CN204746973U - Novel full -automatic ultrasonic cleaner - Google Patents
Novel full -automatic ultrasonic cleaner Download PDFInfo
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- CN204746973U CN204746973U CN201520530593.2U CN201520530593U CN204746973U CN 204746973 U CN204746973 U CN 204746973U CN 201520530593 U CN201520530593 U CN 201520530593U CN 204746973 U CN204746973 U CN 204746973U
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- rinse bath
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- hanging basket
- washing tank
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Abstract
The utility model provides a novel full -automatic ultrasonic cleaner belongs to the silicon chip and washs technical field. This novel full -automatic ultrasonic cleaner, include frame and the hanging flower basket that is used for placing the silicon chip, be equipped with the washing tank that a plurality of is an inline in the frame, the washing tank can hold the hanging flower basket and put into wherein, the washing tank bottom is equipped with ultrasonic wave sound production board, the washing tank inside portion is equipped with electric heater, have in the frame with the parallel linear slide rail of washing tank array orientation with along linear slide rail's slide, be fixed with motor and cylinder on the slide, still be equipped with the rack parallel with linear slide rail in the frame, overlap the gear that has with rack toothing on the output shaft of motor, the slide below is connected with the lifter plate through the guide pillar, the lifter plate is connected with the push rod of cylinder, the both sides of lifter plate are fixed with a plurality of groups couple, the hanging flower basket both sides have convex support column, the washing tank inner wall is equipped with the vibrator. The utility model discloses a full self - cleaning, not only the cleaning performance is good, moves safe and reliable, long service life moreover.
Description
Technical field
The utility model belongs to Wafer Cleaning technical field, relates to a kind of new automatic supersonic wave cleaning machine.
Background technology
Day by day poor along with regenerative resource, finds new energy approach, has become the target that the whole mankind is common.But regenerative resource--limited several such as biological energy source, luminous energy, water energy, wind energy, only have during these are several luminous energy could at present the most effectively, method efficiently.Utilize solar silicon wafers to generate electricity, heat supply is the focus that the current whole world is developed.Although our country starts late in solar silicon wafers application industry, see with regard to development speed in recent years, still quite surprising.
Wafer Cleaning refers to before the operations such as oxidation, photoetching, extension, diffusion and lead-in wire evaporation, adopts the method for physics or chemistry to remove pollutant and the autoxidation thing of silicon chip surface, to obtain the process meeting the silicon chip surface that cleannes require.In photovoltaic solar industry, silicon chip work in-process surface can produce silicon material polycrystalline flaw-piece, liftout, sheet stock, pot bottom material and primary polycrystal material, cleaning equipment is needed to carry out surface clean, and ultrasonic wave solar energy cleaning machine effectively can remove the pollutant of the organic matter of silicon chip surface, particle, metal impurities, natural oxidizing layer and the annex such as quartz, plastics vessel, and do not destroy wafer surface characteristics, be used widely in silicon chip production and processing.
As Chinese utility model patent application (application number: 201410091070.2) disclose a kind of full automatic solar silicon wafer cleaner.This cleaning machine comprises a ultrasonic cleaning tank, described ultrasonic cleaning tank rear is provided with soak acid-cleaning groove, ultrasonic alkaline bath and one or more ultrasonic potcher successively, a translating bracket is provided with above described ultrasonic cleaning tank, soak acid-cleaning groove, ultrasonic alkaline bath and ultrasonic potcher, described translating bracket is hung oneself and is established the hanging basket of another or multiple carrying silicon chip to be cleaned, and described translating bracket is arranged on a lifting structure.It is more inconvenient that sewage in the said equipment in rinse bath is got rid of, and its bottom land is also difficult to cleaning, and can reduce the cleaning performance to silicon chip for a long time, when silicon chip is in static state in rinse bath in addition, clean range also puts in place not.
Utility model content
The purpose of this utility model there are the problems referred to above for existing technology, proposes a kind of type Full-automatic ultrasonic cleaner.
The purpose of this utility model realizes by following technical proposal: a kind of new automatic supersonic wave cleaning machine, comprise frame and the hanging basket for placing silicon chip, described frame is provided with the rinse bath that several are straight line arrangement, described rinse bath can hold hanging basket and put into wherein, described bottom of rinse bath is provided with ultrasonic vocalization plate, described rinse bath inside portion is provided with electric heater, it is characterized in that, frame have the line slide rail parallel with rinse bath orientation and the slide along line slide rail, slide is fixed with motor and cylinder, frame is also provided with the tooth bar parallel with line slide rail, on the output shaft of motor, cover has and tooth bar meshed gears, be connected with lifter plate lifter plate by guide pillar below slide to be connected with the push rod of cylinder, the both sides of lifter plate are fixed with some groups of hooks, hanging basket both sides have the support column of protrusion, described rinse bath inwall is provided with vibrator, described vibrator can with hanging basket bezel contact.
According to each rinse bath of cleaning requirement, different cleaning fluids is housed, the silicon chip in hanging basket need immerse one by one in each rinse bath and clean.Electric machine rotation can drive the pinion rotation on its output shaft, gear drives slide to slide along line slide rail indirectly, push rod on cylinder can promote lifter plate and move up and down, and controls link up with the support column that hooks hanging basket both sides and the action that moves up and down of drive hanging basket by the cooperation of cylinder and motor.When the hanging basket that silicon chip is housed is positioned at rinse bath, ultrasonic vocalization plate carries out sound wave cleaning to the silicon chip on hanging basket, and vibrator drives hanging basket to swing, and improves cleaning performance.
Hook is fixed with RF transmitter, and each rinse bath edge is fixed with infrared receiver.
Adopt above structure, when hook moves down, when the infrared receiver on rinse bath edge receives the signal linked up with upper RF transmitter and send, cylinder can stop continuing to promote lifter plate downwards at once, the hook be positioned on lifter plate also stops moving down thereupon, not only can avoid the collision between parts, but also indirectly improve the accuracy of control, accelerate cleaning efficiency.
Described rinse bath is tapered, and bottom of rinse bath has sewage draining exit.
Adopt above structure, be convenient to, by the eliminating of cleaning fluid after using in rinse bath, both instead of and scooped liquid manually, and turn improved elimination effect.
Described rinse bath both sides and top are provided with closed windowpane.
Adopt above structure, make rinse bath be closed, avoid the cleaning fluid in silicon chip and rinse bath contaminated, improve working environment, improve cleaning performance, windowpane is transparence in addition, is convenient to staff and observes its inner case.
The outside front ends of described rinse bath is provided with the control panel regulating electric heater opening and closing.
Control panel quantity is one, controls the opening and closing of electric heater and the adjustment of temperature level in all rinse baths, and electric heater in each rinse bath is independent control.Improve control range, strengthen the cleaning performance of silicon chip.
Described electric heater is common tube electric heater.
Common tube electric heater has just possessed that volume is little, power is large, thermal response is fast, temperature-controlled precision is high, heating-up temperature is high, the uniform feature of medium outlet temperature, its applied range, strong adaptability in addition, energy-saving effect is remarkable, the heat that electric energy produces almost 100% passes to heat medium, also can Automatic Control.
Compared with prior art, the advantage of the new automatic supersonic wave cleaning machine of book have following some
1. this equipment is multistation through type cleaning line, the feeding of driver mechanical arm fate, and basket type cleans, safe and reliable to operation, long service life;
2. clean beat according to the cleannes requirement of cleaning workpiece, scavenging period to be regulated arbitrarily, control panel directly sets;
3. in cleaning process, increase vibrator, make workpiece in rinse bath as wobbling action to strengthen Wafer Cleaning scope, improve cleaning performance;
4. each rinse bath is designed to pyramidal structure, and has sewage draining exit, is convenient to the cleaning of the brush end;
5. full-closed structure, equipment is furnished with exhausting and inhales mist device, improves working environment;
6. equipment is that PLC adds touch-screen Automatic Control, has self diagnosis warning function, and guarantee that equipment is from damaging and fixing a breakdown in time, global design is elegant in appearance, easy to operate, safe and reliable.
Accompanying drawing explanation
Fig. 1 is the front view of this new automatic supersonic wave cleaning machine.
Fig. 2 is the partial side view of this new automatic supersonic wave cleaning machine.
Fig. 3 is the partial top view of this new automatic supersonic wave cleaning machine.
In figure, 1, hanging basket; 2, rinse bath; 3, ultrasonic vocalization plate; 4, electric heater; 5, line slide rail; 6, slide; 7, motor; 8, cylinder; 9, tooth bar; 10, gear; 11, guide pillar; 12, lifter plate; 13, link up with; 14, support column; 15, vibrator; 16, RF transmitter; 17, infrared receiver; 18, sewage draining exit; 19, control panel.
Detailed description of the invention
Be below specific embodiment of the utility model and by reference to the accompanying drawings, the technical solution of the utility model is further described, but the utility model be not limited to these embodiments.
