CN106315227A - Conveying system - Google Patents
Conveying system Download PDFInfo
- Publication number
- CN106315227A CN106315227A CN201610804269.4A CN201610804269A CN106315227A CN 106315227 A CN106315227 A CN 106315227A CN 201610804269 A CN201610804269 A CN 201610804269A CN 106315227 A CN106315227 A CN 106315227A
- Authority
- CN
- China
- Prior art keywords
- delivery roller
- housing
- sprinkler head
- feed tube
- transmission system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G45/00—Lubricating, cleaning, or clearing devices
- B65G45/10—Cleaning devices
- B65G45/22—Cleaning devices comprising fluid applying means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a conveying system. The conveying system comprises a cleaning device and a plurality of conveying roller wheels, wherein the cleaning device comprises a plurality of first spraying heads; at least one conveying roller wheel corresponds to at least one first spraying head; each conveying roller wheel is capable of rotating with respect to the corresponding first spraying head; each first spraying head is capable of spraying a detergent for cleaning the corresponding conveying roller wheel. The conveying system disclosed by the invention is capable of solving the problems of pollution and low cleaning efficiency caused by manually cleaning the roller wheels in the prior art and is also capable of increasing the operation ratio of equipment.
Description
Technical field
The present invention relates to equipment manufacturing technology field, particularly relate to a kind of transmission system.
Background technology
In liquid crystal panel production process, it is often necessary to use transfer roller.Transfer roller has the merits such as carrying, transmission, para-position
Can, have a wide range of applications in the process equipments such as wet etching.Although it is convenient that transfer roller can be served for the conveyer belt of glass, but
If being irregularly maintained, then the problem such as pollution easily causing glass.
Under normal circumstances, the roller of transfer roller directly contacts with glass, and usually can assemble on the roller of transfer roller
The particulate matters such as dust, so the requirement of pair of rollers cleaning frequency and cleannes is higher.Periodically to transmission in prior art
The cleaning way when roller of roller cleans, for using hydraulic giant to rinse in turn, so causes cleaning duration long, have impact on equipment
Mobility；And due to artificial flushing it is difficult to ensure that each roller rinse standardization and homogeneity.
Summary of the invention
It is contemplated that at least solve one of technical problem present in prior art, it is proposed that a kind of transmission system.
For achieving the above object, as one aspect of the present invention, it is provided that a kind of transmission system, described transmission system includes
Cleaning device and multiple delivery roller, wherein, described cleaning device includes multiple first sprinkler head, and at least one described transmission is rolled
Wheel at least one described first sprinkler head corresponding, each described delivery roller can spray relative to corresponding described first
Head rotates, and described first sprinkler head can spray cleaning agent, to clean corresponding described delivery roller.
Preferably, described first sprinkler head includes the first housing, described first housing towards described delivery roller wall with
Being provided with gap between described delivery roller, be formed with the first receiving chamber in described first housing, described first housing is towards institute
State to be formed on the wall of delivery roller and accommodate at least one spray hole that chamber connects, and shape on described first housing with described first
Described in Cheng Youyu, first accommodates the inlet opening of chamber connection.
Preferably, the first housing of described first sprinkler head is also formed with connecting with described first receiving chamber first enters
Pore.
Preferably, described first housing accommodates chamber inner recess to described first, with shape towards the wall of described delivery roller
Becoming holding tank, a part for described delivery roller is positioned in described holding tank.
Preferably, at least one described first sprinkler head also includes the polishing piece being arranged in described holding tank, described wiping
Wiping part to contact with the surface of described delivery roller, described cleaning agent can arrive on described delivery roller through described polishing piece.
Preferably, described cleaning device also includes that first is dried head, and described transmission system includes along direction of transfer arrangement
Inlet region, working area and outlet area, described working area includes the liquid rinse subregion set gradually along direction of transfer and is dried
Subregion, in described inlet region, described dry subregion and described outlet area, each described delivery roller also corresponding at least one
Described first is dried head, and described first is dried head includes the second housing, is formed with the second receiving chamber in described second housing, described
Second housing is formed with at least one fumarole connected with described second receiving chamber, and institute on the wall of described delivery roller
State to be formed on the second housing and accommodate, with described second, the second air inlet that chamber connects.
Preferably, the central angle of the described delivery roller that described first housing is corresponding with described second housing is less than
180°。
Preferably, described working area also includes the sub-district of etching being arranged between inlet region and described liquid rinse subregion
Territory, the most corresponding described first sprinkler head of described delivery roller in described etching subregion.
