CN106392895A - 一种新型金刚线多晶硅片表面喷砂粗糙方法 - Google Patents
一种新型金刚线多晶硅片表面喷砂粗糙方法 Download PDFInfo
- Publication number
- CN106392895A CN106392895A CN201610844815.7A CN201610844815A CN106392895A CN 106392895 A CN106392895 A CN 106392895A CN 201610844815 A CN201610844815 A CN 201610844815A CN 106392895 A CN106392895 A CN 106392895A
- Authority
- CN
- China
- Prior art keywords
- polysilicon chip
- polycrystalline silicon
- chip surface
- roughening method
- blasting roughening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 75
- 238000005488 sandblasting Methods 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000007788 roughening Methods 0.000 title claims abstract description 21
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 14
- 239000010432 diamond Substances 0.000 title claims abstract description 14
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 21
- 238000001035 drying Methods 0.000 claims abstract description 8
- 238000004140 cleaning Methods 0.000 claims abstract description 6
- 229910021645 metal ion Inorganic materials 0.000 claims abstract description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000000126 substance Substances 0.000 claims abstract description 4
- 229920005591 polysilicon Polymers 0.000 claims description 63
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 claims description 18
- 229910001573 adamantine Inorganic materials 0.000 claims description 18
- 230000007246 mechanism Effects 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 238000011084 recovery Methods 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 239000004576 sand Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 239000006185 dispersion Substances 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910003978 SiClx Inorganic materials 0.000 claims 1
- 239000003463 adsorbent Substances 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 230000008450 motivation Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 150000002500 ions Chemical group 0.000 abstract 1
- 238000012216 screening Methods 0.000 abstract 1
- 230000009286 beneficial effect Effects 0.000 description 4
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000008216 herbs Nutrition 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- SUBDBMMJDZJVOS-UHFFFAOYSA-N 5-methoxy-2-{[(4-methoxy-3,5-dimethylpyridin-2-yl)methyl]sulfinyl}-1H-benzimidazole Chemical compound N=1C2=CC(OC)=CC=C2NC=1S(=O)CC1=NC=C(C)C(OC)=C1C SUBDBMMJDZJVOS-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910021418 black silicon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000006396 nitration reaction Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/10—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for compacting surfaces, e.g. shot-peening
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/08—Abrasive blasting machines or devices; Plants essentially adapted for abrasive blasting of travelling stock or travelling workpieces
- B24C3/083—Transfer or feeding devices; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Silicon Compounds (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610844815.7A CN106392895B (zh) | 2016-09-23 | 2016-09-23 | 一种新型金刚线多晶硅片表面喷砂粗糙方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610844815.7A CN106392895B (zh) | 2016-09-23 | 2016-09-23 | 一种新型金刚线多晶硅片表面喷砂粗糙方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106392895A true CN106392895A (zh) | 2017-02-15 |
CN106392895B CN106392895B (zh) | 2019-06-18 |
Family
ID=57997894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610844815.7A Active CN106392895B (zh) | 2016-09-23 | 2016-09-23 | 一种新型金刚线多晶硅片表面喷砂粗糙方法 |
Country Status (1)
Country | Link |
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CN (1) | CN106392895B (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107932340A (zh) * | 2017-11-01 | 2018-04-20 | 福建晶安光电有限公司 | 一种单面抛光超薄晶圆平坦化加工方法 |
CN109748189A (zh) * | 2019-03-04 | 2019-05-14 | 江苏美科硅能源有限公司 | 定柱式自动悬臂翻棒机 |
CN111146313A (zh) * | 2019-03-08 | 2020-05-12 | 欧浦登(顺昌)光学有限公司 | 晶硅片微纳浊透复合绒面的制备方法及其应用 |
CN111843836A (zh) * | 2019-04-29 | 2020-10-30 | 苏州澳京光伏科技有限公司 | 一种金刚线切割多晶硅片的表面处理方法 |
CN112059921A (zh) * | 2020-07-16 | 2020-12-11 | 马鞍山久特新材料科技有限公司 | 一种高分子耐磨承载轮喷丸、清洗装置 |
CN113211216A (zh) * | 2021-04-23 | 2021-08-06 | 科莱思半导体智造(浙江)有限公司 | 一种半导体硅晶片的抛光设备 |
CN115122245A (zh) * | 2022-06-14 | 2022-09-30 | 广州大学 | 一种柔性轴承内圈加工自适应喷嘴调节装置 |
-
2016
- 2016-09-23 CN CN201610844815.7A patent/CN106392895B/zh active Active
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107932340A (zh) * | 2017-11-01 | 2018-04-20 | 福建晶安光电有限公司 | 一种单面抛光超薄晶圆平坦化加工方法 |
CN109748189A (zh) * | 2019-03-04 | 2019-05-14 | 江苏美科硅能源有限公司 | 定柱式自动悬臂翻棒机 |
CN111146313A (zh) * | 2019-03-08 | 2020-05-12 | 欧浦登(顺昌)光学有限公司 | 晶硅片微纳浊透复合绒面的制备方法及其应用 |
CN111843836A (zh) * | 2019-04-29 | 2020-10-30 | 苏州澳京光伏科技有限公司 | 一种金刚线切割多晶硅片的表面处理方法 |
CN112059921A (zh) * | 2020-07-16 | 2020-12-11 | 马鞍山久特新材料科技有限公司 | 一种高分子耐磨承载轮喷丸、清洗装置 |
CN113211216A (zh) * | 2021-04-23 | 2021-08-06 | 科莱思半导体智造(浙江)有限公司 | 一种半导体硅晶片的抛光设备 |
CN115122245A (zh) * | 2022-06-14 | 2022-09-30 | 广州大学 | 一种柔性轴承内圈加工自适应喷嘴调节装置 |
CN115122245B (zh) * | 2022-06-14 | 2023-05-05 | 广州大学 | 一种柔性轴承内圈加工自适应喷嘴调节装置 |
Also Published As
Publication number | Publication date |
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CN106392895B (zh) | 2019-06-18 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Novel diamond wire polycrystalline silicon sheet surface sand blasting roughening method Effective date of registration: 20191113 Granted publication date: 20190618 Pledgee: China Everbright Bank, Limited by Share Ltd, Nanjing branch Pledgor: Jiangsu Meike Silicon Energy Co., Ltd. Registration number: Y2019320000280 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210127 Granted publication date: 20190618 Pledgee: China Everbright Bank Limited by Share Ltd. Nanjing branch Pledgor: JIANGSU MEIKE SILICON ENERGY Co.,Ltd. Registration number: Y2019320000280 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210207 Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Meike Solar Energy Technology Co.,Ltd. Address before: GANGLONG Road, Yanjiang Industrial Park, Yangzhong City, Zhenjiang City, Jiangsu Province Patentee before: JIANGSU MEIKE SILICON ENERGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
CP01 | Change in the name or title of a patent holder |
Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Meike Solar Energy Technology Co.,Ltd. Address before: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee before: Jiangsu Meike Solar Energy Technology Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder |