CN109390262A - The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart - Google Patents

The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart Download PDF

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Publication number
CN109390262A
CN109390262A CN201811451534.0A CN201811451534A CN109390262A CN 109390262 A CN109390262 A CN 109390262A CN 201811451534 A CN201811451534 A CN 201811451534A CN 109390262 A CN109390262 A CN 109390262A
Authority
CN
China
Prior art keywords
rinse bath
gaily decorated
decorated basket
unhook
making herbs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811451534.0A
Other languages
Chinese (zh)
Inventor
李宁
孙红彬
段波
陶龙忠
杨灼坚
李静
沙泉
唐福云
卢佩良
王枫
高东坡
王银
蔡振华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Runyang Yueda Photovoltaic Technology Co Ltd
Original Assignee
Jiangsu Runyang Yueda Photovoltaic Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Runyang Yueda Photovoltaic Technology Co Ltd filed Critical Jiangsu Runyang Yueda Photovoltaic Technology Co Ltd
Priority to CN201811451534.0A priority Critical patent/CN109390262A/en
Publication of CN109390262A publication Critical patent/CN109390262A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B62LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62BHAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
    • B62B3/00Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention belongs to solar battery manufacturing fields, more particularly to a kind of making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart, including car body, several rinse baths, several rinse bath drainage pipelines, several rinse bath water discharging valves, wastewater trough, wastewater trough water discharging valve and wheel, enterprise is in process of production once float basket, press the accidents such as basket, the accident gaily decorated basket can be taken out in first time and it is placed in rinse bath of the invention, it is cleaned using the cleaning solution in rinse bath, the rinse bath water discharging valve on rinse bath drainage pipeline is opened in cleaning after terminating, using rinse bath drainage pipeline by the wastewater trough of discharge of wastewater to its lower end, then the present invention is moved to waste water station using the wheel of car body lower end, opening wastewater trough water discharging valve can be discharged to focus on by waste water, operation of the present invention is simple, make With safety, cleaning effect is good, work efficiency is high, use cost is low and it is not damaged to can protect silicon wafer, has broad application prospects.

Description

The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart
Technical field
The invention belongs to solar battery manufacturing fields more particularly to a kind of cleaning of making herbs into wool groove-type cleaning machine unhook gaily decorated basket to dry in the air Dry turning.
Background technique
With the fast development of solar battery, more and more solar batteries enter civil field, for quality Standard is also higher and higher.In the production process of crystal silicon solar energy battery, making herbs into wool processing, system can be carried out to raw material silicon wafer Suede is its important one of link, and crystalline silicon forms light trapping structure in this link, used sunlight to the greatest extent.It is right In monocrystalline, pyramid flannelette mainly is formed using anisotropic etch of the alkaline solution to it.Current photovoltaic enterprise both domestic and external Industry, floc making flower basket are exactly used a kind of main load bearing component during silicon wafer wool making, have mainly been placed in monocrystalline silicon piece In the gaily decorated basket of card slot, corroded later.
The slubbing process that making herbs into wool is manufactured as solar energy photovoltaic panel is related to the quality problems of back all process steps, thus There are more stringent process specifications to it, especially has to liquid proportion, water temperature, soaking time more stringent Standard, only reaching standard can just make product quality be guaranteed.In process of production, usually because of plant issue or artificial Operational issue, and the Frequent Accidents such as the basket that causes to float, pressure basket, once there is floaing basket, pressure basket accident it is necessary to stop line drain maintenance, clear It manages silicon wafer fragment, cleaning groove body, hot water machine heating, match the operation such as liquid again, in operation, relevant device maintenance personal arrives Field needs to put on hazmat suits, the protective helmet putting on Protective Boots, put on anti-poison respirator, putting on face gear, puts on protection The column operation of gloves etc. one, operating process is cumbersome, and needs that liquid row's light is waited the accident gaily decorated basket could to be taken out out of texturing slot, Because the gaily decorated basket is longer in the time of texturing slot, 100 silicon wafers that this gaily decorated basket is inserted can only also do and scrap processing, normal to handle Great question produces again needs the time of a nearly hour to cause after not catching up with since the accident gaily decorated basket can not take out at the first time The rhythm of procedure production makes company receive very big loss to influence whole production yields.
Summary of the invention
Present invention aim to address above-mentioned the deficiencies in the prior art, provide it is a kind of it is easy to operate, imitated using safe, cleaning The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleaning that fruit is good, work efficiency is high, use cost is low and silicon wafer can be protected not damaged is dried in the air Dry turning.
The present invention solves technical solution used by above-mentioned the deficiencies in the prior art:
A kind of making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleaning purpose airing cart characterized by comprising
Car body, for carrying the other components being disposed thereon;
Several rinse baths, setting is in the car body upper end, and interior to be equipped with cleaning solution, for cleaning the gaily decorated basket, the bottom of rinse bath is set There is rinse bath drainage hole;
Several rinse bath drainage pipelines, setting are flowed in the rinse bath lower end for the cleaning solution in the rinse bath;
Several rinse bath water discharging valves are arranged on the rinse bath drainage pipeline, control the rinse bath drainage pipeline on-off;
Wastewater trough, the cleaning solution being arranged in rinse bath drainage pipeline lower end, the rinse bath are drained through the rinse bath Discharge of pipes is to the wastewater trough;
Wastewater trough water discharging valve is arranged in outside the car body of the wastewater trough side, controls the discharge of waste water in the wastewater trough;
Wheel, setting are freely automatic for the car body in the vehicle bottom.
Preferably, each rinse bath lower end is equipped with rinse bath drainage pipeline in the present invention, individual drainage pipeline It is arranged convenient for being discharged in time to the liquid after cleaning, the timely of the gaily decorated basket is dried after being conducive to cleaning, protects the silicon in the gaily decorated basket Piece is not damaged.
Preferably, each bottom of rinse bath is all provided with there are two rinse bath drainage hole in the present invention, and two rinse baths Drainage hole is separately positioned on the rinse bath two sides, and whirlpool or water flow are formed when draining can be effectively prevented suddenly floats the gaily decorated basket very much It moves.
Preferably, rinse bath water discharging valve, rinse bath row are equipped in the present invention on each rinse bath drainage pipeline Penstock is independently arranged on each rinse bath drainage pipeline, convenient for operation.