Preferably, at least side of the width of described dry subregion is provided with clamping device, described clamping device
Including the multipair hold-down roll sending direction to arrange described in edge, it is formed between clamping substrate between every pair of described hold-down roll
Every, each described hold-down roll being provided with the second sprinkler head and second and is dried head, described second sprinkler head is used for cleaning described
Hold-down roll, described second is dried head for being dried the surface of described hold-down roll.
Preferably, the structure of described second sprinkler head is identical with the structure of described first sprinkler head, and described second is dried head
Structure be dried the structure of head with described first identical.
Preferably, the surface configuration of described hold-down roll has crystal o-ring.
Preferably, described cleaning device also includes organizing feed tube more and organizing air inlet pipe more, often organize described feed tube include to
A few described feed tube, often organizes described air inlet pipe and includes at least one described air inlet pipe, and the two ends often organizing described feed tube are divided
Not be positioned at same a line or the inlet opening connection with two described first sprinkler heads adjacent in string, often organize described air inlet pipe
Two ends respectively be positioned at same a line or with two described first adjacent in string be dried head described second air inlets connection.
Preferably, often organize described feed tube and include multiple described feed tube,
The described cleaning agent of the multiple described feed tube input in same group of feed tube is identical；Or
When being also formed with accommodating, with described first, the first air inlet that chamber connects on the first housing of described first sprinkler head
Time, at least one in the multiple described feed tube in same group of feed tube connects with the first air inlet of described first sprinkler head
Logical, and for inputting the cleaning agent different from the cleaning agent of feed tube input other described.
The transmission system that the present invention provides, by arranging the sprinkler head that can spray cleaning agent on delivery roller, works as rolling
The cleaning agent that when wheel rotates, sprinkler head sprays can the surface of cleaning roller, solve artificial cleaning roller in prior art and easily carry
Pollute and problem that cleaning efficiency is low, also improve the mobility of equipment simultaneously.
Accompanying drawing explanation
Accompanying drawing is used to provide a further understanding of the present invention, and constitutes the part of description, with following tool
Body embodiment is used for explaining the present invention together, but is not intended that limitation of the present invention.In the accompanying drawings:
A kind of structural representation of the first sprinkler head that delivery roller is corresponding in the transmission system that Fig. 1 provides for the present invention；
The another kind of structural representation of the first sprinkler head that delivery roller is corresponding in the transmission system that Fig. 2 provides for the present invention
Figure；
The first sprinkler head and first that in the transmission system that Fig. 3 provides for the present invention, delivery roller is corresponding is dried the structure of head
Schematic diagram；
The structural representation between delivery roller and cleaning device in the transmission system that Fig. 4 provides for the present invention；
Be dried in the transmission system that Fig. 5 provides for the present invention between delivery roller and the cleaning device in subregion is vertical
Tangent plane schematic diagram in direction of transfer.
Wherein, the 1, first sprinkler head；10, the first housing；101, first accommodates chamber；102, inlet opening；103, spray hole；
104, the first air inlet；105, holding tank；106, polishing piece；11, feed tube；12, the first feed tube；121, the first infusion port；
13, the second feed tube；131, the second infusion port；2, first it is dried head；20, the second housing；201, second accommodates chamber；202, second
Air inlet；203, fumarole；21, air inlet pipe；30, delivery roller；31, hold-down roll；32, the second sprinkler head；33, second it is dried
Head；40, inlet region；41, liquid rinse subregion；42, it is dried subregion；43, outlet area；44, etching subregion；50, substrate.
Detailed description of the invention
Below in conjunction with accompanying drawing, the detailed description of the invention of the present invention is described in detail.It should be appreciated that this place is retouched
The detailed description of the invention stated is merely to illustrate and explains the present invention, is not limited to the present invention.
It should be noted that the noun of locality mentioned in the present invention " on ", D score etc., refer both to the direction shown in accompanying drawing.
As one aspect of the present invention, it is provided that a kind of transmission system, as shown in figures 1 and 3, described transmission system includes
Cleaning device and multiple delivery roller 30, wherein, described cleaning device includes multiple first sprinkler head 1, and at least one transmits rolling
Wheel 30 at least one first sprinkler head 1 corresponding, each delivery roller 30 can revolve relative to corresponding first sprinkler head 1
Turning, the first sprinkler head 1 can spray cleaning agent, to clean corresponding delivery roller 30.
The transmission system that the present invention provides, by arranging the sprinkler head that can spray cleaning agent on delivery roller, works as rolling
The cleaning agent that when wheel rotates, sprinkler head sprays can the surface of cleaning roller, solve artificial cleaning roller in prior art and easily carry
Pollute and problem that cleaning efficiency is low, also improve the mobility of equipment simultaneously.
