CN204088282U - A kind of polysilicon chip cleaning machine automatic basket device - Google Patents
A kind of polysilicon chip cleaning machine automatic basket device Download PDFInfo
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- CN204088282U CN204088282U CN201420548375.7U CN201420548375U CN204088282U CN 204088282 U CN204088282 U CN 204088282U CN 201420548375 U CN201420548375 U CN 201420548375U CN 204088282 U CN204088282 U CN 204088282U
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Abstract
The utility model provides a kind of polysilicon chip cleaning machine automatic basket device, belongs to Wafer Cleaning technical field.This polysilicon chip cleaning machine automatic basket device comprises support, hand basket casing and column, column is vertically arranged, vertical chute is had in column one side, support one end to be embedded in chute and can to slide up and down along column, the other end of support is fixed with hand basket casing, the screw mandrel that freely rotates is provided with and screw mandrel is threaded with support in chute, screw mandrel rotates and drives support oscilaltion, column top is fixed with the motor driving screw mandrel to rotate, hand basket casing is the rectangular-shaped of hollow, upper surface and support welding are connected, the both sides end face of hand basket casing is provided with can the hanging hook assembly that swings of hand basket casing relatively, hand basket casing inner top is fixed with cylinder, the push rod of cylinder and hanging hook assembly lean and promote hanging hook assembly and swing and hook basket.Automatically hook basket, drive basket lifting, compare and manually extract basket, time saving and energy saving, and improve coefficient of safety.
Description
Technical field
The utility model belongs to Wafer Cleaning technical field, relates to a kind of ultrasonic wave solar silicon wafers cleaning machine, particularly a kind of polysilicon chip cleaning machine automatic basket device.
Background technology
Wafer Cleaning refers to before the operations such as oxidation, photoetching, extension, diffusion and lead-in wire evaporation, adopts the method for physics or chemistry to remove pollutant and the autoxidation thing of silicon chip surface, to obtain the process meeting the silicon chip surface that cleannes require.In photovoltaic solar industry, silicon chip work in-process surface can produce silicon material polycrystalline flaw-piece, liftout, sheet stock, pot bottom material and primary polycrystal material, cleaning equipment is needed to carry out surface clean, and ultrasonic wave solar energy cleaning machine effectively can remove the pollutant of the organic substance of silicon chip surface, particle, metal impurities, natural oxidizing layer and the annex such as quartz, plastics vessel, and do not destroy wafer surface characteristics, be used widely in silicon chip production and processing.
A kind of solar silicon wafers cleaning equipment disclosed in Chinese patent, especially a kind of full automatic solar silicon wafer cleaner.This cleaning machine comprises a ultrasonic cleaning tank, described ultrasonic cleaning tank rear is provided with soak acid-cleaning groove, ultrasonic alkaline bath and one or more ultrasonic potcher successively, a translating bracket is provided with above described ultrasonic cleaning tank, soak acid-cleaning groove, ultrasonic alkaline bath and ultrasonic potcher, described translating bracket is hung oneself and is established the hanging basket of another or multiple carrying silicon chip to be cleaned, and described translating bracket is arranged on a lifting structure.The full automatic solar silicon wafer cleaner of this invention makes the dirt rapid deterioration in the surface of object and gap by ultrasonic wave, thus reaches the object of object surface purification.Again in conjunction with the technique such as caustic dip, oven dry, achieve the cleaning of polycrystalline, monocrystalline solar silicon wafers, optical mirror slip.Because this equipment is multi-groove structure, therefore, it is possible to complete more complicated cleaning.But the Basket of this cleaning machine is unstable, and basket easily tilts, and causes the accident.
Summary of the invention
The purpose of this utility model there are the problems referred to above for existing technology, proposes a kind of polysilicon chip cleaning machine automatic basket device of steady hand basket.
