CN106380201A - 一种制备异形碳化硼陶瓷的方法 - Google Patents

一种制备异形碳化硼陶瓷的方法 Download PDF

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CN106380201A
CN106380201A CN201610740106.4A CN201610740106A CN106380201A CN 106380201 A CN106380201 A CN 106380201A CN 201610740106 A CN201610740106 A CN 201610740106A CN 106380201 A CN106380201 A CN 106380201A
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黄尚林
张玉书
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Dalian Xing Xing Abrasive Co Ltd
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Abstract

本发明属于陶瓷材料加工领域,公开了一种制备异形碳化硼陶瓷的方法。先用较粗的碳化硼粉和少量较细的碳化硼粉通过初次烧结得到多孔的碳化硼“骨架”,然后通过真空浸渍把较细的碳化硼粉渗入到这些孔隙之中再进行液相烧结,利用孔隙的毛细渗透作用,最后得到相对密度大约为98%TD的碳化硼陶瓷制品。通过多次浸渍和两次烧结后,得到的异形碳化硼陶瓷才用排水法对密度进行测定,产品密度到达了2.46g/cm3,即97.62%TD。这种烧结方法有效的解决了形状复杂的碳化硼陶瓷产品的生产问题,也为其它陶瓷产品提供了一条解决问题的方式。