Specifically, in described transmission system, it usually needs substrate etc. is transmitted by multiple delivery rollers 30, described clearly
Clean device is arranged in transmission system and can periodically surface to delivery roller 30 be cleaned preventing from substrate etc. is caused dirt
Dye.By arranging multiple first sprinkler head 1 in described cleaning device, the first sprinkler head 1 is corresponding with delivery roller 30, it should reason
Solving, transmit substrate when rotated to not affect delivery roller 30, the first sprinkler head 1 is usually located at the side of delivery roller 30
Side or lower section, the first sprinkler head 1 as shown in figures 1 and 3 is positioned at the side of delivery roller 30.By described cleaning device pair
When the surface of delivery roller 30 is cleaned, the position of each first sprinkler head 1 need not change, it is only necessary to each delivery roller
30 rotate, and cleaning agent is sprayed to each transmission by the first then corresponding with the delivery roller 30 of each rotation sprinkler head 1
The surface of roller 30, it is achieved that the cleaning to delivery roller 30.
As a kind of embodiment of the first sprinkler head 1, in order to realize the first sprinkler head 1 to spray the merit of cleaning agent
Can, specifically, as shown in figures 1 and 3, the first sprinkler head 1 includes the first housing 10, and the first housing 10 is towards delivery roller 30
Being provided with gap between wall and delivery roller 30, be formed with the first receiving chamber 101 in the first housing 10, the first housing 10 is towards biography
Send to be formed on the wall of roller 30 and accommodate at least one spray hole 103 that chamber 101 connects with first, and formed on the first housing 10
Have and accommodate, with first, the inlet opening 102 that chamber 101 connects.
It is understood that the first housing 10 is provided with gap towards between the wall and delivery roller 30 of delivery roller 30,
Delivery roller 30 can normally be rotated, normal rotation will not be affected due to the existence of the first housing 10.First housing
10 the first receiving chambeies 101 formed are used for accommodating described cleaning agent, and described cleaning agent enters into the first receiving by inlet opening 102
Chamber 101, when being cleaned delivery roller 30, the first described cleaning agent accommodated in chamber 101 is sprayed to by spray hole 103
On the surface of delivery roller 30.
It should be noted that spray hole 103 can be to use form as shown in Figure 1, it is also possible to use a plurality of interval to set
The form in the gap put, it is for instance possible to use three gaps or five gaps etc., so can spray described cleaning agent uniformly
Spill to the surface of delivery roller 30.
In order to realize utilizing the cleaning agent of various ways that delivery roller 30 is cleaned, as in figure 2 it is shown, the
It is also formed with on first housing 10 of one sprinkler head 1 accommodating, with first, the first air inlet 104 that chamber 101 connects.
Specifically, the described cleaning agent of liquid can be inputted by the first sprinkler head 1 as shown in Figure 1 by inlet opening 102
Accommodating in chamber 101 to first, the first sprinkler head 1 as shown in Figure 2, in addition to being provided with inlet opening 102, is additionally provided with first and enters
Pore 104, it is possible to realize being input in the first receiving chamber 101 by inlet opening 102 by one liquid, then by first
Air inlet 104 inputs a kind of gas and accommodates in chamber 101 to first, and described liquid and described gas are mixed within first accommodates chamber 101
Close the described cleaning agent required for being formed.
Preferably, such as, the described cleaning agent of selection is deionized water and CDA (Clear Dry Air, clean dried pressure
Contracting air) mixing after formed two fluids, when the first sprinkler head 1 uses setting as shown in Figure 1, the i.e. first housing 10 only sets
When being equipped with inlet opening 102, deionized water and CDA are first to mix to form described cleaning agent afterwards, are then passed through high tension unit etc. and pass through
Inlet opening 102 is input in the first receiving chamber 101.When the first sprinkler head 1 uses setting as shown in Figure 2, the i.e. first housing 10
On when being provided with inlet opening 102 and the first air inlet 104, deionized water enters into the first receiving chamber 101 by inlet opening 102
In, CDA enters in the first receiving chamber 101 by the first air inlet 104, and now, deionized water and CDA accommodate chamber first
Carry out in 101 being mixed to form described cleaning agent.
It should be appreciated that described cleaning agent is directly to be inputted by inlet opening 102 or mixed within first accommodates chamber 101
Forming two kinds of different implementations of simply described cleaning agent after conjunction, cleaning effect is identical, specifically can be according to scene
Equipment etc. carry out selecting to use which kind of mode.