The purpose of this utility model realizes by following technical proposal: a kind of polysilicon chip cleaning machine automatic basket device, comprise support, hand basket casing and column, it is characterized in that, column is vertically arranged, vertical chute is had in column one side, described support one end to be embedded in chute and can to slide up and down along column, the other end of described support is fixed with hand basket casing, the screw mandrel freely rotated is provided with and screw mandrel is threaded with support in described chute, screw mandrel rotates and drives support oscilaltion, described column top is fixed with the motor driving screw mandrel to rotate, described hand basket casing is the rectangular-shaped of hollow, upper surface and support welding are connected, the both sides end face of described hand basket casing is provided with can the hanging hook assembly that swings of hand basket casing relatively, described hand basket casing inner top is fixed with cylinder, the push rod of described cylinder and hanging hook assembly lean and promote hanging hook assembly and swing and hook basket.
Deposit silicon chip to be cleaned in basket, after silicon chip has soaked, put outward by air cylinder driven coupler body assembly and hook the handle of basket, then motor driven support and hand basket casing have risen along column, reach the object of automatic basket.
In above-mentioned polysilicon chip cleaning machine automatic basket device, described hanging hook assembly comprises two coupler bodies, a rotor plate and a connecting axle, described rotor plate cross section is rectangle, described connecting axle runs through the both ends of the surface of hand basket casing, the coupler body that is connected respectively is welded at described connecting axle two ends, described rotor plate side and connecting axle are connected, and push rod and the rotor plate plate face of described cylinder lean.Push rod and the rotor plate of cylinder lean, and cylinder promotes rotor plate and rotates, and when push rod advances, rotor plate are pushed open coupler body is outwards swung, thus hook the handle of basket.
In above-mentioned polysilicon chip cleaning machine automatic basket device, be also connected with bracing piece between two described coupler bodies, the axle center of described bracing piece and the axis parallel of connecting axle.Bracing piece reinforces the relative position of two coupler bodies, and coupler body can be swung simultaneously.
In above-mentioned polysilicon chip cleaning machine automatic basket device, described hand basket casing has two sleeve hanger assemblies, the center line of two relative hand basket casings of hanging hook assembly is symmetrical arranged.
In above-mentioned polysilicon chip cleaning machine automatic basket device, described coupler body adopts stainless steel to make.Prevent coupler body from touching various cleaning fluid in rinse bath and rust corrosion.
Compared with prior art, this polysilicon chip cleaning machine automatic basket device has the following advantages:
1. pass through the effect of cylinder and motor, automatically can hook basket, then drive basket lifting, compare and manually extract basket, time saving and energy saving, and improve coefficient of safety, Accident prevention causes personal injury.
2. and homonymy hooked together by two coupler bodies, basket is relatively steady, can not tumble or slippage.
3. a hand basket casing has two sleeve hanger assemblies, hooks two handles on same basket respectively, prevents basket from swinging.
Accompanying drawing explanation
Fig. 1 be this polysilicon chip cleaning machine automatic basket device face structural representation.
Fig. 2 is the side-looking structural representation of this polysilicon chip cleaning machine automatic basket device.
Fig. 3 be hand basket casing face structural representation.
Fig. 4 is the plan structure schematic diagram of hand basket casing.
Fig. 5 is the structural representation of hanging hook assembly.
In figure, 1, support; 2, hand basket casing; 3, column; 4, chute; 5, screw mandrel; 6, motor; 7, cylinder; 8, coupler body; 9, rotor plate; 10, connecting axle; 11, bracing piece.
Embodiment
Be below specific embodiment of the utility model and by reference to the accompanying drawings, the technical solution of the utility model is further described, but the utility model be not limited to these embodiments.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4, Fig. 5, this polysilicon chip cleaning machine automatic basket device comprises support 1, hand basket casing 2 and column 3, column 3 is vertically arranged, vertical chute 4 is had in column 3 one side, support 1 one end to be embedded in chute 4 and can to slide up and down along column 3, and the other end of support 1 is fixed with hand basket casing 2.Be provided with the screw mandrel 5 that freely rotates in chute 4 and screw mandrel 5 is threaded with support 1, screw mandrel 5 rotates and drives support 1 oscilaltion, and column 3 top is fixed with the motor 6 driving screw mandrel 5 to rotate.