Description

一种制备异形碳化硼陶瓷的方法
技术领域
本发明属于陶瓷材料加工领域,公开了一种制备异形碳化硼陶瓷的方法。
背景技术
碳化硼在1858年被发现[参考Thevenot F.A Review on Boron Carbide[J].KeyEngineering Materials.1991,(56/57):59-88]碳化硼陶瓷由于具有较高的硬度(显微硬度4950kgf/mm2)硬度仅次于金刚石和立方氮化硼,有较高的熔点陶瓷的烧成工艺方法很多,但是由于碳化硼的熔点较高(2450度),理论密度较小(2.52g/cm3),它还有耐高温、耐酸碱腐蚀、高强度、高化学稳定性等特点广泛用于喷砂嘴、密封件、喷管、轻质防弹装甲和各种核反应堆的芯块【参考EVANS A.G Perspective on the Development of High Toughnessceramics【J】J.AM ceram SOC 1990.73(2):186-193】
碳化硼是一种共价键很强的化合物,其共价键比例高达93.94%,并且塑性差,晶界移动阻力大,固态时表面张力太小,烧结时扩散速率低,所以烧结条件比较苛刻【参考辽宁工学院学报2005.25(6):378-381】。目前常见的碳化硼陶瓷生产方法是热压烧结,但是热压烧结法只能限于生产形状比较简单的产品,对于形状复杂的产品就“望单莫及”了,这极大的限制了碳化硼陶瓷在很多领域的使用。
我们就经常接到很多形状比较复杂化的碳化硼陶瓷产品订单,为满足这种市场需求,我们进行的反复实验,终于利用超细碳化硼在Al2O3—Y2O3的促进作用下可以进行液相烧结的这一特点【参考李文辉等人的碳化硼陶瓷液相烧结试验研究【J】哈尔滨理工大学学报2002.4.2-7】,找到了一种比较适合工业化生产碳化硼“异形”陶瓷的方法,由于这种方法类似于生产等静压石墨的浸渍工艺,所以我们也把这种工艺叫做浸渍烧结法。
发明内容
本发明的目的是找到一种适合工业化生产异形碳化硼陶瓷件的方法,以解决有些领域对碳化硼陶瓷件的需求。
本发明的技术方案:
本发明的原理:先用较粗的碳化硼粉和少量较细的碳化硼粉通过初次烧结得到多孔的碳化硼“骨架”,然后通过真空浸渍把较细的碳化硼粉渗入到这些孔隙之中再进行液相烧结,利用孔隙的毛细渗透作用,最后得到相对密度大约为98%TD的碳化硼陶瓷制品。
一种制备异形碳化硼陶瓷的方法,步骤如下:
(1)浇注成型:将70-85wt%粒度为28微米的碳化硼粉和15-30wt%粒度为0.5微米的碳化硼粉混合得到总碳化硼粉,再添加质量浓度为25-40%的酚醛树脂乙醇溶液、水溶性脂肪烃消泡剂、水性有机分散剂和去离子水,混合分散,得到料浆,料浆中碳化硼质量含量为40-60%;经过1-2小时的静置排汽泡,将料浆浇注到石膏模具中,静置24小时,在50-60℃烘干,然后在180℃温度条件下固化,得到多孔素坯;其中,总碳化硼粉、酚醛树脂的乙醇溶液、水溶性脂肪烃消泡剂和水性有机分散剂的质量比为1:0.1~0.15:0.001~0.003:0.001~0.003;
(2)机械加工:用金刚石刀具将步骤(1)得到的多孔素坯加工得到所需尺寸;
(3)干燥和埋烧:将步骤(2)机械加工得到的多孔素坯在90-110℃温度条件下干燥2h,再埋入装有石墨粉的石墨坩埚中,在真空和惰性气氛条件下,以每分钟2-3℃升温速度烧成,且分别在100℃、290℃和560℃均保温1.5h,烧成温度控制2200度,保温1h,自然降温出炉,得到有较大孔隙率的半成品;
(4)制浸渍料浆:把0.3微米的碳化硼粉、水性有机分散剂、木质素磺酸盐的减水剂、Al2O3和Y2O3按照质量比为4:6混合为烧结促进剂以及有机水性湿润剂加入去离子水中,高速搅拌2-3小时,分散得到浸渍料浆;其中,碳化硼粉、水性有机分散剂、木质素磺酸盐的减水剂、烧结促进剂、有机水性湿润剂和去离子水的质量比为55:0.1~0.3:0.1~0.3:3~10:0.05~0.3:45;
(5)多次浸渍和埋烧:将步骤(3)得到的半成品的表面进行清除,然后将将其放入浸渍料浆中反复进行真空浸渍,取出,在50-60℃温度条件下烘干,再进行真空浸渍,反复多次,直到前后两次烘干质量没有变化为止;把反复浸渍后的半成品再次埋入装有石墨的石墨坩埚中,在真空和惰性气氛条件下,采用与步骤(3)相同的烧成温度进行烧成后冷却出炉;浸渍和埋烧过程重复2次以上,直到密度达到设计要求;
(6)成品:对步骤出炉(5)的产品再次用精细喷砂机对表面和内孔进行喷砂清理,即得到待制备的异形碳化硼陶瓷。
本发明的有益效果:
(1)通过多次浸渍和两次烧结后,得到的异形碳化硼陶瓷才用排水法对密度进行测定,产品密度到达了2.46g/cm3,即97.62%TD.经测试虽然产品的纤维硬度和耐磨性比同型号的热压产品略低,但是对于碳化硼陶瓷在一些特殊领域的应用是一种有效的补充。
(2)虽然进行了三次烧成,但是由于这种烧结方式没有使用石墨模具,所以真空烧结炉内的空间被很好的利用,采用热压烧结时每炉平均出成品的重量是15公斤左右,采用浸渍烧结法后,由于少量石墨模具和其他辅助碳件对炉内空间的占用,每一循环烧成的产品重量平均可以达到45公斤以上,所以烧成的能耗其实比热压烧结还要略低一些,只是生产周期较长和过程比较复杂。
(3)这种烧结方法有效的解决了形状复杂的碳化硼陶瓷产品的生产问题,也为其它陶瓷产品提供了一条解决问题的方式。
具体实施方式
以下技术方案,进一步说明本发明的具体实施方式。
实施例
一种制备异形碳化硼陶瓷的方法,步骤如下:
(1)先将30克酚醛树脂溶于100无水酒精中形成树脂液,然后把这种树脂液与丙烯酸钠盐聚合物类的分散剂1.5克、脂肪烃类消泡剂1.5克、粒度0.2微米Al2O3-Y2O3(质量比为4:6)50克与850克28微米的碳化硼粉、150克0.5微米碳化硼粉和718克去离子水混到一起后用分散机高速搅拌得到稳定的浆体后静置2h排掉体系内的气泡。
(2)将上述料浆浇注到加工好的石膏模具中,同时轻轻震动模具,以便排出料浆内的气泡和促进料浆完全填满模具的每一个角落。然后将模具在不通风的室内静置24h,让石膏模具吸收料浆内的水分。
(3)再将模具放入到烘干箱内,用55度慢速进行10小时以上烘干,彻底烘干后将温度以2-5℃/min的速度提高到180℃,对坯体内的酚醛树脂进行固化,固化时间为4小时,冷却后卸模,得到有一定机械强度的多孔生坯。
(4)由于树脂得到固化,所以可以使用金刚石刀具等把多孔生坯加工到需要的尺寸,同时淘汰掉在浇注和脱模时产生缺陷的产品。
(5)初次埋烧:机械加工完成后的素坯再次在105℃进行3h干燥后埋入到有石墨粉的石墨坩埚中,用真空烧结炉在氩气气氛中进行烧成,烧成温度曲线要求升温缓慢(控制在2-3℃/min),在100℃、290℃和560℃均保温1.5h,以便体系内的挥发物彻底排除和结合剂充分碳化,烧成温度控制2200℃,保温1h后自然降温出炉,得到有较大孔隙率的半成品。
(6)浸渍用料浆:把大连正兴磨料有限公司生产的0.35微米的碳化硼粉1000克、丙烯酸钠盐聚合物类的分散剂1.5克、木质素磺酸盐减水剂1.5克、50克0.2微米Al2O3-Y2O3(质量比为4:6)和烷芳基聚醚醇湿润剂1克加入到818.2克去离子水中,1000-1200r/min高速搅拌4h以上彻底分散后得到浸渍备用料浆。
(7)将毛坯的表面用精细喷砂机进行清理,然后将坯件放到到浸渍料浆中进行真空浸渍,让超细的碳化硼颗粒随水渗入到坯件内部后取出烘干再进行真空浸渍,反复多次,直到两次烘干后质量没有变化为止。
(8)再次埋烧:把反复浸渍后的半成品再次埋入有石墨的石墨坩埚中,在真空烧结炉内进行烧结,烧结过程同初次埋烧,烧成终点温度为2200℃,保温时间2h(根据工件大小适当浮动),然后慢速冷去出炉。
(9)再次重复第7-8条的操作后,对出炉的产品再次用精细喷砂机对表面和内孔进行喷砂清理即得到我们要的产品。