As shown in figure, Fig. 2, Fig. 3, this new automatic supersonic wave cleaning machine, comprise frame and the hanging basket 1 for placing silicon chip, frame is provided with the rinse bath 2 that several are straight line arrangement, rinse bath 2 can hold hanging basket 1 and put into wherein, be provided with ultrasonic vocalization plate 3 bottom rinse bath 2, the silicon chip in ultrasonic vocalization plate 3 pairs of hanging baskets 1 has sound wave cleaning action.
Rinse bath 2 inside portion is provided with electric heater 4, frame have the line slide rail 5 parallel with rinse bath 2 orientation and the slide 6 along line slide rail 5, slide 6 is fixed with motor 7 and cylinder 8, frame is also provided with the tooth bar 9 parallel with line slide rail 5, on the output shaft of motor 7, cover has and tooth bar 9 meshed gears 10, is connected with lifter plate 12 lifter plate 12 is connected with the push rod of cylinder 8 below slide 6 by guide pillar 11.
The both sides of lifter plate 12 are fixed with some groups of hooks 13, and hook 13 is fixed with RF transmitter 16, and each rinse bath edge is fixed with infrared receiver 17.When hook 13 moves down, when the infrared receiver 17 on rinse bath edge receives the signal that on hook 13, RF transmitter 16 sends, cylinder 8 can stop continuing to promote lifter plate 12 downwards at once, the hook 13 be positioned on lifter plate 12 also stops moving down thereupon, not only can avoid the collision between parts, but also indirectly improve the accuracy of control, accelerate cleaning efficiency.
Hanging basket 1 both sides have the support column 14 of protrusion, support column 14 is convenient to hook 13 and is hooked and drive hanging basket 1 to move up and down, improve the stationarity in moving, rinse bath 2 inwall is provided with vibrator 15, vibrator 15 can with hanging basket 1 bezel contact, hanging basket 1 can be driven when vibrator 15 vibrates to swing, improve cleaning performance.
According to each rinse bath of cleaning requirement 2, different cleaning fluids is housed, the silicon chip in hanging basket 1 need immerse one by one in each rinse bath 2 and clean.Motor 7 rotation can drive the gear 10 on its output shaft to rotate, gear 10 drives slide 6 to slide along line slide rail 5 indirectly, push rod on cylinder 8 can promote lifter plate 12 and move up and down, and controls hook 13 complete the support column 14 that hooks hanging basket 1 both sides and drive the action that hanging basket 1 moves up and down by the cooperation of cylinder 8 and motor 7.When the hanging basket 1 that silicon chip is housed is positioned at rinse bath 2, the silicon chip in ultrasonic vocalization plate 3 pairs of hanging baskets 1 carries out sound wave cleaning.
Rinse bath 2 is tapered, has sewage draining exit 18 bottom rinse bath 2.Be convenient to the cleaning fluid after using in rinse bath 2 to get rid of, both instead of and scooped liquid manually, and turn improved elimination effect.Rinse bath 2 both sides and top are provided with closed windowpane.Make rinse bath 2 in closed, the cleaning fluid reduced in silicon chip and rinse bath 2 is contaminated, and improve cleaning performance, windowpane is transparence in addition, is convenient to staff and observes its inner case.The outside front ends of rinse bath 2 is provided with the control panel 19 regulating electric heater 4 opening and closing.Control panel 19 quantity is one, controls the opening and closing of electric heater 4 and the adjustment of temperature level in all rinse baths 2, and electric heater 4 in each rinse bath 2 is independent control.Improve control range, strengthen the cleaning performance of silicon chip.
Electric heater 4 is common tube electric heater 4.Common tube electric heater 4 has just possessed that volume is little, power is large, thermal response is fast, temperature-controlled precision is high, heating-up temperature is high, the uniform feature of medium outlet temperature, its applied range, strong adaptability in addition, energy-saving effect is remarkable, the heat that electric energy produces almost 100% passes to heat medium, also can Automatic Control.
Basic functional principle: load onto silicon chip in hanging basket 1, starter motor 7, gear 10 on its output shaft rotates and drives slide 6 to slide along line slide rail 5, lifter plate 12 is mobile with the slip of slide 6, when the hook 13 on lifter plate 12 move and near hanging basket 1 support column 14 side time, motor 7 is stopped to start cylinder 8, cylinder 8 promotes lifter plate 12 and moves down, hook 13 moves down with lifter plate 12, when the infrared receiver 17 of rinse bath 2 inside edge receives transmitting of RF transmitter 16 on hook 13, cylinder 8 stops moving down, then continue starter motor 7 make hook 13 and support column 14 mutually against, then start cylinder 8 to drive hook 13 moves and catch on support column 14, complete mobile on hanging basket 1 work, finally hanging basket 1 is made to move to next rinse bath 2 by motor 7 with coordinating of cylinder 8 again, when hanging basket 1 is positioned at rinse bath 2, sound wave phonation board carries out sound wave cleaning to the silicon chip in hanging basket 1, vibrator 15 drives hanging basket 1 to vibrate quickening cleaning efficiency, increase cleaning strength.Staff also according to the requirement of cleaning fluid to temperature, can regulate and control electric heater 4 pairs of cleaning fluids by control panel 19 and heats in addition.The all controlled panel of startup of motor and cylinder controls.
