CN206561007U - A kind of automatic cleaning drying device of photovoltaic solar silicon chip - Google Patents
A kind of automatic cleaning drying device of photovoltaic solar silicon chip Download PDFInfo
- Publication number
- CN206561007U CN206561007U CN201621351310.9U CN201621351310U CN206561007U CN 206561007 U CN206561007 U CN 206561007U CN 201621351310 U CN201621351310 U CN 201621351310U CN 206561007 U CN206561007 U CN 206561007U
- Authority
- CN
- China
- Prior art keywords
- hydraulic cylinder
- rinse bath
- drying tank
- guide rail
- electric hydraulic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001035 drying Methods 0.000 title claims abstract description 46
- 238000004140 cleaning Methods 0.000 title claims abstract description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 18
- 239000010703 silicon Substances 0.000 title claims abstract description 18
- 239000010865 sewage Substances 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 7
- 238000010276 construction Methods 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000002585 base Substances 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- -1 sodium etc. Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses a kind of automatic cleaning drying device of photovoltaic solar silicon chip, including rinse bath, drying tank is provided with the right side of rinse bath, slideway is provided with above rinse bath and drying tank, slide right side and be provided with rack, motor is provided with the right side of support frame, fixed cover is connected to vertical hydraulic cylinder on support frame, electric hydraulic pump is provided with the top of vertical hydraulic cylinder, vertical hydraulic cylinder bottom is connected with guide rail, transverse hydraulic cylinder support base is provided with transverse electric hydraulic cylinder, transverse electric hydraulic cylinder two ends are provided with sliding block, sliding block is arranged on guide rail, slider bottom is provided with hook, hook bottom hangs with hanging basket, the utility model is simple in construction, multiple hanging baskets can once be lifted by crane, allow all rinse baths and drying tank while working, it ensure that cleaning, drying streamline can be with efficient operation, simultaneously drying tank is designed with rear side of each rinse bath, so as to ensure that the processing result of last process can be impacted to next process, add photovoltaic solar Wafer Cleaning dries quantity.
Description
Technical field
The utility model is related to photovoltaic solar Wafer Cleaning technical field, and specifically a kind of photovoltaic solar silicon chip is automatic
Cleaning drying device.
Background technology
In the manufacturing process of photovoltaic solar cell, due to the pollutant on surface can directly influence making herbs into wool quality,
Efficiency, yield rate, quality percentage and transformation efficiency.So the cleaning of silicon chip is also increasingly valued by people, cleaning
Purpose is to remove surface contamination impurity, including organic matter and inorganic matter.These impurity have with state of atom or ionic condition,
Have in the form of a film or particle form is present in silicon chip surface.Organic contamination includes photoresist, organic solvent residual thing, synthesis
Grease or fiber that wax and people's contact device, instrument, vessel are brought.Inorganic pollution includes heavy metal gold, copper, iron, chromium etc., seriously
Influence minority carrier lifetime and surface conductance；Alkali metal such as sodium etc., causes serious drain；Particle contamination include white residue, dust,
Bacterium, microorganism, organic colloid fiber etc., can cause various defects.Removing the method for pollution has physical cleaning and Chemical cleaning
Two kinds.
In the prior art, photovoltaic solar silicon chip should first be placed on silicon chip to be cleaned on rest stand in cleaning, then
The dosing that adds water is cleaned, and water and medicine discharge is dried again after the completion of cleaning, operating process is complicated, and during each cleaning, drying
Decoction will be discharged, cause the great wasting of resources, numerous and diverse process causes operating efficiency low.
Utility model content
The purpose of this utility model is to provide a kind of automatic cleaning drying device of photovoltaic solar silicon chip, above-mentioned to solve
The problem of being proposed in background technology.