Preferably, heretofore described rinse bath water discharging valve is arranged on the outside of the car body, without opening vehicle when use Internal portion, directly outside car body can fast operating, it is time saving and energy saving.
Preferably, heretofore described wheel is Universal self-locking wheel, and conveniently moving, while with self-locking function, use is safe.
Preferably, heretofore described car body rear and front end is equipped with hand push handle, facilitates car body mobile, it is convenient to operate.
Preferably, there are four heretofore described rinse bath is set, four rinse baths are disposed side by side on the car body End.
Preferably, heretofore described cleaning solution is pure water, and use cost is low.
The invention has the advantages that since the making herbs into wool groove-type cleaning machine unhook gaily decorated basket of the present invention cleaning purpose airing cart includes vehicle Body, several rinse baths, several rinse bath drainage pipelines, several rinse bath water discharging valves, wastewater trough, wastewater trough water discharging valve and Wheel, once the basket that floats, the pressure accidents such as basket, so that it may the accident gaily decorated basket is taken out at the first time and is placed on it of the invention clear In washing trough, it is cleaned using the cleaning solution in rinse bath, cleaning is opened clear on rinse bath drainage pipeline after terminating Then washing trough water discharging valve utilizes car body lower end using rinse bath drainage pipeline by the wastewater trough of discharge of wastewater to its lower end The present invention is moved to waste water station by wheel, and waste water discharge can be focused on by opening wastewater trough water discharging valve, the present invention It is easy to operate, using safe, cleaning effect is good, work efficiency is high, use cost is low and silicon wafer can be protected not damaged, have wide Wealthy application prospect.
Detailed description of the invention
Fig. 1, Fig. 2 are a kind of example structure signal that the making herbs into wool groove-type cleaning machine unhook gaily decorated basket of the present invention cleans purpose airing cart Figure and a kind of preferred embodiment schematic diagram, wherein Fig. 2 is the top view of Fig. 1.
Fig. 3 is a kind of example structure schematic diagram that the gaily decorated basket is placed on purpose airing cart of the present invention.
Specific embodiment
It is described below for disclosing the present invention so that those skilled in the art can be realized the present invention.It is excellent in being described below Embodiment is selected to be only used as illustrating, it may occur to persons skilled in the art that other obvious modifications.It defines in the following description Basic principle of the invention can be applied to other embodiments, deformation scheme, improvement project, equivalent program and do not carry on the back Other technologies scheme from the spirit and scope of the present invention.
In the description of the present invention, it should be noted that the instruction such as term " on ", "lower", "left", "right", "front", "rear" Orientation or positional relationship be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description the present invention and simplification retouch It states, rather than the device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation, Therefore it is not considered as limiting the invention.
A kind of example structure that Fig. 1-Fig. 3 shows making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleaning purpose airing cart of the present invention is shown Intention and a kind of preferred embodiment schematic diagram.Making herbs into wool groove-type cleaning machine is mainly used for silicon wafer on manufacture of solar cells line and expands The oils molecule of silicon chip surface, metal impurities, the removal of mechanical damage layer and the production of pyramid flannelette before dissipating, are that a collection is clear It washes, the dry full-automatic comprehensive cleaning process line being integrated of burn into.As shown in figure 3, making herbs into wool slot type described in the present embodiment cleans The machine unhook gaily decorated basket cleans purpose airing cart and is placed with silicon wafer 200 in the gaily decorated basket 100 for cleaning the gaily decorated basket 100.Incorporated by reference to Fig. 1-Fig. 2 Shown, purpose airing cart described in the present embodiment includes car body 10, several rinse baths 20, several rinse bath drainage pipelines 30, Ruo Ganqing Washing trough water discharging valve 40, wastewater trough 50, wastewater trough water discharging valve 60 and wheel 70, wherein the car body 10 is arranged for carrying Other components on it;Several rinse baths 20 are arranged in the car body upper end, interior to be equipped with cleaning solution, spend for cleaning Basket, the bottom of rinse bath are equipped with rinse bath drainage hole 21;Several rinse bath drainage pipelines 30 are arranged in the rinse bath 20 lower ends are flowed for the cleaning solution in the rinse bath;Several settings of rinse bath water discharging valve 40 are arranged in the rinse bath On waterpipe 30, the rinse bath drainage pipeline on-off is controlled;The wastewater trough 50 is arranged in the rinse bath drainage pipeline 30 Lower end, the cleaning solution in the rinse bath 20 are discharged into the wastewater trough 50 through the rinse bath drainage pipeline 30;The waste water Slot water discharging valve 60 is arranged in outside the car body of 50 side of wastewater trough, controls the discharge of waste water in the wastewater trough 50;Institute The setting of wheel 70 is stated in the vehicle bottom, it is freely automatic for the car body.Preferably, wheel 70 described in the present embodiment is ten thousand To from lockwheel, conveniently moving, while with self-locking function, use is safe.