Specific embodiment described herein is only to the explanation for example of the utility model spirit.The utility model person of ordinary skill in the field can make various amendment or supplements or adopt similar mode to substitute to described specific embodiment, but can't depart from spirit of the present utility model or surmount the scope that appended claims defines.
Although more employ the terms such as hanging basket 1, rinse bath 2, ultrasonic vocalization plate 3, electric heater 4, line slide rail 5, slide 6, motor 7, cylinder 8, tooth bar 9, gear 10, guide pillar 11, lifter plate 12, hook 13, support column 14, vibrator 15, RF transmitter 16, infrared receiver 17, sewage draining exit 18, control panel 19 herein, do not get rid of the possibility using other term.These terms are used to be only used to describe and explain essence of the present utility model more easily; The restriction that they are construed to any one additional is all contrary with the utility model spirit.
Claims (6)
1. a new automatic supersonic wave cleaning machine, comprise frame and the hanging basket (1) for placing silicon chip, described frame is provided with the rinse bath (2) that several are straight line arrangement, described rinse bath (2) can hold hanging basket (1) and put into wherein, described rinse bath (2) bottom is provided with ultrasonic vocalization plate (3), described rinse bath (2) inside portion is provided with electric heater (4), it is characterized in that, frame have the line slide rail (5) parallel with rinse bath (2) orientation and the slide (6) along line slide rail (5), slide (6) is fixed with motor (7) and cylinder (8), frame is also provided with the tooth bar (9) parallel with line slide rail (5), on the output shaft of motor (7), cover has and tooth bar (9) meshed gears (10), slide (6) below is connected with lifter plate (12) lifter plate (12) by guide pillar (11) and is connected with the push rod of cylinder (8), the both sides of lifter plate (12) are fixed with some groups of hooks (13), hanging basket (1) both sides have the support column (14) of protrusion, described rinse bath (2) inwall is provided with vibrator (15), described vibrator (15) can with hanging basket (1) bezel contact.
2. the new automatic supersonic wave cleaning machine of one according to claim 1, is characterized in that, hook (13) is fixed with RF transmitter (16), and each Rinsing Area edge is fixed with infrared receiver (17).
3. the new automatic supersonic wave cleaning machine of one according to claim 2, is characterized in that, described rinse bath (2) is tapered, and rinse bath (2) bottom has sewage draining exit (18).
4. the new automatic supersonic wave cleaning machine of one according to claim 3, is characterized in that, described rinse bath (2) both sides and top are provided with closed windowpane.
5. the new automatic supersonic wave cleaning machine of one according to claim 4, is characterized in that, the outside front ends of described rinse bath (2) is provided with the control panel (19) regulating electric heater (4) opening and closing.