To achieve the above object, the utility model provides following technical scheme：
A kind of automatic cleaning drying device of photovoltaic solar silicon chip, including rinse bath, bottom of rinse bath are sent out provided with ultrasonic wave
Raw plate, bottom of rinse bath, which is provided with the right side of sewage draining exit, rinse bath, is provided with vibrator, and rinse bath left bottom is provided with electric heater,
It is to be provided with above high-pressure air hose, rinse bath and drying tank to be provided with slideway in drying tank, drying tank on the right side of rinse bath, slideway is provided with
It is provided with the right side of support frame, slideway on the right side of rack, support frame and is provided with motor, motor is provided with motor shaft, motor shaft is provided with gear,
Wheel and rack is meshed, and fixed cover is connected at the top of vertical hydraulic cylinder, vertical hydraulic cylinder and is provided with electric hydraulic pump on support frame, erects
It is connected with to hydraulic cylinder bottom in the middle of guide rail, guide rail and is provided with transverse electric Hydraulic Cylinder Pedestal Used, is set on transverse hydraulic cylinder support base
There is transverse electric hydraulic cylinder, transverse electric hydraulic cylinder two ends are respectively equipped with sliding block by piston rod, and sliding block is arranged on guide rail, sliding
Block bottom hangs with hanging basket provided with hook, hook bottom.
It is used as further program of the utility model：PH meter is provided with the rinse bath above electric heater.
It is used as further program of the utility model：The drying trench bottom is provided with multiple deionized water shower nozzles.
It is used as further program of the utility model：The transverse electric hydraulic cylinder is two-way hydraulic cylinder.
It is used as further program of the utility model：The rinse bath and drying tank are provided with multiple and use arranged for interval side
Formula.
Compared with prior art, the beneficial effects of the utility model are：The utility model is simple in construction, due to setting cover more
Hanging basket transmission hook, can once lift by crane multiple hanging baskets, allow all rinse baths and drying tank while working, it is ensured that cleaning
Drying assembly line while being designed with drying tank on rear side of each rinse bath, and can be set with efficient operation in each drying tank
There are multiple deionized water shower nozzles, so that ensureing the processing result of last process can impact to next process, add photovoltaic
Solar silicon wafers cleaning, drying quality.
Brief description of the drawings
Fig. 1 is the agent structure schematic diagram of the automatic cleaning drying device of photovoltaic solar silicon chip.
Fig. 2 is the automatic cleaning drying device side view of photovoltaic solar silicon chip.
In figure：Plate, 3- hanging baskets, 4- vibrators, 5- electric heaters, 6- pH meters, 7- occur for 1- rinse baths, 2- ultrasonic waves
High-pressure air hose, 8- deionized waters shower nozzle, 9- hooks, 10- guide rails, 11- transverse electrics hydraulic cylinder, the vertical hydraulic cylinders of 12-, 13- are horizontal
To electrohydraulic cylinder support base, 14- sliding blocks, 15- drying tanks, 16- sewage draining exits, 17- slideways, 18- support frames, 19- racks, 20-
Motor, 21- motor shafts, 22- gears, 23- electric hydraulic pumps.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belongs to the scope of the utility model protection.
Referring to Fig. 1, in the utility model embodiment, a kind of automatic cleaning drying device of photovoltaic solar silicon chip, including
Provided with ultrasonic wave plate 2 occurs for rinse bath 1, the bottom of rinse bath 1, and the bottom of rinse bath 1 is provided with sewage draining exit 16, and the right side of rinse bath 1 is provided with
Vibrator 4, the left bottom of rinse bath 1 is provided with the top of electric heater 5 in electric heater 5, rinse bath 1 and is provided with pH meter 6,
The right side of rinse bath 1 is drying tank 15, and the bottom of drying tank 15 is provided with multiple deionized water shower nozzles 8, and the inner side of drying tank 15 is provided with high pressure
Airduct 7, rinse bath 1 and the top of drying tank 15 are provided with slideway 17, slide 17 and are provided with support frame 18, slide 17 right sides and are provided with rack
19, support frame right side is provided with motor 20, and motor 20 is provided with motor shaft 21, and motor shaft 21 is provided with gear 22, gear 22 and tooth
Bar 19 is engaged, and fixed cover is connected to vertical hydraulic cylinder 12 on support frame 18, and the vertical top of hydraulic cylinder 12 is provided with electric hydraulic pump 23, erected
It is connected with to the bottom of hydraulic cylinder 12 in the middle of guide rail 10, guide rail 10 and is provided with transverse electric Hydraulic Cylinder Pedestal Used 13, transverse electric hydraulic pressure
Cylinder support base 13 is provided with two-way transverse electric hydraulic cylinder 11, and the two ends of transverse electric hydraulic cylinder 11 are connected respectively by piston rod
Sliding block 14, sliding block 14 is arranged on guide rail 10, and the bottom of sliding block 14 hangs with hanging basket 3, the He of rinse bath 1 provided with hook 9,9 bottoms of hook
Drying tank 2, which is provided between multiple and arranged for interval mode, i.e. each two rinse bath 1, sets a drying tank 2.
