05-09 江苏应龙光学科技有限公司 Screen glass processing is with high-efficient cleaning equipment
CN114123955A (en) * 2021-10-22 2022-03-01 华能阜新风力发电有限责任公司 Outdoor photovoltaic power generation panel cleaning device
CN114123955B (en) * 2021-10-22 2023-06-20 华能阜新风力发电有限责任公司 Outdoor photovoltaic power generation panel cleaning device
WO2023241728A1 (en) * 2022-06-13 2023-12-21 Tcl Zhonghuan Renewable Energy Technology Co., Ltd. All-in-one wafer cleaning machine for monocrystalline silicon production

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Application publication date: 20170222