Hand basket casing 2 is the rectangular-shaped of hollow, upper surface is welded with support 1 and is connected, the both sides end face of hand basket casing 2 is provided with can the hanging hook assembly that swings of hand basket casing 2 relatively, hand basket casing 2 inner top is fixed with cylinder 7, and the push rod of cylinder 7 and hanging hook assembly lean and promote hanging hook assembly and swing and hook basket.
Specifically, hand basket casing 2 has two sleeve hanger assemblies, the center line of two relative hand basket casings 2 of hanging hook assembly is symmetrical arranged.Hanging hook assembly comprises two coupler bodies, 8, rotor plate 9 and a connecting axle 10, rotor plate 9 cross section is rectangle, connecting axle 10 runs through the both ends of the surface of hand basket casing 2, the coupler body 8 that is connected respectively is welded at connecting axle 10 two ends, rotor plate 9 side and connecting axle 10 are connected, and push rod and the rotor plate 9 plate face of cylinder 7 lean.Bracing piece 11 is also connected with, the axle center of bracing piece 11 and the axis parallel of connecting axle 10 between two coupler bodies 8.
Solar silicon wafers cleaning machine has multiple rinse bath, in each groove, fills different cleaning fluids, make the dirt rapid deterioration in the surface of silicon chip and gap by ultrasonic wave, thus reach the object of surface cleaning.Again in conjunction with the technique such as caustic dip, oven dry, achieve the cleaning of polycrystalline, monocrystalline solar silicon wafers, optical mirror slip.Silicon chip is placed in basket, after waiting basket and silicon chip to be immersed in rinse bath a period of time, starts this automatic basket device, hanging hook assembly is driven to put outward by cylinder 7, hook basket handle, restart motor 6 and drive support 1 and hand basket casing 2 to rise, basket is extracted from rinse bath.
Specific embodiment described herein is only to the explanation for example of the utility model spirit.The utility model person of ordinary skill in the field can make various amendment or supplements or adopt similar mode to substitute to described specific embodiment, but can't depart from spirit of the present utility model or surmount the scope that appended claims defines.
Claims (5)
1. a polysilicon chip cleaning machine automatic basket device, comprise support, hand basket casing and column, it is characterized in that, column is vertically arranged, vertical chute is had in column one side, described support one end to be embedded in chute and can to slide up and down along column, the other end of described support is fixed with hand basket casing, the screw mandrel freely rotated is provided with and screw mandrel is threaded with support in described chute, screw mandrel rotates and drives support oscilaltion, described column top is fixed with the motor driving screw mandrel to rotate, described hand basket casing is the rectangular-shaped of hollow, upper surface and support welding are connected, the both sides end face of described hand basket casing is provided with can the hanging hook assembly that swings of hand basket casing relatively, described hand basket casing inner top is fixed with cylinder, the push rod of described cylinder and hanging hook assembly lean and promote hanging hook assembly and swing and hook basket.
2. polysilicon chip cleaning machine automatic basket device according to claim 1, it is characterized in that, described hanging hook assembly comprises two coupler bodies, a rotor plate and a connecting axle, described rotor plate cross section is rectangle, described connecting axle runs through the both ends of the surface of hand basket casing, the coupler body that is connected respectively is welded at described connecting axle two ends, and described rotor plate side and connecting axle are connected, and push rod and the rotor plate plate face of described cylinder lean.
3. polysilicon chip cleaning machine automatic basket device according to claim 2, is characterized in that, be also connected with bracing piece between two described coupler bodies, the axle center of described bracing piece and the axis parallel of connecting axle.
4. polysilicon chip cleaning machine automatic basket device according to claim 3, is characterized in that described hand basket casing having two sleeve hanger assemblies, and the center line of two relative hand basket casings of hanging hook assembly is symmetrical arranged.