So that the shape of the first sprinkler head 1 can preferably be mated to enter delivery roller 30 with delivery roller 30
Row cleaning, as a kind of embodiment of the first housing 10, as depicted in figs. 1 and 2, the first housing 10 is towards delivery roller 30
Wall accommodates chamber 101 inner recess to first, and to form holding tank 105, a part for delivery roller 30 is positioned in holding tank 105.
The shape of such first sprinkler head 1 preferably can be mated with delivery roller 30, in order to carries out the surface of delivery roller 30
Cleaning.
In order to further ensure the cleanliness factor on delivery roller 30 surface, the surface of delivery roller 30 can be wiped
Wipe, accordingly, as the another embodiment of the first sprinkler head 1, in described transmission system, at least one first sprinkler head 1
Also including the polishing piece 106 being arranged in holding tank 105, polishing piece 106 contacts with the surface of delivery roller 30, described cleaning agent
Can arrive on delivery roller 30 through polishing piece 106.
Preferably, polishing piece 106 can select sponge, described cleaning agent to be sprayed on described sponge, by described sponge
The surface of delivery roller 30 is carried out wiping.It is understood that after each wiping terminates, can be by sponge disassembly & recycling.
When selecting sponge as polishing piece, the thickness of sponge can roll to transmission towards the wall of delivery roller 30 according to the first housing 10
The distance of wheel 30 selects, and specifically, the first housing 10 is usual to the distance of delivery roller 30 towards the wall of delivery roller 30
For 5mm, so the thickness of described sponge is preferably 5mm.
At the part operation interval of described transmission system, the surface of delivery roller 30 is completed by polishing piece 106 wiping
After, generally also need to the surface of delivery roller 30 is dried, accordingly, as one specifically embodiment, such as Fig. 3 institute
Showing, described cleaning device also includes first dry 2, and described transmission system includes the inlet region along direction of transfer arrangement, work
District and outlet area, described working area includes the liquid rinse subregion that sets gradually along direction of transfer and dry subregion, in institute
State inlet region, described dry subregion and described outlet area, the most corresponding at least one first dry 2 of each delivery roller 30,
Including the second housing 20, be formed with the second receiving chamber 201 in the second housing 20 for first dry 2, the second housing 20 is towards transmission
It is formed on the wall of roller 30 and accommodates, with second, at least one fumarole 203 that chamber 201 connects, and be formed on the second housing 20
The second air inlet 202 that chamber 201 connects is accommodated with second.
Specifically, described transmission system is generally divided into multiple operation interval so that carrying out the substrate transmitted not
With operation, such as, Fig. 4 show the structural representation of transmission system, according to the direction of transfer of described transmission system (such as Fig. 4
Direction shown in middle arrow) described transmission system can be divided into inlet region 40, working area and outlet area 43, inlet region 40 He
Outlet area 43 is described transmission system and transmits the entrance and exit of substrate 50, and described working area is permissible according to direction of transfer
Being divided into liquid rinse subregion 41 and dry subregion 42, the delivery roller 30 of inlet region 40, working area and outlet area 43 is equal
Needs are cleaned, so being provided with the first sprinkler head 1.As shown in Figure 4, working area is divided into liquid according to direction of transfer
Cleaning subregion 41 and dry subregion 42, the delivery roller 30 being positioned in liquid rinse subregion 41 is by the first sprinkler head 1
Spray described cleaning agent to be cleaned.But in inlet region 40, outlet area 43 and dry subregion 42, except by first
Described cleaning agent is sprayed to outside the surface of delivery roller 30 by sprinkler head 1, in order to meet the requirement to aridity of these regions, also
The surface needing the delivery roller 30 after being cleaned described cleaning agent by first dry 2 is dried.Preferably, Ke Yitong
Cross and the second receiving chamber 201 is set on first dry 2, then by second air inlet 202 in the second receiving chamber 201 to second
It is passed through gas in accommodating chamber 201, accommodates the fumarole on chamber 201 to the surface jet body of delivery roller 30 to be dried by second
The surface of delivery roller 30, further, the described gas being passed through in the second receiving chamber 201 is preferably CDA.Specifically, such as Fig. 4
Shown in Fig. 5, the delivery roller 30 being positioned in dry subregion 42, in addition to correspond to the first sprinkler head 1, also correspond to first
Dry 2.