Preferably, as Figure 1-Figure 2, each 20 lower end of rinse bath is equipped with clearly in the present embodiment Washing trough drainage pipeline 30, the setting of independent rinse bath drainage pipeline convenient for arranging the waste liquid after cleaning in time in the present embodiment It puts, the timely of the gaily decorated basket is dried after being conducive to cleaning, and the silicon wafer in the gaily decorated basket is protected not to be damaged.
Preferably, in Fig. 2 it can be seen from the present embodiment each 20 bottom of rinse bath be equipped with Two rinse bath drainage holes 21, and two rinse bath drainage holes 21 are separately positioned on the rinse bath two sides, can be effectively prevented Whirlpool or water flow are formed when draining suddenly makes the gaily decorated basket drift about very much.
Preferably, in Fig. 1 it can be seen from the present embodiment on each rinse bath drainage pipeline 30 It is equipped with rinse bath water discharging valve 40, rinse bath water discharging valve is independently arranged at each rinse bath drainage pipeline in the present embodiment On, convenient for operation.
Preferably, the rinse bath water discharging valve 40 described in the present embodiment it can be seen from Fig. 1, Fig. 2 is arranged In 10 outside of the car body, without opening vehicle body when use, directly outside car body can fast operating, it is time saving and energy saving.
Preferably, as shown in Figure 1 and Figure 2, car body rear and front end described in the present embodiment is equipped with hand-pushing handle Hand 11 facilitates car body mobile, and it is convenient to operate.Preferably, there are four rinse bath 20 described in the present embodiment is set, four cleanings Slot is disposed side by side on 10 upper end of car body.Preferably, cleaning solution described in the present embodiment is pure water, and use cost is low.
Once the basket that floats, the pressure accidents such as basket in enterprise production process, so that it may utilize the taking-up at the first time of gaily decorated basket suspender It is simultaneously placed in rinse bath of the invention by the accident gaily decorated basket, is carried out using the cleaning solution in rinse bath to the silicon wafer in the gaily decorated basket clear It washes, the rinse bath water discharging valve on rinse bath drainage pipeline is opened in cleaning after terminating, using rinse bath drainage pipeline by waste water It is emitted into the wastewater trough of its lower end, the present invention is then moved to waste water station using the wheel of car body lower end, opens wastewater trough row Waste water can be discharged and focus on by penstock, after the waste water emptying in rinse bath, the silicon wafer in the gaily decorated basket and the gaily decorated basket It can voluntarily be dried inside rinse bath.
Compared with the prior art, the present invention mainly has the advantage that
1, work efficiency is high, can accomplish quickly to handle, will not influence yield, with pre-treatment float basket, pressure basket accident need one Hour, it now only needs ten minutes and settles, speed is pervious six times;
2, easy to operate, easy to use, in the past float basket or pressure basket accident need to stop line drain maintenance, clear up silicon wafer fragment, Clean groove body, hot water machine heating, again with the operation such as liquid, in operation, relevant device maintenance personal needs of showing up are put on Hazmat suits, put on protective gloves at the protective helmet putting on Protective Boots, put on anti-poison respirator, putting on face gear, to liquid Row's light could take out the accident gaily decorated basket out of texturing slot, and the accident gaily decorated basket need to only be taken out to bubble out of texturing slot body now in the present invention In rinse bath, cleaning effect is good, and it is not damaged to can protect silicon wafer, reduces companies losses to greatest extent;
3, structure is simple, use cost is low, uses pure water as cleaning solution, and cleaning effect is good;
4, using safe, let off fireworks basket when water will not be splashed with, the rotary switch of valve is convenient in body outer when discharging water Operation, with the water of releasing will not splash;
5, each rinse bath is set there are two drainage hole, and it is too anxious and make the gaily decorated basket that whirlpool or water flow are formed when draining can be effectively prevented Drift breaks silicon wafer.
It should be understood by those skilled in the art that foregoing description and the embodiment of the present invention shown in the drawings are only used as illustrating And it is not intended to limit the present invention.The purpose of the present invention has been fully and effectively achieved.Function and structural principle of the invention exists It shows and illustrates in embodiment, under without departing from the principle, embodiments of the present invention can have any deformation or modification.

Claims (9)

1. a kind of making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart characterized by comprising
Car body, for carrying the other components being disposed thereon;
Several rinse baths, setting is in the car body upper end, and interior to be equipped with cleaning solution, for cleaning the gaily decorated basket, the bottom of rinse bath is set There is rinse bath drainage hole;
Several rinse bath drainage pipelines, setting are flowed in the rinse bath lower end for the cleaning solution in the rinse bath;
Several rinse bath water discharging valves are arranged on the rinse bath drainage pipeline, control the rinse bath drainage pipeline on-off;
Wastewater trough, the cleaning solution being arranged in rinse bath drainage pipeline lower end, the rinse bath are drained through the rinse bath Discharge of pipes is to the wastewater trough;
Wastewater trough water discharging valve is arranged in outside the car body of the wastewater trough side, controls the discharge of waste water in the wastewater trough;
Wheel, setting are freely automatic for the car body in the vehicle bottom.
2. the making herbs into wool groove-type cleaning machine unhook gaily decorated basket according to claim 1 cleans purpose airing cart, which is characterized in that each described Rinse bath lower end is equipped with rinse bath drainage pipeline.
3. the making herbs into wool groove-type cleaning machine unhook gaily decorated basket according to claim 2 cleans purpose airing cart, which is characterized in that each described Bottom of rinse bath is all provided with there are two rinse bath drainage hole, and two rinse bath drainage holes are separately positioned on the rinse bath two Side.
4. the making herbs into wool groove-type cleaning machine unhook gaily decorated basket according to claim 3 cleans purpose airing cart, which is characterized in that each described Rinse bath water discharging valve is equipped on rinse bath drainage pipeline.
5. the making herbs into wool groove-type cleaning machine unhook gaily decorated basket according to claim 4 cleans purpose airing cart, which is characterized in that the cleaning Slot water discharging valve is arranged on the outside of the car body.
6. the making herbs into wool groove-type cleaning machine unhook gaily decorated basket according to claim 1 cleans purpose airing cart, which is characterized in that the wheel For Universal self-locking wheel.
7. the making herbs into wool groove-type cleaning machine unhook gaily decorated basket according to claim 1 cleans purpose airing cart, which is characterized in that the car body Rear and front end is equipped with hand push handle.
8. the making herbs into wool groove-type cleaning machine unhook gaily decorated basket according to claim 1 cleans purpose airing cart, which is characterized in that the cleaning There are four slot is set, four rinse baths are disposed side by side on the car body upper end.
9. the making herbs into wool groove-type cleaning machine unhook gaily decorated basket according to claim 1 cleans purpose airing cart, which is characterized in that the cleaning Liquid is pure water.
CN201811451534.0A 2018-11-30 2018-11-30 The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart Pending CN109390262A (en)

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CN201811451534.0A CN109390262A (en) 2018-11-30 2018-11-30 The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart

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Application Number Priority Date Filing Date Title
CN201811451534.0A CN109390262A (en) 2018-11-30 2018-11-30 The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114806747A (en) * 2022-04-28 2022-07-29 安徽富乐德科技发展股份有限公司 Wafer cleaning water and method for cleaning wafer

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2741679Y (en) * 2004-08-10 2005-11-23 台湾积体电路制造股份有限公司 Quick draining washing tank
CN203317581U (en) * 2013-05-20 2013-12-04 嘉兴博科精密机械有限公司 Accessory cleaning vehicle
CN106423994A (en) * 2016-12-10 2017-02-22 钱理 Automatic cleaning and drying device of photovoltaic solar wafers
CN207250463U (en) * 2017-08-29 2018-04-17 上海强华实业股份有限公司 Wafer fast draining wash tank
CN207386118U (en) * 2017-09-19 2018-05-22 库特勒环保科技(苏州)有限公司 A kind of rinse bath leakage fluid dram filter device of crystal silicon etching device
CN108568427A (en) * 2018-06-22 2018-09-25 中国振华集团永光电子有限公司(国营第八七三厂) A kind of ultrasonic cleaning equipment of silicon chip
CN209150057U (en) * 2018-11-30 2019-07-23 江苏润阳悦达光伏科技有限公司 The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2741679Y (en) * 2004-08-10 2005-11-23 台湾积体电路制造股份有限公司 Quick draining washing tank
CN203317581U (en) * 2013-05-20 2013-12-04 嘉兴博科精密机械有限公司 Accessory cleaning vehicle
CN106423994A (en) * 2016-12-10 2017-02-22 钱理 Automatic cleaning and drying device of photovoltaic solar wafers
CN207250463U (en) * 2017-08-29 2018-04-17 上海强华实业股份有限公司 Wafer fast draining wash tank
CN207386118U (en) * 2017-09-19 2018-05-22 库特勒环保科技(苏州)有限公司 A kind of rinse bath leakage fluid dram filter device of crystal silicon etching device
CN108568427A (en) * 2018-06-22 2018-09-25 中国振华集团永光电子有限公司(国营第八七三厂) A kind of ultrasonic cleaning equipment of silicon chip
CN209150057U (en) * 2018-11-30 2019-07-23 江苏润阳悦达光伏科技有限公司 The making herbs into wool groove-type cleaning machine unhook gaily decorated basket cleans purpose airing cart

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114806747A (en) * 2022-04-28 2022-07-29 安徽富乐德科技发展股份有限公司 Wafer cleaning water and method for cleaning wafer

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