5. polysilicon chip cleaning machine automatic basket device according to claim 4, is characterized in that, described coupler body adopts stainless steel to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420548375.7U CN204088282U (en) | 2014-09-23 | 2014-09-23 | A kind of polysilicon chip cleaning machine automatic basket device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420548375.7U CN204088282U (en) | 2014-09-23 | 2014-09-23 | A kind of polysilicon chip cleaning machine automatic basket device |
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| CN204088282U true CN204088282U (en) | 2015-01-07 |
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| CN201420548375.7U Active CN204088282U (en) | 2014-09-23 | 2014-09-23 | A kind of polysilicon chip cleaning machine automatic basket device |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105598083A (en) * | 2016-03-17 | 2016-05-25 | 朱姗姗 | Earthworm cleaning machine |
| CN106881307A (en) * | 2017-02-20 | 2017-06-23 | 江苏百泰电子制造有限公司 | Ultrasonically cleaning workpiece pneumatic conveyor |
| CN107968060A (en) * | 2017-11-21 | 2018-04-27 | 长江存储科技有限责任公司 | Reactive tank for wafer etching |
| CN107968064A (en) * | 2017-11-27 | 2018-04-27 | 乐山新天源太阳能科技有限公司 | Silicon wafer wool making transfer device |
| CN109872964A (en) * | 2019-04-04 | 2019-06-11 | 乐山新天源太阳能科技有限公司 | The fluff making device and process for etching of black silicon solar cell |
| CN110479695A (en) * | 2019-08-28 | 2019-11-22 | 深圳市净都科技有限公司 | A kind of list slot multifunction ultrasonic cleaning device and method |
| CN111136060A (en) * | 2019-12-27 | 2020-05-12 | 杨兆安 | Silicon chip washs with device of reloading |
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2014
- 2014-09-23 CN CN201420548375.7U patent/CN204088282U/en active Active
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105598083A (en) * | 2016-03-17 | 2016-05-25 | 朱姗姗 | Earthworm cleaning machine |
| CN106881307A (en) * | 2017-02-20 | 2017-06-23 | 江苏百泰电子制造有限公司 | Ultrasonically cleaning workpiece pneumatic conveyor |
| CN107968060A (en) * | 2017-11-21 | 2018-04-27 | 长江存储科技有限责任公司 | Reactive tank for wafer etching |
| CN107968060B (en) * | 2017-11-21 | 2020-05-12 | 长江存储科技有限责任公司 | Reaction tank for wafer etching |
| CN107968064A (en) * | 2017-11-27 | 2018-04-27 | 乐山新天源太阳能科技有限公司 | Silicon wafer wool making transfer device |
| CN109872964A (en) * | 2019-04-04 | 2019-06-11 | 乐山新天源太阳能科技有限公司 | The fluff making device and process for etching of black silicon solar cell |
| CN109872964B (en) * | 2019-04-04 | 2024-04-12 | 乐山新天源太阳能科技有限公司 | Texturing device and texturing process for black silicon solar cell |
| CN110479695A (en) * | 2019-08-28 | 2019-11-22 | 深圳市净都科技有限公司 | A kind of list slot multifunction ultrasonic cleaning device and method |
| CN111136060A (en) * | 2019-12-27 | 2020-05-12 | 杨兆安 | Silicon chip washs with device of reloading |
| CN111136060B (en) * | 2019-12-27 | 2021-11-26 | 内蒙古科思通科技有限公司 | Silicon chip washs with device of reloading |
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Address after: 314415 21 pillow Road, Huang Wan Town, Haining, Jiaxing, Zhejiang Patentee after: Zhejiang Hao Neng Au Optronics Co Address before: 314415 21 pillow Road, Huang Wan Town, Haining, Jiaxing, Zhejiang Patentee before: ZHEJIANG HOUNEN SOLAR CO., LTD. |