It is understood that so that first be dried the shape of 2 preferably can mate with delivery roller 30 so that
Being dried the surface of delivery roller 30, as the shape of previously described first housing 10, the second housing 20 is towards biography
Send the wall of roller 30 to accommodate chamber 201 inner recess to second, define the cell body of the part accommodating delivery roller 30, such the
The shape of one dry 2 preferably can be mated with delivery roller 30 so that being dried the surface of delivery roller 30.
As it was noted above, in inlet region 40, the delivery roller 30 that is dried in subregion 42 and outlet area 43 is except corresponding the
One sprinkler head 1 outer the most corresponding first is dried 2, and the first sprinkler head 1 is provided with the first housing 10, and first is dried 2 is provided with the
Two housings 20, in order to not affect delivery roller 30 normal substrate 50 that transmits in described transmission system, the first housing 10 and the
The central angle of the delivery roller 30 of two housing 20 correspondences is less than 180 °.
Preferably, the central angle that the first housing 10 is corresponding on delivery roller 30 such as can be 90 °, and the second housing 20 exists
Central angle corresponding on the same delivery roller 30 corresponding with the first housing 10 such as can be 65 °, transmits rolling same
On wheel 30, total center of circle angle of the delivery roller 30 corresponding to the first housing 10 and the second housing 20 is not above 180 °, this
The side that sample is not provided with the first housing 10 and the second housing 20 at delivery roller 30 can transmit substrate 50 normally.Should manage
Solve, transmit substrate 50, the first housing 10 and the second housing 20 normally corresponding same to not affect delivery roller 30
On individual delivery roller 30, spacing distance the most should be not excessive.
It should be noted that as shown in Figure 4, described working area also includes being arranged on inlet region 40 and liquid rinse subregion
Etching subregion 44 between 41, the most corresponding first sprinkler head 1 of delivery roller 30 in etching subregion 44.
Delivery roller 30 owing to being positioned in etching subregion 44 is long period of soaking in etching medicinal liquid, therefore need not
Be cleaned the delivery roller 30 in this region by described cleaning agent, i.e. delivery roller 30 in this region need not correspondence
First sprinkler head 1.
Occur when transmitting substrate 50 skidding to damage base in order to avoid being positioned at the delivery roller 30 of dry subregion 42
The problem of sheet 50 occurs, as shown in Figure 4 and Figure 5, at least side of the width being dried subregion 42 is provided with clamping device,
Described clamping device include along described in send direction to arrange multipair hold-down roll 31, be formed between every pair of hold-down roll 31 for
The interval of clamping substrate 50, each hold-down roll 31 is provided with the second sprinkler head 32 and second and is dried 33, the second sprinkler head
32 are used for cleaning hold-down roll 31, and second dry 33 for being dried the surface of hold-down roll 31.
Specifically, the delivery roller 30 being dried in subregion 42 is relatively dry due to surface, and frictional force is little, so passing through
At least side of the width being dried subregion 42 arranges clamping device to ensure the stability that substrate 50 transmits.Preferably,
Being provided with clamping device in the both sides of the width of dry subregion 42, described clamping device is preferably along described sender
To arrangement multipair hold-down roll 31, herein it is understood that the shape of hold-down roll 31 preferably with previously described transmission
The shape of roller 30 is identical.Every pair of hold-down roll 31 will be cleaned, and owing to hold-down roll 31 is positioned at dry subregion 42,
Therefore, each hold-down roll 31 is all correspondingly arranged on the second sprinkler head 32 and second and is dried 33, the effect of the second sprinkler head 32
It is identical in the effect of the first sprinkler head 1, for described cleaning agent is sprayed to the surface of hold-down roll 31 to clean hold-down roll
31, second be dried 33 act on first be dried 2 effect identical, by the surface spray drying dryness of hold-down roll 31
Body, with the surface of dry hold-down roll 31.
The most specifically, the structure of the second sprinkler head 32 is identical with the structure of the first sprinkler head 1, second dry 33
The structure that structure is dry with first 2 is identical.The structure of the first sprinkler head 1 described above is all applicable to the second sprinkler head 32,
The structure of hereinbefore described first dry 2 is the most all applicable to second dry 33, so about the second sprinkler head 32
Structure and second be dried the structure of 33 be all referred to the first sprinkler head 1 describe and first be dried 2 description, the most not
Repeat again.
In order to increase the frictional force between hold-down roll 31 and the substrate 50 transmitted further, in case beating occurs in substrate 50
The phenomenons such as cunning, the surface configuration of hold-down roll 31 has crystal o-ring (not shown).