6. the new automatic supersonic wave cleaning machine of one according to claim 5, is characterized in that, described electric heater (4) is common tube electric heater (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520530593.2U CN204746973U (en) | 2015-07-21 | 2015-07-21 | Novel full -automatic ultrasonic cleaner |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520530593.2U CN204746973U (en) | 2015-07-21 | 2015-07-21 | Novel full -automatic ultrasonic cleaner |
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| CN204746973U true CN204746973U (en) | 2015-11-11 |
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| CN201520530593.2U Active CN204746973U (en) | 2015-07-21 | 2015-07-21 | Novel full -automatic ultrasonic cleaner |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105363733A (en) * | 2015-11-30 | 2016-03-02 | 苏州林信源自动化科技有限公司 | Ultrasonic washer |
| CN105499208A (en) * | 2015-12-31 | 2016-04-20 | 浙江平湖华龙实业股份有限公司 | Ultrasonic washing device of high-performance storage battery plate grid |
| CN105689322A (en) * | 2016-03-01 | 2016-06-22 | 陈焕祥 | Ultrasonic cleaner push rod for vehicle parts |
| CN106076965A (en) * | 2016-06-06 | 2016-11-09 | 济南轩天机电科技有限公司 | The device that the insulator changed is cleared up |
| CN106334702A (en) * | 2016-10-24 | 2017-01-18 | 中山瑞科新能源有限公司 | Device capable of recycling TCO (transparent conductive oxide) glass automatically |
| CN106423994A (en) * | 2016-12-10 | 2017-02-22 | 钱理 | Automatic cleaning and drying device of photovoltaic solar wafers |
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| CN106972824A (en) * | 2017-04-20 | 2017-07-21 | 常州市鼎日环保科技有限公司 | One kind segmentation cleaning type photovoltaic component dust arrester |
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| CN107716441A (en) * | 2017-09-25 | 2018-02-23 | 南通华林科纳半导体设备有限公司 | Silicon wafer stripping and cleaning machine stable in cutting |
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| CN108176670A (en) * | 2015-11-20 | 2018-06-19 | 苏州赛森电子科技有限公司 | Ultrasonic processing equipment in DMOS disk process |
| CN109939972A (en) * | 2019-04-15 | 2019-06-28 | 浙江大学昆山创新中心 | A kind of new energy battery production silicon single crystal rod cleaning equipment |
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| CN112157101A (en) * | 2020-09-24 | 2021-01-01 | 四川大学华西医院 | Semi-automatic surgical instrument preprocessor |
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| CN108176670A (en) * | 2015-11-20 | 2018-06-19 | 苏州赛森电子科技有限公司 | Ultrasonic processing equipment in DMOS disk process |
| CN105363733A (en) * | 2015-11-30 | 2016-03-02 | 苏州林信源自动化科技有限公司 | Ultrasonic washer |
| CN105499208A (en) * | 2015-12-31 | 2016-04-20 | 浙江平湖华龙实业股份有限公司 | Ultrasonic washing device of high-performance storage battery plate grid |
| CN105689322A (en) * | 2016-03-01 | 2016-06-22 | 陈焕祥 | Ultrasonic cleaner push rod for vehicle parts |
| CN106076965A (en) * | 2016-06-06 | 2016-11-09 | 济南轩天机电科技有限公司 | The device that the insulator changed is cleared up |
| CN106334702A (en) * | 2016-10-24 | 2017-01-18 | 中山瑞科新能源有限公司 | Device capable of recycling TCO (transparent conductive oxide) glass automatically |
| CN106423989A (en) * | 2016-11-15 | 2017-02-22 | 王虹 | Throwing mechanism for glasses automatic cleaning device |
| CN106423994A (en) * | 2016-12-10 | 2017-02-22 | 钱理 | Automatic cleaning and drying device of photovoltaic solar wafers |
| CN106972824A (en) * | 2017-04-20 | 2017-07-21 | 常州市鼎日环保科技有限公司 | One kind segmentation cleaning type photovoltaic component dust arrester |
| CN106972824B (en) * | 2017-04-20 | 2019-05-21 | 苏州协鑫新能源运营科技有限公司 | A kind of segmentation cleaning type photovoltaic component dust-extraction unit |
| CN107413756A (en) * | 2017-04-26 | 2017-12-01 | 江苏浙宏科技股份有限公司 | A kind of BGA soldered balls cleaning device |
| CN107185903A (en) * | 2017-06-26 | 2017-09-22 | 浙江工贸职业技术学院 | A kind of shock absorber valve block degreasing unit |
| CN107716441A (en) * | 2017-09-25 | 2018-02-23 | 南通华林科纳半导体设备有限公司 | Silicon wafer stripping and cleaning machine stable in cutting |
| CN107716441B (en) * | 2017-09-25 | 2020-06-16 | 南通华林科纳半导体设备有限公司 | Silicon wafer stripping and cleaning machine stable in cutting |
| CN107962026A (en) * | 2017-11-28 | 2018-04-27 | 商丘星林电子产业有限公司 | Automatic pocket washing machine |
| CN109939972A (en) * | 2019-04-15 | 2019-06-28 | 浙江大学昆山创新中心 | A kind of new energy battery production silicon single crystal rod cleaning equipment |
| CN110328190A (en) * | 2019-06-24 | 2019-10-15 | 刘浩 | A kind of manipulator heating throwing supersonic wave cleaning machine |
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Address after: 314415 21 pillow Road, Huang Wan Town, Haining, Jiaxing, Zhejiang Patentee after: Zhejiang Hao Neng Au Optronics Co Address before: 314415 21 pillow Road, Huang Wan Town, Haining, Jiaxing, Zhejiang Patentee before: ZHEJIANG HOUNEN SOLAR CO., LTD. |