The utility model structure is novel, stable, and the utility model when in use, is fully loaded with hanging for photovoltaic solar silicon chip
Basket 3 is hung on hook 9, and vertical hydraulic cylinder 12 is moved downward in the presence of electric hydraulic pump 23, when hanging basket 3 is completely into cleaning
During groove 1, transverse electric hydraulic pump 11 shrinks, and hook 9 comes off from hanging basket, and then electric hydraulic pump 23 works, and makes vertical hydraulic pressure
Cylinder is received 12 and contracted, and hook 9 is withdrawn upwards, and silicon chip is cleaned in rinse bath 1 in hanging basket 3, and plate 2 occurs for ultrasonic wave in rinse bath 1
Cleaning fluid produces ultrasonic wave, and vibrator 4 shakes cleaning fluid, and electric heater 5 is heated to cleaning fluid, and pH meter is real
When measure the cleaning liquid inside of rinse bath 1 acid-base value, when clean complete when, electric hydraulic pump 23 makes vertical hydraulic cylinder 12 stretch downwards
It is long, hanging basket 3 is then tangled during transverse electric hydraulic cylinder 11, then electric hydraulic pump 23 slings hanging basket, motor 20 leads to
Electricity, motor 20 drives hanging basket 3 to turn right motion until the top of drying tank 15 by gear 22, rack 19, while left side hook will
New chip transmission to be washed is to the top of left side rinse bath 1, and when hanging basket 3 reaches 15 top of drying tank, electric hydraulic pump 23 makes to hang
Basket 3 drops in drying tank 15, and transverse electric hydraulic cylinder 11 comes off hanging basket 3 from hook 9, and subsequent electric hydraulic pump 23 will be hung
Hook 9 rises, and allows rear motor 20 to be powered by gear 22 and rack 19 and hook 15 is transferred to above left side rinse bath 1, according to reality
The difference of border situation, rinse bath 1 has multiple, but the rear side of each rinse bath 1 is designed with a drying tank 15, in real work
In, each rinse bath 1 and drying tank 15 work at the same time, greatly improve operating efficiency.
It is obvious to a person skilled in the art that the utility model is not limited to the details of above-mentioned one exemplary embodiment, and
And in the case of without departing substantially from spirit or essential attributes of the present utility model, can realize that this practicality is new in other specific forms
Type.Therefore, no matter from the point of view of which point, embodiment all should be regarded as exemplary, and is nonrestrictive, this practicality is new
The scope of type limits by appended claims rather than described above, it is intended that the equivalency fallen in claim is contained
All changes in justice and scope are included in the utility model.Any reference in claim should not be considered as limitation
Involved claim.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped
Containing an independent technical scheme, this narrating mode of specification is only that for clarity, those skilled in the art should
Using specification as an entirety, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
It may be appreciated other embodiment.
Claims (2)
1. a kind of automatic cleaning drying device of photovoltaic solar silicon chip, including rinse bath, it is characterised in that bottom of rinse bath is provided with
Plate occurs for ultrasonic wave, and bottom of rinse bath, which is provided with the right side of sewage draining exit, rinse bath, is provided with vibrator, and rinse bath left bottom is provided with electronic
It is to be provided with above high-pressure air hose, rinse bath and drying tank to be provided with slideway in drying tank, drying tank on the right side of heater, rinse bath, it is sliding
Road, which is provided with the right side of support frame, slideway, is provided with rack, and motor is provided with the right side of support frame, and motor is provided with motor shaft, motor shaft
Provided with gear, wheel and rack is meshed, and fixed cover is connected at the top of vertical hydraulic cylinder, vertical hydraulic cylinder provided with electronic on support frame
Hydraulic pump, vertical hydraulic cylinder bottom, which is connected with the middle of guide rail, guide rail, is provided with transverse electric Hydraulic Cylinder Pedestal Used, transverse hydraulic cylinder branch
Support seat and be provided with transverse electric hydraulic cylinder, transverse electric hydraulic cylinder two ends are respectively equipped with sliding block by piston rod, and sliding block is arranged on
On guide rail, slider bottom hangs with hanging basket provided with hook, hook bottom；The transverse electric hydraulic cylinder is two-way hydraulic cylinder.