Claims (1)

1.一种制备异形碳化硼陶瓷的方法,其特征在于,步骤如下:
(1)浇注成型:将70-85wt%粒度为28微米的碳化硼粉和15-30wt%粒度为0.5微米的碳化硼粉混合得到总碳化硼粉,再添加质量浓度为25-40%的酚醛树脂乙醇溶液、水溶性脂肪烃消泡剂、水性有机分散剂和去离子水,混合分散,得到料浆,料浆中碳化硼质量含量为40-60%;经过1-2小时的静置排汽泡,将料浆浇注到石膏模具中,静置24小时,在50-60℃烘干,然后在180℃温度条件下固化,得到多孔素坯;其中,总碳化硼粉、酚醛树脂的乙醇溶液、水溶性脂肪烃消泡剂和水性有机分散剂的质量比为1:0.1~0.15:0.001~0.003:0.001~0.003;
(2)机械加工:用金刚石刀具将步骤(1)得到的多孔素坯加工得到所需尺寸;
(3)干燥和埋烧:将步骤(2)机械加工得到的多孔素坯在90-110℃温度条件下干燥2h,再埋入装有石墨粉的石墨坩埚中,在真空和惰性气氛条件下,以每分钟2-3℃升温速度烧成,且分别在100℃、290℃和560℃均保温1.5h,烧成温度控制2200度,保温1h,自然降温出炉,得到有较大孔隙率的半成品;
(4)制浸渍料浆:把0.3微米的碳化硼粉、水性有机分散剂、木质素磺酸盐的减水剂、Al2O3和Y2O3按照质量比为4:6混合为烧结促进剂以及有机水性湿润剂加入去离子水中,高速搅拌2-3小时,分散得到浸渍料浆;其中,碳化硼粉、水性有机分散剂、木质素磺酸盐的减水剂、烧结促进剂、有机水性湿润剂和去离子水的质量比为55:0.1~0.3:0.1~0.3:3~10:0.05~0.3:45;
(5)多次浸渍和埋烧:将步骤(3)得到的半成品的表面进行清除,然后将将其放入浸渍料浆中反复进行真空浸渍,取出,在50-60℃温度条件下烘干,再进行真空浸渍,反复多次,直到前后两次烘干质量没有变化为止;把反复浸渍后的半成品再次埋入装有石墨的石墨坩埚中,在真空和惰性气氛条件下,采用与步骤(3)相同的烧成温度进行烧成,然后冷却出炉;浸渍和埋烧过程重复2次以上,直到密度达到要求;
(6)成品:对步骤出炉(5)的产品再次用精细喷砂机对表面和内孔进行喷砂清理,即得到待制备的异形碳化硼陶瓷。
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109279909A (zh) * 2018-10-29 2019-01-29 宁波伏尔肯科技股份有限公司 一种高强度碳化硼多孔陶瓷的制备方法
CN111943680A (zh) * 2020-08-10 2020-11-17 宁波普莱斯帝金属制品有限公司 一种碳化硼材料的制备方法及其应用
CN114656277A (zh) * 2022-03-17 2022-06-24 南通三责精密陶瓷有限公司 一种环保型无压烧结碳化硼陶瓷材料的制造方法
CN115403406A (zh) * 2022-10-17 2022-11-29 上海大学 一种氧化镁多孔陶瓷的制备方法
EP4089065A4 (en) * 2020-02-12 2024-03-27 Sk Enpulse Co Ltd CERAMIC COMPONENT AND PLASMA ETCHING DEVICE THEREFROM

