CN109273562A - Making herbs into wool groove-type cleaning machine fragment fisher - Google Patents
Making herbs into wool groove-type cleaning machine fragment fisher Download PDFInfo
- Publication number
- CN109273562A CN109273562A CN201811451543.XA CN201811451543A CN109273562A CN 109273562 A CN109273562 A CN 109273562A CN 201811451543 A CN201811451543 A CN 201811451543A CN 109273562 A CN109273562 A CN 109273562A
- Authority
- CN
- China
- Prior art keywords
- handle
- string bag
- connecting rod
- fisher
- cleaning machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012634 fragment Substances 0.000 title claims abstract description 37
- 238000004140 cleaning Methods 0.000 title claims abstract description 35
- 235000008216 herbs Nutrition 0.000 title claims abstract description 23
- 210000002268 wool Anatomy 0.000 title claims abstract description 23
- 239000000463 material Substances 0.000 claims description 10
- 239000007769 metal material Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 19
- 229910052710 silicon Inorganic materials 0.000 abstract description 19
- 239000010703 silicon Substances 0.000 abstract description 19
- 239000007788 liquid Substances 0.000 abstract description 12
- 238000012423 maintenance Methods 0.000 abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 6
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 235000012431 wafers Nutrition 0.000 description 16
- 238000000034 method Methods 0.000 description 12
- 230000001681 protective effect Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 6
- 239000002574 poison Substances 0.000 description 4
- 230000007812 deficiency Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000033764 rhythmic process Effects 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/08—Etching
- C30B33/10—Etching in solutions or melts
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention belongs to solar battery manufacturing fields, more particularly to a kind of making herbs into wool groove-type cleaning machine fragment fisher, including handle, handle, connecting rod, extension bar, the string bag, spring is equipped between the handle and the handle, described handle one end is flexibly connected the extension bar, described handle one end is equipped with rotary shaft hole, rotary shaft is equipped in the rotary shaft hole, the handle is connected with the connecting rod through the rotary shaft, the connecting rod other end and the handle other end are all connected with the string bag, the present invention only needs operator to press handle when in use, handle drives connecting rod, connecting rod drives the string bag to be rotated, the silicon wafer fragment in texturing slot is taken out at the first time using the string bag, without stopping line drain maintenance, clear up silicon wafer fragment, clean groove body, hot water machine heating, again with the operation such as liquid, operation of the present invention is simple, use peace Entirely, cleaning effect is good, work efficiency is high, can take out silicon wafer fragment at the first time, reduces companies losses, has broad application prospects.
Description
Technical field
The invention belongs to solar battery manufacturing field more particularly to a kind of making herbs into wool groove-type cleaning machine fragment fishers.
Background technique
With the fast development of solar battery, more and more solar batteries enter civil field, for quality
Standard be also it is higher and higher, making herbs into wool be solar energy photovoltaic panel manufacture slubbing process, be related to that the quality of back all process steps is asked
There are more stringent process specifications, especially have to liquid proportion, water temperature, soaking time more tight in topic
The standard of lattice, only reaching standard can just make product quality be guaranteed.In process of production, usually because of plant issue or people
For operational issue, and lead to the Frequent Accidents such as basket, pressure basket that float, once there is floaing basket, pressure basket accident it is necessary to stop line drain maintenance,
It clears up silicon wafer fragment, cleaning groove body, hot water machine heating, match the operation such as liquid, in operation, relevant device maintenance personal again
Show up need to put on hazmat suits, put on Protective Boots, put on anti-poison respirator, put on face gear protective helmet, put on it is anti-
The column operation of hand guard glove etc. one, operating process is cumbersome, and needs that liquid row's light is waited the accident gaily decorated basket could to be taken out of texturing slot
Out, because the gaily decorated basket is longer in the time of texturing slot, 100 silicon wafers that this gaily decorated basket is inserted can only also do and scrap processing, normal to locate
Reason great question produces the time for needing a nearly hour again, since the silicon wafer fragment in the accident gaily decorated basket can not take at the first time
Out, the rhythm for not catching up with later process production is caused so that company is received very big damage to influence whole production yields
It loses.
Summary of the invention
Present invention aim to address above-mentioned the deficiencies in the prior art, provide it is a kind of it is easy to operate, imitated using safe, cleaning
The making herbs into wool groove-type cleaning machine fragment that fruit is good, work efficiency is high, can take out silicon wafer fragment at the first time, reduce companies losses is salvaged
Device.