2. a kind of automatic cleaning drying device of photovoltaic solar silicon chip, including rinse bath, it is characterised in that bottom of rinse bath is provided with
Plate occurs for ultrasonic wave, and bottom of rinse bath, which is provided with the right side of sewage draining exit, rinse bath, is provided with vibrator, and rinse bath left bottom is provided with electronic
It is to be provided with above high-pressure air hose, rinse bath and drying tank to be provided with slideway in drying tank, drying tank on the right side of heater, rinse bath, it is sliding
Road, which is provided with the right side of support frame, slideway, is provided with rack, and motor is provided with the right side of support frame, and motor is provided with motor shaft, motor shaft
Provided with gear, wheel and rack is meshed, and fixed cover is connected at the top of vertical hydraulic cylinder, vertical hydraulic cylinder provided with electronic on support frame
Hydraulic pump, vertical hydraulic cylinder bottom, which is connected with the middle of guide rail, guide rail, is provided with transverse electric Hydraulic Cylinder Pedestal Used, transverse hydraulic cylinder branch
Support seat and be provided with transverse electric hydraulic cylinder, transverse electric hydraulic cylinder two ends are respectively equipped with sliding block by piston rod, and sliding block is arranged on
On guide rail, slider bottom hangs with hanging basket provided with hook, hook bottom；The rinse bath and drying tank are provided with multiple and use interval
Arrangement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621351310.9U CN206561007U (en) | 2016-12-10 | 2016-12-10 | A kind of automatic cleaning drying device of photovoltaic solar silicon chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621351310.9U CN206561007U (en) | 2016-12-10 | 2016-12-10 | A kind of automatic cleaning drying device of photovoltaic solar silicon chip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206561007U true CN206561007U (en) | 2017-10-17 |
Family
ID=60029406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621351310.9U Expired - Fee Related CN206561007U (en) | 2016-12-10 | 2016-12-10 | A kind of automatic cleaning drying device of photovoltaic solar silicon chip |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206561007U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106423994A (en) * | 2016-12-10 | 2017-02-22 | 钱理 | Automatic cleaning and drying device of photovoltaic solar wafers |
| CN111014167A (en) * | 2019-11-25 | 2020-04-17 | 大同新成新材料股份有限公司 | Intelligent cleaning machine for high-precision chip silicon production and cleaning method thereof |
| CN114377957A (en) * | 2021-12-24 | 2022-04-22 | 湖南艾迪奥电子科技有限公司 | Method and device for continuously and automatically cleaning MLCC (multi-layer ceramic capacitor) after chamfering |
| CN115889331A (en) * | 2023-03-08 | 2023-04-04 | 常州九天新能源科技股份有限公司 | Photovoltaic module cleaning equipment and process |
-
2016
- 2016-12-10 CN CN201621351310.9U patent/CN206561007U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106423994A (en) * | 2016-12-10 | 2017-02-22 | 钱理 | Automatic cleaning and drying device of photovoltaic solar wafers |
| CN111014167A (en) * | 2019-11-25 | 2020-04-17 | 大同新成新材料股份有限公司 | Intelligent cleaning machine for high-precision chip silicon production and cleaning method thereof |
| CN114377957A (en) * | 2021-12-24 | 2022-04-22 | 湖南艾迪奥电子科技有限公司 | Method and device for continuously and automatically cleaning MLCC (multi-layer ceramic capacitor) after chamfering |
| CN115889331A (en) * | 2023-03-08 | 2023-04-04 | 常州九天新能源科技股份有限公司 | Photovoltaic module cleaning equipment and process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171017 Termination date: 20181210 |