In order to realize the input of described cleaning agent, specifically, as shown in Figure 1 to Figure 3, described cleaning device also includes many groups
Feed tube 11 and many group air inlet pipe 21, often group feed tube 11 includes at least one feed tube 11, and often group air inlet pipe 21 includes at least
One air inlet pipe 21, often group feed tube 11 two ends respectively be positioned at same a line or with two the first sprinkler heads adjacent in string
The inlet opening 102 of 1 connects, often the two ends of group air inlet pipe 21 respectively be positioned at same a line or with adjacent in string two first dry
Described second air inlet 202 of dry 2 connects.
Specifically, as it is shown in figure 1, as a example by shown in scheming group feed tube 11, this group feed tube 11 includes that two are entered
Liquid pipe, the respectively first feed tube 12 and the second feed tube 13, the two ends of the first feed tube 12 and the second feed tube 13 respectively with
Be positioned at same a line or the inlet opening 102 with adjacent two the first sprinkler heads 1 in string connect, it is to be understood that described clearly
Clean dose to enter in feed tube 11, in addition it is also necessary to arranges infusion port on feed tube 11, as it is shown in figure 1, the first feed tube 12
On be provided with the first infusion port 121, the second feed tube 13 is provided with the second infusion port 131, described cleaning agent can be by two
Individual infusion port is entered in the first receiving chamber 101 then being entered into the first sprinkler head 1 in feed tube 11 by feed tube 11.
It should be appreciated that the number often organizing the feed tube included in feed tube 11 can be selected according to practical situation
Selecting, the number of one group of feed tube in Fig. 1 is only used as example.
Being preferably carried out mode as one, often group feed tube 11 includes multiple described feed tube, same group of feed tube 11
In multiple described feed tube input cleaning agent identical；Or when the first sprinkler head 1 the first housing 10 on be also formed with
During the first air inlet 104 that first accommodates chamber 101 connection, in multiple described feed tube at least in same group of feed tube 11
Individual the first air inlet 104 with the first sprinkler head 1 connects, and different from the cleaning agent of feed tube input other described for input
Cleaning agent.
As it was noted above, according to whether being provided with the first air inlet 104 on the first housing 10 of the first sprinkler head 1, determine
The cleaning agent of the multiple described feed tube input in same group of feed tube 11 is the most identical.The first housing when the first sprinkler head 1
When being not provided with the first air inlet 104 on 10, the multiple described feed tube in same group of feed tube 11 all inputs identical cleaning
Agent, is then entered in the first receiving chamber 101 by the inlet opening 102 on the first receiving chamber 101.The institute inputted by which
State cleaning agent can be previously described deionized water and CDA mixing after formed two fluids.
When being provided with the first air inlet 104 on the first housing 10 of the first sprinkler head 1, in same group of feed tube 11 extremely
A few feed tube and the first air inlet 104 connect, if this group feed tube 11 includes two feed tubes, then one of them feed tube
Connecting with the first air inlet 104, another feed tube connects with inlet opening 102, the described feed liquor connected with the first air inlet 104
Pipe input gas, another feed tube be used for infusion fluid, the most previously described, connect with the first air inlet 104 described in
Feed tube input CDA, the feed tube connected with inlet opening 102 input deionized water, CDA and deionized water enter into the first receiving
It is mixed to form cleaning agent after in chamber 101.
It is understood that be provided with the second air inlet 202, same group of air inlet on second housing 20 of first dry 2
The two ends of pipe 21 connect with same a line or with two first adjacent in string second air inlets 202 being dried 2 respectively, are used for
Input gas is to enter in the second receiving chamber 201.
Will also be appreciated that the delivery roller 30 being positioned at dry subregion 42 correspond to the first sprinkler head 1 and first
Dry 2, the first sprinkler head 1 is provided with polishing piece 106, connects with the inlet opening 102 on the first housing of the first sprinkler head 1
Feed tube input can also is that surfactant, such as isopropanolamine, described isopropanolamine is by after polishing piece 106 moistening, logical
Cross polishing piece 106 and the surface of delivery roller 30 is carried out wiping, after wiping terminates, by second on dry with first 2
Air inlet 202 is passed through CDA gas for drying up the table of the delivery roller 30 wiped across through isopropanolamine in the second receiving chamber 201
Face.
Preferably, air inlet pipe and feed tube can select pvc pipe.
It should be appreciated that corresponding with hold-down roll 31 second sprinkler head 32 and second is many to having as being dried 33
Group feed tube and organize air inlet pipe more, its connected mode and above-mentioned first sprinkler head 1 and first dry 2 corresponding identical, herein
Repeat no more.
