CN106409728A - 一种密封结构及一种半导体设备 - Google Patents
一种密封结构及一种半导体设备 Download PDFInfo
- Publication number
- CN106409728A CN106409728A CN201610929334.6A CN201610929334A CN106409728A CN 106409728 A CN106409728 A CN 106409728A CN 201610929334 A CN201610929334 A CN 201610929334A CN 106409728 A CN106409728 A CN 106409728A
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- ring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610929334.6A CN106409728B (zh) | 2016-10-31 | 2016-10-31 | 一种密封结构及一种半导体设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610929334.6A CN106409728B (zh) | 2016-10-31 | 2016-10-31 | 一种密封结构及一种半导体设备 |
Publications (2)
Publication Number | Publication Date |
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CN106409728A true CN106409728A (zh) | 2017-02-15 |
CN106409728B CN106409728B (zh) | 2019-02-19 |
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ID=58012626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201610929334.6A Active CN106409728B (zh) | 2016-10-31 | 2016-10-31 | 一种密封结构及一种半导体设备 |
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CN (1) | CN106409728B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11749616B2 (en) | 2017-10-05 | 2023-09-05 | Texas Instruments Incorporated | Industrial chip scale package for microelectronic device |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001257255A (ja) * | 1999-04-19 | 2001-09-21 | Tdk Corp | クリーンボックス、クリーン搬送方法及び装置 |
JP2001284428A (ja) * | 2000-03-30 | 2001-10-12 | Canon Inc | 基板搬入出装置 |
CN1947326A (zh) * | 2004-04-05 | 2007-04-11 | 艾克塞利斯技术公司 | 用于扫描工件的往复驱动系统 |
US20100172721A1 (en) * | 2002-07-22 | 2010-07-08 | Brooks Automation, Inc. | Substrate loading and unloading station with buffer |
CN102414777A (zh) * | 2009-02-22 | 2012-04-11 | 迈普尔平版印刷Ip有限公司 | 真空腔中产生真空的带电粒子光刻设备及方法 |
JP2013021061A (ja) * | 2011-07-08 | 2013-01-31 | Tdk Corp | ロードポート装置 |
CN103943533A (zh) * | 2013-01-23 | 2014-07-23 | 上海微电子装备有限公司 | 密封对接装置 |
CN204216013U (zh) * | 2014-11-04 | 2015-03-18 | 北京七星华创电子股份有限公司 | 一种压紧装置及具有该压紧装置的热处理设备 |
-
2016
- 2016-10-31 CN CN201610929334.6A patent/CN106409728B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001257255A (ja) * | 1999-04-19 | 2001-09-21 | Tdk Corp | クリーンボックス、クリーン搬送方法及び装置 |
JP2001284428A (ja) * | 2000-03-30 | 2001-10-12 | Canon Inc | 基板搬入出装置 |
US20100172721A1 (en) * | 2002-07-22 | 2010-07-08 | Brooks Automation, Inc. | Substrate loading and unloading station with buffer |
CN1947326A (zh) * | 2004-04-05 | 2007-04-11 | 艾克塞利斯技术公司 | 用于扫描工件的往复驱动系统 |
CN102414777A (zh) * | 2009-02-22 | 2012-04-11 | 迈普尔平版印刷Ip有限公司 | 真空腔中产生真空的带电粒子光刻设备及方法 |
JP2013021061A (ja) * | 2011-07-08 | 2013-01-31 | Tdk Corp | ロードポート装置 |
CN103943533A (zh) * | 2013-01-23 | 2014-07-23 | 上海微电子装备有限公司 | 密封对接装置 |
CN204216013U (zh) * | 2014-11-04 | 2015-03-18 | 北京七星华创电子股份有限公司 | 一种压紧装置及具有该压紧装置的热处理设备 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11749616B2 (en) | 2017-10-05 | 2023-09-05 | Texas Instruments Incorporated | Industrial chip scale package for microelectronic device |
Also Published As
Publication number | Publication date |
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CN106409728B (zh) | 2019-02-19 |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Applicant after: North China Science and technology group Limited by Share Ltd. Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Applicant before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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TA01 | Transfer of patent application right |
Effective date of registration: 20180213 Address after: 100176 No. 8, Wenchang Avenue, Beijing economic and Technological Development Zone Applicant after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Applicant before: North China Science and technology group Limited by Share Ltd. |
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