The present invention solves technical solution used by above-mentioned the deficiencies in the prior art:
A kind of making herbs into wool groove-type cleaning machine fragment fisher characterized by comprising handle, handle, connecting rod, extension bar, the string bag,
Spring is equipped between the handle and the handle, described handle one end is flexibly connected the extension bar, and described handle one end is set
There is rotary shaft hole, is equipped with rotary shaft in the rotary shaft hole, the handle is connected with the connecting rod through the rotary shaft, the company
The bar other end and the handle other end are all connected with the string bag.
Preferably, the cross section of the heretofore described string bag is triangular in shape, and the string bag can be reduced in use process in making herbs into wool
Resistance when being moved in slot, it is time saving and energy saving, improve working efficiency.
Preferably, the rectangular triangle in the cross section of the heretofore described string bag, and the bevel edge of the right angled triangle with
The connecting rod and extension bar are connected, and the string bag is straight flange on one side, and the string bag can be made close to etching cleaning machine groove body corner, cleaned
Journey does not stay dead angle, keeps cleaning effect more significant, cleaner.
Preferably, the heretofore described string bag is higher than the string bag front end height in the height of the hypotenuse
Degree, the fragment of collection floating on water that can be more convenient.
Preferably, the heretofore described string bag is equipped with several meshes, can be further reduced the string bag and move in texturing slot
Resistance when dynamic, it is time saving and energy saving, further increase working efficiency.
Preferably, it is made among heretofore described connecting rod and extension bar of metal material, packet outside the metal material
The material of acid-alkali-corrosive-resisting is wrapped up in, use is safe, and long using the time.
Preferably, the heretofore described string bag is made of acid-alkali-corrosive-resisting material.
The invention has the advantages that since making herbs into wool groove-type cleaning machine fragment fisher of the present invention includes handle, handle, company
Bar, extension bar, the string bag are equipped with spring between the handle and the handle, described handle one end is flexibly connected the extension bar,
Described handle one end is equipped with rotary shaft hole, rotary shaft is equipped in the rotary shaft hole, the handle and the connecting rod are through the rotation
Shaft is connected, and the connecting rod other end and the handle other end are all connected with the string bag, thus the present invention only needs when in use
Operator is wanted to press handle, handle drives connecting rod, and connecting rod drives the string bag to be rotated, using the string bag at the first time by texturing slot
In silicon wafer fragment take out, without stop line drain maintenance, cleaning silicon wafer fragment, cleaning groove body, hot water machine heating, again with liquid
Deng operation, simultaneously because in the present invention be equipped with extension bar, allow operator in operation process with dangerous corrosive liquids
Enough distances are kept, operator is without putting on hazmat suits, putting on Protective Boots, put on anti-poison respirator, put on face
The protective helmet of gear, a column operation such as put on protective gloves, operation of the present invention is simple, using safe, cleaning effect is good, work is imitated
Rate is high, can take out silicon wafer fragment at the first time, reduces companies losses, has broad application prospects.
Detailed description of the invention
Fig. 1, Fig. 2 are a kind of example structure schematic diagram and one of making herbs into wool groove-type cleaning machine fragment fisher of the present invention
Kind preferred embodiment schematic diagram, wherein status diagram when Fig. 1 is by lower handle, Fig. 2 are state signal when unclamping handle
Figure.
Fig. 3 is a kind of example structure schematic diagram of the string bag of the present invention.
Specific embodiment
It is described below for disclosing the present invention so that those skilled in the art can be realized the present invention.It is excellent in being described below
Embodiment is selected to be only used as illustrating, it may occur to persons skilled in the art that other obvious modifications.It defines in the following description
Basic principle of the invention can be applied to other embodiments, deformation scheme, improvement project, equivalent program and do not carry on the back
Other technologies scheme from the spirit and scope of the present invention.
In the description of the present invention, it should be noted that the instruction such as term " on ", "lower", "left", "right", "front", "rear"
Orientation or positional relationship be based on the orientation or positional relationship shown in the drawings, be merely for convenience of description the present invention and simplification retouch
It states, rather than the device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation,
Therefore it is not considered as limiting the invention.
Fig. 1-Fig. 3 shows a kind of example structure schematic diagram of making herbs into wool groove-type cleaning machine fragment fisher of the present invention,
It is a kind of preferred embodiment schematic diagram.Making herbs into wool groove-type cleaning machine is mainly used for silicon wafer on manufacture of solar cells line and spreads preceding silicon wafer
Oils molecule, metal impurities, the removal of mechanical damage layer and the production of pyramid flannelette on surface are that collection cleaning, a burn into are dry
The dry full-automatic comprehensive cleaning process line being integrated.As shown in Figure 1-Figure 3, making herbs into wool groove-type cleaning machine fragment described in the present embodiment
Fisher, including handle 10, handle 20, connecting rod 30, extension bar 40, the string bag 50 are equipped with bullet between the handle and the handle
Spring 60, described 20 one end of handle are flexibly connected the extension bar 40, and described 10 one end of handle is equipped with rotary shaft hole, the rotary shaft
Rotary shaft 70 is equipped in hole, the handle 10 is connected with the connecting rod 30 through the rotary shaft 70,30 other end of connecting rod and
20 other end of handle is all connected with the string bag 50.Preferably, by metal among connecting rod described in the present embodiment and extension bar
Material is made, and the material of acid-alkali-corrosive-resisting is wrapped in outside the metal material, and use is safe, and long using the time.Preferably,
The heretofore described string bag is made of acid-alkali-corrosive-resisting material.It is noted that acid-alkali-corrosive-resisting described in the present embodiment
Material can be any material, such as PP material etc. with acid-alkali-corrosive-resisting property in the prior art.
Preferably, as shown in figure 3, the cross section of the string bag 50 described in the present embodiment is triangular in shape, triangle
The shape string bag can reduce resistance when moving in texturing slot in use, time saving and energy saving, improve working efficiency.It is preferred that
, the rectangular triangle in the cross section of the string bag 50 described in the present embodiment, and the bevel edge of the right angled triangle and the connecting rod
And extension bar is connected, that is to say, that the right angle of the right angled triangle string bag is located at the front end of fisher of the present invention, straight flange
Positioned at rear end.Passing through the setting string bag 50 in the present embodiment on one side is straight flange, can make the string bag clear close to making herbs into wool in scale removal process
Washing machine groove body corner, cleaning process do not stay dead angle, keep cleaning effect more significant, cleaner.
Preferably, it can be seen from figure 3, the string bag 50 described in the present embodiment is in the right angled triangle
The height of bevel edge be higher than the string bag front height, thus in use can be more convenient collection floating on water it is broken
Piece, easy to operate, cleaning effect is good.Preferably, as shown in figure 3, the string bag 50 described in the present embodiment is equipped with several meshes 51,
The setting of several meshes 51 can be further reduced the resistance when string bag moves in texturing slot, time saving and energy saving, further
Improve working efficiency.
Making herbs into wool groove-type cleaning machine fragment fisher of the present invention can cooperate making herbs into wool groove-type cleaning machine gaily decorated basket unhook emergency suspender
It uses, when accidents such as the basket that floats, pressure baskets, first takes the accident gaily decorated basket away with emergency suspender, reuse fisher of the present invention and salvage
The silicon wafer fragment that the accident gaily decorated basket is retained in slot: pressing handle, as shown in Figure 1, handle drives connecting rod at this time, connecting rod drives the string bag
It is rotated, is at the first time taken out the silicon wafer fragment in texturing slot using the string bag.The present invention is protected without drain, without dressing
Clothes, can take out silicon wafer fragment at the first time, and the fragment salvaged is focused on, and relevant device maintenance personal replaces bending
The mechanical arm of deformation or fracture hangs pawl, settles within ten minutes, hardly influences yield.
Compared with the prior art, the present invention mainly has the advantage that
1, work efficiency is high, can accomplish quickly to handle, will not influence yield, with pre-treatment float basket, pressure basket accident need one
Hour, it now only needs ten minutes and settles, speed is pervious six times, can clear up all fragments in slot, and cleaning effect is good；
2, easy to operate, easy to use, in the past float basket or pressure basket accident need to stop line drain maintenance, clear up silicon wafer fragment,
Clean groove body, hot water machine heating, again with the operation such as liquid, in operation, relevant device maintenance personal needs of showing up are put on
Hazmat suits, put on protective gloves at the protective helmet putting on Protective Boots, put on anti-poison respirator, putting on face gear, to liquid
Row's light could take out the accident gaily decorated basket out of texturing slot, can easily be lost the accident gaily decorated basket in first time using the present invention now
The silicon wafer fragment stayed in slot is salvaged out of texturing slot body, reduces companies losses to greatest extent；
3, causality loss can be reduced, in the past float basket or pressure basket accident need to stop line drain maintenance, cleaning silicon wafer fragment, clearly
Washing trough body, hot water machine heating, again with the operation such as liquid, in operation, relevant device maintenance personal needs of showing up put on danger
Dangerous product protective garment, puts on protective gloves at the protective helmet putting on Protective Boots, put on anti-poison respirator, putting on face gear, arranges to liquid
Light could take out the accident gaily decorated basket out of texturing slot, stop the time of a line nearly hour, will be lost using the present invention ten minutes now
The silicon wafer fragment stayed in slot is salvaged out of texturing slot body, can also save medical fluid, water power and cost of labor without changing liquid；
4, using safe, the present invention is equipped with extension bar, and operator and dangerous corrosive liquids is made to be able to maintain enough safety
Distance, thus use especially safe.
It should be understood by those skilled in the art that foregoing description and the embodiment of the present invention shown in the drawings are only used as illustrating
And it is not intended to limit the present invention.The purpose of the present invention has been fully and effectively achieved.Function and structural principle of the invention exists
It shows and illustrates in embodiment, under without departing from the principle, embodiments of the present invention can have any deformation or modification.
Claims (7)
1. a kind of making herbs into wool groove-type cleaning machine fragment fisher characterized by comprising handle, handle, connecting rod, extension bar, net
Pocket, is equipped with spring between the handle and the handle, described handle one end is flexibly connected the extension bar, described handle one end
Equipped with rotary shaft hole, rotary shaft is equipped in the rotary shaft hole, the handle is connected with the connecting rod through the rotary shaft, described
The connecting rod other end and the handle other end are all connected with the string bag.
2. making herbs into wool groove-type cleaning machine fragment fisher according to claim 1, which is characterized in that the cross section of the string bag
It is triangular in shape.
3. making herbs into wool groove-type cleaning machine fragment fisher according to claim 2, which is characterized in that the cross section of the string bag
Rectangular triangle, and the bevel edge of the right angled triangle is connected with the connecting rod and extension bar.
4. making herbs into wool groove-type cleaning machine fragment fisher according to claim 3, which is characterized in that the string bag is described straight
The height of angle hypotenuse is higher than the string bag front height.
5. making herbs into wool groove-type cleaning machine fragment fisher according to claim 4, which is characterized in that if the string bag is equipped with
Dry screen eye.
6. making herbs into wool groove-type cleaning machine fragment fisher described according to claim 1 or 2 or 3 or 4 or 5, which is characterized in that described
It is made among connecting rod and extension bar of metal material, the material of acid-alkali-corrosive-resisting is wrapped in outside the metal material.
7. making herbs into wool groove-type cleaning machine fragment fisher described according to claim 1 or 2 or 3 or 4 or 5, which is characterized in that described
The string bag is made of acid-alkali-corrosive-resisting material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811451543.XA CN109273562A (en) | 2018-11-30 | 2018-11-30 | Making herbs into wool groove-type cleaning machine fragment fisher |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811451543.XA CN109273562A (en) | 2018-11-30 | 2018-11-30 | Making herbs into wool groove-type cleaning machine fragment fisher |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109273562A true CN109273562A (en) | 2019-01-25 |
Family
ID=65187234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811451543.XA Pending CN109273562A (en) | 2018-11-30 | 2018-11-30 | Making herbs into wool groove-type cleaning machine fragment fisher |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109273562A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109681143A (en) * | 2019-02-25 | 2019-04-26 | 海安县石油科研仪器有限公司 | A kind of down-hole fishing device of oil well |
| CN115615147A (en) * | 2022-08-20 | 2023-01-17 | 浙江艾科半导体设备有限公司 | Drying device for silicon wafer cleaning machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202222295U (en) * | 2011-08-09 | 2012-05-23 | 王琳婧 | Fishing net with cover |
| CN103583472A (en) * | 2013-11-12 | 2014-02-19 | 孙生强 | Fishing net |
| JP2016073471A (en) * | 2014-10-07 | 2016-05-12 | イマックス株式会社 | Telescopic cleaner |
| CN205713276U (en) * | 2016-06-20 | 2016-11-23 | 宁波东川游泳池设备有限公司 | A kind of adjustable fishing tool |
-
2018
- 2018-11-30 CN CN201811451543.XA patent/CN109273562A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202222295U (en) * | 2011-08-09 | 2012-05-23 | 王琳婧 | Fishing net with cover |
| CN103583472A (en) * | 2013-11-12 | 2014-02-19 | 孙生强 | Fishing net |
| JP2016073471A (en) * | 2014-10-07 | 2016-05-12 | イマックス株式会社 | Telescopic cleaner |
| CN205713276U (en) * | 2016-06-20 | 2016-11-23 | 宁波东川游泳池设备有限公司 | A kind of adjustable fishing tool |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109681143A (en) * | 2019-02-25 | 2019-04-26 | 海安县石油科研仪器有限公司 | A kind of down-hole fishing device of oil well |
| CN115615147A (en) * | 2022-08-20 | 2023-01-17 | 浙江艾科半导体设备有限公司 | Drying device for silicon wafer cleaning machine |
| CN115615147B (en) * | 2022-08-20 | 2024-02-23 | 浙江艾科半导体设备有限公司 | Drying device for silicon wafer cleaning machine |
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