The transmission system that the present invention provides, is provided with the cleaning device corresponding with delivery roller, at needs to delivery roller
When being cleaned, by cleaning device, the surface of delivery roller is cleaned, this cleaning mode compared to existing technology in logical
Cross artificial mode pair roller cleaning and substantially reduce cleaning time, effectively raise equipment mobility.It addition, the present invention is led to
Cross mode that delivery roller is cleaned by cleaning device compared to existing technology in manually had by the mode such as hydraulic giant or wiping
Preferably homogeneity, cleans more standards and norms, and avoid due to human operational error cause delivery roller scuffing or
The appearance of person's secondary pollution problems.
It is understood that the principle that is intended to be merely illustrative of the present of embodiment of above and the exemplary enforcement that uses
Mode, but the invention is not limited in this.For those skilled in the art, in the essence without departing from the present invention
In the case of god and essence, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.
Claims (13)
1. a transmission system, described transmission system includes cleaning device and multiple delivery roller, it is characterised in that described cleaning
Device includes multiple first sprinkler head, at least one described delivery roller at least one described first sprinkler head corresponding, Mei Gesuo
Stating delivery roller to rotate relative to corresponding described first sprinkler head, described first sprinkler head can spray cleaning
Agent, to clean corresponding described delivery roller.
Transmission system the most according to claim 1, it is characterised in that described first sprinkler head includes the first housing, described
First housing is provided with gap towards between the wall and described delivery roller of described delivery roller, is formed in described first housing
First accommodates chamber, and described first housing accommodates chamber with described first and connects at least towards being formed on the wall of described delivery roller
It is formed on one spray hole, and described first housing and accommodates, with described first, the inlet opening that chamber connects.
Transmission system the most according to claim 2, it is characterised in that also formed on the first housing of described first sprinkler head
Have and accommodate, with described first, the first air inlet that chamber connects.
Transmission system the most according to claim 2, it is characterised in that described first housing is towards the wall of described delivery roller
Accommodating chamber inner recess to described first, to form holding tank, a part for described delivery roller is positioned in described holding tank.
Transmission system the most according to claim 4, it is characterised in that at least one described first sprinkler head also includes arranging
Polishing piece in described holding tank, described polishing piece contacts with the surface of described delivery roller, and described cleaning agent can pass
Described polishing piece arrives on described delivery roller.
Transmission system the most as claimed in any of claims 1 to 5, it is characterised in that described cleaning device also includes
First is dried head, and described transmission system includes inlet region, working area and the outlet area along direction of transfer arrangement, and described working area is wrapped
Include the liquid rinse subregion and dry subregion set gradually along direction of transfer, in described inlet region, described dry subregion
With described outlet area, each described delivery roller also corresponding at least one described first be dried head, described first is dried head includes
Second housing, is formed with the second receiving chamber in described second housing, described second housing is towards shape on the wall of described delivery roller
Described in Cheng Youyu, second accommodates at least one fumarole of chamber connection, and is formed on described second housing and described second receiving
Second air inlet of chamber connection.
Transmission system the most according to claim 6, it is characterised in that described first housing is corresponding with described second housing
The central angle of described delivery roller is less than 180 °.
Transmission system the most according to claim 6, it is characterised in that described working area also includes being arranged on inlet region and institute
State the etching subregion between liquid rinse subregion, the described delivery roller the most corresponding described first in described etching subregion
Sprinkler head.
Transmission system the most according to claim 6, it is characterised in that at least the one of the width of described dry subregion
Side is provided with clamping device, and described clamping device includes the multipair hold-down roll sending direction to arrange described in edge, every pair of described clamping
It is formed with the interval for clamping substrate between roller, each described hold-down roll is provided with the second sprinkler head and second and is dried
Head, described second sprinkler head is used for cleaning described hold-down roll, and described second is dried head for the surface to described hold-down roll
It is dried.
Transmission system the most according to claim 9, it is characterised in that the structure of described second sprinkler head and described first
The structure of sprinkler head is identical, and described second is dried the structure of head, and be dried the structure of head with described first identical.
11. transmission systems according to claim 9, it is characterised in that the surface configuration of described hold-down roll has crystal O type
Ring.
12. transmission systems according to claim 6, it is characterised in that described cleaning device also include organizing more feed tube and
Organize air inlet pipe more, often organize described feed tube and include at least one described feed tube, often organize described air inlet pipe and include at least one institute
State air inlet pipe, often organize the two ends of described feed tube respectively be positioned at same a line or spray with two described first adjacent in string
The inlet opening connection of head, often organize the two ends of described air inlet pipe respectively be positioned at same a line or with adjacent in string two described the
The one described second air inlet connection being dried head.