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1438201A (zh) * 2003-03-14 2003-08-27 李文辉 液相烧结碳化硼陶瓷材料及其制品的制造方法
CN1552664A (zh) * 2003-12-19 2004-12-08 李文辉 液相烧结复合碳化物陶瓷材料及其陶瓷制品的制造方法
CN103979971A (zh) * 2014-04-09 2014-08-13 宁波东联密封件有限公司 一种液相烧结碳化硼防弹材料及其制备方法
CN104628387A (zh) * 2015-02-07 2015-05-20 宁波伏尔肯机械密封件制造有限公司 一种异型碳化硼陶瓷喷砂嘴的制备方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1438201A (zh) * 2003-03-14 2003-08-27 李文辉 液相烧结碳化硼陶瓷材料及其制品的制造方法
CN1552664A (zh) * 2003-12-19 2004-12-08 李文辉 液相烧结复合碳化物陶瓷材料及其陶瓷制品的制造方法
CN103979971A (zh) * 2014-04-09 2014-08-13 宁波东联密封件有限公司 一种液相烧结碳化硼防弹材料及其制备方法
CN104628387A (zh) * 2015-02-07 2015-05-20 宁波伏尔肯机械密封件制造有限公司 一种异型碳化硼陶瓷喷砂嘴的制备方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109279909A (zh) * 2018-10-29 2019-01-29 宁波伏尔肯科技股份有限公司 一种高强度碳化硼多孔陶瓷的制备方法
CN109279909B (zh) * 2018-10-29 2021-07-02 宁波伏尔肯科技股份有限公司 一种高强度碳化硼多孔陶瓷的制备方法
EP4089065A4 (en) * 2020-02-12 2024-03-27 Sk Enpulse Co Ltd CERAMIC COMPONENT AND PLASMA ETCHING DEVICE THEREFROM
CN111943680A (zh) * 2020-08-10 2020-11-17 宁波普莱斯帝金属制品有限公司 一种碳化硼材料的制备方法及其应用
CN114656277A (zh) * 2022-03-17 2022-06-24 南通三责精密陶瓷有限公司 一种环保型无压烧结碳化硼陶瓷材料的制造方法
CN114656277B (zh) * 2022-03-17 2022-12-27 南通三责精密陶瓷有限公司 一种环保型无压烧结碳化硼陶瓷材料的制造方法
CN115403406A (zh) * 2022-10-17 2022-11-29 上海大学 一种氧化镁多孔陶瓷的制备方法

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