13. transmission systems according to claim 12, it is characterised in that often organize described feed tube and include multiple described feed liquor
Pipe,
The described cleaning agent of the multiple described feed tube input in same group of feed tube is identical；Or
When being also formed with on the first housing of described first sprinkler head accommodating, with described first, the first air inlet that chamber connects, with
At least one in multiple described feed tube in one group of feed tube connects with the first air inlet of described first sprinkler head, and uses
In the cleaning agent that input is different from the cleaning agent of feed tube input other described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610804269.4A CN106315227B (en) | 2016-09-05 | 2016-09-05 | Conveyer system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610804269.4A CN106315227B (en) | 2016-09-05 | 2016-09-05 | Conveyer system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106315227A true CN106315227A (en) | 2017-01-11 |
| CN106315227B CN106315227B (en) | 2018-07-17 |
Family
ID=57787493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610804269.4A Expired - Fee Related CN106315227B (en) | 2016-09-05 | 2016-09-05 | Conveyer system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106315227B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1046200A (en) * | 1989-03-20 | 1990-10-17 | 纳幕尔杜邦公司 | Fiber heat treatment on tinuous production |
| JPH0523651A (en) * | 1991-07-23 | 1993-02-02 | Hitachi Ltd | Cleaning device |
| CN201164841Y (en) * | 2008-01-26 | 2008-12-17 | 陈旭波 | Planar sheet cleaning machine |
| CN204021829U (en) * | 2014-09-03 | 2014-12-17 | 合肥鑫晟光电科技有限公司 | A kind of washing equipment for roller transmission apparatus |
| CN204866743U (en) * | 2015-07-29 | 2015-12-16 | 北京亿德佳热电工程设备有限公司 | Brush steel pipe belt cleaning device of running roller |
-
2016
- 2016-09-05 CN CN201610804269.4A patent/CN106315227B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1046200A (en) * | 1989-03-20 | 1990-10-17 | 纳幕尔杜邦公司 | Fiber heat treatment on tinuous production |
| JPH0523651A (en) * | 1991-07-23 | 1993-02-02 | Hitachi Ltd | Cleaning device |
| CN201164841Y (en) * | 2008-01-26 | 2008-12-17 | 陈旭波 | Planar sheet cleaning machine |
| CN204021829U (en) * | 2014-09-03 | 2014-12-17 | 合肥鑫晟光电科技有限公司 | A kind of washing equipment for roller transmission apparatus |
| CN204866743U (en) * | 2015-07-29 | 2015-12-16 | 北京亿德佳热电工程设备有限公司 | Brush steel pipe belt cleaning device of running roller |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106315227B (en) | 2018-07-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6315547B2 (en) | Substrate processing equipment | |
| CN110369371B (en) | Large-size silicon wafer cleaning device and cleaning process thereof | |
| CN108262323A (en) | A kind of pinch formula glass cleaning machine and its cleaning method | |
| US10699918B2 (en) | Chemical supply unit and apparatus for treating a substrate | |
| CN104128867A (en) | Tile polishing machine | |
| CN105081930A (en) | Panel polishing device and panel cleaning equipment | |
| CN102779772A (en) | Wafer back surface cleaning device | |
| CN106315227A (en) | Conveying system | |
| CN103035504A (en) | Chemical machinery polishing method and chemical machinery polishing device | |
| CN102909197B (en) | Automatic rack cleaning conveyor of pass-type automobile steering device | |
| CN101374763A (en) | Method and device for processing or treating silicon material | |
| CN203380197U (en) | Wet method smoothing device for steel plate | |
| KR101147653B1 (en) | Apparatus for treating substrates | |
| KR20110107910A (en) | Contact type cleaning device | |
| CN202779014U (en) | Wafer back cleaner | |
| CN208991307U (en) | Glass epoxy cleaning machine | |
| CN103317510A (en) | Robot equipment | |
| CN201625605U (en) | Spray device and cleaning machine | |
| KR101007688B1 (en) | Nozzle for jetting a cleaning solution and apparatus for cleaning a substrate having the same | |
| CN205999280U (en) | Wet processing equipment | |
| KR20160005852A (en) | Apparatus for processing substrate | |
| CN220115539U (en) | Conveying equipment with deep cleaning function | |
| KR102223760B1 (en) | Unit for suppying fluid and substrate processing apparatus using the same | |
| CN218360231U (en) | Oiling device | |
| CN102522321B (en) | Cleaning method for cleaning system in chemical and mechanical grinding |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180717 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |